Chemical vapor deposition furnace

Abstract

The utility model particularly relates to a chemical vapor deposition furnace, and belongs to the technical field of chemical vapor deposition. The chemical vapor deposition furnace comprises a furnace body, a crucible, a crucible cover and a deposition chamber are sequentially arranged in the furnace body from bottom to top, the chemical vapor deposition furnace further comprises two moving assemblies, the crucible cover and the deposition chamber are arranged between the two moving assemblies, and each moving assembly comprises a supporting part, a lifting part, a sliding part and an adjusting part. The supporting part extends vertically and is contained in the furnace body. The lifting part is arranged on the supporting part in a sleeving mode, the lifting part is provided with a sliding rail extending in the horizontal direction, the sliding rail comprises two side wall parts which are oppositely arranged, and the side wall parts are provided with strip-shaped holes extending horizontally. The sliding part is slidably connected to the sliding rail and provided with a displacement guide rail, the crucible cover and the deposition chamber are each provided with a matching part, and the displacement guide rail and the matching parts are matched to move the crucible cover or the deposition chamber. The adjusting part penetrates through the strip-shaped hole and is used for limiting the sliding part.

Description

Technical Field

[0001] The utility model belongs to the technical field of chemical vapor deposition, and in particular relates to a chemical vapor deposition furnace. Background Art

[0002] Chemical Vapor Deposition (CVD) is a process in which gaseous or vaporous substances react in the gas phase or at the gas-solid interface to form solid deposits. The chemical vapor deposition process includes the diffusion of the reaction gas to the substrate surface, the adsorption of the reaction gas on the substrate surface, the chemical reaction on the substrate surface to form solid deposits, and the separation of the generated gas phase byproducts from the substrate surface.

[0003] In production activities, a chemical vapor deposition furnace is used to carry out the above process. The chemical vapor deposition furnace usually includes a crucible, a crucible cover is provided on the crucible, and a deposition chamber is provided on the crucible cover. When inspecting and maintaining the interior of the chemical vapor deposition furnace, there is a situation where the deposition chamber and the crucible cover and other components need to be moved, that is, the deposition chamber and the crucible cover need to be movably arranged in the furnace body through moving parts. However, the temperature of the chemical vapor deposition furnace is relatively high during operation, and conventional moving parts are easily damaged in such a high temperature environment. Utility Model Content

[0004] The utility model aims to provide a chemical vapor deposition furnace. The chemical vapor deposition furnace is provided with a moving component for moving a crucible cover and a deposition chamber in a furnace body. The moving component has the advantage of high temperature resistance.

[0005] In order to achieve the above-mentioned purpose of the utility model, the technical solution adopted by the utility model is: the embodiment of the present application provides a chemical vapor deposition furnace, including a furnace body, in which a crucible, a crucible cover and a deposition chamber are arranged in sequence from bottom to top, and also includes a moving assembly, two moving assemblies are provided, the crucible cover and the deposition chamber are arranged between the two moving assemblies, and the moving assembly includes a supporting part, a lifting part, a sliding part and an adjusting part. The supporting part extends vertically, and the supporting part is accommodated in the furnace body. The lifting part is sleeved on the supporting part, and the lifting part is provided with a slide rail extending in the horizontal direction, and the slide rail includes two side wall parts arranged oppositely, and the side wall part is provided with a horizontally extending strip hole. The sliding part is slidably connected to the slide rail, and the sliding part is provided with a displacement guide rail, and the crucible cover and the deposition chamber are respectively provided with matching parts, and the displacement guide rail and the matching part cooperate to move the crucible cover or the deposition chamber. The adjusting part is penetrated in the strip hole to limit the sliding part.

[0006] In some embodiments, the support portion is provided with a plurality of through holes at intervals along the vertical direction, the moving component further comprises a first latch, the first latch is selectively inserted into the through hole, and the bottom of the lifting portion abuts against the first latch.

[0007] In some embodiments, the adjustment portion includes two oppositely disposed side walls and an end wall connecting the two side walls, and the end wall is inclined.

[0008] In some embodiments, the displacement guide rail includes a first surface facing the matching portion, the first surface is provided with a recessed portion, a plurality of rollers are rotatably arranged in the recessed portion, and the peripheral walls of the rollers are used to contact the matching portion.

[0009] In some embodiments, a roller frame is also included, the roller frame is accommodated in the recessed portion, and the roller body is rotatably connected to the roller frame.

[0010] In some embodiments, an end of the recess is provided with an opening.

[0011] In some embodiments, a driving unit is further included, which is selectively inserted into the through hole and is used to install the hydraulic cylinder.

[0012] In some embodiments, the lifting part is provided with an abutting part, which includes a first section extending in a vertical direction away from the driving part and a second section extending horizontally, and the second section is used for the hydraulic cylinder to abut.

[0013] In some embodiments, the abutting portion is disposed on a side of the supporting portion away from the crucible cover.

[0014] In some embodiments, along the extension direction of the displacement guide rail, two sliding parts are provided, and the two sliding parts are connected to one displacement guide rail.

[0015] The utility model has the following beneficial effects:

[0016] 1. The moving component has the characteristics of simple structure, and the supporting part, lifting part, sliding part and adjusting part are all block structures with simple contours. Therefore, compared with traditional moving parts with fine structures, such as screw rods or linear guides, it has better high temperature resistance and is suitable for use in high temperature environments.

[0017] 2. When it is necessary to move the deposition chamber, first move the lifting part so that the displacement guide rail moves to the bottom of the matching part of the deposition chamber, then insert the adjustment part into the strip hole from the second side, push the sliding part to move toward the first side, and then move the lifting part upward so that the displacement guide rail contacts the matching part of the deposition chamber, so that the deposition chamber is lifted, and under the action of the displacement guide rail, the deposition chamber can be moved, and the same is true for moving the crucible cover. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural schematic diagram of a chemical vapor deposition furnace of the utility model;

[0019] Figure 2 for Figure 1 A magnified image of point A;

[0020] Figure 3It is a structural schematic diagram of the mobile component of the utility model.

[0021] Figure numbers: 1-furnace body, 2-crucible, 3-crucible cover, 4-deposition chamber, 5-support part, 6-through hole, 7-lifting part, 8-first latch, 9-slide rail, 10-sliding part, 11-displacement guide rail, 12-adjusting part, 13-driving part, 14-hydraulic cylinder, 15-resting part, 16-matching part, 17-moving assembly, 18-roller body, 19-roller frame, 20-strip hole, 21-side wall, 22-end wall. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Unless otherwise specified, the technical means used in the embodiments are conventional means well known to those skilled in the art.

[0023] In the description of the present invention, it should be understood that the terms "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0024] The embodiment of the present application provides a chemical vapor deposition furnace, comprising a furnace body 1, in which a crucible 2, a crucible cover 3 and a deposition chamber 4 are sequentially arranged from bottom to top, and a moving assembly 17 is also included, wherein two moving assemblies 17 are provided, and the crucible cover 3 and the deposition chamber 4 are arranged between the two moving assemblies 17, and the moving assembly 17 includes a support portion 5, a lifting portion 7, a sliding portion 10 and an adjusting portion 12. The support portion 5 extends vertically, and the support portion 5 is accommodated in the furnace body 1. The lifting portion 7 is sleeved on the support portion 5, and the lifting portion 7 is provided with a slide rail 9 extending in a horizontal direction, and the slide rail 9 includes two side wall portions arranged oppositely, and the side wall portion is provided with a horizontally extending strip hole 20. The sliding portion 10 is slidably connected to the slide rail 9, and the sliding portion 10 is provided with a displacement guide rail 11, and the crucible cover 3 and the deposition chamber 4 are respectively provided with a matching portion 16, and the displacement guide rail 11 and the matching portion 16 cooperate to move the crucible cover 3 or the deposition chamber 4. The adjusting portion 12 is penetrated in the strip hole 20, and is used to limit the sliding portion 10.

[0025] The lifting part 7 is sleeved on the supporting part 5 so that the lifting part 7 can move in the vertical direction.

[0026] The sliding part 10 is slidably connected to the slide rail 9 provided on the lifting part 7 , so that the sliding part 10 can move in the horizontal direction, and further the displacement guide rail 11 provided on the sliding part 10 can also move in the horizontal direction.

[0027] In the horizontal direction, the strip hole 20 may include a first side close to the crucible cover 3 and a second side away from the crucible cover 3. When the adjustment portion 12 is inserted into the strip hole 20 from the first side, the adjustment portion 12 pushes the sliding portion 10 to move toward the second side. Conversely, when the adjustment portion 12 is inserted into the strip hole 20 from the second side, the adjustment portion 12 pushes the sliding portion 10 to move toward the first side, so that the adjustment portion 12 can drive the sliding portion 10 to move. At the same time, since the adjustment portion 12 is inserted into the strip hole 20, the risk of the sliding portion 10 moving relative to the slide rail 9 is reduced.

[0028] When the deposition chamber 4 needs to be moved, the lifting part 7 is first moved so that the displacement guide rail 11 moves to below the matching part 16 of the deposition chamber 4, and then the adjustment part 12 is inserted into the strip hole 20 from the second side to push the sliding part 10 to move toward the first side, and then the lifting part 7 is moved upward so that the displacement guide rail 11 contacts the matching part 16 of the deposition chamber 4, so that the deposition chamber 4 is lifted, and the deposition chamber 4 can be moved under the action of the displacement guide rail 11. The extension direction of the displacement guide rail 11 can be configured to enable the deposition chamber 4 or the crucible cover 3 to move from the furnace body 1 to the furnace mouth.

[0029] Two lifting parts 7 can be provided on the support part 5, and the displacement guide rails 11 of the two lifting parts 7 can be used to move the deposition chamber 4 and the crucible cover 3 respectively. When the deposition chamber 4 is lifted, the crucible cover 3 can be lifted and moved by the corresponding displacement guide rails 11.

[0030] The moving component 17 of the embodiment of the present application has the characteristics of simple structure, and the supporting part 5, the lifting part 7, the sliding part 10 and the adjusting part 12 are all block structures with simple contours. Therefore, compared with traditional moving parts with fine structures, such as screw rods or linear guides, they have better high temperature resistance.

[0031] Furthermore, each component of the moving component 17 can be made of high temperature resistant material, which further improves the high temperature resistance of the moving component 17.

[0032] In some embodiments, along the vertical direction, the support portion 5 is provided with a plurality of through holes 6 at intervals, and the moving component 17 further includes a first latch 8 , which is selectively inserted into the through hole 6 , and the bottom of the lifting portion 7 abuts against the first latch 8 .

[0033] The first latch 8 is used to limit the position of the lifting portion 7 on the supporting portion 5 , that is, when the first slot is inserted into the through hole 6 , the lifting portion 7 cannot pass through the first latch 8 .

[0034] The bottom of the lifting part 7 is against the first latch 8, so that the first latch 8 will not hinder the rise of the lifting part 7. For example, when the lifting part 7 is lifted by the hydraulic cylinder 14, it is inconvenient to pull out the first latch 8. At this time, the first latch 8 also plays a safety role. That is, if the hydraulic cylinder 14 is damaged and the lifting part 7 falls, the first latch 8 can prevent the lifting part 7 from falling further.

[0035] In some embodiments, the adjusting portion 12 includes two oppositely disposed side walls 21 and an end wall 22 connecting the two side walls 21 , and the end wall 22 is inclined.

[0036] The end wall 22 is tilted so that one side of the adjustment part 12 is in the shape of a right triangle. This structure facilitates the insertion of the adjustment part 12 into the strip hole 20 on the one hand, and on the other hand, when the adjustment part 12 is inserted into the strip hole 20, the end wall 22 contacts the sliding part 10, so that the adjustment part 12 can push the sliding part 10 to move.

[0037] In some embodiments, the displacement guide rail 11 includes a first surface facing the matching portion 16 , the first surface is provided with a recessed portion, a plurality of rollers 18 are rotatably disposed in the recessed portion, and the peripheral walls of the rollers 18 are used to contact the matching portion 16 .

[0038] When the displacement guide rail 11 moves toward the matching portion 16 , the roller body 18 abuts against the matching portion 16 , reducing the resistance of the matching portion 16 when moving along the displacement guide rail 11 , making it easier to move the deposition chamber 4 or the crucible cover 3 .

[0039] In some embodiments, a roller frame 19 is further included. The roller frame 19 is accommodated in the recessed portion, and the roller body 18 is rotatably connected to the roller frame 19 .

[0040] The roller frame 19 is accommodated in the recessed portion, so that the roller frame 19 can be detachably connected to the displacement guide rail 11. When the furnace body 1 works normally, the roller frame 19 can be removed, reducing the risk of structural damage to the roller body 18 at high temperatures.

[0041] In some embodiments, an end of the recess is provided with an opening.

[0042] The opening of the side wall 21 of the recessed portion is used for inserting the roller frame 19 into the recessed portion. Compared with inserting the roller frame 19 into the recessed portion from the first surface, the operation is more convenient and quick.

[0043] After the roller frame 19 is placed in the recessed portion, bolts or blocks can be set on the displacement guide rail 11 to block the roller frame 19 at the opening, thereby reducing the risk of the roller frame 19 escaping from the opening when moving the deposition chamber 4 or the crucible cover 3.

[0044] In some embodiments, a driving unit 13 is further included. The driving unit 13 is selectively inserted into the through hole 6 , and the driving unit 13 is used to install the hydraulic cylinder 14 .

[0045] The driving part 13 is inserted into the through hole 6 of the supporting part 5 so that the driving part 13 can be connected to the supporting part 5. On the one hand, the position of the driving part 13 relative to the supporting part 5 is adjustable, which reduces the lifting stroke requirement of the hydraulic cylinder 14. On the other hand, after the deposition chamber 4 or the crucible cover 3 is moved, the hydraulic cylinder 14 can be removed from the supporting part 5 by pulling the driving part 13 out of the through hole 6, so that the hydraulic cylinder 14 will not be in a high temperature environment.

[0046] In some embodiments, the lifting part 7 is provided with abutting part 15 , which includes a first section extending in a vertical direction away from the driving part 13 and a second section extending horizontally, and the second section is used for the hydraulic cylinder 14 to abut.

[0047] The abutment portion 15 allows the distance between the driving portion 13 and the lifting portion 7 to be closer, which is convenient for operation in a narrow space. For example, when moving the crucible cover 3, the hydraulic cylinder 14 may not be installed because the crucible cover 3 is close to the bottom wall of the furnace body 1, resulting in a small operating space. The first section increases the distance between the second section and the driving portion 13, so that even if the driving portion 13 and the lifting portion 7 are close, the hydraulic cylinder 14 can still work normally.

[0048] In some embodiments, the abutting portion 15 is disposed on a side of the supporting portion 5 away from the crucible cover 3 .

[0049] The abutment portion 15 is disposed on the side of the support portion 5 away from the crucible cover 3 , and the hydraulic cylinder 14 is also disposed on the side of the support portion 5 away from the crucible cover 3 , so as to facilitate lifting the crucible cover 3 by the hydraulic cylinder 14 in a narrow space.

[0050] In some embodiments, along the extension direction of the displacement guide rail 11 , two sliding parts 10 are provided, and two sliding parts 10 are connected to one displacement guide rail 11 .

[0051] Correspondingly, the support part 5 can also be set to two, and the sliding parts 10 of the two support parts 5 are connected to a displacement guide rail 11, so that the displacement guide rail 11 can be set longer, increasing the moving stroke of the deposition chamber 4 or the crucible cover 3 through the displacement guide rail 11.

[0052] The above embodiments are only descriptions of the preferred methods of the present invention, and are not intended to limit the scope of the present invention. Without departing from the design spirit of the present invention, various deformations, modifications, and substitutions made by ordinary technicians in this field to the technical solutions of the present invention should all fall within the protection scope determined by the claims of the present invention.

Claims

1. A chemical vapor deposition furnace, comprising a furnace body (1), wherein a crucible (2), a crucible cover (3) and a deposition chamber (4) are sequentially arranged in the furnace body (1) from bottom to top, characterized in that: The invention also comprises a moving assembly (17), wherein two moving assemblies (17) are provided, the crucible cover (3) and the deposition chamber (4) are provided between the two moving assemblies (17), and the moving assembly (17) comprises: A support portion (5) extending vertically, wherein the support portion (5) is accommodated in the furnace body (1); A lifting part (7) is sleeved on the supporting part (5), the lifting part (7) is provided with a slide rail (9) extending in a horizontal direction, the slide rail (9) comprises two side walls arranged opposite to each other, and the side walls are provided with a horizontally extending strip hole (20); A sliding part (10) is slidably connected to the slide rail (9), the sliding part (10) is provided with a displacement guide rail (11), the crucible cover (3) and the deposition chamber (4) are respectively provided with a matching part (16), and the displacement guide rail (11) and the matching part (16) cooperate to move the crucible cover (3) or the deposition chamber (4); The adjusting portion (12) is passed through the strip-shaped hole (20) and is used to limit the position of the sliding portion (10).

2. The chemical vapor deposition furnace according to claim 1, characterized in that: In the vertical direction, the support portion (5) is provided with a plurality of through holes (6) at intervals, and the moving component (17) further comprises a first latch (8), wherein the first latch (8) is selectively inserted into the through hole (6), and the bottom of the lifting portion (7) abuts against the first latch (8).

3. The chemical vapor deposition furnace according to claim 1, characterized in that: The adjustment portion (12) comprises two side walls (21) arranged opposite to each other and an end wall (22) connecting the two side walls (21), wherein the end wall (22) is arranged obliquely.

4. The chemical vapor deposition furnace according to claim 1, characterized in that: The displacement guide rail (11) comprises a first surface facing the matching portion (16), the first surface being provided with a recessed portion, a plurality of rollers (18) being rotatably arranged in the recessed portion, and the peripheral walls of the rollers (18) being used to contact the matching portion (16).

5. The chemical vapor deposition furnace according to claim 4, characterized in that: It also comprises a roller frame (19), wherein the roller frame (19) is accommodated in the recessed portion, and the roller body (18) is rotatably connected to the roller frame (19).

6. The chemical vapor deposition furnace according to claim 5, characterized in that: An opening is provided at the end of the recessed portion.

7. The chemical vapor deposition furnace according to claim 2, characterized in that: It also comprises a driving part (13), wherein the driving part (13) is selectively inserted into the through hole (6), and the driving part (13) is used to install a hydraulic cylinder (14).

8. The chemical vapor deposition furnace according to claim 7, characterized in that: The lifting part (7) is provided with a supporting part (15), and the supporting part (15) comprises a first section extending in a vertical direction away from the driving part (13) and a second section extending horizontally, wherein the second section is used for the hydraulic cylinder (14) to abut against.

9. The chemical vapor deposition furnace according to claim 8, characterized in that: The abutting portion (15) is arranged on a side of the supporting portion (5) away from the crucible cover (3).

10. The chemical vapor deposition furnace according to claim 1, characterized in that: Along the extension direction of the displacement guide rail (11), two sliding parts (10) are provided, and two sliding parts (10) are connected to one displacement guide rail (11).

Images