Vacuum coating device

Abstract

The utility model discloses a vacuum coating device, and relates to the technical field of vacuum coating, the vacuum coating device comprises a cavity used for vacuum coating, the cavity comprises a blocking side wall, a first side wall, a second side wall and a bottom wall, the bottom of the blocking side wall, the bottom of the first side wall and the bottom of the second side wall are connected with the bottom wall, two sides of the blocking side wall are respectively connected with the first side wall and the second side wall; an exhaust port is formed in the position, above the blocking side wall, of the cavity, and the exhaust port is communicated with the interior of the cavity; the cold trap assembly is located in the cavity, the cold trap assembly faces the blocking side wall, the bottom of the cold trap assembly is fixedly connected with the bottom wall, and the two sides of the cold trap assembly are connected with the first side wall and the second side wall respectively. According to the vacuum coating device, the heat exchange area can be increased, water vapor in the cavity can be adsorbed, and the exhaust efficiency can be improved.

Description

Technical Field

[0001] The present invention relates to the field of vacuum coating technology, and in particular to a vacuum coating device. Background Art

[0002] In the process of obtaining high vacuum, a cold trap is usually needed to capture water vapor or oil vapor in the cavity. A cold trap is a device that prevents vapor or liquid from entering the measuring instrument from the system, or from the measuring instrument into the system. It can provide a very low temperature surface on which molecules can condense and can increase the vacuum degree by one to two orders of magnitude. The cold trap is usually placed between the vacuum chamber and the vacuum pump.

[0003] In order to solve a series of problems caused by the cold trap installation method in the prior art, the patent with application number CN202211114381.7 provides a vacuum mechanism for vacuum coating equipment and vacuum coating equipment, which is provided with a receiving chamber for accommodating the cold trap body, and the upstream of the receiving chamber is connected to the vacuum chamber through a connecting channel, and the receiving chamber is also connected to a pump assembly, which can evacuate the vacuum chamber. This structure can save space in the vacuum chamber, avoid contamination of the cold trap body, reduce energy loss, and does not occupy the exhaust channel.

[0004] However, in this structure, although the cold trap does not occupy the exhaust channel, part of the wall of the vacuum chamber is located below the exhaust channel. This part of the wall will hinder the discharge of water vapor in the chamber, which will have a certain impact on the exhaust efficiency. Utility Model Content

[0005] In view of the deficiencies in the prior art, one purpose of this specification is to provide a vacuum coating device that can increase the heat exchange area, adsorb water vapor in the cavity, and improve the exhaust efficiency.

[0006] To achieve the above-mentioned purpose, the embodiment of this specification provides a vacuum coating device, comprising:

[0007] A cavity for vacuum coating, the cavity comprising a blocking side wall, a first side wall, a second side wall and a bottom wall, the bottoms of the blocking side wall, the first side wall and the second side wall are connected to the bottom wall, and the two sides of the blocking side wall are connected to the first side wall and the second side wall respectively; the cavity forms an exhaust port above the blocking side wall, and the exhaust port is connected to the inside of the cavity;

[0008] A cold trap assembly is located in the cavity, the cold trap assembly is arranged facing the blocking side wall, the bottom of the cold trap assembly is fixedly connected to the bottom wall, and the two sides of the cold trap assembly are respectively connected to the first side wall and the second side wall.

[0009] As a preferred implementation, the height of the cold trap assembly is equal to the height of the blocking side wall.

[0010] As a preferred embodiment, the cold trap assembly, the blocking side wall, the first side wall and the second side wall are all arranged vertically, and the bottom wall is arranged horizontally.

[0011] As a preferred embodiment, the cold trap assembly includes a cold trap plate and a cold trap pipeline, the cold trap pipeline is fixedly arranged on the cold trap plate, and the cold trap plate is fixedly connected to the first side wall, the second side wall and the bottom wall respectively.

[0012] As a preferred implementation manner, the cold trap pipeline and the cold trap plate are fixed by brazing.

[0013] As a preferred embodiment, the cold trap plate is provided with a plurality of installation grooves for installing the cold trap pipeline, the cold trap pipeline is arranged on one side of the cold trap plate, and the welding point between the cold trap plate and the cold trap pipeline is located on the other side of the cold trap plate.

[0014] As a preferred embodiment, a plurality of bottom fixing columns for connecting to the bottom wall are provided at the bottom of the cold well plate, and a side fixing column for connecting to the first side wall or the second side wall is provided at the side of the cold well plate.

[0015] As a preferred implementation, the bottom fixing column is connected to the bottom wall via a fastening screw and a heat insulating gasket.

[0016] As a preferred implementation manner, the side fixing column is connected to the first side wall or the second side wall through a fastening screw and a heat insulating gasket.

[0017] As a preferred implementation, an adjusting nut is fixed on the side fixing column, and the adjusting nut is rotated to adjust the gap between the cold trap assembly and the first side wall or the second side wall.

[0018] Beneficial effects:

[0019] The vacuum coating device provided in this embodiment is provided with a blocking side wall below the exhaust port, and the blocking side wall can facilitate the subsequent setting of a receiving chamber, and the receiving chamber is used to accommodate the cold trap body that does not occupy the exhaust channel. The present application provides a cold trap assembly facing the blocking side wall, and the cold trap assembly is located in the cavity and is respectively connected to the bottom wall, the first side wall and the second side wall of the cavity, so as to increase the heat exchange area, adsorb water vapor in the cavity, and improve the exhaust efficiency.

[0020] With reference to the following description and the accompanying drawings, specific embodiments of the present invention are disclosed in detail, indicating the manner in which the principles of the present invention can be adopted. It should be understood that the embodiments of the present invention are not limited in scope.

[0021] Features described and / or illustrated with respect to one embodiment may be used in the same or similar manner in one or more other embodiments, combined with features in other embodiments, or substituted for features in other embodiments.

[0022] It should be emphasized that the term “include / comprises” when used herein refers to the presence of features, integers, steps or components, but does not exclude the presence or addition of one or more other features, integers, steps or components. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the utility model. For those skilled in the art, other drawings can be obtained based on these drawings without paying creative labor.

[0024] Figure 1 A schematic structural diagram of a vacuum coating device provided in this embodiment;

[0025] Figure 2 for Figure 1 A schematic diagram of the structure from another perspective after removing the blocking side wall;

[0026] Figure 3 for Figure 2 A front view of

[0027] Figure 4 This is a schematic structural diagram of a cold trap assembly provided in this embodiment;

[0028] Figure 5 This is a schematic structural diagram of a cold trap plate provided in this embodiment;

[0029] Figure 6 A side view of a cold trap assembly provided in this embodiment;

[0030] Figure 7 A schematic diagram of a connection structure on a cold trap plate provided in this embodiment;

[0031] Figure 8 Schematic diagram of the structure of another vacuum coating device provided in this embodiment.

[0032] Description of reference numerals:

[0033] 1. Cavity; 11. Blocking side wall; 12. First side wall; 13. Second side wall; 14. Bottom wall; 15. Exhaust port; 2. Cold trap assembly; 21. Cold trap plate; 211. Mounting groove; 212. Bottom fixing column; 213. Side fixing column; 22. Cold trap pipeline; 23. Fastening screws; 24. Insulation gasket; 25. Adjusting nut; 26. Weld; 3. Cold trap body; 4. Accommodating chamber. DETAILED DESCRIPTION

[0034] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0035] It should be noted that when an element is referred to as being "disposed on" another element, it may be directly on the other element or there may be another element centered thereon. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be another element centered thereon at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only and do not represent the only implementation method.

[0036] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art in the technical field of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items.

[0037] See also Figures 1 to 8 The embodiment of the present application provides a vacuum coating device, including a cavity 1 and a cold trap assembly 2 .

[0038] The cavity 1 is used for vacuum coating. Figure 1As shown, the cavity 1 includes a blocking side wall 11, a first side wall 12, a second side wall 13 and a bottom wall 14. The bottoms of the blocking side wall 11, the first side wall 12 and the second side wall 13 are connected to the bottom wall 14, and the two sides of the blocking side wall 11 are respectively connected to the first side wall 12 and the second side wall 13. The cavity 1 forms an exhaust port 15 above the blocking side wall 11, and the exhaust port 15 is connected to the inside of the cavity 1. The cold trap assembly 2 is located in the cavity 1, and the cold trap assembly 2 is arranged facing the blocking side wall 11. The bottom of the cold trap assembly 2 is fixedly connected to the bottom wall 14, and the two sides of the cold trap assembly 2 are respectively connected to the first side wall 12 and the second side wall 13.

[0039] The vacuum coating device provided in this embodiment is provided with a blocking side wall 11 below the exhaust port 15. The blocking side wall 11 can facilitate the subsequent setting of the accommodating chamber 4, which is used to accommodate the cold trap body 3 that does not occupy the exhaust channel. Figure 8 The present application sets a cold trap assembly 2 facing the blocking side wall 11, and the cold trap assembly 2 is located in the cavity 1 and is respectively connected to the bottom wall 14, the first side wall 12 and the second side wall 13 of the cavity 1, which can increase the heat exchange area, adsorb water vapor in the cavity 1, and improve the exhaust efficiency.

[0040] In a preferred embodiment, the height of the cold trap assembly 2 is equal to the height of the blocking side wall 11, so as not to affect the exhaust effect of the exhaust port 15, and can adsorb water vapor near the blocking side wall 11. The cold trap assembly 2 is arranged close to the blocking side wall 11 and maintains a predetermined distance from the blocking side wall 11, so as to ensure the adsorption effect of the cold trap assembly 2 without significantly affecting the temperature of the blocking side wall 11.

[0041] In this embodiment, if Figure 1 , Figure 2 and Figure 3 As shown, the cold trap assembly 2, the blocking side wall 11, the first side wall 12 and the second side wall 13 are all arranged vertically, and the bottom wall 14 is arranged horizontally. The cold trap assembly 2 and the blocking side wall 11 are located between the first side wall 12 and the second side wall 13, and the exhaust port 15 and the blocking side wall 11 are located on the same side of the cavity 1, and the direction of the exhaust port 15 and the blocking side wall 11 is the exhaust direction of the cavity 1. The water vapor discharged from the exhaust port 15 is adsorbed by the subsequent cold trap body 3, and the water vapor intercepted by the blocking side wall 11 in the cavity 1 is adsorbed by the cold trap assembly 2 provided in the embodiment of the present application, so that the vacuum coating device provided by the present application has a higher exhaust efficiency.

[0042] like Figure 4As shown, the cold trap assembly 2 includes a cold trap plate 21 and a cold trap pipeline 22, and the cold trap pipeline 22 is fixedly arranged on the cold trap plate 21. The cold trap plate 21 is fixedly connected to the first side wall 12, the second side wall 13, and the bottom wall 14, respectively, so as to realize the installation of the cold trap assembly 2. The cold trap plate 21 can not only support the cold trap pipeline 22, but also increase the heat exchange area, thereby improving the water vapor adsorption effect.

[0043] In this embodiment, the cold trap pipe 22 and the cold trap plate 21 are fixed by brazing, which can ensure the reliable connection between the cold trap pipe 22 and the cold trap plate 21. In order to increase the length of the cold trap pipe 22, the distance between adjacent cold trap pipes 22 is small. If welding is performed from the front, the stacking material needs to be high, which is costly. Figure 5 and Figure 6 As shown, a plurality of mounting grooves 211 for mounting the cold trap pipeline 22 are provided on the cold trap plate 21. The cold trap pipeline 22 is arranged on one side of the cold trap plate 21. The welding point between the cold trap plate 21 and the cold trap pipeline 22 is located on the other side of the cold trap plate 21. That is, after the cold trap plate 21 is grooved, the cold trap pipeline 22 and the cold trap plate 21 are welded together from the back side. The weld 26 is as shown in FIG. Figure 6 As shown, the operation is simple and the cost is low.

[0044] like Figure 7 As shown, the bottom of the cold trap plate 21 is provided with a plurality of bottom fixing columns 212 for connecting with the bottom wall 14, and the side of the cold trap plate 21 is provided with side fixing columns 213 for connecting with the first side wall 12 or the second side wall 13. The side fixing columns 213 and the bottom fixing columns 212 are fixed on the cavity 1.

[0045] In order to achieve connection and insulation between the cold trap assembly 2 and the wall of the cavity 1, the bottom fixing column 212 is connected to the bottom wall 14 through fastening screws 23 and insulation washers 24, and the side fixing column 213 is connected to the first side wall 12 or the second side wall 13 through fastening screws 23 and insulation washers 24.

[0046] In a preferred embodiment, an adjusting nut 25 is fixed on the side fixing column 213. Rotating the adjusting nut 25 can adjust the gap between the cold trap assembly 2 and the adjusting nut 25, thereby adjusting the gap between the cold trap assembly 2 and the first side wall 12 or the second side wall 13 to adapt to the installation. When the distance between the first side wall 12 and the second side wall 13 is different from the size of the cold trap assembly 2, the cold trap assembly 2 can be adapted to the installation by rotating the adjusting nut 25.

[0047] Specifically, one end of the bottom fixing column 212 ( Figure 7 The upper end in the middle is an external thread for connecting with the fastening screw 23. Both ends of the side fixing column 213 are external threads, the inner end is used to connect with the fastening screw 23, and the outer end is used to connect with the adjusting nut 25.

[0048] The vacuum coating device provided in the embodiment of the present application may have a coating frame for supporting a substrate, an evaporation coating mechanism, a sputtering coating mechanism and other structures in its cavity 1. These structures may select any suitable existing structures, and the present application will not elaborate on them here.

[0049] It should be noted that, in the description of this specification, the terms "first", "second", etc. are only used for descriptive purposes and to distinguish similar objects. There is no order of precedence between the two, and they cannot be understood as indicating or implying relative importance. In addition, in the description of this specification, unless otherwise specified, the meaning of "plurality" is two or more.

[0050] Any numerical value cited herein includes all values ​​of lower and upper values ​​that increase by one unit from the lower limit to the upper limit, and there is at least a two-unit interval between any lower value and any higher value. For example, if the value of the quantity of a component or a process variable (such as temperature, pressure, time, etc.) is stated to be from 1 to 90, preferably from 20 to 80, and more preferably from 30 to 70, the purpose is to illustrate that values ​​such as 15 to 85, 22 to 68, 43 to 51, 30 to 32 are also explicitly listed in the specification. For values ​​less than 1, one unit is appropriately considered to be 0.0001, 0.001, 0.01, 0.1. These are merely examples that are intended to be clearly expressed, and it can be considered that all possible combinations of numerical values ​​listed between the lowest value and the highest value are clearly stated in the specification in a similar manner.

[0051] Unless otherwise indicated, all ranges include the endpoints and all numbers between the endpoints. "About" or "approximately" used with a range applies to both endpoints of the range. Thus, "about 20 to 30" is intended to cover "about 20 to about 30", including at least the specified endpoints.

[0052] All articles and references disclosed, including patent applications and publications, are incorporated herein by reference for all purposes. The term "consisting essentially of..." to describe a combination should include the identified elements, ingredients, parts or steps and other elements, ingredients, parts or steps that do not substantially affect the basic novel characteristics of the combination. The use of the terms "comprising" or "including" to describe a combination of elements, ingredients, parts or steps herein also contemplates embodiments that consist essentially of these elements, ingredients, parts or steps. By using the term "may", it is intended to indicate that any attribute described that "may" include is optional.

[0053] Multiple elements, ingredients, parts or steps can be provided by a single integrated element, ingredient, part or step. Alternatively, a single integrated element, ingredient, part or step can be divided into separate multiple elements, ingredients, parts or steps. The disclosure "one" or "an" used to describe an element, ingredient, part or step is not intended to exclude other elements, ingredients, parts or steps.

[0054] It should be understood that the above description is for illustration and not for limitation. By reading the above description, many embodiments and many applications beyond the examples provided will be apparent to those skilled in the art. Therefore, the scope of the present teachings should not be determined with reference to the above description, but should be determined with reference to the appended claims and the full scope of equivalents possessed by these claims. For the purpose of comprehensiveness, all articles and references, including the disclosures of patent applications and announcements, are incorporated herein by reference. The omission of any aspect of the subject matter disclosed herein in the preceding claims is not intended to abandon the subject matter, nor should it be considered that the inventor has not considered the subject matter as part of the disclosed utility model subject matter.

Claims

1. A vacuum coating device, characterized in that: include: A cavity for vacuum coating, the cavity comprising a blocking side wall, a first side wall, a second side wall and a bottom wall, the bottoms of the blocking side wall, the first side wall and the second side wall are connected to the bottom wall, and the two sides of the blocking side wall are connected to the first side wall and the second side wall respectively; the cavity forms an exhaust port above the blocking side wall, and the exhaust port is connected to the inside of the cavity; A cold trap assembly is located in the cavity, the cold trap assembly is arranged facing the blocking side wall, the bottom of the cold trap assembly is fixedly connected to the bottom wall, and the two sides of the cold trap assembly are respectively connected to the first side wall and the second side wall.

2. The vacuum coating device according to claim 1, characterized in that: The height of the cold trap assembly is equal to the height of the blocking side wall.

3. The vacuum coating device according to claim 1, characterized in that: The cold trap assembly, the blocking side wall, the first side wall and the second side wall are all arranged vertically, and the bottom wall is arranged horizontally.

4. The vacuum coating device according to claim 1, characterized in that: The cold trap assembly comprises a cold trap plate and a cold trap pipeline. The cold trap pipeline is fixedly arranged on the cold trap plate. The cold trap plate is fixedly connected to the first side wall, the second side wall and the bottom wall respectively.

5. The vacuum coating device according to claim 4, characterized in that: The cold trap pipeline and the cold trap plate are fixed by brazing.

6. The vacuum coating device according to claim 5, characterized in that: The cold trap plate is provided with a plurality of installation grooves for installing the cold trap pipeline. The cold trap pipeline is arranged on one side of the cold trap plate, and the welding point between the cold trap plate and the cold trap pipeline is located on the other side of the cold trap plate.

7. The vacuum coating device according to claim 4, characterized in that: The bottom of the cold well plate is provided with a plurality of bottom fixing columns for connecting with the bottom wall, and the side of the cold well plate is provided with a side fixing column for connecting with the first side wall or the second side wall.

8. The vacuum coating device according to claim 7, characterized in that: The bottom fixing column is connected to the bottom wall through a fastening screw and a heat insulating gasket.

9. The vacuum coating device according to claim 7, characterized in that: The side fixing column is connected to the first side wall or the second side wall through a fastening screw and a heat insulation gasket.

10. The vacuum coating device according to claim 9, characterized in that: An adjusting nut is fixed on the side fixing column, and rotating the adjusting nut is used to adjust the gap between the cold trap assembly and the first side wall or the second side wall.

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