Cup-shaped component and gluing and developing equipment

By designing a cup-shaped component including a multi-cavity structure, the problem of poor waste liquid capture and diversion when the nozzle moves along a square trajectory is solved, and more efficient waste liquid collection and diversion are achieved.

CN222867002UActive Publication Date: 2025-05-13SICHUAN CHANGJIUXIN TECHNOLOGY CO LTD
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Patent Information

Application Number
CN202421645128.9
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-07-12
Publication Date
2025-05-13
Estimated Expiration
2034-07-12

AI Technical Summary

Technical Problem

In the prior art, when the nozzle moves along a square trajectory, the full-circular cup-shaped components have poor effect on capturing and diverting waste liquid.

Method used

A cup-shaped member is designed, including a first cavity, a second cavity and a third cavity distributed from top to bottom. The first cavity has a first square opening, the second cavity transitions from square to round, and the third cavity has a cylindrical section and a conical section, and the liquid flow rate is controlled through different cross-sectional changes to ensure better capture and direct waste liquid.

Benefits of technology

With this structure, waste liquid generated when the nozzle moves along the square track can be more effectively captured, liquid splashing and spilling are reduced, and waste liquid collection efficiency can be improved.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a cup-shaped part and gluing and developing equipment, and solves the technical problem that in the prior art, when a nozzle moves along a square track, the effect of capturing and guiding waste liquid by a full-circle cup-shaped part is poor. The cup-shaped part is used for collecting waste liquid thrown out from the edge of a wafer when the wafer is glued by gluing and developing equipment, and comprises a first cavity, a second cavity, a third cavity and a fourth cavity which are distributed from top to bottom, the upper end of the first cavity is provided with a first square opening, and the lower end of the first cavity is provided with a second square opening; the side length of the inner wall of the first square opening is smaller than that of the inner wall of the second square opening; a third square opening is formed in the upper end of the second cavity, and a first circular opening is formed in the lower end of the second cavity; the side length of the inner wall of the third square opening is greater than the inner diameter of the first circular opening; a second circular opening is formed in the upper end of the third cavity, and a third circular opening is formed in the lower end of the third cavity; the inner diameter of the third circular opening is larger than that of the second circular opening.
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Description

Technical Field

[0001] The utility model relates to the technical field of glue coating and development, in particular to a cup-shaped component and glue coating and development equipment. Background Art

[0002] The coating and developing equipment is a key equipment commonly used in the field of electronic manufacturing and micro-processing. It is mainly used to coat the surface of the substrate with a photosensitive resin coating, and transfer the pattern through photomask exposure and chemical development to form the desired pattern on the substrate. This process is crucial to the manufacture of printed circuit boards (PCBs), integrated circuits (ICs), micro-electromechanical systems (MEMS) and other products.

[0003] The glue coating and developing equipment is usually composed of a series of modules such as a film box station, a glue coating station, a developing station, and an interface station. Among them, the glue coating station is used to evenly coat the photosensitive resin coating on the surface of the substrate. Common glue coating methods include spin coating and dip coating. In the spin coating process, the glue coating station mainly includes a nozzle, a rotating platform (or chuck) and a cup-shaped component.

[0004] In the process of manufacturing semiconductors by spin coating, the wafer (the coated part, i.e., the substrate) is placed on a rotating platform and rotated during the coating of the photosensitive resin coating, and the photosensitive resin coating is evenly distributed on the surface of the wafer with the help of centrifugal force. The nozzle is usually located above or above the side of the wafer. The nozzle first moves to the center of the wafer to start coating, and then completes the coating process according to the set trajectory; the nozzle can move along different trajectories, such as circular, spiral or square. The cup-shaped component surrounds the bottom and around the wafer to form a ring or enclosure structure. Its main function is to capture and guide the excess waste liquid splashed from the edge of the wafer to the drain pipe. At present, a full-circle cup-shaped component is generally used, but for nozzles moving along a square trajectory, the full-circle cup-shaped component is not effective in capturing and guiding waste liquid. Utility Model Content

[0005] The main purpose of the utility model is to provide a cup-shaped component and a glue coating and developing device to solve the technical problem in the prior art that the full-circle cup-shaped component has a poor effect of capturing and guiding waste liquid when the nozzle moves along a square track.

[0006] In order to achieve the above purpose, the utility model first provides a cup-shaped component, and the technical solution is as follows:

[0007] The cup-shaped part is used to collect the waste liquid thrown out from the edge of the wafer when the coating and developing equipment coats the wafer with glue. The cup-shaped part includes the following parts distributed from top to bottom:

[0008] A first cavity, wherein the upper end of the first cavity has a first square opening, and the lower end of the first cavity has a second square opening; the inner wall side length of the first square opening is smaller than the inner wall side length of the second square opening;

[0009] A second cavity, wherein the second cavity has a third-shaped opening at the upper end and a first circular opening at the lower end; the inner wall side length of the third-shaped opening is greater than the inner diameter of the first circular opening;

[0010] The third cavity has a second circular opening at its upper end and a third circular opening at its lower end; the inner diameter of the third circular opening is greater than the inner diameter of the second circular opening.

[0011] In the cup-shaped component of the utility model, the first cavity first has a first square opening, which better fits the moving path of the nozzle, so that the waste liquid generated when the nozzle moves along the square trajectory can be better captured; the first cavity has an expansion structure that expands downward, which helps to guide the waste liquid to flow downward and prevent the liquid from splashing. The second cavity transitions from square to circular, which not only has good structural stability, but also increases the flow rate of the liquid when it flows from the large third-party circular opening to the small first circular opening, thereby quickly concentrating and guiding the liquid and reducing the splashing and diffusion of the liquid at this stage. The third cavity slows down the flow rate of the liquid when it flows from the small second circular opening to the large third circular opening, which helps to discharge the liquid smoothly and avoid splashing and overflowing during the final discharge.

[0012] As a further improvement of the cup-shaped component, the first square opening has an arc chamfer. Since right angles easily form eddies and liquid stagnation areas, resulting in uneven liquid flow, the arc chamfer is used to reduce these adverse effects, making the liquid flow path smoother and reducing splashing and retention.

[0013] As a further improvement of the cup-shaped component, the first cavity further comprises a first gradient section and a first straight tube section located between the first square opening and the second square opening, and the cross-sectional size of the first gradient section increases from top to bottom. Thus, the liquid gradually decelerates during the flow of the first gradient section, reducing the formation of turbulence and eddy currents, thereby making the fluid flow more stable. The first straight tube section provides a uniform flow area, which can make the liquid flow more stable and smooth, ensuring that the liquid maintains a stable flow state before entering the second cavity.

[0014] As a further improvement of the cup-shaped component, the second cavity also has a second straight section and a second gradient section located between the third rectangular opening and the first circular opening, and the cross-sectional size of the second gradient section decreases from top to bottom. Thus, the second straight section provides a stable flow area, so that the fluid can maintain a uniform and stable flow state before entering the second gradient section, reducing unnecessary disturbances generated in the second gradient section. The second gradient section gradually accelerates the fluid during the flow process by gradually reducing the cross-sectional size, thereby quickly concentrating and guiding the liquid.

[0015] As a further improvement of the cup-shaped component, the second square opening and the third square opening have mutually matching steps, thereby facilitating quick assembly and disassembly.

[0016] As a further improvement of the above cup-shaped component: the second cavity and the third cavity are an integrated structure; or the second cavity and the third cavity are connected by a bolt or a thread, thereby making it more convenient to use.

[0017] As a further improvement of the cup-shaped component, the outer wall of the third cavity is provided with threads, so that it is convenient to fix it on the supporting equipment of the glue coating station.

[0018] As a further improvement of the cup-shaped component, the third cavity further comprises a cylindrical section and a conical section located between the second circular opening and the third circular opening, and the inner diameter of the cross section of the conical section increases from top to bottom. Thus, the cylindrical section provides a stable flow area, so that the fluid can maintain a uniform and stable flow state before entering the conical section, reducing unnecessary disturbances generated in the conical section. The conical section gradually decelerates the fluid during the flow process by gradually increasing the cross-sectional size, which helps to discharge the liquid smoothly and avoid splashing and overflowing when it is finally discharged.

[0019] In order to achieve the above purpose, the utility model secondly provides a cup-shaped component, and the technical solution is as follows:

[0020] A gum coating and developing device comprises the cup-shaped component described in the first aspect.

[0021] It can be seen that the cup-shaped component of the utility model has a simple structure and is easy to process and manufacture. It comprehensively considers the different stages of liquid flow, adopts an enlarged first cavity, a reduced second cavity and an enlarged third cavity, and controls the liquid flow rate through different cross-sectional changes to better collect and guide waste liquid, avoid liquid splashing and overflow, and has good potential in collecting waste liquid thrown out from the edge of the wafer in the glue coating and developing equipment.

[0022] The following is a further description of the embodiments of the invention provided in this specification in conjunction with the accompanying drawings and specific implementation methods. Additional aspects and advantages of the embodiments of the invention provided in this specification will be partially given in the following description, and partially will become apparent from the following description, or will be understood through the practice of the embodiments of the invention provided in this specification. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The drawings that constitute part of the embodiments of the inventions provided in this specification are used to assist in understanding the embodiments of the inventions provided in this specification. The contents provided in the drawings and the related descriptions in the embodiments of the inventions provided in this specification can be used to explain the embodiments of the inventions provided in this specification, but do not constitute improper limitations on the embodiments of the inventions provided in this specification. In the drawings:

[0024] Figure 1 It is a three-dimensional diagram of the cup-shaped component of Example 1 of the utility model.

[0025] Figure 2 It is a side view of the cup-shaped component of Example 1 of the utility model.

[0026] Figure 3 This is a top view of the cup-shaped component of Example 1 of the utility model.

[0027] Figure 4 for Figure 3 AA section view.

[0028] Figure 5 This is a top view of the first cavity in the cup-shaped component of Example 1 of the utility model.

[0029] Figure 6 for Figure 5 BB section view.

[0030] Figure 7 This is a top view of the first cavity in the cup-shaped component of Example 1 of the utility model.

[0031] Figure 8 for Figure 7 CC section view.

[0032] Fig. 9 This is a top view of the first cavity in the cup-shaped component of Example 1 of the utility model.

[0033] Fig.10 for Fig. 9 DD section view.

[0034] The relevant marks in the above drawings are:

[0035] 100-first cavity, 200-second cavity, 300-third cavity, 110-first square opening, 111-chamfer, 120-second square opening, 130-first gradient section, 140-first straight cylinder section, 150-step, 210-third rectangular opening, 220-first circular opening, 230-second straight cylinder section, 240-second gradient section, 250-latch, 310-second circular opening, 320-third circular opening, 330-cylindrical section, 340-conical cylinder section. DETAILED DESCRIPTION

[0036] The following is a clear and complete description of the embodiments of the inventions provided in this specification in conjunction with the accompanying drawings. A person of ordinary skill in the art will be able to implement the embodiments of the inventions provided in this specification based on these descriptions. Before describing the embodiments of the inventions provided in this specification in conjunction with the accompanying drawings, it should be particularly noted that:

[0037] The technical solutions and technical features provided in each part of the embodiments of the invention provided in this specification, including the following description, may be combined with each other if there is no conflict.

[0038] In addition, the embodiments of the embodiments of the inventions provided in this specification involved in the following description are generally only a partial embodiment of the embodiments of the inventions provided in this specification rather than all the embodiments. Therefore, based on the embodiments of the embodiments of the inventions provided in this specification, all other embodiments obtained by ordinary technicians in this field without making any creative work should fall within the scope of protection of the embodiments of the inventions provided in this specification.

[0039] Regarding the terms and units in the embodiments of the inventions provided in this specification: The terms "including", "comprising", "having" and any variations thereof in the descriptions and claims of the embodiments of the inventions provided in this specification and in the related parts are intended to cover non-exclusive inclusions. In addition, other relevant terms and units in the embodiments of the inventions provided in this specification can be reasonably interpreted based on the relevant contents of the embodiments of the inventions provided in this specification.

[0040] Example 1

[0041] Figure 1 It is a three-dimensional view of the cup-shaped component of this embodiment. Figure 2 It is a side view of the cup-shaped component of this embodiment. Figure 3 It is a top view of the cup-shaped component of this embodiment. Figure 4 for Figure 3 AA section view. Figure 5 It is a top view of the first cavity in the cup-shaped component of this embodiment. Figure 6 for Figure 5 BB section view. Figure 7 It is a top view of the second cavity in the cup-shaped component of this embodiment. Figure 8 for Figure 7 CC section view. Fig. 9 It is a top view of the third cavity in the cup-shaped component of this embodiment. Fig.10 for Fig. 9 DD section view.

[0042] like Figure 1-10 The cup-shaped component shown is used to collect waste liquid thrown out from the edge of the wafer when the adhesive coating and developing equipment coats the wafer with adhesive. The cup-shaped component includes a first cavity 100, a second cavity 200 and a third cavity 300 distributed from top to bottom.

[0043] The first cavity 100 has a first square opening 110 at the upper end and a second square opening 120 at the lower end. The inner wall side length of the first square opening 110 is smaller than the inner wall side length of the second square opening 120. The first square opening 110 has an arc chamfer 111. The first cavity 100 also has a first gradient section 130 and a first straight tube section 140 located between the first square opening 110 and the second square opening 120, and the cross-sectional size of the first gradient section 130 increases from top to bottom.

[0044] The second cavity 200 has a third-party rectangular opening 210 at the upper end and a first circular opening 220 at the lower end. The inner wall side length of the third square opening 210 is greater than the inner diameter of the first circular opening 220. The second cavity 200 also has a second straight section 230 and a second gradient section 240 located between the third-party rectangular opening 210 and the first circular opening 220, and the cross-sectional size of the second gradient section 240 decreases from top to bottom. The second square opening 120 and the third-party rectangular opening 210 have mutually adapted steps 150.

[0045] The third cavity 300 has a second circular opening 310 at the upper end and a third circular opening 320 at the lower end. The inner diameter of the third circular opening 320 is greater than the inner diameter of the second circular opening 310. The third cavity 300 also has a cylindrical section 330 and a conical section 340 located between the second circular opening 310 and the third circular opening 320, and the inner diameter of the cross section of the conical section 340 increases from top to bottom. The second cavity 200 and the third cavity 300 are connected by a latch 250. The outer wall of the third cavity 300 is provided with threads.

[0046] Example 2

[0047] Compared with the first embodiment, the cup-shaped component of the present embodiment is different in that the second cavity 200 and the third cavity 300 are an integrated structure.

[0048] The embodiment of the glue coating and developing device of the utility model is used for manufacturing semiconductors, and its glue coating station has a nozzle, a rotating platform (or a chuck) and a cup-shaped component described in any one of the above embodiments. A photosensitive resin coating is applied to the wafer by a spin coating process, and the nozzle movement trajectory is a square.

[0049] The above is a description of the relevant contents of the embodiments of the inventions provided in this specification. Based on these descriptions, a person of ordinary skill in the art will be able to implement the embodiments of the inventions provided in this specification. Based on the above contents of the embodiments of the inventions provided in this specification, all other preferred implementations and embodiments obtained by a person of ordinary skill in the art without making any creative work shall fall within the scope of protection of the embodiments of the inventions provided in this specification.

Claims

1. A cup-shaped component used to collect waste liquid thrown out from the edge of the wafer when the coating and developing equipment coats the wafer with glue, characterized by: The cup-shaped parts include: A first cavity (100), wherein the upper end of the first cavity (100) has a first square opening (110), and the lower end has a second square opening (120); the inner wall side length of the first square opening (110) is smaller than the inner wall side length of the second square opening (120); A second cavity (200), wherein the upper end of the second cavity (200) has a third rectangular opening (210), and the lower end has a first circular opening (220); the inner wall side length of the third rectangular opening (210) is greater than the inner diameter of the first circular opening (220); A third cavity (300), wherein the upper end of the third cavity (300) has a second circular opening (310), and the lower end has a third circular opening (320); the inner diameter of the third circular opening (320) is greater than the inner diameter of the second circular opening (310).

2. The cup-shaped member according to claim 1, characterized in that: The first square opening (110) has an arc-shaped chamfer (111).

3. The cup-shaped member according to claim 1, characterized in that: The first cavity (100) further comprises a first gradient section (130) and a first straight tube section (140) located between the first square opening (110) and the second square opening (120), and the cross-sectional dimension of the first gradient section (130) increases from top to bottom.

4. The cup-shaped member according to claim 1, characterized in that: The second cavity (200) further comprises a second straight section (230) and a second gradient section (240) located between the third rectangular opening (210) and the first circular opening (220), and the cross-sectional dimension of the second gradient section (240) decreases from top to bottom.

5. The cup-shaped member according to claim 1, characterized in that: The second square opening (120) and the third square opening (210) have steps (150) that fit each other.

6. The cup-shaped member according to claim 1, characterized in that: The second cavity (200) and the third cavity (300) are an integrated structure; or, the second cavity (200) and the third cavity (300) are connected by a latch (250) or by threads.

7. The cup-shaped member according to claim 1, characterized in that: The outer wall of the third cavity (300) is provided with threads.

8. The cup-shaped member according to claim 1, characterized in that: The third cavity (300) further comprises a cylindrical section (330) and a conical section (340) located between the second circular opening (310) and the third circular opening (320), and the inner diameter of the cross section of the conical section (340) increases from top to bottom.

9. Glue coating and developing equipment, characterized in that: A cup-shaped component according to any one of claims 1 to 8.