Temperature measurer adjusting device for SiC single crystal growth furnace

Abstract

The utility model discloses a thermodetector adjusting device for a SiC single crystal growth furnace, which comprises a sliding table fixing frame, the lower end of the sliding table fixing frame is mounted on a furnace cover, and a transverse moving sliding table capable of transversely moving is mounted on the sliding table fixing frame through a transverse moving mechanism; a longitudinal moving sliding table capable of moving longitudinally is mounted on the transverse moving sliding table through a longitudinal moving mechanism; a thermodetector installation plate capable of being adjusted in a pitching mode is installed on the longitudinal moving sliding table through a pitching adjusting mechanism, and a thermodetector is fixedly installed on the thermodetector installation plate. According to the utility model, the position of the thermodetector can be efficiently adjusted by a single person, and the adjusting process is convenient, flexible and safe.

Description

Technical Field

[0001] The utility model relates to an improvement of a SiC single crystal growth furnace, in particular to a temperature measuring instrument regulating device used in a SiC single crystal growth furnace, and belongs to the technical field of SiC single crystal growth. Background Art

[0002] Physical vapor transport (PVT) is one of the mainstream methods for preparing silicon carbide (SiC) crystals. The PVT method grows SiC single crystals. Usually, SiC crystals are placed on the top of a graphite crucible as seed crystals, and Si and C powders are placed on the bottom of a graphite crucible as source materials. An induction coil is designed for heating, and the temperature reaches about 2300°C. The growth temperature gradient is controlled, and argon gas is introduced to control the pressure in the growth chamber. During the crystal growth process, the seed crystal is attached to the top with a lower temperature, and the SiC source temperature at the bottom is higher, and there is a certain temperature gradient between the two. During the crystal growth process, the source material sublimates into a gas phase substance and crystallizes on the seed crystal at the cold end, and a SiC single crystal is obtained.

[0003] The SiC single crystal growth process adopts the infrared temperature measurement method. In the SiC single crystal growth furnace structure, the infrared thermometer 1 is usually installed above the equipment furnace cover 2 and below the bottom cover, that is, the temperature measurement method is divided into top temperature measurement and bottom temperature measurement. In actual applications, top temperature measurement is mostly used, such as Figure 1 As shown. The thermometer 1 monitors the temperature of the center hole of the graphite crucible 4 in the quartz growth chamber through the quartz observation window 3. During the process, the temperature measuring lens of the thermometer needs to be aligned with the center hole at the top of the graphite crucible to ensure the accuracy of the temperature measured by the thermometer. The temperature range needs to be strictly controlled during the actual process growth process to ensure that qualified crystals are obtained. Since the chamber is all black after the furnace is just loaded, it is impossible to determine the position of the center hole at the top of the graphite crucible. In actual applications, it is generally heated for a period of time until the center hole at the top of the graphite crucible appears red, and then the position of the thermometer is adjusted according to the red area. Since it is impossible to ensure that the position of the crucible is exactly the same as that of the previous furnace each time the furnace is loaded, the position of the thermometer needs to be adjusted after heating for each furnace to ensure that the temperature measuring lens of the thermometer is aligned with the center hole at the top of the graphite crucible to ensure the accuracy of the measured temperature. Therefore, how to accurately, conveniently and safely complete the adjustment of the position of the thermometer is of great significance to SiC single crystal growth furnace equipment.

[0004] In the prior art, the position of the thermometer is adjusted completely manually. The thermometer can be adjusted horizontally and vertically. Figure 2 The thermometer mounting bracket 5 is a two-semicircle structure with mounting slots 6, and the longitudinal adjustment of the thermometer can be completed by adjusting screws 7.

[0005] The thermometer mounting bracket 5 is fixed on the bracket mounting plate 8, and the bracket can move laterally on the bracket mounting plate to drive the thermometer to adjust within the range of the bracket transverse adjustment hole position 9, thereby completing the transverse adjustment of the thermometer.

[0006] In the prior art, after the graphite crucible is heated to the point where the center hole at the top turns red, one operator monitors the infrared temperature measurement video image below the equipment, and another operator adjusts the thermometer horizontally and vertically above the equipment. Through the continuous cooperation of the two operators, when the temperature measurement center point mark "+" of the thermometer in the temperature measurement video image is located in the red center area of ​​the center hole of the graphite crucible, Figure 3 As shown in the figure, it means that the thermometer lens has been aligned with the center hole on the top of the graphite crucible, thus completing the adjustment of the thermometer position.

[0007] The disadvantages of the prior art solutions are as follows:

[0008] 1. When adjusting the position of the thermometer, at least two operators are required to cooperate with each other, and the operation needs to be confirmed repeatedly, which has high labor costs and low adjustment accuracy;

[0009] 2. The adjustment is completely done manually, and it is a high-altitude operation above the top of the upper cover, which is very inconvenient to operate and has low adjustment efficiency;

[0010] 3. Each time the thermometer position is adjusted, the equipment is in a high-temperature heating process, the temperature of the upper cover is high, and the operator is at a high risk of scalding;

[0011] 4. It can only be adjusted horizontally in the horizontal direction, but not in the vertical direction, which cannot meet the angle adjustment requirements of the thermometer. Utility Model Content

[0012] In view of the above-mentioned deficiencies in the prior art, the purpose of the present invention is to provide a temperature measuring instrument adjustment device for a SiC single crystal growth furnace. The present invention can realize efficient position adjustment of the temperature measuring instrument by a single person, and the adjustment process is convenient, flexible and safe.

[0013] The technical solution of the utility model is achieved in this way:

[0014] A temperature measuring instrument adjustment device for a SiC single crystal growth furnace comprises a slide fixing frame, the lower end of which is mounted on a furnace cover, a transverse movable slide which can be moved laterally is mounted on the slide fixing frame via a transverse movable mechanism; a longitudinal movable slide which can be moved longitudinally is mounted on the transverse movable slide via a longitudinal movable mechanism; a pitch-adjustable temperature measuring instrument mounting plate is mounted on the longitudinal movable slide via a pitch adjusting mechanism, and the temperature measuring instrument is fixedly mounted on the temperature measuring instrument mounting plate.

[0015] Furthermore, the slide fixing frame is composed of a vertical fixing plate and a horizontal fixing plate; the lower end of the vertical fixing plate is installed on the upper furnace cover, and one end of the horizontal fixing plate is horizontally installed on the upper end of the vertical fixing plate; the lateral moving mechanism is arranged on the horizontal fixing plate.

[0016] Furthermore, the transverse movement mechanism includes a transverse movement guide rail and a transverse movement motor. The transverse movement guide rail is laterally arranged on the upper surface of the horizontal fixed plate. The transverse movement motor is fixedly installed at the other end of the horizontal fixed plate. The output shaft of the transverse movement motor is threadedly connected to the transverse movement slide through a screw. The transverse movement slide is slidably matched with the transverse movement guide rail and can move back and forth along the transverse movement guide rail under the drive of the transverse movement motor.

[0017] Furthermore, the longitudinal moving mechanism includes a longitudinal moving guide rail and a longitudinal moving motor. The longitudinal moving guide rail is longitudinally arranged on the upper surface of the transverse moving slide. The longitudinal moving motor is fixedly installed at one end of the transverse moving slide. The output shaft of the longitudinal moving motor is threadedly connected to the longitudinal moving slide through a screw. The longitudinal moving slide is slidably matched with the longitudinal moving guide rail and can move back and forth along the longitudinal moving guide rail under the drive of the longitudinal moving motor.

[0018] Furthermore, the lateral moving guide rails are two parallel guide rails suspended above the horizontal fixed plate; the lateral moving slide is provided with guide rail holes corresponding to the two lateral moving guide rails; the lateral moving guide rails pass through the guide rail holes on the lateral moving slide; the output shaft of the lateral moving motor and the corresponding screw are located between the two lateral moving guide rails;

[0019] The longitudinal moving guide rails are two parallel ones and are suspended above the transverse moving slide; the longitudinal moving slide is provided with guide rail holes corresponding to the two longitudinal moving guide rails; the longitudinal moving guide rails pass through the guide rail holes on the longitudinal moving slide; the output shaft of the longitudinal moving motor and the corresponding screw are located between the two longitudinal moving guide rails.

[0020] Furthermore, the longitudinal movable slide is connected to the pitch adjustment mechanism through a cantilever so that the temperature measuring instrument is suspended in the air and away from the longitudinal movable slide; one end of the cantilever is fixedly connected to the longitudinal movable slide, and the pitch adjustment mechanism is installed at the other end of the cantilever.

[0021] Furthermore, the pitch adjustment mechanism includes an X-axis pitch slide and a Y-axis pitch slide whose adjustment axes are perpendicular to each other, the slide base of the X-axis pitch slide is horizontally fixedly installed at the other end of the cantilever; the slide base of the Y-axis pitch slide is fixedly installed on the sliding component of the X-axis pitch slide; when the sliding component of the X-axis pitch slide is centered, the slide base of the Y-axis pitch slide is in a horizontal state; the thermometer mounting plate is fixedly installed on the sliding component of the Y-axis pitch slide; when the sliding component of the Y-axis pitch slide is centered, the thermometer mounting plate is in a horizontal state.

[0022] Furthermore, it also includes an operation panel, the operation panel has a display screen, the thermometer is connected to the display screen to provide the temperature measurement video image of the thermometer to the display screen for display; two lateral movement operation buttons are provided on the operation panel to control the lateral movement motor to rotate forward or reverse, thereby driving the lateral movement slide to move left or right;

[0023] Two longitudinal movement operation buttons are arranged on the operation panel to control the longitudinal movement motor to rotate forward or reverse, thereby driving the longitudinal movement slide to move forward or backward.

[0024] Furthermore, lateral limit sensors are installed at both ends of the horizontal fixed plate, and the lateral limit sensors are connected to the lateral movement motor; when the lateral movement slide moves to both ends of the horizontal fixed plate, the lateral limit sensors will be triggered and the lateral movement motor will stop;

[0025] Longitudinal limit sensors are installed at both ends of the transverse moving slide, and the longitudinal limit sensors are connected to the longitudinal moving motor; when the longitudinal moving slide moves to both ends of the transverse moving slide, the longitudinal limit sensors will be triggered and the longitudinal moving motor will stop.

[0026] Compared with the prior art, the utility model has the following beneficial effects:

[0027] 1. Each time the temperature measuring instrument position is adjusted, only one operator is needed to complete it efficiently, which greatly saves labor costs and time costs;

[0028] 2. When adjusting the position of the thermometer, there is no need to climb up to operate, and the operation can be completed in front of the device display screen, which greatly improves convenience and safety;

[0029] 3. Not only can the horizontal and vertical adjustments be made, but also the pitch angle adjustment of the thermometer can be made, taking into account both horizontal and pitch angle adjustments to meet more usage needs;

[0030] 4. Combined with the temperature measurement video image, the high-speed mode can be used to quickly complete the rough adjustment, and the low-speed mode can be used to accurately complete the positioning of the thermometer, taking into account both efficiency and accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 Schematic diagram of temperature measurement in SiC single crystal growth furnace.

[0032] Figure 2 It is a schematic diagram of the adjustment structure of the thermometer in the prior art.

[0033] Figure 3 This is a schematic diagram of the temperature measurement video image.

[0034] Figure 4 This is a schematic diagram of the horizontal and vertical adjustment scheme of the thermometer of the utility model (the same applies to the XY axis pitch adjustment).

[0035] Figure 5 It is a schematic diagram of the horizontal and vertical adjustment mechanism of the utility model.

[0036] Figure 6 This is a structural schematic diagram of the utility model in which the pitch adjustment mechanism is installed on a longitudinal moving slide.

[0037] Figure 7 This is a schematic diagram of an example of the horizontal adjustment operation of the thermometer of the utility model.

[0038] Figure 8 Schematic diagram of the pitch slide structure.

[0039] Fig. 9 Schematic diagram of pitch angle adjustment. DETAILED DESCRIPTION

[0040] The specific implementation scheme of the utility model is described in detail below with reference to the accompanying drawings.

[0041] See also Figure 5 and Figure 6 The utility model discloses a temperature measuring instrument adjustment device for a SiC single crystal growth furnace, comprising a slide fixing frame 10, wherein the lower end of the slide fixing frame 10 is mounted on a furnace cover 2, a transverse movable slide 11 capable of transverse movement is mounted on the slide fixing frame 10 via a transverse movement mechanism; a longitudinal movable slide 12 capable of longitudinal movement is mounted on the transverse movable slide 11 via a longitudinal movement mechanism; a pitch-adjustable temperature measuring instrument mounting plate 22 is mounted on the longitudinal movable slide 12 via a pitch adjustment mechanism, and a temperature measuring instrument 1 is fixedly mounted on the temperature measuring instrument mounting plate 22.

[0042] The structure of the adjusting device of the utility model which can perform horizontal and vertical adjustment is as follows: Figure 5 As shown, the structure for adjusting the X-axis and Y-axis pitch angles is as follows Figure 6 The whole device is installed on the furnace cover through the slide fixing frame, and the lateral moving slide and the mechanism thereon (including the temperature measuring instrument) can be driven to move horizontally and horizontally through the lateral moving mechanism; the longitudinal moving slide and the mechanism thereon (including the temperature measuring instrument) can be driven to move horizontally and longitudinally through the longitudinal moving mechanism.

[0043] See also Figure 5The slide fixing frame 10 is composed of a vertical fixing plate 13 and a horizontal fixing plate 14; the lower end of the vertical fixing plate 13 is mounted on the upper furnace cover 2, and one end of the horizontal fixing plate 14 is horizontally mounted on the upper end of the vertical fixing plate 13; the lateral moving mechanism is arranged on the horizontal fixing plate 14. In the embodiment, the lower end of the vertical fixing plate is horizontally bent away from the direction of the horizontal fixing plate, and the lower end of the vertical fixing plate is mounted on the upper furnace cover through the horizontal bending portion. Since the horizontal fixing plate is a cantilever structure, in order to enhance the overall strength of the slide fixing frame, a triangular reinforcing plate is arranged between the vertical fixing plate and the horizontal fixing plate.

[0044] Specifically, the transverse moving mechanism includes a transverse moving guide rail 15 and a transverse moving motor 16. The transverse moving guide rail 15 is transversely arranged on the upper surface of the horizontal fixed plate 14. The transverse moving motor 16 is fixedly installed at the other end of the horizontal fixed plate 14. The output shaft of the transverse moving motor 16 is threadedly connected to the transverse moving slide 11 through a screw; the transverse moving slide 11 is slidably matched with the transverse moving guide rail 15 and can move back and forth along the transverse moving guide rail 15 under the drive of the transverse moving motor 16.

[0045] Similarly, the longitudinal moving mechanism includes a longitudinal moving guide rail 17 and a longitudinal moving motor 18. The longitudinal moving guide rail 17 is longitudinally arranged on the upper surface of the transverse moving slide 11. The longitudinal moving motor 18 is fixedly installed at one end of the transverse moving slide 11. The output shaft of the longitudinal moving motor 18 is threadedly connected to the longitudinal moving slide 12 through a screw. The longitudinal moving slide 12 is slidably matched with the longitudinal moving guide rail 17 and can move back and forth along the longitudinal moving guide rail 17 under the drive of the longitudinal moving motor 18.

[0046] To ensure smooth movement, the two parallel horizontal moving guide rails are suspended above the horizontal fixed plate through the vertical plates at both ends of the horizontal fixed plate; the horizontal moving slide is provided with guide rail holes corresponding to the two horizontal moving guide rails; the horizontal moving guide rails pass through the guide rail holes on the horizontal moving slide; the output shaft of the horizontal moving motor and the corresponding screw are located in the middle of the two horizontal moving guide rails. Due to the constraints of the two horizontal moving guide rails, the horizontal moving slide can only move along the guide rails but cannot rotate under the drive of the motor.

[0047] Similarly, the longitudinal moving guide rails are two parallel ones and are suspended above the transverse moving slide; the longitudinal moving slide is provided with guide rail holes corresponding to the two longitudinal moving guide rails; the longitudinal moving guide rails pass through the guide rail holes on the longitudinal moving slide; the output shaft of the longitudinal moving motor and the corresponding screw are located between the two longitudinal moving guide rails.

[0048] Furthermore, the longitudinal movable slide 12 is connected to the pitch adjustment mechanism through a cantilever 19, one end of the cantilever 19 is fixedly connected to the longitudinal movable slide 12, and the pitch adjustment mechanism is installed at the other end of the cantilever. Since the thermometer is installed on the pitch adjustment mechanism through the thermometer mounting plate, the thermometer can be suspended in the air and away from the longitudinal movable slide through the cantilever, which facilitates the position adjustment of the thermometer and makes the thermometer suspended in the air without being affected by the surrounding mechanisms.

[0049] The pitch adjustment mechanism includes an X-axis pitch slide 20 and a Y-axis pitch slide 21 whose adjustment axes are perpendicular to each other. The slide base of the X-axis pitch slide is horizontally fixedly installed at the other end of the cantilever; the slide base of the Y-axis pitch slide is fixedly installed on the sliding component of the X-axis pitch slide; when the sliding component of the X-axis pitch slide is centered, the slide base of the Y-axis pitch slide is in a horizontal state; the thermometer mounting plate is fixedly installed on the sliding component of the Y-axis pitch slide; when the sliding component of the Y-axis pitch slide is centered, the thermometer mounting plate is in a horizontal state. The X-axis pitch slide and the Y-axis pitch slide are essentially the same two sets of mechanisms, except that the adjustment axes of the two are perpendicular to each other by adjusting the installation angle. The pitch slide is an existing mature product, which can be adjusted electrically or manually. The utility model adopts electric adjustment. A certain embodiment of the thermometer pitch angle electric adjustment slide proposed in the utility model is as follows: Figure 8 The schematic diagram of the pitch angle adjustment is shown in Fig. 9 shown.

[0050] The thermometer is usually pointed vertically downward, with the temperature measuring lens aligned with the center hole at the top of the graphite crucible. Therefore, in theory, the thermometer only needs to move horizontally, and no pitch adjustment is required. However, since the thermometer has high requirements for the horizontality of the installation, otherwise it is easy to affect the accuracy of the temperature measurement. After the actual thermometer is installed, its temperature measuring lens is not vertically downward as standard, and often has a certain deflection angle. Although the deflection angle is small, it will also affect the temperature measurement. Therefore, in actual use, horizontal adjustment sometimes cannot meet all adjustment requirements, and the pitch angle adjustment of the thermometer is also required to ensure the accuracy of the temperature measurement. In view of this, the utility model is provided with the above-mentioned pitch adjustment mechanism. Through the coordination of the pitch adjustment mechanism and the horizontal longitudinal and transverse adjustment, not only the thermometer is aligned with the center hole at the top of the graphite crucible, but also the vertical downward alignment is achieved, thereby maximizing the accuracy of the temperature measurement.

[0051] Depend on Fig. 9 It can be seen that the pitch slide can be rotated and adjusted within a certain angle range. The rotation center position is the pitch adjustment center position, which is also the position of the infrared thermometer temperature measuring lens. The thermometer is installed on the pitch slide through the mounting frame, and the pitch angle of the thermometer can be adjusted by rotating the pitch slide. Figure 6As shown, the entire X-axis and Y-axis pitch slide adjustment mechanism is installed on a cantilever (a suspended long strip), wherein the infrared thermometer is installed on the thermometer mounting plate, the thermometer mounting plate is fixed on the sliding part of the Y-axis pitch slide, and the base of the Y-axis pitch slide is fixed on the sliding part of the X-axis pitch slide. When it is necessary to adjust the pitch angle in the X-axis direction, starting the X-axis pitch slide can drive the entire Y-axis pitch slide (including the thermometer) to adjust the pitch angle in the X-axis direction, thereby realizing the X-axis pitch angle adjustment of the thermometer; when it is necessary to adjust the pitch angle in the Y-axis direction, starting the Y-axis pitch slide can drive the entire thermometer mounting plate (including the thermometer) to adjust the pitch angle in the Y-axis direction, thereby realizing the Y-axis pitch angle adjustment of the thermometer.

[0052] Further, see Figure 4 The utility model also includes an operation panel, and the operation panel is provided with a display screen. The thermometer is connected to the display screen to provide the temperature measurement video image of the thermometer to the display screen for display. Two lateral movement operation buttons are provided on the operation panel to control the lateral movement motor to rotate forward or reverse, thereby driving the lateral movement slide to move left or right; two longitudinal movement operation buttons are provided on the operation panel to control the longitudinal movement motor to rotate forward or reverse, thereby driving the longitudinal movement slide to move forward or backward.

[0053] By setting operation buttons in four directions, the adjustment direction can be intuitively reflected, making operation convenient.

[0054] In order to balance speed and accuracy, a high-speed adjustment button and a low-speed adjustment button are provided on the operation panel. When the center hole at the top of the crucible does not enter the temperature measurement video image, the high-speed adjustment button can be used for rapid adjustment until the center hole at the top of the crucible enters the temperature measurement video image, and then the low-speed adjustment button is used to move the thermometer so that the center hole at the top of the crucible is located in the center of the temperature measurement video image. This greatly improves the adjustment efficiency without affecting the adjustment accuracy.

[0055] The following are examples of horizontal and vertical adjustment operations. Assuming that the high-temperature red area is completely outside the temperature measurement video image window in the initial state, the operation steps can be performed as follows. Figure 7 :

[0056] The first step is to set the high-speed mode, click to move horizontally and vertically until the high-temperature red area appears in the temperature measurement video image window, and then stop moving. Assume that part of the high-temperature red area has appeared in the lower left corner of the video image window at this time;

[0057] The second step is to switch to the low-speed mode. You can click to move vertically upward until the center of the high-temperature red area is roughly on the same horizontal line as the temperature measurement center point mark "+" on the thermometer, and then stop moving;

[0058] Step 3: Use the low-speed mode and click to move horizontally to the right until the temperature measurement center mark "+" of the thermometer is located in the red center area of ​​the center hole of the graphite crucible, and then stop moving. At this point, the horizontal position adjustment of the thermometer is completed.

[0059] It can be seen that the adjustment scheme proposed by the present invention only requires one operator to efficiently, conveniently and accurately complete the horizontal position adjustment of the thermometer on the operation panel.

[0060] In order to limit the maximum travel of lateral and longitudinal movement, prevent the slide from moving beyond the limit, and avoid collision damage caused by excessive movement, the utility model is equipped with lateral limit sensors at both ends of the horizontal fixed plate, and the lateral limit sensors are connected to the lateral movement motor; when the lateral movement slide moves to both ends of the horizontal fixed plate, the lateral limit sensors will be triggered and the lateral movement motor will stop.

[0061] Similarly, longitudinal limit sensors are installed at both ends of the transverse moving slide, and the longitudinal limit sensors are connected to the longitudinal moving motor; when the longitudinal moving slide moves to both ends of the transverse moving slide, the longitudinal limit sensors will be triggered and the longitudinal moving motor will stop.

[0062] The utility model can drive the thermometer to move horizontally, vertically and adjust the pitch angle. The thermometer can be driven to move horizontally through the horizontal moving mechanism, and can be driven to move vertically through the vertical moving mechanism. Similarly, the thermometer can be driven to adjust the pitch angle in the X-axis direction through the X-axis pitch slide, and can be driven to adjust the pitch angle in the Y-axis direction through the Y-axis pitch slide. High-speed and low-speed movement modes are set for horizontal and vertical as well as X and Y axis pitch adjustments. Combined with the temperature measurement video image, the position of the thermometer can be adjusted accurately, efficiently, conveniently and safely. The whole process can be completed by one person, and no high-altitude operation is required.

[0063] Finally, it should be noted that the above examples of the utility model are only examples for illustrating the utility model, and are not limitations on the implementation methods of the utility model. Although the applicant has described the utility model in detail with reference to the preferred embodiments, for ordinary technicians in the relevant field, other different forms of changes and modifications can be made on the basis of the above description. It is impossible to list all the implementation methods here. Any obvious changes or modifications derived from the technical solution of the utility model are still within the scope of protection of the utility model.

Claims

1. A temperature measuring instrument adjustment device for a SiC single crystal growth furnace, characterized in that: It includes a slide fixing frame, the lower end of which is installed on the furnace cover, and a transverse movable slide that can move laterally is installed on the slide fixing frame through a transverse moving mechanism; a longitudinal movable slide that can move longitudinally is installed on the transverse movable slide through a longitudinal moving mechanism; a pitch-adjustable thermometer mounting plate is installed on the longitudinal movable slide through a pitch adjusting mechanism, and the thermometer is fixedly installed on the thermometer mounting plate.

2. The temperature measuring instrument adjustment device for a SiC single crystal growth furnace according to claim 1, characterized in that: The slide fixing frame is composed of a vertical fixing plate and a horizontal fixing plate; the lower end of the vertical fixing plate is installed on the upper furnace cover, and one end of the horizontal fixing plate is horizontally installed on the upper end of the vertical fixing plate; the horizontal moving mechanism is arranged on the horizontal fixing plate.

3. The temperature measuring instrument adjustment device for a SiC single crystal growth furnace according to claim 2, characterized in that: The transverse movement mechanism includes a transverse movement guide rail and a transverse movement motor. The transverse movement guide rail is transversely arranged on the upper surface of the horizontal fixed plate. The transverse movement motor is fixedly installed at the other end of the horizontal fixed plate. The output shaft of the transverse movement motor is threadedly connected to the transverse movement slide through a screw. The transverse movement slide is slidably matched with the transverse movement guide rail and can move back and forth along the transverse movement guide rail under the drive of the transverse movement motor.

4. The temperature measuring instrument adjustment device for a SiC single crystal growth furnace according to claim 3, characterized in that: The longitudinal moving mechanism includes a longitudinal moving guide rail and a longitudinal moving motor. The longitudinal moving guide rail is longitudinally arranged on the upper surface of the transverse moving slide. The longitudinal moving motor is fixedly installed at one end of the transverse moving slide. The output shaft of the longitudinal moving motor is threadedly connected to the longitudinal moving slide through a screw. The longitudinal moving slide is slidably matched with the longitudinal moving guide rail and can move back and forth along the longitudinal moving guide rail under the drive of the longitudinal moving motor.

5. The temperature measuring instrument adjustment device for a SiC single crystal growth furnace according to claim 4, characterized in that: The transverse moving guide rails are two parallel guide rails suspended above the horizontal fixed plate; the transverse moving slide is provided with guide rail holes corresponding to the two transverse moving guide rails; the transverse moving guide rails pass through the guide rail holes on the transverse moving slide; the output shaft of the transverse moving motor and the corresponding screw are located between the two transverse moving guide rails; The longitudinal moving guide rails are two parallel ones and are suspended above the transverse moving slide; the longitudinal moving slide is provided with guide rail holes corresponding to the two longitudinal moving guide rails; the longitudinal moving guide rails pass through the guide rail holes on the longitudinal moving slide; the output shaft of the longitudinal moving motor and the corresponding screw are located between the two longitudinal moving guide rails.

6. The temperature measuring instrument adjustment device for a SiC single crystal growth furnace according to claim 4, characterized in that: The longitudinal movable slide is connected to the pitch adjustment mechanism through a cantilever, so that the temperature measuring instrument is suspended in the air and away from the longitudinal movable slide; one end of the cantilever is fixedly connected to the longitudinal movable slide, and the pitch adjustment mechanism is installed at the other end of the cantilever.

7. The temperature measuring instrument adjustment device for a SiC single crystal growth furnace according to claim 6, characterized in that: The pitch adjustment mechanism includes an X-axis pitch slide and a Y-axis pitch slide whose adjustment axes are perpendicular to each other. The slide base of the X-axis pitch slide is horizontally fixedly installed at the other end of the cantilever; the slide base of the Y-axis pitch slide is fixedly installed on the sliding component of the X-axis pitch slide; when the sliding component of the X-axis pitch slide is centered, the slide base of the Y-axis pitch slide is in a horizontal state; the thermometer mounting plate is fixedly installed on the sliding component of the Y-axis pitch slide; when the sliding component of the Y-axis pitch slide is centered, the thermometer mounting plate is in a horizontal state.

8. The temperature measuring instrument adjustment device for a SiC single crystal growth furnace according to claim 6, characterized in that: It also includes an operation panel, which has a display screen. The thermometer is connected to the display screen to provide the temperature measurement video image of the thermometer to the display screen for display; two lateral movement operation buttons are provided on the operation panel to control the lateral movement motor to rotate forward or reverse, thereby driving the lateral movement slide to move left or right; Two longitudinal movement operation buttons are arranged on the operation panel to control the longitudinal movement motor to rotate forward or reverse, thereby driving the longitudinal movement slide to move forward or backward.

9. The temperature measuring instrument adjustment device for a SiC single crystal growth furnace according to claim 6, characterized in that: Transverse limit sensors are installed at both ends of the horizontal fixed plate, and the transverse limit sensors are connected to the transverse movement motor; when the transverse movement slide moves to both ends of the horizontal fixed plate, the transverse limit sensors will be triggered and the transverse movement motor will stop; Longitudinal limit sensors are installed at both ends of the transverse moving slide, and the longitudinal limit sensors are connected to the longitudinal moving motor; when the longitudinal moving slide moves to both ends of the transverse moving slide, the longitudinal limit sensors will be triggered and the longitudinal moving motor will stop.

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