Temperature measuring device

Abstract

The utility model relates to a temperature measuring device which comprises temperature measuring equipment and a vacuum coating cavity, a temperature measuring window capable of being opened and closed is arranged on a cavity body of the vacuum coating cavity, and the temperature measuring window directly faces an evaporation boat arranged in the vacuum coating cavity. The temperature measuring device is arranged towards the temperature measuring window, and after the temperature measuring window is opened, the temperature measuring device can measure the temperature of the evaporation boat through the temperature measuring window. Compared with the prior art that an environment temperature sensor is arranged in the vacuum cavity, the temperature measuring device is arranged outside the vacuum coating cavity, and the temperature of the evaporation boat is measured through the openable temperature measuring window, so that high-temperature gas in the vacuum coating cavity is almost not deposited on the temperature measuring device, and the temperature of the evaporation boat can be accurately measured. And the accuracy of temperature measurement data of the temperature measurement equipment is improved, so that non-contact accurate temperature measurement in a vacuum coating environment can be realized.

Description

Technical Field

[0001] The present application relates to the technical field of vacuum coating, and in particular to a temperature measuring device. Background Art

[0002] Vacuum coating refers to a method of heating metal or non-metal materials under high vacuum conditions to evaporate and condense on the surface of the coated object (metal, semiconductor or insulator) to form a thin film. Among them, how to accurately detect the temperature of the evaporation source (or evaporation boat) is a very important factor in the control process of vacuum coating.

[0003] In the related art, the temperature of the evaporation source is detected by setting an ambient temperature sensor in the vacuum chamber. However, the related art has the problem that the ambient temperature sensor cannot detect normally. Utility Model Content

[0004] In view of the above problems, the present application provides a temperature measuring device, which can solve the problem in the related art that the ambient temperature sensor cannot detect normally.

[0005] In a first aspect, the present application provides a temperature measuring device, which includes a temperature measuring device and a vacuum coating chamber, wherein an openable and closable temperature measuring window is provided on the cavity body of the vacuum coating chamber, and the temperature measuring window is directly opposite to an evaporation boat provided inside the vacuum coating chamber;

[0006] The temperature measuring device is arranged toward the temperature measuring window. After the temperature measuring window is opened, the temperature measuring device can measure the temperature of the evaporation boat through the temperature measuring window.

[0007] In the embodiment of the present application, a temperature measuring window that can be opened and closed and is directly opposite to the evaporation boat arranged inside the vacuum coating chamber is provided on the cavity body of the vacuum coating chamber, and after the temperature measuring window is opened, the temperature measuring device can measure the temperature of the evaporation boat through the temperature measuring window. It can be seen that the temperature measuring device of the embodiment of the present application is arranged outside the vacuum coating chamber, and the temperature of the evaporation boat is measured through the openable temperature measuring window. The high-temperature gas inside the vacuum coating chamber will hardly be deposited on the temperature measuring device, which is conducive to improving the accuracy of the temperature measurement data of the temperature measuring device, so that non-contact accurate temperature measurement in the vacuum coating environment can be achieved.

[0008] In some embodiments, a flange device is provided on the cavity body of the vacuum coating cavity, the flange device is provided with an opening, and the temperature measuring window is provided on the opening of the flange device.

[0009] In the embodiment of the present application, by setting a temperature measuring window at the opening of the flange device on the vacuum coating chamber body, the flexibility of setting the temperature measuring window can be increased, which is conducive to the temperature measuring equipment being set toward the temperature measuring window, so that the temperature of the evaporation boat can be measured through the temperature measuring window.

[0010] In some embodiments, the flange device includes a front flange and a rear flange connected to each other, both the front flange and the rear flange are provided with openings, and the openings of the front flange and the rear flange are opposite to each other, and the temperature measuring window is provided on the opening of the front flange.

[0011] In the embodiment of the present application, the temperature measuring window is arranged on the opening of the front flange, so that the distance between the temperature measuring window and the evaporation boat can be increased, and the high-temperature gas inside the vacuum coating chamber will not be deposited on the temperature measuring window, which is beneficial to improve the clarity of the temperature measuring window, thereby helping to further improve the accuracy of the temperature measurement data of the temperature measuring equipment.

[0012] In some embodiments, a sealing ring is fixedly disposed between the front flange and the rear flange to increase the sealing performance of the temperature measuring device.

[0013] In some embodiments, a movable cover plate is provided between the front flange and the rear flange, and the cover plate can be moved to cover or unblock the opening provided on the rear flange, thereby achieving the effect of flexibly closing or opening the temperature measuring window.

[0014] In some embodiments, the vacuum coating chamber includes a accommodating chamber portion and a connecting chamber portion, the accommodating chamber portion is used to form a chamber space for accommodating the evaporation boat, the connecting chamber portion is connected to the accommodating chamber portion, and the flange device is arranged on the connecting chamber portion.

[0015] In some embodiments, the temperature measurement window includes germanium glass, which allows infrared light signals or detection light signals of the temperature measurement device to pass through, thereby avoiding problems such as infrared temperature measurement failure or detection light temperature measurement failure caused by glass reflection.

[0016] In some embodiments, the temperature measuring device includes: an infrared thermometer or a laser thermometer.

[0017] In some embodiments, the temperature measuring device includes a plurality of temperature measuring devices, and a plurality of temperature measuring windows are correspondingly arranged on the cavity body of the vacuum coating cavity, and different temperature measuring windows are opposite to different evaporation boats arranged inside the vacuum coating cavity.

[0018] In the embodiment of the present application, the temperature of the corresponding evaporation boat inside the vacuum coating chamber is measured by a plurality of temperature measuring devices respectively, which can help improve the accuracy of the evaporation boat temperature detection.

[0019] In some embodiments, the temperature measuring device further includes a control device, which is connected to the temperature measuring device and the evaporation boat to adjust the evaporation power of the evaporation boat according to the temperature measurement data output by the temperature measuring device.

[0020] In the embodiment of the present application, by adjusting the evaporation power of the evaporation boat according to the temperature measurement data output by the temperature measuring device through the control device, automatic closed-loop control of the coating process can be achieved, which is beneficial to improving the stability of the coating quality.

[0021] The above description is only an overview of the technical solution of the present application. In order to more clearly understand the technical means of the present application, it can be implemented in accordance with the contents of the specification. In order to make the above and other purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are listed below. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Various other advantages and benefits will become apparent to those of ordinary skill in the art by reading the detailed description of the preferred embodiments below. The accompanying drawings are only for the purpose of illustrating the preferred embodiments and are not to be considered as limiting the present application. Moreover, the same reference numerals are used throughout the drawings to represent the same components. In the drawings:

[0023] Figure 1 A schematic diagram of the structure of a temperature measuring device provided in some embodiments of the present application;

[0024] Figure 2 A schematic diagram of the structure of a temperature measuring device provided in some other embodiments of the present application;

[0025] Figure 3 A schematic diagram of the structure of a temperature measuring device provided in some other embodiments of the present application;

[0026] Figure 4 A schematic diagram of the structure of a flange device provided in some embodiments of the present application;

[0027] Figure 5 A schematic diagram of the movement position of the cover plate provided in an embodiment of the present application;

[0028] Figure 6 An exploded schematic diagram of a temperature measuring device provided in an embodiment of the present application;

[0029] Figure 7 for Figure 6 A partial cross-sectional schematic diagram along direction A;

[0030] Figure 8 A schematic diagram of the automatic adjustment process of evaporation power provided in an embodiment of the present application. DETAILED DESCRIPTION

[0031] The following embodiments of the technical solution of the present application are described in detail in conjunction with the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the present application, and are therefore only used as examples, and cannot be used to limit the scope of protection of the present application.

[0032] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by technicians in the technical field to which this application belongs; the terms used herein are only for the purpose of describing specific embodiments and are not intended to limit this application; the term "including" and any variations thereof in the specification and claims of this application and the above-mentioned figure descriptions are intended to cover non-exclusive inclusions.

[0033] In the description of the embodiments of the present application, the meaning of "multiple" is more than two (including two), unless otherwise clearly and specifically limited. It should be understood that the orientation or positional relationship indicated by the terms "front" and "rear" is based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the embodiments of the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the embodiments of the present application.

[0034] In the embodiments of the present application, unless otherwise clearly specified and limited, the terms "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly limited. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present application can be understood according to the specific circumstances.

[0035] The temperature measuring device and vacuum coating system involved in the embodiments of the present application can be applied to the winding coating application scenario in the battery production process; of course, they can also be applied to other scenarios.

[0036] For the convenience of explanation, the following embodiments are described by taking the application scenario of the temperature measuring device and vacuum coating system of the embodiment of the present application applied to the roll-to-roll coating application scenario in the battery production process as an example. It should be understood that when the temperature measuring device and vacuum coating system of the embodiment of the present application are applied to other scenarios, their implementation principles and technical effects are similar.

[0037] In response to the problem in the related art that the ambient temperature sensor cannot detect normally, the embodiment of the present application proposes that the temperature measuring device can be arranged outside the vacuum coating chamber, and the temperature of the evaporation boat is measured through an openable temperature measuring window. The high-temperature gas inside the vacuum coating chamber will hardly be deposited on the temperature measuring device, which is beneficial to improving the accuracy of the temperature measurement data of the temperature measuring device, thereby realizing non-contact and accurate temperature measurement in the vacuum coating environment.

[0038] In some embodiments, Figure 1 A schematic diagram of the structure of a temperature measuring device provided in some embodiments of the present application, such as Figure 1 As shown, the temperature measuring device of the embodiment of the present application may include but is not limited to a temperature measuring device 10 and a vacuum coating chamber 11 .

[0039] For example, the temperature measuring device 10 in the embodiment of the present application may include but is not limited to an infrared thermometer or a laser thermometer. For example, the temperature measuring device 10 may use a high-resolution infrared thermometer, which can collect temperature data in a short time of milliseconds.

[0040] The vacuum coating chamber 11 of the embodiment of the present application may be provided with an openable and closable temperature measuring window 110, and the temperature measuring window 110 and the evaporation boat ( Figure 1 ) so that the evaporation boat can be observed through the temperature measuring window 110.

[0041] Exemplarily, the temperature measuring window 110 in the embodiment of the present application may include, but is not limited to, high temperature resistant and high light transmittance glass. For example, the temperature measuring window 110 may include germanium glass, which allows infrared light signals or detection light signals of the temperature measuring device 10 to pass through, thereby avoiding problems such as infrared temperature measurement failure or detection light temperature measurement failure caused by glass reflection.

[0042] The temperature measuring device 10 of the embodiment of the present application can be arranged toward the temperature measuring window 110. After the temperature measuring window 110 is opened, the temperature measuring device 10 can measure the temperature of the evaporation boat through the temperature measuring window 110. It should be noted that the temperature measuring device 10 can measure the temperature of the evaporation boat very quickly through the temperature measuring window 110. Therefore, the opening time of the temperature measuring window 110 is usually very short, that is, the high-temperature gas inside the vacuum coating chamber 11 is almost not deposited on the temperature measuring device.

[0043] Exemplarily, the temperature measuring device 10 can be fixedly disposed around the temperature measuring window 110 by a support member and facing the temperature measuring window 110; of course, the temperature measuring device 10 can also be fixed in other ways, which will not be described one by one in the embodiments of the present application.

[0044] It should be understood that after the temperature measuring window 110 is closed, the temperature measuring device cannot measure the temperature of the evaporation boat through the temperature measuring window 110, and the high-temperature gas inside the vacuum coating chamber 11 will not be deposited on the temperature measuring device, which is beneficial to improve the accuracy of the temperature measurement data of the temperature measuring device.

[0045] It should be noted that one or more evaporation boats may be arranged inside the vacuum coating chamber. When multiple evaporation boats are arranged inside the vacuum coating chamber and the number of measurable points of the temperature measuring device is greater than or equal to the number of evaporation boats, the temperature measuring device may use one temperature measuring device 10 to measure the temperature of all evaporation boats through one temperature measuring window 110. It can be seen that the method of measuring the temperature of all evaporation boats inside the vacuum coating chamber 11 by one temperature measuring device 10 can save the cost of the measuring device.

[0046] When multiple evaporation boats are arranged inside the vacuum coating chamber and the number of measurable points of the temperature measuring device is less than the number of evaporation boats, the temperature measuring device may include multiple temperature measuring devices 10, and multiple temperature measuring windows 110 may be correspondingly arranged on the cavity body of the vacuum coating chamber 11. Different temperature measuring windows 110 are opposite to different evaporation boats arranged inside the vacuum coating chamber 11, so that each temperature measuring device 10 can measure the temperature of at least one evaporation boat opposite to it through the temperature measuring window 110 it is facing.

[0047] For example, assuming that six evaporation boats are arranged inside the vacuum coating chamber and the number of measurable points of the measuring device is two, the temperature measuring device needs to include three measuring devices 10, and three temperature measuring windows 110 can be correspondingly arranged on the cavity body of the vacuum coating chamber 11. Different temperature measuring windows 110 are opposite to the corresponding two evaporation boats inside the vacuum coating chamber 11, so that each temperature measuring device 10 can measure the temperature of the two evaporation boats opposite to it through the temperature measuring window 110 it is facing.

[0048] For example, the first measuring device 10 can measure the temperature of the evaporation boat a and the evaporation boat b facing it through the first temperature measuring window 110, the second measuring device 10 can measure the temperature of the evaporation boat c and the evaporation boat d facing it through the second temperature measuring window 110, and the third measuring device 10 can measure the temperature of the evaporation boat e and the evaporation boat f facing it through the third temperature measuring window 110.

[0049] It can be seen that the method of measuring the temperature of the corresponding evaporation boat inside the vacuum coating chamber 11 by using multiple temperature measuring devices 10 can help improve the accuracy of evaporation boat temperature detection.

[0050] It should be understood that, in the case where the number of measurable points of the measuring device is greater than the number of evaporation boats, the temperature measuring device may also include multiple measuring devices 10, and multiple temperature measuring windows 110 may be correspondingly provided on the cavity of the vacuum coating chamber 11, and different temperature measuring windows 110 are directly opposite to different evaporation boats provided inside the vacuum coating chamber 11, so that each temperature measuring device 10 can respectively measure the temperature of at least one evaporation boat directly facing through the temperature measuring window 110 it faces. In the embodiment of the present application, there may be a situation where multiple temperature measuring devices all measure the temperature of the same evaporation boat, and the temperature of the evaporation boat may be a temperature obtained by comprehensively calculating multiple temperature measurement data based on a preset measurement algorithm.

[0051] In summary, the temperature measuring device of the embodiment of the present application may include a temperature measuring device and a vacuum coating chamber, and a temperature measuring window that can be opened and closed is provided on the cavity of the vacuum coating chamber, and the temperature measuring window is directly opposite to the evaporation boat provided inside the vacuum coating chamber. The temperature measuring device is arranged toward the temperature measuring window, and after the temperature measuring window is opened, the temperature measuring device can measure the temperature of the evaporation boat through the temperature measuring window. Compared with the method of arranging an ambient temperature sensor in the vacuum chamber in the related art, the embodiment of the present application is provided with a temperature measuring window that can be opened and closed and directly opposite to the evaporation boat provided inside the vacuum coating chamber, and after the temperature measuring window is opened, the temperature measuring device can measure the temperature of the evaporation boat through the temperature measuring window. It can be seen that the temperature measuring device of the embodiment of the present application is arranged outside the vacuum coating chamber, and the temperature of the evaporation boat is measured through the openable temperature measuring window, so that the high-temperature gas inside the vacuum coating chamber will hardly be deposited on the temperature measuring device, which is conducive to improving the accuracy of the temperature measurement data of the temperature measuring device, thereby realizing non-contact accurate temperature measurement in the vacuum coating environment.

[0052] In some embodiments, Figure 2 The schematic diagram of the structure of the temperature measuring device provided in other embodiments of the present application is as follows: Figure 2 As shown, a flange device 12 may be provided on the cavity body of the vacuum coating cavity 11 of the embodiment of the present application, the flange device 12 may be provided with an opening, and a temperature measuring window 110 may be provided on the opening of the flange device 12, so that the temperature measuring device 10 can measure the temperature of the evaporation boat through the temperature measuring window 110.

[0053] It can be seen that in the embodiment of the present application, by setting a temperature measuring window at the opening of the flange device on the vacuum coating chamber body, the flexibility of setting the temperature measuring window can be increased, which is beneficial for the temperature measuring equipment to be set toward the temperature measuring window, so that the temperature of the evaporation boat can be measured through the temperature measuring window.

[0054] In some embodiments, Figure 3 The schematic diagram of the structure of the temperature measuring device provided in other embodiments of the present application is as follows: Figure 3As shown, on the basis of the above embodiments, in order to further improve the flexibility of setting the temperature measuring window, the vacuum coating chamber 11 of the embodiment of the present application may include a accommodating chamber portion 111 and a connecting chamber portion 112, and the connecting chamber portion 112 may be connected to the accommodating chamber portion 111.

[0055] Among them, the accommodating cavity portion 110 can be used to form a cavity space for accommodating the evaporation boat; the flange device 12 can be arranged on the connecting cavity portion 111. Since the connecting cavity portion 111 and the accommodating cavity portion 110 are connected, the temperature measuring window arranged at the opening of the flange device 12 can be directly opposite to the evaporation boat arranged in the accommodating cavity portion 110.

[0056] In some embodiments, Figure 4 This is a schematic diagram of the structure of the flange device provided in some embodiments of the present application. Based on the above embodiments, the structure of the flange device is exemplarily introduced and explained in the embodiments of the present application. Figure 4 As shown, the flange device 12 of the embodiment of the present application may include a front flange 120 (i.e., a flange close to the temperature measuring device 10) and a rear flange 121 (i.e., a flange close to the vacuum coating chamber 11) connected to each other. Exemplarily, the front flange 120 and the rear flange 121 may be connected by fasteners or snap-fits.

[0057] Furthermore, in order to increase the sealing performance of the temperature measuring device, a sealing ring 122 may be fixedly disposed between the front flange 120 and the rear flange 121 .

[0058] In the embodiment of the present application, both the front flange 120 and the rear flange 121 may be provided with openings, and the openings of the front flange 120 and the rear flange 121 are directly opposite to each other so that the temperature detection signal can pass through.

[0059] Exemplarily, the temperature measuring window 110 in the embodiment of the present application can be arranged on the opening of the front flange 121, which can increase the distance between the temperature measuring window and the evaporation boat, and further prevent the high-temperature gas inside the vacuum coating chamber from being deposited on the temperature measuring window, which is beneficial to improve the clarity of the temperature measuring window, thereby helping to further improve the accuracy of the temperature measurement data of the temperature measuring equipment.

[0060] For example, a movable cover plate 123 may be provided between the front flange 120 and the rear flange 121 in the embodiment of the present application. The cover plate 123 may block or unblock the opening provided on the rear flange 121 by moving, so as to achieve the effect of flexibly closing or opening the temperature measuring window 110.

[0061] Figure 5 A schematic diagram of the movement position of the cover plate provided in the embodiment of the present application, such as Figure 5As shown, when the cover plate 123 moves to the first position, the cover plate 123 can block the opening provided on the rear flange 121, and the temperature measuring window is in a closed state. When the cover plate 123 moves to the second position, the cover plate 123 can unblock the opening provided on the rear flange 121, and the temperature measuring window is in an open state.

[0062] For example, the flange device may also be provided with a cover plate adjustment member ( Figure 4 (not shown) so that the position of the cover plate 123 can be moved by the cover plate adjusting member. For example, the cover plate adjusting member may include but is not limited to a manual rotating member, or an electric rotating member.

[0063] In some embodiments, for ease of understanding, based on the above embodiments, the embodiment of the present application takes the example that the temperature measuring device includes a temperature measuring window and the cover plate adjustment part is a manual rotating part to exemplarily introduce and explain the overall structure of the temperature measuring device.

[0064] Figure 6 An exploded schematic diagram of a temperature measuring device provided in an embodiment of the present application, Figure 7 for Figure 6 A partial cross-sectional diagram along the A direction, combined with Figure 6 and Figure 7 As shown, the temperature measuring device of the embodiment of the present application may include a temperature measuring device ( Figure 6 and Figure 7 ), the vacuum coating chamber 11 and the flange device 12.

[0065] The vacuum coating chamber 11 may include a receiving chamber portion 110 and a connecting chamber portion 111, and the connecting chamber portion 111 may be connected to the receiving chamber portion 110. It should be noted that: Figure 7 The accommodating cavity portion 110 of the vacuum coating cavity 11 is not shown.

[0066] The flange device 12 may include: a front flange 120, a rear flange 121, a sealing ring 122, a cover plate 123 and a manual rotating member 124. The rear flange 121 may be disposed on the connecting cavity portion 111, and the front flange 120 and the rear flange 121 may be connected via fasteners. The fasteners may include but are not limited to fixing bolts disposed on the front flange 120 and fixing nuts disposed on the rear flange 121.

[0067] Exemplarily, a sealing ring 122 and a cover plate 123 are sequentially arranged between the rear flange 121 and the front flange 120. The position of the cover plate 123 can be moved by a manual rotating member 124.

[0068] It should be understood that the opening of the front flange 120, the opening of the rear flange 121 and the connecting cavity portion 111 can face the evaporation boat area in the accommodating cavity portion 110, so that all evaporation boats can be observed through the temperature measuring window 110, so as to facilitate temperature measurement by the temperature measuring equipment.

[0069] The temperature measuring window 110 may be disposed on the opening of the front flange 121 , and the temperature measuring window 110 may be provided with germanium glass G. The temperature measuring device may measure the temperature of each evaporation boat in the accommodating chamber 110 through the temperature measuring window 110 .

[0070] In summary, the temperature measuring device of the embodiment of the present application, by providing a flange device on the vacuum coating chamber, a temperature measuring window on the opening of the front flange in the flange device and a movable cover plate between the front and rear flanges, can open the cover plate when the temperature measuring device performs temperature detection to measure the temperature of the evaporation boat through the temperature measuring window, and close the cover plate when the temperature measuring device does not perform temperature detection, so that the high-temperature gas inside the empty coating chamber is hardly deposited on the temperature measuring window, which can improve the clarity of the temperature measuring window, which is beneficial to improving the accuracy of the temperature measurement data of the temperature measuring device, thereby realizing non-contact and accurate temperature measurement in the vacuum coating environment.

[0071] In some embodiments, based on the above embodiments, the temperature measuring device of the embodiment of the present application may further include a control device, wherein the control device can be connected to the temperature measuring device and the evaporation boat inside the vacuum coating chamber to adjust the evaporation power of the evaporation boat according to the temperature measurement data output by the temperature measuring device.

[0072] Exemplarily, the control device uses a PID algorithm according to the temperature measurement data output by the temperature measuring device to adjust the evaporation power of the evaporation boat inside the vacuum coating chamber in real time; of course, other algorithms can also be used to adjust the evaporation power of the evaporation boat.

[0073] It should be understood that when the vacuum coating chamber includes multiple evaporation boats, the control device can adjust the evaporation power of each evaporation boat according to the temperature measurement data of each evaporation boat output by the temperature measuring device, so that the temperature state of each evaporation boat can be consistent, which is beneficial to improving the stability of the coating quality.

[0074] Exemplarily, for each evaporation boat, the control device can determine the temperature of the evaporation boat by taking the average, the maximum value or the minimum value of multiple temperature measurement data of the evaporation boat output by the temperature measuring device, and then adjust the evaporation power of the evaporation boat according to the temperature of the evaporation boat, which is beneficial to further improve the stability of the coating quality.

[0075] Figure 8 A schematic diagram of the automatic adjustment process of the evaporation power provided in the embodiment of the present application is shown in FIG. Figure 8As shown, the process of the embodiment of the present application may include the following steps:

[0076] 1. During the coating process, the temperature measuring equipment collects the temperature measurement data of each evaporation boat.

[0077] Exemplarily, the temperature measuring device may collect temperature measurement data of each evaporation boat when it is detected that a preset detection condition is met, wherein the preset detection condition may include but is not limited to: reaching a preset interval time or receiving a detection instruction.

[0078] 2. The control device receives the temperature measurement data of each evaporation boat output by the temperature measuring device.

[0079] 3. The control device determines whether the temperature measurement data of each evaporation boat meets the preset temperature range.

[0080] 4. When it is determined that the temperature measurement data of any evaporation boat is higher than the preset temperature range, or lower than the preset temperature range, the control device determines the power adjustment amount corresponding to the evaporation boat, and adjusts the evaporation power of the evaporation boat according to the power adjustment amount.

[0081] In the case of determining that the temperature measurement data of any evaporation boat belongs to the preset temperature range, the control device may determine that there is no need to adjust the evaporation power of the evaporation boat.

[0082] It should be noted that the above steps 3 and 4 are cyclic steps. After executing step 4, the process returns to step 3, and so on, until the coating process is completed.

[0083] In summary, in the embodiments of the present application, by adjusting the evaporation power of the evaporation boat according to the temperature measurement data output by the temperature measuring device through the control device, automatic closed-loop control of the coating process can be achieved, which is beneficial to improving the stability of the coating quality.

[0084] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them; although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein by equivalents; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application, and they should all be included in the scope of the claims and specification of the present application. In particular, as long as there is no structural conflict, the various technical features mentioned in the various embodiments can be combined in any way. The present application is not limited to the specific embodiments disclosed herein, but includes all technical solutions that fall within the scope of the claims.

Claims

1. A temperature measuring device, characterized in that: The temperature measuring device comprises a temperature measuring device and a vacuum coating chamber, wherein an openable and closable temperature measuring window is arranged on the body of the vacuum coating chamber, and the temperature measuring window is directly opposite to the evaporation boat arranged inside the vacuum coating chamber; The temperature measuring device may be disposed toward the temperature measuring window. After the temperature measuring window is opened, the temperature measuring device may measure the temperature of the evaporation boat through the temperature measuring window.

2. The temperature measuring device according to claim 1, characterized in that: A flange device is arranged on the cavity body of the vacuum coating cavity, the flange device is provided with an opening, and the temperature measuring window is arranged on the opening of the flange device.

3. The temperature measuring device according to claim 2, characterized in that: The flange device comprises a front flange and a rear flange connected to each other, the front flange and the rear flange are both provided with openings, and the openings of the front flange and the rear flange are directly opposite, and the temperature measuring window is arranged on the opening of the front flange.

4. The temperature measuring device according to claim 3, characterized in that: A sealing ring is fixedly arranged between the front flange and the rear flange.

5. The temperature measuring device according to claim 3, characterized in that: A movable cover plate is arranged between the front flange and the rear flange, and the cover plate can cover or release the opening arranged on the rear flange by moving.

6. The temperature measuring device according to any one of claims 2 to 5, characterized in that: The vacuum coating chamber comprises a containing chamber portion and a connecting chamber portion, wherein the containing chamber portion is used to form a chamber space for containing the evaporation boat, the connecting chamber portion is communicated with the containing chamber portion, and the flange device is arranged on the connecting chamber portion.

7. The temperature measuring device according to any one of claims 1 to 5, characterized in that: The temperature measuring window comprises germanium glass.

8. The temperature measuring device according to any one of claims 1 to 5, characterized in that: The temperature measuring device includes: an infrared thermometer or a laser thermometer.

9. The temperature measuring device according to any one of claims 1 to 5, characterized in that: The temperature measuring device comprises a plurality of the temperature measuring devices, and a plurality of the temperature measuring windows are correspondingly arranged on the cavity body of the vacuum coating cavity, and different temperature measuring windows are directly opposite to different evaporation boats arranged inside the vacuum coating cavity.

10. The temperature measuring device according to any one of claims 1 to 5, characterized in that: The temperature measuring device further includes a control device, which is connected to the temperature measuring device and the evaporation boat to adjust the evaporation power of the evaporation boat according to the temperature measurement data output by the temperature measuring device.

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