Aluminum oxide polishing solution preparation device

Abstract

The utility model discloses an aluminum oxide polishing solution preparation device which comprises a first solution preparation tank, a first electric pump, a first filter, a second solution preparation tank, a second electric pump, a second filter, a canning barrel and a connecting pipe for conveying liquid which are sequentially arranged along the flowing direction of the liquid, the first liquid preparation tank is provided with a first stirrer, a first liquid preparation inlet, a first liquid preparation outlet communicated with the first electric pump, and a first additive inlet; the second liquid preparation tank comprises a second stirrer, a second liquid preparation inlet communicated with the first filter, a second liquid preparation outlet communicated with the second electric pump and a second additive inlet, the first stirrer and the second stirrer are corrugated polyurethane high-dispersity stirrers, and the two liquid preparation tanks are connected in series; through the two procedures of abrasive suspension dispersion and filtration and polishing solution dispersion and filtration, the corrugated polyurethane high-dispersity dispersion disc is adopted, the suspension can be fully dispersed, and the output quality and the wafer surface polishing quality are greatly improved.

Description

Technical Field

[0001] The utility model relates to the technical field of polishing liquid preparation devices, in particular to an aluminum oxide polishing liquid preparation device. Background Art

[0002] Chemical mechanical polishing (CMP) technology is the only surface finishing technology that can provide global flattening so far. It has been widely used in the flattening of surfaces such as integrated circuit chips, computer hard disks, and micromechanical systems. Polishing fluid plays an important role in CMP. Among them, alumina polishing fluid has a high hardness, second only to diamond, and has an excellent removal rate for hard bottom materials such as sapphire and silicon carbide substrates, and is widely used in the polishing field. Polishing fluid is mainly composed of abrasives, solvents and additives. The type, properties, particle size, particle dispersion and stability of the abrasive are closely related to the final polishing effect. Nano-α-Al2O3 abrasives have a high hardness, and large-particle abrasives are easy to cause serious damage to the workpiece surface during polishing; and nano-alumina has a high surface energy, and the particles are easy to agglomerate and settle, which will also cause surface defects such as scratches and pits on the polished workpiece. In order to improve the surface quality of the polished workpiece, the alumina polishing fluid is usually fully dispersed and effectively filtered during the preparation process to achieve excellent abrasive particle size and distribution. In addition, the problem of large differences in abrasive solid content between different packaging units of the polishing liquid has always existed, which will directly lead to unstable removal rate during wafer polishing, affecting the wafer polishing efficiency and its surface quality.

[0003] In view of the above problems, although some patents in the prior art have proposed solutions, for example, the patent with the authorization announcement number CN205613356U discloses an alumina polishing liquid preparation device, which includes a material barrel, a stirring device, a particle size classification device, a filtering device, an ultrasonic tank, a pH test port and an auxiliary material addition port for preparing the alumina polishing liquid; the material barrel is placed on the ultrasonic tank; the lid of the material barrel is provided with a pH test port, an auxiliary material addition port, a polishing powder particle size classification device, and a discharge port with a filtering device at the bottom. The material barrel is provided with an agitator inside, which can achieve the dispersion and filtration of the alumina powder, but the above device does not specify the type of the stirring device, and the general hard stirring blade has the problem of insufficient dispersion and easy wear on the abrasive, and the above device can only perform a single filtration, and the filtration effect is limited. Utility Model Content

[0004] Purpose of the utility model:

[0005] In order to overcome the problems existing in the prior art, the utility model provides an aluminum oxide polishing liquid dispensing device to solve the problems that the stirring paddle of the liquid dispensing device in the prior art is easy to cause wear to the abrasive particles during the dispersion and stirring process, thereby affecting the polishing rate; the traditional stirring paddle disperses the polishing liquid with higher viscosity unevenly; and the single filtration system has limited filtering effect.

[0006] In order to solve the above problems, the utility model adopts the following technical solutions:

[0007] A device for dispensing aluminum oxide polishing liquid comprises a first dispensing tank for dispensing abrasive suspension, a first electric pump, a first filter, a second dispensing tank for dispensing polishing liquid, a second electric pump, a second filter, a canning barrel and a connecting pipe for conveying liquid, which are arranged in sequence along the liquid flow direction; the first dispensing tank is provided with a first agitator, a first dispensing inlet, a first dispensing outlet connected to the first electric pump and a first additive inlet; the second dispensing tank comprises a second agitator, a second dispensing inlet connected to the first filter, a second dispensing outlet connected to the second electric pump and a second additive inlet; the first agitator and the second agitator are corrugated polyurethane high-dispersibility agitators.

[0008] Preferably, the corrugated polyurethane high-dispersibility agitator comprises a control motor, a stirring shaft connected to the control motor, and a dispersion plate fixedly arranged at the bottom of the stirring shaft, wherein the top and bottom surfaces of the dispersion plate are equidistantly inwardly recessed with corrugated grooves.

[0009] Preferably, the corrugated grooves on the top surface of the dispersion disk and the corrugated grooves on the bottom surface are arranged alternately along the circumference of the dispersion disk.

[0010] Preferably, the first electric pump and the second electric pump are polytetrafluoroethylene self-priming electric diaphragm pumps.

[0011] Preferably, pleated filter elements are provided in the first filter and the second filter.

[0012] Preferably, the first liquid distribution inlet and the second liquid distribution inlet are connected with PVC straight rigid pipes, and a connecting pipe is inserted into the PVC straight rigid pipe.

[0013] Preferably, the first liquid distribution inlet and the second liquid distribution inlet are also provided with a pipe fixing seat for installing a PVC straight hard pipe.

[0014] Preferably, the first liquid preparation tank is further provided with a first pH test port and a first auxiliary material addition port, and the second liquid preparation tank is further provided with a second pH test port and a second auxiliary material addition port.

[0015] Beneficial effects: Compared with the prior art, the utility model has the following advantages: a first liquid dispensing tank and a second liquid dispensing tank are respectively provided, and after two processes of abrasive suspension dispersion filtration and polishing liquid dispersion filtration, a corrugated polyurethane high-dispersion dispersion disk is used, which can fully disperse the suspension and greatly improve the output quality and the surface polishing quality of the chip. An additional canning barrel is provided to facilitate canning during the stirring process, which helps to ensure the uniformity of packaging. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a cross-sectional view of the utility model;

[0017] Figure 2 It is a three-dimensional diagram of the liquid dispensing tank of the utility model;

[0018] Figure 3 It is a three-dimensional diagram of the agitator of the utility model;

[0019] Figure 4 It is a three-dimensional diagram of the filter of the utility model;

[0020] Figure 5 It is the internal structure diagram of the filter of the utility model;

[0021] Description of reference numerals:

[0022] 11. First liquid dispensing tank; 111. First agitator; 112. First liquid dispensing inlet; 113. First liquid dispensing outlet; 114. First additive inlet; 115. First PH test port; 116. First auxiliary material addition port; 12. First electric pump; 13. First filter; 21. Second liquid dispensing tank; 211. Second agitator; 212. Second liquid dispensing inlet; 213. Second liquid dispensing outlet; 214. Second additive inlet; 215. Second PH test port; 216. Second auxiliary material addition port; 22. Second electric pump; 23. Second filter; 3. Canning barrel; 4. Connecting pipe; 51. Control motor; 52. Stirring shaft; 53. Dispersing disk; 54. Corrugated groove. DETAILED DESCRIPTION

[0023] All features disclosed in this specification, or steps in all methods or processes disclosed, except mutually exclusive features and / or steps, can be combined in any manner.

[0024] Any feature disclosed in this specification (including any additional claims, abstract and drawings), unless otherwise stated, may be replaced by other alternative features that are equivalent or have similar purposes. That is, unless otherwise stated, each feature is only an example of a series of equivalent or similar features.

[0025] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific implementation methods of the present invention are described in detail below with reference to the accompanying drawings.

[0026] like Figure 1-5 As shown, an aluminum oxide polishing liquid dispensing device comprises a first dispensing tank 11 for dispensing an abrasive suspension, a first electric pump 12, a first filter 13, a second dispensing tank 21 for dispensing a polishing liquid, a second electric pump 22, a second filter 23, a canning barrel 3 and a connecting pipe 4 for conveying liquid, which are sequentially arranged along the liquid flow direction. The first dispensing tank 11 is provided with a first agitator 111, a first dispensing inlet 112, a first dispensing outlet 113 connected to the first electric pump 12, and a first additive inlet 114. The second dispensing tank 21 comprises a second agitator 211, a second dispensing inlet 212 connected to the first filter 13, a second dispensing outlet 213 connected to the second electric pump 22, and a second additive inlet 214. The first agitator 111 and the second agitator 211 are corrugated polyurethane high-dispersion agitators.

[0027] Two liquid preparation tanks are connected in series, and after two processes of abrasive suspension dispersion filtration and polishing liquid dispersion filtration, a corrugated polyurethane high-dispersion dispersion disk is used to fully disperse the suspension, greatly improving the output quality and the surface polishing quality of the chip.

[0028] Additional canning barrels are provided to facilitate canning during the mixing process, which helps ensure uniform packaging.

[0029] In this embodiment, the corrugated polyurethane high-dispersibility agitator includes a control motor 51, a stirring shaft 52 connected to the control motor, and a dispersion disk 53 fixedly arranged at the bottom of the stirring shaft. The top and bottom surfaces of the dispersion disk are equidistantly recessed inwardly and provided with corrugated grooves 54. The corrugated polyurethane dispersion disk has a better dispersion effect than a traditional stirring paddle, and filling during the stirring process helps to ensure the uniformity of packaging.

[0030] In this embodiment, the corrugated grooves on the top surface and the corrugated grooves on the bottom surface of the dispersion disk 53 are alternately arranged along the circumference of the dispersion disk, so as to facilitate the arrangement of more corrugated grooves 54 without affecting each other.

[0031] In this embodiment, the first electric pump 12 and the second electric pump 22 are polytetrafluoroethylene self-priming electric diaphragm pumps.

[0032] In this embodiment, pleated filter elements are disposed in the first filter 13 and the second filter 23 .

[0033] In this embodiment, the first liquid distribution inlet 112 and the second liquid distribution inlet 212 are connected with PVC straight hard pipes, and connecting pipes are inserted into the PVC straight hard pipes to facilitate the installation of pipelines.

[0034] In this embodiment, the first liquid distribution inlet 112 and the second liquid distribution inlet 212 are also provided with pipe fixing seats for installing PVC straight hard pipes.

[0035] In this embodiment, the first liquid dispensing tank 11 is further provided with a first pH test port 115 and a first auxiliary material addition port 116 , and the second liquid dispensing tank 21 is further provided with a second pH test port 215 and a second auxiliary material addition port 216 .

[0036] The above-mentioned connecting pipes are generally made of PP pipes.

[0037] Working principle: To prepare 100 kg of alumina polishing liquid, first add alumina liquid A (nano alumina suspension) into the first liquid preparation tank, turn on the first agitator, and stir and disperse liquid A for 10 minutes. In view of the characteristics of alumina abrasives that are easy to agglomerate and settle, liquid A is separated, stirred, dispersed, filtered, and then added to liquid B (additive solution) during the liquid preparation process. This can effectively disperse and filter the soft agglomerates and large particles before the abrasive and additive are mixed, which greatly affects the particle size distribution of the finished polishing liquid; add deionized water and liquid preparation additives into the second liquid preparation tank, turn on the second agitator to fully dissolve and disperse; install the folded filter element into the first filter pump and the second filter pump respectively; turn on the first filter pump, and the liquid A in the first liquid preparation tank is passed into the second liquid preparation tank through the first filter pump, and continue to stir and disperse in the second liquid preparation tank for 10 minutes; finally, turn on the second filter pump under stirring, and the polishing liquid in the second liquid preparation tank is injected into the filling barrel through the second filter pump for filling.

[0038] The following experimental data is used to illustrate the specific effects.

[0039] Example 1: Comparison between corrugated polyurethane dispersion disc and ordinary stirring paddle

[0040] Prepare 100Kg of alumina polishing liquid and compare the particle size distribution data of the polishing liquid after dispersion:

[0041]

[0042] From the comparison in the table, it can be seen that the use of a corrugated polyurethane high-dispersibility agitator can effectively disperse the aluminum oxide abrasive in the soft agglomerate, and the dispersion effect is better.

[0043] Example 2: Analysis of the influence of liquid A dispersion and filtration device on the particle size distribution of polishing liquid:

[0044] a. When there is a liquid A dispersion and filtration device, the particle size distribution is:

[0045]

[0046] b. When there is no A liquid dispersion and filtration device, the particle size distribution is:

[0047]

[0048]

[0049] It can be seen from the comparison in the table that by setting the first liquid dispensing tank and the second liquid dispensing tank, first dispersing and filtering the A device and then dispersing and filtering the polishing liquid, the effect is better.

[0050] Example 3: Canning by setting up a canning barrel during the stirring process

[0051] Comparison of solid content data of each barrel of polishing liquid after filling:

[0052] Package Bucket 1 Bucket 2 Bucket 3 Bucket 4 Bucket 5 Solid content (%) 7.88 7.85 7.85 7.87 7.86

[0053] From the comparison in the table, it can be seen that the additional canning barrels are set up for canning during the mixing process, and the error of solid content in each barrel is within 0.5%. The filling method is effective and the dispersion is uniform.

[0054] The purpose of the above embodiments is to exemplarily reproduce and deduce the technical solution of the utility model, and to fully describe the technical solution, purpose and effect of the utility model. Its purpose is to make the public understand the disclosed content of the utility model more thoroughly and comprehensively, and it does not limit the protection scope of the utility model.

[0055] The above embodiments are not exhaustive enumerations based on the present invention, and there may be multiple other implementations not listed. Any replacement and improvement made without violating the concept of the present invention shall fall within the protection scope of the present invention.

Claims

1. An aluminum oxide polishing liquid dispensing device, characterized in that: The invention comprises a first liquid dispensing tank (11) for dispensing abrasive suspension, a first electric pump (12), a first filter (13), a second liquid dispensing tank (21) for dispensing polishing liquid, a second electric pump (22), a second filter (23), a canning barrel (3) and a connecting pipe (4) for conveying liquid, which are arranged in sequence along the liquid flow direction; the first liquid dispensing tank (11) is provided with a first agitator (111), a first liquid dispensing inlet (112), a first liquid dispensing outlet (113) connected to the first electric pump (12) and a first additive inlet (114); the second liquid dispensing tank (21) comprises a second agitator (211), a second liquid dispensing inlet (212) connected to the first filter (13), a second liquid dispensing outlet (213) connected to the second electric pump (22) and a second additive inlet (214); the first agitator (111) and the second agitator (211) are corrugated polyurethane high-dispersibility agitators.

2. The aluminum oxide polishing liquid dispensing device according to claim 1, characterized in that: The corrugated polyurethane high-dispersibility stirrer comprises a control motor (51), a stirring shaft (52) connected to the control motor for transmission, and a dispersion plate (53) fixedly arranged at the bottom of the stirring shaft, wherein the top surface and the bottom surface of the dispersion plate are both equidistantly inwardly concavely provided with corrugated grooves (54).

3. The aluminum oxide polishing liquid dispensing device according to claim 2, characterized in that: The corrugated grooves on the top surface and the corrugated grooves on the bottom surface of the dispersion disk (53) are arranged alternately along the circumferential direction of the dispersion disk.

4. The aluminum oxide polishing liquid dispensing device according to claim 1, characterized in that: The first electric pump (12) and the second electric pump (22) are polytetrafluoroethylene self-priming electric diaphragm pumps.

5. The aluminum oxide polishing liquid dispensing device according to claim 1, characterized in that: The first filter (13) and the second filter (23) are provided with folded filter elements.

6. The aluminum oxide polishing liquid dispensing device according to claim 1, characterized in that: The first liquid distribution inlet (112) and the second liquid distribution inlet (212) are connected with PVC straight hard pipes, and connecting pipes are inserted into the PVC straight hard pipes.

7. The aluminum oxide polishing liquid dispensing device according to claim 5, characterized in that: The first liquid distribution inlet (112) and the second liquid distribution inlet (212) are also provided with a pipe fixing seat for installing a PVC straight hard pipe.

8. The aluminum oxide polishing liquid dispensing device according to claim 1, characterized in that: The first liquid preparation tank (11) is further provided with a first pH test port (115) and a first auxiliary material addition port (116), and the second liquid preparation tank (21) is further provided with a second pH test port (215) and a second auxiliary material addition port (216).

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