Silicon wafer phosphorus source constant-temperature drying device

Abstract

The utility model relates to the technical field of phosphorus source drying devices, in particular to a silicon wafer phosphorus source constant-temperature drying device which comprises a tunnel furnace body, and the tunnel furnace body comprises a plurality of groups of electric heating plates which are evenly distributed in the transverse direction and fixedly connected with the inner wall and a conveying belt for conveying phosphorus sources. Electric heating plates are arranged on the tunnel furnace body, temperature controllers which correspond to the electric heating plates one to one and are electrically connected with the electric heating plates are arranged above the tunnel furnace body, a plurality of groups of longitudinal shafts which are staggered with the electric heating plates are rotatably connected to the inner wall of the tunnel furnace body, spoilers are fixedly connected to the lower edges of the longitudinal shafts, gears are coaxially and fixedly connected to the front ends of the longitudinal shafts, and the gears are coaxially and fixedly connected to the rear ends of the longitudinal shafts. The outer wall of the flue furnace body is fixedly connected with a plurality of sets of swing devices meshed with the gears in a one-to-one correspondence mode, and the swing devices drive the spoilers to swing in a reciprocating mode through the gears.

Description

Technical Field

[0001] The utility model relates to the technical field of phosphorus source drying devices, in particular to a silicon wafer phosphorus source constant temperature drying device. Background Art

[0002] The basic process of silicon wafer battery manufacturing includes multiple steps such as silicon wafer cutting, diffusion, nano-preparation, photolithography, and corrosion, among which the diffusion process is phosphorus source diffusion, specifically refers to the process of diffusing impurity phosphorus on P-type silicon wafers into silicon wafers to form N-type silicon wafers. In the manufacturing process of silicon wafer batteries, the aqueous phosphorus source needs to be dried, but the existing drying device is generally provided with a thermometer in the drying device during use, and the temperature rise of the electric heating plate of the drying device is monitored by the thermometer. When the temperature rises to a temperature suitable for drying, the power supply of the electric heating plate is disconnected, but this operation is relatively cumbersome and affects production efficiency, and the uniformity of the heating process of the existing drying device is limited and the temperature rise is slow. In this regard, the present application specifically proposes a silicon wafer phosphorus source constant temperature drying device. Utility Model Content

[0003] In view of the above situation, in order to overcome the defects of the prior art, the utility model provides a constant temperature drying device for silicon wafer phosphorus source, and the technical solution to the problem is that it includes a tunnel furnace body, and the tunnel furnace body includes and is fixedly connected to the inner wall with multiple groups of electric heating plates evenly distributed along the transverse direction, and a conveyor belt for conveying the phosphorus source. It is characterized in that a temperature controller corresponding to and electrically connected to the electric heating plates is arranged above the tunnel furnace body, and the inner wall of the tunnel furnace body is rotatably connected to multiple groups of longitudinal shafts staggered with the electric heating plates, and the lower edge of each of the longitudinal shafts is fixedly connected to a spoiler, and the front end of each of the longitudinal shafts is coaxially fixedly connected to a gear, and the outer wall of the tunnel furnace body is fixedly connected to multiple groups of swinging devices meshing with the gears one by one, and the swinging device drives the spoiler to swing back and forth through the gear.

[0004] Preferably, each group of the swinging devices includes a supporting shaft fixedly connected to the outer wall of the tunnel furnace body, the supporting shaft is rotatably connected to the upper end of the swinging rod, the lower end of the swinging rod is fixedly connected to the middle part of the arc-shaped rack, the arc-shaped rack is meshed with the gear on its corresponding side, a driven groove is opened on the swinging rod, the outer wall of the tunnel furnace body is fixedly connected to a motor corresponding to the driven groove, the output shaft of the motor is fixedly connected to one end of the driving rod, the other end of the driving rod is fixedly connected to an insertion rod, and the insertion rod is rollingly inserted into the driven groove.

[0005] Preferably, the left and right ends of the tunnel furnace body are respectively fixedly connected with support frames.

[0006] The beneficial effects of the utility model are:

[0007] When the present application is in use, the power supply of the electric heating plate is controlled by the thermostat, thereby achieving constant temperature heating of the electric heating plate, thereby facilitating and conveniently achieving a constant temperature environment in the tunnel furnace body. In addition, during the process of the electric heating plate heating the air in the tunnel furnace body, the swing device provided can drive the spoiler to swing back and forth through the gear, thereby disturbing the air in the tunnel furnace body to facilitate the uniform distribution of the air, thereby achieving the electric heating plate to uniformly heat the air in the tunnel furnace body, thereby significantly improving the heating effect in the tunnel furnace body and reaching the drying temperature. The present application has a simple structure, is easy to use, and is highly practical. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] Figure 1 This is a stereoscopic view of the utility model from the first perspective.

[0009] Figure 2 It is an enlarged view of area A in the first perspective stereoscopic view of the utility model.

[0010] Figure 3 This is a three-dimensional cross-sectional view from a second viewing angle of the present invention.

[0011] Figure 4 This is a partial three-dimensional cross-sectional view of the utility model from the third viewing angle.

[0012] Figure 5 It is an enlarged view of area B in the partial stereoscopic cross-sectional view from the third viewing angle of the utility model.

[0013] Reference numerals

[0014] 1. Tunnel furnace body, 2. Electric heating plate, 3. Conveyor belt, 4. Temperature controller, 5. Longitudinal axis, 6. Spoiler, 7. Gear, 8. Swing device, 9. Support shaft, 10. Swing rod, 11. Arc rack, 12. Driven groove, 13. Motor, 14. Output shaft, 15. Drive rod, 16. Insert rod, 17. Support frame. DETAILED DESCRIPTION

[0015] The following is combined with Figure 1-5 The specific implementation methods of the utility model are further described in detail.

[0016] Embodiment 1, the technical solution is that when the present application is in use, the power supply of the electric heating plate 2 can be controlled by the thermostat 4, so as to realize the constant temperature heating of the electric heating plate 2, so as to facilitate and conveniently realize the constant temperature environment in the tunnel furnace body 1. And in the process of the electric heating plate 2 heating the air in the tunnel furnace body 1, the swing device 8 provided can drive the spoiler 6 to swing back and forth through the gear 7, so as to disturb the air in the tunnel furnace body 1, so as to facilitate the uniform distribution of the air, so as to realize the electric heating plate 2 to heat the air in the tunnel furnace body 1 uniformly, so as to significantly improve the heating effect in the tunnel furnace body 1 and reach the drying temperature, and then the phosphorus source is sent into the tunnel furnace body 1 through the conveyor belt 3 for drying. The present application is simple in structure, easy to use and practical. In addition, the present application adopts the tunnel furnace body 1 for drying, which is simple to operate and can better avoid phosphorus source pollution compared with the traditional baking box.

[0017] Embodiment 2, based on embodiment 1, specifically, when the present application is in use, in the process of heating the electric heating plate 2 and heating the air in the tunnel furnace body 1, in order to achieve uniform heating of the air and improve the heating efficiency, a swing device 8 is provided to drive the spoiler 6 to swing back and forth. When the swing device 8 is working, the motor 13 is started to rotate, and the rotation of the motor 13 will drive the driving rod 15 to perform circular motion through its output shaft 14, and then the insertion rod 16 will also perform circular motion accordingly, and the insertion rod 16 will move relative to the driven groove 12 during the movement, and then the swing rod 10 will be driven to swing back and forth around the support shaft 9 through the driven groove 12, and the swing rod 10 will swing back and forth, and the arc rack 11 connected to it will also swing back and forth, and the arc rack 11 will drive the longitudinal shaft 5 to rotate back and forth through the gear 7, and then the spoiler 6 fixedly connected to the longitudinal shaft 5 will also swing back and forth accordingly, and then the spoiler 6 can regularly disturb the air in the tunnel furnace body 1, thereby achieving the flow of air, thereby facilitating the uniform heating of the air and improving the heating efficiency. The support frame 17 outside the tunnel furnace body 1 can support it.

Claims

1. A constant temperature drying device for phosphorus source of silicon wafers, comprising a tunnel furnace body (1), wherein the tunnel furnace body (1) comprises a plurality of groups of electric heating plates (2) uniformly distributed in the transverse direction and fixedly connected to the inner wall, and a conveyor belt (3) for conveying the phosphorus source, characterized in that: A temperature controller (4) is arranged above the tunnel furnace body (1) and corresponds to and is electrically connected to the electric heating plates (2) in a one-to-one manner. The inner wall of the tunnel furnace body (1) is rotatably connected to a plurality of groups of longitudinal shafts (5) arranged in an alternating manner with the electric heating plates (2). A spoiler (6) is fixedly connected to the lower edge of each of the longitudinal shafts (5). A gear (7) is coaxially fixedly connected to the front end of each of the longitudinal shafts (5). A plurality of swing devices (8) meshing in a one-to-one manner with the gears (7) are fixedly connected to the outer wall of the tunnel furnace body. The swing devices (8) drive the spoiler (6) to swing back and forth through the gears (7).

2. A silicon wafer phosphorus source constant temperature drying device according to claim 1, characterized in that: Each group of the swinging devices (8) comprises a support shaft (9) fixedly connected to the outer wall of the tunnel furnace body (1), the support shaft (9) being rotatably connected to the upper end of a swinging rod (10), the lower end of the swinging rod (10) being fixedly connected to the middle part of an arc-shaped rack (11), the arc-shaped rack (11) being meshed with a gear (7) on its corresponding side, the swinging rod (10) being provided with a driven groove (12), the outer wall of the tunnel furnace body (1) being fixedly connected to a motor (13) corresponding to the driven groove (12), the output shaft (14) of the motor (13) being fixedly connected to one end of a driving rod (15), the other end of the driving rod (15) being fixedly connected to an insertion rod (16), the insertion rod (16) being rollingly inserted into the driven groove (12).

3. A silicon wafer phosphorus source constant temperature drying device according to claim 1, characterized in that: The left and right ends of the tunnel furnace body (1) are respectively fixedly connected to support frames (17).

Images