Annealing furnace transmission device

Abstract

The utility model discloses an annealing furnace transmission device which comprises transmission rollers, a base and a power mechanism, each transmission roller comprises a first transmission part and a second transmission part which are arranged at an interval in the axial direction, the first transmission parts are rotationally connected to a first roller seat, the second transmission parts are rotationally connected to a second roller seat, and a first cooling channel is arranged in the first roller seat; a second cooling channel is arranged in the second roller seat, the first cooling channel and the second cooling channel are used for introducing a cooling medium, and the power mechanism is used for driving the transmission rollers to rotate. Cooling media introduced into the first cooling channel and the second cooling channel can cool the first roller base and the second roller base, and the temperature of the first conveying part, the temperature of the second conveying part, the temperature of a connecting structure between the first conveying part and the second roller base and the temperature of a connecting structure between the second conveying part and the second roller base are reduced. Therefore, the power transmission between the power mechanism and the transmission roller is more stable and reliable, and the stability of silicon wafer transmission is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaic cell manufacturing, in particular to an annealing furnace transmission device. Background Art

[0002] The annealing process of silicon wafers can improve the crystallinity of crystals in silicon wafers and remove impurities and various defects on the surface of silicon wafers. The annealing process is usually carried out in an annealing furnace. In related technologies, the transmission device of the annealing furnace transmits silicon wafers in the form of rollers. Affected by high temperature, the transmission rollers themselves and the transmission areas between the transmission rollers and other transmission components are prone to deformation, resulting in reduced reliability of power transmission and smoothness of silicon wafer transmission. Utility Model Content

[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model provides an annealing furnace transmission device, which can improve the reliability of power transmission and the stability of silicon wafer transmission.

[0004] According to the annealing furnace transmission device in the embodiment of the utility model, it includes:

[0005] A plurality of transmission rollers are arranged side by side, each transmission roller comprises a first transmission part and a second transmission part which are arranged at intervals along the axial direction;

[0006] The base comprises a first roller seat and a second roller seat which are arranged at intervals along the axial direction of the transmission roller, the first transmission part is rotatably connected to the first roller seat, the second transmission part is rotatably connected to the second roller seat, a first cooling channel is provided in the first roller seat, a second cooling channel is provided in the second roller seat, and a cooling medium is passed through the first cooling channel and the second cooling channel;

[0007] A power mechanism is connected to the first transmission part and / or the second transmission part, and is used to drive the transmission roller to rotate.

[0008] The annealing furnace transmission device according to the embodiment of the utility model has at least the following beneficial effects:

[0009] In the utility model, the cooling medium introduced into the first cooling channel and the second cooling channel can cool the first roller seat and the second roller seat, and at the same time reduce the temperature of the first transmission part, the second transmission part, the connection structure between the first transmission part and the second roller seat, and the connection structure between the second transmission part and the second roller seat, thereby reducing the influence of high temperature on power transmission, making the power transmission between the power mechanism and the transmission roller more stable and reliable, and improving the smoothness of silicon wafer transmission.

[0010] According to some embodiments of the present invention, the first cooling channel extends to both ends of the first roller seat along the arrangement direction of the transmission rollers, and the second cooling channel extends to both ends of the second roller seat along the arrangement direction of the transmission rollers.

[0011] According to some embodiments of the present utility model, the first cooling channel includes a plurality of connected first curved sections, each of which is disposed around a circumference of a rotationally connected position between the first transmission portion and the first roller seat;

[0012] The second cooling channel includes a plurality of connected second curved sections, and each of the second curved sections is disposed around a circumferential side of a rotationally connected position between the second transmission portion and the second roller seat.

[0013] According to some embodiments of the present utility model, the first roller seat includes a plurality of the first cooling channels arranged at intervals along the vertical direction, and the rotation connection position between the first transmission part and the first roller seat is located between adjacent first cooling channels;

[0014] The second roller seat includes a plurality of second cooling channels arranged at intervals in the vertical direction, and the rotational connection position between the second transmission portion and the second roller seat is located between adjacent second cooling channels.

[0015] According to some embodiments of the present utility model, the first roller seat is further provided with a first transfer channel, and one end of the adjacent first cooling channels is communicated through the first transfer channel, and the second roller seat is further provided with a second transfer channel, and one end of the adjacent second cooling channels is communicated through the second transfer channel;

[0016] Alternatively, the annealing furnace transmission device also includes a first transfer tube and a second transfer tube, one end of the adjacent first cooling channels is respectively connected to the two ends of the first transfer tube, and one end of the adjacent second cooling channels is respectively connected to the two ends of the second transfer tube.

[0017] According to some embodiments of the utility model, each of the first cooling channels is respectively connected to a first joint for introducing a cooling medium and a second joint for discharging the cooling medium at both ends, and the annealing furnace transmission device further comprises a main introduction pipe and a main discharge pipe; wherein the first joints are all in communication with the main introduction pipe, and the second joints are all in communication with the main discharge pipe; or, the first joint connected to one of the first cooling channels is connected to the main introduction pipe, and the second joint is connected to the first joint of an adjacent first cooling channel through a pipeline, and the second joint of the adjacent first cooling channel is connected to the main discharge pipe, or is connected to the first joint connected to another first cooling channel;

[0018] The two ends of each second cooling channel are respectively connected with a third joint for introducing a cooling medium and a fourth joint for discharging the cooling medium, and the annealing furnace transmission device also includes a main introduction pipe and a main discharge pipe; wherein the third joints are all connected to the main introduction pipe, and the fourth joints are all connected to the main discharge pipe; or, the third joint connected to one of the second cooling channels is connected to the main introduction pipe, and the fourth joint is connected to the third joint of the adjacent second cooling channel through a pipeline, and the fourth joint of the adjacent second cooling channel is connected to the main discharge pipe, or is connected to the third joint connected to another second cooling channel.

[0019] According to some embodiments of the present utility model, the first transmission part is integrally connected with the second transmission part, and the power mechanism is connected to the first transmission part;

[0020] Alternatively, the first transmission part and the second transmission part are spaced apart from each other, and both the first transmission part and the second transmission part are connected to the power mechanism.

[0021] According to some embodiments of the utility model, the power mechanism includes a transmission shaft extending along the conveying direction of the transmission roller and a plurality of first transmission wheels arranged at intervals on the transmission shaft, a second transmission wheel is provided at the end of the first transmission part and / or the second transmission part, and the first transmission wheel is connected to the second transmission wheel in transmission connection.

[0022] According to some embodiments of the present utility model, the transmission shaft includes a plurality of transmission sections, and adjacent transmission sections are connected via a coupling.

[0023] According to some embodiments of the present invention, the first transmission wheel and the second transmission wheel are configured as orthogonal magnetic wheels.

[0024] According to some embodiments of the utility model, the power mechanism includes a plurality of mounting brackets, the mounting brackets are arranged at intervals along the axial direction of the transmission shaft, the transmission shaft is passed through the mounting brackets and is rotatably connected to the mounting brackets, and the mounting brackets are detachably connected to the first roller seat and / or the second roller seat, and can change the vertical connection position.

[0025] According to some embodiments of the utility model, the base also includes a connecting seat, and the first roller seat and the second roller seat are respectively detachably connected to the two sides of the connecting seat along the axial direction of the transmission roller, and the connecting seat is provided with a positioning portion for positioning the first roller seat and the second roller seat along the axial direction of the transmission roller and the conveying direction of the transmission roller.

[0026] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] The present invention is further described below with reference to the accompanying drawings and embodiments, wherein:

[0028] Figure 1 This is a structural schematic diagram of an embodiment of the annealing furnace transmission device of the utility model;

[0029] Figure 2 for Figure 1 A cross-sectional view of an embodiment of a transmission device for an annealing furnace;

[0030] Figure 3 Schematic diagrams of different embodiments of the first cooling channel and the second cooling channel;

[0031] Figure 4 is a schematic diagram of a pipeline connected to the first roller seat;

[0032] Figure 5 is a schematic diagram of a pipeline connected to the second roller seat;

[0033] Figure 6 A schematic diagram of the coordination of the first cooling channel and the second cooling channel according to an embodiment;

[0034] Figure 7 is a schematic diagram of another embodiment of a transmission roller;

[0035] Figure 8 is a schematic diagram of an embodiment of a base;

[0036] Fig. 9 A schematic diagram of an embodiment of a power mechanism.

[0037] Reference numerals:

[0038] Transmission roller 100; second transmission wheel 101, first transmission part 110, second transmission part 120; base 200, first roller seat 210, first cooling channel 211, first curved section 2111, first through hole 212, first joint 213, second joint 214, first transfer channel 215, second roller seat 220, second cooling channel 221, second curved section 2211, second through hole 222, third joint 223, fourth joint 224, second transfer channel 225, connecting seat 230, connecting rod 231, positioning part 232; power mechanism 300, transmission shaft 310, transmission section 311, coupling 312, first transmission wheel 320, driving wheel 330, mounting bracket 340, waist-shaped hole 341; main inlet pipe 400, first branch pipe 410, first transfer pipe 420; main outlet pipe 500, second branch pipe 510, second transfer pipe 520. DETAILED DESCRIPTION

[0039] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0040] In the description of the present invention, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0041] In the description of the present utility model, "several" means more than one, "many" means more than two, "greater than", "less than", "exceed" etc. are understood to exclude the number itself, and "above", "below", "within" etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used to distinguish the technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0042] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0043] In the description of the utility model, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0044] The embodiment of the utility model provides an annealing furnace transmission device (hereinafter referred to as the transmission device) for realizing stable transmission of silicon wafers during the annealing process. Figure 1 and Figure 2 The transmission device includes a transmission roller 100, a base 200 and a power mechanism 300. The transmission roller 100 is used to support and transmit the silicon wafer. A plurality of transmission rollers 100 are arranged side by side. The arrangement direction of the plurality of transmission rollers 100 is the transmission direction of the transmission roller 100 to the silicon wafer. Each transmission roller 100 includes a first transmission part 110 and a second transmission part 120 spaced apart along its own axial direction. The base 200 includes a first roller seat 210 and a second roller seat 220 spaced apart along the axial direction of the transmission roller 100. The first transmission part 110 is rotatably connected to the first roller seat 210, and the second transmission part 120 is rotatably connected to the second roller seat 220. The power mechanism 300 is connected to the first transmission part 110 and / or the second transmission part 120. The power mechanism 300 drives the first transmission part 110 and / or the second transmission part 120 to rotate, and the transmission roller 100 is driven to rotate and carries the silicon wafer to move along the transmission direction to achieve continuous transmission of the silicon wafer.

[0045] A first cooling channel 211 is provided in the first roller seat 210, and a second cooling channel 221 is provided in the second roller seat 220. The first cooling channel 211 and the second cooling channel 221 are used to pass cooling medium, and the cooling medium is not limited to fluids such as water, solution, and gas. The cooling medium passed through the first cooling channel 211 and the second cooling channel 221 can cool down the first roller seat 210 and the second roller seat 220, and at the same time reduce the temperature of the first transmission part 110, the second transmission part 120, the connection structure (such as bearing) between the first transmission part 110 and the second roller seat 220, and the connection structure between the second transmission part 120 and the second roller seat 220, thereby reducing the influence of high temperature on power transmission, making the power transmission between the power mechanism 300 and the transmission roller 100 more stable and reliable, and further improving the smoothness of silicon wafer transmission.

[0046] It should be noted that the first roller seat 210 and the second roller seat 220 respectively play the role of installing and supporting the first transmission part 110 and the second transmission part 120. The power mechanism 300 realizes power transmission to the transmission roller 100 through the first transmission part 110 and the second transmission part 120. The utility model utilizes the internal space of the first roller seat 210 and the second roller seat 220 to pass the cooling medium. The cooling medium transfers cold to the first transmission part 110 and the second transmission part 120 through the first roller seat 210 and the second roller seat 220, thereby cooling the power transmission mechanism and improving the stability of power transmission, and the cooling efficiency is high.

[0047] The first cooling channel 211 extends to both ends of the first roller seat 210 along the arrangement direction of the transmission rollers 100. The contact area between the cooling medium and the first roller seat 210 is large, so that the first roller seat 210 can be quickly cooled down. Moreover, the connection position between each first transmission part 110 and the first roller seat 210 is close to the first cooling channel 211. The first cooling channel 211 can take into account the cooling requirements of any first transmission part 110. Similarly, the second cooling channel 221 extends to both ends of the second roller seat 220 along the arrangement direction of the transmission rollers 100, which can increase the cooling speed of the second roller seat 220 and enable the second cooling channel 221 to take into account the cooling requirements of any second transmission part 120.

[0048] The first cooling channel 211 and the second cooling channel 221 can be arranged in a straight line or a curved line. Figure 3 In Figure (a), the first cooling channel 211 and the second cooling channel 221 are set in a straight line shape. Taking the first cooling channel 211 as an example, the cooling medium flows faster in the first cooling channel 211 set in a straight line shape, and can quickly carry the heat released by the heat exchange between the first roller seat 210 and the cooling medium out of the first roller seat 210, thereby increasing the cooling rate of the first roller seat 210.

[0049] Or, in another embodiment, referring to Figure 3 In Figures (b) and (c), the first cooling channel 211 and the second cooling channel 221 are arranged in a curved shape. The first cooling channel 211 includes a plurality of connected first curved segments 2111, each of which is arranged around the circumference of the rotational connection position between the first transmission part 110 and the first roller seat 210. Similarly, the second cooling channel 221 includes a plurality of connected second curved segments 2211, each of which is arranged around the circumference of the rotational connection position between the second transmission part 120 and the second roller seat 220. Taking the first cooling channel 211 as an example, the provision of the first curved segment 2111 can increase the total length of the first cooling channel 211 and the contact area between the cooling medium and the first roller seat 210, so that the cooling medium and the first roller seat 210 can fully exchange heat and improve the cooling rate of the first roller seat 210.

[0050] Understandable, refer to Figure 3 , the first transmission part 110 is rotatably connected to the first roller seat 210 through a bearing, the first roller seat 210 has a first through hole 212 that penetrates along the axial direction of the transmission roller 100, the bearing is fixed in the first through hole 212, the first transmission part 110 is arranged in the inner ring of the bearing, and the first roller seat 210 is rotatably connected. Similarly, the second transmission part 120 is rotatably connected to the second roller seat 220 through a bearing, the second roller seat 220 has a second through hole 222 that penetrates along the axial direction of the transmission roller 100, the bearing is fixed in the second through hole 222, the second transmission part 120 is arranged in the inner ring of the bearing, and the second roller seat 220 is rotatably connected. Taking the first cooling channel 211 as an example, the cooling medium in the first cooling channel 211 exchanges heat with the first roller seat 210, and the first roller seat 210 further exchanges heat with the bearing and the first transmission part 110, so that the bearing and the first transmission part 110 are cooled, and the stability of power transmission between the power mechanism 300 and the transmission roller 100 is improved.

[0051] Further, see Figure 3 In FIG. (c), the first curved section 2111 is arranged to be arranged around one side of the first through hole 212 in the vertical direction, or, referring to Figure 3 As shown in Figure (b), adjacent first curved segments 2111 are arranged around two opposite sides of the first through hole 212 along the vertical direction; similarly, the second curved segments 2211 are arranged around one side of the second through hole 222 along the vertical direction, or adjacent second curved segments 2211 are respectively arranged around two opposite sides of the second through hole 222 along the vertical direction.

[0052] In addition, refer to Figure 3 In Figure (a), the first roller seat 210 includes a plurality of first cooling channels 211 arranged at intervals in the vertical direction, and the rotational connection position between the first transmission part 110 and the first roller seat 210 is located between adjacent first cooling channels 211. Similarly, the second roller seat 220 includes a plurality of second cooling channels 221 arranged at intervals in the vertical direction, and the rotational connection position between the second transmission part 120 and the second roller seat 220 is located between adjacent second cooling channels 221. Taking the first cooling channel 211 as an example, a cooling medium can be introduced into each first cooling channel 211, which can further increase the contact area between the cooling medium and the first roller seat 210 and improve the cooling rate.

[0053] Reference Figure 4As shown in FIG. (d), the transmission device further includes a main inlet pipe 400 and a main outlet pipe 500. The main inlet pipe 400 is used to introduce cooling medium into the first cooling channel 211 and the second cooling channel 221, and the main outlet pipe 500 is used to discharge the cooling medium after heat exchange in the first cooling channel 211 and the second cooling channel 221. The two ends of each first cooling channel 211 are respectively connected to a first joint 213 for introducing cooling medium and a second joint 214 for discharging cooling medium, that is, the cooling medium enters the first cooling channel 211 through the first joint 213, and after completing heat exchange with the first roller seat 210, the cooling medium is discharged from the second joint 214. The first joint 213 and the second joint 214 can be arranged at the end of the first roller seat 210 along the conveying direction, or at the side of the first roller seat 210 along the axial direction of the transmission roller 100; the first joint 213 and the second joint 214 are installed on the first roller seat 210 in a threaded connection manner, and a sealing treatment is performed at the connection with the first roller seat 210, such as setting a sealing gasket, applying sealant, etc.

[0054] The main inlet pipe 400 and the main outlet pipe 500 are both connected to the first cooling channel 211 through pipelines, so that the cooling medium can be continuously introduced into the first cooling channel 211 and the first roller seat 210 can be continuously cooled. In one embodiment, each first joint 213 is connected to the main inlet pipe 400, and each second joint 214 is connected to the main outlet pipe 500. The cooling medium in the main inlet pipe 400 enters different first cooling channels 211 through each first joint 213 respectively. After the cooling medium exchanges heat with the first roller seat 210 in the first cooling channel 211, it is discharged from the first cooling channel 211 through each second joint 214 and introduced into the main outlet pipe 500. The main inlet pipe 400 introduces the cooling medium into multiple first cooling channels 211 at the same time, which can reduce the cold consumption and energy waste before the cooling medium flows into the first cooling channel 211. It can be understood that the transmission device includes the same number of first branches 410 as the first joints 213 and the same number of second branches 510 as the multiple second joints 214, one end of the multiple first branches 410 is connected to the main inlet pipe 400, and the other ends of the multiple first branches 410 correspond one-to-one to the first joints 213 and are connected to each other.

[0055] In another embodiment, referring to Figure 4In Figure (e), the first joint 213 connected to one of the first cooling channels 211 is connected to the main inlet pipe 400, and the second joint 214 connected to the first cooling channel 211 is connected to the first joint 213 of the adjacent first cooling channel 211 through a pipeline, and the second joint 214 of the adjacent first cooling channel 211 is connected to the main outlet pipe 500, or is connected to the first joint 213 connected to another first cooling channel 211; in this way, the first joint 213 and the second joint 214 of the adjacent first cooling channels 211 are connected through a pipeline, so that the adjacent first cooling channels 211 are connected, and the cooling medium in the main inlet pipe 400 enters the corresponding first cooling channel 211 through one of the first joints 213, and after completing the heat exchange in the first cooling channel 211, it continues to enter the next first cooling channel 211 for heat exchange, so as to make full use of the coldness of the cooling medium, and the main inlet pipe 400 is directly connected to the first joint 213, and the main outlet pipe 500 is directly connected to the second joint 214, so that the pipeline system is simplified.

[0056] It is understandable that the first joint 213 connected to the main inlet pipe 400 is connected to the first cooling channel 211 at the highest point, so that after the cooling medium enters the first cooling channel 211 at the highest point, it can flow downward to other first cooling channels 211 by gravity, which can reduce the flow power consumption of the cooling medium. In addition, the first joints 213 and the second joints 214 of adjacent first cooling channels 211 are arranged in opposite directions, that is, the first joint 213 connected to the upper first cooling channel 211 is located directly above the second joint 214 connected to the lower first cooling channel 211, which can shorten the length of the pipeline connecting adjacent first cooling channels 211 and reduce the energy loss of the cooling medium in the pipeline.

[0057] Similarly, refer to Figure 5 As shown in FIG. (f), the two ends of each second cooling channel 221 are respectively connected with a third joint 223 for introducing a cooling medium and a fourth joint 224 for discharging the cooling medium, that is, the cooling medium enters the second cooling channel 221 through the third joint 223, and after completing heat exchange with the second roller seat 220, the cooling medium is discharged from the fourth joint 224. The third joint 223 and the fourth joint 224 can be arranged at the end of the second roller seat 220 along the conveying direction, or at the side of the second roller seat 220 along the axial direction of the transmission roller 100.

[0058] In one embodiment, each third joint 223 is connected to the main inlet pipe 400, and each fourth joint 224 is connected to the main outlet pipe 500. The cooling medium in the main inlet pipe 400 enters different second cooling channels 221 through each third joint 223. After the cooling medium exchanges heat with the second roller seat 220 in the second cooling channel 221, it is discharged from the second cooling channel 221 through each fourth joint 224 and enters the main outlet pipe 500. In another embodiment, referring to Figure 5 In Figure (g), the third joint 223 connected to one of the second cooling channels 221 is connected to the main inlet pipe 400, and the fourth joint 224 connected to the second cooling channel 221 is connected to the third joint 223 of the adjacent second cooling channel 221 through a pipeline, and the fourth joint 224 of the adjacent second cooling channel 221 is connected to the main exhaust pipe 500, or is connected to the third joint 223 connected to another second cooling channel 221.

[0059] Further, the pipeline for connecting the adjacent first cooling channels 211 can be arranged inside the first roller seat 210, or outside the first roller seat 210; similarly, the pipeline for connecting the adjacent second cooling channels 221 can be arranged inside the second roller seat 220, or outside the second roller seat 220. For the case where the pipeline is arranged outside the first cooling channel 211 and the second cooling channel 221, refer to Figure 4 Figure (e) and Figure 5 In Figure (f), the transmission device also includes a first transfer tube 420 and a second transfer tube 520, one end of adjacent first cooling channels 211 is respectively connected to the two ends of the first transfer tube 420, and one end of adjacent second cooling channels 221 is respectively connected to the two ends of the second transfer tube 520, that is, the two ends of the first transfer tube 420 are respectively connected to the first joint 213 of one of the first cooling channels 211 and the second joint 214 of the adjacent first cooling channel 211, and the two ends of the second transfer tube 520 are respectively connected to the third joint 223 of one of the second cooling channels 221 and the fourth joint 224 of the adjacent second cooling channel 221; the channel structure inside the first roller seat 210 and the second roller seat 220 is simple, and the processing of the first roller seat 210 and the second roller seat 220 is relatively convenient.

[0060] For the case where the pipeline is arranged inside the first cooling channel 211 and the second cooling channel 221, refer to Figure 6The first roller seat 210 is also provided with a first transfer channel 215, one end of the adjacent first cooling channels 211 is connected through the first transfer channel 215, and the second roller seat 220 is also provided with a second transfer channel 225, one end of the adjacent second cooling channels 221 is connected through the second transfer channel 225, that is, the cooling medium in one of the first cooling channels 211 flows into the other first cooling channel 211 through the first transfer channel 215 in the first roller seat 210, and the cooling medium in one of the second cooling channels 221 flows into the other second cooling channel 221 through the second transfer channel 225 in the second roller seat 220; it is beneficial to simplify the pipeline structure and facilitate the assembly of the first roller seat 210, the second roller seat 220 and the pipeline system.

[0061] In one embodiment, if Figure 1 and Figure 2 , the transmission roller 100 is set as an integrated structure, that is, the first transmission part 110 and the second transmission part 120 are connected in one piece, the transmission roller 100 is a complete rod-shaped structure, and the two ends of the transmission roller 100 are respectively rotatably connected to the first roller seat 210 and the second roller seat 220. The transmission roller 100 is uninterrupted in the axial direction, and the silicon wafer can be directly placed on the surface of the transmission roller 100 for transportation. In this case, the power mechanism 300 is connected to the first transmission part 110, and the second transmission part 120 can be driven to rotate synchronously by the rotation of the first transmission part 110. The power mechanism 300 can be set on the side of the first roller seat 210 facing away from the second roller seat 220, and connected to the first transmission part 110.

[0062] In another embodiment, referring to Figure 7 , the first transmission part 110 and the second transmission part 120 are spaced apart from each other, that is, the transmission roller 100 has a discontinuous area, the silicon wafer can be pre-loaded in the transmission jig, the transmission jig is mounted between the first transmission part 110 and the second transmission part 120, and the first transmission part 110 and the second transmission part 120 jointly support the transmission jig. In this case, the first transmission part 110 and the second transmission part 120 are both connected to a power mechanism 300, and the two power mechanisms 300 drive the first transmission part 110 and the second transmission part 120 to rotate synchronously and at the same speed.

[0063] Reference Figure 8The base 200 further includes a connection seat 230. The first roller seat 210 and the second roller seat 220 are respectively detachably connected to the connection seat 230 on both sides along the axial direction of the transmission roller 100, so as to facilitate the maintenance and replacement of the heating plate and other structures under the transmission device. The above-mentioned detachable connection method is not limited to threaded connection, clamping, plugging, riveting, etc. The connection seat 230 can be set as a frame structure, a flat plate structure, etc. In one embodiment, the connection seat 230 includes a plurality of connection rods 231 arranged at intervals along the conveying direction of the transmission roller 100. The two ends of the connection rods 231 are respectively connected to the first roller seat 210 and the second roller seat 220, so that the connection between the connection seat 230 and the first roller seat 210 and between the connection seat 230 and the second roller seat 220 is more stable.

[0064] The connection seat 230 is provided with a positioning portion 232 for positioning the first roller seat 210 and the second roller seat 220 along the axial direction of the transmission roller 100 and the conveying direction of the transmission roller 100, so as to improve the installation accuracy between the first roller seat 210 and the connection seat 230 and between the second roller seat 220 and the connection seat 230, so as to make the axis of the first transmission part 110 and the second transmission part 120 coincide, and improve the stability of the power transmission from the power mechanism 300 to the transmission roller 100. The positioning portion 232 is not limited to being set as a positioning hole or a positioning pin. Taking the connection between the first roller seat 210 and the connection seat 230 as an example, the first roller seat 210 and the connection seat 230 are both provided with positioning holes, and the first roller seat 210 and the connection seat 230 are mutually positioned by inserting the positioning pin into the positioning holes of the two, or the first roller seat 210 is provided with a positioning hole, and the connection seat 230 is provided with a positioning pin, and the positioning pin is inserted into the positioning hole to realize the mutual positioning of the first roller seat 210 and the connection seat 230. In addition, a plurality of positioning portions 232 may be provided, and the installation accuracy between the first roller seat 210 and the connecting seat 230 and between the second roller seat 220 and the connecting seat 230 may be further improved through multi-point positioning.

[0065] Reference Figure 1 and Fig. 9 The power mechanism 300 includes a transmission shaft 310 extending along the conveying direction of the transmission roller 100 and a plurality of first transmission wheels 320 arranged at intervals on the transmission shaft 310. The end of the first transmission part 110 and / or the second transmission part 120 is provided with a second transmission wheel 101. The second transmission wheel 101 of the first transmission part 110 is located on the side of the first roller seat 210 facing away from the second roller seat 220. The second transmission wheel 101 of the second transmission part 120 is located on the side of the second roller seat 220 facing away from the first roller seat 210. The first transmission wheel 320 is connected with the second transmission wheel 101 in transmission connection. When the transmission shaft 310 rotates, the first transmission wheel 320 rotates synchronously with the transmission shaft 310. The first transmission wheel 320 transmits power to the first transmission part 110 and / or the second transmission part 120 through the second transmission wheel 101, thereby realizing the rotation of the transmission roller 100 and the conveying of the silicon wafer.

[0066] It is understandable that the power mechanism 300 also includes a power component that drives the transmission shaft 310 to rotate. The power component is configured as a motor, a steering gear, or other mechanism that can output rotational power. The transmission shaft 310 is also provided with a driving wheel 330, which can be configured as a synchronous pulley, a sprocket, a V-belt pulley, etc. The driving wheel 330 is connected to the driving wheel 330 by means of belt transmission, chain transmission, etc., and the transmission shaft 310 is driven to rotate by driving the driving wheel 330. The power component can be arranged below the transmission shaft 310 to fully utilize the vertical space of the transmission device.

[0067] The transmission connection between the first transmission wheel 320 and the second transmission wheel 101 is not limited to that the first transmission wheel 320 and the second transmission wheel 101 are set as orthogonal bevel gears, and the first transmission wheel 320 and the second transmission wheel 101 are provided with mutually meshing gear teeth, and the first transmission wheel 320 and the second transmission wheel 101 have a rotation axis perpendicular to each other. When the transmission shaft 310 rotates, the rotation is transmitted to the transmission roller 100 through the first transmission wheel 320 and the second transmission wheel 101 and the rotation direction is changed.

[0068] In another embodiment, the first transmission wheel 320 and the second transmission wheel 101 are set as orthogonal magnetic wheels, the rotation direction of the first transmission wheel 320 is perpendicular to the second transmission wheel 101, and there is a certain distance between the two, which can avoid friction and noise when transmitting torque. It can be understood that when the cooling medium cools the first roller seat 210 and the second roller seat 220, the second transmission wheel 101 receives the cold energy transmitted by the first transmission part 110 and the second transmission part 120, and can be cooled at the same time, the temperature of the first transmission wheel 320 and the second transmission wheel 101 is reduced, and the torque transmission between the two is more stable.

[0069] In addition, the power mechanism 300 also includes a plurality of mounting brackets 340, which are arranged at intervals along the axial direction of the transmission shaft 310, and the transmission shaft 310 is inserted into the mounting brackets 340 and is rotatably connected to the mounting brackets 340. The mounting brackets 340 are detachably connected to the first roller seat 210 and / or the second roller seat 220, and can adjust the vertical connection position to change the height of the transmission shaft 310 and the first transmission wheel 320, and then adjust the spacing between the first transmission wheel 320 and the second transmission wheel 101, so that the torque transmission between the first transmission wheel 320 and the second transmission wheel 101 meets the load requirements.

[0070] In one embodiment, the mounting bracket 340 is provided with a waist-shaped hole 341, and the threaded fastener is passed through the waist-shaped hole 341 and locks the mounting bracket 340 to the first roller seat 210 or the second roller seat 220. By changing the position of the threaded fastener in the waist-shaped hole 341, the height of the mounting bracket 340 and the distance between the first transmission wheel 320 and the second transmission wheel 101 can be adjusted; or, in another embodiment, the first roller seat 210 or the second roller seat 220 is provided with a waist-shaped hole, and the threaded fastener is passed through the mounting bracket 340 and the waist-shaped hole, and the mounting bracket 340 is locked to the first roller seat 210 or the second roller seat 220. By changing the position of the threaded fastener in the waist-shaped hole, the distance between the first transmission wheel 320 and the second transmission wheel 101 can be adjusted.

[0071] The transmission shaft 310 includes a plurality of transmission sections 311. Adjacent transmission sections 311 are arranged axially and connected by couplings 312 and can rotate synchronously. The transmission shaft 310 is configured to be spliced ​​in multiple sections. This can avoid the transmission shaft 310 being too long, affecting the straightness of the transmission shaft 310, resulting in inconsistent spacing between different first transmission wheels 320 and second transmission wheels 101, and reducing the consistency of the transmitted torque and the stability of power transmission.

[0072] The embodiments of the utility model are described in detail above in conjunction with the accompanying drawings, but the utility model is not limited to the above embodiments. Various changes can be made within the knowledge of ordinary technicians in the relevant technical field without departing from the purpose of the utility model. In addition, the embodiments of the utility model and the features in the embodiments can be combined with each other without conflict.

Claims

1. Annealing furnace transmission device, characterized in that: include: A plurality of transmission rollers are arranged side by side, each transmission roller comprises a first transmission part and a second transmission part which are arranged at intervals along the axial direction; The base comprises a first roller seat and a second roller seat which are arranged at intervals along the axial direction of the transmission roller, the first transmission part is rotatably connected to the first roller seat, the second transmission part is rotatably connected to the second roller seat, a first cooling channel is provided in the first roller seat, a second cooling channel is provided in the second roller seat, and a cooling medium is passed through the first cooling channel and the second cooling channel; A power mechanism is connected to the first transmission part and / or the second transmission part, and is used to drive the transmission roller to rotate.

2. The annealing furnace transmission device according to claim 1, characterized in that: The first cooling channel extends to both ends of the first roller seat along the arrangement direction of the transmission rollers, and the second cooling channel extends to both ends of the second roller seat along the arrangement direction of the transmission rollers.

3. The annealing furnace transmission device according to claim 1, characterized in that: The first cooling channel includes a plurality of connected first curved sections, each of which is disposed around a circumference of a rotationally connected position between the first transmission portion and the first roller seat; The second cooling channel includes a plurality of connected second curved sections, and each of the second curved sections is disposed around a circumferential side of a rotationally connected position between the second transmission portion and the second roller seat.

4. The annealing furnace transmission device according to claim 1, characterized in that: The first roller seat comprises a plurality of first cooling channels arranged at intervals in a vertical direction, and the rotation connection position between the first transmission part and the first roller seat is located between adjacent first cooling channels; The second roller seat includes a plurality of second cooling channels arranged at intervals in the vertical direction, and the rotational connection position between the second transmission portion and the second roller seat is located between adjacent second cooling channels.

5. The annealing furnace transmission device according to claim 4, characterized in that: The first roller seat is further provided with a first transfer channel, and one end of the adjacent first cooling channel is communicated through the first transfer channel; the second roller seat is further provided with a second transfer channel, and one end of the adjacent second cooling channel is communicated through the second transfer channel; Alternatively, the annealing furnace transmission device also includes a first transfer tube and a second transfer tube, one end of the adjacent first cooling channels is respectively connected to the two ends of the first transfer tube, and one end of the adjacent second cooling channels is respectively connected to the two ends of the second transfer tube.

6. The annealing furnace transmission device according to claim 4, characterized in that: Both ends of each first cooling channel are respectively connected with a first joint for introducing a cooling medium and a second joint for discharging the cooling medium, and the annealing furnace transmission device further comprises a main introduction pipe and a main discharge pipe; wherein the first joints are all in communication with the main introduction pipe, and the second joints are all in communication with the main discharge pipe; or, the first joint connected to one of the first cooling channels is connected to the main introduction pipe, and the second joint is connected to the first joint of the adjacent first cooling channel through a pipeline, and the second joint of the adjacent first cooling channel is connected to the main discharge pipe, or is connected to the first joint connected to another first cooling channel; The two ends of each second cooling channel are respectively connected with a third joint for introducing a cooling medium and a fourth joint for discharging the cooling medium, and the annealing furnace transmission device also includes a main introduction pipe and a main discharge pipe; wherein the third joints are all connected to the main introduction pipe, and the fourth joints are all connected to the main discharge pipe; or, the third joint connected to one of the second cooling channels is connected to the main introduction pipe, and the fourth joint is connected to the third joint of the adjacent second cooling channel through a pipeline, and the fourth joint of the adjacent second cooling channel is connected to the main discharge pipe, or is connected to the third joint connected to another second cooling channel.

7. The annealing furnace transmission device according to claim 1, characterized in that: The first transmission part is integrally connected with the second transmission part, and the power mechanism is connected to the first transmission part; Alternatively, the first transmission part and the second transmission part are spaced apart from each other, and both the first transmission part and the second transmission part are connected to the power mechanism.

8. The annealing furnace transmission device according to claim 1, characterized in that: The power mechanism includes a transmission shaft extending along the conveying direction of the transmission roller and a plurality of first transmission wheels arranged at intervals on the transmission shaft. A second transmission wheel is provided at the end of the first transmission part and / or the second transmission part. The first transmission wheel is transmission-connected with the second transmission wheel.

9. The annealing furnace transmission device according to claim 8, characterized in that: The transmission shaft comprises a plurality of transmission sections, and adjacent transmission sections are connected via couplings.

10. The annealing furnace transmission device according to claim 8, characterized in that: The first transmission wheel and the second transmission wheel are configured as orthogonal magnetic wheels.

11. The annealing furnace transmission device according to claim 10, characterized in that: The power mechanism includes a plurality of mounting brackets, which are arranged at intervals along the axial direction of the transmission shaft. The transmission shaft passes through the mounting brackets and is rotatably connected to the mounting brackets. The mounting brackets are detachably connected to the first roller seat and / or the second roller seat, and can change the vertical connection position.

12. The annealing furnace transmission device according to claim 1, characterized in that: The base also includes a connecting seat, and the first roller seat and the second roller seat are respectively detachably connected to the two sides of the connecting seat along the axial direction of the transmission roller. The connecting seat is provided with a positioning portion for positioning the first roller seat and the second roller seat along the axial direction of the transmission roller and the conveying direction of the transmission roller.

Images