Anti-electromagnetic interference rotating mechanism and detection device

Abstract

The utility model belongs to the technical field of semiconductors, and particularly relates to an anti-electromagnetic interference rotating mechanism and a detection device. The anti-electromagnetic interference rotating mechanism is used for driving the rotating carrying disc to rotate and comprises a motor, a lead screw, a driving block and a driven block, the lead screw is connected with the motor and can be driven by the motor to rotate, and threads are arranged on the lead screw; the driving block is in threaded sleeve connection with the lead screw, and the lead screw rotates to drive the driving block to move in the first direction or the second direction; the driven block is arranged on the side wall of the rotary carrying disc, and the driving block can drive the driven block to rotate around the first axial direction or the second axial direction so as to drive the rotary carrying disc to rotate. The motor drives the lead screw to rotate so as to drive the rotary carrying disc to rotate, and electromagnetic interference caused by the fact that a torque rotating motor is directly used as a rotating shaft to drive the rotary carrying disc to rotate is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, and in particular to an electromagnetic interference prevention rotating mechanism and a detection device. Background Art

[0002] In the field of mechanical transmission devices, the linear motion mechanism composed of stepper motors and lead screws is a common driving method. They can convert electrical pulse signals into angular displacement or linear displacement, thereby achieving precise positioning and control. At the same time, the rotating mechanism composed of cross roller bearings and several machined parts is also an important component of mechanical transmission devices. They can achieve efficient and stable rotational motion.

[0003] In the existing technology, a torque rotary motor is usually used to drive the rotating mechanism to rotate. The advantage of this method is that the structure is simple and easy to implement, but there are also some problems. For example, the torque rotary motor will generate electromagnetic interference during operation, which will affect the normal operation of some equipment that is sensitive to electromagnetic interference. Utility Model Content

[0004] The purpose of the utility model is to provide an anti-electromagnetic interference rotating mechanism and a detection device to solve the problem in the prior art that electromagnetic interference is generated during the rotation of the rotating mechanism driven by a torque rotating motor, which affects the normal operation of some equipment sensitive to electromagnetic interference.

[0005] To achieve this purpose, the utility model adopts the following technical solutions:

[0006] The anti-electromagnetic interference rotating mechanism is used to drive the rotating carrier to rotate, including:

[0007] A motor, a screw rod, an active block and a driven block, wherein the screw rod is connected to the motor and can be driven to rotate by the motor, and the screw rod is provided with a thread; the active block and the screw rod are threadedly sleeved, and the rotation of the screw rod can drive the active block to move along a first direction or a second direction; the driven block is arranged on the side wall of the rotating carrier, and the active block can drive the driven block to rotate around a first axial direction or a second axial direction, thereby driving the rotating carrier to rotate.

[0008] As an optional technical solution for the anti-electromagnetic interference rotating mechanism, the anti-electromagnetic interference rotating mechanism also includes a bearing seat, a slider is provided on one side of the active block, a slide rail is provided on the bearing seat, and the slider can cooperate with the slide rail to enable the active block to slide on the bearing seat along the first direction or the second direction.

[0009] As an optional technical solution for an anti-electromagnetic interference rotating mechanism, a first anti-collision block and a second anti-collision block are respectively arranged at positions corresponding to the active block at both ends of the bearing seat. When the active block reaches the movement limit along the first direction and the second direction on the bearing seat, it can abut against the first anti-collision block or the second anti-collision block.

[0010] As an optional technical solution for the anti-electromagnetic interference rotation mechanism, a cam is arranged on the active block, a spring is connected between the driven block and the bearing seat, and the cam and the spring are arranged on the same side of the driven block; when the active block moves along the first direction, the cam can be driven to move the driven block to rotate around the first axis and stretch the spring; when the active block moves along the second direction, the contraction of the spring can drive the driven block to rotate around the second axis.

[0011] As an optional technical solution for an anti-electromagnetic interference rotating mechanism, a first photoelectric baffle is provided on the active block, and a first photoelectric sensor and a second photoelectric sensor are provided on the supporting seat. The first photoelectric baffle can trigger the first photoelectric sensor or the second photoelectric sensor, and the first photoelectric sensor and the second photoelectric sensor are both communicatively connected to the motor.

[0012] As an optional technical solution for an anti-electromagnetic interference rotating mechanism, the rotating carrier includes a rotating part and a fixed part, the rotating part can rotate relative to the fixed part, a second photoelectric baffle is provided on the rotating part, and a third photoelectric sensor is provided on the fixed part, the second photoelectric baffle can trigger the third photoelectric sensor, and the third photoelectric sensor is communicatively connected to the motor.

[0013] As an optional technical solution for the anti-electromagnetic interference rotating mechanism, the rotating part and the fixed part are rotatably connected via a roller bearing.

[0014] As an optional technical solution for the anti-electromagnetic interference rotating mechanism, the screw rod and the motor are connected via a coupling.

[0015] As an optional technical solution for an anti-electromagnetic interference rotating mechanism, a nut is sleeved on the screw rod and threadedly connected to the screw rod, and the active block is fixedly connected to the nut. The rotation of the screw rod can drive the nut to change the threaded position on the screw rod, thereby driving the active block to move along the first direction or the second direction.

[0016] The detection device comprises a rotating carrier and the above-mentioned electromagnetic interference protection rotating mechanism, and the test piece can be placed on the rotating carrier.

[0017] Beneficial effects of the utility model:

[0018] The utility model provides an anti-electromagnetic interference rotating mechanism, including a motor, a screw, an active block and a driven block, the screw is connected to the motor and can be driven to rotate by the motor, and a thread is arranged on the screw; the active block and the screw are threadedly sleeved, and the rotation of the screw can drive the active block to move along the first direction or the second direction; the driven block is arranged on the side wall of the rotating carrier, and the active block can drive the driven block to rotate around the first axial direction or the second axial direction, thereby driving the rotating carrier to rotate. The motor drives the screw to rotate, thereby driving the rotating carrier to rotate, avoiding the direct use of the torque rotating motor as the rotating shaft to drive the rotating carrier to rotate and generate electromagnetic interference.

[0019] The utility model also provides a detection device, including a rotating carrier and an anti-electromagnetic interference rotating mechanism, on which a test piece can be placed. The anti-electromagnetic interference rotating mechanism can avoid electromagnetic interference when the rotating carrier rotates, thereby improving detection accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments of the present invention. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the contents of the embodiments of the present invention and these drawings without paying any creative work.

[0021] Figure 1 The utility model provides an electromagnetic interference protection rotating mechanism. Figure 1 ;

[0022] Figure 2 The utility model provides an electromagnetic interference protection rotating mechanism. Figure 2 ;

[0023] Figure 3 It is a top view of the electromagnetic interference protection rotating mechanism provided by an embodiment of the utility model;

[0024] Figure 4 The utility model provides an electromagnetic interference protection rotating mechanism. Figure 3 .

[0025] In the figure:

[0026] 100. Rotate the carrier plate;

[0027] 10. Motor; 20. Screw rod; 30. Active block; 31. Slider; 32. Cam; 33. First photoelectric baffle; 34. Second photoelectric baffle; 35. Nut; 40. Follower block; 41. Second pull ring; 50. Support seat; 51. Slide rail; 52. First anti-collision block; 53. Second anti-collision block; 54. First photoelectric sensor; 55. Second photoelectric sensor; 56. Third photoelectric sensor; 57. First pull ring; 60. Spring; 70. Coupling; 80. Encoder. DETAILED DESCRIPTION

[0028] Before any embodiments of the application are explained in detail, it is to be understood that the application is not limited in its application to the details of construction and the arrangement of components set forth in the following description or illustrated in the above drawings.

[0029] In this application, the terms "comprises", "includes", "has" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device that includes a series of elements includes not only those elements, but also includes other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of more restrictions, an element defined by the sentence "comprises a ..." does not exclude the presence of other identical elements in the process, method, article or device that includes the element.

[0030] In this application, the term "and / or" is a description of the association relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. In addition, the character " / " in this application generally indicates that the related objects before and after are in an "and / or" relationship.

[0031] In the present application, the terms "connect", "combine", "couple", and "install" may refer to direct connection, combination, coupling, or installation, or indirect connection, combination, coupling, or installation. For example, direct connection refers to two parts or components being connected together without the need for an intermediate piece, and indirect connection refers to two parts or components being connected to at least one intermediate piece respectively, and the two parts or components being connected via the intermediate piece. In addition, "connect" and "couple" are not limited to physical or mechanical connections or couplings, and may include electrical connections or couplings.

[0032] In the present application, it will be understood by those of ordinary skill in the art that relative terms (e.g., "about," "approximately," "substantially," etc.) used in conjunction with quantities or conditions include the values ​​and have the meaning indicated by the context. For example, the relative terms include at least the degree of error associated with the measurement of a specific value, the tolerances caused by manufacturing, assembly, and use associated with a specific value, etc. Such terms should also be considered to disclose a range defined by the absolute values ​​of the two endpoints. Relative terms may refer to plus or minus a certain percentage (e.g., 1%, 5%, 10% or more) of the indicated value. Numerical values ​​that do not use relative terms should also be disclosed as specific values ​​with tolerances. In addition, "substantially" may refer to plus or minus a certain degree (e.g., 1 degree, 5 degrees, 10 degrees or more) on the basis of the indicated angle when expressing a relative angular position relationship (e.g., substantially parallel, substantially perpendicular).

[0033] In this application, it will be understood by those skilled in the art that the function performed by a component can be performed by one component, multiple components, one part, or multiple parts. Similarly, the function performed by a part can also be performed by one part, one component, or a combination of multiple parts.

[0034] In the present application, the terms "upper", "lower", "left", "right", "front", "back" and other directional words are described based on the orientation and positional relationship shown in the accompanying drawings, and should not be understood as limiting the embodiments of the present application. In addition, in the context, it is also necessary to understand that when it is mentioned that an element is connected to another element "upper" or "lower", it can not only be directly connected to another element "upper" or "lower", but also indirectly connected to another element "upper" or "lower" through an intermediate element. It should also be understood that directional words such as upper side, lower side, left side, right side, front side, back side, etc. not only represent the positive orientation, but can also be understood as the lateral orientation. For example, the bottom can include directly below, lower left, lower right, lower front, and lower back, etc.

[0035] In the existing technology, a torque rotary motor is usually used to drive the rotating mechanism to rotate. The advantage of this method is that the structure is simple and easy to implement, but there are also some problems. For example, the torque rotary motor will generate electromagnetic interference during operation, which will affect the normal operation of some equipment that is sensitive to electromagnetic interference.

[0036] To solve the above problems, this embodiment provides a detection device. Figure 1-Figure 4 , including a rotating carrier 100 and an anti-electromagnetic interference rotating mechanism, and the test piece can be placed on the rotating carrier 100. The anti-electromagnetic interference rotating mechanism can avoid electromagnetic interference when the rotating carrier 100 rotates, thereby improving the detection accuracy.

[0037] Among them, the anti-electromagnetic interference rotating mechanism is used to drive the rotating carrier 100 to rotate, including a motor 10, a screw 20, an active block 30 and a driven block 40. The screw 20 is connected to the motor 10 and can be driven to rotate by the motor 10. The screw 20 is provided with a thread; the active block 30 and the screw 20 are threadedly sleeved, and the rotation of the screw 20 can drive the active block 30 to move along the first direction or the second direction; the driven block 40 is arranged on the side wall of the rotating carrier 100, and the active block 30 can drive the driven block 40 to rotate around the first axial direction or the second axial direction, thereby driving the rotating carrier 100 to rotate. The motor 10 drives the screw 20 to rotate, thereby driving the rotating carrier 100 to rotate, avoiding the direct use of the torque rotating motor as the rotating shaft to drive the rotating carrier 100 to rotate and generate electromagnetic interference.

[0038] Specifically, the screw rod 20 and the motor 10 are spline-connected via a coupling 70. In other embodiments, the screw rod 20 and the motor 10 may also be plug-connected, etc., which is not limited here.

[0039] Specifically, a nut 35 is sleeved on the screw rod 20 and is screwed to the screw rod 20, and the active block 30 is fixedly connected to the nut 35. The rotation of the screw rod 20 can drive the nut 35 to change the screw connection position on the screw rod 20, thereby driving the active block 30 to move along the first direction or the second direction. In this embodiment, the nut 35 is riveted to the active block 30 by screws. In other embodiments, the nut 35 and the active block 30 can be glued, welded or screwed, etc., which are not listed here one by one.

[0040] Furthermore, the anti-electromagnetic interference rotating mechanism also includes a bearing seat 50, a slider 31 is provided on one side of the active block 30, and a slide rail 51 is provided on the bearing seat 50. The slider 31 can cooperate with the slide rail 51 to enable the active block 30 to slide on the bearing seat 50 along the first direction or the second direction.

[0041] Specifically, the bearing seat 50 is set to be U-shaped and extends along the first direction and the second direction. The active block 30 is set to be L-shaped. A slider 31 is set on one side of the long arm of the active block 30, and a through hole is set on the short arm. The screw rod 20 can pass through the through hole. The cross-section of the part where the slide rail 51 cooperates with the slider 31 is an inverted trapezoid. The slider 31 is set to be U-shaped, and the cross-section of the notch at the opening is also set to be trapezoidal. The slide rail 51 can limit the detachment of the slider 31 through the inverted trapezoid, thereby preventing the active block 30 from detaching from the slide rail 51 during movement.

[0042] Furthermore, the first anti-collision block 52 and the second anti-collision block 53 are respectively arranged at the positions corresponding to the active block 30 at both ends of the bearing seat 50. When the active block 30 reaches the limit of movement along the first direction and the second direction on the bearing seat 50, it can abut against the first anti-collision block 52 or the second anti-collision block 53. Specifically, an opening is arranged on one side of the bearing seat 50, and a bearing plate is arranged on the other side. The first anti-collision block 52 is arranged at the opening of the bearing seat 50, and the second anti-collision block 53 is arranged on the bearing plate. The first anti-collision block 52 includes a supporting portion and an abutting portion. The abutting portion is arranged above the supporting portion and protrudes from the end surface of the supporting portion. The second anti-collision block 53 is only provided with an abutting portion. In this embodiment, the material of the supporting portion is stainless steel to provide a larger bearing stress; the abutting portion is integrally injection molded by urethane to flexibly buffer the active block 30. In other embodiments, the abutting portion can also be set to a silicone rubber material.

[0043] Furthermore, a cam 32 is provided on the active block 30, a spring 60 is connected between the driven block 40 and the bearing seat 50, and the cam 32 and the spring 60 are provided on the same side of the driven block 40; when the active block 30 moves in a first direction, the cam 32 can be driven to shift the driven block 40 to rotate around the first axis and stretch the spring 60; when the active block 30 moves in a second direction, the spring 60 contracts and can drive the driven block 40 to rotate around the second axis. In other embodiments, a shifting rod can also be used to replace the cam 32, which is not limited here.

[0044] Specifically, the bearing seat 50 is provided with an L-shaped protruding block, on which a first pull ring 57 is provided, and the driven block 40 is provided with a second pull ring 41. Both ends of the spring 60 are provided with pull hooks, which are respectively connected with the first pull ring 57 and the second pull ring 41. Specifically, the first pull ring 57 and the second pull ring 41 are provided on the same horizontal plane.

[0045] Exemplarily, when the active block 30 and the second anti-collision block 53 are in contact, the driven block 40 and the cam 32 are in contact, and the spring 60 is in a natural or slightly stretched state. At this time, the rotating carrier 100 is located at the second axial limit position. When the motor 10 starts to run, the screw 20 rotates and drives the active block 30 to move in the first direction. The cam 32 drives the driven block 40 to rotate around the first axial direction. At this time, the spring 60 is gradually stretched. When the active block 30 and the first anti-collision block 52 are in contact, the rotating carrier 100 is located at the first axial limit position. The angle between the first axial limit position and the second axial limit position is 12°.

[0046] Further, the active block 30 is provided with a first photoelectric baffle 33, and the bearing seat 50 is provided with a first photoelectric sensor 54 and a second photoelectric sensor 55. The first photoelectric baffle 33 can trigger the first photoelectric sensor 54 or the second photoelectric sensor 55, and the first photoelectric sensor 54 and the second photoelectric sensor 55 are both connected to the motor 10. When the first photoelectric baffle 33 triggers the first photoelectric sensor 54, the rotating carrier 100 is close to the limit position of the first axis, and the first photoelectric sensor 54 will send a stop signal to the encoder 80, and the encoder 80 will feed back the stop signal to the host computer, and the host computer will feed back a stop command, the motor 10 will stop, and the active block 30 will slowly abut against the first anti-collision block 52; when the first photoelectric baffle 33 triggers the second photoelectric sensor 55, the rotating carrier 100 is close to the limit position of the second axis, and the first photoelectric sensor 54 will send a stop signal to the encoder 80, and the encoder 80 will feed back the stop signal to the host computer, and the host computer will feed back a stop command, the motor 10 will stop, and the active block 30 will slowly abut against the second anti-collision block 53.

[0047] Furthermore, the rotating carrier 100 includes a rotating part and a fixed part, the rotating part can rotate relative to the fixed part, a second photoelectric baffle 34 is provided on the rotating part, a third photoelectric sensor 56 is provided on the fixed part, the second photoelectric baffle 34 can trigger the third photoelectric sensor 56, and the third photoelectric sensor 56 is connected to the motor 10 for communication. When the rotating carrier 100 is started, the upper computer issues a zeroing instruction, and the motor 10 drives the active block 30 to drive the rotating carrier 100 to rotate. During the rotation process, the second photoelectric baffle 34 triggers the third photoelectric sensor 56. The zeroing operation is used to calibrate the rotating carrier 100 to avoid angle errors caused by the long-term operation of the rotating carrier 100.

[0048] Furthermore, the rotating part and the fixed part are rotatably connected via a roller bearing. Specifically, a ring is rigidly connected to the rotating carrier 100, and the roller bearing is rotatably matched with the ring.

[0049] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention, and are not intended to limit the implementation methods of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the scope of protection of the present invention. It is not necessary and impossible to list all implementation methods here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention shall be included in the scope of protection of the claims of the present invention.

Claims

1. An anti-electromagnetic interference rotating mechanism, used to drive a rotating carrier (100) to rotate, characterized in that: include: Motor (10); a screw rod (20), the screw rod (20) being connected to the motor (10) and being driven to rotate by the motor (10), and the screw rod (20) being provided with a thread; An active block (30), wherein the active block (30) and the screw rod (20) are threadedly sleeved, and the screw rod (20) can drive the active block (30) to move along a first direction or a second direction when it rotates; A driven block (40) is arranged on a side wall of the rotating carrier (100), and the active block (30) can drive the driven block (40) to rotate around a first axial direction or a second axial direction, thereby driving the rotating carrier (100) to rotate.

2. The anti-electromagnetic interference rotating mechanism according to claim 1, characterized in that: The anti-electromagnetic interference rotating mechanism also includes a bearing seat (50), a slider (31) is provided on one side of the active block (30), a slide rail (51) is provided on the bearing seat (50), and the slider (31) can cooperate with the slide rail (51) to enable the active block (30) to be slidably arranged on the bearing seat (50) along the first direction or the second direction.

3. The electromagnetic interference protection rotating mechanism according to claim 2, characterized in that: A first anti-collision block (52) and a second anti-collision block (53) are respectively arranged at positions at both ends of the bearing seat (50) corresponding to the active block (30); when the active block (30) reaches the limit of movement along the first direction and the second direction on the bearing seat (50), it can abut against the first anti-collision block (52) or the second anti-collision block (53).

4. The electromagnetic interference protection rotating mechanism according to claim 2, characterized in that: The active block (30) is provided with a cam (32), and a spring (60) is connected between the driven block (40) and the bearing seat (50), and the cam (32) and the spring (60) are arranged on the same side of the driven block (40); when the active block (30) moves along the first direction, the cam (32) can be driven to move the driven block (40) to rotate around the first axial direction and stretch the spring (60); when the active block (30) moves along the second direction, the spring (60) contracts and can drive the driven block (40) to rotate around the second axial direction.

5. The electromagnetic interference protection rotating mechanism according to claim 2, characterized in that: A first photoelectric baffle (33) is arranged on the active block (30), and a first photoelectric sensor (54) and a second photoelectric sensor (55) are arranged on the support seat (50); the first photoelectric baffle (33) can trigger the first photoelectric sensor (54) or the second photoelectric sensor (55); and the first photoelectric sensor (54) and the second photoelectric sensor (55) are both communicatively connected to the motor (10).

6. The electromagnetic interference protection rotating mechanism according to claim 1, characterized in that: The rotating carrier (100) comprises a rotating part and a fixed part, the rotating part can rotate relative to the fixed part, the rotating part is provided with a second photoelectric baffle (34), the fixed part is provided with a third photoelectric sensor (56), the second photoelectric baffle (34) can trigger the third photoelectric sensor (56), and the third photoelectric sensor (56) is communicatively connected to the motor (10).

7. The electromagnetic interference protection rotating mechanism according to claim 6, characterized in that: The rotating part and the fixed part are rotatably connected via a roller bearing.

8. The electromagnetic interference protection rotating mechanism according to any one of claims 1 to 7, characterized in that: The screw rod (20) and the motor (10) are connected via a coupling (70).

9. The electromagnetic interference protection rotating mechanism according to any one of claims 1 to 7, characterized in that: A nut (35) is sleeved on the screw rod (20) and is threadedly connected to the screw rod (20); the active block (30) is fixedly connected to the nut (35); rotation of the screw rod (20) can drive the nut (35) to change the threaded position on the screw rod (20), thereby driving the active block (30) to move along the first direction or the second direction.

10. A detection device, characterized in that It comprises a rotating carrier (100) and an anti-electromagnetic interference rotating mechanism as claimed in any one of claims 1 to 9, and the test piece can be placed on the rotating carrier (100).

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