Lamp gun for tube sealing of semiconductor material

Abstract

The utility model relates to the technical field of semiconductor technology, and discloses a lamp gun for tube sealing of semiconductor materials, which comprises a support tube, a fixed tube connected to one end of the support tube and a plurality of flame nozzles, the plurality of flame nozzles are connected to the fixed tube and are arranged in a circumferential array, and a working area for tube sealing is defined by the plurality of flame nozzles. A notch enabling the side face of the working area to be open is formed in the fixing pipe, the fixing pipe is communicated with the supporting pipe, a first gas input port is formed in the supporting pipe, and external gas can be conveyed to the flame nozzle through the gas input port. And on the other hand, the tube can be uniformly heated through the flame nozzles arranged in the circumferential array, and the tube sealing quality can be improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor technology, in particular to a lamp gun used for sealing a semiconductor material tube. Background Art

[0002] In the production process of semiconductors, the growth of crystal materials mostly uses quartz tubes to package the raw materials, and the quartz tubes with materials are sealed. Subsequently, the material synthesis is completed through equipment such as a synthesis furnace. During the sealing process, hydrogen-oxygen flame spraying is generally used to seal the tube. However, the hydrogen-oxygen flame spraying method needs to consider whether the gas mixing is sufficient and whether the combustion is uniform, otherwise it will lead to a decrease in the sealing quality.

[0003] In the prior art, the utility model patent (CN207031258U) discloses an oxyhydrogen flame nozzle for sealing a circular quartz tube. The nozzle includes an oxyhydrogen mixing tube, which is in an arc shape, connected to an oxygen conduit, which is a curved tube, connected to a hydrogen conduit, which is a straight tube, and 10-15 flame nozzles are arranged on the other side of the oxyhydrogen mixing tube, which is connected to the oxyhydrogen mixing tube through a connecting tube. The nozzle is heated unevenly, which will cause inconsistent heating at different places of the tube.

[0004] Based on this, the technical problem to be solved in this case is: how to provide a lamp gun that is evenly heated and convenient for sealing the tube. Utility Model Content

[0005] In order to solve the above technical problems, the utility model provides a lamp gun for sealing semiconductor material tubes. The lamp gun can arrange the working area around the tube by holding a support tube, so that the staff can light the lamp gun first and then move the lamp gun so that the tube is located in the working area for sealing. The staff can also place the tube in the working area first and then light the lamp gun, which is convenient for the staff to operate. The staff can first fix the tube and then light the lamp gun to seal the tube, or light the lamp gun first and directly seal the tube. The staff can seal the tube according to different operating methods to increase convenience. On the other hand, the flame nozzles arranged in a circular array can make the tube heated evenly, which is beneficial to improving the quality of sealing.

[0006] The technical solution of the utility model is:

[0007] A lamp gun for sealing a semiconductor material tube comprises a support tube, a fixed tube connected to one end of the support tube, and a plurality of flame nozzles, wherein the plurality of flame nozzles are connected to the fixed tube and arranged in a circular array, and the plurality of flame nozzles form a working area for sealing the tube, the fixed tube is connected to the support tube, a first gas input port is provided on the support tube, and external gas can be transported to the flame nozzle through the gas input port.

[0008] In the above-mentioned lamp gun for sealing tubes of semiconductor materials, the fixed tube is provided with a notch that opens the side of the working area.

[0009] In the above-mentioned lamp gun for sealing tubes of semiconductor materials, the structure of the fixed tube is annular or U-shaped; when the structure of the fixed tube is U-shaped, the support tube is connected to the closed part of the fixed tube, and the opening is the notch; when the structure of the fixed tube is annular, the notch is located at one end of the fixed tube away from the support tube.

[0010] In the above-mentioned lamp gun for sealing tubes of semiconductor materials, the support tube includes a support inner tube and a support outer tube, the gas input port includes a first gas input port and a second gas input port, a first gas delivery channel is provided in the support inner tube, and a second gas delivery channel is provided between the support outer tube and the support inner tube; the first gas input port is connected to the support inner tube, the second gas input port is connected to the support outer tube, both the support inner tube and the support outer tube are communicated with the fixed tube, and external gas can be delivered to the flame nozzle through the support inner tube and the support outer tube.

[0011] In the above-mentioned lamp gun for sealing tubes of semiconductor materials, the fixed tube includes a fixed inner tube and a fixed outer tube, a third gas delivery channel communicated with the first gas delivery channel is provided in the fixed inner tube, and a fourth gas delivery channel communicated with the second gas delivery channel is provided between the fixed outer tube and the fixed inner tube, and external gas can be delivered to the flame nozzle through the third gas delivery and fourth gas delivery channels.

[0012] In the above-mentioned lamp gun for sealing tubes of semiconductor materials, the first gas input port is connected to an externally provided oxygen gas source, and the second gas input port is connected to an externally provided hydrogen gas source.

[0013] In the above-mentioned lamp gun for sealing tubes of semiconductor materials, the gas flow rate of the support outer tube is greater than that of the support inner tube.

[0014] In the above-mentioned lamp gun for sealing tubes of semiconductor materials, the materials of both the fixed tube and the support tube are quartz.

[0015] In the above-mentioned lamp gun for sealing tubes of semiconductor materials, the fixed tube and the support tube are integrally formed.

[0016] In the above-mentioned lamp gun for sealing tubes of semiconductor materials, the flame nozzle includes an outer nozzle and an inner nozzle located inside the outer nozzle. The inner nozzle is connected to the third gas delivery channel, and the outer nozzle is connected to the fourth gas delivery channel.

[0017] One of the technical solutions in the above technical solutions of the present utility model has at least the following advantages or beneficial effects:

[0018] The utility model can hold the lamp gun and arrange the working area around the quartz tube, so that the staff can light the lamp gun first and then move the lamp gun to place the tube in the working area for sealing, or can first place the tube in the working area and then light the lamp gun, which is convenient for the staff to operate, and can first fix the tube and then light the lamp gun to seal the tube, or can first light the lamp gun to seal the tube directly, and the staff can seal the tube according to different operating methods, which increases convenience, and on the other hand, through the flame nozzles arranged in a circular array and the fixed tubes with an annular or U-shaped structure, the tube can be heated evenly during the sealing process, which is beneficial to improving the sealing quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a three-dimensional diagram of embodiment 1 of the utility model;

[0020] Figure 2 It is a front view of embodiment 1 of the utility model;

[0021] Figure 3 for Figure 1 A partial enlarged view of

[0022] Figure 4 for Figure 2 A partial enlarged view of . DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] Example 1

[0025] See also Figures 1 to 4 A lamp gun for sealing a semiconductor material tube comprises a support tube 1 for holding, a fixed tube 2 connected to one end of the support tube 1, and a plurality of flame nozzles 3. The plurality of flame nozzles 3 are connected to the fixed tube 2 and arranged in a circular array. The plurality of flame nozzles 3 form a working area 4 for sealing the tube. The fixed tube 2 is connected to the support tube 1. A gas input port 13 is provided on the support tube 1, and external gas can be transported to the flame nozzle 3 through the gas input port 13.

[0026] In actual operation, the staff fixes the pipe (usually vertically, but it can also be horizontally fixed), passes gas through the gas inlet 13, lights the lamp gun, at this time the flame nozzle 3 sprays out flames, and the sprayed flames all face the working area 4. The staff holds the support pipe 1 and moves the lamp gun until the pipe is located in the working area 4. The flame nozzle 3 continuously sprays fire, and seals the pipe by high temperature for subsequent material synthesis. It should be noted that the pipe is a strip pipe. Specifically, by sealing the pipe in this way, on the one hand, fixing the pipe can avoid the decline of the sealing quality caused by the deviation of the pipe during sealing. On the other hand, the flame nozzles 3 arranged in a circumferential array can make the pipe in the working area 4 heat evenly, improving the sealing efficiency and quality. In particular, the gas passed through the gas inlet 13 can be combustible gas or mixed gas.

[0027] Preferably, the fixing pipe 2 is provided with a notch 21 that makes the side of the working area 4 open.

[0028] In this embodiment, through the setting of the notch 21, the staff can sleeved the working area 4 from one end of the pipe and surround the periphery of the pipe, or hold the support pipe 1 and align the notch 21 with the pipe and move the working area 4 to the periphery of the pipe and arrange it around the pipe, increasing convenience.

[0029] More preferably, the structure of the fixing pipe 2 is annular or U-shaped; when the structure of the fixing pipe 2 is U-shaped, the support pipe 1 is connected to the closed part of the fixing pipe 2, and the opening part is the notch 21; when the structure of the fixing pipe 2 is annular, the notch 21 is located at one end of the fixing pipe 2 away from the support pipe 1.

[0030] Through the above design, when the fixing pipe 2 is U-shaped, specifically, the flame nozzles 3 are respectively located on both sides of the opening of the U-shape, and the support pipe 1 is located on the closed part. This is convenient for the staff to more intuitively align the notch 21 with the pipe when operating the lamp gun, and then move the working area 4 to the periphery of the pipe, facilitating pipe sealing, and the U-shaped lamp gun is beneficial for large-diameter pipes; when the fixing pipe 2 is annular, specifically, the flame nozzles 3 are respectively located in the hollow position of the ring. Similarly, the support pipe 1 is located at one end of the fixing pipe 2 away from the support pipe 1, which can make the notch 21 located in the axial direction of the support pipe 1. It is convenient for the staff to more intuitively align the notch 21 with the pipe when operating the lamp gun, and then move the working area 4 to the periphery of the pipe, facilitating pipe sealing, and thus improving the pipe sealing quality.

[0031] Furthermore, the support tube 1 includes a support inner tube 11 and a support outer tube 12, the gas input port 13 includes a first gas input port 131 and a second gas input port 132, a first gas delivery channel 14 is provided in the support inner tube 11, and a second gas delivery channel 15 is provided between the support outer tube 12 and the support inner tube 11; the first gas input port 131 is connected to the support inner tube 11, the second gas input port 132 is connected to the support outer tube 12, the support inner tube 11 and the support outer tube 12 are both connected to the fixed tube 2, and external gas can be delivered to the flame nozzle 3 through the support inner tube 11 and the support outer tube 12.

[0032] In this embodiment, the supporting outer tube 12 can be convenient for the staff to hold and operate, such as aligning the notch 21 with the pipe sealing position, and the position can also be appropriately adjusted when sealing the pipe. The external gas can enter the fixed tube 2 from the supporting inner tube 11 and the supporting outer tube 12, and be transported to the flame nozzle 3. After the flame nozzle 3 is ignited, the flame can be continuously sprayed toward the position of the working area 4 to improve the sealing efficiency. On the other hand, the external gas can be introduced into the lamp gun through the first gas input port 131 and the second gas input port 132, and transported to the flame nozzle 3 through the first gas delivery channel 14 and the second gas delivery channel 15.

[0033] Furthermore, the fixed tube 2 includes a fixed inner tube 22 and a fixed outer tube 23, a third gas delivery channel 24 connected to the first gas delivery channel 13 is provided in the fixed inner tube 22, a fourth gas delivery channel 25 connected to the second gas delivery channel 16 is provided between the fixed outer tube 23 and the fixed inner tube 22, and external gas can be delivered to the flame nozzle 3 through the third gas delivery channel 24 and the fourth gas delivery channel 25.

[0034] In this embodiment, the fixed inner tube 22 and the fixed outer tube 23 can respectively transport the gases of the supporting inner tube 11 and the supporting outer tube 12 to the flame nozzle 3. In this way, the mixing of the gases of the supporting inner tube 11 and the supporting outer tube 12 can be avoided, and incomplete combustion due to early mixing of the gases before combustion can be avoided. In other words, the stability and efficiency of gas combustion can be improved in this way, and the proportion of the introduced gas can be controlled to make the introduced gas completely burn according to the mass ratio of the combustion reaction formula.

[0035] Preferably, the first gas input port 131 is connected to an external oxygen gas source, and the second gas input port 132 is connected to an external hydrogen gas source.

[0036] In the above design, the first gas input port 131 is connected to the oxygen gas source, and the second gas input port 132 is connected to the hydrogen gas source, and they are respectively introduced into the flame nozzle 3, which can make the combustion safer, avoid the explosion of hydrogen and oxygen due to incomplete combustion, and make it easier to control the ratio of the hydrogen and oxygen introduced, further ensure the complete combustion of hydrogen and oxygen, and improve the sealing efficiency.

[0037] More preferably, the gas flow supporting the outer tube 12 is greater than the gas flow supporting the inner tube 11 .

[0038] In order to ensure sufficient combustion, specifically, the gas flow rate of the inner support tube 11 is half of the gas flow rate of the outer support tube 12, so that the ratio of hydrogen to oxygen is maintained at 2:1, thereby improving the combustion efficiency.

[0039] More preferably, the material of the fixing tube 2 and the supporting tube 1 are both quartz.

[0040] In this embodiment, the quartz material has high temperature resistance, which improves the high temperature resistance of the lamp gun.

[0041] More preferably, the fixing tube 2 and the supporting tube 1 are integrally formed.

[0042] The one-piece design can make the entire light gun more stable and strengthen the overall structure.

[0043] Furthermore, the flame nozzle 3 includes an outer nozzle 32 and an inner nozzle 31 located inside the outer nozzle 32 . The inner nozzle 31 is connected to the third gas delivery channel 24 , and the outer nozzle 32 is connected to the fourth gas delivery channel 25 .

[0044] In this embodiment, the fourth gas delivery channel 25 can pass the hydrogen from the second gas input port 132 to the outer nozzle 32, and the third gas delivery channel 24 can pass the oxygen from the first gas input port 131 to the inner nozzle 31, thereby forming a jet flame at the nozzle of the flame nozzle 3, allowing the hydrogen to fully burn at the nozzle of the flame nozzle 3, thereby preventing the hydrogen from exploding due to incomplete combustion.

[0045] Although the embodiments of the present invention have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A lamp gun for sealing a semiconductor material tube, comprising a support tube, a fixing tube connected to one end of the support tube, and a plurality of flame nozzles, characterized in that: The multiple flame nozzles are connected to a fixed pipe and arranged in a circumferential array. The multiple flame nozzles enclose a working area for tube sealing. The fixed pipe is communicated with a support pipe, and a gas inlet is provided on the support pipe, and external gas can be transported to the flame nozzles through the gas inlet; A notch is provided on the fixed pipe to make the side of the working area open.

2. A lamp gun for sealing a semiconductor material tube according to claim 1, characterized in that The structure of the fixed pipe is annular or U-shaped; When the structure of the fixed pipe is U-shaped, the support pipe is connected to the closed part of the fixed pipe, and the opening part is the notch; when the structure of the fixed pipe is annular, the notch is located at one end of the fixed pipe away from the support pipe.

3. A lamp gun for sealing a semiconductor material tube according to claim 1, characterized in that ,The support pipe includes a support inner pipe and a support outer pipe. The gas inlet includes a first gas inlet and a second gas inlet. A first gas transport channel is provided in the support inner pipe, and a second gas transport channel is provided between the support outer pipe and the support inner pipe; the first gas inlet is connected to the support inner pipe, the second gas inlet is connected to the support outer pipe, both the support inner pipe and the support outer pipe are communicated with the fixed pipe, and external gas can be transported to the flame nozzles through the support inner pipe and the support outer pipe.

4. A lamp gun for sealing a semiconductor material tube according to claim 3, characterized in that ,The fixed pipe includes a fixed inner pipe and a fixed outer pipe. A third gas transport channel communicated with the first gas transport channel is provided in the fixed inner pipe, and a fourth gas transport channel communicated with the second gas transport channel is provided between the fixed outer pipe and the fixed inner pipe, and external gas can be transported to the flame nozzles through the third gas transport and the fourth gas transport channels.

5. A lamp gun for sealing a semiconductor material tube according to claim 3, characterized in that ,The first gas inlet is connected to an external oxygen gas source, and the second gas inlet is connected to an external hydrogen gas source.

6. A lamp gun for sealing a semiconductor material tube according to claim 3, characterized in that ,The gas flow rate of the support outer pipe is greater than that of the support inner pipe.

7. A lamp gun for sealing a semiconductor material tube according to claim 1, characterized in that ,The materials of the fixed pipe and the support pipe are both quartz.

8. A lamp gun for sealing a semiconductor material tube according to claim 1, characterized in that ,The fixed pipe and the support pipe are integrally formed.

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