Cathode terminal vacuum leakage detection device

Abstract

The utility model relates to a cathode end vacuum leakage detection device. A cathode end vacuum leakage detection device comprises a cavity with an opening in the upper end, and an air exhaust hole is formed in the side face of the cavity. The sealing cover is connected with the upper end of the cavity and seals the opening of the cavity, and the lower end face of the sealing cover is provided with a main mounting position used for mounting the cathode end and an auxiliary mounting position used for mounting the water end; the upper end face of the sealing cover is provided with a first receding hole for a transmission part of the cathode end to extend out and a second receding hole for a water inlet connector and a water outlet connector of a water end to be exposed, and the sealing cover is provided with a leak detection connector used for being connected with a leak detector or / and a vacuum gauge. The universal driving shaft assembly is used for enabling the cathode end to be in driving connection with the water end, and the cathode end can drive the interior of the water end to rotate through the universal driving shaft assembly; the driving device is fixed to the sealing cover and used for driving the interior of the cathode end to rotate. Compared with the prior art, the production environment can be simulated to detect the cathode end, and the detection is more accurate.

Description

Technical Field

[0001] The present application belongs to the technical field of vacuum leak detection, and more specifically, relates to a cathode terminal vacuum leak detection device. Background Art

[0002] The cathode end head on the magnetron sputtering coating line is a device for carrying the target material. During coating, the cathode end head improves the utilization rate of the target material by rotating the target material. Therefore, the design and maintenance of the cathode end head are of great significance to ensuring the coating quality and improving production efficiency. However, when maintaining the cathode end head, in order to reduce production and maintenance costs, many coated glass manufacturers usually make their own tooling for independent maintenance. Due to the lack of testing equipment after maintenance of the cathode end head, the test can only be carried out on the coating machine. The cathode end head is installed on the coating machine and vacuumed for a period of time, generally 4-8 hours, and the cathode end head is vacuumed and leaked. When a vacuum leak is detected, a secondary leak test is required, which is very time-consuming and energy-consuming. Utility Model Content

[0003] The purpose of the embodiments of the present application is to provide a cathode terminal vacuum leakage detection device to solve the technical problem in the prior art that vacuum leakage detection cannot be performed in a simulated production state.

[0004] In order to achieve the above-mentioned purpose, the technical solution adopted in this application is: to provide a cathode terminal vacuum leakage detection device, comprising:

[0005] The cavity has an opening at its upper end and a suction hole for connecting to a vacuum device on the side of the cavity;

[0006] A sealing cover is connected to the upper end of the cavity and seals its opening. The lower end surface of the sealing cover is provided with a main mounting position for mounting a cathode terminal and a secondary mounting position for mounting a water end. The upper end surface of the sealing cover is provided with a first avoidance hole for the transmission part of the cathode terminal to extend out and a second avoidance hole for the water inlet interface and the water outlet interface of the water end to be exposed. The sealing cover is provided with a leak detection interface for connecting a leak detector and / or a vacuum gauge.

[0007] The linkage shaft assembly is used to drive the cathode end head to the water end, and the cathode end head can drive the internal rotation of the water end through the linkage shaft assembly;

[0008] The driving device is fixed to the sealing cover and is used to drive the internal rotation of the cathode terminal.

[0009] Preferably, a flange is formed on the side of the cavity, and the through hole in the middle of the flange is the exhaust hole.

[0010] Furthermore, an annular outer flap is provided at the upper end of the cavity, and an annular groove and a main sealing ring arranged corresponding to the annular groove are provided at the lower end face of the sealing cover. When the sealing cover is connected to the cavity, the main sealing ring is located in the annular groove and is clamped between the outer flap and the sealing cover.

[0011] Furthermore, the sealing cover is provided with a first sealing structure for sealing the first avoidance hole.

[0012] Furthermore, the sealing cover is provided with a second sealing structure for sealing the second avoidance hole.

[0013] Preferably, the first sealing structure includes a first annular groove arranged at the main mounting position and a first auxiliary sealing ring arranged corresponding to the first annular groove; the first auxiliary sealing ring is located in the first annular groove, and when the sealing cover is connected to the cathode terminal, the first auxiliary sealing ring is clamped between the cathode terminal and the sealing cover.

[0014] Preferably, the second sealing structure includes a second annular groove arranged at the auxiliary mounting position and a second auxiliary sealing ring arranged corresponding to the second annular groove, the second auxiliary sealing ring is located in the second annular groove, and when the sealing cover is connected to the water end, the second auxiliary sealing ring is clamped between the water end and the sealing cover.

[0015] Furthermore, the sealing cover is connected to a support frame, which includes a vertical plate fixed to the sealing cover, one side of the vertical plate is fixedly connected to the driving device, the driving device is provided with a rotating shaft, the rotating shaft is connected to an upper coupling, and the upper coupling is used to connect to the upper connecting shaft of the cathode end drive part.

[0016] Furthermore, a plurality of reinforcing plates are connected between the lower end of the vertical plate and the sealing cover.

[0017] Furthermore, the linkage shaft assembly includes a main linkage shaft connected to the cathode end and a secondary linkage shaft connected to the water end, and the main linkage shaft is connected to the secondary linkage shaft or the main linkage shaft is connected to the secondary linkage shaft through a coupling.

[0018] The beneficial effect of the cathode terminal vacuum leakage detection device provided by the present application is that, compared with the prior art, the present application can simulate the production environment to detect the cathode terminal, and the detection is more accurate. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0020] Figure 1 A schematic diagram of an application structure provided for an embodiment of the present application; the application structure comprises a cathode end and a water end;

[0021] Figure 2 for Figure 1 Schematic diagram from another perspective;

[0022] Figure 3 A schematic diagram of an application structure provided in an embodiment of the present application;

[0023] Figure 4 A schematic diagram of another application structure provided in an embodiment of the present application;

[0024] Figure 5 for Figure 4 Schematic diagram from another perspective;

[0025] Among them, the reference numerals in the figure are:

[0026] 1- cavity; 2- sealing cover; 3- water end; 4- cathode end head; 5- driving device; 6- upper coupling; 7- vertical plate; 8- reinforcing plate; 9- linkage shaft assembly;

[0027] 11-flange; 12-exhaust hole; 13-outer flap; 14-opening;

[0028] 21-leak detection interface; 22-second avoidance hole; 23-first avoidance hole; 24-second secondary sealing ring; 25-first secondary sealing ring; 26-main sealing ring; 27-first annular groove; 28-annular groove; 29-second annular groove;

[0029] 31-water inlet interface; 32-water outlet interface;

[0030] 41-driving part; 42-upper connecting shaft;

[0031] 51-rotating shaft;

[0032] 91- secondary linkage shaft; 92- main linkage shaft. DETAILED DESCRIPTION

[0033] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0034] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0035] It should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0036] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0037] Please also read Figures 1 to 5 Now, a cathode terminal 4 vacuum leakage detection device provided in an embodiment of the present application is described. Figure 3 , Figure 4 ; The cathode terminal 4 vacuum leakage detection device comprises: a cavity 1 with an opening 14 at the upper end, and an air extraction hole 12 for connecting a vacuum extraction device is opened on the side of the cavity 1; a sealing cover 2 is provided at the upper end of the cavity 1, and the sealing cover 2 is connected to the upper end of the cavity 1 and seals the opening 14 at its upper end, and the lower end surface of the sealing cover 2 is provided with a main mounting position for mounting the cathode terminal 4 and a secondary mounting position for mounting the water end 3, and the upper end surface of the sealing cover 2 is provided with a first avoidance hole 23 for the transmission part of the cathode terminal 4 to extend and a second avoidance hole 22 for the water inlet interface 31 and the water outlet interface 32 of the water end 3 to be exposed, and the sealing cover 2 is provided with a leak detection interface 21 for connecting a leak detector or / and a vacuum gauge; and also includes a linkage shaft assembly 9 and a driving device 5, the linkage shaft assembly 9 is used to drive and connect the cathode terminal 4 with the water end 3, and the cathode terminal 4 can drive the internal rotation of the water end 3 through the linkage shaft assembly 9; the driving device 5 is fixed to the sealing cover 2, and is used to drive the internal rotation of the cathode terminal 4.

[0038] When the embodiment of the present application is in use, the air extraction hole 12 on the side of the cavity 1 is connected to the vacuum extraction device, and the vacuum extraction device can be a vacuum pump of various styles or a combination thereof, such as a combination of a mechanical pump and a molecular pump, or a combination of a mechanical pump and an ion pump; to achieve the vacuum degree required by the actual working environment of the vacuum coating or a higher vacuum degree; the vacuum extraction device can be a prior art. The lower end surface of the sealing cover 2 is fixedly connected to the cathode terminal 4 and the water end 3, respectively, wherein the cathode terminal 4 is fixed to the main mounting position, and the water end 3 is fixed to the auxiliary mounting position; when the sealing cover 2 is sealed and connected to the upper end of the cavity 1, the main body of the cathode terminal 4 and the water end 3 are both located inside the cavity 1, the driving part 41 of the cathode terminal 4 passes through the first avoidance hole 23 of the sealing cover 2 and extends out of the cavity 1, and the water inlet interface 31 and the water outlet interface 32 of the water end 3 pass through the second avoidance hole 22 of the sealing cover 2 and extend out of the cavity 1; the leak detection interface 21 on the sealing cover 2 is connected to the leak detector and the vacuum gauge respectively; the driving part 41 of the cathode terminal 4 is drivingly connected to the driving device 5. Secondly, during normal operation, the outer side of the linkage shaft assembly 9 is used to socket the mounting seat, which is used to fix the target material. The cathode end 4 drives the target material to rotate by driving the rotation of the linkage shaft assembly 9; the water end includes a cooling box, which is equipped with bearings and connected to the linkage shaft assembly 9 through the bearings. The cooling box is used to cool the cathode end, the mounting seat, etc.

[0039] When performing leak detection, first perform a static test: turn on the vacuum device and observe the vacuum changes inside the cavity 1 through the vacuum gauge; after a period of time, such as 3 hours, 4 hours, etc., observe the vacuum leakage of the cathode end 4 in the non-working state. If the vacuum inside the cavity 1 is always maintained at a relatively low vacuum, there is a leak in the cathode end 4 or the water end 3, and the test is terminated.

[0040] After the static test is qualified, the dynamic test is then carried out, and the driving device 5 is started. The driving device 5 drives the internal rotation of the cathode end head 4, and at the same time drives the internal rotation of the water end 3 through the linkage shaft assembly 9. The water inlet interface 31 and the water outlet interface 32 of the water end 3 are connected to the water circulation system to simulate the working environment state; the water circulation system includes a water tank, a water pump, a water inlet pipe, a water outlet pipe, etc. One end of the water inlet pipe is connected to the water outlet interface 32, and the other end of the water inlet pipe extends into the water tank, one end of the water outlet pipe is connected to the water inlet interface 31, and the other end of the water outlet pipe is connected to the outlet of the water pump, and the inlet of the water pump is connected to the water tank through a pipeline; with the assistance of the water circulation system, there is always water flowing at the water end to simulate water circulation cooling. Continue to evacuate and observe the change of vacuum degree. If the vacuum degree changes greatly and decreases, there is a vacuum leak in the cathode end head 4 or the water end 3.

[0041] When a leak is detected at the cathode terminal 4 or the water end 3, it is necessary to determine whether it is the cathode terminal 4 or the water end 3 that is leaking. At this time, a tracking leak detection method can be used, in which one of the leak detection interfaces 21 is connected to a leak detector, such as a helium leak detector, and then some helium is released outside the drive unit 41 of the cathode terminal 4, and the detection result of the helium leak detector is observed. If helium is detected and it is relatively large, the cathode terminal 4 is leaking; during the detection, the drive unit 41 can be covered with a cover to form an independent space, and helium is released in the independent space to improve the detection accuracy. Secondly, during the detection, a vacuum gauge or a helium leak detector can be used alone. When a vacuum gauge is used alone, it is impossible to accurately identify where the leak is when a leak occurs; using a helium leak detector alone is costly. Using a vacuum gauge and a leak detector can effectively reduce costs and identify specific leak locations.

[0042] See also Figure 1 , Figure 2 , a flange 11 is formed on the side of the cavity 1, and the perforation in the middle of the flange 11 is the exhaust hole 12. When the cavity 1 is connected to the vacuum device, the sealing performance of the pipeline connection needs to be considered; the traditional pipeline connection will result in a small connection surface, which is easy to cause leakage; in order to improve the sealing performance of the connection, the present application exemplarily forms a flange 11 on the side of the cavity 1 by an integrated molding method; when connected to the vacuum device, a flange 11 is also provided at the end of the exhaust pipe of the vacuum device, and a sealing ring is connected between the two flanges 11, and the two flanges 11 are fixedly connected by bolts. Since the contact area between the two flanges 11 is large and a sealing ring is provided, the sealing performance between the two flanges 11 is good, and the sealing performance when the exhaust pipe is connected is also greatly improved, which is conducive to the vacuuming of the cavity 1, and the cavity 1 can reach a higher vacuum environment.

[0043] See also Figure 5 The upper end of the cavity 1 is provided with an annular outer flap 13, and the lower end surface of the sealing cover 2 is provided with an annular groove 28 and a main sealing ring 26 arranged corresponding to the annular groove 28. When the sealing cover 2 is connected to the cavity 1, the main sealing ring 26 is located in the annular groove 28 and is clamped between the outer flap 13 and the sealing cover 2.

[0044] In the embodiment of the present application, the horizontal dimension of the sealing cover 2 is exemplarily the same as the horizontal dimension of the outer flap 13. When the sealing cover 2 is connected to the cavity 1, the sealing cover 2 covers the outer flap 13, the main sealing ring 26 is located between the outer flap 13 and the sealing cover 2, and the main sealing ring 26 is located outside the opening 14 of the cavity 1, and the main sealing ring 26 seals the inside of the cavity 1. Secondly, exemplarily, the annular groove 28 is set in a rectangular shape, and similarly, the main sealing ring 26 is also set in a rectangular shape. Preferably, the cross section of the main sealing ring 26 is set in a circular shape.

[0045] See also Figure 4 , Figure 5 The sealing cover is provided with a first sealing structure for sealing the first avoidance hole 23, and the sealing cover is also provided with a second sealing structure for sealing the second avoidance hole 22. The first sealing structure includes a first annular groove 27 provided at the main installation position and a first auxiliary sealing ring 25 provided corresponding to the first annular groove 27; the first auxiliary sealing ring 25 is located in the first annular groove 27, and when the sealing cover 2 is connected to the cathode terminal 4, the first auxiliary sealing ring 25 is clamped between the cathode terminal 4 and the sealing cover 2. The second sealing structure includes a second annular groove 29 provided at the auxiliary installation position and a second auxiliary sealing ring 24 provided corresponding to the second annular groove 29, the second auxiliary sealing ring 24 is located in the second annular groove 29, and when the sealing cover 2 is connected to the water end 3, the second auxiliary sealing ring 24 is clamped between the water end 3 and the sealing cover 2.

[0046] Since the sealing cover 2 is provided with a first avoidance hole 23 and a second avoidance hole 22, when performing a vacuum test, it is necessary to avoid leakage inside the first avoidance hole 23 and the second avoidance hole 22, and air enters the cavity 1 from the first avoidance hole 23 or the second avoidance hole 22; therefore, a first sealing structure and / or a second sealing structure needs to be provided, and the first avoidance hole 23 and / or the second avoidance hole 22 needs to be sealed.

[0047] When sealing, the embodiment of the present application exemplarily adopts a sealing ring structure, such as a first sealing structure including a first annular groove 27 arranged at the main installation position and a first secondary sealing ring 25 arranged corresponding to the first annular groove 27. When testing, the cathode terminal 4 is fixed at the main installation position, and the first secondary sealing ring 25 is clamped between the sealing cover 2 plates; the first sealing ring is located outside the first annular groove 27 to seal the first annular groove 27. In addition to the structure of the first annular groove 27 and the first secondary sealing ring 25 cooperating with each other, the first sealing structure can also adopt a ring-shaped sealant arranged on the lower end surface of the sealing cover 2, and the first avoidance hole 23 is sealed by the sealant.

[0048] Exemplarily, the second sealing structure also adopts a sealing ring structure, and the second sealing structure includes a second annular groove 29 provided at the secondary mounting position and a second secondary sealing ring 24 provided corresponding to the second annular groove 29. Through the cooperation between the second secondary sealing ring 24 and the second annular groove 29, when the sealing cover 2 is connected to the water end 3, the second secondary sealing ring 24 is clamped between the water end 3 and the sealing cover 2. Similarly, the second sealing structure can also be in the form of a sealant.

[0049] When performing a leak test, the first secondary sealing ring 25 is located outside the first avoidance hole 23, thereby effectively sealing the periphery of the first avoidance hole 23; similarly, the second secondary sealing ring 24 is located outside the second avoidance hole 22, and the second secondary sealing ring 24 seals the periphery of the second avoidance hole 22.

[0050] See also Figure 4 , Figure 5 The sealing cover is connected with a support frame, and the support frame includes a vertical plate 7 fixed to the sealing cover, and one side of the vertical plate 7 is fixedly connected to the driving device 5. The driving device 5 is provided with a rotating shaft 51, and the rotating shaft 51 is connected with an upper coupling 6, and the upper coupling 6 is used to connect with the upper connecting shaft 42 of the driving part 41 of the cathode terminal 4. The driving device 5 is fixed by the vertical plate 7, and at the same time, the rotating shaft 51 of the driving device and the upper connecting shaft 42 of the driving part 41 of the cathode terminal 4 are located at the same height position, and the rotating shaft 51 is connected to the upper connecting shaft 42 through the upper coupling 6; the driving device 5 drives the upper connecting shaft 42 to rotate through the rotating shaft 51, so as to achieve the purpose of driving the internal rotation of the cathode terminal 4. While the driving device 5 drives the internal rotation of the cathode terminal 4, the linkage shaft assembly 9 drives the internal rotation of the water end 3, simulating the state of the cathode terminal 4 and the water end 3 when working.

[0051] In the embodiment of the present application, the driving device 5 exemplarily includes a driving motor. In addition to the driving motor, the driving device 5 may also use other devices, such as a rotary cylinder, etc. In order to better fit the simulated working environment, the driving motor is preferably used.

[0052] See also Figure 1 , Figure 2 as well as Figure 3 , a plurality of reinforcing plates 8 are connected between the lower end of the vertical plate 7 and the sealing cover 2. In order to improve the strength of the vertical plate 7, in the embodiment of the present application, a reinforcing plate 8 is provided at the lower end of the vertical plate 7, and the reinforcing plate 8 is respectively connected to the lower end of the vertical plate 7 and the sealing cover 2. More preferably, the reinforcing plate 8 is a right-angled triangular plate, and the two right-angled sides of the right-angled triangular plate are respectively fixedly connected to the vertical plate 7 and the sealing cover 2. When connecting, welding can be adopted.

[0053] See also Figure 3 , Figure 4 as well as Figure 5 The linkage shaft assembly includes a main linkage shaft 92 connected to the cathode end 4 and a secondary linkage shaft 91 connected to the water end 3. The main linkage shaft 92 is connected to the secondary linkage shaft 91 or the main linkage shaft 92 is connected to the secondary linkage shaft through a coupling. The cathode end 4 is connected to the water end 3 through the linkage shaft assembly. When driven by the driving device 5, the cathode end 4 is linked with the water end 3 to simulate the working environment.

[0054] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A cathode terminal vacuum leakage detection device, characterized in that: It includes: The cavity has an opening at its upper end and a suction hole for connecting to a vacuum device on the side of the cavity; A sealing cover is connected to the upper end of the cavity and seals its opening. The lower end surface of the sealing cover is provided with a main mounting position for mounting a cathode terminal and a secondary mounting position for mounting a water end. The upper end surface of the sealing cover is provided with a first avoidance hole for the transmission part of the cathode terminal to extend out and a second avoidance hole for the water inlet interface and the water outlet interface of the water end to be exposed. The sealing cover is provided with a leak detection interface for connecting a leak detector and / or a vacuum gauge. The linkage shaft assembly is used to drive the cathode end head to the water end, and the cathode end head can drive the internal rotation of the water end through the linkage shaft assembly; The driving device is fixed to the sealing cover and is used to drive the internal rotation of the cathode terminal.

2. The cathode terminal vacuum leakage detection device according to claim 1, characterized in that: A flange is formed on the side of the cavity, and the through hole in the middle of the flange is the exhaust hole.

3. The cathode terminal vacuum leakage detection device according to claim 1, characterized in that: The upper end of the cavity is provided with an annular outer flap, and the lower end surface of the sealing cover is provided with an annular groove and a main sealing ring arranged corresponding to the annular groove. When the sealing cover is connected to the cavity, the main sealing ring is located in the annular groove and is clamped between the outer flap and the sealing cover.

4. The cathode terminal vacuum leakage detection device according to claim 1, characterized in that: The sealing cover is provided with a first sealing structure for sealing the first avoidance hole.

5. The cathode terminal vacuum leakage detection device according to claim 1, characterized in that: The sealing cover is provided with a second sealing structure for sealing the second avoidance hole.

6. The cathode terminal vacuum leakage detection device according to claim 4, characterized in that: The first sealing structure includes a first annular groove arranged at the main mounting position and a first auxiliary sealing ring arranged corresponding to the first annular groove; the first auxiliary sealing ring is located in the first annular groove, and when the sealing cover is connected to the cathode terminal, the first auxiliary sealing ring is clamped between the cathode terminal and the sealing cover.

7. The cathode terminal vacuum leakage detection device according to claim 5, characterized in that: The second sealing structure includes a second annular groove arranged at the auxiliary mounting position and a second auxiliary sealing ring arranged corresponding to the second annular groove. The second auxiliary sealing ring is located in the second annular groove. When the sealing cover is connected to the water end, the second auxiliary sealing ring is clamped between the water end and the sealing cover.

8. The cathode terminal vacuum leakage detection device according to claim 1, characterized in that: The sealing cover is connected to a support frame, which includes a vertical plate fixed to the sealing cover, one side of the vertical plate is fixedly connected to the driving device, the driving device is provided with a rotating shaft, the rotating shaft is connected to an upper coupling, and the upper coupling is used to connect to the upper connecting shaft of the cathode end drive part.

9. The cathode terminal vacuum leakage detection device according to claim 8, characterized in that: A plurality of reinforcing plates are connected between the lower end of the vertical plate and the sealing cover.

10. The cathode terminal vacuum leakage detection device according to claim 1, characterized in that: The linkage shaft assembly comprises a main linkage shaft connected to the cathode end and a secondary linkage shaft connected to the water end. The main linkage shaft is connected to the secondary linkage shaft or the main linkage shaft is connected to the secondary linkage shaft through a coupling.

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