Flexible pressure sensor
By designing the flexible structure and the layout of insulating gaskets in the pressure sensor, the problem of calibration deviation in existing pressure sensors when using curved surfaces is solved, and the consistency and versatility of calibration are improved.
Patent Information
- Application Number
- CN202421666318.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-15
- Publication Date
- 2025-05-06
- Estimated Expiration
- 2034-07-15
AI Technical Summary
There are differences in existing pressure sensors during production, resulting in deviations in detection pressure, especially when switching from plane to curved surface, affecting the consistency and versatility of calibration.
A flexible pressure sensor is designed, including a lower substrate layer, an upper substrate layer and a piezoelectric inductive layer. By providing the first and second metal electrode layers and corresponding insulating gaskets, the piezoelectric inductive layer is in contact with the electrode layer in the working state and does not contact in the non-working state, thereby ensuring that the calibration start state is the same.
It improves the versatility of the pressure sensor and the consistency of calibration, and reduces calibration interference caused by deformation when using the curved surface.
Smart Images
Figure CN222837716U_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of sensors, and in particular to a flexible pressure sensor. Background Art
[0002] A pressure sensor is a sensor that senses pressure and converts pressure signals into electrical signals according to certain rules. Pressure sensors are usually composed of pressure-sensitive elements and signal processing units and can be used to monitor and test different devices. Pressure sensors have a wide range of applications, such as medical equipment, environmental monitoring, aerospace, industrial automation, consumer electronics, and the automotive industry.
[0003] Pressure sensors can be divided into piezoresistive, capacitive, piezoelectric or other types according to their working principles. Piezoresistive pressure sensors use the piezoresistive effect and generally adopt the form of upper and lower electrodes or single-sided electrodes; capacitive pressure sensors use capacitance changes; and piezoelectric sensors detect pressure changes through the piezoresistive effect of semiconductor materials. The most widely used is the piezoresistive pressure sensor, which has a lower price, higher accuracy and better linearity.
[0004] Although pressure sensors are widely used in various fields, existing pressure sensors have certain differences in the production process, which leads to deviations in the pressure of subsequent detection, especially when they are pasted on a flat surface and then switched to a curved surface. Summary of the invention
[0005] The technical problem to be solved by the present invention is to provide a flexible pressure sensor, which makes the initial state the same when the pressure sensor is calibrated, thereby improving the versatility and consistency of calibration, and is also beneficial in reducing the calibration interference caused by bending deformation of the sensor when used on a curved surface.
[0006] To achieve the above-mentioned purpose, the technical solution adopted by the present invention is: a flexible pressure sensor, comprising: a lower substrate layer, an upper substrate layer and a piezoelectric sensing layer, the lower substrate layer having a first metal electrode layer and a second metal electrode layer arranged at intervals on the surface of the upper substrate layer, a first insulating gasket being arranged on the surface opposite to the lower substrate layer, and a second insulating gasket being arranged on the surface opposite to the lower substrate layer of the second metal electrode layer;
[0007] The piezoelectric sensing layer is arranged on the surface of the lower substrate layer facing the upper substrate layer, one end of the piezoelectric sensing layer is connected to the upper surface of the first insulating gasket, and the other end is connected to the upper surface of the second insulating gasket. In a working state, the lower surface of the piezoelectric sensing layer is in contact with the first metal electrode layer and the second metal electrode layer, and in a non-working state, the lower surface of the piezoelectric sensing layer is not in contact with the first metal electrode layer and the second metal electrode layer.
[0008] The technical solution further improved in the above technical solution is as follows:
[0009] 1. In the above solution, the area of the first insulating spacer is smaller than the area of the first metal electrode layer, and the area of the second insulating spacer is smaller than the area of the second metal electrode layer.
[0010] 2. In the above solution, the first insulating gasket is arranged in the central area of the first metal electrode layer, and the second insulating gasket is arranged in the central area of the second metal electrode layer.
[0011] 3. In the above solution, a lower substrate layer is located between the first metal electrode layer, the second metal electrode layer and the lower substrate layer, and the first metal electrode layer and the second metal electrode layer are arranged on the lower substrate layer.
[0012] 4. In the above solution, an upper substrate layer is located between the piezoelectric sensing layer and the upper substrate layer, and the piezoelectric sensing layer is arranged on the upper substrate layer.
[0013] Due to the application of the above technical solution, the present invention has the following advantages compared with the prior art:
[0014] 1. The flexible pressure sensor of the present invention has a first insulating gasket on the surface of the first metal electrode layer opposite to the lower substrate layer, and a second insulating gasket on the surface of the second metal electrode layer opposite to the lower substrate layer; the piezoelectric sensing layer is arranged on the surface of the upper substrate layer facing the lower substrate layer, one end of the piezoelectric sensing layer is connected to the upper surface of the first insulating gasket, and the other end is connected to the upper surface of the second insulating gasket. In a working state, the lower surface of the piezoelectric sensing layer is in contact with the first metal electrode layer and the second metal electrode layer, and in a non-working state, the lower surface of the piezoelectric sensing layer is not in contact with the first metal electrode layer and the second metal electrode layer, so that when the pressure sensor calibrates the pressure, the initial state is the same, thereby improving the versatility and consistency of calibration, and is also beneficial to reduce the calibration interference caused by the bending deformation of the sensor when used on a curved surface.
[0015] 2. In the flexible pressure sensor of the present invention, a lower substrate layer is located between the first metal electrode layer, the second metal electrode layer and the lower substrate layer, the first metal electrode layer and the second metal electrode layer are arranged on the lower substrate layer, and an upper substrate layer is located between the piezoelectric sensing layer and the upper substrate layer, the piezoelectric sensing layer is arranged on the upper substrate layer. The first metal electrode layer and the second metal electrode layer are arranged on the lower substrate layer, and the piezoelectric sensing layer is arranged on the upper substrate layer, which is more conducive to the processing and production of the device and improves the production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] Attached Figure 1 It is a schematic structural diagram of the flexible pressure sensor of the present invention.
[0017] In the above figures: 1, lower substrate layer; 2, upper substrate layer; 3, piezoelectric sensing layer; 41, first metal electrode layer; 42, second metal electrode layer; 51, first insulating gasket; 52, second insulating gasket; 6, lower substrate layer; 7, upper substrate layer. DETAILED DESCRIPTION
[0018] The present invention can be further understood through the specific embodiments given below, but they are not intended to limit the present invention.
[0019] The present invention will be further described below in conjunction with embodiments:
[0020] Embodiment 1: A flexible pressure sensor, comprising: a lower substrate layer 1, an upper substrate layer 2 and a piezoelectric sensing layer 3, wherein the surface of the lower substrate layer 1 facing the upper substrate layer 2 has a first metal electrode layer 41 and a second metal electrode layer 42 arranged at intervals, a first insulating gasket 51 is arranged on the surface of the first metal electrode layer 41 opposite to the lower substrate layer 1, and a second insulating gasket 52 is arranged on the surface of the second metal electrode layer 42 opposite to the lower substrate layer 1;
[0021] The piezoelectric sensing layer 3 is arranged on the surface of the upper substrate layer 2 facing the lower substrate layer 1. One end of the piezoelectric sensing layer 3 is connected to the upper surface of the first insulating gasket 51, and the other end is connected to the upper surface of the second insulating gasket 52. In the working state, the lower surface of the piezoelectric sensing layer 3 is in contact with the first metal electrode layer 41 and the second metal electrode layer 42. In the non-working state, the lower surface of the piezoelectric sensing layer 3 is not in contact with the first metal electrode layer 41 and the second metal electrode layer 42.
[0022] The area of the first insulating spacer 51 is smaller than the area of the first metal electrode layer 41 , and the area of the second insulating spacer 52 is smaller than the area of the second metal electrode layer 42 .
[0023] The first insulating spacer 51 is disposed in the central area of the first metal electrode layer 41 , and the second insulating spacer 52 is disposed in the central area of the second metal electrode layer 42 .
[0024] By using the flexible pressure sensor of this embodiment, the initial state is the same when the pressure sensor is calibrated, thereby improving the versatility and consistency of calibration. It is also beneficial to reduce calibration interference caused by bending deformation of the sensor when used on a curved surface.
[0025] Embodiment 2: A flexible pressure sensor, comprising: a lower substrate layer 1, an upper substrate layer 2 and a piezoelectric sensing layer 3, wherein the surface of the lower substrate layer 1 facing the upper substrate layer 2 has a first metal electrode layer 41 and a second metal electrode layer 42 arranged at intervals, a first insulating gasket 51 is arranged on the surface of the first metal electrode layer 41 opposite to the lower substrate layer 1, and a second insulating gasket 52 is arranged on the surface of the second metal electrode layer 42 opposite to the lower substrate layer 1;
[0026] The piezoelectric sensing layer 3 is arranged on the surface of the upper substrate layer 2 facing the lower substrate layer 1. One end of the piezoelectric sensing layer 3 is connected to the upper surface of the first insulating gasket 51, and the other end is connected to the upper surface of the second insulating gasket 52. In the working state, the lower surface of the piezoelectric sensing layer 3 is in contact with the first metal electrode layer 41 and the second metal electrode layer 42. In the non-working state, the lower surface of the piezoelectric sensing layer 3 is not in contact with the first metal electrode layer 41 and the second metal electrode layer 42.
[0027] The area of the first insulating spacer 51 is smaller than the area of the first metal electrode layer 41 , and the area of the second insulating spacer 52 is smaller than the area of the second metal electrode layer 42 .
[0028] The first insulating spacer 51 is disposed in the central area of the first metal electrode layer 41 , and the second insulating spacer 52 is disposed in the central area of the second metal electrode layer 42 .
[0029] The lower substrate layer 6 is located between the first metal electrode layer 41 , the second metal electrode layer 42 and the lower substrate layer 1 . The first metal electrode layer 41 and the second metal electrode layer 42 are disposed on the lower substrate layer 6 .
[0030] An upper substrate layer 7 is located between the piezoelectric sensing layer 3 and the upper substrate layer 2 , and the piezoelectric sensing layer 3 is disposed on the upper substrate layer 7 .
[0031] By adopting the flexible pressure sensor of this embodiment, the initial state of the pressure sensor is the same when calibrating the pressure, thereby improving the versatility and consistency of calibration, and is also beneficial to reducing the calibration interference caused by the bending deformation of the sensor when used on a curved surface; in addition, a lower substrate layer is located between the first metal electrode layer, the second metal electrode layer and the lower substrate layer, the first metal electrode layer and the second metal electrode layer are arranged on the lower substrate layer, and an upper substrate layer is located between the piezoelectric sensing layer and the upper substrate layer, the piezoelectric sensing layer is arranged on the upper substrate layer, the first metal electrode layer and the second metal electrode layer are arranged on the lower substrate layer, and the piezoelectric sensing layer is arranged on the upper substrate layer, which is more conducive to the processing and production of the device and improves the production efficiency.
[0032] The above embodiments are only for illustrating the technical concept and features of the present invention, and their purpose is to enable people familiar with the technology to understand the content of the present invention and implement it accordingly, and they cannot be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit of the present invention should be included in the protection scope of the present invention.
Claims
1. A flexible pressure sensor, characterized in that: include: A lower substrate layer (1), an upper substrate layer (2) and a piezoelectric sensing layer (3); the surface of the lower substrate layer (1) facing the upper substrate layer (2) comprises a first metal electrode layer (41) and a second metal electrode layer (42) arranged at intervals; a first insulating gasket (51) is arranged on the surface of the first metal electrode layer (41) opposite to the lower substrate layer (1); and a second insulating gasket (52) is arranged on the surface of the second metal electrode layer (42) opposite to the lower substrate layer (1); The piezoelectric sensing layer (3) is arranged on a surface of the upper substrate layer (2) facing the lower substrate layer (1); one end of the piezoelectric sensing layer (3) is connected to the upper surface of the first insulating gasket (51), and the other end is connected to the upper surface of the second insulating gasket (52); in a working state, the lower surface of the piezoelectric sensing layer (3) is in contact with the first metal electrode layer (41) and the second metal electrode layer (42); in a non-working state, the lower surface of the piezoelectric sensing layer (3) is not in contact with the first metal electrode layer (41) and the second metal electrode layer (42).
2. The flexible pressure sensor according to claim 1, characterized in that: The area of the first insulating gasket (51) is smaller than the area of the first metal electrode layer (41), and the area of the second insulating gasket (52) is smaller than the area of the second metal electrode layer (42).
3. The flexible pressure sensor according to claim 1, characterized in that: The first insulating gasket (51) is arranged in the central area of the first metal electrode layer (41), and the second insulating gasket (52) is arranged in the central area of the second metal electrode layer (42).
4. The flexible pressure sensor according to claim 1, characterized in that: A lower substrate layer (6) is located between the first metal electrode layer (41), the second metal electrode layer (42) and the lower substrate layer (1); the first metal electrode layer (41) and the second metal electrode layer (42) are arranged on the lower substrate layer (6).
5. The flexible pressure sensor according to claim 1, characterized in that: An upper substrate layer (7) is located between the piezoelectric sensing layer (3) and the upper substrate layer (2), and the piezoelectric sensing layer (3) is arranged on the upper substrate layer (7).