Production device of G5 electronic-grade ammonia water
By designing a simplified G5 electronic grade ammonia water production device, using ultrapure ammonia gas to directly react with ultrapure water, the problems of complex structure and complex process of existing devices are solved, and efficient and low-cost high-purity electronic grade ammonia water production is achieved, meeting the needs of the rapidly developing semiconductor and photovoltaic industries.
Patent Information
- Application Number
- CN202421766178.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-24
- Publication Date
- 2025-05-13
- Estimated Expiration
- 2034-07-24
AI Technical Summary
The existing electronic-grade ammonia water production devices have complex structures and complex processes, resulting in high production costs and long cycles, and it is difficult to meet the rapidly developing semiconductor and photovoltaic industries' demand for high-purity electronic-grade ammonia water.
A simplified G5 electronic grade ammonia water production device was designed. Through the direct reaction of ultrapure ammonia with ultrapure water, the gravity flow design without pumps is adopted, the device structure and process flow is simplified, the ammonia purification steps are reduced, and the ammonia treatment time is shortened.
It realizes efficient production of high-purity G5 electronic grade ammonia water, which reduces production costs and cycles, improves work efficiency, reduces operation difficulty, and improves product stability and quality.
Smart Images
Figure CN222861161U_ABST
Abstract
Description
Technical field:
[0002] The utility model relates to the field of electronic chemicals, in particular to a production device for G5 electronic grade ammonia water. Background technology:
[0004] High-purity electronic grade ammonia (G5 electronic grade) is a high-purity, high-cleanliness chemical substance, mainly used for process cleaning in semiconductor chip production. During the semiconductor manufacturing process, high-purity electronic grade ammonia can remove water marks, oil stains, inorganic dust, etc. on the surface of wafer chips, and is an indispensable material in chip processing.
[0005] Due to the rapid development of China's semiconductor, photovoltaic and other electronic industries, the demand for high-purity electronic-grade ammonia is increasing; currently, the production process of electronic-grade ammonia is complex, the production cost is high, and the cycle is long.
[0006] For example, the Chinese patent "A production device suitable for electronic grade ammonia and ammonia water", publication number CN216005233U, includes an evaporator, a gas-liquid separator, an adsorption device, a first distillation device, a second distillation device, a first washing device, a second washing device, an absorption device and a filtering device connected in sequence; wherein, a thermal coupling device is provided between the first distillation device and the second distillation device, the second distillation device has a tower top gas outlet, a first inlet and a second inlet, the thermal coupling device has a liquid ammonia inlet, a hot gas inlet, a hot gas outlet and a liquid ammonia outlet, the liquid ammonia outlet is connected to the first inlet, the first distillation device is connected to the second inlet, and the tower top gas outlet is respectively connected to the hot gas inlet, the first washing device and the ammonia storage device; the production device has a complex structure and a complex manufacturing process, and has a high manufacturing cost and a long cycle. Summary of the invention:
[0008] In view of the above-mentioned problems, the purpose of the utility model is to propose a production device for G5 electronic grade ammonia water, which is simple in design and reasonably designed, which is conducive to shortening the processing time of ammonia and improving the working efficiency of synthesizing electronic grade ammonia water.
[0009] The utility model provides a production device for G5 electronic grade ammonia water, characterized in that it comprises a pure water tank, a pure water filter, a pure water cooler, a first ammonia water reactor, a first ammonia water cooler, a second ammonia water reactor, a second ammonia water cooler, an ammonia water tank and an ultra-pure ammonia gas cylinder; the first ammonia water reactor, the first ammonia water cooler, the second ammonia water reactor, the second ammonia water cooler and the ammonia water tank are connected in sequence through a first pipeline with a first switch valve, and the ultra-pure ammonia gas cylinder is respectively connected to the first ammonia water reactor and the second ammonia water reactor through a second pipeline with a second switch valve and a first flow meter; the pure water tank is connected in sequence to the pure water filter, the pure water cooler and the first ammonia water reactor through a third pipeline, wherein the third pipeline between the pure water tank and the pure water filter is provided with a third switch valve and a second flow meter, and the first ammonia water reactor and the second ammonia water reactor are provided with liquid level gauges.
[0010] Preferably, the above-mentioned pure water tank and ammonia water tank are connected to an ultra-pure nitrogen cylinder via a nitrogen pipeline.
[0011] Working method of the production device of G5 electronic grade ammonia water of the utility model:
[0012] The third switch valve is opened, and the pure water in the pure water tank is injected into the first ammonia reactor through the pure water filter and the pure water cooler. After the liquid level in the first ammonia reactor is stable, the third switch valve is closed, and ammonia gas is introduced into the first ammonia reactor through the ultrapure ammonia gas cylinder. After the ammonia gas flow rate is stable, several first switch valves are opened to allow ammonia water to pass through the first ammonia water cooler and enter the second ammonia reactor; ultrapure water is added to the first ammonia reactor repeatedly, and ultrapure ammonia gas is introduced into the first ammonia reactor and the second ammonia reactor, and continuous operation is prepared after the concentration of electronic grade ammonia water in the second ammonia reactor reaches 28-30%;
[0013] The third switch valve is controlled to allow the ultrapure water in the pure water tank to enter the first ammonia reactor at a rate of 10L / h, and the second switch valve is controlled to allow the ultrapure ammonia in the ultrapure ammonia cylinder to enter the first ammonia reactor and the second ammonia reactor at a rate of 7m³ / h; the opening of each first switch valve is controlled to maintain the liquid level of the first ammonia reactor and the second ammonia reactor; sampling and testing are carried out in the ammonia tank, and the test results show that the metal ion is 10ppt and the 30nm particle size is 72pcs / ml, which meets the G5 grade ammonia conditions. The process parameters can obtain 14kg / h of electronic grade ammonia with a concentration of 29.6%.
[0014] The utility model discloses an electronic-grade ammonia water device, which obtains electronic-grade ammonia water by directly reacting ultrapure ammonia gas with ultrapure water, and the indicators such as metal ions and particle size reach the G5 grade. Compared with the prior art of the tower, the patent application eliminates the ammonia purification step, shortens the ammonia processing time, improves the working efficiency of synthesizing electronic-grade ammonia water, and reduces the operating difficulty of synthesizing electronic-grade ammonia water. In addition, the device does not use a pump, which reduces the introduction of impurities, has a lower failure rate of the device, has lower requirements on operators, and the quality of the obtained electronic-grade ammonia water is more stable. Description of the drawings:
[0016] The utility model is further described below in conjunction with the accompanying drawings;
[0017] Figure 1 This is a working principle diagram of an embodiment of a production device for G5 electronic grade ammonia water of the utility model;
[0018] Figure 2 This is a working principle diagram of another embodiment of the production device of G5 electronic grade ammonia water of the utility model. Specific implementation method:
[0020] The utility model is further described below in conjunction with the accompanying drawings and specific implementation methods.
[0021] The utility model discloses a production device for G5 electronic grade ammonia water, comprising a pure water tank 1, a pure water filter 2, a pure water cooler 3, a first ammonia water reactor 4, a first ammonia water cooler 5, a second ammonia water reactor 6, a second ammonia water cooler 7, an ammonia water tank 8 and an ultrapure ammonia gas cylinder 9; wherein the first ammonia water reactor 4, the first ammonia water cooler 5, the second ammonia water reactor 6, the second ammonia water cooler 7 and the ammonia water tank 8 are sequentially connected via a first pipeline 11 having a first switch valve 10, i.e., a first pipeline 11 having a first switch valve 10 is provided between them.
[0022] The ultrapure ammonia cylinder 9 is connected to the first ammonia water reactor 4 and the second ammonia water reactor 6 through a second pipeline 14 having a second switch valve 12 and a first flow meter 13; the pure water tank 1 is connected to the pure water filter 2, the pure water cooler 3 and the first ammonia water reactor 4 in sequence through a third pipeline 15, wherein the third switch valve 16 and the second flow meter 17 are provided on the third pipeline 15 between the pure water tank 1 and the pure water filter 2, and the first ammonia water reactor 4 and the second ammonia water reactor 6 are provided with a liquid level gauge, which is provided by the first ammonia water reactor 4 and the second ammonia water reactor 6, and it is a prior art and will not be described here.
[0023] The above-mentioned pure water tank 1 and ammonia water tank 8 are connected to an ultrapure nitrogen cylinder 18 through a nitrogen pipeline to purge the pure water tank 1 and the ammonia water tank 8; an ultrapure water inlet is arranged on the upper part of the pure water tank 1 to replenish the ultrapure water to the pure water tank 1.
[0024] The above-mentioned device is not equipped with a conveying pump, and the material is moved by gravity, that is, the installation height positions in the device are pure water tank 1, pure water filter 2, pure water cooler 3, first ammonia water reactor 4, first ammonia water cooler 5, second ammonia water reactor 6, second ammonia water cooler 7 and ammonia water tank 8 in sequence; because the ultra-pure ammonia cylinder 9 and the ultra-pure nitrogen cylinder 18 have a higher pressure, the height of the ultra-pure ammonia cylinder 9 and the ultra-pure nitrogen cylinder 18 is not required to be higher than the pure water tank 1, the first ammonia water reactor 4, etc.
[0025] The inner surfaces of the first ammonia water reactor 4, the first ammonia water cooler 5, the second ammonia water reactor 6, the second ammonia water cooler 7 and the ammonia water tank 8 have a PFA coating.
[0026] Working method of the production device of G5 electronic grade ammonia water of the utility model:
[0027] The third switch valve 16 is opened, and the pure water in the pure water tank 1 is injected into the first ammonia reactor 4 through the pure water filter 2 and the pure water cooler 3. After the liquid level in the first ammonia reactor 4 is stabilized, the third switch valve 16 is closed, and ammonia gas is introduced into the first ammonia reactor 4 through the ultrapure ammonia gas cylinder 9. After the ammonia gas flow rate is stabilized, several first switch valves 10 are opened to allow ammonia water to pass through the first ammonia water cooler 5 and enter the second ammonia reactor 6; ultrapure water is repeatedly added to the first ammonia reactor 4, and ultrapure ammonia gas is introduced into the first ammonia reactor 4 and the second ammonia reactor 6. After the concentration of electronic grade ammonia water in the second ammonia reactor reaches 28-30%, continuous operation is prepared;
[0028] The third switch valve 16 is controlled to allow the ultrapure water in the pure water tank 1 to enter the first ammonia reactor 4 at a rate of 10L / h, and the second switch valve 12 is controlled to allow the ultrapure ammonia in the ultrapure ammonia cylinder 9 to enter the first ammonia reactor 4 and the second ammonia reactor 6 at a rate of 7m³ / h; the opening of each first switch valve 10 is controlled to maintain the liquid level of the first ammonia reactor 4 and the second ammonia reactor 6; sampling and testing are carried out in the ammonia tank, and the test results show that the metal ion is 10ppt and the 30nm particle size is 72pcs / ml, which meets the G5 grade ammonia conditions. The process parameters can obtain 14kg / h of electronic grade ammonia with a concentration of 29.6%.
[0029] In the specific embodiment process, the opening of the third switch valve 16 is controlled to allow ultrapure water to enter the first ammonia reactor 4 at a rate of 35L / h, and the second switch valve 12 is controlled to allow ultrapure ammonia to enter the first ammonia reactor 4 and the second ammonia reactor 6 at a rate of 20m³ / h. The opening of each first switch valve 10 is controlled to maintain the liquid level of the first ammonia reactor 4 and the second ammonia reactor 6. Samples are taken from the ammonia tank for testing. The test results show that the metal ion content is 6ppt and the 30nm particle size is 81pcs / ml, which meets the G5 grade ammonia conditions. The process parameters can obtain 50kg / h of 30.1% electronic grade ammonia.
[0030] The following paragraph provides additional supplementary explanations (these contents are prior art and will not be elaborated in detail): the pure water grade in the ammonia tank is V grade; the filter is 0.02um, and the operating pressure is 0.1 to 0.2MPa; the pure water cooler is a serpentine jacket condenser, which is cooled by external condensed water; the ammonia reactor is a multi-stage bubble tower reactor, the interior of which is sprayed with PFA, and cooling water is passed through the outer jacket; the ammonia condenser is a jacket condenser, the interior of which is sprayed with PFA, and cooling water is passed through the jacket, and all pipes in contact with ammonia are sprayed with PFA; the nitrogen cylinder uses ultra-pure nitrogen, reaching the 5N level; the ammonia cylinder uses ultra-pure ammonia, reaching the 7N photoelectronic level.
[0031] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model rather than to limit it. Although the utility model has been described in detail with reference to the preferred embodiments, ordinary technicians in the relevant field should understand that the specific implementation methods of the utility model can still be modified or some technical features can be replaced by equivalents without departing from the spirit of the technical solution of the utility model, which should be included in the scope of the technical solution for protection of the utility model.
Claims
1. A production device for G5 electronic grade ammonia water, characterized in that: The invention comprises a pure water tank (1), a pure water filter (2), a pure water cooler (3), a first ammonia water reactor (4), a first ammonia water cooler (5), a second ammonia water reactor (6), a second ammonia water cooler (7), an ammonia water tank (8) and an ultra-pure ammonia gas cylinder (9); the first ammonia water reactor (4), the first ammonia water cooler (5), the second ammonia water reactor (6), the second ammonia water cooler (7) and the ammonia water tank (8) are connected in sequence via a first pipeline (11) having a first switch valve (10); the ultra-pure ammonia gas cylinder (9) is connected in sequence via a first pipeline (11) having a first switch valve (10); A second pipeline (14) having a second switch valve (12) and a first flow meter (13) is connected to the first ammonia water reactor (4) and the second ammonia water reactor (6); the pure water tank (1) is connected to the pure water filter (2), the pure water cooler (3) and the first ammonia water reactor (4) in sequence through a third pipeline (15), wherein the third switch valve (16) and the second flow meter (17) are provided on the third pipeline (15) between the pure water tank (1) and the pure water filter (2), and the first ammonia water reactor (4) and the second ammonia water reactor (6) are provided with liquid level meters.
2. The production device of G5 electronic grade ammonia water according to claim 1, characterized in that: The pure water tank (1) and the ammonia water tank (8) are connected to an ultrapure nitrogen cylinder (18) via a nitrogen pipeline.
3. The production device of G5 electronic grade ammonia water according to claim 1 or 2, characterized in that: The device is not provided with a conveying pump, and the material is moved by gravity.
4. The production device of G5 electronic grade ammonia water according to claim 3, characterized in that: The installation height positions in the device are, in order, a pure water tank (1), a pure water filter (2), a pure water cooler (3), a first ammonia water reactor (4), a first ammonia water cooler (5), a second ammonia water reactor (6), a second ammonia water cooler (7) and an ammonia water tank (8).
5. The production device of G5 electronic grade ammonia water according to claim 1, characterized in that: The inner surfaces of the first ammonia water reactor (4), the first ammonia water cooler (5), the second ammonia water reactor (6), the second ammonia water cooler (7) and the ammonia water tank (8) are provided with a PFA coating.