Anti-wall-sticking hearth structure for production of electronic-grade submicron spherical silica powder

Abstract

The utility model provides an anti-wall-sticking hearth structure for electronic grade submicron spherical silica powder production, belongs to the field of spherical silica powder production, and aims to solve the problem that an existing spherical furnace for spherical silica powder production cannot effectively prevent silica powder particles from being easily stuck to a furnace wall. An air guide partition plate is fixedly welded to the outer wall of the hearth body, the outer end face of the air guide partition plate is fixedly welded to the inner wall of the furnace body, hearth wall air holes are formed in the side end of the hearth body in a penetrating mode, and a combustor is arranged at the top of the hearth body. Through cooperation of the arranged air guide partition plate and each hearth wall air hole, conveyed air can be tightly attached to the hearth body to form a spiral air film, it is ensured that particles separated from flames do not make contact with the hearth wall, the phenomenon that molten silica powder particles are bonded with the furnace wall is effectively prevented, and the service life of the furnace is prolonged. Further, the stability of continuous production work of the submicron spherical silica powder can be ensured.

Description

Technical Field

[0001] The utility model relates to the field of spherical silicon micropowder production, in particular to an anti-sticking hearth structure used for the production of electronic-grade submicron spherical silicon micropowder. Background Art

[0002] As microelectronic devices develop towards thinness, miniaturization, high density and high functionality, higher requirements are placed on large-scale integrated circuit chip packaging technology. The improvement of packaging technology also leads to increasing requirements for packaging fillers. Similarly, requirements are put forward for particle size, purity, sphericity, radioactive element content, etc. for spherical silicon powder, a key material for chip packaging.

[0003] During the production and processing of spherical silicon micropowder, a spherical furnace is needed to be used for melting and spheroidization. However, in the actual working process of the existing spherical furnace, after the spherical silicon micropowder is separated from the flame, the molten silicon micropowder particles are very easy to stick to the furnace wall. Therefore, the inner wall of the furnace needs to be cleaned frequently, resulting in a decrease in the working efficiency of the spherical furnace. Therefore, we have made improvements on this and proposed an anti-sticking furnace hearth structure for the production of electronic-grade submicron spherical silicon micropowder. Utility Model Content

[0004] The utility model aims to solve the problem that the existing spherical furnace for producing spherical silicon micropowder cannot effectively avoid the silicon micropowder particles from being easily adhered to the furnace wall.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] The invention discloses an anti-sticking hearth structure for producing electronic-grade submicron spherical silicon powder to improve the above-mentioned problems.

[0007] The specific application is as follows:

[0008] The invention comprises a furnace body, wherein a furnace body is provided in the furnace body, an air guide baffle is welded and fixed on the outer wall of the furnace body, an outer end face of the air guide baffle is welded and fixed on the inner wall of the furnace body, a side end of the furnace body is penetrated with a chamber wall air hole, a burner is arranged on the top of the furnace body, an air duct is connected to the top side end of the furnace body, a connecting pipe is connected to the top of the air duct, a ventilator is connected to the top of the connecting pipe, an air pump is connected to the top flange of the ventilator, a fixing plate is welded and fixed on the side end face of the ventilator, a worm is rotatably connected to the fixing plate, a worm gear is meshed and connected to the worm, the worm gear is rotatably connected to the ventilator through a sealing bearing, a limiting groove is provided on the worm gear, a guide rod is slidingly connected in the limiting groove, a baffle is welded and fixed on the guide rod, a connecting plate is welded and fixed in the ventilator, a guide groove is provided on the connecting plate, the top of the guide rod is slidingly connected in the guide groove, a first through groove is penetrated on the connecting plate, and a second through groove is penetrated on the worm gear.

[0009] As a preferred technical solution of the present application, the air guide baffle is spiral, the chamber wall air holes are distributed at equal angles on the furnace body along the spiral trajectory of the air guide baffle, and the air ducts are distributed at equal angles on the top of the furnace body.

[0010] As a preferred technical solution of the present application, the diameter of the worm wheel is larger than the diameter of the ventilator, and the vertical center line of the ventilator and the vertical center line of the worm wheel are located on the same vertical line.

[0011] As a preferred technical solution of the present application, six limit grooves are provided, and the six limit grooves are distributed at equal angles on the worm gear. The limit grooves are inclined, and the limit grooves correspond one-to-one with the baffles through the guide rods. Adjacent baffles fit together, and the guide grooves are regular hexagons.

[0012] As a preferred technical solution of the present application, the top end surface of the baffle is fitted with the bottom end surface of the connecting plate, the bottom end surface of the baffle is fitted with the top end surface of the worm wheel, and the diameter of the first through groove is equal to the diameter of the second through groove.

[0013] As a preferred technical solution of the present application, a sealing groove is provided through the side end of the connecting tube, and a threaded rod is rotatably connected to the side end of the connecting tube. A connecting plate is threadedly connected to the threaded rod, and a sealing plate is fixedly connected to the bottom end surface of the connecting plate. The sealing plate is limitedly slidably connected in the sealing groove.

[0014] As a preferred technical solution of the present application, the sealing grooves are equidistantly distributed on both sides of the connecting pipe, the sealing grooves on both sides are distributed alternately, the sealing grooves correspond to the sealing plates one by one, the sealing plates are fitted with the inner walls of the sealing grooves, the threaded rods are connected to the middle part of the connecting plates, and the length of the sealing plates is smaller than the width of the connecting pipe.

[0015] Compared with the prior art, the utility model has the following beneficial effects:

[0016] In the scheme of this application:

[0017] 1. Through the coordination of the wind guide baffle and the air holes on the chamber wall, the delivered wind can form a spiral air film close to the furnace body, ensuring that the particles separated from the flame do not contact the furnace wall, effectively preventing the molten silicon micropowder particles from adhering to the furnace wall, thereby ensuring the stability of the continuous production of submicron spherical silicon micropowder;

[0018] 2. The worm gear is arranged to drive the worm wheel to rotate stably. At this time, under the joint limiting action of the limiting groove and the guide groove, the baffles on each guide rod can be driven to move toward the middle or side at the same time, so that the size of the openings of the first through groove and the second through groove can be conveniently adjusted, so that the ventilation volume can be conveniently adjusted according to actual needs; and by rotating each threaded rod, the sealing plate on the connecting plate can be driven to move inside or outside the connecting pipe, and the wind speed can be conveniently adjusted according to actual needs by adjusting the wind blocking area of ​​each sealing plate; in summary, the present application can conveniently adjust the air volume and wind speed according to the actual state of the submicron spherical silicon micropowder raw material, further ensure that the particles separated from the flame do not contact the furnace wall, thereby further preventing the molten silicon micropowder particles from sticking to the furnace wall, and increasing the practicality and applicability of the furnace. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 The overall three-dimensional structural schematic diagram of the anti-sticking hearth structure for producing electronic-grade submicron spherical silicon powder provided in this application;

[0020] Figure 2 A schematic diagram of the main cross-section and front view of the furnace body of the anti-sticking hearth structure for the production of electronic-grade submicron spherical silicon powder provided in the present application;

[0021] Figure 3 A schematic diagram of a top-sectional structure of a furnace body of an anti-sticking furnace hearth structure for producing electronic-grade submicron spherical silicon powder provided in this application;

[0022] Figure 4 A schematic diagram of the main cross-sectional structure of a ventilator with an anti-sticking hearth structure for producing electronic-grade submicron spherical silicon powder provided in this application;

[0023] Figure 5 A schematic diagram of the cross-sectional structure of a ventilation duct with an anti-sticking hearth structure for producing electronic-grade submicron spherical silicon powder provided in this application;

[0024] Figure 6A schematic diagram of the bottom-up structure of the baffle of the anti-sticking hearth structure for the production of electronic-grade submicron spherical silicon powder provided in this application;

[0025] Figure 7 A schematic diagram of the guide groove structure of the anti-sticking hearth structure for the production of electronic-grade submicron spherical silicon powder provided in this application, viewed from above;

[0026] Figure 8 A schematic diagram of the structure of the connecting plate of the anti-sticking hearth structure for the production of electronic-grade submicron spherical silicon powder provided in this application, viewed from above;

[0027] Fig. 9 A schematic diagram of the top-sectional structure of the connecting pipe of the anti-sticking hearth structure for the production of electronic-grade submicron spherical silicon powder provided in this application.

[0028] Markings in the figure: 1. furnace body; 2. furnace body; 3. air guide baffle; 4. air holes on the chamber wall; 5. burner; 6. air duct; 7. connecting pipe; 8. ventilator; 9. air pump; 10. fixing plate; 11. worm; 12. worm wheel; 13. limiting groove; 14. guide rod; 15. baffle; 16. connecting plate; 17. guide groove; 18. first through groove; 19. second through groove; 20. sealing groove; 21. threaded rod; 22. connecting plate; 23. sealing plate. DETAILED DESCRIPTION

[0029] To make the purpose, technical solution and advantages of the embodiment of the utility model clearer, the technical solution in the embodiment of the utility model will be described clearly and completely in conjunction with the accompanying drawings. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments.

[0030] Therefore, the following detailed description of the embodiments of the present invention is not intended to limit the scope of the present invention to be protected, but merely represents some embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0031] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features and technical solutions in the embodiments may be combined with each other.

[0032] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0033] In the description of the present utility model, it should be noted that the orientation or position relationship indicated by the terms "upper", "lower", etc. is based on the orientation or position relationship shown in the drawings, or the orientation or position relationship in which the product is usually placed when in use, or the orientation or position relationship commonly understood by those skilled in the art. Such terms are only for the convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0034] Embodiment 1, as Figure 1-Figure 8 As shown, the present embodiment proposes an anti-sticking furnace hearth structure for the production of electronic-grade submicron spherical silicon powder, comprising a furnace body 1, a furnace body 2 is arranged in the furnace body 1, an air guide baffle 3 is welded and fixed on the outer wall of the furnace body 2, the outer end face of the air guide baffle 3 is welded and fixed on the inner wall of the furnace body 1, a side end of the furnace body 2 is penetrated with a furnace wall air hole 4, a burner 5 is arranged on the top of the furnace body 2, an air duct 6 is connected to the top side end of the furnace body 1, a connecting pipe 7 is connected to the top of the connecting pipe 7, a ventilator 8 is connected to the top of the ventilator 8, an air pump 9 is connected to the top flange of the ventilator 8, and a side end face of the ventilator 8 is provided. A fixing plate 10 is welded and fixed, a worm 11 is rotatably connected to the fixing plate 10, a worm wheel 12 is meshingly connected to the worm 11, the worm wheel 12 is rotatably connected to the ventilation tube 8 through a sealed bearing, a limiting groove 13 is provided on the worm wheel 12, a guide rod 14 is slidingly connected in the limiting groove 13, a baffle 15 is welded and fixed to the guide rod 14, a connecting plate 16 is welded and fixed in the ventilation tube 8, a guide groove 17 is provided on the connecting plate 16, the top of the guide rod 14 is slidingly connected in the guide groove 17, a first through groove 18 is penetrated through the connecting plate 16, and a second through groove 19 is penetrated through the worm wheel 12.

[0035] Embodiment 2: The solution in Embodiment 1 is further introduced below in combination with a specific working method, as described below:

[0036] like Figure 2 and Figure 3 As shown, as a preferred embodiment, on the basis of the above-mentioned method, further, the air guide baffle 3 is spiral, the chamber wall pores 4 are distributed at equal angles on the furnace body 2 along the spiral trajectory of the air guide baffle 3, and the air ducts 6 are distributed at equal angles on the top of the furnace body 1. By utilizing the cooperation of the air guide baffle 3 and each chamber wall pore 4, the transported wind can be closely attached to the furnace body 2 to form a spiral air film, ensuring that the particles separated from the flame do not contact the furnace wall, and effectively preventing the molten silicon micropowder particles from sticking to the furnace wall.

[0037] like Figure 4-Figure 8As shown, as a preferred embodiment, on the basis of the above-mentioned method, further, the diameter of the worm wheel 12 is greater than the diameter of the ventilator 8, the vertical center line of the ventilator 8 and the vertical center line of the worm wheel 12 are located on the same vertical line, six limiting grooves 13 are provided, and the six limiting grooves 13 are distributed on the worm wheel 12 at equal angles, the limiting grooves 13 are inclined, the limiting grooves 13 correspond to the baffles 15 one by one through the guide rods 14, the adjacent baffles 15 fit each other, the guide grooves 17 are regular hexagonal, the top end surface of the baffle 15 fits with the bottom end surface of the connecting plate 16, and the bottom end surface of the baffle 15 fits with the worm wheel 12 The top surface of the first through groove 18 is in contact with the diameter of the second through groove 19, and the diameter of the first through groove 18 is equal to the diameter of the second through groove 19. The worm 11 can drive the worm wheel 12 to rotate stably. At this time, under the common limiting action of the limiting groove 13 and the guide groove 17, the baffles 15 on each guide rod 14 can be driven to move toward the middle or the side at the same time, so that the size of the opening of the first through groove 18 and the second through groove 19 can be conveniently adjusted, so that the ventilation volume can be conveniently adjusted according to actual needs, further ensuring that the particles separated from the flame do not contact the furnace wall, thereby further preventing the molten silicon micropowder particles from adhering to the furnace wall.

[0038] like Figure 4 and Fig. 9 As shown, as a preferred embodiment, on the basis of the above-mentioned manner, further, a sealing groove 20 is formed through the side end of the connecting pipe 7, a threaded rod 21 is rotatably connected to the side end of the connecting pipe 7, a connecting plate 22 is threadedly connected to the threaded rod 21, a sealing plate 23 is fixedly connected to the bottom end surface of the connecting plate 22, the sealing plate 23 is limitedly slidably connected in the sealing groove 20, the sealing grooves 20 are equidistantly distributed on both sides of the connecting pipe 7, the sealing grooves 20 on both sides are alternately distributed, the sealing grooves 20 correspond to the sealing plates 23 one by one, and the sealing plates 23 are fixedly connected to the bottom end surface of the connecting plate 22. 3 is fitted with the inner wall of the sealing groove 20, the threaded rod 21 is connected to the middle part of the connecting plate 22, the length of the sealing plate 23 is less than the width of the connecting pipe 7, and by rotating each threaded rod 21, the sealing plate 23 on the connecting plate 22 can be driven to move into or out of the connecting pipe 7. By adjusting the windshield area of ​​each sealing plate 23, the wind speed can be conveniently adjusted according to actual needs, further ensuring that the particles separated from the flame do not contact the furnace wall, thereby further preventing the molten silicon micropowder particles from adhering to the furnace wall.

[0039] Specifically, the anti-sticking furnace hearth structure for the production of electronic-grade submicron spherical silicon powder is used as follows: first, during the operation of the spheroidizing furnace, air can be sucked by the air pump 9, and then the air is transported to the ventilator 8. At this time, the ventilator 8 can be transported to the connecting pipe 7 through the first through groove 18 on the connecting plate 16 and the second through groove 19 on the worm gear 12. Then the connecting pipe 7 can be stably transported to the furnace body 1 through each air duct 6. At this time, under the guidance of the spiral air guide baffle 3, the air entering the furnace body 1 can flow along the air guide baffle 3, and during the flow of wind, it can evenly enter the furnace body 2 through each chamber wall pore 4. At this time, the wind is close to the furnace body 2 to form a spiral air film, ensuring that the particles separated from the flame do not contact the furnace wall, effectively preventing the molten silicon powder particles from adhering to the furnace wall, and thus ensuring the stability of the continuous production of submicron spherical silicon powder;

[0040] And during the operation of the spheroidizing furnace, the staff can rotate the worm 11 on the fixed plate 10, and under the rotation of the worm 11, the meshing worm wheel 12 can be driven to rotate stably, and under the rotation of the worm wheel 12, the corresponding guide rod 14 can be moved through each limit groove 13. At this time, the guide rod 14 can be translated along the trajectory of the guide groove 17 on the connecting plate 16, and under the translation of each guide rod 14, the corresponding baffle 15 can be driven to perform stable dislocation translation. At this time, under the positive or reverse rotation of the worm 11, each baffle 15 can move to the middle or side at the same time, and under the movement of each baffle 15, the size of the opening of the first through groove 18 and the second through groove 19 can be conveniently adjusted, so that the ventilation volume can be adjusted according to actual needs. It can be conveniently adjusted; and the staff can rotate the threaded rod 21. At this time, under the rotation of the threaded rod 21, the connecting plate 22 connected by the thread can drive the sealing plate 23 to move in the sealing groove 20, and then can drive the sealing plate 23 to move into or out of the connecting pipe 7. At this time, under the movement of the sealing plate 23, the windshield area inside the connecting pipe 7 can be conveniently adjusted, and the staff can further increase the windshield area by rotating several other threaded rods 21, and can conveniently adjust the wind speed according to actual needs; in summary, the present application can conveniently adjust the air volume and wind speed according to the actual state of the submicron spherical silicon micropowder raw material, further ensure that the particles separated from the flame do not contact the furnace wall, thereby further preventing the molten silicon micropowder particles from sticking to the furnace wall.

[0041] The above embodiments are only used to illustrate the utility model but not to limit the technical solutions described in the utility model. Although the present invention has been described in detail with reference to the above embodiments, the utility model is not limited to the above specific implementation methods. Therefore, any modification or equivalent replacement of the utility model; and all technical solutions and improvements that do not deviate from the spirit and scope of the utility model are included in the scope of the claims of the utility model.

Claims

1. An anti-sticking furnace hearth structure for producing electronic-grade submicron spherical silicon powder, comprising a furnace body (1), characterized in that: A furnace body (2) is arranged in the furnace body (1), an air guide baffle (3) is welded and fixed on the outer wall of the furnace body (2), the outer end surface of the air guide baffle (3) is welded and fixed on the inner wall of the furnace body (1), a furnace wall air hole (4) is opened through the side end of the furnace body (2), a burner (5) is arranged on the top of the furnace body (2), an air duct (6) is connected to the top side end of the furnace body (1), a connecting pipe (7) is connected to the top of the connecting pipe (7), a ventilator (8) is connected to the top flange of the ventilator (8), an air pump (9) is connected to the top flange of the ventilator (8), a fixing plate (10) is welded and fixed on the side end surface of the ventilator (8), and a rotating connecting rod (10) is provided on the fixing plate (10). A worm (11) is connected, the worm (11) is meshingly connected to a worm wheel (12), the worm wheel (12) is rotatably connected to a ventilating tube (8) via a sealed bearing, a limiting groove (13) is provided on the worm wheel (12), a guide rod (14) is slidably connected in the limiting groove (13), a baffle (15) is welded and fixed to the guide rod (14), a connecting plate (16) is welded and fixed in the ventilating tube (8), a guide groove (17) is provided on the connecting plate (16), the top of the guide rod (14) is slidably connected in the guide groove (17), a first through groove (18) is penetrated through the connecting plate (16), and a second through groove (19) is penetrated through the worm wheel (12).

2. The anti-sticking hearth structure for producing electronic-grade submicron spherical silicon powder according to claim 1, characterized in that: The air guide baffle (3) is spiral-shaped, the chamber wall air holes (4) are distributed at equal angles on the furnace body (2) along the spiral trajectory of the air guide baffle (3), and the air ducts (6) are distributed at equal angles on the top of the furnace body (1).

3. The anti-sticking hearth structure for producing electronic-grade submicron spherical silicon powder according to claim 1, characterized in that: The diameter of the worm wheel (12) is greater than the diameter of the ventilating cylinder (8), and the vertical center line of the ventilating cylinder (8) and the vertical center line of the worm wheel (12) are located on the same vertical line.

4. The anti-sticking hearth structure for producing electronic-grade submicron spherical silicon powder according to claim 1, characterized in that: Six limiting grooves (13) are provided, and the six limiting grooves (13) are distributed at equal angles on the worm wheel (12). The limiting grooves (13) are inclined. The limiting grooves (13) correspond to the baffles (15) one by one through the guide rods (14). Adjacent baffles (15) fit each other. The guide grooves (17) are in a regular hexagon.

5. The anti-sticking hearth structure for producing electronic-grade submicron spherical silicon powder according to claim 1, characterized in that: The top end surface of the baffle plate (15) fits with the bottom end surface of the connecting plate (16), the bottom end surface of the baffle plate (15) fits with the top end surface of the worm wheel (12), and the diameter of the first through groove (18) is equal to the diameter of the second through groove (19).

6. The anti-sticking hearth structure for producing electronic-grade submicron spherical silicon powder according to claim 1, characterized in that: A sealing groove (20) is formed through the side end of the connecting tube (7), a threaded rod (21) is rotatably connected to the side end of the connecting tube (7), a connecting plate (22) is threadedly connected to the threaded rod (21), a sealing plate (23) is fixedly connected to the bottom end surface of the connecting plate (22), and the sealing plate (23) is limitedly slidably connected in the sealing groove (20).

7. The anti-sticking hearth structure for producing electronic-grade submicron spherical silicon powder according to claim 6, characterized in that: The sealing grooves (20) are equidistantly distributed on both sides of the connecting pipe (7), the sealing grooves (20) on both sides are alternately distributed, the sealing grooves (20) correspond to the sealing plates (23) one by one, the sealing plates (23) fit the inner walls of the sealing grooves (20), the threaded rods (21) are connected to the middle part of the connecting plate (22), and the length of the sealing plate (23) is less than the width of the connecting pipe (7).

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