Quartz base tube heating system

Abstract

The utility model relates to the technical field of optical fiber preform production equipment, and discloses a quartz base tube heating system which comprises a rack, a first chuck, a second chuck, a heating device and an auxiliary heating device, the first chuck and the second chuck can synchronously rotate to drive the quartz base tube to rotate; the first chuck comprises a gas supply port, the second chuck comprises a gas extraction port, the gas supply port can be used for introducing process reaction gas into the quartz base tube, and the heating device can be used for heating the quartz base tube, so that the process reaction gas is subjected to corresponding chemical reaction in the quartz base tube. The auxiliary heating device is installed on the first chuck and arranged between the first chuck and the heating device, the auxiliary heating device comprises a heating groove, and the end of the quartz base tube is contained in the heating groove, so that process reaction gas in the quartz base tube is fully preheated in the heating groove, the process reaction gas has a certain temperature before entering a reaction area, and the reaction effect is improved. The process reaction gas condensation is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of optical fiber preform rod production equipment, in particular to a quartz substrate tube heating system. Background Art

[0002] Currently, the manufacturing technology of optical fiber preform rods adopts MCVD (full name: Modified Chemical Vapor Deposition).

[0003] Among them, the main chemical principle of MCVD manufacturing technology is that process reaction gases such as SiCl4, GeCl4, POCl3 are brought into the rotating quartz substrate tube on the MCVD equipment by O2, and the heating system outside the tube heats the quartz substrate tube so that the process reaction gas entering the quartz substrate tube reacts in the reaction zone to generate glass deposited on the inner wall of the quartz substrate tube, thereby producing an optical fiber preform.

[0004] The process reaction gas flows from one end of the quartz substrate tube to the other end. Before the process reaction gas enters the reaction zone, the process reaction gas will be mixed in a waiting reaction zone (i.e., the unheated portion of the end of the quartz substrate tube). If the process reaction gas is not heated or is not heated sufficiently in the waiting reaction zone, the process reaction gas will be partially condensed, which will cause the deposition efficiency of the reaction zone of the quartz substrate tube to decrease. Utility Model Content

[0005] The embodiment of the utility model aims to provide a quartz substrate tube heating system to solve the technical problem in the prior art that the process reaction gas is not heated or is insufficiently heated in the reaction zone, resulting in partial condensation of the reaction gas, which leads to reduced deposition efficiency in the reaction zone of the quartz substrate tube.

[0006] In order to solve the above technical problems, the utility model provides a quartz substrate tube heating system, comprising:

[0007] frame;

[0008] A first chuck, the first chuck is connected to the frame, and the first chuck includes an air supply port;

[0009] a second chuck, the second chuck is connected to the frame, the second chuck comprises an air outlet port, the air outlet port faces the air supply port, the first chuck and the second chuck are used to clamp opposite ends of the quartz substrate tube respectively, and the first chuck and the second chuck can rotate synchronously to drive the quartz substrate tube to rotate;

[0010] A heating device, the heating device is connected to the frame;

[0011] The auxiliary heating device is connected to the first chuck, the auxiliary heating device is located between the heating device and the first chuck, and the auxiliary heating device includes a heating tank for accommodating the quartz substrate tube.

[0012] In some embodiments, the quartz substrate tube heating system further includes an oxygen gas source, a hydrogen gas source, a temperature measuring device and a control device; the oxygen gas source and the hydrogen gas source are respectively connected to the heating device; the control device is respectively connected to the oxygen gas source, the hydrogen gas source and the temperature measuring device for communication, and the control device can obtain the temperature of the heating part of the quartz substrate tube according to the temperature measuring device, and control the oxygen flow rate provided by the oxygen gas source to the heating device and the hydrogen flow rate provided by the hydrogen gas source to the heating device in real time.

[0013] In some embodiments, the quartz substrate tube heating system also includes a water gas box and a connecting pipe assembly, the water gas box is connected to the oxygen gas source and the hydrogen gas source respectively, and the water gas box is also used to connect to a cooling water source; the water gas box includes a water supply end, a return water end, an oxygen delivery end and an oxygen delivery end, and a water channel is provided in the blowtorch; the connecting pipe assembly includes a first connecting pipe, a second connecting pipe, a third connecting pipe and a fourth connecting pipe, the water supply end is connected to one end of the water channel through the first connecting pipe, and the return water end is connected to the other end of the water channel through the second connecting pipe; the blowtorch includes an oxygen inlet end and a hydrogen inlet end, the oxygen delivery end is connected to the oxygen inlet end through the third connecting pipe, and the hydrogen delivery end and the hydrogen inlet end are connected through the fourth connecting pipe.

[0014] In some embodiments, the auxiliary heating device includes a heat radiation plate, a plurality of the heat radiation plates are arranged on the groove wall of the heating groove, a spacing is provided between the heat radiation plate and the outer surface of the quartz substrate tube, and the plurality of the heat radiation plates are circumferentially spaced apart along the central axis of the quartz substrate tube; the heat radiation plate includes an arc-shaped radiation surface, and the center of curvature of the arc-shaped radiation surface is located on the central axis of the quartz substrate tube.

[0015] In some embodiments, the auxiliary heating device also includes a substrate, a shell assembly, a sliding rod, an elastic member and an end plate, the substrate is connected to the first chuck, one end of the sliding rod is connected to the substrate, the other end of the sliding rod is connected to the end plate, the shell assembly is sleeved on the sliding rod, one end of the elastic member is connected to the end plate, the other end of the elastic member is connected to the shell assembly, the length direction of the elastic member is consistent with the arrangement direction of the first chuck and the second chuck, and the shell assembly has the heating groove.

[0016] In some embodiments, the quartz substrate tube heating system further comprises a moving device, wherein the moving device is located between the first chuck and the second chuck, the moving device is slidably connected to the frame, and the heating device is connected to the moving device so that the heating device can move back and forth between the first chuck and the second chuck.

[0017] In some embodiments, the moving device includes a carrying platform, which is slidably connected to the frame, and the heating device also includes a bracket and a blowtorch, and the bracket is connected between the carrying platform and the blowtorch; the auxiliary heating device also includes a sliding frame, which is located between the first chuck and the carrying platform, one end of the sliding frame is connected to the shell assembly, and the other end of the sliding frame is slidably connected to the frame; the bracket includes a baffle, which is located on the side of the bracket facing the sliding frame; when the carrying platform drives the bracket to slide toward the sliding frame, the sliding frame can be against the baffle.

[0018] In some embodiments, the sliding frame includes a pulley, a support rod and an abutment rod, the pulley is slidably connected to the frame, one end of the support rod is connected to the pulley, the other end of the support rod is connected to the shell assembly, one end of the abutment rod is connected to the support rod, and the other end of the abutment rod faces the blowtorch, the length direction of the abutment rod is consistent with the direction from the first chuck to the second chuck, and when the baffle moves toward the sliding frame, one end of the abutment rod can abut against the baffle.

[0019] In some embodiments, the auxiliary heating device also includes a fire baffle, which is connected to the shell assembly, and is located on the side of the heating groove facing the blowtorch. The fire baffle includes a through hole, and the heating groove and the through hole are connected.

[0020] In some embodiments, the blowtorch includes an arcuate surface, the center of curvature of the arcuate surface is located on the axis of the quartz substrate tube, the arcuate surface is provided with a plurality of narrow and long heating ports, and the plurality of narrow and long heating ports are distributed on the arcuate surface in a circular array around the axis of the quartz substrate tube.

[0021] Compared with the prior art, in the embodiment of the utility model, the auxiliary heating device is installed on the first chuck, and the auxiliary heating device is located between the first chuck and the heating device. The auxiliary heating device can heat the reaction zone of the quartz substrate tube to avoid condensation of the process reaction gas in the reaction zone to be reacted, thereby ensuring the deposition efficiency of the reaction zone of the quartz substrate tube. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] One or several embodiments are exemplarily described by pictures in the corresponding drawings, and these exemplified descriptions do not constitute limitations on the embodiments. Elements with the same reference numerals in the drawings represent similar elements, and unless otherwise stated, the figures in the drawings do not constitute proportional limitations.

[0023] Figure 1 It is a structural schematic diagram of a quartz substrate tube heating system provided in one embodiment of the utility model;

[0024] Figure 2 yes Figure 1 Schematic diagram of the modular structure of the quartz substrate tube heating system;

[0025] Figure 3 yes Figure 1 Schematic diagram of the operation flow of the control device of the quartz substrate tube heating system;

[0026] Figure 4 yes Figure 1 A schematic diagram of the structure of the heat radiation sheet in the auxiliary heating device;

[0027] Figure 5 yes Figure 1 A schematic diagram of the structure of part A in the middle;

[0028] Figure 6 yes Figure 1 A schematic diagram of the structure of part B in the middle;

[0029] Figure 7 yes Figure 5 Schematic diagram of the matching structure of the medium quick-insert tube body female head and the quick-insert locking male head;

[0030] Figure 8 yes Figure 1 A schematic diagram of the structure of the heat radiation sheet in the auxiliary heating device;

[0031] Fig. 9 yes Figure 1 Schematic diagram of the structure of the auxiliary heating device;

[0032] Fig.10 yes Fig. 9 A schematic diagram of the structure of the fire baffle in the auxiliary heating device;

[0033] Fig.11 yes Figure 1 Schematic diagram of the structure of the blowtorch in the heating device.

[0034] The reference numerals are as follows:

[0035] 100, quartz substrate heating system; 10, rack; 20, first chuck; 21, air supply port; 30, second chuck; 31, air outlet port; 40, heating device; 41, blowtorch; 411, water inlet; 412, water outlet; 413, oxygen inlet; 414, hydrogen inlet; 415, curved surface; 42, bracket; 421, baffle; 50, auxiliary heating device; 51, heating tank; 5 2. Heat radiation sheet; 521. Arc radiation surface; 522. Heating wire; 523. Electrical connection port; 53. Base plate; 54. Shell assembly; 541. Shell body; 542. Vertical plate; 543. Bearing; 55. Sliding rod; 56. Elastic member; 57. End plate; 58. Sliding frame; 581. Pulley; 582. Support rod; 583. Abutment rod; 59. Fire baffle; 591. Through hole; 592. Heat insulation 593, installation part; 5931, locking hole; 60, oxygen gas source; 70, hydrogen gas source; 80, temperature measuring device; 90, control device; 110, water gas box; 1101, water supply end; 1102, water return end; 1103, oxygen delivery end; 1104, hydrogen delivery end; 1105, quick-insert tube body female connector; 11051, insertion port; 11052, receiving cavity; 11053, Snap-fit ​​block; 120, connecting tube assembly; 1201, first connecting tube; 1202, second connecting tube; 1203, third connecting tube; 1204, fourth connecting tube; 1205, quick-insert locking male head; 12051, tube body; 120511, snap-fit ​​groove; 12052, deformation part; 12053, pressing part; 130, moving device; 1301, supporting platform; 200, quartz base tube. DETAILED DESCRIPTION

[0036] In order to facilitate the understanding of the utility model, the utility model is described in more detail in the following in conjunction with the accompanying drawings and specific embodiments. It should be noted that when an element is described as "connected" to another element, it can be directly on another element, or there can be one or more centered elements therebetween. The terms "upper", "lower", "left", "right", "upper end", "lower end", "top" and "bottom" used in this specification indicate an orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, only for the convenience of describing the utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the utility model. In addition, the terms "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0037] Unless otherwise defined, all technical and scientific terms used in this specification have the same meaning as those commonly understood by those skilled in the art of the present invention. The terms used in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention.

[0038] Please also read Figure 1 and Figure 2 , Figure 1 It is a structural schematic diagram of a quartz substrate tube heating system provided in one embodiment of the utility model; Figure 2 yes Figure 1 Schematic diagram of the modular structure of the quartz substrate tube heating system.

[0039] A quartz substrate tube heating system 100 provided in an embodiment of the utility model comprises a frame 10, a first chuck 20, a second chuck 30, a heating device 40 and an auxiliary heating device 50, wherein the first chuck 20 is connected to the frame 10, and the first chuck 20 comprises an air supply port 21; the second chuck 30 is connected to the frame 10, and the second chuck 30 comprises an air outlet port 31, and the air outlet port 31 faces the air supply port 21; the first chuck 20 and the second chuck 30 are used to clamp opposite ends of a quartz substrate tube 200 respectively, and the first chuck 20 and the second chuck 30 can rotate synchronously to drive the quartz substrate tube 200 to rotate; the heating device 40 is connected to the frame 10, and the auxiliary heating device 50 is connected to the first chuck 20, and the auxiliary heating device 50 is located between the heating device 40 and the first chuck 20, and the auxiliary heating device 50 comprises a heating groove 51 for accommodating the quartz substrate tube 200.

[0040] Here, it should be understood that the quartz substrate tube 200 is generally tubular, and the quartz substrate tube 200 is hollow. Before heating the quartz substrate tube 200, the first chuck 20 and the second chuck 30 are clamped at opposite ends of the quartz substrate tube 200 respectively; the gas supply port 21 is connected to one end of the quartz substrate tube 200, and the gas outlet port 31 is connected to the other end of the quartz substrate tube 200. It should be noted that the gas supply port 21 can input process reaction gas into the quartz substrate tube 200, and the gas outlet port 31 can discharge the process reaction gas in the quartz substrate tube 200 out of the quartz substrate tube 200. In this embodiment, an air pump can be set in the first chuck 20, and an air pump can be set in the second chuck 30. Further, the process reaction gas will move in the quartz substrate tube 200 along the path of the gas supply port 21, the inside of the quartz substrate tube 200 and the gas outlet port 31, the heating device 40 heats the quartz substrate tube 200, and the process reaction gas will undergo a corresponding chemical reaction in the quartz substrate tube 200. For ease of understanding, the heated portion of the quartz substrate tube 200 may be referred to as a reaction zone, and the unheated portion of the quartz substrate tube 200 may be referred to as a to-be-reacted zone.

[0041] In this embodiment, the heating tank 51 can heat the end of the quartz substrate tube 200, and the auxiliary heating device 50 is located between the heating device 40 and the first chuck 20. It can be understood that the heating tank 51 is located on the side of the quartz substrate tube 200 close to the gas supply port 21. The purpose of this arrangement is that after the process reaction gas is discharged from the gas supply port 21, the process reaction gas can be fully preheated in the heating tank 51 to avoid partial condensation of the process reaction gas; that is, the process reaction gas is heated in the reaction zone before entering the reaction zone. Further, the process reaction gas has a certain temperature before entering the reaction zone, which helps the process reaction gas and the quartz substrate tube 200 in the reaction zone to fully react, thereby improving the utilization rate of the raw materials and the deposition efficiency.

[0042] See also Figure 2 , Figure 3 and Figure 4 , Figure 3 yes Figure 1 Schematic diagram of the operation flow of the control device of the quartz substrate tube heating system; Figure 4 yes Figure 1 Schematic diagram of the structure of the heat radiation plate in the auxiliary heating device.

[0043] In one embodiment, the quartz substrate tube heating system 100 further includes an oxygen source 60, a hydrogen source 70, a temperature measuring device 80 and a control device 90; the oxygen source 60 and the hydrogen source 70 are respectively connected to the heating device 40; the control device 90 is respectively connected to the oxygen source 60, the hydrogen source 70 and the temperature measuring device 80 for communication, and the control device 90 can obtain the temperature of the heating part of the quartz substrate tube 200 according to the temperature measuring device 80, and control the oxygen flow rate provided by the oxygen source 60 to the heating device 40 and the hydrogen flow rate provided by the hydrogen source 70 to the heating device 40 in real time.

[0044] Specifically, the temperature measuring device 80 can detect the temperature of the reaction zone in real time, and the control device 90 controls the oxygen flow rate provided by the oxygen source 60 to the heating device 40 and the hydrogen flow rate provided by the hydrogen source 70 to the heating device 40 in real time according to the data of the temperature of the reaction zone obtained by the temperature measuring device 80. In this embodiment, the control device 90 includes a PLC (Programmable Logic Controller), and the control device 90 can set the required temperature of the reaction zone of the quartz substrate tube 200. The temperature measuring device 80 includes an infrared scanning thermometer, and the actual temperature of the reaction zone of the quartz substrate tube 200 is monitored in real time by the infrared scanning thermometer during the heating process. When the actual temperature of the reaction zone reaches the set temperature, the control device 90 controls the heating device 40 to maintain a stable hydrogen flow rate and oxygen flow rate; when the actual temperature of the reaction zone is lower than the set temperature, the control device 90 controls the heating device 40 to increase the hydrogen flow rate and oxygen flow rate; when the actual temperature of the reaction zone is higher than the set temperature, the control device 90 controls the heating device 40 to reduce the hydrogen flow rate and oxygen flow rate. The control device 90 controls the size of the oxyhydrogen flame in real time to prevent excessive temperature fluctuations in the reaction zone of the quartz substrate tube 200 during the heating process. This ensures the stability of the chemical reaction process when the quartz substrate tube 200 is heated, and further ensures the stability of the deposition process of the quartz substrate tube 200, so that the geometric uniformity and optical consistency of the optical fiber preform finally prepared are better.

[0045] See also Figure 1 , Figure 5 and Figure 6 , Figure 5 yes Figure 1 A schematic diagram of the structure of part A in the middle; Figure 6 yes Figure 1 Schematic diagram of the enlarged structure of part B.

[0046] In one embodiment, the quartz substrate tube heating system 100 further includes a water tank 110 and a connecting pipe assembly 120. The water tank 110 is connected to the oxygen gas source 60 and the hydrogen gas source 70 respectively. The water tank 110 is also used to connect to the cooling water source. The water tank 110 includes a water supply end 1101, a water return end 1102, an oxygen delivery end 1103 and a hydrogen delivery end 1104. The heating device 40 includes a blowtorch 41, and a water channel is provided in the blowtorch 41. The connecting pipe assembly 120 includes a first connecting pipe 1201, a second connecting pipe 1202, and a second connecting pipe 1203. The water supply end 1101 is connected to one end of the water channel through the first connecting pipe 1201, and the return water end 1102 is connected to the other end of the water channel through the second connecting pipe 1202; the blowtorch 41 includes an oxygen inlet end 413 and a hydrogen inlet end 414, the oxygen delivery end 1103 is connected to the oxygen inlet end 413 through the third connecting pipe 1203, and the hydrogen delivery end 1104 is connected to the hydrogen inlet end 414 through the fourth connecting pipe 1204.

[0047] Specifically, the water tank 110 is installed on one side of the rack 10, the oxygen source 60 can be an oxygen storage tank, the hydrogen source 70 can be a hydrogen storage tank, the cooling water source can be a cooling water tank, and the water tank 110 is connected to the corresponding oxygen source 60, hydrogen source 70 and cooling water source. In some embodiments, a plurality of independent chambers can be set in the water tank 110, such as an oxygen chamber, a hydrogen chamber and a cooling water chamber, etc.

[0048] In this embodiment, the blowtorch 41 further includes a water inlet 411 and a water outlet 412. The water inlet 411, the water outlet 412, the oxygen inlet 413 and the hydrogen inlet 414 are all located on the outer wall of the blowtorch 41. The water inlet 411 and the water outlet 412 are two ports of a waterway respectively. The water inlet 411 is connected to the water supply end 1101 through a first connecting pipe 1201; the water outlet 412 is connected to the return water end 1102 through a second connecting pipe 1202; that is, the water in the cooling water tank circulates along the path of the water supply end 1101, the first connecting pipe 1201, the water inlet 411, the waterway, the water outlet 412, the second connecting pipe 1202 and the return water end 1102 to cool the blowtorch 41. Through the circulating cooling water process, the blowtorch 41 is prevented from cracking due to thermal expansion during the heating process, and the service life of the blowtorch 41 can be improved.

[0049] The first connecting pipe 1201, the second connecting pipe 1202, the third connecting pipe 1203 and the fourth connecting pipe 1204 can be made of the same material. In this embodiment, the first connecting pipe 1201, the second connecting pipe 1202, the third connecting pipe 1203 and the fourth connecting pipe 1204 are all metal hoses, which are all fluororesin tubes, and the outer layer is wrapped with a metal braided mesh, so that the connecting pipe with a metal braided cladding is more suitable for high temperature environment.

[0050] In this embodiment, one end of the first connecting pipe 1201, the second connecting pipe 1202, the third connecting pipe 1203 and the fourth connecting pipe 1204 are all provided with a metal ferrule, and the water inlet end 411, the water outlet end 412, the oxygen inlet end 413 and the hydrogen inlet end 414 are respectively provided with a corresponding externally threaded metal ferrule joint, which are clamped together by the metal ferrule and the externally threaded metal ferrule joint to ensure the firmness and tightness of the connection.

[0051] See also Figure 7 , Figure 7 yes Figure 5 Schematic diagram of the matching structure of the medium quick-insert tube body female head and the quick-insert locking male head.

[0052] The other ends of the first connecting pipe 1201, the second connecting pipe 1202, the third connecting pipe 1203 and the fourth connecting pipe 1204 are each provided with a quick-insert locking male connector 1205, and the water supply end 1101, the return water end 1102, the oxygen delivery end 1103 and the hydrogen delivery end 1104 are each correspondingly provided with a quick-insert tube body female connector 1105, and the quick-insert locking male connector 1205 can be quickly locked with the quick-insert tube body female connector 1105. Specifically, the quick-insertion tube body female connector 1105 is roughly in the shape of a hollow cylinder, and includes an insertion port 11051 and a receiving cavity 11052. The insertion port 11051 is located at one end of the quick-insertion tube body female connector 1105 and is connected to the outside, and the other end of the insertion port 11051 is connected to the receiving cavity 11052. The quick-insertion locking male connector 1205 can be matched with the quick-insertion tube body female connector 1105 along the direction from the insertion port 11051 to the receiving cavity 11052. In addition, the quick-insertion tube body female connector 1105 also includes a clamping block 11053, which is located on the cavity wall of the receiving cavity 11052, and the clamping block 11053 is extended along the cavity wall of the receiving cavity 11052 to the axis of the receiving cavity 11052, that is, it is arranged along the radial direction of the quick-insertion tube body female connector 1105. The quick-insertion locking male connector 1205 comprises a tube body 12051, a deformation part 12052 and a pressing part 12053. The tube body 12051 is hollow, and a clamping groove 120511 is provided on the outer wall of the tube body 12051. The deformation part 12052 is sleeved on the circumferential outer wall of the tube body 12051. In this embodiment, the pressing part 12053 is sleeved outside the deformation part 12052. In the specific assembly process, the tube body 12051 is aligned with the insertion port 11051 and extends into the receiving cavity 11052 until the clamping block 11053 is received in the clamping groove 120511, thereby completing the locking fit between the quick-insertion tube body female connector 1105 and the quick-insertion locking male connector 1205.

[0053] See also Figure 1 and Figure 8 , Figure 8 yes Figure 1 Schematic diagram of the structure of the heat radiation plate in the auxiliary heating device.

[0054] In one embodiment, the auxiliary heating device 50 includes a heat radiating sheet 52, and a plurality of heat radiating sheets 52 are arranged on the groove wall of the heating groove 51. There is a gap between the heat radiating sheet 52 and the outer surface of the quartz substrate tube 200, and the plurality of heat radiating sheets 52 are circumferentially spaced apart along the central axis of the quartz substrate tube 200; the heat radiating sheet 52 includes an arc-shaped radiation surface 521, and the center of curvature of the arc-shaped radiation surface 521 is located on the central axis of the quartz substrate tube 200.

[0055] Specifically, the heat radiation sheet 52 heats the reaction zone of the quartz substrate tube 200 in a non-contact manner to prevent the reaction gas in the reaction zone of the quartz substrate tube 200 from condensing, which would cause the deposition process in the reaction zone of the quartz substrate tube 200 to be unstable.

[0056] In this embodiment, the heat radiation sheet 52 is made of ceramic material, for example, a ceramic sheet, but not limited thereto. The heat radiation sheet 52 is arranged in three groups, and the three groups of heat radiation sheets 52 are arranged in a C shape along the central axis of the quartz substrate tube 200. The three groups of heat radiation sheets 52 are arranged along the groove wall of the heating groove 51. The purpose of such arrangement is to facilitate the installation and removal of the quartz substrate tube 200. A heating wire 522 is embedded in the heat radiation sheet 52, and an electrical connection port 523 is provided on the heat radiation sheet 52. When the heat radiation sheet 52 is working, the electrical connection port 523 is connected to an external power supply, and the heating wire 522 is energized to heat up, and the arc-shaped radiation surface 521 heats the quartz substrate tube 200 accordingly. Since the center of curvature of the arc-shaped radiation surface 521 is located on the central axis of the quartz substrate tube 200, the heating effect of the arc-shaped radiation surface 521 on the quartz substrate tube 200 can be maintained, so that the temperature rise of the quartz substrate tube 200 is more balanced.

[0057] See also Figure 1 and Fig. 9 , Fig. 9 yes Figure 1 Schematic diagram of the structure of the auxiliary heating device.

[0058] In one embodiment, the auxiliary heating device 50 also includes a substrate 53, a shell assembly 54, a sliding rod 55, an elastic member 56 and an end plate 57. The substrate 53 is connected to the first chuck 20, one end of the sliding rod 55 is connected to the substrate 53, and the other end of the sliding rod 55 is connected to the end plate 57. The shell assembly 54 is sleeved on the sliding rod 55, one end of the elastic member 56 is connected to the end plate 57, and the other end of the elastic member 56 is connected to the shell assembly 54. The length direction of the elastic member 56 is consistent with the arrangement direction of the first chuck 20 and the second chuck 30, and the shell assembly 54 opens the heating groove 51.

[0059] Specifically, the housing assembly 54 includes a housing body 541, a vertical plate 542 and a bearing 543. The vertical plate 542 is mounted on the upper surface of the housing body 541. Two bearings 543 are horizontally mounted on the vertical plate 542. Two groups of corresponding slide bars 55 are also provided. The two slide bars 55 are respectively penetrated through the two bearings 543 and are slidably connected to the two bearings 543. The base plate 53 is mounted on the outer wall of the first chuck 20. One end of the slide bar 55 is connected to the base plate 53, and the other end of the slide bar 55 is fixedly connected to the end plate 57. One end of the elastic member 56 is connected to the vertical plate 542, and the other end of the elastic member 56 is connected to the end plate 57. The heating tank 51 is opened in the housing body 541.

[0060] When the housing body 541 moves toward the first chuck 20, the vertical plate 542 slides along the slide bar 55 toward the first chuck 20, and the elastic member 56 is stretched. When the housing body 541 moves toward the second chuck 30, the vertical plate 542 slides along the slide bar 55 toward the second chuck 30, and the elastic member 56 is compressed. The purpose of this arrangement is to improve the coverage of the heating slot 51 by realizing the movement of the auxiliary heating device 50.

[0061] See also Figure 1 In one embodiment, the quartz substrate tube heating system 100 further includes a moving device 130, which is located between the first chuck 20 and the second chuck 30. The moving device 130 is slidably connected to the frame 10, and the heating device 40 is connected to the moving device 130 so that the heating device 40 can move back and forth between the first chuck 20 and the second chuck 30.

[0062] Specifically, the moving device 130 includes a supporting platform 1301 and a driving source (not shown in the figure), the supporting platform 1301 is slidably connected to the frame 10, the supporting platform 1301 is transmission-connected to the driving source, the driving source can drive the supporting platform 1301 to move back and forth between the first chuck 20 and the second chuck 30, and the heating device 40 is connected to the supporting platform 1301; the heating position of the heating device 40 on the quartz substrate 200 can be changed by changing the position of the supporting platform 1301.

[0063] In order to more accurately control the position of the heating device 40 , a stepping motor may be preferably used as a driving source.

[0064] See also Figure 1 , Figure 6 and Fig. 9 In one embodiment, the moving device 130 includes a carrier platform 1301, which is slidably connected to the frame 10. The heating device 40 also includes a bracket 42 and a blowtorch 41, and the bracket 42 is connected between the carrier platform 1301 and the blowtorch 41; the auxiliary heating device 50 also includes a sliding frame 58, which is located between the first chuck 20 and the carrier platform 1301, one end of the sliding frame 58 is connected to the shell assembly 54, and the other end of the sliding frame 58 is slidably connected to the frame 10; the bracket 42 includes a baffle 421, which is located on the side of the bracket 42 facing the sliding frame 58; when the carrier platform 1301 drives the bracket 42 to slide toward the sliding frame 58, the sliding frame 58 can be against the baffle 421.

[0065] Specifically, the support platform 1301 drives the bracket 42 to slide toward the sliding frame 58, and the sliding frame 59 abuts against the baffle 421 to prevent the shell body 541 from touching the blowtorch 41 and causing damage to the blowtorch 41.

[0066] In one embodiment, the sliding frame 58 includes a pulley 581, a support rod 582 and an abutment rod 583, the pulley 581 is slidably connected to the frame 10, one end of the support rod 582 is connected to the pulley 581, the other end of the support rod 582 is connected to the shell assembly 54, one end of the abutment rod 583 is connected to the support rod 582, the other end of the abutment rod 583 faces the blowtorch 41, the length direction of the abutment rod 583 is consistent with the direction from the first chuck 20 to the second chuck 30, and when the baffle 421 moves toward the sliding frame 58, one end of the abutment rod 583 can abut against the baffle 421.

[0067] Specifically, the support rod 582 is placed vertically, and a fixing clip 584 is provided on the top of the support rod 582, and the fixing clip 584 is connected to the shell body 541, so that the support rod 582 supports the auxiliary heating device 50 in the vertical direction, and prevents the auxiliary heating device 50 from sagging and causing the heat radiation plate 52 to collide with the quartz substrate tube 200, thereby avoiding damage to the quartz substrate tube 200. The abutment rod 583 is arranged in the horizontal direction, and when the blowtorch 41 and the bracket 42 move toward the first chuck 20 under the action of the support platform 1301, the baffle 421 will abut against one end of the abutment rod 583, and the purpose of such arrangement is to avoid the shell body 541 and the blowtorch 41 from touching each other and causing damage to the blowtorch 41. In some other embodiments, the abutment rod 583 can also be adaptively arranged according to actual conditions, for example: the abutment rod 583 is arranged at an angle.

[0068] See also Figure 1 and Fig.10 , Fig.10 yes Fig. 9 Schematic diagram of the structure of the fire baffle in the auxiliary heating device.

[0069] In one embodiment, the auxiliary heating device 50 also includes a fire baffle 59, which is connected to the shell assembly 54. The fire baffle 59 is located on the side of the heating groove 51 facing the blowtorch 41. The fire baffle 59 includes a through hole 591, and the heating groove 51 and the through hole 591 are connected.

[0070] Specifically, the fire baffle 59 is connected to the shell body 541, and the fire baffle 59 is located between the shell body 541 and the blowtorch 41. The heating groove 51 is opened in the shell body 541, and the through hole 591 is opened on the fire baffle 59; the quartz substrate tube 200 passes through the heating groove 51 and the through hole 591 in sequence, and the fire baffle 59 can prevent the flame of the blowtorch 41 from burning into the auxiliary heating device 50. Moreover, in some embodiments, the notch of the heating groove 51 and the through hole 591 are both approximately semicircular openings, and the radius of the notch of the heating groove 51 can be greater than the radius of the through hole 591; it can be further understood that the straight-line distance from the central axis of the quartz substrate tube 200 to the groove wall of the heating groove 51 is greater than the straight-line distance from the central axis of the quartz substrate tube 200 to the hole wall of the through hole 591.

[0071] In this embodiment, the fire baffle 59 is fixedly connected to the shell body 541 by screws. Specifically, the fire baffle 59 includes a heat insulation part 592 and a mounting part 593. The mounting part 593 is connected to the heat insulation part 592, and the mounting part 593 is located on the side of the heat insulation part 592 facing the shell body 541. The mounting part 593 and the heat insulation part 592 are both plate-shaped. The mounting part 593 is placed horizontally, and the heat insulation part 592 is placed vertically. The through hole 591 is opened on the heat insulation part 592; the mounting part 593 is opened with a locking hole 5931, and the screw passes through the locking hole 5931 to lock the mounting part 593 and the shell body 541 together, so that the fire baffle 59 is connected to the shell body 541. Moreover, the locking hole 5931 is a waist-shaped hole. The purpose of such a setting is to simply adjust the distance between the heat insulation part 592 and the shell body 541, so as to further ensure that the flame of the blowtorch 41 can be blocked by the heat insulation part 592.

[0072] See also Fig.11 , Fig.11 yes Figure 1 Schematic diagram of the structure of the blowtorch in the heating device.

[0073] In one embodiment, the blowtorch 41 includes an arcuate surface 415 , the center of curvature of the arcuate surface 415 is located on the axis of the quartz substrate tube 200 , and the arcuate surface 415 is provided with a plurality of narrow and long heating ports, which are distributed on the arcuate surface 415 in a circular array around the axis of the quartz substrate tube 200 .

[0074] Specifically, the blowtorch 41 is an annular blowtorch 41, and the blowtorch 41 is roughly in the shape of a semicircular ring (and a major arc ring), so as to facilitate the removal of the quartz substrate tube 200 after heating. A plurality of narrow and long heating ports are distributed in a circular array on the arc surface 415 around the axis of the quartz substrate tube 200, and the purpose of such arrangement is to facilitate the heat concentration of the plurality of narrow and long heating ports and reduce the heat loss during the heating process of the blowtorch 41.

[0075] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Under the idea of ​​the present invention, the technical features in the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other changes in different aspects of the present invention as described above, which are not provided in detail for the sake of simplicity. Although the present invention is described in detail with reference to the aforementioned embodiments, ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. These modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the various embodiments of the present invention.

[0076] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Under the idea of ​​the present invention, the technical features in the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other changes in different aspects of the present invention as described above, which are not provided in detail for the sake of simplicity. Although the present invention is described in detail with reference to the aforementioned embodiments, ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. These modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A quartz substrate tube heating system, characterized in that: include: frame; A first chuck, the first chuck is connected to the frame, and the first chuck includes an air supply port; a second chuck, the second chuck is connected to the frame, the second chuck comprises an air outlet port, the air outlet port faces the air supply port, the first chuck and the second chuck are used to clamp opposite ends of the quartz substrate tube respectively, and the first chuck and the second chuck can rotate synchronously to drive the quartz substrate tube to rotate; A heating device, the heating device is connected to the frame; The auxiliary heating device is connected to the first chuck, the auxiliary heating device is located between the heating device and the first chuck, and the auxiliary heating device includes a heating tank for accommodating the quartz substrate tube.

2. The quartz substrate tube heating system according to claim 1, characterized in that: It also includes an oxygen source, a hydrogen source, a temperature measuring device and a control device; the oxygen source and the hydrogen source are respectively connected to the heating device; the control device is respectively connected to the oxygen source, the hydrogen source and the temperature measuring device for communication, and the control device can obtain the temperature of the heating part of the quartz substrate tube according to the temperature measuring device, and control the oxygen flow rate provided by the oxygen source to the heating device and the hydrogen flow rate provided by the hydrogen source to the heating device in real time.

3. The quartz substrate tube heating system according to claim 2, characterized in that: It also includes a water gas box and a connecting pipe assembly, the water gas box is connected to the oxygen gas source and the hydrogen gas source respectively, and the water gas box is also used to connect to a cooling water source; the water gas box includes a water supply end, a water return end, an oxygen delivery end and a hydrogen delivery end, the heating device includes a blowtorch, and a water channel is provided in the blowtorch; the connecting pipe assembly includes a first connecting pipe, a second connecting pipe, a third connecting pipe and a fourth connecting pipe, the water supply end is connected to one end of the water channel through the first connecting pipe, and the water return end is connected to the other end of the water channel through the second connecting pipe; the blowtorch includes an oxygen inlet end and a hydrogen inlet end, the oxygen delivery end is connected to the oxygen inlet end through the third connecting pipe, and the hydrogen delivery end is connected to the hydrogen inlet end through the fourth connecting pipe.

4. The quartz substrate tube heating system according to claim 1, characterized in that: The auxiliary heating device includes a heat radiation plate, a plurality of the heat radiation plates are arranged on the groove wall of the heating groove, a distance is provided between the heat radiation plate and the outer surface of the quartz substrate tube, and the plurality of the heat radiation plates are circumferentially spaced and distributed along the central axis of the quartz substrate tube; the heat radiation plate includes an arc-shaped radiation surface, and the curvature center of the arc-shaped radiation surface is located on the central axis of the quartz substrate tube.

5. The quartz substrate tube heating system according to claim 3, characterized in that: The auxiliary heating device also includes a substrate, a shell assembly, a sliding rod, an elastic member and an end plate. The substrate is connected to the first chuck, one end of the sliding rod is connected to the substrate, and the other end of the sliding rod is connected to the end plate. The shell assembly is sleeved on the sliding rod, one end of the elastic member is connected to the end plate, and the other end of the elastic member is connected to the shell assembly. The length direction of the elastic member is consistent with the arrangement direction of the first chuck and the second chuck, and the shell assembly has the heating groove.

6. The quartz substrate tube heating system according to claim 5, characterized in that: It also includes a moving device, which is located between the first chuck and the second chuck, and is slidably connected to the frame. The blowtorch is connected to the moving device so that the heating device can move back and forth between the first chuck and the second chuck.

7. The quartz substrate tube heating system according to claim 6, characterized in that: The moving device includes a carrying platform, which is slidably connected to the frame. The heating device also includes a bracket, which is connected between the carrying platform and the blowtorch. The auxiliary heating device also includes a sliding frame, which is located between the first chuck and the carrying platform, one end of the sliding frame is connected to the shell assembly, and the other end of the sliding frame is slidably connected to the frame. The bracket includes a baffle, which is located on the side of the bracket facing the sliding frame. When the carrying platform drives the bracket to slide toward the sliding frame, the sliding frame can be against the baffle.

8. The quartz substrate tube heating system according to claim 7, characterized in that: The sliding frame includes a pulley, a support rod and an abutment rod, the pulley is slidably connected to the frame, one end of the support rod is connected to the pulley, the other end of the support rod is connected to the shell assembly, one end of the abutment rod is connected to the support rod, and the other end of the abutment rod faces the blowtorch, the length direction of the abutment rod is consistent with the direction from the first chuck to the second chuck, and when the baffle moves toward the sliding frame, one end of the abutment rod can abut against the baffle.

9. The quartz substrate tube heating system according to claim 5, characterized in that: The auxiliary heating device also includes a fire baffle, which is connected to the shell assembly and located on the side of the heating groove facing the blowtorch. The fire baffle includes a through hole, and the heating groove and the through hole are connected.

10. The quartz substrate tube heating system according to any one of claims 5 to 9, characterized in that: The blowtorch comprises an arc surface, the center of curvature of the arc surface is located on the axis of the quartz substrate tube, the arc surface is provided with a plurality of narrow and long heating ports, and the plurality of narrow and long heating ports are distributed on the arc surface in a circular array around the axis of the quartz substrate tube.

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