Target material fixing structure

Abstract

The utility model discloses a target material fixing structure which comprises a target material and a placing frame, and a circular groove is formed in the middle of the placing frame. A fixing mechanism is further connected to the placing frame. The fixing mechanism comprises a plurality of push rods; one ends of the plurality of push rods are uniformly arranged towards the center of the circular groove; one end, close to the circular groove, of each push rod is connected with a clamping block; an annular rotating disc is rotationally connected to the placing frame; a plurality of arc-shaped grooves communicated with the inner side are formed in the annular turntable; the end, away from the clamping block, of the push rod is arranged in the arc-shaped groove. By rotating the annular turntable, the inner walls of the plurality of arc-shaped grooves extrude the push rod at the same time, so that the clamping blocks are driven to move towards the inner side to clamp and fix the center of the outer side of the target material, the stability of the target material is ensured, and meanwhile, the centers of the target materials with different sizes can be fixed.

Description

Technical Field

[0001] The utility model relates to the technical field of target material fixing, in particular to a target material fixing structure. Background Art

[0002] The target material is a sputtering source that forms various functional thin films on the substrate through magnetron sputtering, multi-arc ion plating or other types of coating systems under appropriate process conditions. Most target material processing and manufacturing processes are inseparable from cutting and grinding operations. Generally, it is necessary to fix the cylindrical target blank and cut it into slices of circular target material; the clamping mechanism for fixing the target blank set on the target material cutting device is currently a threaded adjustable structure to meet the universality of target blanks of different sizes. When disassembling the target blank or adjusting the clamping size, it is necessary to repeatedly screw the thread, which is slow to disassemble and assemble, which not only wastes manpower, but also leads to low target material cutting efficiency and increases the overall processing cost. Utility Model Content

[0003] The utility model aims to solve the problems in the prior art and proposes a target material fixing structure.

[0004] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0005] A target material fixing structure comprises a target material and a placing frame, wherein a circular groove is arranged in the middle of the placing frame; a fixing mechanism is also connected to the placing frame; the fixing mechanism comprises a plurality of push rods; and one end of the plurality of push rods is evenly arranged toward the center of the circular groove; a clamping block is connected to the end of the push rod close to the circular groove; an annular turntable is rotatably connected to the placing frame; a plurality of arc grooves communicating with the inner side are arranged on the annular turntable; one end of the push rod away from the clamping block is arranged in the arc groove; a limit frame is provided on the placing frame; the inner side wall of the annular turntable is rotatably connected to the outer side wall of the limit frame; a slide groove matching the push rod is provided on the limit frame; and the push rod is arranged in the slide groove.

[0006] Preferably, a spring is sleeved on the outer side of the push rod; one end of the spring abuts against the inner wall of the arc-shaped groove; and the other end of the spring abuts against the outer side of the limit frame.

[0007] Preferably, the clamping block is an arc-shaped plate; and the outer side wall of the clamping block is fitted with the inner side of the limiting frame through the elastic force of a spring.

[0008] Preferably, the outer side of the annular turntable is connected to a meshing toothed disc; the toothed disc is connected to a shaft and a knob; and the outer side of the knob is also connected to a clamping mechanism.

[0009] Preferably, the clamping mechanism comprises a clamping block and is arc-shaped; the inner arc surface of the clamping block fits the knob and is provided with a plurality of clamping teeth; the clamping block is connected to a fixing rod; and the lower end of the fixing rod is hinged to the mounting frame.

[0010] Preferably, the mounting frame is connected to a hinge block, and the hinge block is provided with a right-angle groove; the lower end of the fixing rod is hinged to the hinge block through the right-angle groove.

[0011] Preferably, the upper end of the placement frame is connected to a cover body and is annular; the lower end of the cover body is fixedly connected to the upper end of the limiting frame.

[0012] Compared with the prior art, the utility model provides a target material fixing structure, which has the following beneficial effects:

[0013] The target material fixing structure rotates the annular turntable so that the inner walls of multiple arc grooves squeeze the push rod at the same time, thereby driving the clamping block to move inward to clamp and fix the outer side of the target material at the center, ensuring the stability of the target material while fixing the targets of different sizes at the center; when the target material is taken out and the annular turntable is reset, the push rod is reset by spring rebound, which facilitates the reset of the push rod, so that the outer wall of the clamping block fits with the inner side of the limit frame 13, and is convenient for the placement of the target material next time.

[0014] The parts not involved in the device are the same as those in the prior art or can be implemented by using the prior art. The utility model has a simple structure and is easy to operate. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a structural schematic diagram of the utility model;

[0016] Figure 2 It is a partial structural schematic diagram of the utility model;

[0017] Figure 3 It is a top view of the fixing mechanism in the utility model;

[0018] Figure 4 It is a structural schematic diagram of the limiting frame in the utility model.

[0019] In the figure: 10, target material; 11, placement frame; 12, circular groove; 13, limit frame; 14, slide groove; 15, cover body; 20, fixing mechanism; 21, push rod; 22, clamping block; 23, annular turntable; 24, arc groove; 25, spring; 26, gear plate; 27, shaft rod; 28, knob; 30, clamping mechanism; 31, clamping block; 32, fixing rod; 33, hinge block; 34, right-angle groove. DETAILED DESCRIPTION

[0020] The following will refer to Figure 1-4The specific implementation of the target material fixing structure in the utility model is introduced, including a target material 10 and a placing frame 11, wherein a circular groove 12 is arranged in the middle of the placing frame 11; a fixing mechanism 20 is also connected to the placing frame 11; the fixing mechanism 20 includes a plurality of push rods 21; and one end of the plurality of push rods 21 is evenly arranged toward the center of the circular groove 12; a clamping block 22 is connected to one end of the push rods 21 close to the circular groove 12; an annular turntable 23 is rotatably connected to the placing frame 11; the annular turntable 23 is provided with an arc groove communicating with the inner side 24; one end of the push rod 21 away from the clamping block 22 is arranged in the arc groove 24; the placing frame 11 is provided with a limit frame 13; the inner wall of the annular turntable 23 is rotatably connected with the outer wall of the limit frame 13; the limit frame 13 is provided with a slide groove 14 matching the push rod 21; the push rod 21 is arranged in the slide groove 14, and by rotating the annular turntable 23, the inner walls of multiple arc grooves 24 squeeze the push rod 21 at the same time, thereby driving the clamping block 22 to move inward to clamp and fix the outer side of the target material 10 in the center, thereby ensuring the stability of the target material 10.

[0021] The upper end of the placement frame 11 is connected to a cover body 15 and is annular; the lower end of the cover body 15 is fixedly connected to the upper end of the limiting frame 13, and the fixing mechanism 20 is placed on the lower side of the cover body 15, so that the cover body 15 blocks the arc groove 24 and the slide groove 14 to prevent the entry of debris.

[0022] To facilitate the resetting of the push rod 21, a spring 25 is sleeved on the outside of the push rod 21; one end of the spring 25 abuts against the inner wall of the arc groove 24; the other end of the spring 25 abuts against the outer side of the limit frame 13; the clamping block 22 is an arc plate; and the outer side wall of the clamping block 22 fits with the inner side of the limit frame 13 through the elastic force of the spring 25. When the target material 10 is taken out and the annular turntable 23 is reset, the push rod 21 rebounds and resets through the spring 25, which facilitates the resetting of the push rod 21, makes the outer side wall of the clamping block 22 fit with the inner side of the limit frame 13, and facilitates the placement of the target material 10 next time.

[0023] To facilitate the rotation of the annular turntable 23, a meshing toothed disc 26 is connected to the outer side of the annular turntable 23; a shaft 27 and a knob 28 are connected to the toothed disc 26; a clamping mechanism 30 is also connected to the outer side of the knob 28; the clamping mechanism 30 includes a clamping block 31 and is arc-shaped; the inner arc surface of the clamping block 31 fits with the knob 28 and is provided with a plurality of clamping teeth; a fixing rod 32 is connected to the clamping block 31; the lower end of the fixing rod 32 is hinged to the mounting frame 11; an articulated block 33 is connected to the mounting frame 11; and the articulated block 33 is provided with a right-angle groove 34; the lower end of the fixing rod 32 is hinged to the articulated block 33 through the right-angle groove 34, and the fixing rod 32 is rotated to drive the rotation of the clamping block 31, thereby realizing the clamping and loosening of the knob 28.

[0024] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A target material fixing structure, comprising a target material (10) and a mounting frame (11), wherein a circular groove (12) is arranged in the middle of the mounting frame (11); characterized in that: The placing frame (11) is also connected to a fixing mechanism (20); the fixing mechanism (20) includes a plurality of push rods (21); and one end of the plurality of push rods (21) is evenly arranged toward the center of the circular groove (12); the end of the push rod (21) close to the circular groove (12) is connected to a clamping block (22); an annular turntable (23) is rotatably connected to the placing frame (11); the annular turntable (23) is provided with a plurality of arc grooves (24) communicating with the inner side; the end of the push rod (21) away from the clamping block (22) is arranged in the arc groove (24); a limiting frame (13) is provided on the placing frame (11); the inner side wall of the annular turntable (23) is rotatably connected to the outer side wall of the limiting frame (13); the limiting frame (13) is provided with a slide groove (14) matching the push rod (21); the push rod (21) is arranged in the slide groove (14).

2. A target material fixing structure according to claim 1, characterized in that: A spring (25) is sleeved on the outside of the push rod (21); one end of the spring (25) abuts against the inner wall of the arc-shaped groove (24); and the other end of the spring (25) abuts against the outside of the limiting frame (13).

3. A target material fixing structure according to claim 1, characterized in that: The clamping block (22) is an arc-shaped plate; and the outer side wall of the clamping block (22) is fitted with the inner side of the limiting frame (13) through the elastic force of the spring (25).

4. A target material fixing structure according to claim 1, characterized in that: The outer side of the annular rotating disk (23) is connected to a meshing toothed disk (26); the toothed disk (26) is connected to a shaft (27) and a knob (28); and the outer side of the knob (28) is also connected to a clamping mechanism (30).

5. A target material fixing structure according to claim 4, characterized in that: The clamping mechanism (30) comprises a clamping block (31) which is arc-shaped; the inner arc surface of the clamping block (31) is in contact with the knob (28) and is provided with a plurality of clamping teeth; the clamping block (31) is connected to a fixing rod (32); the lower end of the fixing rod (32) is hinged to the mounting frame (11).

6. A target material fixing structure according to claim 5, characterized in that: The placement frame (11) is connected to a hinge block (33); the hinge block (33) is provided with a right-angle groove (34); the lower end of the fixing rod (32) is hinged to the hinge block (33) through the right-angle groove (34).

7. The target fixing structure according to claim 1, characterized in that: The upper end of the placement frame (11) is connected to a cover body (15) and is annular; the lower end of the cover body (15) is fixedly connected to the upper end of the limiting frame (13).

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