Bearing boat and processing equipment

Abstract

The utility model relates to the technical field of semiconductors and photovoltaics, in particular to a bearing boat and processing equipment. The problem that in the prior art, when a bearing boat is used for horizontally bearing the flaky material, the flaky material is bent and deformed is solved. The bearing boat comprises a first side plate, a second side plate, a bearing top rod, a bearing bottom rod and an auxiliary bearing rod, the auxiliary bearing rod, the bearing top rod, the bearing bottom rod, the first side plate and the second side plate define a containing space for containing sheet materials, the containing space comprises an insertion opening, and the insertion opening and the auxiliary bearing rod are oppositely arranged; the bearing top rod, the bearing bottom rod and the auxiliary bearing rod are parallel to one another and extend in the first direction, a non-zero included angle is formed between the first direction and the horizontal plane, and a plurality of containing grooves for bearing sheet materials are formed in the containing space. According to the bearing boat and the processing equipment, through the bearing top rod, the bearing bottom rod and the auxiliary bearing rod, the sheet-shaped material is obliquely supported relative to the vertical plane, and the warping degree of the sheet-shaped material during sheet insertion can be reduced.

Description

Technical Field

[0001] The present disclosure relates to the field of semiconductor and photovoltaic technology, and in particular to a carrier boat and processing equipment. Background Art

[0002] With the development of photovoltaic technology, solar cells are widely used in various fields. The manufacture of solar cells includes different process treatments of sheet materials through various processing equipment. When processing sheet materials, it is necessary to use a carrying boat to carry multiple sheet materials so as to facilitate the transportation and placement of multiple sheet materials in the reaction chamber of the processing equipment.

[0003] At present, sheet materials are inserted into the carrier boat in a horizontal manner, that is, the carrier boat usually carries multiple sheet materials horizontally. However, since sheet materials are prone to bending and deformation under their own weight, and in the process of processing the sheet materials, different layers formed in the sheet materials have different physical properties, such as expansion coefficient, which can also make the sheet materials prone to bending and deformation. Utility Model Content

[0004] In view of this, the embodiments of the present disclosure provide a carrying boat and a processing device to solve the problem in the related art that the sheet material carried in the carrying boat is prone to warping and deformation.

[0005] In a first aspect, an embodiment of the present disclosure provides a load-bearing boat for carrying a plurality of sheet materials, the load-bearing boat comprising: a first side plate; a second side plate, arranged opposite to the first side plate in the extension direction of the horizontal plane; at least one load-bearing top rod, respectively connected to the first side plate and the second side plate; at least one load-bearing bottom rod, respectively connected to the first side plate and the second side plate, the load-bearing bottom rod being correspondingly arranged below the load-bearing top rod; at least one auxiliary load-bearing rod, respectively connected to the first side plate and the second side plate, the orthographic projection of the auxiliary load-bearing rod in the vertical plane being located between the orthographic projection of the load-bearing top rod in the vertical plane and the orthographic projection of the load-bearing bottom rod in the vertical plane. In the figure, the auxiliary bearing rod, the bearing top rod, the bearing bottom rod, the first side plate and the second side plate are enclosed to form a accommodating space for accommodating sheet materials, and the accommodating space includes an insertion port, which is arranged opposite to the auxiliary bearing rod, and the bearing top rod, the bearing bottom rod and the auxiliary bearing rod are parallel to each other and extend along a first direction, and the first direction has a non-zero angle relative to a horizontal plane; wherein, a plurality of accommodating grooves are arranged in the accommodating space at intervals along the first direction, and the accommodating grooves are configured to carry the sheet materials inserted into the accommodating space from the insertion port, and the carried sheet materials are inclined relative to the vertical plane.

[0006] In some embodiments, the load-bearing top rod, the load-bearing bottom rod and the auxiliary load-bearing rod all include a slot structure, and the slot structure includes: a first slot, which is arranged on the side of the load-bearing top rod facing the accommodating space, and on the side of the load-bearing bottom rod facing the accommodating space, the opening of the first slot faces the accommodating space, and multiple first slots on the load-bearing top rod are arranged at intervals along the first direction, and multiple first slots on the load-bearing bottom rod are arranged at intervals along the first direction, and the first slots on the load-bearing top rod and the first slots on the load-bearing bottom rod are arranged one-to-one; a second slot, which is arranged on the side of the auxiliary load-bearing rod facing the insertion port, and the opening of the second slot faces the accommodating space, and multiple second slots are arranged at intervals along the first direction, and the second slots are arranged one-to-one with the first slots on the load-bearing top rod, and are arranged one-to-one with the first slots on the load-bearing bottom rod.

[0007] In some embodiments, the opening directions of the first card slot and the second card slot are perpendicular to the first direction, and when the corresponding first card slot and the second card slot carry the sheet material, the sheet material is inclined at a preset angle relative to the vertical plane.

[0008] In some embodiments, the preset angle is between 2°-3°.

[0009] In some embodiments, the first card slot passes through the corresponding load-bearing top rod and load-bearing bottom rod respectively along the second direction, and the cross-section of the first card slot in the second direction is a V-shaped structure, and the second direction is a horizontal direction perpendicular to the first direction; and / or, the second card slot passes through the auxiliary load-bearing rod along a direction perpendicular to the first direction, and the cross-section of the second card slot in the second direction is a V-shaped structure.

[0010] In some embodiments, the depth of the second slot in the direction perpendicular to the first direction is 1 / 3-1 / 4 of the dimension of the auxiliary bearing bar in the direction perpendicular to the first direction.

[0011] In some embodiments, the load-bearing top rod and the load-bearing bottom rod are arranged in a one-to-one correspondence and are arranged at intervals along a second direction, where the second direction is a horizontal direction perpendicular to the first direction. Along the second direction, the load-bearing top rod and the load-bearing bottom rod at one end form an insertion opening with the first side plate and the second side plate, and the load-bearing top rod and the load-bearing bottom rod at the other end are provided with an auxiliary load-bearing rod on the side away from the insertion opening, and the auxiliary load-bearing rod and the load-bearing top rod have a preset distance in the second direction.

[0012] In some embodiments, at least one of the first side plate and the second side plate is provided with an identification portion on a side away from the load-bearing top bar, and the identification portion is configured to place the first side plate and the second side plate on the side with the identification portion downward.

[0013] In some embodiments, the carrying boat further includes a plurality of handles, which are respectively arranged on the side of the first side plate and the second side plate away from each other, the handles located on the first side plate and the second side plate correspond one to one, and the planes where the corresponding handles are located are parallel to the horizontal plane.

[0014] In a second aspect, an embodiment of the present disclosure provides a processing device, including: a main body, having a processing chamber; and the supporting boat described in the first aspect, which can be placed in the processing chamber.

[0015] A carrying boat and processing equipment provided by the embodiments of the present disclosure can form an insertion port with a side opening opposite to the auxiliary carrying rod by cooperating with the carrying top rod and the carrying bottom rod with the first side plate and the second side plate through the auxiliary carrying rod, so that a sheet material can be inserted from the insertion port. While the accommodating grooves located on the carrying top rod, the carrying bottom rod and the auxiliary carrying rod can support the carrying insertion, the supporting load of the auxiliary carrying rod on the sheet material is increased, thereby effectively reducing the degree of warping deformation of the sheet material.

[0016] In addition, the extension direction of the load-bearing top rod, the load-bearing bottom rod and the auxiliary load-bearing rod is set to be inclined relative to the horizontal plane, so that the sheet material carried by the accommodating groove is inclined relative to the vertical plane, which is conducive to better fit of the double-inserted sheet material. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The above and other purposes, features and advantages of the present disclosure will become more apparent by describing the embodiments of the present disclosure in more detail in conjunction with the accompanying drawings. The accompanying drawings are used to provide a further understanding of the embodiments of the present disclosure and constitute a part of the specification. Together with the embodiments of the present disclosure, they are used to explain the present disclosure and do not constitute a limitation of the present disclosure. In the drawings, the same reference numerals generally represent the same components or steps.

[0018] Figure 1 Shown is a schematic structural diagram of a carrying boat provided in one embodiment of the present disclosure.

[0019] Figure 2 Shown Figure 1 The shown is a partial enlarged view of the support boat in area A.

[0020] Figure 3 Shown is a front view of a carrying boat carrying a silicon substrate provided by an embodiment of the present disclosure.

[0021] Figure 4 Shown is a top view of a carrying boat provided in accordance with an embodiment of the present disclosure.

[0022] Figure 5 Shown is a left side view of a carrying boat provided in one embodiment of the present disclosure.

[0023] Figure 6 Shown is a front view of a carrying boat carrying a silicon substrate provided by an embodiment of the present disclosure.

[0024] Figure 7 Shown Figure 6 A partial enlarged view of area B in the carrier boat is shown.

[0025] Figure 8 Shown is a simple schematic diagram of a processing device provided by an embodiment of the present disclosure.

[0026] Reference numerals:

[0027] 100. Processing equipment; 10. Carrying boat; 1. First side panel; 11. Accommodating space; 12. Insertion port; 13. Identification part; 2. Second side panel; 3. Carrying top rod; 4. Carrying bottom rod; 5. Auxiliary carrying rod; 6. Accommodating slot; 61. First card slot; 62. Second card slot; 7. Handle; 20. Silicon substrate; 30. Main body; 301. Processing chamber; 40. Boat support; 401. Upper surface of boat support; X, first direction; Y, second direction; Z, third direction; Q, insertion direction; M, horizontal plane; N, vertical plane; L, preset distance; W, first angle; P, second angle. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of the present disclosure to clearly and completely describe the technical solutions in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, not all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0029] The present disclosure provides a carrying boat for carrying a plurality of sheet materials. It is understood that the sheet material includes a process surface and a non-process surface disposed opposite to each other along the thickness direction, and the process surface of the sheet material can form multiple layers of different film structures by depositing different materials.

[0030] It should be emphasized that the sheet material can be, for example, a silicon substrate or a perovskite substrate made of a perovskite material, without specific limitation. In addition, the shape of the sheet material can be circular or square, without specific limitation. For ease of explanation, the carrier boat is described in detail in the embodiment of the present disclosure with the sheet material being a square silicon substrate. For ease of understanding, the sheet material will be collectively referred to as a silicon substrate in the following, and will not be emphasized separately.

[0031] It can be understood that after the carrier boat is used to carry multiple silicon substrates, it can enter the processing chamber of the processing equipment to perform corresponding process treatment on the silicon substrates. For example, the processing equipment can be a low pressure chemical vapor deposition (LPCVD) device, the LPCVD device has an LPCVD reaction chamber, and the carrier boat can be placed in the LPCVD reaction chamber to deposit and form a film on the process surface of the silicon substrate in the carrier boat. Among them, the carrier boat can also be called a quartz boat, that is, a boat structure prepared with quartz as the main raw material, so that when the silicon substrate is processed in the LPCVD reaction chamber, the high temperature resistance, acid resistance, and alkali resistance of the carrier boat can provide good support and bearing stability for the silicon substrate.

[0032] Optionally, the silicon substrates can be inserted into the carrier boat in a double-insertion manner, so that every two silicon substrates in the carrier boat form a group, the non-process surfaces of the two silicon substrates in the same group are bonded, and the process surfaces of the two silicon substrates are arranged outward, so that coating only acts on the process surface of the silicon substrate to prevent bypass plating.

[0033] The structure of the carrier boat is described in detail below by taking the double insertion method of inserting the silicon substrate into the carrier boat as an example.

[0034] The specific structure of the carrying boat is described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0035] Figure 1 Shown is a schematic structural diagram of a carrying boat provided in one embodiment of the present disclosure. Figure 2 Shown Figure 1 The shown is a partial enlarged view of the support boat in area A. Figure 3 Shown is a front view of a carrying boat provided in one embodiment of the present disclosure. Figure 4 Shown is a top view of a carrying boat provided in accordance with an embodiment of the present disclosure. Figure 5 The figure shows a left view of a carrier boat provided by an embodiment of the present disclosure. The direction indicated by arrow X is the first direction, the direction indicated by arrow Y is the second direction, the direction indicated by arrow Z is the third direction, the second direction Y is a horizontal direction perpendicular to the first direction X, the third direction Z is perpendicular to the second direction Y, the first direction X is perpendicular to the second direction Y, the first direction X and the second direction Y intersect and the included angle is less than 90°, the plane indicated by M is a horizontal plane, the plane indicated by N is a vertical plane, and the direction indicated by the double arrow Q is the insertion direction of the silicon substrate.

[0036] It can be understood that, in order to facilitate the description of the relative positional relationship of each structure in the carrier boat 10, the horizontal plane M and the vertical plane N are schematically shown in the figure as the reference plane for description. In practice, the horizontal plane M and the vertical plane N do not specifically refer to a certain plane, and any plane formed in the horizontal direction can be used as the horizontal plane M, and any vertical plane formed in the vertical direction can be used as the vertical plane N. In addition, in order to facilitate observation, the dual-insertion silicon substrate carried by the receiving groove 6 is simplified into a whole and represented by black shadows. The two non-process surfaces of the dual-insertion silicon substrate are opposite. In order to facilitate description later, the dual-insertion silicon substrate is directly simplified to be the silicon substrate 20, and will not be emphasized separately later.

[0037] like Figures 1 to 5 The carrying boat 10 includes a first side plate 1, a second side plate 2, at least one carrying top rod 3, at least one carrying bottom rod 4 and at least one auxiliary carrying rod 5. The second side plate 2 is arranged opposite to the first side plate 1 in the extension direction of the horizontal plane M. The carrying top rod 3 is respectively connected to the first side plate 1 and the second side plate 2. The carrying bottom rod 4 is respectively connected to the first side plate 1 and the second side plate 2. The carrying bottom rod 4 is correspondingly arranged below the carrying top rod 3. The auxiliary carrying rod 5 is respectively connected to the first side plate 1 and the second side plate 2. The orthographic projection of the auxiliary carrying rod 5 on the vertical plane N is located between the orthographic projection of the carrying top rod 3 on the vertical plane N and the orthographic projection of the carrying bottom rod 4 on the vertical plane N. The auxiliary carrying rod 5, the carrying top rod 3, the carrying bottom rod 4, the first side The plate 1 and the second side plate 2 are enclosed to form a accommodating space 11 for accommodating the silicon substrate 20. The accommodating space 11 includes an insertion port 12. The load-bearing top rod 3 and the load-bearing bottom rod 4 are enclosed with the first side plate 1 and the second side plate 2 to form the insertion port 12. The insertion port 12 is arranged opposite to the auxiliary load-bearing rod 5. The load-bearing top rod 3, the load-bearing bottom rod 4 and the auxiliary load-bearing rod 5 are parallel to each other and extend along a first direction X. The first direction X has a non-zero angle relative to the horizontal plane M. A plurality of accommodating grooves 6 are arranged in the accommodating space 11 at intervals along the first direction X. The accommodating grooves 6 are configured to carry the silicon substrate 20 inserted into the accommodating space 11 from the insertion port 12, and the carried silicon substrate 20 is inclined relative to the vertical plane N.

[0038] In an optional embodiment, the first side plate 1 and the second side plate 2 can be set as a plate-like structure with the same structure. The shape, size, thickness, etc. of the first side plate 1 and the second side plate 2 can be adaptively adjusted according to the needs, and are not specifically limited. In the embodiment of the present disclosure, the first side plate 1 and the second side plate 2 are set as a square plate-like structure. The two side plates are arranged at intervals on the horizontal plane M. The thickness direction of the square plate is the same as the arrangement direction of the two side plates. The two opposite surfaces of the first side plate 1 and the second side plate 2 are parallel to each other and parallel to the vertical plane N. When the carrying boat 10 carries the silicon substrate 20, the process surface of the carried silicon substrate 20 faces the first side plate 1 or the second side plate 2.

[0039] Optionally, the specific method of connecting the two ends of the load-bearing top rod 3, the load-bearing bottom rod 4 and the auxiliary load-bearing rod 5 to the first side plate 1 and the second side plate 2 may include welding, clamping, threaded fastening connection, etc., which are not specifically limited. In the embodiment of the present disclosure, the side plates and the corresponding rods can be connected by welding to improve the overall structural stability and strength of the load-bearing boat 10, thereby improving the load-bearing performance of the silicon substrate 20.

[0040] In an optional embodiment, at least one of the first side plate 1 and the second side plate 2 is provided with an identification portion 13 on a side away from the load-bearing top rod 3, and the identification portion 13 is configured to place the first side plate 1 and the second side plate 2 on the side with the identification portion 13 downward. The identification portion 13 can be conveniently and quickly identified to identify the load-bearing top rod 3, the load-bearing bottom rod 4 and the auxiliary load-bearing rod 5, and the first side plate 1 and the second side plate 2 on the side with the identification portion 13 are placed downward to quickly identify the insertion port 12 and make the insertion port 12 a side opening, thereby increasing the speed of placing the load boat 10 in the processing chamber.

[0041] Optionally, the identification portion 13 may be a through hole, a groove, or an etched text mark, etc., provided on the first side plate 1 or the second side plate 2, without specific limitation. In the disclosed embodiment, the identification portion 13 is provided as a groove structure provided on a side of the first side plate 1 away from the load-bearing top rod 3, and the specific shape and size of the groove may be adaptively adjusted according to actual needs, and will not be described in detail.

[0042] In an optional embodiment, the carrying boat 10 further includes a plurality of handles 7, which are respectively arranged on the side away from each other of the first side plate 1 and the second side plate 2, the handles 7 located on the first side plate 1 and the second side plate 2 correspond to each other, and the planes where the corresponding handles 7 are located are parallel to the horizontal plane M. When the carrying boat 10 is carried or placed in the processing chamber by the handles 7, the handles 7 parallel to the horizontal plane M cooperate with the external structure, so that the carrying boat 10 can maintain a state in which the first direction X extending from the carrying top rod 3, the carrying bottom rod 4 and the auxiliary carrying rod 5 has a non-zero angle with the horizontal plane M, so that when the accommodating groove 6 of the accommodating space 11 carries a plurality of silicon substrates 20, the carried silicon substrates 20 are maintained in a state of being inclined relative to the vertical plane N.

[0043] It is understandable that the number, size, shape, etc. of the handles 7 can be adaptively selected according to actual needs without specific limitation.

[0044] In the disclosed embodiment, a side-opening insertion port 12 is formed by placing a first side plate 1 and a second side plate 2 on the left and right and a load-bearing top rod 3 and a load-bearing bottom rod 4 on the top and bottom. An auxiliary load-bearing rod 5 is provided on the side opposite to the insertion port 12, so that when the silicon substrate 20 is inserted into the accommodating space 11 from the insertion port 12 along the insertion direction Q, the load-bearing top rod 3, the load-bearing bottom rod 4 and the auxiliary load-bearing rod 5 can all play a bearing role on the silicon substrate 20, thereby improving the strength and stability of supporting the silicon substrate 20 and reducing the degree of warping deformation of the silicon substrate 20 in the carrying boat 10.

[0045] In addition, the insertion port 12 opened in the side direction can facilitate the insertion of the silicon substrate 20, and the process surface of the silicon substrate 20 faces the first side plate 1 or the second side plate 2. When the carrying boat 10 is placed in the reaction chamber, the silicon substrate 20 is in a state of having an angle with the vertical plane N, so as to avoid the deformation of the silicon substrate 20 caused by the influence of gravity when the silicon substrate 20 is placed horizontally. In addition, the auxiliary carrying rod 5 arranged on the side opposite to the insertion port 12 can support and carry the inserted silicon substrate 20, which can further reduce the degree of bending deformation of the silicon substrate 20.

[0046] In addition, the extension direction (i.e., the first direction X) of the supporting top rod 3, the supporting bottom rod 4, and the auxiliary supporting rod 5 is set to be inclined relative to the horizontal plane M, so that the supported silicon substrate 20 is inclined relative to the vertical plane N, which is beneficial for the non-process surfaces of the two double-inserted silicon substrates 20 to fit more closely, preventing wrap-around plating and reducing deformation caused by the deposition of deposition layers of different physical properties on the process surface of the silicon substrate 20.

[0047] In some embodiments, the number of load-bearing top rods 3 and load-bearing bottom rods 4 is the same and corresponds one to one, and the corresponding load-bearing top rods 3 are located above the load-bearing bottom rods 4. Along the second direction Y, the load-bearing top rods 3 and the load-bearing bottom rods 4 located at one end enclose an insertion port 12 with the first side panel 1 and the second side panel 2, and the load-bearing top rods 3 and the load-bearing bottom rods 4 located at the other end are provided with auxiliary load-bearing rods 5 on the side away from the insertion port 12, and the auxiliary load-bearing rods 5 and the load-bearing top rods 3 have a preset distance L in the second direction Y.

[0048] In an optional embodiment, the number of the top bearing rods 3 and the bottom bearing rods 4 can be set to two, the two top bearing rods 3 are arranged at intervals along the second direction Y on the horizontal plane M, the two bottom bearing rods 4 are correspondingly arranged directly below the two top bearing rods 3 in the third direction Z, and the two bottom bearing rods 4 are also arranged at intervals along the second direction Y on the horizontal plane M. Along the thickness direction of the first side plate 1 and the second side plate 2, the two top bearing rods 3 and the two bottom bearing rods 4 enclose a square or a rectangle, and the four rods are respectively located at the four corners of the square. The top bearing rods 3 and the bottom bearing rods 4 arranged up and down at one end in the second direction Y (arranged along the third direction Z) are enclosed with the first side plate 1 and the second side plate 2 to form an insertion port 12, and the top bearing rods 3 and the bottom bearing rods 4 located at the other end can be provided with an auxiliary bearing rod 5 on the side away from the insertion port 12. The silicon substrate 20 can enter the accommodation space 11 from the side from the insertion port 12, and is simultaneously carried by the accommodation grooves 6 of the top bearing rods 3, the bottom bearing rods 4 and the auxiliary bearing rods 5 in the accommodation space 11. In the silicon substrate 20 in the accommodating space 11, except for one edge facing the insertion port 12, the other three edges of the silicon substrate 20 can be supported by the accommodating groove 6 of the supporting top rod 3, the supporting bottom rod 4 and the auxiliary supporting rod 5, thereby improving the bearing strength and bearing performance of the supporting boat 10 for the silicon substrate 20, thereby reducing the warping deformation of the edge of the supported silicon substrate 20.

[0049] It can be understood that the preset distance L between the auxiliary supporting rod 5 and the supporting top rod 3 in the second direction Y can be, for example, 1mm, 5mm, 10mm and 20mm, etc., and can be adaptively adjusted according to the specific size of the silicon substrate 20 and the specific matching structure of the supporting top rod 3 and the supporting bottom rod 4, without specific limitation.

[0050] Optionally, a plurality of auxiliary bearing rods 5 may be provided, and the plurality of auxiliary bearing rods 5 may be arranged at intervals along the third direction Z, which will not be described in detail.

[0051] In an optional embodiment, the auxiliary bearing rod 5 may not be arranged on the side of the bearing top rod 3 and the bearing bottom rod 4 at the other end away from the insertion port 12. For example, the auxiliary bearing rod 5 may be located between the bearing top rod 3 and the bearing bottom rod 4 at the other end in the third direction Z, and the bearing top rod 3, the auxiliary bearing rod 5 and the bearing bottom rod 4 are located in the same vertical plane N, as long as the receiving grooves 6 of the bearing top rod 3, the bearing bottom rod 4 and the auxiliary bearing rod 5 can respectively support the other three sides of the bearing silicon substrate 20 except the side facing the insertion port 12, without specific limitation.

[0052] In other examples, the number of the top bearing rod 3 and the bottom bearing rod 4 may also be one, three, four, etc., which will not be described in detail.

[0053] Optionally, the top bearing rod 3 may not be arranged directly above the bottom bearing rod 4, that is, the top bearing rod 3 and the bottom bearing rod 4 may not be located in the same vertical plane N in the vertical direction. There is a gap between the orthographic projection of the top bearing rod 3 on the horizontal plane M and the orthographic projection of the bottom bearing rod 4 on the horizontal plane M, so that along the arrangement direction of the first side plate 1 and the second side plate 2, the two top bearing rods 3 and the two bottom bearing rods 4 enclose a rhombus, and the four rods are respectively located at the four corners of the rhombus.

[0054] It is understandable that the number of the load-bearing top rods 3 and the load-bearing bottom rods 4 can also be set to be different, and can be adaptively adjusted according to needs, which will not be repeated here.

[0055] The following describes an exemplary structure in which the top bearing rod 3 , the bottom bearing rod 4 , and the auxiliary bearing rod 5 are provided with the receiving groove 6 .

[0056] Figure 6 Shown is a front view of a carrying boat carrying a silicon substrate provided by an embodiment of the present disclosure. Figure 7 Shown Figure 6 A partial enlarged view of area B in the carrier boat is shown.

[0057] like Figure 2 , Figure 6 and Figure 7 The receiving groove 6 may be a slot structure provided on the load-bearing top rod 3, the load-bearing bottom rod 4 and the auxiliary load-bearing rod 5. The edge of the silicon substrate 20 can extend into the slot structure, thereby supporting and bearing the silicon substrate 20 in the receiving space 11.

[0058] The card slot structure includes a first card slot 61 and a second card slot 62. The first card slot 61 is arranged on the side of the load-bearing top rod 3 facing the accommodating space 11, and on the side of the load-bearing bottom rod 4 facing the accommodating space 11. The opening of the first card slot 61 faces the accommodating space 11. The multiple first card slots 61 on the load-bearing top rod 3 are arranged at intervals along the first direction, and the multiple first card slots 61 on the load-bearing bottom rod 4 are arranged at intervals along the first direction X, and the first card slot 61 on the load-bearing top rod 3 and the first card slot 61 on the load-bearing bottom rod 4 are arranged one-to-one; the second card slot 62 is arranged on the side of the auxiliary load-bearing rod 5 facing the insertion port 12, and the opening of the second card slot 62 faces the accommodating space 11. The multiple second card slots 62 are arranged at intervals along the first direction X, and the second card slot 62 is arranged one-to-one with the first card slot 61 on the load-bearing top rod 3, and is arranged one-to-one with the first card slot 61 on the load-bearing bottom rod 4. When the supported silicon substrate 20 is located in the accommodating space 11, the two opposite edges of the silicon substrate 20 can extend into the first card slot 61, and the first card slot 61 can respectively support the upper and lower sides of the silicon substrate 20, and the edge of the silicon substrate 20 away from the insertion port 12 can extend into the corresponding second card slot 62. The setting of the first card slot 61 and the second card slot 62 makes the silicon substrate 20 tilt relative to the vertical plane N.

[0059] It can be understood that the bearing bottom rod 4 and the bearing top rod 3 are the same, and both the bearing bottom rod 4 and the bearing top rod 3 are circular rod structures extending along the first direction X, and the diameter of the circle of the cross section of the rod can be selected according to actual needs. In other examples, the bearing bottom rod 4 and the bearing top rod 3 can also be set to different rod structures, and the cross section of the rod can be square, oval, etc., without specific limitation.

[0060] Optionally, the auxiliary bearing rod 5 can be set to a rod-shaped structure that is the same as the bearing bottom rod 4 and the bearing top rod 3. In the embodiment of the present disclosure, the bearing top rod 3, the bearing bottom rod 4 and the auxiliary bearing rod 5 are set to the same round rod structure, and the depth of the first clamping groove 61 and the second clamping groove 62 perpendicular to the first direction X is 1 / 3-1 / 4 of the size of the round rod perpendicular to the first direction X, so that the bearing top rod 3, the bearing bottom rod 4 and the auxiliary bearing rod 5 have sufficient support strength for the silicon substrate 20, thereby improving the structural stability and service life of the bearing boat 10. In other examples, the auxiliary bearing rod 5 can also be set to a rod-shaped structure different from the bearing bottom rod 4 and the bearing top rod 3. For example, the auxiliary bearing rod 5 can be set to a rod with a circular cross-section, but the diameter of the rod is smaller than the diameter of the bearing bottom rod 4 and the bearing top rod 3. In the embodiment of the present disclosure, the bearing top rod 3, the bearing bottom rod 4 and the auxiliary bearing rod 5 are set to round rod structures with the same diameter.

[0061] Optionally, a plurality of first card slots 61 are equally spaced along the first direction X on the load-bearing top rod 3 and the load-bearing bottom rod 4, a plurality of second card slots 62 are equally spaced along the first direction X on the auxiliary load-bearing rod 5, the distance between adjacent first card slots 61 is equal to the distance between adjacent second card slots 62, and the distance between adjacent first card slots 61 can be adaptively adjusted according to actual needs without specific limitation.

[0062] Optionally, the opening directions of the first slot 61 and the second slot 62 are perpendicular to the first direction X, and the line connecting the center of the first slot 61 corresponding to the top bearing rod 3 and the bottom bearing rod 4 and the center of the auxiliary bearing rod 5 is inclined at a first angle W relative to the vertical plane N. The first angle W is also the angle between the first direction X and the horizontal plane M. The first angle W can be any angle greater than 0° and less than 3°. In the disclosed embodiment, the first angle W is set to 2°.

[0063] In an optional embodiment, the opening size of the first card slot 61 in the first direction X can be adaptively selected according to the overall thickness of the double-inserted silicon substrate 20, and the thickness of the silicon substrate 20 extending into the first card slot 61 can just match the size of the first card slot 61, so that the edge of the silicon substrate 20 can be snapped into the first card slot 61, or the silicon substrate 20 extending into the first card slot 61 can be loosely matched with the first card slot 61 to facilitate the rapid insertion of the silicon substrate 20 into the first card slot 61, without specific limitation.

[0064] Optionally, the preset angle at which the supported silicon substrate 20 is tilted relative to the vertical plane N is a second angle P. When the silicon substrate 20 is engaged with the first slot 61, the second angle P may be the same as the first angle W, and the second angle P is between 2° and 3°. When the silicon substrate 20 is loosely engaged with the first slot 61, the second angle P may be different from the first angle W, the second angle P is greater than the first angle W, and the second angle P is between 2° and 3°.

[0065] In an optional embodiment, the first slot 61 penetrates the corresponding top bearing rod 3 and bottom bearing rod 4 respectively along the second direction Y, and the cross section of the first slot 61 in the second direction Y is a V-shaped structure. The second slot 62 penetrates the auxiliary bearing rod 5 along a direction perpendicular to the first direction X, and the cross section of the second slot 62 in the direction perpendicular to the first direction X is a V-shaped structure. Wherein, the V-shaped structure is set as a plane parallel to the extension direction of the first direction X on the bottom surface of the corresponding rod, so as to contact with the silicon substrate 20, and the V-shaped opening of the V-shaped structure is perpendicular to the first direction X toward the silicon substrate 20 to be carried, so that the silicon substrate 20 can enter the corresponding first slot 61 during the insertion of the silicon substrate 20 from the insertion port 12 in the insertion direction Q, and move relative to the first slot 61 along the second direction Y until the silicon substrate 20 cooperates with the second slot 62, and the first slot 61 can provide guidance for the inserted silicon substrate 20 to avoid bending and deformation of the silicon substrate 20 during the insertion process.

[0066] Optionally, the first card slot 61 and the second card slot 62 may also be configured as slot structures with other cross-section shapes, such as a U-shaped structure, without specific limitation.

[0067] In other examples, the corresponding slot structure may not be directly provided on the top bearing rod 3, the bottom bearing rod 4 and the auxiliary bearing rod 5. Instead, a protrusion arranged in the direction of the accommodation space 11 may be firstly provided on the top bearing rod 3, the bottom bearing rod 4 and the auxiliary bearing rod 5, and a corresponding accommodation slot 6 may be provided on the protrusion, which is not specifically limited.

[0068] The present disclosure also provides a processing device, such as Figure 8 The processing equipment 100 includes a main body 30, which has a processing chamber 301. The processing chamber 301 can be used to place the carrier boat 10. The carrier boat 10 can be the carrier boat 10 described in the above embodiments, which will not be described in detail. The processing equipment 100 can be an LPCVD device. The LPCVD device has an LPCVD reaction chamber. The carrier boat can be placed in the LPCVD reaction chamber to deposit a film on the process surface of the silicon substrate in the carrier boat.

[0069] Optionally, the processing equipment 100 further includes a boat support 40, which is located in the LPCVD reaction chamber. The boat support 40 has an upper surface 401 of the boat support, which is an inclined slope for placing the carrier boat 10. When the carrier boat 10 is placed on the boat support 40, the first side plate 1 and the second side plate 2 of the carrier boat 10 on one side of the identification portion 13 are in contact with the upper surface 401 of the boat support. Under the action of the inclined upper surface 401 of the boat support 40, the insertion port 12 opened on the side of the carrier boat 10 is tilted upward (the double arrow Q in the figure indicates the insertion direction of the silicon substrate 20), so as to facilitate the insertion or removal of the silicon substrate 20 from the insertion port 12, which will not be described in detail.

[0070] In the embodiments of the present disclosure, if not clearly defined, the connection form may be a detachable connection by means of bolts and nuts, screws, buckles, magnetic attraction, etc. In some connections, if there is no special requirement for the detachable form, a non-detachable connection may be made by means of welding, bonding, etc.

[0071] The basic principles of the present disclosure are described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, effects, etc. mentioned in the present disclosure are only examples and not limitations, and it cannot be considered that these advantages, strengths, effects, etc. are required by each embodiment of the present disclosure. In addition, the specific details disclosed above are only for the purpose of illustration and ease of understanding, and are not limitations. The above details do not limit the present disclosure to the necessity of adopting the above specific details to be implemented.

[0072] The block diagrams of the devices, apparatuses, equipment, and systems involved in this disclosure are only illustrative examples and are not intended to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagrams. As will be appreciated by those skilled in the art, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including," "comprising," "having," and the like are open words, referring to "including but not limited to," and can be used interchangeably therewith. The words "or" and "and" used herein refer to the words "and / or," and can be used interchangeably therewith, unless the context clearly indicates otherwise. The word "such as" used herein refers to the phrase "such as but not limited to," and can be used interchangeably therewith.

[0073] It should also be noted that in the apparatus, device and method of the present disclosure, each component or each step can be decomposed and / or recombined. Such decomposition and / or recombination should be regarded as equivalent solutions of the present disclosure.

[0074] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present disclosure. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present disclosure. Therefore, the present disclosure is not intended to be limited to the aspects shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

[0075] The above description has been given for the purpose of illustration and description. In addition, this description is not intended to limit the embodiments of the present disclosure to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions and sub-combinations thereof.

Claims

1. A carrying boat, characterized in that: Used to carry a plurality of sheet materials, the carrying boat comprises: first side panel; A second side plate, arranged opposite to the first side plate in an extending direction of a horizontal plane; At least one load-bearing top rod, respectively connecting the first side plate and the second side plate; At least one load-bearing bottom rod, respectively connected to the first side plate and the second side plate, the load-bearing bottom rod being correspondingly arranged below the load-bearing top rod; At least one auxiliary bearing rod, connected to the first side plate and the second side plate respectively, the orthographic projection of the auxiliary bearing rod on the vertical plane is located between the orthographic projection of the bearing top rod and the orthographic projection of the bearing bottom rod on the vertical plane, the auxiliary bearing rod, the bearing top rod, the bearing bottom rod, the first side plate and the second side plate are enclosed to form a receiving space for receiving the sheet material, the receiving space includes an insertion port, the insertion port is arranged opposite to the auxiliary bearing rod, the bearing top rod, the bearing bottom rod and the auxiliary bearing rod are parallel to each other and extend along a first direction, and the first direction has a non-zero angle with respect to the horizontal plane; Among them, a plurality of accommodating grooves are arranged in the accommodating space at intervals along the first direction, and the accommodating grooves are configured to carry the sheet material inserted into the accommodating space from the insertion port, and the carried sheet material is inclined relative to the vertical plane.

2. The carrying boat according to claim 1, characterized in that: The load-bearing top rod, the load-bearing bottom rod and the auxiliary load-bearing rod all include a slot structure, and the slot structure includes: A first card slot is provided on a side of the load-bearing top rod facing the accommodating space, and on a side of the load-bearing bottom rod facing the accommodating space, the opening of the first card slot faces the accommodating space, a plurality of the first card slots on the load-bearing top rod are arranged at intervals along the first direction, a plurality of the first card slots on the load-bearing bottom rod are arranged at intervals along the first direction, and the first card slots on the load-bearing top rod are arranged one-to-one with the first card slots on the load-bearing bottom rod; A second card slot is arranged on a side of the auxiliary bearing rod facing the insertion port, the opening of the second card slot faces the accommodating space, a plurality of the second card slots are arranged at intervals along the first direction, the second card slots are arranged one-to-one with the first card slots on the bearing top rod, and are also arranged one-to-one with the first card slots on the bearing bottom rod.

3. The carrying boat according to claim 2, characterized in that: The opening directions of the first card slot and the second card slot are perpendicular to the first direction. When the corresponding first card slot and the second card slot carry the sheet material, the sheet material is inclined at a preset angle relative to a vertical plane.

4. The carrying boat according to claim 3, characterized in that: The preset angle is between 2° and 3°.

5. The carrying boat according to claim 2, characterized in that: The first slots respectively penetrate the corresponding load-bearing top rod and the load-bearing bottom rod along the second direction, the cross section of the first slots in the second direction is a V-shaped structure, and the second direction is a horizontal direction perpendicular to the first direction; and / or, The second clamping groove penetrates the auxiliary bearing rod along a direction perpendicular to the first direction, and the cross section of the second clamping groove perpendicular to the first direction is a V-shaped structure.

6. The carrying boat according to claim 5, characterized in that: The depth of the second slot perpendicular to the first direction is 1 / 3-1 / 4 of the dimension of the auxiliary bearing bar perpendicular to the first direction.

7. The carrying boat according to any one of claims 1 to 6, characterized in that: The load-bearing top rod and the load-bearing bottom rod are provided in a plurality in a one-to-one correspondence and arranged at intervals along a second direction, wherein the second direction is a horizontal direction perpendicular to the first direction, Along the second direction, the load-bearing top rod and the load-bearing bottom rod located at one end enclose the insertion opening together with the first side panel and the second side panel, and the load-bearing top rod and the load-bearing bottom rod located at the other end are provided with the auxiliary load-bearing rod on the side away from the insertion opening, and the auxiliary load-bearing rod has a preset distance with the load-bearing top rod in the second direction.

8. The carrying boat according to any one of claims 1 to 6, characterized in that: At least one of the first side plate and the second side plate is provided with an identification portion on a side away from the load-bearing top bar, and the identification portion is configured to place the first side plate and the second side plate on the side having the identification portion downward.

9. The carrying boat according to any one of claims 1 to 6, characterized in that: Also includes: A plurality of handles are respectively arranged on the side of the first side panel and the second side panel away from each other, the handles located on the first side panel and the second side panel correspond to each other one by one, and the planes where the corresponding handles are located are parallel to the horizontal plane.

10. A processing equipment, characterized in that: include: a main body having a processing chamber; The carrier boat according to any one of claims 1 to 9 can be placed in the processing chamber.

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