Laser generating device

Abstract

The utility model relates to the technical field of optical systems, and provides a laser generating device which comprises a first pulse generator, a second pulse generator, a plurality of laser systems and a beam combining assembly. The first pulse generator is connected with the pumping source in each laser system; the second pulse generator is connected with the optical shutter in each laser system; the beam combining assembly is used for combining the laser signals output by the laser systems to obtain beam combining signals, and the adjacent laser signals in the beam combining signals are partially overlapped. Due to the fact that the multiple laser systems are included, multiple paths of laser signals can be generated, the multiple paths of laser signals can be combined through the beam combining assembly, and a beam combining signal is obtained and output. Compared with a single laser signal, the beam combining signal has a wider coverage range and has more uniform light spots, so that the requirements on hardware of the laser and the level of debugging personnel are reduced. Moreover, the duration of the beam combining signal can be longer, and the heat accumulation peak value of the target object can be reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of optical systems, in particular to a laser generating device. Background Art

[0002] The laser generated by the laser is widely used in laser welding, semiconductor preparation, laser annealing and other fields due to its high brightness, good directionality, good monochromaticity and good coherence.

[0003] Laser annealing is to use a laser as a laser light source to emit laser light, process the laser light through the optical process area, and then irradiate the film layer on the wafer after the treatment. The purpose of using laser annealing technology on wafers is to crystallize or improve the crystallinity, and convert amorphous materials into polycrystalline or single crystals, so that after ion implantation, the doped impurities and the atoms in the film layer are orderly arranged and combined, thereby improving the electrical properties of the material on the chip unit of the wafer.

[0004] However, in the field of laser annealing, the laser generated by the laser needs to have a relatively uniform spot, which places high demands on the laser hardware and the level of the debugging personnel. In addition, the laser pulse can only act on the wafer surface for a short time, resulting in a high peak value of heat accumulation on the wafer surface, and the wafer surface is prone to warping or cracking defects during the annealing process.

[0005] Therefore, there is an urgent need to provide a laser generating device. Utility Model Content

[0006] The utility model provides a laser generating device to solve the defects in the prior art.

[0007] The utility model provides a laser generating device, comprising: a first pulse generator, a second pulse generator, a plurality of laser systems and a beam combining component;

[0008] The first pulse generator is respectively connected to a pump source in each laser system;

[0009] The second pulse generator is respectively connected to the optical gate in each laser system;

[0010] The beam combining component is used to combine the laser signals output by each laser system to obtain a combined beam signal, in which adjacent laser signals partially overlap.

[0011] According to a laser generating device provided by the utility model, it also includes: a main signal detection device and a branch signal detection device corresponding to each laser system;

[0012] The branch signal detection device is arranged on the output optical path of the corresponding laser system, and is used to receive the first part of the laser signal output by the corresponding laser system;

[0013] The beam combining component is specifically used to combine the second part of the laser signals output by each laser system to obtain the combined beam signal;

[0014] The trunk signal detection device is arranged on the transmission path of the combined beam signal, and is used to receive the third part of the laser signal in the combined beam signal, and output the fourth part of the laser signal in the combined beam signal.

[0015] According to a laser generating device provided by the utility model, the branch signal detection device includes a branch optical spectrometer and a branch photoelectric converter;

[0016] The branch optical splitter element is arranged on the output optical path of the corresponding laser system, and is used to split the laser signal output by the corresponding laser system into a first part of the laser signal and a second part of the laser signal;

[0017] The branch photoelectric converter is used to receive the first portion of the laser signal and convert the first portion of the laser signal into an electrical signal.

[0018] According to a laser generating device provided by the utility model, the trunk signal detection device includes a trunk optical spectrometer and a trunk photoelectric converter;

[0019] The main optical splitter element is arranged on the transmission path of the combined beam signal, and is used to split the combined beam signal into a third laser signal and a fourth laser signal.

[0020] The trunk optical-to-electrical converter is used to receive the third portion of the laser signal and convert the third portion of the laser signal into an electrical signal.

[0021] According to a laser generating device provided by the utility model, the first pulse generator is used to transmit a pump source pulse signal to a pump source in each laser system, and the second pulse generator is used to transmit a light gate pulse signal to a light gate in each laser system, and the emission time of each pump source pulse signal is adjustable and / or the emission time of each light gate pulse signal is adjustable.

[0022] According to a laser generating device provided by the utility model, each laser system includes a laser and a laser controller;

[0023] The laser is provided with the pump source and the optical gate;

[0024] The laser controller is used to control the pump source and the optical gate.

[0025] According to a laser generating device provided by the utility model, the first pulse generator is also used to send a clock signal to the second pulse generator.

[0026] According to a laser generating device provided by the utility model, the target shutter pulse signal emitted by the second pulse generator to the shutter in the target laser system lags behind the target pump source pulse signal emitted by the first pulse generator to the pump source in the target laser system.

[0027] According to a laser generating device provided by the utility model, the lag time between the target shutter pulse signal and the target pump source pulse signal is 700 μs-750 μs.

[0028] According to a laser generating device provided by the utility model, the laser generating device is applied to a laser annealing process for a wafer.

[0029] The laser generating device provided by the utility model comprises a first pulse generator, a second pulse generator, a plurality of laser systems and a beam combining component; the first pulse generator is respectively connected to the pump source in each laser system; the second pulse generator is respectively connected to the optical gate in each laser system; the beam combining component is used to combine the laser signals output by each laser system to obtain a beam combining signal, and the adjacent laser signals in the beam combining signal partially overlap. The laser generating device controls each laser system to output laser signals through a pulse generator, thereby realizing beam combining. Since it includes multiple laser systems, multiple laser signals can be generated, and the multiple laser signals can be combined through the beam combining component to obtain and output a beam combining signal. Compared with a single laser signal, the combined beam signal has a wider coverage range and can have a relatively uniform spot, which reduces the requirements for the hardware of the laser and the level of the debugging personnel. Moreover, since the adjacent laser signals in the combined beam signal partially overlap, the combined beam signal can be made to last longer, and can act on the target object for a longer time, reduce the peak value of the heat accumulation of the target object, reduce the possibility of deformation or defects on the surface of the target object, and extend the process time of the target object. The target object may be a wafer or other object that needs to perform related processes using laser pulses. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, for ordinary technicians in this field, other drawings can be obtained based on the drawings in the following description without creative work.

[0031] Figure 1This is one of the structural schematic diagrams of the laser generating device provided by the utility model;

[0032] Figure 2 This is one of the structural schematic diagrams of the laser system in the laser generating device provided by the utility model;

[0033] Figure 3 This is the second structural schematic diagram of the laser generating device provided by the utility model;

[0034] Figure 4 This is the second structural schematic diagram of the laser system in the laser generating device provided by the utility model;

[0035] Figure 5 It is a schematic diagram of the relationship between the first pulse generator, the second pulse generator and the laser system in the laser generating device provided by the utility model;

[0036] Figure 6 It is a schematic diagram of the optical path between the laser system and the target object in the laser generating device provided by the utility model. DETAILED DESCRIPTION

[0037] In order to make the purpose, technical solution and advantages of the utility model clearer, the technical solution of the utility model will be clearly and completely described below in conjunction with the drawings in the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0038] The term "first" or "second" in the specification and claims of the utility model may explicitly or implicitly include one or more of the features. In the description of the utility model, unless otherwise specified, "multiple" means two or more. In addition, "and / or" in the specification and claims means at least one of the connected objects, and the character " / " generally means that the objects connected before and after are in an "or" relationship.

[0039] In the prior art, laser annealing, laser welding and other processes require the application of lasers with relatively uniform light spots, which places high demands on the laser hardware and the level of the debugging personnel. Moreover, the laser pulse can only act on the target object for a short time, resulting in a high peak value of heat accumulation of the target object, which can easily cause deformation or defects on the surface of the target object. The target object can be a wafer or other object that needs to use laser pulses to perform related processes.

[0040] To this end, a laser generating device is provided in an embodiment of the utility model. The laser generating device can generate a combined beam signal with a relatively uniform light spot, and can be used as a light source in processes such as laser annealing and laser welding.

[0041] A laser generating device provided in an embodiment of the utility model comprises: a first pulse generator, a second pulse generator, a plurality of laser systems and a beam combining component;

[0042] The first pulse generator is respectively connected to the pump source in each laser system;

[0043] The second pulse generator is respectively connected to the optical gate in each laser system;

[0044] The beam combining component is used to combine the laser signals output by each laser system to obtain a combined beam signal, in which adjacent laser signals partially overlap.

[0045] Specifically, the laser generating device may include at least two laser systems. Figure 1 It is a schematic structural diagram of a laser generating device provided in an embodiment of the utility model, which shows a situation where the laser generating device includes two laser systems 4. Figure 1 The laser generating device includes: a first pulse generator 1, a second pulse generator 2, a beam combining component 3 and two laser systems 4.

[0046] The structure of each laser system 4 is as follows Figure 2 As shown, it includes a laser 41 and an auxiliary device 42. The laser 41 may specifically include a pump source 411 and an optical gate 412. The pump source 411 is a device for exciting a laser working substance, and is used to irradiate the working substance with a light signal of a specific wavelength to excite electrons to transition to a high energy level, thereby generating a laser signal. The pump source 411 generally uses a high-brightness light source, such as a flash lamp, an arc lamp, a laser diode, a xenon lamp, or a krypton lamp, etc., to provide sufficient energy to excite the working substance.

[0047] The shutter 412 is a device for controlling the laser output, and is used to introduce an adjustable shading plate into the laser 41, and adjust the output power and output mode of the laser signal by controlling the opening and closing degree of the shading plate. The shutter 412 is usually adjusted mechanically or electrically, and can achieve fast and accurate output control of the laser signal.

[0048] The auxiliary equipment 42 is a peripheral device that ensures that the laser 41 generates and outputs laser signals, and may include, for example, a laser controller, an optical system, a cooling system, a power supply, a detection and monitoring system, a safety protection system, and an environmental control system.

[0049] The first pulse generator 1 is connected to the pump source 411 in each laser system 4, and can emit a pump source pulse signal to the pump source 411 in each laser system 4, and control the pump source 411 to generate a light signal of a specific wavelength to irradiate the working substance through the pump source pulse signal. The pulse width of the pump source pulse signal can be set as needed, for example, can be set to 100 μs.

[0050] The second pulse generator 2 is respectively connected to the optical gate 412 in each laser system 4, and can emit an optical gate pulse signal to the optical gate 412 in each laser system 4, and control the optical gate 412 through the optical gate pulse signal to adjust the output power and output mode of the laser signal generated in the laser system 4. The pulse width of the optical gate pulse signal can be set as needed, for example, can be set to 100 μs.

[0051] The beam combining component 3 is used to combine the laser signals output by the laser systems 4 to obtain a combined beam signal in which adjacent laser signals partially overlap.

[0052] The beam combiner 3 may include multiple input terminals and one output terminal, the number of the input terminals being the same as the number of the laser systems 4, for example, an N×1 beam combiner, where N is the number of the input terminals. The beam combiner signal may be used as an output signal of the laser generating device.

[0053] The overlapping time between adjacent laser signals in the combined beam signal can be set as needed, and the overlapping time can be determined by determining the delay between adjacent laser signals. The delay between adjacent laser signals is less than the duration of the laser signal output by each laser system 4, so that the laser signals output by each laser system 4 can be combined by the beam combining component 3, thereby obtaining a combined beam signal with partial overlap between adjacent laser signals.

[0054] The time delay between adjacent laser signals in the combined beam signal is related to the optical path of each laser signal on the transmission path. It can be set by adjusting the emission time of the shutter pulse signal emitted by the second pulse generator 2 to the shutter 412 in each laser system 4, or by adjusting the emission time of the pump source pulse signal emitted by the first pulse generator 1 to the pump source 411 in each laser system 4. No specific limitation is made here.

[0055] A laser generating device provided in an embodiment of the utility model includes a first pulse generator, a second pulse generator, a plurality of laser systems and a beam combining component; the first pulse generator is respectively connected to the pump source in each laser system; the second pulse generator is respectively connected to the optical gate in each laser system; the beam combining component is used to combine the laser signals output by each laser system to obtain a combined beam signal, and the adjacent laser signals in the combined beam signal partially overlap. The laser generating device controls each laser system to output laser signals through a pulse generator, thereby realizing beam combining. Since it includes multiple laser systems, multiple laser signals can be generated, and the multiple laser signals can be combined through the beam combining component to obtain and output a combined beam signal. Compared with a single laser signal, the combined beam signal has a wider coverage range and can have a relatively uniform spot, which reduces the requirements for the hardware of the laser and the level of the debugging personnel. Moreover, since the adjacent laser signals in the combined beam signal partially overlap, the combined beam signal can be made to last longer, and can act on the target object for a longer time, reduce the peak value of the heat accumulation of the target object, reduce the possibility of deformation or defects on the surface of the target object, and extend the process time of the target object. The target object may be a wafer or other object that needs to perform related processes using laser pulses.

[0056] like Figure 3 As shown, based on the above embodiment, the laser generating device provided in the embodiment of the utility model further includes: a main signal detection device 5 and a branch signal detection device 6 corresponding to each laser system 4;

[0057] The branch signal detection device 6 is arranged on the output optical path of the corresponding laser system 4, and is used to receive the first part of the laser signal output by the corresponding laser system 4;

[0058] The beam combining component 3 is specifically used to combine the second part of the laser signals output by each laser system 4 to obtain a combined beam signal;

[0059] The trunk signal detection device 5 is arranged on the transmission path of the combined beam signal, and is used to receive the third part of the laser signal in the combined beam signal, and output the fourth part of the laser signal in the combined beam signal.

[0060] Specifically, in the embodiment of the utility model, each laser system 4 corresponds to a branch signal detection device 6, and the branch signal detection device 6 can be set on the output optical path of the corresponding laser system 4, and is used to divide the laser signal output by the corresponding laser system 4 into a first part of the laser signal and a second part of the laser signal, and receive the first part of the laser signal, so that the second part of the laser signal continues to be transmitted. Among them, the ratio of the first part of the laser signal and the second part of the laser signal can be set as needed, for example, it can be less than or equal to 1:99, that is, the first part of the laser signal has a very small proportion, so that it can not affect the intensity of the combined beam signal, and can also monitor the transmission duration of the laser signal output by the corresponding laser system 4 through the reception time of the first part of the laser signal.

[0061] At the same time, the laser generating device also includes a main line signal detection device 5 arranged on the transmission path of the combined beam signal, and the main line signal detection device 5 is used to divide the combined beam signal into a third part laser signal and a fourth part laser signal, and receive the third part laser signal, so that the fourth part laser signal continues to be transmitted and then output. Among them, the ratio of the third part laser signal to the fourth part laser signal can be set as needed, for example, it can be less than or equal to 1:999, that is, the third part laser signal has a very small proportion, so that it can not affect the strength of the combined beam signal, and can also monitor the transmission duration of the combined beam signal through the reception time of the third part laser signal.

[0062] Furthermore, each laser system 4 can be controlled to output a laser signal separately, the reception time of the first part of the laser signal and the third part of the laser signal can be recorded, and the time difference between the two can be calculated. According to the time difference corresponding to each laser system 4, the setting and verification of the overlapping time between adjacent laser signals in the combined beam signal can be realized.

[0063] In the embodiment of the utility model, by setting the branch signal detection device and the main signal detection device, the overlapping time between adjacent laser signals in the combined beam signal can be set and verified to ensure the uniformity of the combined beam signal and the durability of the irradiated target object. The target object can be a wafer or other object that needs to use laser pulses to perform related processes.

[0064] On the basis of the above embodiment, the branch signal detection device includes a branch optical splitter element and a branch photoelectric converter;

[0065] The branch optical splitter element is arranged on the output optical path of the corresponding laser system, and is used to split the laser signal output by the corresponding laser system into a first part of the laser signal and a second part of the laser signal;

[0066] The branch photoelectric converter is used to receive the first portion of the laser signal and convert the first portion of the laser signal into an electrical signal.

[0067] Specifically, the branch signal detection device 6 may include a branch optical spectrometer and a branch photoelectric converter. The spectrometer surface of the branch optical spectrometer may be coated with an anti-reflection film with a transmittance greater than or equal to 99%. The reflected light passing through the branch optical spectrometer is the first part of the laser signal, and the transmitted light passing through the branch optical spectrometer is the second part of the laser signal.

[0068] The branch photoelectric converter can be arranged on the reflection light path of the branch optical splitter element, and is used to receive the first part of the laser signal and convert the first part of the laser signal into an electrical signal.

[0069] In the embodiment of the utility model, by setting a branch optical splitter element and a branch photoelectric converter, the first part of the laser signal and the second part of the laser signal can be quickly separated, and by converting the first part of the laser signal into an electrical signal, the transmission duration of the laser signal output by the corresponding laser system can be accurately monitored.

[0070] On the basis of the above embodiment, the trunk signal detection device includes a trunk optical spectrometer and a trunk photoelectric converter;

[0071] The main optical splitter element is arranged on the transmission path of the combined beam signal, and is used to split the combined beam signal into a third laser signal and a fourth laser signal.

[0072] The trunk optical-to-electrical converter is used to receive the third portion of the laser signal and convert the third portion of the laser signal into an electrical signal.

[0073] Specifically, the main line signal detection device 5 may include a main line optical spectrometer and a main line photoelectric converter. The spectrometer surface of the main line optical spectrometer may be coated with an anti-reflection film with a transmittance greater than or equal to 99.9%. The reflected light passing through the main line optical spectrometer is the third part of the laser signal, and the transmitted light passing through the main line optical spectrometer is the fourth part of the laser signal.

[0074] The main path photoelectric converter can be arranged on the reflected light path of the main path optical splitter element, and is used to receive the third part of the laser signal and convert the third part of the laser signal into an electrical signal.

[0075] In the embodiment of the utility model, by setting a main optical splitter element and a main photoelectric converter, the third part of the laser signal and the fourth part of the laser signal can be quickly separated, and by converting the third part of the laser signal into an electrical signal, the transmission time of the laser signal output by the corresponding laser system can be accurately monitored. Moreover, in combination with the branch optical splitter element and the branch photoelectric converter, the overlapping time between adjacent laser signals in the combined beam signal can be quickly set and verified.

[0076] Based on the above embodiment, the first pulse generator is used to transmit a pump source pulse signal to the pump source in each laser system, and the second pulse generator is used to transmit a light gate pulse signal to the light gate in each laser system. The emission time of each pump source pulse signal is adjustable and / or the emission time of each light gate pulse signal is adjustable.

[0077] Specifically, the emission timing of each pump source pulse signal can be adjusted by controlling the first pulse generator, and / or the emission timing of each optical gate pulse signal can be adjusted by controlling the second pulse generator, thereby achieving rapid setting and verification of the overlapping duration between adjacent laser signals in the combined beam signal.

[0078] For example, the emission time of each light gate pulse signal can be adjusted by controlling the second pulse generator to be the same. At this time, according to the difference in optical path length between the pump source and the light gate in each laser system, the emission time of each pump source pulse signal can be adjusted by controlling the first pulse generator. In this way, each laser system can output laser signals at the same time.

[0079] On this basis, on the one hand, by continuing to control the first pulse generator to adjust the emission time of each pump source pulse signal, adjacent laser signals in the combined beam signal can be partially overlapped. On the other hand, by continuing to control the second pulse generator to adjust the emission time of each shutter pulse signal, adjacent laser signals in the combined beam signal can also be partially overlapped. In addition, by simultaneously controlling the first pulse generator to adjust the emission time of each pump source pulse signal and controlling the second pulse generator to adjust the emission time of each shutter pulse signal, adjacent laser signals in the combined beam signal can also be partially overlapped.

[0080] For another example, by setting a branch signal detection device and a trunk signal detection device, the time difference corresponding to each laser system 4 is determined, and the first pulse generator or the second pulse generator can be controlled in combination with the time difference, or the first pulse generator and the second pulse generator can be controlled simultaneously, so that the laser signals output by each laser system 4 are combined by the beam combining component 3 and reach the target object at the same time. The target object can be a wafer or other object that needs to use laser pulses to perform related processes.

[0081] On this basis, on the one hand, by continuing to control the first pulse generator to adjust the emission time of each pump source pulse signal, adjacent laser signals in the combined beam signal can be partially overlapped, and the corresponding overlapping duration can be determined. On the other hand, by continuing to control the second pulse generator to adjust the emission time of each shutter pulse signal, adjacent laser signals in the combined beam signal can be partially overlapped, and the corresponding overlapping duration can be determined. In addition, by controlling the first pulse generator and the second pulse generator at the same time, adjacent laser signals in the combined beam signal can be partially overlapped, and the corresponding overlapping duration can be determined.

[0082] Based on the above embodiments, each laser system includes a laser and a laser controller;

[0083] The laser is provided with the pump source and the optical gate;

[0084] The laser controller is used to control the pump source and the optical gate.

[0085] Specifically, Figure 4 As shown, the auxiliary device 42 in each laser system 4 may include a laser controller 421 . The laser 41 may specifically include a pump source 411 and an optical gate 412 . The laser controller 421 is used to control the pump source 411 and the optical gate 412 .

[0086] Therefore, the pump source pulse signal emitted by the first pulse generator 1 needs to be transmitted to the laser controller 421 first, and then converted into a pump source control signal by the laser controller 421 to control the pump source 411. Similarly, the shutter pulse signal emitted by the second pulse generator 2 needs to be transmitted to the laser controller 421 first, and then converted into a shutter control signal by the laser controller 421 to control the shutter 412. In this way, not only the control accuracy of the pump source and the shutter can be guaranteed, but also damage to the pump source and the shutter can be avoided.

[0087] Based on the above embodiment, the first pulse generator is further used to send a clock signal to the second pulse generator.

[0088] Specifically, in order to monitor the output time of the laser signal output by each laser system, the system time of the first pulse generator can be used as a reference. By using the first pulse generator to send a clock signal to the second pulse generator, the first pulse generator and the second pulse generator can maintain the same reference time to ensure that the pump source pulse signal emitted by the first pulse generator is correlated with the shutter pulse signal emitted by the second pulse generator.

[0089] Based on the above embodiment, the target shutter pulse signal emitted by the second pulse generator to the shutter in the target laser system lags behind the target pump source pulse signal emitted by the first pulse generator to the pump source in the target laser system.

[0090] Specifically, since the laser 41 outputs a laser signal that requires close cooperation between the pump source 411 and the optical gate 412. Since the pump source 411 starts to generate a laser signal that needs to pass through the internal optical path of the laser 41 to reach the optical gate 412, according to the specific optical path configuration inside the laser 41, the optical gate 412 needs to work later than the pump source 411. Therefore, the target optical gate pulse signal emitted by the second pulse generator 2 to the optical gate 412 in the target laser system lags behind the target pump source pulse signal emitted by the target pulse generator 1 to the pump source 411 in the target laser system, which can reduce the cost of each laser system to generate a laser signal. Among them, the target laser system can be each laser system in the laser generating device.

[0091] On the basis of the above embodiment, the lag time between the target shutter pulse signal and the target pump source pulse signal is 700 μs-750 μs.

[0092] Specifically, for each laser system in the laser generating device, in order to reduce the cost of generating laser signals, the target shutter pulse generated by the second pulse generator may be delayed by 700 μs-750 μs from the target pump source pulse signal generated by the first pulse generator.

[0093] It can be understood that when there is partial overlap between adjacent laser signals in the control beam combining signal, a suitable delay can be selected based on the above-mentioned lag time, and the delay can be a ns-level delay.

[0094] On the basis of the above embodiments, the laser generating device provided in the embodiments of the utility model can be applied to the laser annealing process of the wafer, so that each laser signal in the combined beam signal reaches the wafer surface at a preset interval, and there is partial overlap between adjacent laser signals, which can ensure that the light spot formed on the wafer surface is more uniform, and can also reduce the heat accumulation peak on the wafer surface, reduce the possibility of warping or crack defects on the wafer surface during the annealing process, and extend the process time for the target object.

[0095] Figure 5 Schematic diagram of the relationship between the first pulse generator, the second pulse generator and the laser system in another laser generating device provided in an embodiment of the utility model, Figure 6 This is a schematic diagram of the optical path between a laser system and a target object in another laser generating device provided in an embodiment of the utility model. Figure 5 and Figure 6 4 and 5 show a situation where the laser generating device includes four laser systems, and the four laser systems are a first laser system 401, a second laser system 402, a third laser system 403 and a fourth laser system 404.

[0096] Figure 5 In the embodiment, the first pulse generator 1 sends a clock signal 11 to the second pulse generator 2. The first pulse generator 1 transmits a pump source pulse signal with a pulse width of 100 μs to the first laser system 401, the second laser system 402, the third laser system 403 and the fourth laser system 404 through four channels respectively. The laser controllers in the first laser system 401, the second laser system 402, the third laser system 403 and the fourth laser system 404 control the pump source to work after receiving the corresponding pump source pulse signal.

[0097] The second pulse generator 2 transmits a shutter pulse signal with a pulse width of 100 μs to the first laser system 401, the second laser system 402, the third laser system 403 and the fourth laser system 404 through four channels respectively. The laser controllers in the first laser system 401, the second laser system 402, the third laser system 403 and the fourth laser system 404 control the operation of the shutter after receiving the corresponding shutter pulse signal.

[0098] By controlling the emission timing of the pump source pulse signal of each channel of the first pulse generator 1 and keeping the emission timing of the shutter pulse signal of each channel of the second pulse generator 2 the same, the first laser system 401, the second laser system 402, the third laser system 403 and the fourth laser system 404 can output laser signals at the same time.

[0099] Due to the difference in optical path length, the laser signals simultaneously output by the first laser system 401, the second laser system 402, the third laser system 403 and the fourth laser system 404 do not necessarily reach the target object at the same time. Figure 6 As shown, a first branch signal detection device is arranged on the output optical path of the first laser system 401, and the first branch signal detection device comprises a first branch optical beam splitter 611 and a first branch photoelectric converter 612. The first branch photoelectric converter 612 is arranged on the reflection optical path of the first branch optical beam splitter 611.

[0100] A second branch signal detection device is arranged on the output optical path of the second laser system 402 , and the second branch signal detection device comprises a second branch optical beam splitter 621 and a second branch photoelectric converter 622 . The second branch photoelectric converter 622 is arranged on the reflected optical path of the second branch optical beam splitter 621 .

[0101] The output optical path of the third laser system 403 is provided with a third branch signal detection device, which includes a third branch optical beam splitter 631 and a third branch photoelectric converter 632. The third branch photoelectric converter 632 is provided on the reflected optical path of the third branch optical beam splitter 631.

[0102] The output optical path of the fourth laser system 404 is provided with a fourth branch signal detection device, which includes a fourth branch optical beam splitter 641 and a fourth branch photoelectric converter 642. The fourth branch photoelectric converter 642 is provided on the reflected optical path of the fourth branch optical beam splitter 641.

[0103] A reflector 31 may be provided on the transmission light path of the fourth branch optical spectrometer element 641, a first beam combiner 32 may be provided on the transmission light path of the third branch optical spectrometer element 631, a second beam combiner 33 may be provided on the transmission light path of the second branch optical spectrometer element 621, and a third beam combiner 34 may be provided on the transmission light path of the first branch optical spectrometer element 611. The reflector 31, the first beam combiner 32, the second beam combiner 33 and the third beam combiner 34 constitute a beam combining component 3.

[0104] The combined beam signal can be outputted via the third beam combiner 34. A trunk signal detection device can be arranged on the transmission path of the combined beam signal. The trunk signal detection device includes a trunk optical spectrometer 51 and a trunk photoelectric converter 52. The trunk photoelectric converter 52 is arranged on the reflected light path of the trunk optical spectrometer 51, and the target object 7 is arranged on the transmitted light path of the trunk optical spectrometer 51. The target object can be a wafer or other object that needs to perform related processes using laser pulses.

[0105] By making each laser system output laser signals separately, determining the time difference corresponding to each laser signal, and then making each laser signal reach the target object at the same time after beam combination. In this process, by simultaneously adjusting the emission time of the pulse signals of the corresponding channels of the first pulse generator 1 and the second pulse generator 2, the four laser signals can reach the target object at the same time.

[0106] Afterwards, based on this as a reference, the emission timing of the pulse signals of the corresponding channels of the first pulse generator 1 and the second pulse generator 2 is continuously adjusted simultaneously, so that adjacent laser signals in the combined beam signal partially overlap, thereby extending the process time and reducing the peak value of heat accumulation.

[0107] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the utility model.

Claims

1. A laser generating device, characterized in that: include: A first pulse generator, a second pulse generator, a plurality of laser systems, and a beam combining assembly; The first pulse generator is respectively connected to a pump source in each laser system; The second pulse generator is respectively connected to the optical gate in each laser system; The beam combining component is used to combine the laser signals output by each laser system to obtain a combined beam signal, in which adjacent laser signals partially overlap.

2. The laser generating device according to claim 1, characterized in that: Also includes: Trunk signal detection equipment and branch signal detection equipment corresponding to each laser system; The branch signal detection device is arranged on the output optical path of the corresponding laser system, and is used to receive the first part of the laser signal output by the corresponding laser system; The beam combining component is specifically used to combine the second part of the laser signals output by each laser system to obtain the combined beam signal; The trunk signal detection device is arranged on the transmission path of the combined beam signal, and is used to receive the third part of the laser signal in the combined beam signal, and output the fourth part of the laser signal in the combined beam signal.

3. The laser generating device according to claim 2, characterized in that: The branch signal detection device includes a branch optical splitter element and a branch photoelectric converter; The branch optical splitter element is arranged on the output optical path of the corresponding laser system, and is used to split the laser signal output by the corresponding laser system into a first part of the laser signal and a second part of the laser signal; The branch photoelectric converter is used to receive the first portion of the laser signal and convert the first portion of the laser signal into an electrical signal.

4. The laser generating device according to claim 2, characterized in that: The trunk signal detection device includes a trunk optical spectrometer and a trunk photoelectric converter; The main optical splitter element is arranged on the transmission path of the combined beam signal, and is used to split the combined beam signal into a third laser signal and a fourth laser signal. The trunk optical-to-electrical converter is used to receive the third portion of the laser signal and convert the third portion of the laser signal into an electrical signal.

5. The laser generating device according to claim 1, characterized in that: The first pulse generator is used to transmit a pump source pulse signal to a pump source in each laser system, and the second pulse generator is used to transmit a light gate pulse signal to a light gate in each laser system. The emission time of each pump source pulse signal is adjustable and / or the emission time of each light gate pulse signal is adjustable.

6. The laser generating device according to claim 1, characterized in that: Each laser system includes a laser and a laser controller; The laser is provided with the pump source and the optical gate; The laser controller is used to control the pump source and the optical gate.

7. The laser generating device according to claim 1, characterized in that: The first pulse generator is further configured to send a clock signal to the second pulse generator.

8. The laser generating device according to claim 7, characterized in that: The target shutter pulse signal emitted by the second pulse generator to the shutter in the target laser system lags behind the target pump source pulse signal emitted by the first pulse generator to the pump source in the target laser system.

9. The laser generating device according to claim 8, characterized in that: The lag time between the target shutter pulse signal and the target pump source pulse signal is 700 μs-750 μs.

10. The laser generating device according to any one of claims 1 to 9, characterized in that: The laser generating device is applied to the laser annealing process of a wafer.

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