Heater for PVD (Physical Vapor Deposition)

Abstract

The utility model discloses a heater for PVD, which comprises a shell carrying disc, a bottom supporting shell, a heating disc body, a graphite gasket and a central shaft, the shell carrying disc comprises an upper plate and a side plate, and the side plate is installed at the bottom of the upper plate in an integrated forming mode; the bottom supporting shell is installed on the inner side wall of the lower end of the side plate. The heating disc body is installed between the upper plate and the bottom supporting shell. And the graphite gasket is arranged between the lower side wall of the upper plate and the upper side wall of the heating disc body. The heating plate body is made of red copper with high heat conductivity, and the heat uniformity of the heating plate is improved by utilizing the high heat conductivity of the copper; a graphite gasket is additionally arranged between the heating disc and the shell carrying disc, and uniform distribution of heat transferred by the heating disc is further improved through the ultrahigh heat conductivity coefficient of graphite; the silicon carbide coating is added on the surface of the graphite gasket, so that the graphite gasket can be effectively prevented from being oxidized in a high-temperature environment, and the overall high-temperature resistance of the stainless steel heater is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of heaters, and in particular relates to a heater used for PVD. Background Art

[0002] In the physical vapor deposition (PVD) process in the fields of semiconductor manufacturing, optical coating, material surface modification, etc., the heating plate is a key component for carrying and heating the substrate, and its performance directly affects the quality of the film and production efficiency. However, the existing PVD heating plate has the following aspects that need to be improved:

[0003] (1) In the high-temperature and high-vacuum PVD process, stainless steel is widely used in the manufacture of heater bodies due to its high-temperature resistance and low outgassing rate. However, stainless steel has lower thermal conductivity than other metals such as aluminum, resulting in poor temperature uniformity of the heating plate, affecting product quality.

[0004] (2) To make up for the low thermal conductivity of stainless steel, the heating plate body uses a dissimilar metal with higher thermal conductivity, and an interface thermal conductive material is used to fill the connection gap between the heating plate body and the stainless steel shell to achieve uniform heat conduction. However, currently common interface thermal conductive materials such as thermal conductive silicone sheets and silicon-free thermal conductive materials cannot meet the requirements of high-temperature heating plates.

[0005] The information disclosed in this background technology section is only intended to increase the understanding of the overall background of the present invention, and should not be regarded as acknowledging or suggesting in any form that the information constitutes the prior art already known to a person skilled in the art. Utility Model Content

[0006] The utility model aims to provide a heater for PVD, which can solve the problem that the temperature uniformity of the heating disk is poor and the interface thermal conductive material cannot meet the demand of high-temperature heating.

[0007] In order to achieve the above purpose, the technical solution provided by a specific embodiment of the utility model is as follows:

[0008] A heater for PVD, characterized by comprising:

[0009] The outer shell carrier includes an upper plate and a side plate. The side plate is installed on the bottom of the upper plate in an integrally formed manner. The upper plate and the side plate form an outer shell carrier so as to install components inside the heater.

[0010] The bottom support shell is installed on the inner wall of the lower end of the side plate, so that the outer shell carrier and the bottom support shell form a whole, and a closed environment is formed inside.

[0011] The heating plate body is installed between the upper plate and the bottom support shell. A heating tube is arranged in the heating plate body so that the heating plate body is heated by the heating tube, so that the heating plate body heats the upper plate.

[0012] Graphite gasket, the graphite gasket is arranged between the lower side wall of the upper plate and the upper side wall of the heating plate body, and the upper and lower side walls of the graphite gasket are respectively attached to the lower side wall of the upper plate and the upper side wall of the heating plate body. The graphite gasket is an interface thermal conductive material, the heating plate body transfers heat to the graphite gasket, and the graphite gasket transfers heat evenly to the outer shell carrier. The ultra-high thermal conductivity of the graphite gasket improves the uniform heat distribution of the outer shell carrier.

[0013] In one or more embodiments of the present invention, the housing carrier is made of stainless steel material, and the stainless steel material is 316L. Since 316L has strong corrosion resistance and oxidation resistance in high temperature environment, the effect of using the housing carrier in high temperature environment is improved.

[0014] In one or more embodiments of the present invention, a plurality of mounting sleeves are fixedly connected to the upper plate in a penetrating manner, the upper ends of the plurality of mounting sleeves are flush with the upper surface of the upper plate, and the lower ends of the mounting sleeves are placed on the lower side of the upper plate.

[0015] In one or more embodiments of the present invention, a limiting protrusion is fixedly connected to the lower side wall of the upper plate, and the limiting protrusion is arranged at the center of the upper plate.

[0016] In one or more embodiments of the present invention, the bottom support shell is made of stainless steel material, and the stainless steel material is 316L. Since 316L has strong corrosion resistance and oxidation resistance in high temperature environment, the effect of using the bottom support shell in high temperature environment is improved.

[0017] In one or more embodiments of the present invention, a plurality of first assembly holes are provided on the side of the bottom support shell, a mounting portion is provided at the center of the bottom support shell, a central axis is installed on the mounting portion, and the central axis can be conveniently installed on the bottom of the bottom support shell through the mounting portion. At the same time, the central axis is made of L stainless steel material for making a heater.

[0018] In one or more embodiments of the utility model, the heating plate body is made of copper material. Since copper has high thermal conductivity, the thermal uniformity of the heating plate body can be improved, so that the heat uniformity transferred from the heating plate body to the outer shell carrier is better. A plurality of grooves are provided on the side wall of the heating plate body.

[0019] In one or more embodiments of the present invention, a socket hole is opened at the center of the heating plate body, and the lower end of the limiting protrusion is socketed in the socket hole. Through the cooperation between the limiting protrusion and the socket hole, the heating plate body is stable when installed in the outer shell carrier.

[0020] In one or more embodiments of the utility model, the graphite gasket is provided with a plurality of second assembly holes, and one side of the lower end of the plurality of mounting sleeves passes through the second assembly hole, the slot body and the first assembly hole, and the lower end of the mounting sleeve is flush with the lower surface of the bottom support shell. By sequentially passing through the second assembly hole, the slot body and the first assembly hole, the outer shell carrier, the graphite gasket, the heating plate body and the bottom support shell can be connected together through the mounting sleeve, so that by installing fasteners in the mounting sleeve, the outer shell carrier, the graphite gasket, the heating plate body and the bottom support shell can be stably mounted together.

[0021] In one or more embodiments of the utility model, the upper and lower surfaces of the graphite gasket are both provided with silicon carbide coatings. Adding silicon carbide coatings on the surface of the graphite gasket can effectively prevent the graphite gasket from oxidizing in a high temperature environment, thereby improving the overall high temperature resistance of the heater.

[0022] Compared with the prior art, the heating plate body in the utility model uses red copper with higher thermal conductivity, and utilizes the high thermal conductivity of copper to improve the thermal uniformity of the heating plate; a graphite gasket is added between the heating plate and the outer shell carrier plate, and the ultra-high thermal conductivity of graphite further improves the uniform distribution of heat transferred by the heating plate; a silicon carbide coating is added to the surface of the graphite gasket, which can effectively prevent the graphite gasket from oxidizing in a high temperature environment, thereby improving the overall high temperature resistance of the stainless steel heater. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0024] Figure 1 It is a front view of a heater for PVD in one embodiment of the utility model;

[0025] Figure 2 A three-dimensional diagram of a heater for PVD in one embodiment of the utility model;

[0026] Figure 3 It is a cross-sectional view of a heater used for PVD in one embodiment of the utility model;

[0027] Figure 4 It is a partial cross-sectional view of a heater for PVD in one embodiment of the utility model;

[0028] Figure 5 It is a schematic diagram of the lower side component of the housing carrier in one embodiment of the utility model;

[0029] Figure 6 It is a schematic diagram of a housing carrier in one embodiment of the utility model.

[0030] Description of main reference numerals:

[0031] 1-shell carrier, 11-upper plate, 12-side plate, 13-installing sleeve, 14-limiting protrusion, 2-bottom support shell, 21-first assembly hole, 22-installing part, 3-heating plate body, 31-trough body, 32-sleeve hole, 4-graphite gasket, 41-second assembly hole, 5-center axis. DETAILED DESCRIPTION

[0032] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0033] like Figure 1 to Figure 3 As shown, a heater for PVD in one embodiment of the utility model includes an outer shell carrier 1, a bottom support shell 2, a heating plate body 3, a graphite gasket 4 and a central axis 5.

[0034] like Figure 1 to Figure 4 As shown, the housing carrier 1 includes an upper plate 11 and a side plate 12. The side plate 12 is installed on the bottom of the upper plate 11 in an integral manner. The upper plate 11 and the side plate 12 form the housing carrier 1 so that components inside the heater can be installed.

[0035] Preferably, the housing carrier 1 is made of stainless steel material, and the stainless steel material is 316L. Since 316L has strong corrosion resistance and oxidation resistance in a high temperature environment, the effect of the housing carrier 1 in a high temperature environment is improved.

[0036] like Figure 2 and Figure 6 As shown, a plurality of mounting sleeves 13 are fixedly connected to the upper plate 11 in a penetrating manner, the upper ends of the plurality of mounting sleeves 13 are flush with the upper surface of the upper plate 11 , and the lower ends of the mounting sleeves 13 are placed on the lower side of the upper plate 11 .

[0037] like Figure 6 As shown, a limiting protrusion 14 is fixedly connected to the lower side wall of the upper plate 11 , and the limiting protrusion 14 is arranged at the center of the upper plate 11 .

[0038] like Figure 3 and Figure 4 As shown, the bottom support shell 2 is installed on the inner side wall of the lower end of the side plate 12, so that the outer shell carrier 1 and the bottom support shell 2 form a whole, and a closed environment is formed inside.

[0039] Preferably, the bottom support shell 2 is made of stainless steel material, and the stainless steel material is 316L. Since 316L has strong corrosion resistance and oxidation resistance in a high temperature environment, the effect of the bottom support shell 2 in a high temperature environment is improved.

[0040] like Figure 5 As shown, a plurality of first assembly holes 21 are provided on the side of the bottom support shell 2, a mounting portion 22 is provided at the center position of the bottom support shell 2, a center axis 5 is mounted on the mounting portion 22, and the center axis 5 is conveniently mounted on the bottom of the bottom support shell 2 through the mounting portion 22. At the same time, the center axis 5 is made of 316L stainless steel material for making a heater.

[0041] like Figure 3 and Figure 4 As shown, the heating plate body 3 is installed between the upper plate 11 and the bottom support shell 2 , and a heating tube is arranged in the heating plate body 3 , so that the heating plate body 3 is heated by the heating tube, so that the heating plate body 3 heats the upper plate 11 .

[0042] Preferably, the heating plate body 3 is made of copper. Since copper has high thermal conductivity, the thermal uniformity of the heating plate body 3 can be improved, so that the heat transferred from the heating plate body 3 to the outer shell carrier 1 is more uniform.

[0043] Furthermore, if Figure 5 As shown, a plurality of grooves 31 are formed on the side wall of the heating plate body 3 .

[0044] like Figure 4 As shown, a socket hole 32 is opened at the center of the heating plate body 3, and the lower end of the limiting protrusion 14 is socketed in the socket hole 32. Through the cooperation between the limiting protrusion 14 and the socket hole 32, the heating plate body 3 is stable when installed in the outer shell carrier 1.

[0045] like Figure 3 and Figure 4As shown, the graphite gasket 4 is disposed between the lower side wall of the upper plate 11 and the upper side wall of the heating plate body 3, and the upper and lower side walls of the graphite gasket 4 are respectively attached to the lower side wall of the upper plate 11 and the upper side wall of the heating plate body 3. The graphite gasket 4 is an interface thermal conductive material, and the heating plate body 3 transfers heat to the graphite gasket 4, and the graphite gasket 4 transfers heat evenly to the outer shell carrier 1. The ultra-high thermal conductivity of the graphite gasket 4 improves the uniform heat distribution of the outer shell carrier 1.

[0046] like Figure 2 and Figure 5 As shown, a plurality of second assembly holes 41 are provided on the graphite gasket 4, and one side of the lower end of the plurality of mounting sleeves 13 passes through the second assembly hole 41, the groove body 31 and the first assembly hole 21, and the lower end of the mounting sleeve 13 is flush with the lower surface of the bottom support shell 2. By sequentially passing through the second assembly hole 41, the groove body 31 and the first assembly hole 21, the outer shell carrier 1, the graphite gasket 4, the heating plate body 3 and the bottom support shell 2 can be connected together through the mounting sleeve 13, so that by installing fasteners in the mounting sleeve 13, the outer shell carrier 1, the graphite gasket 4, the heating plate body 3 and the bottom support shell 2 can be stably mounted together.

[0047] Preferably, silicon carbide coating is provided on the upper and lower surfaces of the graphite gasket 4. Adding silicon carbide coating on the surface of the graphite gasket 4 can effectively prevent the graphite gasket 4 from oxidizing in a high temperature environment, thereby improving the overall high temperature resistance of the heater.

[0048] Working principle: The high thermal conductivity of copper is used to improve the thermal uniformity of the heating plate body 3. By adding a graphite gasket 4 between the heating plate body 3 and the outer shell carrier 1, the ultra-high thermal conductivity of the graphite gasket 4 is used to further improve the thermal uniformity of the heating plate body 3 when transferring heat, thereby improving the thermal uniformity of the outer shell carrier 1; at the same time, a silicon carbide coating is added to the surface of the graphite gasket 4 to improve the high-temperature oxidation resistance and the overall high-temperature resistance of the heater.

[0049] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

[0050] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A heater for PVD, characterized in that: include: The housing carrier includes an upper plate and a side plate, wherein the side plate is integrally mounted on the bottom of the upper plate; A bottom support shell, the bottom support shell is installed on the inner side wall of the lower end of the side plate; A heating plate body, the heating plate body is installed between the upper plate and the bottom support shell, and a heating tube is arranged in the heating plate body; A graphite gasket is arranged between the lower side wall of the upper plate and the upper side wall of the heating plate body, and the upper and lower side walls of the graphite gasket are respectively fitted with the lower side wall of the upper plate and the upper side wall of the heating plate body.

2. A heater for PVD according to claim 1, characterized in that: The housing carrier is made of stainless steel material, and the stainless steel material is 316L.

3. A heater for PVD according to claim 1, characterized in that: A plurality of mounting sleeves are fixedly connected to the upper plate in a through-going manner, the upper ends of the plurality of mounting sleeves are flush with the upper surface of the upper plate, and the lower ends of the mounting sleeves are placed on the lower side of the upper plate.

4. A heater for PVD according to claim 3, characterized in that: A limiting protrusion is fixedly connected to the lower side wall of the upper plate, and the limiting protrusion is arranged at the center of the upper plate.

5. A heater for PVD according to claim 1, characterized in that: The bottom support shell is made of stainless steel material, and the stainless steel material is 316L.

6. A heater for PVD according to claim 3, characterized in that: A plurality of first assembly holes are provided on the side of the bottom support shell, a mounting portion is provided at the center of the bottom support shell, and a central axis is mounted on the mounting portion.

7. A heater for PVD according to claim 6, characterized in that: The heating plate body is made of copper material, and a plurality of grooves are provided on the side wall of the heating plate body.

8. The heater for PVD according to claim 4, characterized in that: A sleeve hole is provided at the center of the heating plate body, and the lower end of the limiting protrusion is sleeved in the sleeve hole.

9. The heater for PVD according to claim 7, characterized in that: The graphite gasket is provided with a plurality of second assembly holes, one side of the lower ends of the plurality of mounting sleeves passes through the second assembly holes, the slot body and the first assembly holes, and the lower ends of the mounting sleeves are flush with the lower surface of the bottom support shell.

10. The heater for PVD according to claim 1, characterized in that: The upper and lower surfaces of the graphite gasket are both provided with silicon carbide coatings.

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