Gate valve mechanism used between coating chambers and vacuum coating equipment

Abstract

According to the gate valve mechanism used between the coating chambers and the vacuum coating equipment provided by the utility model, the magnetic fluid sealing device is adopted to transmit the power of the power assembly to the hollow main shaft assembly to rotate to drive the adjustable sealing door plate assembly to open and close, so that the response speed of the gate valve mechanism and the vacuum sealing effect of the coating chambers are greatly improved; the probability of vacuum leakage of the coating chamber is reduced, stable operation of equipment is guaranteed, and the overall efficiency of a coating line is ensured. According to the scheme, the O-shaped sealing ring is arranged on the outer ring of the sealing door plate, so that the vacuum sealing effect of the coating chamber is further improved. According to the scheme, the gate valve mechanism is relatively simple in structure, convenient to assemble and disassemble, capable of being used for connecting any two coating chambers, high in interchangeability and capable of effectively lowering the installation and maintenance cost. The double-sided vertical film coating device is suitable for various double-sided vertical film coating lines, can play a good role in both laboratories and industrial production, and has a wide application field.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating equipment, in particular to a gate valve mechanism used between coating chambers and vacuum coating equipment. Background Art

[0002] In the coating line, especially the double-sided vertical coating line, vacuum isolation is the key link to ensure the quality of coating. Existing vacuum coating equipment needs to be used to meet independent high vacuum requirements for vacuum sputtering coating of small glass, and also needs to meet the high vacuum requirements of multiple chambers in a connected state for vacuum sputtering coating of large glass. The connection or isolation of the coating chambers can be adjusted by setting a gate valve mechanism between the coating chambers for opening and closing. Most of the existing gate valve mechanisms have the problem of cumbersome opening and closing and untimely response. During the coating operation, if the gate valve mechanism does not respond in time, vacuum leakage in the coating chamber is likely to occur, resulting in unstable equipment operation and affecting the overall efficiency of the coating line. Utility Model Content

[0003] The utility model aims to provide a gate valve mechanism and vacuum coating equipment used between coating chambers, which can improve the response speed of the gate valve mechanism and reduce the probability of vacuum leakage in the coating chamber.

[0004] In order to achieve the above-mentioned purpose, the technical solution adopted by the utility model is: a gate valve mechanism used between coating chambers, including a gate valve chamber arranged between the coating chambers, the gate valve chamber is provided with two chamber inlets and outlets, the chamber inlets and outlets are provided with a gate valve device matched therewith, and the gate valve device includes a hollow spindle fixing assembly, a hollow spindle assembly, an adjustable sealing door plate assembly and a power assembly;

[0005] The hollow spindle fixing assembly comprises a hollow spindle fixing seat arranged at the bottom of the chamber inlet and outlet and a magnetic fluid sealing device arranged at the top of the chamber inlet and outlet, and the hollow spindle fixing seat is embedded with a tapered roller bearing matched with the hollow spindle assembly;

[0006] The hollow spindle assembly is vertically arranged in the hollow spindle fixing assembly;

[0007] The power assembly is fixed on the top of the gate valve chamber, and the output end of the power assembly is drivingly connected to the magnetic fluid sealing device;

[0008] The adjustable sealing door panel assembly is arranged on the inlet and outlet of the chamber, and the adjustable sealing door panel assembly is fixedly connected to the hollow main shaft assembly. The rotation of the hollow main shaft assembly drives the adjustable sealing door panel assembly to open and close.

[0009] Preferably, the hollow main shaft assembly comprises a connecting sleeve, a square key and a hollow main shaft which are sequentially connected in vertical transmission, and the top end of the connecting sleeve is connected in transmission to the optical shaft of the magnetic fluid sealing device.

[0010] Preferably, the bottom of the hollow main shaft is fixed to the hollow shaft fixing seat by means of an upper fixing ring and a lower fixing ring in a screw connection manner, and is drivingly connected to the tapered roller bearing.

[0011] Preferably, the power assembly comprises a cylinder fixed on the top of the gate valve chamber, and the cylinder is transmission-connected to the optical axis of the magnetic fluid sealing device via a swing end.

[0012] Preferably, the swing end of the cylinder includes a floating joint and a swing rod connected end to end.

[0013] Preferably, the swing end of the cylinder and the optical shaft outer sleeve of the magnetic fluid sealing device are provided with an expansion sleeve and a spacer sleeve.

[0014] Preferably, the adjustable sealing door panel assembly includes a sealing door panel, a plurality of door panel fixing seats are provided on the sealing door panel, a pin shaft is provided on the door panel fixing seat, and the hollow main shaft assembly is provided with a crank at a corresponding position of the door panel fixing seat, and the crank and the pin shaft are fixedly connected by a flat key.

[0015] Preferably, the door panel fixing seat is provided with a set screw for adjusting the inclination angle of the sealing door panel relative to the inlet and outlet surfaces of the chamber.

[0016] Preferably, the outer ring of the sealing door panel is provided with an O-ring.

[0017] A vacuum coating device comprises a first coating chamber and a second coating chamber which are arranged on both sides of a gate valve mechanism.

[0018] Preferably, a lower base plate is provided at the bottom of the outer shell.

[0019] The beneficial effects of the utility model are:

[0020] This solution uses a magnetic fluid sealing device to transmit the power of the power component to the hollow spindle component for rotation to drive the adjustable sealing door panel component to open and close, which greatly improves the response speed of the gate valve mechanism and the vacuum sealing effect of the coating chamber, reduces the probability of vacuum leakage in the coating chamber, ensures stable operation of the equipment, and ensures the overall efficiency of the coating line. This solution is equipped with an O-ring on the outer ring of the sealing door panel to further improve the vacuum sealing effect of the coating chamber. The structure of the gate valve mechanism of this solution is relatively simple and easy to assemble and disassemble. It can be used to connect any two coating chambers, has high interchangeability, and can effectively reduce installation and maintenance costs. It is suitable for various double-sided vertical coating lines, and can play a good role both in laboratories and industrial production, and has a wide range of applications. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0022] Figure 1 It is a structural schematic diagram of the gate valve device of the utility model.

[0023] Figure 2 For this utility model Figure 1 A magnified diagram of the details of part A in the middle.

[0024] Figure 3 It is a schematic diagram of the position of the O-ring of the utility model.

[0025] Figure 4 It is an overall schematic diagram of the gate valve device of the utility model.

[0026] Figure 5 It is an overall schematic diagram of the gate valve chamber and the gate valve device of the utility model.

[0027] Figure 6 It is an overall schematic diagram of the vacuum coating equipment of the utility model.

[0028] In the figure, 1. gate valve chamber, 2. gate valve device, 201. cylinder, 202. floating joint, 203. rocker arm, 204. expansion sleeve, 205. spacer sleeve, 206. magnetic fluid sealing device, 207. connecting sleeve, 208. square key, 209. hollow main shaft, 2010. crank, 2011. flat key, 2012. pin shaft, 2013. door panel fixing seat, 2014. sealing door panel, 2015. upper fixing ring, 2016. lower fixing ring, 2017. tapered roller bearing, 2018. hollow shaft fixing seat, 2019. O-ring, 2020. set screw, 3. first coating chamber, 4. second coating chamber. DETAILED DESCRIPTION

[0029] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0030] The structures, proportions, sizes, etc. illustrated in the drawings of this specification are only used to match the contents disclosed in the specification so as to facilitate understanding and reading by persons familiar with this technology. They are not used to limit the conditions under which the present invention can be implemented, and therefore have no substantive technical significance. Any structural modification, change in proportion or adjustment of size, without affecting the effects and purposes that can be achieved by the present invention, should still fall within the scope of the technical contents disclosed by the present invention.

[0031] At the same time, it should be noted that: unless otherwise defined, the technical terms or scientific terms used in this article should be the usual meanings understood by people with general skills in the technical field to which the utility model belongs. The meaning of "multiple" used in the patent application specification and claims of this utility model is two or more; the orientation or position relationship indicated by the terms "upper", "lower", "left", "right", "front end", "rear end", etc. is based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the utility model. Changes or adjustments in their relative relationships should also be regarded as the scope of implementation of the utility model without substantial changes in the technical content.

[0032] The present invention is further described in detail below in conjunction with the embodiments and with reference to the accompanying drawings.

[0033] The utility model discloses a gate valve mechanism used between coating chambers. Figure 1-5 As shown, the embodiment includes a gate valve chamber 1 disposed between the coating chambers, such as Figure 5 As shown, the gate valve chamber 1 has two chamber inlets and outlets, and the chamber inlets and outlets are provided with gate valve devices 2 that match them. Figure 1 , 4 As shown, the gate valve device 2 includes a hollow main shaft fixing assembly, a hollow main shaft assembly, an adjustable sealing door plate assembly and a power assembly.

[0034] The hollow spindle fixing assembly includes a hollow shaft fixing seat 2018 arranged at the bottom of the chamber inlet and outlet and a magnetic fluid sealing device 206 arranged at the top of the chamber inlet and outlet. The hollow shaft fixing seat 2018 is embedded with a tapered roller bearing 2017 that cooperates with the hollow spindle assembly.

[0035] The hollow spindle assembly is vertically arranged in the hollow spindle fixing assembly, and the hollow spindle assembly includes a connecting sleeve 207, a square key 208 and a hollow spindle 209 which are sequentially connected in vertical transmission, and the top of the connecting sleeve 207 is connected in transmission with the optical axis of the magnetic fluid sealing device 206. The bottom of the hollow spindle 209 is fixed on the hollow spindle fixing seat 2018 by screw connection through an upper fixing ring 2015 and a lower fixing ring 2016, and is connected in transmission with a tapered roller bearing 2017.

[0036] The power assembly is fixed on the top of the gate valve chamber 1, and the output end of the power assembly is in driving connection with the magnetic fluid sealing device 206; the power assembly includes a cylinder 201 fixed on the top of the gate valve chamber 1, and the cylinder 201 is in driving connection with the optical axis of the magnetic fluid sealing device 206 through a swing end. The swing end of the cylinder 201 includes a floating joint 202 and a swing rod 203 connected end to end. The swing end of the cylinder 201 and the outer sleeve of the optical axis of the magnetic fluid sealing device 206 are provided with a tightening sleeve 204 and a spacer sleeve 205.

[0037] The adjustable sealing door panel assembly is arranged at the chamber inlet and outlet, and the adjustable sealing door panel assembly is fixedly connected to the hollow main shaft assembly, and the hollow main shaft assembly rotates to drive the adjustable sealing door panel assembly to open and close. The adjustable sealing door panel assembly includes a sealing door panel 2014, and the sealing door panel 2014 is provided with a plurality of door panel fixing seats 2013, such as Figure 2 As shown, a pin shaft 2012 is provided on the door panel fixing seat 2013 , and a crank 2010 is provided on the hollow spindle assembly at a corresponding position of the door panel fixing seat 2013 , and the crank 2010 and the pin shaft 2012 are fixedly connected via a flat key 2011 .

[0038] The door panel fixing seat 2013 is provided with a set screw 220 for adjusting the inclination angle of the sealing door panel 2014 relative to the inlet and outlet surfaces of the chamber. Figure 3 As shown, the outer ring of the sealing door plate 2014 is provided with an O-ring 2019.

[0039] The utility model discloses a vacuum coating device, such as Figure 6 As shown, it also includes a first coating chamber 3 and a second coating chamber 4 arranged on both sides of the gate valve mechanism.

[0040] It should be noted that the parts not described in detail in the above embodiments are all prior art.

[0041] The above is only a preferred embodiment of the present invention and does not constitute any form of limitation to the present invention. Although the present invention has been disclosed as a preferred embodiment as above, it is not intended to limit the present invention. Any technician familiar with the profession can make some changes or modify the technical contents disclosed above into equivalent embodiments without departing from the scope of the technical solution of the present invention. However, any simple modification, equivalent change and modification made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention shall be included in the protection scope of the present invention.

Claims

1. A gate valve mechanism used between coating chambers, characterized in that: It comprises a gate valve chamber (1) arranged between coating chambers, the gate valve chamber (1) being provided with two chamber inlets and outlets, the chamber inlets and outlets being provided with gate valve devices (2) matching therewith, the gate valve device (2) comprising a hollow main shaft fixing assembly, a hollow main shaft assembly, an adjustable sealing door plate assembly and a power assembly; The hollow main shaft fixing assembly comprises a hollow shaft fixing seat (2018) arranged at the bottom of the chamber inlet and outlet, and a magnetic fluid sealing device (206) arranged at the top of the chamber inlet and outlet, and the hollow shaft fixing seat (2018) is embedded with a tapered roller bearing (2017) that cooperates with the hollow main shaft assembly; The hollow spindle assembly is vertically arranged in the hollow spindle fixing assembly; The power assembly is fixed on the top of the gate valve chamber (1), and the output end of the power assembly is drivingly connected to the magnetic fluid sealing device (206); The adjustable sealing door panel assembly is arranged on the inlet and outlet of the chamber, and the adjustable sealing door panel assembly is fixedly connected to the hollow main shaft assembly. The rotation of the hollow main shaft assembly drives the adjustable sealing door panel assembly to open and close.

2. A gate valve mechanism for use between coating chambers according to claim 1, characterized in that: The hollow main shaft assembly comprises a connecting sleeve (207), a square key (208) and a hollow main shaft (209) which are sequentially connected in vertical transmission, and the top end of the connecting sleeve (207) is connected in transmission to the optical axis of the magnetic fluid sealing device (206).

3. A gate valve mechanism for use between coating chambers according to claim 2, characterized in that: The bottom of the hollow main shaft (209) is fixed to the hollow shaft fixing seat (2018) by means of screw connection via an upper fixing ring (2015) and a lower fixing ring (2016), and is transmission-connected to the tapered roller bearing (2017).

4. A gate valve mechanism for use between coating chambers according to claim 1, characterized in that: The power assembly comprises a cylinder (201) fixed on the top of the gate valve chamber (1), and the cylinder (201) is transmission-connected to the optical axis of the magnetic fluid sealing device (206) via a swing end.

5. A gate valve mechanism for use between coating chambers according to claim 4, characterized in that: The swing end of the cylinder (201) comprises a floating joint (202) and a swing rod (203) connected end to end.

6. A gate valve mechanism for use between coating chambers according to claim 4, characterized in that: The swing end of the cylinder (201) and the optical axis outer sleeve of the magnetic fluid sealing device (206) are provided with an expansion sleeve (204) and a spacer sleeve (205).

7. The gate valve mechanism used between coating chambers according to claim 1, characterized in that: The adjustable sealed door panel assembly comprises a sealed door panel (2014), a plurality of door panel fixing seats (2013) are provided on the sealed door panel (2014), a pin shaft (2012) is provided on the door panel fixing seat (2013), a crank (2010) is provided on the hollow main shaft assembly at a position corresponding to the door panel fixing seat (2013), and the crank (2010) and the pin shaft (2012) are fixedly connected via a flat key (2011).

8. The gate valve mechanism used between coating chambers according to claim 7, characterized in that: The door panel fixing seat (2013) is provided with a set screw (220) for adjusting the inclination angle of the sealing door panel (2014) relative to the inlet and outlet surfaces of the chamber.

9. The gate valve mechanism used between coating chambers according to claim 7, characterized in that: The outer ring of the sealing door plate (2014) is provided with an O-ring (2019).

10. A vacuum coating device, characterized in that: The vacuum coating equipment comprises a gate valve mechanism used between coating chambers as claimed in any one of claims 1 to 9, and further comprises a first coating chamber (3) and a second coating chamber (4) arranged on both sides of the gate valve mechanism.

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