Target material structure with prolonged service life

Abstract

The utility model discloses a target material structure capable of prolonging the service life, which comprises a target material and a back plate, and the sputtering end of the target material is provided with a first sputtering area, a second sputtering area and a third sputtering area; the first sputtering area is arranged in the middle of the upper end of the target material; the cross section of the first sputtering area is in an inwards-sunken circular arc shape; the third sputtering area is arranged at the edge position of the upper end of the target material; the third sputtering region is a diagonal plane; the second sputtering region is arranged between the first sputtering region and the third sputtering region; and the cross section of the second sputtering region is in a transverse S shape. The connecting part is arranged on the side face of the target material and fixedly connected with the back plate through the screw rod, and the sealing structure is arranged between the target material and the back plate, so that the sealing effect is improved while the connecting strength of the target material and the back plate is guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of target material structures, in particular to a target material structure with increased service life. Background Art

[0002] During the sputtering process, the target assembly, as the cathode, should first have excellent electrical conductivity. At the same time, in order to discharge the heat generated by high-energy ions bombarding the target surface at high speed, the target assembly must also have excellent thermal conductivity. Therefore, the connection between the target and the back plate must have a certain bonding strength to avoid the sputtering target from falling off and cracking during operation, and must have high thermal conductivity and electrical conductivity. The connection between the target and the back plate needs to be tightly fitted at the joint to prevent air circulation, that is, most of them are welded connections, which are highly sealed to humans but cannot be disassembled after welding. When the target needs to be replaced, it needs to be dismantled and replaced as a whole, which will cause material waste. Utility Model Content

[0003] The utility model aims to solve the problems in the prior art and proposes a target material structure with increased service life.

[0004] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0005] A target material structure with increased service life comprises a target material and a back plate, wherein the sputtering end of the target material is provided with a first sputtering zone, a second sputtering zone and a third sputtering zone; the first sputtering zone is provided at the middle position of the upper end of the target material; and the cross section of the first sputtering zone is an inwardly concave arc; the third sputtering zone is provided at the edge position of the upper end of the target material; and the third sputtering zone is a beveled surface; the second sputtering zone is provided between the first sputtering zone and the third sputtering zone; and the cross section of the second sputtering zone is a transversely arranged S-shape; a connecting part is also connected to the outer side of the target material; the connecting part and the back plate are provided with interconnected threaded holes; the connecting part and the back plate are fixedly connected through the threaded holes; and a sealing mechanism is also connected between the connecting part and the back plate.

[0006] Preferably, the sealing mechanism comprises a sealing groove; the sealing groove is arranged at the connecting end of the connecting part and the back plate; and a sealing strip is connected in the sealing groove.

[0007] Preferably, a plurality of sealing grooves are provided, and the plurality of sealing grooves are evenly arranged on both sides of the threaded hole.

[0008] Preferably, the height between the lowest end and the highest end of the first sputtering zone is less than 5% of the total height of the target material.

[0009] Preferably, the slope area of ​​the third sputtering zone is less than 10% of the total sputtering surface area.

[0010] Preferably, the lower end of the target material is connected with a plug-in end; and the back plate is provided with a plug-in slot matching the plug-in end.

[0011] Preferably, a groove is provided at the lower end of the plug-in end; the cross section of the groove is trapezoidal; the side surface of the plug-in end is an arc surface; and the lower end of the arc surface is recessed inwards.

[0012] Compared with the prior art, the utility model provides a target material structure with increased service life, which has the following beneficial effects:

[0013] The target material structure with increased service life has a plug-in end provided at the lower end of the target material, which is fitted with the upper end of the back plate in a plug-in manner, thereby squeezing the air between the target material and the back plate for a tight fit, and a connecting portion is provided on the side of the target material, which is fixedly connected to the back plate by a screw, and a sealing structure is provided between the target material and the back plate to ensure the connection strength between the target material and the back plate while increasing the sealing effect; and at the same time, a plurality of sputtering regions are provided at the upper end of the target material to increase the surface area of ​​the sputtering surface, which is beneficial to the uniform consumption of the target material during the sputtering process, improves the film forming quality of the target material, and extends the service life.

[0014] The parts not involved in the device are the same as the existing technology or can be implemented by using the existing technology. The utility model has a simple structure and is easy to operate. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a structural schematic diagram of the utility model;

[0016] Figure 2 For this utility model Figure 1 The structural diagram at A in the middle;

[0017] Figure 3 It is a schematic diagram of the structure of the target material in the utility model;

[0018] Figure 4 It is a structural schematic diagram of the back plate in the utility model.

[0019] In the figure: 10, target material; 11, first sputtering zone; 12, second sputtering zone; 13, third sputtering zone; 20, back plate; 21, plug-in slot; 30, connecting part; 31, threaded hole; 40, sealing mechanism; 41, sealing slot; 42, sealing strip; 50, plug-in end; 51, groove; 52, arc surface. DETAILED DESCRIPTION

[0020] The following will refer to Figure 1-4, a specific implementation method of the target structure for increasing the service life in the utility model is introduced, including a target 10 and a backing plate 20, the sputtering end of the target 10 is provided with a first sputtering zone 11, a second sputtering zone 12 and a third sputtering zone 13; the first sputtering zone 11 is arranged at the middle position of the upper end of the target 10; and the cross-section of the first sputtering zone 11 is an inwardly concave arc; the third sputtering zone 13 is arranged at the edge position of the upper end of the target 10; and the third sputtering zone 13 is a beveled surface; the second sputtering zone 12 is arranged between the first sputtering zone 11 and the third sputtering zone 13; and the cross-section of the second sputtering zone 12 is a transversely arranged S-shaped; the outer side of the target 10 is also connected with a connecting part 30; the connecting part 30 and the backing plate 20 are provided with interconnected threaded holes 31; the connecting part 30 and the backing plate 20 are fixedly connected through the threaded holes 31.

[0021] The height between the lowest end and the highest end of the first sputtering zone 11 is less than 5% of the total height of the target material 10. By controlling the height of the first sputtering zone 11, the height of the bottom end is prevented from being too low, resulting in a smaller target material thickness in the middle position, thereby affecting the sputtering effect; the slope area of ​​the third sputtering zone 13 is less than 10% of the total sputtering surface area.

[0022] In order to prevent incomplete sealing at the connection between the target material 10 and the back plate 20 when they are connected by a screw, a sealing mechanism 40 is also connected between the connecting part 30 and the back plate 20; the sealing mechanism 40 includes a sealing groove 41; the sealing groove 41 is arranged at the connecting end of the connecting part 30 and the back plate 20; a sealing strip 42 is connected in the sealing groove 41; a plurality of sealing grooves 32 are arranged; and the plurality of sealing grooves 32 are evenly arranged on both sides of the threaded hole 31.

[0023] In order to facilitate the extrusion of air between the target material 10 and the back plate 20, the lower end of the target material 10 is connected with a plug-in end 50; the back plate 20 is provided with a plug-in groove 21 matching the plug-in end 50; the lower end of the plug-in end 50 is provided with a groove 51; the cross-section of the groove 51 is trapezoidal; the side surface of the plug-in end 50 is an arc surface 52; and the lower end of the arc surface 52 is recessed inward.

[0024] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A target material structure with increased service life, comprising a target material (10) and a backing plate (20), characterized in that: The sputtering end of the target material (10) is provided with a first sputtering zone (11), a second sputtering zone (12) and a third sputtering zone (13); the first sputtering zone (11) is provided at the middle position of the upper end of the target material (10); and the cross section of the first sputtering zone (11) is an arc shape that is concave inwards; the third sputtering zone (13) is provided at the edge position of the upper end of the target material (10); and the third sputtering zone (13) is a beveled surface; the second sputtering zone (12) is provided at the first The target material (10) is provided with a connecting portion (30) between the first sputtering zone (11) and the third sputtering zone (13); and the cross section of the second sputtering zone (12) is a transversely arranged S-shape; the outer side of the target material (10) is also connected to a connecting portion (30); the connecting portion (30) and the back plate (20) are provided with interconnected threaded holes (31); the connecting portion (30) and the back plate (20) are fixedly connected via the threaded holes (31); and a sealing mechanism (40) is also connected between the connecting portion (30) and the back plate (20).

2. A target material structure with increased service life according to claim 1, characterized in that: The sealing mechanism (40) comprises a sealing groove (41); the sealing groove (41) is arranged at the connection end of the connecting portion (30) and the back plate (20); and a sealing strip (42) is connected inside the sealing groove (41).

3. A target material structure with increased service life according to claim 2, characterized in that: A plurality of sealing grooves (41) are provided, and the plurality of sealing grooves (41) are evenly arranged on both sides of the threaded hole (31).

4. A target material structure with increased service life according to claim 1, characterized in that: The height between the lowest end and the highest end of the first sputtering zone (11) is less than 5% of the total height of the target material (10).

5. A target material structure with increased service life according to claim 1, characterized in that: The slope area of ​​the third sputtering zone (13) is less than 10% of the total sputtering surface area.

6. A target material structure with increased service life according to claim 1, characterized in that: The lower end of the target material (10) is connected to a plug-in end (50); and the back plate (20) is provided with a plug-in slot (21) matching the plug-in end (50).

7. A target material structure with increased service life according to claim 6, characterized in that: The lower end of the plug end (50) is provided with a groove (51); the cross section of the groove (51) is trapezoidal; the side surface of the plug end (50) is an arc surface (52); and the lower end of the arc surface (52) is recessed inwards.

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