Micro-hole electric spark machining working fluid system and electric spark machining machine tool

Abstract

The utility model provides a micro-hole electric spark machining working fluid system and an electric spark machining machine tool. The micro-hole electric spark machining working fluid system comprises a pipeline assembly, a high-pressure fluid supply assembly, a low-pressure fluid supply assembly, a multi-stage filtering assembly and a deionization assembly. The high-pressure liquid supply assembly comprises a booster pump and an electromagnetic valve which are arranged on a pipeline from the water purification area to the main shaft; the low-pressure liquid supply assembly comprises an outer liquid filling pump and a throttling valve which are arranged on a pipeline from the water purification area to the workpiece; the multi-stage filtering assembly comprises a first filter arranged on a pipeline between the liquid receiving disc and the sewage area, a second filter arranged on a pipeline between the sewage area and the clean water area, and a third filter arranged on a pipeline where the high-pressure liquid supply assembly is located; the deionization assembly comprises a deionization pump and a deionization container which are arranged on a pipeline communicated with the water purification area. According to the scheme, the stability of the conductivity of the working solution and the stability of the discharge process are ensured, the arc discharge phenomenon in the subsequent machining discharge process is avoided, chip removal and cooling are facilitated, and carbon deposition, hole blockage or electrode damage are avoided, so that the subsequent machining effect and machining quality are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of electric spark machining, in particular to a micro-hole electric spark machining working fluid system using a water-based working fluid and an electric spark machining machine tool. Background Art

[0002] Electrospark machining is a special machining method that uses the electro-erosion effect generated by pulse discharge between the two electrodes consisting of the tool electrode immersed in the working fluid and the workpiece to erode conductive materials. It is also the mainstream process for machining complex and precise micro-hole structures made of difficult-to-machine materials. When performing electrospark micro-hole machining, the two electrodes between the tool electrode and the workpiece are filled with liquid medium, generally water-based working fluid. The working fluid system supplies the sprayed water-based working fluid to remove chips and cool the machining area. Under the application of electric field energy, the tool electrode is controlled to move toward the workpiece. When the two electrodes reach a certain distance, the liquid medium between the electrodes is broken down, pulse discharge occurs, and the workpiece is eroded.

[0003] However, in the field of EDM precision micro-hole processing, due to the small processing hole diameter, the electro-erosion products after pulse discharge are not conducive to removal, and the working fluid conductivity changes unstably, which leads to arcing in the subsequent processing discharge process, which is easy to produce carbon deposits or damage the tool electrode itself, thus affecting the subsequent processing effect. For example, when processing a precision micro-hole of φ0.2mm, a hollow electrode with a diameter of less than φ0.15mm must be used, and the hollow hole diameter is between 0.05mm and 0.08mm. Therefore, when using a fine-diameter electrode for processing, if there are large impurities in the working fluid, it is very easy to block the tiny inner hole of the electrode, causing the electrode to be damaged during discharge. Ordinary EDM small hole processing uses tap water as the working fluid. Due to the high conductivity of ordinary tap water, the electrolysis phenomenon is more obvious during processing, the taper of the processing hole is larger, and the dimensional accuracy of the hole is difficult to guarantee. In addition, the conductivity, temperature, flow pressure, etc. of the working fluid are key factors for regulating the stability and reliability of the working fluid system, affecting the stable and reliable supply of the working fluid, and affecting the stability and processing effect of the EDM process.

[0004] In view of this, how to solve the problems that the working fluid supplied by existing EDM machines contains impurities, high conductivity, and the hollow electrodes or filament electrodes used for micro-hole processing, which easily damage the electrodes, making it difficult to ensure the dimensional accuracy of the processed holes, the processing process is unstable, and the processing effect is poor, has become the research content of this topic. Utility Model Content

[0005] The utility model aims to provide a micro-hole electrospark machining working fluid system and an electrospark machining machine tool.

[0006] To achieve the above-mentioned purpose, the technical solution adopted in the first aspect of the utility model is: a micro-hole EDM working fluid system is proposed, which is used for the circulating supply of working fluid of the EDM machine tool. The EDM machine tool has a machine body and a spindle, a workbench, and a working fluid tank arranged on the machine body. The workbench is provided with a liquid receiving tray for placing the workpiece, and the working fluid tank is provided with a sewage area and a clean water area.

[0007] The working fluid system comprises a pipeline component, a high-pressure fluid supply component, a low-pressure fluid supply component, a multi-stage filtering component, and a deionizing component.

[0008] The pipeline assembly includes pipelines from the liquid receiving tray to the sewage area, to the clean water area, to the high-pressure liquid supply assembly, the low-pressure liquid supply assembly, the multi-stage filtering assembly, the deionization assembly, and the workpiece.

[0009] The high-pressure liquid supply component comprises a booster pump and a solenoid valve arranged on the pipeline from the water purification area to the main shaft.

[0010] The low-pressure liquid supply component comprises an external liquid filling pump and a throttle valve which are arranged on the pipeline from the water purification area to the workpiece.

[0011] The multi-stage filtering assembly comprises a first filter arranged on the pipeline between the liquid receiving tray and the sewage area, a second filter arranged on the pipeline between the sewage area and the clean water area, and a third filter arranged on the pipeline where the high-pressure liquid supply assembly is located.

[0012] The deionization component comprises a deionization pump and a deionization container which are arranged on a pipeline connected to the water purification area.

[0013] In order to achieve the above-mentioned purpose, the technical solution adopted in the second aspect of the utility model is: to provide an EDM machine tool, and the EDM machine tool includes the micro-hole EDM working fluid system described in the first aspect of the utility model.

[0014] The relevant contents in the above technical solution are explained as follows:

[0015] 1. In the technical solution of the utility model, in view of the problems that the working fluid supplied by the existing EDM machine tools contains impurities, has high conductivity, and the hollow electrodes or filament electrodes used for micro-hole processing are easily damaged, making it difficult to ensure the dimensional accuracy of the processed holes, the processing process is unstable, and the processing effect is poor, a set of micro-hole EDM working fluid system and an EDM machine tool using the micro-hole EDM working fluid system are innovatively designed, wherein the working fluid system includes a pipeline component, a high-pressure fluid supply component, a low-pressure fluid supply component, a multi-stage filtration component, and a deionization component; wherein the pipeline component provides corresponding pipelines for the pipelines of other parts; the high-pressure fluid supply component supplies high-pressure working fluid to realize high-pressure internal flushing during the processing; and the low-pressure fluid supply component supplies high-pressure working fluid to realize high-pressure internal flushing during the processing. The liquid supply component provides low-pressure working fluid to realize low-pressure external flushing fluid during the processing; the multi-stage filtration component is used to filter the sewage and impurities in the working fluid medium layer by layer, especially the third filter arranged in the pipeline where the high-pressure liquid supply component is located, so as to fully ensure that when the high-pressure working fluid provided by the high-pressure liquid supply component is used to perform high-pressure filling in the electrode tube, there are no particulate impurities in the working fluid, thereby avoiding damage to the electrode; the deionization component pumps the working fluid in the clean water area into the deionization container for ion exchange to adjust the ion concentration of the working fluid, thereby ensuring the stability of the working fluid conductivity and the discharge process, avoiding arcing in the subsequent processing discharge process, facilitating chip removal and cooling, avoiding carbon deposition, pore blockage or electrode damage, thereby improving the subsequent processing effect and processing quality.

[0016] 2. In the solution of the first aspect above, the working fluid system further comprises a temperature control component for controlling the working fluid temperature in the water purification zone and the temperature of the machine body, so that the working fluid temperature and the temperature of the machine body are kept substantially consistent, so as to further ensure the stability of the EDM.

[0017] 3. In the solution of the first aspect above, the temperature control component includes a cooling machine provided on the pipeline connected to the water purification area, a temperature detection system and a temperature detection head provided on the fuselage, the temperature detection system detects the temperature of the working fluid in the water purification area, the temperature detection head detects the temperature on the fuselage, and feeds back the detection data to the cooling machine, when the working fluid temperature is higher than the fuselage temperature by more than 2 degrees, the cooling machine starts the cooling function to reduce the working fluid temperature to the set temperature.

[0018] 4. In the solution of the first aspect above, the high-pressure liquid supply assembly further comprises a pressure gauge and an accumulator provided on the pipeline at the outlet of the booster pump, so as to ensure that the high-pressure liquid supply assembly can provide sufficiently high-pressure internal flushing liquid, and the maximum pressure of the working fluid can reach 8MPa.

[0019] 5. In the solution of the first aspect above, the third filter includes a water inlet filter provided on the pipeline at the water inlet end of the booster pump and a high-pressure filter provided on the pipeline at the water outlet end of the solenoid valve. In the high-pressure liquid supply assembly, the following sequence is arranged in the pipeline from the water purification area to the main shaft: water inlet filter, booster pump, accumulator, solenoid valve, high-pressure filter. A high-pressure precision filter is configured at the output end of the high-pressure pump. The pressure (flow) of the high-pressure working fluid is adjustable by adjusting the pressure regulating valve.

[0020] 6. In the above-mentioned solution of the first aspect, the deionization container is a resin barrel, which is made of ion exchange resin. The ion exchange resin has a three-dimensional network structure, and there are many ionizable and exchangeable groups on the three-dimensional network structure, so that the deionization container has the function of exchanging ions for the working fluid to achieve the purpose of deionization.

[0021] 7. In the solution of the first aspect, a three-phase electric pump is arranged on the pipeline from the sewage area to the water purification area, and a second filter is arranged at the water outlet of the three-phase electric pump.

[0022] 8. In the description of the present application, it should be understood that the terms "upper", "lower", "vertical", "inner", "outer" and the like indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore should not be understood as limiting the present application.

[0023] 9. In the above scheme, the terms "install", "connect", "connect", "fix" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0024] 10. In the above schemes, the terms "first", "second", etc. are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of this application, "plurality" means at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0025] Due to the application of the above scheme, the utility model has the following advantages and effects compared with the prior art:

[0026] In the above scheme of the utility model, in view of the problems that the working fluid supplied by the existing EDM machine contains impurities, high conductivity, and the hollow electrode or filament electrode used for micro-hole processing is easy to damage the electrode, making it difficult to ensure the dimensional accuracy of the processed hole, the processing process is unstable, and the processing effect is not good, an innovative set of micro-hole EDM working fluid system and the EDM machine using the micro-hole EDM working fluid system are designed, wherein the working fluid system includes a pipeline component, a high-pressure liquid supply component, a low-pressure liquid supply component, a multi-stage filtration component, and a deionization component; wherein the pipeline component provides corresponding pipelines for the pipeline connection of other parts; the high-pressure liquid supply component supplies high-pressure working fluid to realize high-pressure internal flushing during the processing; and the low-pressure liquid supply component is used to supply high-pressure working fluid. The liquid supply component provides low-pressure working fluid to realize low-pressure external flushing fluid during the processing; the multi-stage filtration component is used to filter the sewage and impurities in the working fluid medium layer by layer, especially the third filter arranged in the pipeline where the high-pressure liquid supply component is located, so as to fully ensure that when the high-pressure working fluid provided by the high-pressure liquid supply component is used to perform high-pressure filling in the electrode tube, there are no particulate impurities in the working fluid, thereby avoiding damage to the electrode; the deionization component pumps the working fluid in the clean water area into the deionization container for ion exchange to adjust the ion concentration of the working fluid, thereby ensuring the stability of the working fluid conductivity and the discharge process, avoiding arcing in the subsequent processing discharge process, facilitating chip removal and cooling, avoiding carbon deposition, pore blockage or electrode damage, thereby improving the subsequent processing effect and processing quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a schematic diagram of a working fluid system for micro-hole electrospark machining according to an embodiment of the utility model.

[0028] In the above attached figure:

[0029] 10. Pipeline components;

[0030] 20. High-pressure liquid supply assembly; 21. Booster pump; 22. Pressure gauge; 23. Accumulator; 24. Solenoid valve;

[0031] 30. Low-pressure liquid supply assembly; 31. External liquid filling pump; 32. Throttle valve;

[0032] 40. Multi-stage filter assembly; 41. First filter; 42. Second filter; 43. Third filter; 431. Water inlet filter; 432. High pressure filter;

[0033] 50. Deionization component; 51. Deionization pump; 52. Deionization container;

[0034] 60. Temperature control component; 61. Cooling machine;

[0035] 7. Three-phase electric pump;

[0036] 8. Liquid collection tray;

[0037] 9. Working fluid tank; 91. Sewage area; 92. Water purification area. DETAILED DESCRIPTION

[0038] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0039] The utility model aims to solve the problems that the working fluid supplied by the existing electrospark machining machine contains impurities, has high conductivity, and the hollow electrode or filament electrode used for micro-hole machining easily damages the electrode, making it difficult to ensure the dimensional accuracy of the machined hole, the machining process is unstable, and the machining effect is poor. An innovative design is made of a micro-hole electrospark machining working fluid system and an electrospark machining machine using the micro-hole electrospark machining working fluid system.

[0040] Example 1: See Figure 1 As shown, the first embodiment of the utility model proposes a micro-hole EDM working fluid system, which is used for the circulating supply of working fluid for an EDM machine tool. The EDM machine tool has a machine body and a spindle, a workbench, and a working fluid tank 9 arranged on the machine body. The workbench is provided with a liquid receiving tray 8 for placing workpieces. The working fluid tank 9 is provided with a sewage area 91 and a clean water area 92.

[0041] The working fluid system includes a pipeline component 10 , a high-pressure fluid supply component 20 , a low-pressure fluid supply component 30 , a multi-stage filtering component 40 , and a deionizing component 50 .

[0042] The pipeline assembly 10 includes pipelines from the liquid receiving tray 8 to the sewage area 91, to the clean water area 92, to the high-pressure liquid supply assembly 20, the low-pressure liquid supply assembly 30, the multi-stage filtering assembly 40, the deionization assembly 50, and the workpiece.

[0043] The high-pressure liquid supply assembly 20 includes a booster pump 21 and a solenoid valve 24 which are arranged on the pipeline from the water purification area 92 to the main shaft.

[0044] The low-pressure liquid supply assembly 30 includes an external liquid filling pump 31 and a throttle valve 32 which are arranged on the pipeline from the water purification area 92 to the workpiece.

[0045] The multi-stage filtering assembly 40 includes a first filter 41 disposed on the pipeline between the liquid receiving pan 8 and the sewage area 91, a second filter 42 disposed on the pipeline between the sewage area 91 and the clean water area 92, and a third filter 43 disposed on the pipeline where the high-pressure liquid supply assembly 20 is located.

[0046] The deionization component 50 includes a deionization pump 51 and a deionization container 52 which are arranged on a pipeline connected to the water purification area 92 .

[0047] Through the implementation of the first embodiment of the utility model, the existing EDM machine tools have impurities in the working fluid, high conductivity, and hollow electrodes or filament electrodes used for micro-hole machining, which may easily damage the electrodes, making it difficult to ensure the dimensional accuracy of the machined holes, unstable machining process, and poor machining results.

[0048] In the first embodiment of the present invention, the description and principle of each component are as follows:

[0049] The pipeline assembly 10 provides corresponding pipelines for the pipeline connections of other parts, including the pipeline from the liquid receiving tray 8 to the sewage area 91, the pipeline from the sewage area 91 to the clean water area 92, the low-pressure external flushing pipeline from the clean water area 92 to the workpiece, the high-pressure internal flushing pipeline from the clean water area 92 to the spindle, and the pipeline entering the clean water area 92 through the cooler 61 in the temperature control assembly 60, and the pipeline entering the clean water area 92 through the deionization pump 51 and the deionization container 52 in the deionization assembly 50.

[0050] The high-pressure working fluid is supplied by the high-pressure fluid supply assembly 20 to realize high-pressure internal flushing during the processing. The maximum pressure of the working fluid is 8MPa. A high-pressure precision filter is configured at the output end of the high-pressure pump. The pressure (flow) of the high-pressure working fluid can be adjusted by adjusting the pressure regulating valve.

[0051] The low-pressure working fluid is provided by the low-pressure fluid supply assembly 30 to realize the low-pressure external flushing fluid during the processing, with a pressure of 0.6-1.0 MPa.

[0052] The multi-stage filter assembly 40 is used to filter out impurities in sewage and working fluid media layer by layer. In particular, the third filter 43 provided in the pipeline where the high-pressure fluid supply assembly 20 is located fully ensures that when the high-pressure working fluid provided by the high-pressure fluid supply assembly 20 is filled in the electrode tube with high pressure, there are no particulate impurities in the working fluid, thereby avoiding damage to the electrode.

[0053] The deionization component 50 pumps the working fluid in the clean water area 92 into the deionization container 52 for ion exchange to adjust the ion concentration of the working fluid, thereby ensuring the stability of the working fluid conductivity, avoiding arcing in the subsequent processing discharge process, avoiding carbon deposits or damage to the tool electrode itself, thereby improving the subsequent processing effect and processing quality.

[0054] The temperature of the working fluid in the clean water zone 92 and the temperature of the machine body are controlled by the temperature control component 60 to remain basically consistent. The temperature control component 60 includes a cooler 61 arranged on the pipeline connected to the clean water zone 92, a temperature detection system and a temperature detection head arranged on the machine body. The temperature detection system detects the temperature of the working fluid in the clean water zone 92, and the temperature detection head detects the temperature on the machine body, and feeds back the detection data to the cooler 61. When the working fluid temperature is more than 2 degrees higher than the machine body temperature, the cooler 61 starts the cooling function to reduce the working fluid temperature to the set temperature to further ensure the stability of the EDM.

[0055] In an embodiment of the utility model, the high-pressure liquid supply component 20 also includes a pressure gauge 22 and an accumulator 23 arranged on the pipeline at the water outlet end of the booster pump 21, so as to ensure that the high-pressure liquid supply component 20 can provide sufficiently high-pressure internal flushing liquid, and the maximum pressure of the working fluid can reach 8MPa.

[0056] In an embodiment of the utility model, the third filter 43 includes a water inlet filter 431 arranged on the pipeline at the water inlet end of the boost pump 21 and a high-pressure filter 432 arranged on the pipeline at the water outlet end of the solenoid valve 24. In the high-pressure liquid supply assembly 20, they are arranged in the following order on the pipeline from the clean water area 92 to the main shaft: water inlet filter 431, boost pump 21, accumulator 23, solenoid valve 24, and high-pressure filter 432. A high-pressure precision filter is configured at the output end of the high-pressure pump, and the pressure (flow) of the high-pressure working fluid is adjustable by adjusting the pressure regulating valve.

[0057] In the embodiment of the utility model, the deionization container 52 is a resin barrel, which is made of ion exchange resin. The ion exchange resin has a three-dimensional network structure with many ionizable and exchangeable groups, so that the deionization container 52 has the function of exchanging ions for the working fluid to achieve the purpose of deionization.

[0058] In the embodiment of the utility model, a three-phase electric pump 7 is provided on the pipeline from the sewage area 91 to the clean water area 92 , and a second filter 42 is provided at the water outlet of the three-phase electric pump 7 .

[0059] In the embodiment of the utility model, the first filter 41 adopts circulating paper core filtration, the second filter 42 adopts suction pipe filtration, and the third filter 43 adopts output pipe high pressure filtration, thereby forming a three-stage filtration system.

[0060] Embodiment 2: Embodiment 2 of the present invention proposes an EDM machine tool, and the EDM machine tool comprises the micro-hole EDM working fluid system described in Embodiment 1 of the present invention.

[0061] This working fluid system has the functions of working fluid temperature detection and temperature rise control, automatic conductivity detection, adjustable working fluid pressure and working fluid level detection alarm. Deionized resin is also used to control the working fluid conductivity to improve the processing quality of the hole. Precision micro-hole EDM uses deionized water as the working fluid. The working fluid system includes high and low pressure fluid supply, precision filtration, online detection of controllable conductivity, working fluid temperature detection and control, and adjustable working fluid pressure (flow). This working fluid system is equipped with a three-stage filtration system of circulating paper core filtration, suction pipe filtration and output pipe high-pressure filtration, which can realize high-pressure internal flushing and low-pressure external flushing during the processing process, thereby realizing cooling and chip removal of the processing area.

[0062] During the processing, the sewage in the liquid receiving tray 8 is discharged to the sewage area 91 of the working liquid tank 9 after passing through the first filter 41. The three-phase electric pump 7 sucks the working fluid in the sewage area 91 of the working liquid tank 9 to the second filter 42. After being filtered by the second filter 42, it enters the clean water area 92 of the working liquid tank 9. The working fluid in the clean water area 92 is supplied with high-pressure working fluid via the water inlet filter 431, the pneumatic booster pump 21, the accumulator 23, the solenoid valve 24, and the high-pressure filter 432 to realize the high-pressure internal flushing during the processing. When the electrode tube is flushed with high-pressure internal fluid, the maximum pressure of the working fluid is 8MPa. A high-pressure precision filter is configured at the output end of the pneumatic booster pump 21. The high-pressure working fluid can achieve adjustable pressure (flow) by adjusting the pressure regulating valve. The processed sewage returns to the sewage area 91 in the working liquid tank 9 from the liquid receiving tray 8 on the workbench.

[0063] The external flushing liquid pump sucks the working liquid in the clean water area 92 and supplies the external flushing liquid (pressure 0.6-1.0 MPa) through the throttle valve 32.

[0064] When the system detects that the conductivity of the working fluid is not within the set value range (40-70 us / cm), the deionization pump 518 pumps the working fluid in the static water area into the deionization container 52 for deionization exchange to adjust the ion concentration of the working fluid.

[0065] The working fluid system also has a cooler 61 for controlling the working water temperature so that the water temperature in the working fluid tank 9 remains basically consistent with the temperature of the host body. The water cooler 61 has its own water temperature detection system. A temperature detector is installed on the host body and the detection data is fed back to the cooler 61. When the working fluid temperature is more than 2 degrees higher than the host body temperature, the cooler 61 turns on the cooling function to reduce the working fluid temperature to the set temperature.

[0066] Through the implementation of the embodiments of the utility model, the working fluid conductivity and the discharge process are ensured to be stable, arcing in the subsequent processing discharge process is avoided, chip removal and cooling are facilitated, and carbon deposits, pore blockage or electrode damage are avoided, thereby improving the subsequent processing effect and processing quality, and achieving the purpose of the utility model.

[0067] The above embodiments are only for illustrating the technical concept and features of the utility model, and their purpose is to enable people familiar with the technology to understand the content of the utility model and implement it accordingly, and they cannot be used to limit the protection scope of the utility model. Any equivalent changes or modifications made according to the spirit of the utility model should be included in the protection scope of the utility model.

Claims

1. A micro-hole electrospark machining working fluid system, used for circulating the working fluid supply of an electrospark machining machine, wherein the electrospark machining machine has a machine body and a spindle, a workbench, and a working fluid tank (9) arranged on the machine body, the workbench is provided with a liquid receiving tray (8) for placing workpieces, and the working fluid tank (9) is provided with a sewage area (91) and a clean water area (92), characterized in that: The working fluid system comprises a pipeline component (10), a high-pressure fluid supply component (20), a low-pressure fluid supply component (30), a multi-stage filtration component (40), and a deionization component (50); The pipeline assembly (10) comprises pipelines from the liquid receiving tray (8) to the sewage area (91), to the water purification area (92), to the high-pressure liquid supply assembly (20), the low-pressure liquid supply assembly (30), the multi-stage filtering assembly (40), the deionization assembly (50), and the workpiece; The high-pressure liquid supply assembly (20) comprises a booster pump (21) and a solenoid valve (24) arranged on a pipeline from the water purification area (92) to the main shaft; The low-pressure liquid supply assembly (30) comprises an external liquid filling pump (31) and a throttle valve (32) arranged on a pipeline from the water purification area (92) to the workpiece; The multi-stage filter assembly (40) comprises a first filter (41) provided on the pipeline between the liquid receiving pan (8) and the sewage area (91), a second filter (42) provided on the pipeline between the sewage area (91) and the clean water area (92), and a third filter (43) provided on the pipeline where the high-pressure liquid supply assembly (20) is located; The deionization component (50) comprises a deionization pump (51) and a deionization container (52) which are arranged on a pipeline connected to the water purification area (92).

2. The micro hole EDM working fluid system according to claim 1, characterized in that: The working fluid system also includes a temperature control component (60) for controlling the working fluid temperature in the water purification area (92) and the temperature of the fuselage.

3. The micro hole EDM working fluid system according to claim 2, characterized in that: The temperature control component (60) comprises a cooling machine (61) arranged on a pipeline connected to the water purification area (92), a temperature detection system, and a temperature detection head arranged on the body of the machine.

4. The micro hole EDM working fluid system according to claim 1, characterized in that: The high-pressure liquid supply assembly (20) also includes a pressure gauge (22) and an accumulator (23) arranged on the pipeline at the water outlet end of the booster pump (21).

5. The micro hole EDM working fluid system according to claim 1 or 2, characterized in that: The third filter (43) comprises a water inlet filter (431) provided on the pipeline at the water inlet end of the booster pump (21) and a high-pressure filter (432) provided on the pipeline at the water outlet end of the solenoid valve (24).

6. The micro hole EDM working fluid system according to claim 1, characterized in that: The deionization container (52) is a resin barrel.

7. The micro hole EDM working fluid system according to claim 1, characterized in that: A three-phase electric pump (7) is arranged on the pipeline from the sewage area (91) to the clean water area (92), and a second filter (42) is arranged at the water outlet end of the three-phase electric pump (7).

8. An electric spark machining machine tool, characterized in that: The electrospark machining machine tool comprises the micro-hole electrospark machining working fluid system according to any one of claims 1 to 7.

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