Air bearing device

Abstract

The utility model discloses an air bearing device, which is used in the technical field of air bearings and comprises a throttle plate, a base and a plurality of adjusting screws. The throttling plate and the base are arranged in a stacked mode, and the throttling plate and the base are connected and fixed. A plurality of throttling through holes for spraying gas are formed in the throttling plate; an air inlet channel and a plurality of screw through holes which are communicated with each other are formed in the base, and the plurality of screw through holes are respectively aligned with and communicated with different throttling through holes; a plurality of adjusting screw rods are respectively screwed in the different screw through holes, a plurality of air outlet cavities are formed between the plurality of adjusting screw rods and the throttle plate, the plurality of air outlet cavities are respectively communicated with the different throttle through holes, and the plurality of air outlet cavities are all communicated with the air inlet channel; the adjusting screws are connected in a screwed mode to be used for adjusting the air inlet flow passing areas of the throttling through holes so as to control the air inlet pressure of the throttling through holes, and therefore the throttling through holes of different sizes are matched with the air inlet pressure, and the problem that due to machining errors of the throttling through holes, the air outlet pressure is not uniform is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of air floating bearings, in particular to an air floating bearing device. Background Art

[0002] Air bearings have the advantages of high precision, no friction, cleanliness and no pollution, and are widely used in precision instruments and manufacturing fields such as ultra-precision machine tools and lithography machines. Air bearings are known for their frictionless and non-contact operation and have long been the cornerstone of precision engineering and high-speed applications; the future of air bearings is bright, and advances in material science, manufacturing technology and intelligent technology are expected to improve their performance and expand their application range; with the continuous development of industries such as aerospace, semiconductor manufacturing, medical equipment and renewable energy, the demand for high-precision, reliable and efficient air bearing solutions will continue to grow; solving the challenges related to air bearings will be the key to unleashing the full potential of this technology and paving the way for a new era of precision engineering and high-speed applications.

[0003] Small hole throttling bearings are the most common air bearings. Generally, when the hole diameter is about 100 microns and the hole depth is greater than 2mm, it has good rigidity. In addition, the bearing capacity can be improved at the same time by arranging pressure equalizing grooves. Metal materials are often used to make air bearings. The method commonly used to process 100-micron holes is laser processing. Laser processing of small holes with a 100-micron diameter and a depth of 2mm, however, due to laser process problems, the holes are inconsistent, that is, the apertures of the holes on the same air bearing are different. This will lead to asymmetric and uneven outlet pressure of the holes, tilted air film, and even local contact of the air bearing surface in actual applications, which will eventually lead to wear of the air bearing surface from the outside to the inside.

[0004] Therefore, it is of practical value to study an air bearing device that can adapt to the small hole diameter and regulate the air inlet pressure of the throttling hole so that the air outlet of each throttling hole is uniform and the local stiffness is similar. Utility Model Content

[0005] The utility model provides an air-floating bearing device, which uses an adjusting device to control the air inlet pressure of different throttle flow holes according to different throttle flow hole diameters, and then regulates the air outlet volumes of different throttle flow holes to make them converge, thereby solving the problem of uneven air outlet pressure of throttle flow holes caused by processing technology.

[0006] The utility model provides an air-floating bearing device, comprising: a throttle plate, a base and a plurality of adjusting screws; the throttle plate and the base are stacked and arranged, and the throttle plate is connected and fixed to the base; the throttle plate is provided with a plurality of throttling holes for ejecting gas; the base is provided with an air inlet channel and a plurality of screw holes that are interconnected, and the plurality of screw holes are respectively aligned with and connected to different throttling holes; the plurality of adjusting screws are respectively screwed into different screw holes, and a plurality of air outlet cavities are formed between the plurality of adjusting screws and the throttle plate, and the plurality of air outlet cavities are respectively connected to different throttling holes, and the plurality of air outlet cavities are all connected to the air inlet channel; the screw connection of the plurality of adjusting screws is used to respectively adjust the flow area of ​​the air outlet cavity leading to the throttling hole, so as to control the size of the outflow air pressure of the different throttling holes.

[0007] In one embodiment, the cavity diameter of the air outlet cavity is larger than the aperture of the throttling hole.

[0008] In one embodiment, the aperture of the screw through hole is larger than the aperture of the throttling hole, and the screw through hole and the throttling hole form a step-back on the throttle plate; the adjusting screw, the wall of the screw through hole and the step-back together form the air outlet cavity.

[0009] In one embodiment, the screw through hole includes a wide diameter screw hole section and a narrow diameter screw hole section, the narrow diameter screw hole section is arranged adjacent to the throttle plate, and the wide diameter screw hole section is arranged away from the throttle plate; the adjusting screw includes a wide diameter rod section and a narrow diameter rod section; the wide diameter rod section matches the shape of the wide diameter screw hole section, and the narrow diameter rod section matches the shape of the narrow diameter screw hole section.

[0010] In one of the embodiments, the throttling hole includes a wide-diameter through-hole section and a narrow-diameter through-hole section; along the direction of the ejected gas, the wide-diameter through-hole section and the narrow-diameter through-hole section are arranged in sequence.

[0011] In one embodiment, the air bearing device also includes a plurality of sealing rings; the plurality of sealing rings are clamped between the throttle plate and the base, and the plurality of sealing rings are respectively arranged outside different screw through holes, and the sealing rings are used to seal the gap between the screw through hole and the adjacent throttle flow hole.

[0012] In one embodiment, the air inlet passage includes a first straight air passage and a second straight air passage; two ends of the first straight air passage pass through two side walls of the base, and two ends of the second straight air passage pass through two side walls of the base, the first straight air passage and the second straight air passage are arranged perpendicular to each other, and the first straight air passage is connected to the second straight air passage; the screw hole is connected to the first straight air passage and / or the second straight air passage.

[0013] In one of the embodiments, the plurality of throttling holes are arranged regularly; the throttling plate is provided with a coaxially arranged annular pressure equalizing groove and a circular pressure equalizing groove, and the annular pressure equalizing groove is arranged around the circular pressure equalizing groove; the annular pressure equalizing groove and the circular pressure equalizing groove are both arranged on a side surface away from the base, and the throttling hole is connected to the annular pressure equalizing groove or the circular pressure equalizing groove.

[0014] In one embodiment, the air bearing device further comprises a friction reducing ring; the friction reducing ring is arranged on a side of the throttle plate away from the base, the friction reducing ring is arranged around the edge of the throttle plate, and the friction reducing ring is arranged coplanarly with the throttle plate.

[0015] In one embodiment, the air bearing device further comprises a plurality of displacement sensors, which are arranged circumferentially around the axis of the air bearing device, and are used to detect the thickness of the air film.

[0016] It can be seen from the above technical solutions that the utility model has at least the following advantages:

[0017] 1. The air bearing device of the utility model provides a throttle plate, a base and a plurality of adjusting screws, wherein the throttle plate is provided with a plurality of throttle flow holes for ejecting gas; the base is provided with an air inlet channel and a plurality of screw holes which are interconnected, and the plurality of screw holes are respectively aligned with and connected to different throttle flow holes; the plurality of adjusting screws are respectively screwed into different screw holes, and a plurality of air outlet cavities are formed between the plurality of adjusting screws and the throttle plate, and the plurality of air outlet cavities are respectively connected to different throttle flow holes, and the plurality of air outlet cavities are all connected to the air inlet channel; the screw connection of the plurality of adjusting screws is used to respectively adjust the volume of the different air outlet cavities to control different throttles The size of the air intake pressure of the through hole is adjusted because the adjusting screw can adjust the gas flow area. Therefore, when applying the application, the user connects the air intake through hole to the air intake device, and then rotates different adjusting screws to move the adjusting screws away from or closer to the adjacent throttle plate, thereby adjusting the size of the gas flow area. In conjunction with the detection of the sensor, the adjusting screw is not stopped until the preset air film thickness is met, so that the air outlet of each throttle flow hole is uniform, and finally the purpose of similar local stiffness of each throttle flow hole is achieved, which effectively solves the problem of uneven air outlet pressure caused by the inability to adjust the throttle flow hole in the current air floating bearing.

[0018] 2. This solution also includes a friction reducing ring; the friction reducing ring is arranged on the side of the throttle plate away from the base, the friction reducing ring is arranged around the edge of the throttle plate and is coplanar with the throttle plate. The friction reducing ring can improve the durability of the air bearing and reduce the influence of friction on the accuracy of the air bearing surface. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0020] Figure 1 A schematic diagram of the installation of an air bearing displacement sensor provided in an embodiment of the utility model;

[0021] Figure 2 A schematic cross-sectional view of the overall structure of an air bearing device provided in an embodiment of the utility model;

[0022] Figure 3 A partial cross-sectional schematic diagram of an air outlet cavity of an air bearing device provided in an embodiment of the utility model;

[0023] Figure 4 A schematic diagram of the base structure of an air bearing device provided in an embodiment of the utility model;

[0024] Figure 5 A schematic diagram of the cross-sectional structure of an air inlet passage of an air bearing device provided in an embodiment of the utility model;

[0025] Figure 6 A bottom view schematic diagram of a throttle plate of an air bearing device provided in an embodiment of the utility model;

[0026] Figure 7 A schematic diagram of an air bearing calibration device provided in an embodiment of the utility model.

[0027] Reference numerals

[0028] 1. Throttle plate; 10. Throttle flow hole; 2. Base; 20. Inlet channel; 200. First straight air channel; 201. Second straight air channel; 21. Screw hole; 210. Wide-diameter screw hole section; 211. Narrow-diameter screw hole section; 3. Adjusting screw; 30. Wide-diameter rod section; 31. Narrow-diameter rod section; 4. Air outlet cavity; 5. Setback; 6. Sealing ring; 60. Sealing installation groove; 70. Annular equalizing pressure groove; 71. Circular equalizing pressure groove; 8. Anti-friction ring; 9. Displacement sensor; a. Weight block. DETAILED DESCRIPTION

[0029] The embodiment of the utility model provides an air-floating bearing device, which uses a screw to adjust the size of the gas flow cross-sectional area, thereby changing the size of the air intake pressure on the throttling hole, and then regulating the air outlet volume of different throttling holes to make them converge, solving the problem of uneven air outlet pressure of the throttling holes caused by processing technology.

[0030] In order to make the utility model's purpose, features, and advantages more obvious and easy to understand, the following will be combined with the drawings in the utility model embodiments to clearly and completely describe the technical solutions in the utility model embodiments. Obviously, the embodiments described below are only part of the utility model embodiments, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0031] See also Figure 1 , Figure 1 A schematic diagram of the overall structure of an air bearing device provided in an embodiment of the utility model.

[0032] The utility model provides an air-floating bearing device, comprising: a throttle plate 1, a base 2 and a plurality of adjusting screws 3; the throttle plate 1 and the base 2 are stacked and arranged, and the throttle plate 1 and the base 2 are connected and fixed; a plurality of throttle flow holes 10 for ejecting gas are arranged in the throttle plate 1; an air inlet channel 20 and a plurality of screw holes 21 which are interconnected are arranged in the base 2, and the plurality of screw holes 21 are respectively aligned with and connected to different throttle flow holes 10; a plurality of adjusting screws 3 are respectively screwed in different screw holes 21, and a plurality of air outlet cavities 4 are formed between the plurality of adjusting screws 3 and the throttle plate 1, and the plurality of air outlet cavities 4 are respectively connected to different throttle flow holes 10, and the plurality of air outlet cavities 4 are all connected to the air inlet channel 20; the screw connection of the plurality of adjusting screws 3 is used to respectively adjust the volume of different air outlet cavities 4 to control the air inlet pressure of different throttle flow holes 10.

[0033] Before actual application, it is necessary to calibrate the ventilation pressure of different throttle holes. The calibration process is as follows: first, place the air bearing device on the platform, and then connect the air inlet channel 20 with the air inlet device. The gas in the air inlet channel 20 is ejected through the screw hole 21, the air outlet cavity 4 and the throttling hole 10, and an air film is formed between the air bearing device and the platform. When it is necessary to adjust the gas ejected from the throttling hole 10, the user turns the adjusting screw 3 to change the position of the adjusting screw 3 in the screw hole 21, so that it is closer to the throttling hole 10 or farther away from the throttling hole 10, thereby achieving a change in the flow cross-sectional area of ​​the air in the air outlet cavity 4, and finally achieving the adjustment of the air outlet flow rate of the throttling hole 10.

[0034] It should be pointed out that the prior art once adopted an adaptively deformable active air pressure regulating unit, which achieved high-frequency contraction and expansion by filling and discharging air into the active air pressure regulating unit, and utilized the contraction and expansion of the active air pressure regulating unit to adjust the size of the air outlet cavity 4. However, under this setting, since the active air pressure regulating unit is composed of an inflation gas and a deformable membrane, its flexible membrane is more susceptible to the influence of external high-pressure air intake than the rigid adjusting screw 3, that is, when air is intaked into the air intake channel 20, the high-pressure air intake easily squeezes the membrane, causing the active air pressure regulating unit to contract, thereby affecting the size of the air outlet cavity 4. However, after the present scheme adopts the feature of adjusting the air outlet cavity 4 by the adjusting screw 3, due to the greater rigidity of the adjusting screw 3 and the screw hole 21, the high-pressure gas entering the air intake channel 20 is difficult to push the adjusting screw 3 out of the screw hole 21, thereby ensuring that the size of the air outlet cavity 4 is not affected by the incoming air.

[0035] In a specific embodiment, regarding the above-mentioned throttle plate 1, see Figure 1 and Figure 2 The throttle plate 1 is connected and fixed to the base 2 in various ways, including but not limited to bonding, welding and other fixed connection methods. Those skilled in the art can choose according to their actual needs.

[0036] For the throttle flow hole 10 on the throttle plate 1, as Figure 2 As shown, the throttle holes 10 are regularly arranged on the throttle plate 1. Of course, this regular arrangement can be a ring-shaped uniform arrangement or an array-shaped uniform arrangement. The throttle holes 10 are connected to the air outlet cavity 4 and the air inlet channel 20. The throttle holes 10 and the screw holes 21 are coaxially arranged. When used, the airflow enters the air outlet cavity 4 through the air inlet channel 20, and then enters the throttle holes 10 from the air outlet cavity 4. The airflow ejected from the throttle holes 10 will form an air film of a certain thickness on the platform.

[0037] In order to improve the load-bearing capacity of the air bearing device, such as Figure 2 and Figure 6 As shown, the throttle plate 1 is provided with a coaxially arranged annular pressure equalizing groove 70 and a circular pressure equalizing groove 71, and the annular pressure equalizing groove 70 is arranged around the circular pressure equalizing groove 71; the annular pressure equalizing groove 70 and the circular pressure equalizing groove 71 are both arranged on the side surface away from the base 2, and the throttling flow hole 10 is connected with the annular pressure equalizing groove 70 or the circular pressure equalizing groove 71. After adopting this setting method, the gas ejected from the throttling flow hole 10 will flow and cover the annular pressure equalizing groove 70 or the circular pressure equalizing groove 71, increasing the area of ​​the high-pressure gas, that is, from the original cross-section of the throttling flow hole 10 to the cross-section of the annular pressure equalizing groove 70 or the circular pressure equalizing groove 71, which is beneficial to improve the load-bearing and rigidity of the air-floating bearing.

[0038] It should be understood that the depth of the pressure equalization groove is usually within 30 microns.

[0039] To reduce the possibility of damage to the air bearing assembly due to tilting, Figure 2 As shown, the air bearing device also includes a wear-reducing ring 8; the wear-reducing ring 8 is arranged on the side of the throttle plate 1 away from the base 2, and the wear-reducing ring 8 is arranged around the edge of the throttle plate 1. The wear-reducing ring 8 and the throttle plate 1 are arranged coplanarly. After adopting this arrangement, when the air bearing device forms an air film and the air film has uneven thickness, the air bearing tilts. At this time, the wear-reducing ring 8 located at the edge of the throttle plate 1 will first contact the platform, greatly reducing the wear of the air bearing and the guide rail.

[0040] In a specific embodiment, regarding the above-mentioned base 2, as Figure 2 and Figure 4 As shown, the base 2 is used to load heavy objects, and the air inlet channel 20 provided on the base 2 is used to connect with the air supply device for ventilation. When used, the heavy objects are first loaded on the base 2, and then the base 2 is connected with the air supply device.

[0041] For the air inlet channel 20 of the base 2, as Figure 5 As shown, the air inlet channel 20 includes a first straight air channel 200 and a second straight air channel 201; both ends of the first straight air channel 200 penetrate the two side walls of the base 2, and both ends of the second straight air channel 201 penetrate the two side walls of the base 2, the first straight air channel 200 and the second straight air channel 201 are arranged perpendicular to each other, and the first straight air channel 200 is connected with the second straight air channel 201; the screw hole 21 is connected with the first straight air channel 200 and / or the second straight air channel 201. After adopting this arrangement, the first straight air channel 200 is provided with air inlets on both side walls of the base 2, and the air inlets on both sides can be used for air intake. Similarly, the second straight air channel 201 is provided with air inlets on both side walls of the base 2, and the air inlets on both sides can be used for air intake. The air intake volume of the air inlet channel 20 is greatly improved, and the air intake efficiency is effectively improved.

[0042] For the screw through hole 21, Figure 2 As shown, the screw hole 21 passes through both sides of the base 2 along the thickness direction of the base 2. The arrangement of the screw hole 21 is the same as that of the throttling hole 10. The screw hole 21 is coaxially arranged with the throttling hole 10. The adjusting screw 3 is screwed and installed in the screw hole 21 to make the adjusting screw 3 closer to or farther away from the throttling hole 10, thereby changing the size of the air outlet cavity 4 formed by the adjusting screw 3 and the throttling plate 1, and changing the flow area of ​​the air outlet cavity 4 leading to the throttling hole, so as to achieve the purpose of adjusting the intake pressure of the throttling hole.

[0043] More specifically, if Figure 2As shown, the screw hole 21 includes a wide-diameter screw hole section 210 and a narrow-diameter screw hole section 211. The narrow-diameter screw hole section 211 is arranged adjacent to the throttle plate 1, and the wide-diameter screw hole section 210 is arranged away from the throttle plate 1; the adjusting screw 3 includes a wide-diameter rod section 30 and a narrow-diameter rod section 31; the wide-diameter rod section 30 matches the shape of the wide-diameter screw hole section 210, and the narrow-diameter rod section 31 matches the shape of the narrow-diameter screw hole section 211. After adopting this arrangement, the narrow-diameter screw hole section 211 has a small aperture, so the gas flowing out of the screw hole 21 from the intake channel 20 is naturally less. Even if there is gas flowing into the narrow-diameter screw hole section 211, due to the arrangement of the wide-diameter rod section 30, the gas will collide with the steps between the wide-diameter screw hole section 210 and the narrow-diameter screw hole section 211 after flowing into the narrow-diameter screw hole, thereby reducing the outflow of gas.

[0044] In a specific embodiment, regarding the above-mentioned air outlet cavity 4, as Figure 2 and Figure 3 As shown, the cavity diameter of the air outlet cavity 4 is larger than the aperture of the throttling hole 10. After adopting this setting, when the airflow flows from the air outlet cavity 4 with a larger cavity diameter to the throttling hole 10 with a smaller aperture, the flow speed of the airflow will become faster. When it finally flows out of the throttling hole 10, the local stiffness at the outlet of the throttling hole 10 will also become larger, ensuring the normal use of the air bearing.

[0045] More specifically, the aperture of the screw hole 21 is larger than the aperture of the throttling hole 10, and the screw hole 21 and the throttling hole 10 form a step-back 5 on the throttle plate 1; the adjusting screw 3, the wall of the screw hole 21 and the step-back 5 together form an air outlet cavity 4. After adopting this arrangement, the size of the air outlet cavity 4 is affected by the position of the adjusting screw 3, that is, the closer the adjusting screw 3 is to the throttle plate 1, the smaller the air outlet cavity 4 will be, and the farther the adjusting screw 3 is from the throttle plate 1, the larger the air outlet cavity 4 will be, thereby adjusting the flow area of ​​the gas.

[0046] In order to prevent the air flow from flowing out of the air outlet cavity 4, Figure 2 and Figure 3 As shown, that is, to prevent the airflow from flowing out from the gap between the throttle plate 1 and the base 2, the air bearing device also includes a plurality of sealing rings 6; the plurality of sealing rings 6 are clamped between the throttle plate 1 and the base 2, and the plurality of sealing rings 6 are respectively arranged outside different screw holes 21, and the sealing rings 6 are used to seal the gap between the screw holes 21 and the adjacent throttling holes 10. After adopting this arrangement, the sealing rings 6 arranged outside different screw holes 21 can prevent the airflow from flowing out from the gap between the screw holes 21 and the throttling holes 10, and effectively avoid the occurrence of air leakage in the air outlet cavity 4.

[0047] More specifically, a sealing installation groove 60 is provided on the base 2, and the sealing installation groove 60 is arranged adjacent to one side of the throttle plate 1. The sealing ring 6 is arranged in the sealing installation groove 60. When used, the sealing ring 6 is clamped by the sealing installation groove 60 and the throttle plate 1 at the same time, thereby achieving the purpose of sealing the air outlet cavity 4. Of course, the sealing installation groove 60 can also be set on the throttle plate 1, and the sealing ring 6 is pressed and deformed by the base 2 and the sealing installation groove 60 to achieve sealing.

[0048] In a specific calibration embodiment, in order to ensure that the gas outlet of each throttling hole 10 is uniform, as shown in FIG. Figure 1 As shown, the air bearing device also includes four displacement sensors 9, which are arranged circumferentially around the axis of the air bearing device. The four displacement sensors 9 are used to detect the thickness of the air film. When calibrating, the four displacement sensors 9 are used to detect the thickness of the air film in different places. When it is found that the thickness of the air film is uneven at a certain place, it can be considered that the air outlet of the throttling hole 10 at that place is uneven. Then, the adjusting screw 3 can be rotated to change the size of the air outlet cavity 4, and then the air outlet pressure of each throttling hole 10 is adjusted until the readings of the four displacement sensors 9 are consistent.

[0049] More specifically, four displacement sensors 9 are fixedly mounted on the air bearing device through mounting seats respectively, and the four displacement sensors 9 are used to detect the thickness of the air film at different positions.

[0050] It should be understood that, in the present embodiment, the number of displacement sensors 9 is preferably four, but other numbers of sensors may be selected by those skilled in the art.

[0051] Of course, the use of the displacement sensor 9 is only a better example. Those skilled in the art can detect the thickness of the air film by means of a laser sensor or other device capable of detecting displacement, and adjust the adjusting screw 3 in each screw hole 21 according to the detection result, so that the outlet pressure of each throttling hole 10 is consistent with the indication of the displacement sensor.

[0052] The above is the basic structure of this solution. The following will provide an assembly method and calibration method of this solution.

[0053] The assembly process of this scheme includes: first, apply epoxy resin glue on a specific area on one side of the throttle plate 1, and then place the sealing ring 6 in the sealing installation groove of the base 2, and then place the glue surface of the throttle plate 1 on the upper surface of the base 2, and apply a certain pre-tightening force to press the throttle plate 1 and the base 2. It should be noted that the screw hole 21 of the base 2 and the throttle flow hole 10 of the throttle plate 1 need to be aligned; wait until the glue is completely cured and the stress of the throttle plate 1 is released, and then the pressure equalizing groove is processed by precision machining method to finally realize the assembly of this scheme.

[0054] Calibration device reference Figure 7 , Figure 7 That is, it is a schematic diagram of a scenario in which the air bearing is loaded with a heavy object a and the air inlet pressure of the throttle hole 10 is adjusted. The calibration method of this scheme includes:

[0055] S1, determine the theoretical load and air supply pressure P MPa of the air bearing at 5 microns through theory and experiment.

[0056] S2, introduce air pressure of (P+0.2)MPa into the air bearing and place the air bearing on a horizontal reference plane.

[0057] S3, place a weight block a of the same weight as the load on the air bearing.

[0058] S4, the contact displacement sensors 9 are respectively installed on the side surfaces of the air bearings to measure the local changes of the air films corresponding to the five throttling holes 10.

[0059] S5, cut off the air intake of the air bearing, so that the air bearing falls on the horizontal reference plane, the air film gap is zero, and the displacement sensor 9 is cleared.

[0060] S6, again introduce (P+0.2)MPa of air pressure into the air bearing. At this time, the suspension height of the air bearing exceeds 5 microns. Adjust the five air pressure adjustment screws 3 respectively to reduce the air pressure value entering each throttling hole 10 until the readings of the four contact displacement sensors 9 are consistent with 5 microns.

[0061] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features may be replaced by equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

[0062] The terms "first", "second", "third", "fourth", etc. (if any) in the specification of the present application and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable where appropriate, so that the embodiments of the present application described herein can be implemented in an order other than those illustrated or described herein, for example. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device comprising a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0063] Finally, it should be noted that, in this article, relational terms such as first and second, etc. are merely used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations.

Claims

1. An air bearing device, characterized in that: include: a throttle plate, a base, and a plurality of adjusting screws; The throttle plate and the base are stacked and arranged, and the throttle plate is connected and fixed to the base; The throttle plate is provided with a plurality of throttling holes for ejecting gas; The base is provided with an air intake passage and a plurality of screw holes which are interconnected, and the plurality of screw holes are respectively aligned with and connected to different throttling holes; The plurality of adjusting screws are respectively screwed into different screw holes, a plurality of air outlet cavities are formed between the plurality of adjusting screws and the throttle plate, the plurality of air outlet cavities are respectively communicated with different throttle holes, and the plurality of air outlet cavities are all communicated with the air inlet channel; The threaded connection of the plurality of adjusting screws is used to respectively adjust the flow area from the air outlet cavity to the throttling hole, so as to control the intake air pressure of different throttling holes.

2. The air bearing device according to claim 1, characterized in that: The cavity diameter of the air outlet cavity is larger than the aperture of the throttling hole.

3. The air bearing device according to claim 2, characterized in that: The diameter of the screw through hole is larger than the diameter of the throttling hole, and the screw through hole and the throttling hole form a recessed platform on the throttle plate; The adjusting screw, the wall surface of the screw through hole and the setback together form the air outlet cavity.

4. The air bearing device according to claim 1, characterized in that: The screw hole comprises a wide-diameter screw hole section and a narrow-diameter screw hole section, wherein the narrow-diameter screw hole section is arranged adjacent to the throttle plate, and the wide-diameter screw hole section is arranged away from the throttle plate; The adjusting screw comprises a wide diameter rod section and a narrow diameter rod section; The wide-diameter rod segment matches the wide-diameter screw hole segment in shape, and the narrow-diameter rod segment matches the narrow-diameter screw hole segment in shape.

5. The air bearing device according to claim 1, characterized in that: The air bearing device also includes a plurality of sealing rings; A plurality of sealing rings are clamped between the throttle plate and the base, and the plurality of sealing rings are respectively arranged outside different screw through holes, and the sealing rings are used to seal the gap between the screw through hole and the adjacent throttle flow hole.

6. The air bearing device according to claim 1, characterized in that: The air intake passage comprises a first straight air passage and a second straight air passage; Two ends of the first straight airway penetrate through two side walls of the base, and two ends of the second straight airway penetrate through two side walls of the base, the first straight airway and the second straight airway are arranged perpendicular to each other, and the first straight airway is connected to the second straight airway; The screw through hole is communicated with the first straight air passage and / or the second straight air passage.

7. The air bearing device according to claim 1, characterized in that: The plurality of throttling holes are regularly arranged; The throttle plate is provided with a coaxially arranged annular pressure equalizing groove and a circular pressure equalizing groove, and the annular pressure equalizing groove is arranged around the circular pressure equalizing groove; The annular pressure equalizing groove and the circular pressure equalizing groove are both arranged on a side surface away from the base, and the throttling flow hole is communicated with the annular pressure equalizing groove or the circular pressure equalizing groove.

8. The air bearing device according to claim 1, characterized in that: The air bearing device also includes a friction reducing ring; The friction reducing ring is arranged on a side of the throttle plate away from the base, the friction reducing ring is arranged around the edge of the throttle plate, and the friction reducing ring is arranged coplanarly with the throttle plate.

9. The air bearing device according to claim 1, characterized in that: The air bearing device further comprises a plurality of displacement sensors, which are arranged circumferentially around the axis of the air bearing device and are used to detect the thickness of the air film.

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