MOCVD (Metal Organic Chemical Vapor Deposition) cavity cleaning device

Abstract

The utility model discloses an MOCVD cavity cleaning device which comprises a cleaning device body, a cleaning medium conveying assembly and a control assembly, the cleaning device body comprises a cleaning base body, the bottom side wall and the arc-shaped side wall of the cleaning base body are each provided with a cleaning face, and the interior of the cleaning base body is of a hollow structure; and the cleaning medium conveying assembly comprises a plurality of jet orifices, the jet orifices are all formed in the arc-shaped side wall of the cleaning base body, nozzles are installed in the jet orifices, and distribution pipes are installed on liquid inlets of the nozzles. The inner wall of the cavity is brushed and cleaned through the cleaning device, cleaning liquid with pressure is provided for the cleaning device through the cleaning medium conveying assembly, the cleaning liquid is sprayed out after being atomized through the nozzle, the cleaning liquid can wash the inner wall of the cavity and positions which are not easy to clean, and the cleaning efficiency of the cavity is improved; and meanwhile, the device is supported through a sleeve, so that the device is good in stability during use.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor equipment, and in particular relates to an MOCVD cavity cleaning device. Background Art

[0002] In the semiconductor manufacturing process, thin film chemical deposition equipment is one of the most important equipment. The transfer chamber is an important component of the thin film chemical deposition equipment, which is used to transfer semiconductor wafers. Since the transfer chamber has a small space and is difficult to clean, it is necessary to clean the transfer chamber regularly.

[0003] A cavity cleaning device disclosed in publication number CN220371838U includes a cleaning component, a connecting device and a handle; the cleaning component includes a cleaning base and a cleaning member, the cleaning base is used to clean the transmission cavity, the cleaning member is used to wrap the cleaning base to prevent the cleaning base from scratching the transmission cavity, the cleaning base is provided with an internal waterway, and the internal waterway is used to supply water to the cleaning base; one end of the connecting device is connected to the cleaning component, and the other end is connected to the handle; the handle is connected to the connecting device. The utility model, through the coordinated arrangement of the cleaning component, the connecting device and the handle, enables the device to effectively match the cleaned part of the transmission cavity, achieves rapid cleaning to avoid scratching the cavity and has a water replenishment function.

[0004] However, when the above-mentioned utility model is in use, when the cleaning component cleans the cavity, the clean water is squeezed and transported into the cavity through the water outlet, so that the cleaning component can clean the cavity. The pressure of the clean water sprayed out is relatively small, and the cavity cannot be effectively cleaned, resulting in low cleaning efficiency of the cleaning component. At the same time, the conveying pipeline is assembled by connecting multiple pipelines. When the cleaning component is in use, it needs to be driven by the pipeline to clean the cavity, and the stability during use is poor.

[0005] The information disclosed in this background technology section is only intended to increase the understanding of the overall background of the present invention, and should not be regarded as acknowledging or suggesting in any form that the information constitutes the prior art already known to a person skilled in the art. Utility Model Content

[0006] The utility model aims to provide a MOCVD cavity cleaning device, which can solve the problems of low efficiency when the cleaning device cleans the cavity and poor stability when in use.

[0007] In order to achieve the above purpose, the technical solution provided by a specific embodiment of the utility model is as follows:

[0008] A MOCVD chamber cleaning device, comprising:

[0009] The cleaning device comprises a cleaning base, wherein the cleaning base is provided with an arc-shaped side wall matching the inner wall of a cavity, and the interior of the cavity is cleaned by contact between the arc-shaped side wall and the bottom side wall of the cleaning base and the inner wall of the cavity. The bottom side wall and the arc-shaped side wall of the cleaning base are both provided with cleaning surfaces, so that when the bottom side wall and the arc-shaped side wall of the cleaning base clean the inner wall of the cavity, the cleaning effect is good and the inner wall of the cavity is not damaged. The interior of the cleaning base is provided with a hollow structure, so that it is convenient to install components inside the cleaning base.

[0010] The cleaning medium delivery component includes a spray port, through which the cleaning liquid for cleaning the chamber is delivered into the chamber. There are multiple spray ports, so that the cleaning liquid can be evenly delivered into the chamber, thereby improving the cleaning effect of the cleaning liquid on the chamber. Multiple spray ports are arranged on the arc-shaped side wall of the cleaning substrate, so that the cleaning liquid contacts the inner wall of the chamber through the arc-shaped side wall. A nozzle is installed in the spray port, and the cleaning liquid is atomized by the nozzle and then delivered into the chamber through the spray port, so as to improve the cleaning effect of the cleaning liquid on the chamber. A distribution pipe is installed on the liquid inlet of the nozzle, and the distribution pipe is used to deliver the cleaning liquid to the nozzle. A liquid storage box is installed at the end of the connecting pipe away from the nozzle, and the liquid storage box is used to store the cleaning liquid, so that the cleaning liquid is conveniently provided to the nozzle. A pressurizing device is installed on the liquid storage box, and the cleaning liquid in the liquid storage box can be pressurized under the action of the pressurizing device, so that the cleaning liquid is pressurized and delivered to the nozzle, so that the cleaning liquid released from the nozzle has a certain pressure, so that after the cleaning liquid is released, it can not only clean the inner wall of the chamber, but also make the cleaning liquid more evenly distributed, thereby increasing the cleaning effect of the cleaning liquid on the chamber.

[0011] The control assembly includes a sleeve and a handle, wherein the handle is fixedly connected to the side wall of the sleeve. The sleeve and the handle stabilize the connection of the device when cleaning the chamber, so that the arc-shaped side wall and the bottom side wall of the cleaning base can better contact the inner wall of the chamber, thereby improving the cleaning efficiency of the chamber.

[0012] In one or more embodiments of the present invention, the cleaning surface is made of a flexible material so that when the cleaning surface contacts the inner wall of the chamber, the inner wall of the chamber will not be damaged. A brush is provided on the outer surface of the cleaning surface to increase the cleaning effect of the cleaning surface on the inner wall of the chamber.

[0013] In one or more embodiments of the utility model, the upper end cover of the cleaning base is connected to an upper cover plate, and a plurality of fixing screws are installed between the upper cover plate and the cleaning base, so that the upper cover plate can be easily opened on the cleaning base through the fixing screws, thereby facilitating maintenance and replacement of components installed in the cleaning base.

[0014] In one or more embodiments of the present invention, the plurality of injection ports are arranged in three rows in the form of top, middle and bottom on the curved side wall of the cleaning substrate, and each row is provided with a plurality of injection ports, so that the injection ports can evenly spray the cleaning liquid into the chamber.

[0015] In one or more embodiments of the present invention, the upper row of injection ports are tilted upward, and the angle between the upper row of injection ports and the horizontal plane is 45 degrees, so that the upper row of injection ports can spray cleaning liquid to the upper side of the chamber to flush the dead corners on the upper side of the chamber.

[0016] In one or more embodiments of the present invention, the lower row of injection ports are tilted downward, and the angle between the lower row of injection ports and the horizontal plane is 45 degrees, so that the lower row of injection ports can spray cleaning liquid to the lower side of the chamber to flush the dead corners on the lower side of the chamber.

[0017] In one or more embodiments of the present invention, a plurality of connectors are fixedly connected to the side wall of the distribution pipe, and connecting pipes are installed between the plurality of connectors and the liquid inlets of the plurality of nozzles respectively, so that the cleaning liquid in the distribution pipe can be transported to the nozzle for spraying out through the connecting pipes.

[0018] In one or more embodiments of the present invention, a delivery pipe is fixedly connected to the side wall of the distribution pipe, and one end of the delivery pipe away from the distribution pipe is fixedly connected to the bottom of the liquid storage box, so that the cleaning liquid in the liquid storage box can be delivered to the distribution pipe through the delivery pipe, and then delivered to the nozzle through the distribution pipe.

[0019] In one or more embodiments of the present utility model, a liquid replenishing port is installed on the upper end wall plate of the liquid storage box, and the upper cover of the liquid replenishing port is connected to a liquid inlet cap, and cleaning liquid is replenished into the liquid storage box through the liquid replenishing port.

[0020] In one or more embodiments of the present invention, one end of the sleeve is fixedly connected to the side wall of the cleaning base, and the other end of the sleeve is fixedly connected to the bottom of the liquid storage box, so that the sleeve is firmly connected to the cleaning base and the liquid storage box, so that the cleaning base and the liquid storage box can be ensured to be stable during use under the action of the sleeve. The sleeve is sleeved on the side wall of the delivery pipe, so that the sleeve makes the device stable during use and protects the delivery pipe.

[0021] Compared with the prior art, the utility model uses a cleaning device to brush and clean the inner wall of the cavity, and provides pressurized cleaning liquid to the cleaning device through a cleaning medium delivery assembly. The cleaning liquid is atomized and sprayed out through a nozzle. The cleaning liquid can flush the inner wall of the cavity and the positions that are difficult to clean, thereby improving the cleaning efficiency of the cavity. At the same time, the device is supported by the sleeve, so that the device has better stability when in use. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0023] Figure 1 This is a front view of a MOCVD chamber cleaning device in one embodiment of the utility model;

[0024] Figure 2 This is a three-dimensional diagram of a MOCVD chamber cleaning device in one embodiment of the utility model;

[0025] Figure 3 This is a cross-sectional view of a MOCVD chamber cleaning device in one embodiment of the utility model;

[0026] Figure 4 This is a cross-sectional view of a MOCVD chamber cleaning device in one embodiment of the utility model;

[0027] Figure 5 In one embodiment of the utility model Figure 4 The enlarged view of point A in the middle;

[0028] Figure 6 This is a schematic diagram of the interior of a cleaning substrate in one embodiment of the utility model.

[0029] Description of main reference numerals:

[0030] 1-cleaning device, 11-cleaning base, 12-cleaning surface, 13-upper cover, 14-fixing screw, 2-cleaning medium delivery assembly, 21-injection port, 22-nozzle, 23-distribution pipe, 24-connecting pipe, 25-delivery pipe, 26-liquid storage box, 27-pressurizing device, 28-liquid filling port, 3-control assembly, 31-sleeve, 32-handle. DETAILED DESCRIPTION

[0031] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0032] like Figure 1 to Figure 4 As shown, a MOCVD chamber cleaning device in an embodiment of the utility model includes a cleaning device 1, a cleaning medium conveying component 2 and a control component 3.

[0033] like Figure 1 to Figure 4 As shown, the cleaning device 1 includes a cleaning base 11, and the cleaning base 11 is provided with an arc-shaped side wall matching the inner wall of the cavity. The interior of the cavity is cleaned by the contact between the arc-shaped side wall and the bottom side wall of the cleaning base 11 and the inner wall of the cavity. The bottom side wall and the arc-shaped side wall of the cleaning base 11 are both provided with a cleaning surface 12, so that when the bottom side wall and the arc-shaped side wall of the cleaning base 11 clean the inner wall of the cavity, the cleaning effect is good and the inner wall of the cavity is not damaged. The interior of the cleaning base 11 is set as a hollow structure, so as to facilitate the installation of components inside the cleaning base 11.

[0034] Preferably, the cleaning surface 12 is made of a flexible material so that when the cleaning surface 12 contacts the inner wall of the chamber, the inner wall of the chamber will not be damaged. A brush is provided on the outer surface of the cleaning surface 12 to increase the cleaning effect of the cleaning surface 12 on the inner wall of the chamber.

[0035] like Figure 1 to Figure 4 As shown, the upper end cover of the cleaning base 11 is connected to an upper cover plate 13, and a plurality of fixing screws 14 are installed between the upper cover plate 13 and the cleaning base 11. The fixing screws 14 make it easy to open the upper cover plate 13 on the cleaning base 11, thereby facilitating maintenance and replacement of components installed in the cleaning base 11.

[0036] like Figure 1 to Figure 6 As shown, the cleaning medium delivery assembly 2 includes a spray port 21, through which the cleaning liquid for cleaning the chamber is delivered to the chamber. A plurality of spray ports 21 are provided, so that the cleaning liquid can be evenly delivered to the chamber, thereby improving the cleaning effect of the cleaning liquid on the chamber. A plurality of spray ports 21 are all provided on the arc-shaped side wall of the cleaning substrate 11, so that the cleaning liquid contacts the inner wall of the chamber through the arc-shaped side wall. A nozzle 22 is installed in the spray port 21, and the cleaning liquid is atomized by the nozzle 22 and then delivered to the chamber through the spray port 21, so as to improve the cleaning effect of the cleaning liquid on the chamber. A distribution pipe 23 is installed on the liquid inlet of the nozzle 22, and the distribution pipe 23 is used to deliver the cleaning liquid to the nozzle 22. A liquid storage box 26 is installed at one end of the connecting pipe 24 away from the nozzle 22, and the liquid storage box 26 is used to store the cleaning liquid, so that the cleaning liquid is convenient to be provided to the nozzle 22. A pressurizing device 27 is installed on the liquid storage box 26. Under the action of the pressurizing device 27, the cleaning liquid in the liquid storage box 26 can be pressurized, so that the cleaning liquid is pressurized and transported to the nozzle 22, so that the cleaning liquid released by the nozzle 22 has a certain pressure. After the cleaning liquid is released, it can not only clean the inner wall of the chamber, but also the cleaning liquid is distributed more evenly, thereby increasing the cleaning effect of the cleaning liquid on the chamber.

[0037] like Figure 2 and Figure 5 As shown, a plurality of injection ports 21 are arranged in three rows on the arc-shaped side wall of the cleaning substrate 11 in the form of top, middle and bottom, and each row is provided with a plurality of injection ports 21, so that the injection ports 21 can uniformly spray the cleaning liquid into the chamber.

[0038] like Figure 5 As shown, the upper row of spray ports 21 are tilted upward, and the angle between the upper row of spray ports 21 and the horizontal plane is 45 degrees, so that the upper row of spray ports 21 can spray the cleaning liquid to the upper side of the chamber, so as to flush the dead corners on the upper side of the chamber and other locations that are difficult to clean.

[0039] like Figure 5 As shown, the lower row of injection ports 21 are tilted downward, and the angle between the lower row of injection ports 21 and the horizontal plane is 45 degrees, so that the lower row of injection ports 21 can spray the cleaning liquid to the lower side of the chamber, so as to flush the dead corners on the lower side of the chamber and other locations that are difficult to clean.

[0040] like Figure 5 and Figure 6 As shown, a plurality of connectors are fixedly connected to the side wall of the distribution pipe 23, and connecting pipes 24 are installed between the plurality of connectors and the liquid inlets of the plurality of nozzles 22 respectively, so that the cleaning liquid in the distribution pipe 23 can be transported to the nozzles 22 for spraying out through the connecting pipes 24.

[0041] like Figure 3 to Figure 5 As shown, a delivery pipe 25 is fixedly connected to the side wall of the distribution pipe 23, and one end of the delivery pipe 25 away from the distribution pipe 23 is fixedly connected to the bottom of the liquid storage box 26, so that the cleaning liquid in the liquid storage box 26 can be delivered to the distribution pipe 23 through the delivery pipe 25, and then delivered to the nozzle 22 through the distribution pipe 23.

[0042] like Figure 2 and Figure 3 As shown, a liquid replenishing port 28 is installed on the upper end wall plate of the liquid storage box 26 , and the upper cover of the liquid replenishing port 28 is connected to a liquid inlet cap, and the cleaning liquid is replenished into the liquid storage box 26 through the liquid replenishing port 28 .

[0043] like Figure 1 to Figure 4 As shown, the control assembly 3 includes a sleeve 31 and a handle 32, and the handle 32 is fixedly connected to the side wall of the sleeve 31. The sleeve 31 and the handle 32 ensure that the connection of the device is stable when the chamber is cleaned, so that the arc-shaped side walls and the bottom side walls of the cleaning base 11 can better contact with the inner wall of the chamber, thereby improving the cleaning efficiency of the chamber.

[0044] like Figure 1 to Figure 4As shown, one end of the sleeve 31 is fixedly connected to the side wall of the cleaning base 11, and the other end of the sleeve 31 is fixedly connected to the bottom of the liquid storage box 26, so that the sleeve 31 is firmly connected to the cleaning base 11 and the liquid storage box 26, so that the cleaning base 11 and the liquid storage box 26 can be stably used under the action of the sleeve 31. The sleeve 31 is sleeved on the side wall of the delivery tube 25, so that the sleeve 31 makes the device stable in use and protects the delivery tube 25.

[0045] When in use, the handle 32 is held to place the device in the cavity, so that the curved side walls and the bottom side walls of the cleaning base 11 are in contact with the inner walls of the cavity, and the pressurizing device 27 is started to pressurize the cleaning liquid in the liquid storage box 26, and the pressurized cleaning liquid is transported to the distribution pipe 23 through the delivery pipe 25, and then transported to the connecting pipe 24 through the distribution pipe 23. The connecting pipe 24 transports the pressurized cleaning liquid to the nozzle 22, so that multiple nozzles 22 spray the cleaning liquid onto the inner wall of the cavity at multiple angles, so that the cleaning liquid can rinse the inner wall of the cavity, and at the same time, the cleaning surface 12 on the curved side walls and the bottom side walls of the cleaning base 11 is used to brush and clean the inner wall of the cavity, so that the cavity is cleaned, thereby improving the cleaning efficiency of the cavity.

[0046] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

[0047] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A MOCVD chamber cleaning device, characterized in that: include: A cleaning device comprises a cleaning base, wherein the bottom side wall and the arc-shaped side wall of the cleaning base are both provided with cleaning surfaces, and the interior of the cleaning base is provided with a hollow structure; A cleaning medium delivery assembly, comprising a spray port, a plurality of spray ports are provided, and the plurality of spray ports are all opened on the arc-shaped side wall of the cleaning substrate, a nozzle is installed in the spray port, a distribution pipe is installed on the liquid inlet of the nozzle, a liquid storage box is installed at one end of the distribution pipe away from the nozzle, and a pressurizing device is installed on the liquid storage box; The control assembly comprises a sleeve and a handle, wherein the handle is fixedly connected to the side wall of the sleeve.

2. The MOCVD chamber cleaning device according to claim 1, characterized in that: The cleaning surface is made of a flexible material, and a brush is provided on the outer surface of the cleaning surface.

3. The MOCVD chamber cleaning device according to claim 1, characterized in that: The upper end cover of the cleaning base is connected with an upper cover plate, and a plurality of fixing screws are installed between the upper cover plate and the cleaning base.

4. The MOCVD chamber cleaning device according to claim 1, characterized in that: The plurality of injection ports are arranged in three rows on the arc-shaped side wall of the cleaning substrate in an upper, middle and lower manner, and each row is provided with a plurality of injection ports.

5. The MOCVD chamber cleaning device according to claim 4, characterized in that: The injection ports in the upper row are arranged to be tilted upward, and the angle between the injection ports in the upper row and the horizontal plane is 45 degrees.

6. The MOCVD chamber cleaning device according to claim 5, characterized in that: The injection ports in the lower row are tilted downward, and the angle between the injection ports in the lower row and the horizontal plane is 45 degrees.

7. The MOCVD chamber cleaning device according to claim 1, characterized in that: A plurality of connectors are fixedly connected to the side wall of the distribution pipe, and connecting pipes are installed between the plurality of connectors and the liquid inlets of the plurality of nozzles respectively.

8. The MOCVD chamber cleaning device according to claim 1, characterized in that: A delivery pipe is fixedly connected to the side wall of the distribution pipe, and one end of the delivery pipe away from the distribution pipe is fixedly connected to the bottom of the liquid storage box.

9. The MOCVD chamber cleaning device according to claim 8, characterized in that: A liquid replenishing port is installed on the upper end wall plate of the liquid storage box, and the upper cover of the liquid replenishing port is connected to a liquid inlet cap.

10. The MOCVD chamber cleaning device according to claim 1, characterized in that: One end of the sleeve is fixedly connected to the side wall of the cleaning base, the other end of the sleeve is fixedly connected to the bottom of the liquid storage box, and the sleeve is sleeved on the side wall of the delivery pipe.

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