Conveying device and coating equipment

Abstract

The utility model relates to the field of coating technical equipment, in particular to a conveying device and coating equipment. The conveying device comprises a bearing piece, a non-contact type supporting assembly and a driving assembly. The bearing part is used for bearing a substrate; the non-contact supporting assembly is used for supporting the bearing piece in a non-contact mode and making the bearing piece incline relative to the vertical direction. The driving assembly is in transmission connection with the bearing piece and used for conveying the bearing piece. According to the conveying device, in the transmission process, the substrates can be prevented from toppling over, meanwhile, friction vibration in the transmission process is reduced, the transmission stability is improved, and therefore the coating quality and the uniformity of a film layer can be improved.

Description

Technical Field

[0001] The utility model relates to the field of coating technology equipment, in particular to a conveying device and coating equipment. Background Art

[0002] As perovskite battery technology has been promoted to a certain extent, it has been continuously applied to photovoltaic power generation, LED and other fields, making the size of substrates demanded to increase continuously. In order to meet the market demand for producing large substrates (1200*2400), sputtering coating, vacuum evaporation coating, chemical vapor deposition ion plating and laser-assisted coating are becoming more and more common. Among them, taking the processing of substrates by plasma enhanced physical vapor deposition PEPVD (Plasma Enhanced Physical Vapor Deposition) as an example, in the coating process, because its equipment is set vertically, it is easy to tip over during the transmission process; and because its equipment adopts contact transmission when transmitting the substrate, it will vibrate due to contact friction during the transmission process, and then the particles move downward and deposit on the surface of the substrate, thereby affecting the coating quality. After the substrate is enlarged, it is difficult to solve the uniformity problem. Utility Model Content

[0003] The purpose of the utility model includes, for example, providing a conveying device and a PEPVD coating device, which can prevent the substrate from tipping over during the transmission process, and reduce the friction vibration during the transmission process, thereby improving the smoothness of the transmission, thereby improving the coating quality and improving the uniformity of the film layer.

[0004] The embodiments of the present invention can be implemented as follows:

[0005] In a first aspect, the utility model provides a conveying device, the conveying device comprising a carrier, a non-contact support assembly and a drive assembly;

[0006] The carrier is used for carrying the substrate; the non-contact support assembly is used for supporting the carrier in a non-contact manner and making it tilt relative to the vertical direction; the drive assembly is in transmission connection with the carrier, and the drive assembly is used for conveying the carrier.

[0007] In an optional embodiment, the carrier is inclined by 1°-5° relative to the vertical direction.

[0008] In an optional embodiment, the driving assembly is transmission-connected to the lower end of the carrier, and the non-contact supporting assembly includes a magnetically controlled suspension unit that magnetically acts on the upper end of the carrier.

[0009] In an optional embodiment, the magnetic suspension unit includes a fixed seat, a movable magnet, a first magnetic track and a second magnetic track; the fixed seat is provided with a connecting end surface; the first magnetic track and the second magnetic track are connected to the connecting end surface in parallel and at intervals; the movable magnet is connected to the upper end of the carrier;

[0010] The movable magnet is located between the first magnetic track and the second magnetic track, and the upper end of the carrier is floated in the area between the two magnetic tracks under the magnetic effect of the first magnetic track and the second magnetic track.

[0011] In an optional embodiment, the first magnetic track includes a first guide rail and a first magnetic member connected to the first guide rail;

[0012] The second magnetic track includes a second guide rail and a second magnetic member connected to the second guide rail;

[0013] At least one of the first guide rail and the second guide rail is movably connected to the fixing seat to increase or decrease the interval between the first guide rail and the second guide rail.

[0014] In an optional embodiment, the first guide rail includes a first end surface and a second end surface; the second guide rail includes a third end surface and a fourth end surface; the first end surface and the third end surface are connected to the connecting end surface; the second end surface and the fourth end surface face the movable magnet, and the first magnetic member is connected to the second end surface, and the second magnetic member is connected to the fourth end surface;

[0015] The second end surface and the fourth end surface are inclined relative to the vertical direction and are parallel to the bearing member.

[0016] In an optional embodiment, the first guide rail includes a first end surface and a second end surface; the second guide rail includes a third end surface and a fourth end surface; the first end surface and the third end surface are connected to the connecting end surface; the second end surface and the fourth end surface face the movable magnet, and the first magnetic member is connected to the second end surface, and the second magnetic member is connected to the fourth end surface;

[0017] The first end face is perpendicular to the second end face, the third end face is perpendicular to the fourth end face, and the connecting end face is inclined relative to the horizontal direction.

[0018] In an optional embodiment, the magnetically controlled suspension unit further includes a movable adjusting member, which is movably connected to the fixing seat and enables at least one of the first guide rail and the second guide rail to move in a direction of increasing the distance therebetween or reducing the distance therebetween.

[0019] In an optional embodiment, the drive assembly includes a drive wheel and a drive motor;

[0020] The driving wheel is connected to the driving motor in a transmission manner; the driving wheel contacts the lower end of the bearing member, and the outer peripheral surface of the driving wheel and the lower end of the bearing member are matching arc surfaces. The driving motor is used to drive the driving wheel to rotate to drive the bearing member to move.

[0021] In a second aspect, the utility model provides a coating device, the coating device comprising a functional chamber group and a process chamber;

[0022] The above-mentioned conveying device is arranged in one or more of the functional chamber groups and the process chambers, and the conveying device is used to convey the substrate along the process route direction.

[0023] In an optional embodiment, a coating source is disposed in the process chamber, and the coating source is parallel to the carrier.

[0024] In an optional embodiment, the coating source includes a cathode plate connected to a side wall of the process chamber, and the side wall of the process chamber connected to the cathode plate is inclined and parallel to the carrier.

[0025] In an optional embodiment, the functional chamber group includes a loading chamber, a front transition chamber, and a rear transition chamber, and the loading chamber, the front transition chamber, the process chamber, and the rear transition chamber are sequentially arranged along the process route direction;

[0026] The loading chamber and the process chamber are both equipped with a first vacuum pump unit so that the vacuum degree in the loading chamber is the same as the vacuum degree in the process chamber.

[0027] In an optional embodiment, both the loading chamber and the process chamber are equipped with a heating unit, and the loading chamber is also equipped with a refrigeration unit.

[0028] In an optional embodiment, the functional chamber group further includes an unloading chamber, and the unloading chamber is arranged behind the rear transition chamber along the process route direction;

[0029] The unloading chamber is provided with a first vacuum pump unit so that the vacuum degree in the unloading chamber is the same as the vacuum degree in the process chamber.

[0030] In an optional embodiment, the unloading chamber is provided with a refrigeration unit.

[0031] In an optional embodiment, the first vacuum pump unit includes a mechanical pump, a Roots pump and a molecular pump.

[0032] In an optional embodiment, the functional chamber group includes a loading chamber, a first buffer chamber, a front transition chamber, a rear transition chamber, a second buffer chamber and an unloading chamber;

[0033] The loading chamber, the first buffer chamber, the front transition chamber, the process chamber, the rear transition chamber, the second buffer chamber and the unloading chamber are arranged in sequence along the process route;

[0034] The loading chamber and the unloading chamber are both equipped with a second vacuum pump unit; the first buffer chamber and the second buffer chamber are both equipped with a third vacuum pump unit, so that the vacuum degree of the first buffer chamber and the vacuum degree of the second buffer chamber are the same as the vacuum degree of the process chamber.

[0035] In an optional embodiment, a refrigeration unit is configured in both the first buffer cavity and the second buffer cavity, and a heating unit is also configured in the first buffer cavity.

[0036] In an optional embodiment, the front transition chamber and the rear transition chamber are both equipped with a heating unit and a third vacuum pump unit.

[0037] In an optional embodiment, one or both of the loading chamber and the unloading chamber is connected to a nitrogen gas defusing unit, and the nitrogen gas defusing unit is connected to the bottom or both sides of the loading chamber or the unloading chamber.

[0038] The beneficial effects of the embodiments of the present utility model include, for example:

[0039] The conveying device includes a carrier, a non-contact support assembly and a drive assembly; the carrier is used to carry a substrate; the non-contact support assembly is used to support the carrier in a non-contact manner and tilt it relative to the vertical direction; the drive assembly is transmission-connected to the carrier, and the drive assembly is used to convey the carrier.

[0040] The transmission device adopts a non-contact support component support method, which can support the bearing member while reducing the rigid transmission contact of the bearing member during the transmission process, thereby reducing the vibration and wear caused by the rigid contact, and can absorb the vibration occurring during the transmission process through the non-contact support component, making the transmission more stable and the coating less likely to have edge collapse;

[0041] In addition, the setting of the non-contact support component can enable the carrier to be set in a tilted manner relative to the vertical direction, thereby avoiding tipping over and reducing the fluctuation of the substrate on the carrier, thereby making the coating more uniform, and can also allow the detached film layer with weak bonding force to be deposited to the bottom of the cavity through the action of gravity so that it does not affect the subsequent coating, thereby improving the uniformity of the film layer and improving the coating quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0043] Figure 1 This is a schematic structural diagram of the first viewing angle of the transmission device in an embodiment of the utility model;

[0044] Figure 2It is a structural schematic diagram of the second viewing angle of the transmission device in the embodiment of the utility model;

[0045] Figure 3 This is a schematic diagram of the installation of the conveying device in the embodiment of the utility model;

[0046] Figure 4 This is a schematic diagram of the structure of the magnetically controlled suspension unit and the bearing member in the embodiment of the utility model;

[0047] Figure 5 This is a schematic diagram of the structure of the magnetically controlled suspension unit in the embodiment of the utility model;

[0048] Figure 6 It is a structural schematic diagram of the movable adjusting member and the first guide rail in the embodiment of the utility model;

[0049] Figure 7 This is a schematic diagram of the structure of the driving assembly in the embodiment of the utility model;

[0050] Figure 8 This is a schematic diagram of the installation of the cathode plate in the inner cavity in the embodiment of the utility model;

[0051] Fig. 9 It is a schematic diagram of the arrangement of the loading chamber, the front transition chamber, the process chamber and the rear transition chamber in the embodiment of the utility model;

[0052] Fig.10 It is a schematic diagram of the arrangement of the loading chamber, the front transition chamber, the process chamber, the rear transition chamber and the unloading chamber in the embodiment of the utility model;

[0053] Fig.11 It is a schematic diagram of the arrangement of the loading chamber, the first buffer chamber, the front transition chamber, the process chamber, the rear transition chamber, the second buffer chamber and the unloading chamber in the embodiment of the utility model.

[0054] Icons: 100-transmission device; 110-carrying member; 120-non-contact support assembly; 130-driving assembly; 140-magnetic suspension unit; 151-inner cavity; 150-main body; 141-fixed seat; 142-active magnet; 143-first magnetic track; 144-second magnetic track; 1431-first guide rail; 1432-first magnetic member; 1433-first end face; 1434-second end face; 1441-second guide rail; 1442-second magnetic member; 1443-third end face; 1444-fourth end face; 145-connecting end face; 146-active adjustment member; 1461-screw part; 1462-head; 1435 -strip hole; 161-limiting platform; 162-limiting rod; 131-driving wheel; 132-driving motor; 133-arc surface; 200-coating equipment; 200A-four-chamber coating equipment; 200B-five-chamber coating equipment; 200C-seven-chamber coating equipment; 210-functional chamber group; 220-process chamber; 230-coating source; 231-cathode plate; 211-loading chamber; 212-front transition chamber; 213-rear transition chamber; 214-unloading chamber; 215-first buffer chamber; 216-second buffer chamber; 240-first vacuum pump unit; 260-second vacuum pump unit; 280-third vacuum pump unit. DETAILED DESCRIPTION

[0055] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0056] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0057] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0058] In the description of the present utility model, it should be noted that if the terms "upper", "lower", "inside", "outside", etc. appear, the orientation or position relationship indicated is based on the orientation or position relationship shown in the accompanying drawings, or is the orientation or position relationship in which the utility model product is usually placed when used. It is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it cannot be understood as a limitation on the present utility model.

[0059] In addition, the terms “first”, “second”, etc., if used, are merely used to distinguish between the descriptions and should not be understood as indicating or implying relative importance.

[0060] It should be noted that, in the absence of conflict, the features in the embodiments of the present invention may be combined with each other.

[0061] Please refer to Figure 1-Figure 3 , this embodiment provides a conveying device 100, which is used to convey a substrate placed on a carrier 110 in a manner of conveying a carrier 110 during a coating process. Specifically, the conveying device 100 includes a carrier 110, a non-contact support assembly 120, and a driving assembly 130;

[0062] The carrier 110 is used to carry the substrate; the non-contact support assembly 120 is used to support the carrier 110 in a non-contact manner and make it tilted relative to the vertical direction (the angle of the carrier 110 relative to the vertical direction is as follows Figure 1 and Figure 3 The driving assembly 130 is in transmission connection with the carrier 110 , and the driving assembly 130 is used to transport the carrier 110 .

[0063] It should be noted that the conveying device 100 and the coating equipment 200 provided in this embodiment are described by taking the application in the field of perovskite batteries as an example, while in other embodiments of the utility model, they can also be applied to sputtering coating, vacuum evaporation coating, chemical vapor deposition ion plating and laser assisted coating.

[0064] Please refer to Figure 1-Figure 3 , the working principle of the conveying device 100 is:

[0065] The conveying device 100 includes a carrier 110, a non-contact support assembly 120, and a drive assembly 130; the carrier 110 is used to carry substrates; the non-contact support assembly 120 is used to support the carrier 110 in a non-contact manner and make it tilted relative to the vertical direction; the drive assembly 130 is in transmission connection with the carrier 110, and the drive assembly 130 is used to convey the carrier 110. Therefore, during the operation of the conveying device 100, the drive assembly 130 can drive the carrier 110 to convey the substrate along the process route, and during the conveying process, since the carrier 110 is tilted relative to the vertical direction, the substrate loaded on the carrier 110 is tilted relative to the vertical direction;

[0066] Specifically, since the conveying device 100 adopts the support method of the non-contact support component 120, that is, on the basis of the non-contact support component 120 supporting the carrier 110, the drive component 130 drives the carrier 110 to move, thereby being able to support the carrier 110 while reducing the rigid transmission contact of the carrier 110 during the transmission process, thereby reducing the vibration and wear caused by the rigid contact, and being able to absorb the vibration occurring during the transmission process through the non-contact support component 120, so that the transmission is more stable and the coating is not prone to edge collapse;

[0067] In addition, it can be known from the above content that based on the setting of the non-contact support component 120, its vibration can be reduced, making its transmission more stable, thereby reducing the fluctuation of the substrate on the carrier 110, so that the coating is more uniform, and the detached film layer with weak bonding force can be deposited to the bottom of the cavity by gravity, so that it does not affect the subsequent coating, thereby improving the uniformity of the film layer and improving the coating quality;

[0068] Moreover, the setting of the non-contact support component 120 can enable the carrier 110 to be set in a manner inclined relative to the vertical direction, thereby avoiding tipping over and reducing the fluctuation of the substrate on the carrier 110, thereby making the coating more uniform, and can also allow the detached film layer with weak bonding force to be deposited to the bottom of the cavity through the action of gravity so that it does not affect the subsequent coating, thereby improving the uniformity of the film layer and improving the coating quality.

[0069] For further information, please refer to Figure 1-Figure 3In this embodiment, when configuring the carrier 110, based on the setting of the above-mentioned non-contact support assembly 120, it is possible to realize non-contact support of the carrier 110 and to realize the tilt setting of the carrier 110. When the carrier 110 is tilted relative to the vertical, the structural setting of the non-contact support assembly 120 can be used to make the tilt angle of the carrier 110 1°-5°. For example, the tilt angle can be set to 2°, 3° or 4° based on actual processing requirements. It should be noted that when adjusting the angle, by adjusting the structural setting and installation position of the non-contact support assembly 120, in addition to being able to adjust the angle within the range of 1°-5°, the tilt angle can also be adjusted to an angle greater than 5°.

[0070] For details, please refer to Figure 1-Figure 3 When the non-contact support assembly 120 is configured, its function is to support the carrier 110 so as to adjust the angle of the carrier 110 when transferring the substrate. To achieve the purpose of tilting the carrier 110, the structural setting of the non-contact support assembly 120 can be realized based on magnetic suspension technology, ultrasonic suspension technology, air flow suspension technology, etc.;

[0071] The non-contact support assembly 120 used in this embodiment is implemented based on magnetic suspension technology, and the specific contents are as follows:

[0072] Please refer to Figure 1-Figure 5 The non-contact support component 120 in this embodiment adopts a magnetic suspension unit 140. Based on this, during its installation, the driving component 130 is connected to the lower end of the carrier 110 by transmission. The non-contact support component 120 includes a magnetic suspension unit 140 that acts magnetically on the upper end of the carrier 110. Therefore, when configuring the driving component 130 and the magnetic suspension unit 140 in this embodiment, the driving component 130 and the magnetic suspension unit 140 are respectively arranged at the upper and lower ends of the carrier 110, and the upper and lower ends are supported respectively. On this basis, the position of the upper end of the carrier 110 relative to its lower end can be adjusted by adjusting the structure of the magnetic suspension unit 140 while the transmission and supporting functions of the driving component 130 remain unchanged, thereby achieving the adjustment of the inclination angle of the carrier 110.

[0073] Specifically, the magnetic suspension unit 140 includes a fixed seat 141, a movable magnet 142, a first magnetic track 143 and a second magnetic track 144; wherein the fixed seat 141, the first magnetic track 143 and the second magnetic track 144 extend along the process route, so that the magnetic suspension unit 140 can continuously act on the carrier 110 moving along the process route during the process of conveying the carrier 110, and when the fixed seat 141, the first magnetic track 143 and the second magnetic track 144 are configured, the lengths of the fixed seat 141, the first magnetic track 143 and the second magnetic track 144 can be made consistent, so as to improve the stability of the operation;

[0074] When installing the fixing seat 141 and the driving assembly 130, it should be noted that since the conveying device 100 is applied to the coating equipment 200, when installing the driving assembly 130 and the fixing seat 141, they can be connected to the main body 150 of the corresponding chamber of the coating equipment 200, and the main body 150 is configured with an inner cavity 151 for the carrier 110 to move or perform coating processing;

[0075] In order to facilitate the connection between the first magnetic track 143 and the second magnetic track 144 and the fixing seat 141, the fixing seat 141 is provided with a connecting end face 145; the first magnetic track 143 and the second magnetic track 144 are connected to the connecting end face 145 in parallel and at intervals, and the movable magnet 142 is connected to the upper end of the carrier 110; wherein the movable magnet 142 is located between the first magnetic track 143 and the second magnetic track 144, and the upper end of the carrier 110 is floated in the area between the two magnetic tracks under the magnetic effect of the first magnetic track 143 and the second magnetic track 144. In this way, sufficient space is reserved for the upper end of the carrier 110 to float.

[0076] In summary, please refer to Figure 1-Figure 5Since the lower end of the carrier 110 is transmission-connected to the driving assembly 130, the driving assembly 130 can support the carrier 110. On this basis, the first magnetic rail 143 and the second magnetic rail 144 can apply a magnetic force to the movable magnet 142 located between the first magnetic rail 143 and the second magnetic rail 144, so that the upper end of the carrier 110 can float in the area between the first magnetic rail 143 and the second magnetic rail 144 under the magnetic action of the movable magnet 142, the first magnetic rail 143 and the second magnetic rail 144, so that the carrier 110 can be supported by the driving assembly 130. During the transmission process, the carrier 110 is connected to the driving component 130 in a non-contact manner with the magnetically controlled suspension unit 140 located at the upper end thereof, thereby reducing the rigid contact between the carrier 110 and the first magnetic rail 143 and the second magnetic rail 144 while maintaining the tilt of the carrier 110, thereby reducing friction and thus reducing wear. At the same time, it can prevent the influence of wear particles on the uniformity of the coating and the quality of the film layer, thereby reducing the vibration during the transmission process, thereby improving the stability of the carrier 110 in motion, and thus improving the uniformity of the coating.

[0077] It should be noted that, when the carrier 110 is conveyed along the process route under the action of the driving component 130, the magnetically controlled suspension unit 140 can be set so that the upper end of the carrier 110 floats in the area between the first magnetic rail 143 and the second magnetic rail 144, and does not contact the first magnetic rail 143 and the second magnetic rail 144. Therefore, in the process of conveying the carrier 110, the magnetic force of the magnetically controlled suspension unit 140 can make the carrier 110 float, that is, the upper end of the carrier 110 can float in the area between the first magnetic rail 143 and the second magnetic rail 144, thereby reducing its vibration and bumping, so as to improve the stability of its movement.

[0078] When configuring the first magnetic rail 143 and the second magnetic rail 144, the first magnetic rail 143 includes a first guide rail 1431 and a first magnetic member 1432 connected to the first guide rail 1431; the second magnetic rail 144 includes a second guide rail 1441 and a second magnetic member 1442 connected to the second guide rail 1441; at least one of the first guide rail 1431 and the second guide rail 1441 can be movably connected to the fixed seat 141 to increase or decrease the interval between the first guide rail 1431 and the second guide rail 1441. Therefore, through such a setting method, during use, when it is necessary to adjust the inclination angle of the supporting member 110, one or both of the first guide rail 1431 and the second guide rail 1441 can be moved relative to the fixed seat 141, thereby increasing or decreasing the interval between the first guide rail 1431 and the second guide rail 1441. In this way, the magnetic force between the first magnetic member 1432 and the second magnetic member 1442 and the movable magnet 142 is adjusted, and then the force on the upper end of the supporting member 110 can be achieved, so that it changes its position in the area between the first guide rail 1431 and the second guide rail 1441 to achieve the adjustment of the inclination angle of the supporting member 110.

[0079] That is, by such a setting, the first magnetic member 1432 and the second magnetic member 1442 can both magnetically act on the movable magnet 142, and then by such a way, the first magnetic member 1432 and the second magnetic member 1442 exert opposite magnetic forces on the movable magnet 142, so that the movable magnet 142 is floated and arranged between the first guide rail 1431 and the second guide rail 1441, wherein when a magnetic force is formed between the movable magnet 142, the first magnetic member 1432 and the second magnetic member 1442, the force between the first magnetic member 1432 and the second magnetic member 1442 and the movable magnet 142 can be a repulsive force or an attractive force; and taking the force between the first magnetic member 1432 and the second magnetic member 1442 and the movable magnet 142 as a repulsive force as an example:

[0080] The first magnetic member 1432 and the second magnetic member 1442 are located on opposite sides of the movable magnet 142, and because the first magnetic member 1432 is relatively fixed to the fixing base 141, and the movable magnet 142 floats between the first magnetic member 1432 and the second magnetic member 1442, the magnetic force between the first magnetic member 1432 and the movable magnet 142 will make the movable magnet 142 have a tendency to move toward the direction of the second magnetic member 1442; similarly, the magnetic force between the second magnetic member 1442 and the movable magnet 142 will make the movable magnet 142 have a tendency to move toward the direction of the first magnetic member 1432;

[0081] Therefore, such a configuration ensures that the magnetic forces of the first magnetic member 1432 and the second magnetic member 1442 acting on the movable magnet 142 are in opposite directions, and thus when the movable magnet 142 moves to a position where the two magnetic forces are balanced, its floating position can be kept unchanged.

[0082] Based on the above principles, please refer to Figure 1-Figure 5 When adjusting the tilt angle of the carrier 110, since the upper end of the carrier 110 is connected to the movable magnet 142, and the movable magnet 142 is floated between the first magnetic member 1432 and the second magnetic member 1442, the size of the magnetic force acting on the movable magnet 142 can be adjusted by adjusting the installation position of the first magnetic member 1432 and the second magnetic member 1442 relative to the fixing seat 141, or adjusting the magnetic size of the first magnetic member 1432 and the second magnetic member 1442, thereby adjusting the tilt angle of the carrier 110;

[0083] Based on this, in order to adaptively adjust the magnetic force between the first magnetic member 1432, the second magnetic member 1442 and the movable magnet 142, the magnetic parameters of the first magnetic member 1432, the second magnetic member 1442 and the movable magnet 142 can be adjusted, or the distance between the first magnetic member 1432, the second magnetic member 1442 and the movable magnet 142 can be adjusted; therefore, based on the above structure, and from the above content, it can be known that the first guide rail 1431 and the second guide rail 1441 can be adjusted by one or both of them being movable relative to the fixed seat 141. The installation positions of the magnetic member 1432 and the second magnetic member 1442 relative to the fixed base 141, and this embodiment adopts a method in which the first guide rail 1431 and the second guide rail 1441 can be movable relative to the fixed base 141, so that the distance between the first magnetic member 1432 and the second magnetic member 1442 and the movable magnet 142 can be adjusted by adjusting one or both of the first guide rail 1431 and the second guide rail 1441, and then the magnetic force between the first magnetic member 1432 and the second magnetic member 1442 and the movable magnet 142 can be adaptively adjusted.

[0084] Specifically, the magnetically controlled suspension unit 140 further includes a movable adjusting member 146, which is movably connected to the fixing seat 141, and enables at least one of the first guide rail 1431 and the second guide rail 1441 to move in a direction of increasing the distance between the two or reducing the distance between the two. Based on this, since the movable adjusting member 146 realizes the same movement principle of the first guide rail 1431 and the second guide rail 1441, the movable adjusting member 146 driving the first guide rail 1431 to move is used as an example for description;

[0085] It should be noted that, in this embodiment, when the movable adjustment member 146 realizes the movement of the first guide rail 1431, its purpose is to adjust the distance between the first magnetic member 1432 and the second magnetic member 1442. Therefore, the movement direction of the first guide rail 1431 can be perpendicular to the extension direction of the first guide rail 1431.

[0086] Furthermore, when the movable adjusting member 146 is installed, it can be movably connected to the fixing seat 141 and connected to the first guide rail 1431, so that when the movable adjusting member 146 moves relative to the fixing seat 141, the first guide rail 1431 can be guided to move relative to the fixing seat 141;

[0087] For details, please refer to Figure 1-Figure 6 On the basis of the above structure, in order to adjust the position of the first guide rail 1431, the movable adjusting member 146 can play a role of movable guiding for the first guide rail 1431, so the first guide rail 1431 is provided with a strip hole 1435 along its movable direction; and the movable adjusting member 146 can be a connecting bolt, which is threadedly connected to the fixing seat 141, and its screw part 1461 is slidably matched with the strip hole 1435, and its head 1462 is against the first guide rail 1431; therefore, when the position of the first guide rail 1431 is adjusted, the movable adjusting member 146 can be rotated so that it is relative to the fixing seat 141 The movable adjusting member 146 is in a loose state, so that the head 1462 is separated from the position pressed against the first guide rail 1431. At this time, the first guide rail 1431 can be moved. In the process of moving the first guide rail 1431, the first guide rail 1431 is guided by the cooperation between the rod body of the movable adjusting member 146 and the bar-shaped hole 1435. When the first guide rail 1431 needs to be fixed, the movable adjusting member 146 can be rotated to be in a tightened state relative to the fixing seat 141, so that the head 1462 is pressed against the first guide rail 1431. At this time, the movement of the first guide rail 1431 relative to the fixing seat 141 can be restricted.

[0088] It should be noted that, when configuring the above-mentioned movable structure, a method of arranging a plurality of movable adjusting members 146 at intervals along the extension direction of the first guide rail 1431 is adopted, and correspondingly, a plurality of strip holes 1435 arranged at intervals and matched one by one with the plurality of movable adjusting members 146 are configured on the first guide rail 1431, and threaded connection holes matched one by one with the plurality of movable adjusting members 146 are also configured on the fixed seat 141; in this way, the installation stability of the first guide rail 1431 and the stability during the activity are improved.

[0089] On the basis of the above structure, in order to limit the movement stroke of the first guide rail 1431 during its movement, a limit platform 161 and a limit rod 162 are provided on the fixed seat 141. The limit platform 161 is relatively located on the outside of the first guide rail 1431, and the limit rod 162 is threadedly connected to the limit platform 161, so that the length of the limit rod 162 extending into the area between the limit platform 161 and the first guide rail 1431 can be adjusted by rotating the limit rod 162; wherein, when the limit rod 162 limits the movement of the first guide rail 1431, the limit rod 162 can be extended into the area between the limit platform 161 and the first guide rail 1431. One end of the limit rod 162 can be abutted against the first guide rail 1431, or it can be threadedly connected to the first guide rail 1431. Both methods can limit the movement of the first guide rail 1431.

[0090] Specifically, when one end of the limiting rod 162 extending into the area between the limiting platform 161 and the first guide rail 1431 is threadedly connected to the first guide rail 1431, the limiting rod 162 can be threadedly connected to the limiting platform 161, and the limiting rod 162 is rotated to be threadedly connected to the first guide rail 1431, so that the movement of the first guide rail 1431 can be restricted;

[0091] Specifically, when the limiting rod 162 is extended into the area between the limiting platform 161 and the first guide rail 1431 at one end and abuts against the first guide rail 1431, on the basis that the acting force between the first magnetic member 1432 and the second magnetic member 1442 and the movable magnet 142 is a repulsive force, the acting force between the first magnetic member 1432 and the second magnetic member 1442 and the movable magnet 142 will push the first guide rail 1431 to have a tendency to move toward the limiting platform 161. Based on this, the limiting rod 162 can be rotated to adjust the length of the area between the limiting platform 161 and the first guide rail 1431, and then after its end abuts against the first guide rail 1431, the movement of the first guide rail 1431 can be restricted.

[0092] For further information, please refer to Figure 1-Figure 5In the present embodiment, since the supporting member 110 is tilted, in order to avoid that after adjusting the positions of the first guide rail 1431 and the second guide rail 1441, the acting positions thereof and the active magnet 142 are offset, and thus cannot be directly opposite to the active magnet 142, thereby causing the direction of the magnetic acting force to deviate, based on this, the present embodiment adopts a method of making the connecting end face 145 tilted relative to the horizontal plane, or the surface of the first guide rail 1431 on which the first magnetic member 1432 is installed and the surface of the second guide rail 1441 on which the second magnetic member 1442 is installed is tilted relative to the vertical direction, so that the first magnetic member 1432 and the second magnetic member 1442 can maintain their directions directly opposite to the active magnet 142 after the positions of the first guide rail 1431 and the second guide rail 1441 are changed relative to the fixed seat 141, that is, the change in the acting force direction of the first magnetic member 1432 and the second magnetic member 1442 before and after the adjustment of the position can be avoided, thereby reducing the calculation error of the magnetic force, thereby improving the angle adjustment efficiency, and thus improving its stability.

[0093] Specifically, on the basis of the structures of the first guide rail 1431 and the second guide rail 1441, when the first guide rail 1431, the second guide rail 1441, the first magnetic member 1432 and the second magnetic member 1442 are all cubic structures, that is, on the basis that their cross-sectional profiles are all rectangular, the first guide rail 1431 includes a first end face 1433 and a second end face 1434, and the first end face 1433 and the second end face 1434 are located on adjacent sides of the first guide rail 1431; The rail 1441 includes a third end face 1443 and a fourth end face 1444, and the third end face 1443 and the fourth end face 1444 are located on adjacent sides of the second guide rail 1441; the first end face 1433 and the third end face 1443 are connected to the connecting end face 145; the second end face 1434 and the fourth end face 1444 face the movable magnet 142, and the first magnetic member 1432 is connected to the second end face 1434, and the second magnetic member 1442 is connected to the fourth end face 1444;

[0094] Thus, the second end face 1434 is directly opposite to the fourth end face 1444. Then, on the basis that the first end face 1433 is perpendicular to the second end face 1434 and the third end face 1443 is perpendicular to the fourth end face 1444, the connecting end face 145 can be tilted relative to the horizontal direction. Therefore, after the first guide rail 1431 and the second guide rail 1441 are connected to the connecting end face 145, the second end face 1434 and the fourth end face 1444 are tilted relative to the vertical direction. Therefore, the second end face 1434 and the fourth end face 1444 can be parallel to the supporting member 110, so that the inclination angle can be adapted to the inclination angle of the supporting member 110, and further, the first guide rail 1431 or the second guide rail 1441 can maintain a position directly opposite to the movable magnet 142 after adjusting its position relative to the fixed seat 141.

[0095] In addition, in other embodiments of the utility model, the second end face 1434 and the fourth end face 1444 can be inclined relative to the vertical direction and parallel to the supporting member 110 on the basis that the connecting end face 145 is horizontal, so that the inclination angle can be adapted to the inclination angle of the supporting member 110, thereby enabling the first guide rail 1431 or the second guide rail 1441 to maintain a position opposite to the movable magnet 142 after adjusting its position relative to the fixed seat 141.

[0096] For further information, please refer to Figure 1-Figure 7 As can be seen from the above content, this embodiment adopts a mode in which the upper end of the carrier 110 is floated between the two first guide rails 1431 and the second guide rail 1441, and the lower end thereof is transmission-connected to the driving assembly 130. Based on this, in order to enable the driving assembly 130 to adapt to the inclination of the carrier 110 on the basis of the transmission connection with the carrier 110, and at the same time to provide a stable support for the carrier 110, the driving assembly 130 includes a driving wheel 131 and a driving motor 132; the driving wheel 131 is rotatably connected to the main body 150, and the driving wheel 131 is transmission-connected to the driving motor 132; the driving wheel 131 contacts the lower end of the carrier 110, and the outer peripheral surface of the driving wheel 131 and the lower end of the carrier 110 are matching arc-shaped surfaces 133.

[0097] Through the above-mentioned structural arrangement, the outer peripheral surface of the driving wheel 131 and the lower end of the supporting member 110 are matched arc surfaces 133, so that the supporting member 110 can be tilted relative to the driving wheel 131. After the supporting member 110 is tilted, the contact surface can be increased due to the surface contact between the two arc surfaces 133, thereby improving the supporting stability during the transmission process.

[0098] Based on the above, please refer to Figure 1-Figure 11 , this embodiment further provides a coating device 200, the coating device 200 includes a functional chamber group 210 and a process chamber 220;

[0099] The above-mentioned conveying device 100 is disposed in one or more of the functional chamber group 210 and the process chamber 220 . The conveying device 100 is used to convey the substrate along the process route direction.

[0100] The coating equipment 200 can realize the magnetic levitation transmission of the carrier 110 by adopting the above-mentioned conveying device 100, thereby reducing the rigid transmission contact of the carrier 110 during the conveying process, thereby reducing the vibration caused by the rigid contact, and at the same time reducing the wear caused by the rigid contact during the conveying process, and can absorb the vibration occurring in the transmission process through the magnetically controlled suspension unit 140, so that the transmission is smoother and the coating is not prone to edge chipping.

[0101] Moreover, based on the above-mentioned arrangement of the carrier 110, when the conveying device 100 is installed in the process chamber 220, in order to improve the coating quality thereof, a coating source 230 is arranged in the process chamber 220, and the coating source 230 is parallel to the carrier 110. Specifically, the coating source 230 includes a cathode plate 231 connected to the side wall of the process chamber 220, and the side wall of the process chamber 220 connected to the cathode plate 231 is arranged obliquely and parallel to the carrier 110. That is, when installing the coating source 230, taking the cathode plate 231 as an example, the cavity wall of the process chamber 220 can be arranged obliquely, so that the coating source 230 installed on the cavity wall can be parallel to the carrier 110 inside it after installation, thereby simplifying the installation steps and improving the coating quality.

[0102] Therefore, based on the above content, it can be known that the above-mentioned conveying device 100 is arranged in one or more of the functional chamber group 210 and the process chamber 220 in the coating device 200, and the conveying device 100 is used to convey the substrate along the process route direction; a cathode plate 231 is arranged in the process chamber 220, and the cathode plate 231 is parallel to the carrier 110 (the angle of the carrier 110 relative to the vertical direction is as shown in FIG. Figure 1 , Figure 3 and Figure 8 As shown by the mark α in the figure, the angle between the cathode plate 231 and the vertical direction is as follows: Figure 8 Indicated by the mark β in the figure, that is, Figure 8 For example, the angle α and the angle β are the same.

[0103] In addition, based on the setting of the magnetically controlled suspension unit 140, the carrier 110 is set in a manner inclined relative to the vertical direction, so that the fluctuation of the substrate on the carrier 110 can be reduced in this way, so that the coating is more uniform, and the detached film layer with weak bonding force can be deposited to the bottom of the cavity through the action of gravity so that it does not affect the subsequent coating; and the distance between the carrier 110 and the cathode plate 231 can be adjusted through the floating setting of the carrier 110, thereby improving the uniformity of the film layer and improving the coating quality.

[0104] When configuring the cathode plate 231 in the process chamber 220, it can be tilted in the process chamber 220 and parallel to the carrier 110. It can be seen from the above that the tilt angle of the carrier 110 can be adjusted by setting the magnetic suspension unit 140 on the basis of the tilt of the carrier 110. Therefore, the cathode plate 231 configured in the process chamber 220 can be fixed in the process chamber 220 when the tilt angle of the carrier 110 is determined, that is, the tilt angle of the cathode plate 231 remains unchanged.

[0105] When the use state of the carrier 110 varies and its tilt angle is adjusted from time to time, the cathode plate 231 can be movably arranged in the process chamber 220 so that the tilt angle of the cathode plate 231 can be adjusted to a state parallel to the carrier 110 .

[0106] For further information, please refer to Figure 9-11 , and combined with Figure 1-Figure 8 In the present embodiment, when configuring the functional chamber group 210 of the coating equipment 200, its structural setting and the number of chambers can be adjusted according to the actual application situation, that is, it can be adaptively adjusted according to the work site environment, production efficiency and the design of the process route. For example, according to specific usage requirements, it can be configured as a four-chamber coating equipment 200A, a five-chamber coating equipment 200B or a seven-chamber coating equipment 200C. That is, the change in the number of functional chamber groups 210 can be planned and set based on actual needs or site conditions.

[0107] Therefore, please refer to Fig. 9 In this embodiment, the functional chamber group 210 may include a loading chamber 211, a front transition chamber 212, and a rear transition chamber 213. The loading chamber 211, the front transition chamber 212, the process chamber 220, and the rear transition chamber 213 are sequentially arranged along the process route direction to form a four-chamber structure; the loading chamber 211 and the process chamber 220 are both equipped with a first vacuum pump unit 240, so that the vacuum degree in the loading chamber 211 is the same as the vacuum degree in the process chamber 220. Therefore, through such an arrangement, on the basis of the structure equipped with the loading chamber 211, the front transition chamber 212, the process chamber 220, and the rear transition chamber 213, during the film coating process of the substrate, since the first vacuum pump unit 240 is arranged in the loading chamber 211 and the process chamber 220, the vacuum degree in the loading chamber 211 is the same as the vacuum degree in the process chamber 220, so that the substrate can directly transition from the loading chamber 211 to the front transition chamber 212 in the process without passing through the buffer chamber to improve efficiency.

[0108] On this basis, the loading chamber 211 and the process chamber 220 may be equipped with a heating unit, and the loading chamber 211 may also be equipped with a refrigeration unit. The loading chamber 211 may be temperature-controlled by the heating unit and the refrigeration unit configured in the loading chamber 211, so that the substrate on the carrier 110 has been adjusted to an appropriate processing temperature before entering the front transition chamber 212 and the process chamber 220, thereby shortening the heating cycle of the subsequent process flow and improving efficiency; in addition, the refrigeration unit in the loading chamber 211 may also be used to cool down the substrate when the substrate is unloaded through the loading chamber 211.

[0109] For further information, please refer to Fig.10The functional chamber group 210 may also include an unloading chamber 214, which is arranged behind the rear transition chamber 213 along the process route, thereby forming a five-chamber structure; and the unloading chamber 214 is provided with a first vacuum pump unit 240, so that the vacuum degree in the unloading chamber 214 is the same as the vacuum degree in the process chamber 220, so that when the substrate is unloaded through the unloading chamber 214, the substrate can directly enter the unloading chamber 214 from the rear transition chamber 213 without passing through the buffer chamber to improve efficiency. In addition, the unloading chamber 214 is provided with a refrigeration unit to cool the substrate through the refrigeration unit, thereby improving the efficiency of unloading when the substrate is unloaded through the unloading chamber 214.

[0110] In the above-mentioned four-chamber coating equipment 200A and five-chamber coating equipment 200B, the first vacuum pump unit 240 is disposed in each of the loading chamber 211, the process chamber 220 and the unloading chamber 214. When configuring the first vacuum pump unit 240, a combination of a mechanical pump, a Roots pump and a molecular pump is adopted;

[0111] Among them, mechanical pumps are usually used for preliminary vacuuming, which can quickly reduce the pressure in the system to a lower level, laying the foundation for subsequent high-vacuum vacuuming; Roots pumps are more efficient in the medium vacuum range, which can further reduce the pressure and fill the pressure range between mechanical pumps and molecular pumps; High vacuum realization: Molecular pumps work best in the high vacuum range and can provide an ultra-high vacuum environment, which is necessary for some coating processes that require extremely high vacuum degrees;

[0112] Therefore, this combination can improve the overall pumping efficiency through the combined use of different pumps, so that the vacuum system can reach the required vacuum degree more quickly and extend the service life of the pump. In addition, it can prevent a single pump from running under unfavorable working conditions for a long time, thereby extending the service life of the pump. It can also adapt to different process requirements, improve the reliability of the system, and avoid failure of a certain pump while other pumps can continue to work, thereby ensuring the continuity and stability of the coating process, and reducing dependence on a single pump, thereby reducing maintenance costs and downtime. It can improve the quality of the film layer, and the combined use can more effectively remove active gases and reaction products in the system, thereby improving the quality of the film layer.

[0113] Also, please refer to Fig.11 The functional chamber group 210 includes a loading chamber 211, a first buffer chamber 215, a front transition chamber 212, a rear transition chamber 213, a second buffer chamber 216 and an unloading chamber 214; the loading chamber 211, the first buffer chamber 215, the front transition chamber 212, the process chamber 220, the rear transition chamber 213, the second buffer chamber 216 and the unloading chamber 214 are sequentially arranged along the process route, that is, a seven-chamber structure is formed;

[0114] The loading chamber 211 and the unloading chamber 214 are both equipped with a second vacuum pump unit 260; the first buffer chamber 215 and the second buffer chamber 216 are both equipped with a third vacuum pump unit 280, so that the vacuum degree of the first buffer chamber 215 and the vacuum degree of the second buffer chamber 216 are the same as the vacuum degree of the process chamber 220. In this way, when the substrate enters the front transition chamber 212 from the first buffer chamber 215 and is introduced into the second buffer chamber 216 from the rear transition chamber 213, the vacuum degree of the first buffer chamber 215 and the vacuum degree of the second buffer chamber 216 are the same as the vacuum degree of the process chamber 220, thereby improving the efficiency of loading and unloading.

[0115] In addition, in order to enable the substrate to reach the processing temperature when entering the front transition chamber 212 from the first buffer chamber 215, a refrigeration unit and a heating unit are configured in the first buffer chamber 215; and in order to enable the substrate to complete cooling before entering the unloading chamber 214, a refrigeration unit is configured in the second buffer chamber 216, so as to improve the processing efficiency in this way.

[0116] In addition, based on the above contents, in order to ensure that the substrate meets the corresponding vacuum requirements and temperature requirements when entering the front transition chamber 212 and the rear transition chamber 213 during the processing of the substrate along the process route, the front transition chamber 212 and the rear transition chamber 213 are both equipped with a heating unit and a third vacuum pump unit 280.

[0117] Further, on the basis of the above structure, one or both of the loading chamber 211 and the unloading chamber 214 are connected with a nitrogen breaking unit, and the nitrogen breaking unit is connected to the bottom of the loading chamber 211 or the unloading chamber 214 or both sides thereof. That is, the loading chamber 211 and the unloading chamber 214 of the coating equipment 200 can be broken with nitrogen, and a gas storage tank is provided at the bottom of the loading chamber 211 and the unloading chamber 214 or at its outer side, the purpose of which is to be able to quickly supply nitrogen and shorten the path of nitrogen delivery to the loading chamber 211 and the unloading chamber 214, thereby improving the timeliness of nitrogen supply. In addition, a special gas intake system is provided at the corresponding cathode plate 231 of the process chamber 220, which is equipped with a manual valve, a pressure reducing valve, a one-way valve and a pneumatic valve for special gas delivery control, and is connected to the cathode through a flexible pipeline, which meets the needs of cathode flip cover movement, thereby facilitating later maintenance.

[0118] In summary, the coating device 200 can tilt the carrier 110 and the substrate connected to the carrier 110 through the arrangement of the above-mentioned conveying device 100, and then perform coating in an inclined manner, thereby, the distance between the substrate and the cathode fluctuates less due to the fixed fluctuation direction, so that the coating can be more uniform; the detached film layer with weak bonding force can also be deposited to the bottom of the cavity by gravity to avoid affecting the subsequent coating; the magnetic suspension arrangement of the carrier 110 can reduce the bumping of the carrier 110, so that the movement of the carrier 110 is more stable, and it is not easy to produce edge collapse, thereby improving the coating quality;

[0119] In addition, the functional chamber group 210 can be adaptively adjusted according to actual usage requirements, and can evacuate the vacuum degree of the corresponding chamber from atmospheric pressure to 10-4Pa according to the process route; at the same time, a polycold type refrigeration unit can be used in the corresponding chamber according to the process route in conjunction with a molecular pump to evacuate the chamber to achieve a vacuum degree of 10-5Pa, which reduces costs compared to cryogenic pumps.

[0120] It should be noted that in the above content, the heating unit can be selected according to the coating process and application requirements to improve the coating efficiency and film quality, for example: a resistance heater, an induction heater: a radiation heater, a laser heater, an electron beam heater or a thermocouple heater can be used;

[0121] In addition, when selecting a refrigeration unit, a polycold refrigerator can be selected. Its main function is to reach an extremely low temperature through a refrigeration coil, and quickly capture residual gases in the vacuum system, such as water vapor, oil vapor, etc., thereby shortening the vacuum pumping time and improving the vacuum degree. In addition to Polycold, other types of refrigerators or structures can also be used in the coating equipment 200 to achieve similar effects.

[0122] Based on the above content, it can be known that the number of the functional chamber groups 210 of the coating equipment 200 can be planned and set based on actual needs or on-site conditions. Therefore, the four-chamber coating equipment 200A, the five-chamber coating equipment 200B and the seven-chamber coating equipment 200C in the above content are described below:

[0123] Please refer to Fig. 9 , the structure of the four-chamber coating equipment 200A is as follows:

[0124] In the four-chamber coating equipment 200A, the functional chamber group 210 includes a loading chamber 211, a front transition chamber 212, and a rear transition chamber 213. The loading chamber 211, the front transition chamber 212, the process chamber 220, and the rear transition chamber 213 are sequentially arranged along the process route direction;

[0125] On this basis, the loading chamber 211 and the process chamber 220 are both equipped with a first vacuum pump unit 240, so that the vacuum degree in the loading chamber 211 is the same as the vacuum degree in the process chamber 220; and the loading chamber 211 and the process chamber 220 are both equipped with a heating unit, and the loading chamber 211 is also equipped with a refrigeration unit; the front transition chamber 212 and the rear transition chamber 213 are both equipped with a heating unit and a third vacuum pump unit 280; wherein the first vacuum pump unit 240 includes a mechanical pump, a Roots pump and a molecular pump; the third vacuum pump unit 280 includes a molecular pump;

[0126] Based on this, the loading chamber 211 is correspondingly provided with a mechanical pump (such as Fig. 9 As shown in the mark A1), Roots pump (such as Fig. 9 As shown in the mark B1), molecular pump (such as Fig. 9 As shown in the mark C1), the heating unit (such as Fig. 9 As shown in the mark H1), refrigeration unit (such as Fig. 9 The front transition chamber 212 is provided with a molecular pump (as shown in the mark T1) and a nitrogen breaking unit; Fig. 9 As shown in the mark G1) and the heating unit (as Fig. 9 The process chamber 220 is provided with a mechanical pump (such as Fig. 9 As shown in the mark A2), Roots pump (such as Fig. 9 As shown in the mark B2), molecular pump (such as Fig. 9 C2 in the figure) and the heating unit (as shown in Fig. 9 The rear transition chamber 213 is provided with a molecular pump (such as Fig. 9 As shown in the mark G2) and the heating unit (as shown in the mark G2 Fig. 9 (as shown in the figure with the mark H4).

[0127] Please refer to Fig.10 The structure of the five-chamber coating equipment 200B is as follows:

[0128] In the five-chamber coating equipment 200B, the functional chamber group 210 includes a loading chamber 211, a front transition chamber 212, a rear transition chamber 213 and an unloading chamber 214. The loading chamber 211, the front transition chamber 212, the process chamber 220, the rear transition chamber 213 and the unloading chamber 214 are arranged in sequence along the process route direction;

[0129] On this basis, the loading chamber 211 and the process chamber 220 are both equipped with a first vacuum pump unit 240, so that the vacuum degree in the loading chamber 211 is the same as the vacuum degree in the process chamber 220; and the loading chamber 211 and the process chamber 220 are both equipped with a heating unit, and the loading chamber 211 is also equipped with a refrigeration unit; the front transition chamber 212 and the rear transition chamber 213 are both equipped with a heating unit and a third vacuum pump unit 280; the unloading chamber 214 is equipped with a first vacuum pump unit 240, so that the vacuum degree in the unloading chamber 214 is the same as the vacuum degree in the process chamber 220; wherein the first vacuum pump unit 240 includes a mechanical pump, a Roots pump and a molecular pump; the third vacuum pump unit 280 includes a molecular pump;

[0130] Based on this, the loading chamber 211 is correspondingly provided with a mechanical pump (such as Fig.10 As shown in the mark A3), Roots pump (such as Fig.10 As shown in the mark B3), molecular pump (such as Fig.10 As shown in the mark C3), the heating unit (such as Fig.10 As shown in the mark H5), refrigeration unit (such as Fig.10 The front transition chamber 212 is provided with a molecular pump (as shown in the mark T2) and a nitrogen breaking unit; Fig.10 As shown in the mark G3) and the heating unit (as shown in the mark G3) Fig.10 The process chamber 220 is provided with a mechanical pump (such as Fig.10 As shown in the mark A4), Roots pump (such as Fig.10 As shown in the mark B4), molecular pump (such as Fig.10 C4) and a heating unit (as shown in Fig.10 The rear transition chamber 213 is provided with a molecular pump (such as Fig.10 As shown in the mark G4) and the heating unit (as shown in the mark G4) Fig.10 The unloading chamber 214 is provided with a mechanical pump (such as Fig.10 As shown in the mark A5), Roots pump (such as Fig.10 As shown in the mark B5), molecular pump (such as Fig.10 As shown in the mark C5), refrigeration unit (such as Fig.10 The invention also includes a nitrogen gas breaking unit (as shown in the figure with the mark T3).

[0131] Please refer to Fig.11 The structure of the seven-chamber coating equipment 200C is as follows:

[0132] In the seven-chamber coating equipment 200C, the functional chamber group 210 includes a loading chamber 211, a first buffer chamber 215, a front transition chamber 212, a rear transition chamber 213, a second buffer chamber 216 and an unloading chamber 214. The loading chamber 211, the first buffer chamber 215, the front transition chamber 212, the process chamber 220, the rear transition chamber 213, the second buffer chamber 216 and the unloading chamber 214 are sequentially arranged along the process route direction;

[0133] On this basis, the process chamber 220 is equipped with a first vacuum pump unit 240; the loading chamber 211 and the unloading chamber 214 are both equipped with a second vacuum pump unit 260; the first buffer chamber 215 and the second buffer chamber 216 are both equipped with a third vacuum pump unit 280, so that the vacuum degree of the first buffer chamber 215 and the vacuum degree of the second buffer chamber 216 are the same as the vacuum degree of the process chamber 220; the first buffer chamber 215 and the second buffer chamber 216 are both equipped with a refrigeration unit, and the first buffer chamber 215 is also equipped with a heating unit; the front transition chamber 212 and the rear transition chamber 213 are both equipped with a heating unit and a third vacuum pump unit 280; wherein the first vacuum pump unit 240 includes a mechanical pump, a Roots pump and a molecular pump; the second vacuum pump unit 260 includes a mechanical pump and a Roots pump; the third vacuum pump unit 280 includes a molecular pump.

[0134] Based on this, the loading chamber 211 is correspondingly provided with a mechanical pump (such as Fig.11 As shown in the mark E1), Roots pump (such as Fig.11 The first buffer chamber 215 is provided with a molecular pump (as shown in the mark F1) and a nitrogen breaking unit; Fig.11 As shown in the mark G5), the heating unit (such as Fig.11 H9) and refrigeration unit (as Fig.11 The front transition chamber 212 is provided with a molecular pump (such as Fig.11 As shown in the mark G6) and the heating unit (as shown in the mark G6) Fig.11 The process chamber 220 is provided with a mechanical pump (such as Fig.11 As shown in the mark A5), Roots pump (such as Fig.11 As shown in the mark B5), molecular pump (such as Fig.11 C5) and a heating unit (as shown in Fig.11 The rear transition chamber 213 is provided with a molecular pump (such as Fig.11 As shown in the mark G7) and the heating unit (as shown in the mark G7) Fig.11 The second buffer chamber 216 is provided with a refrigeration unit (such as Fig.11 The unloading chamber 214 is provided with a mechanical pump (such as Fig.11 As shown in the mark E2), Roots pump (such as Fig.11 The invention also includes a nitrogen gas breaking unit and a nitrogen gas breaking unit.

[0135] The above are only specific implementations of the utility model, but the protection scope of the utility model is not limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art within the technical scope disclosed by the utility model should be included in the protection scope of the utility model. Therefore, the protection scope of the utility model should be based on the protection scope of the claims.

Claims

1. A conveying device, characterized in that: The conveying device includes a bearing member, a non-contact support assembly and a driving assembly; The carrier is used for carrying a substrate; the non-contact support assembly is used for supporting the carrier in a non-contact manner and tilting it relative to a vertical direction; the drive assembly is in transmission connection with the carrier, and the drive assembly is used for conveying the carrier.

2. The conveying device according to claim 1, characterized in that: The bearing member is inclined by 1°-5° relative to the vertical direction.

3. The conveying device according to claim 1, characterized in that: The driving assembly is transmission-connected to the lower end of the bearing member, and the non-contact supporting assembly comprises a magnetically controlled suspension unit that magnetically acts on the upper end of the bearing member.

4. The conveying device according to claim 3, characterized in that: The magnetic suspension unit comprises a fixed seat, a movable magnet, a first magnetic track and a second magnetic track; the fixed seat is provided with a connecting end surface; the first magnetic track and the second magnetic track are connected to the connecting end surface in parallel and at intervals; the movable magnet is connected to the upper end of the carrier; The movable magnet is located between the first magnetic track and the second magnetic track, and the upper end of the carrier is floated in the area between the two magnetic tracks under the magnetic effect of the first magnetic track and the second magnetic track.

5. The conveying device according to claim 4, characterized in that: The first magnetic track includes a first guide rail and a first magnetic member connected to the first guide rail; The second magnetic track includes a second guide rail and a second magnetic member connected to the second guide rail; At least one of the first guide rail and the second guide rail is movably connected to the fixing seat to increase or decrease the interval between the first guide rail and the second guide rail.

6. The conveying device according to claim 5, characterized in that: The first guide rail includes a first end surface and a second end surface; the second guide rail includes a third end surface and a fourth end surface; the first end surface and the third end surface are connected to the connecting end surface; the second end surface and the fourth end surface face the movable magnet, and the first magnetic member is connected to the second end surface, and the second magnetic member is connected to the fourth end surface; Wherein, the second end surface and the fourth end surface are inclined relative to the vertical direction and are parallel to the bearing member.

7. The conveying device according to claim 5, characterized in that: The first guide rail includes a first end surface and a second end surface; the second guide rail includes a third end surface and a fourth end surface; the first end surface and the third end surface are connected to the connecting end surface; the second end surface and the fourth end surface face the movable magnet, and the first magnetic member is connected to the second end surface, and the second magnetic member is connected to the fourth end surface; The first end surface is perpendicular to the second end surface, the third end surface is perpendicular to the fourth end surface, and the connecting end surface is inclined relative to the horizontal direction.

8. The conveying device according to claim 5, characterized in that: The magnetically controlled suspension unit further includes a movable adjusting member, which is movably connected to the fixing seat and enables at least one of the first guide rail and the second guide rail to move in a direction of increasing the distance between the two or reducing the distance between the two.

9. The conveying device according to any one of claims 1 to 8, characterized in that: The driving assembly includes a driving wheel and a driving motor; The driving wheel is in driving connection with the driving motor; the driving wheel contacts the lower end of the supporting member, and the outer peripheral surface of the driving wheel and the lower end of the supporting member are matching arc surfaces, and the driving motor is used to drive the driving wheel to rotate to drive the supporting member to move.

10. A coating device, characterized in that: The coating equipment includes a functional chamber group and a process chamber; The functional chamber group and one or more of the process chambers are provided with a conveying device as described in any one of claims 1 to 9, and the conveying device is used to convey the substrate along a process route direction.

11. The coating device according to claim 10, characterized in that: A coating source is disposed in the process chamber, and the coating source is parallel to the carrier.

12. The coating device according to claim 11, characterized in that: The coating source comprises a cathode plate connected to a side wall of the process chamber, and the side wall of the process chamber connected to the cathode plate is arranged obliquely and parallel to the carrier.

13. The coating device according to claim 10, characterized in that: The functional chamber group includes a loading chamber, a front transition chamber and a rear transition chamber, and the loading chamber, the front transition chamber, the process chamber and the rear transition chamber are arranged in sequence along the process route direction; The loading chamber and the process chamber are both equipped with a first vacuum pump unit so that the vacuum degree in the loading chamber is the same as the vacuum degree in the process chamber.

14. The coating device according to claim 13, characterized in that: The loading chamber and the process chamber are both equipped with a heating unit, and the loading chamber is also equipped with a refrigeration unit.

15. The coating device according to claim 13, characterized in that: The functional chamber group further includes an unloading chamber, which is arranged behind the rear transition chamber along the process route direction; The unloading chamber is provided with the first vacuum pump unit so that the vacuum degree in the unloading chamber is the same as the vacuum degree in the process chamber.

16. The coating device according to claim 15, characterized in that: The unloading chamber is equipped with a refrigeration unit.

17. The coating device according to claim 13 or 15, characterized in that: The first vacuum pump unit includes a mechanical pump, a Roots pump and a molecular pump.

18. The coating device according to claim 10, characterized in that: The functional chamber group includes a loading chamber, a first buffer chamber, a front transition chamber, a rear transition chamber, a second buffer chamber and an unloading chamber; The loading chamber, the first buffer chamber, the front transition chamber, the process chamber, the rear transition chamber, the second buffer chamber and the unloading chamber are sequentially arranged along the process route direction; The loading chamber and the unloading chamber are both equipped with a second vacuum pump unit; the first buffer chamber and the second buffer chamber are both equipped with a third vacuum pump unit, so that the vacuum degree of the first buffer chamber and the vacuum degree of the second buffer chamber are the same as the vacuum degree of the process chamber.

19. The coating device according to claim 18, characterized in that: A refrigeration unit is disposed in both the first buffer cavity and the second buffer cavity, and a heating unit is also disposed in the first buffer cavity.

20. The coating device according to claim 13, 15 or 18, characterized in that: The front transition chamber and the rear transition chamber are both equipped with a heating unit and a third vacuum pump unit.

21. The coating device according to claim 13, 15 or 18, characterized in that: One or both of the loading chamber and the unloading chamber is connected to a nitrogen gas breaking unit, and the nitrogen gas breaking unit is connected to the bottom or both sides of the loading chamber or the unloading chamber.

Images