Wire saw assembly and wire cutting machine

Abstract

The utility model provides a fretsaw assembly and a wire cutting machine. The fretsaw assembly comprises a wire net, a slurry supply mechanism and a plurality of guide wheels. At least two guide wheels are located on the same horizontal plane, a wire net is fully distributed between the two guide wheels located on the same horizontal plane, and a silicon rod to be cut is placed on the wire net; the slurry supply mechanism comprises a slurry supply device and a guide plate, the guide plate is provided with an inlet end and an outlet end, the inlet end is connected with a slurry spraying opening of the slurry supply device, the outlet end is arranged close to the guide wheel, and a gap is reserved between the outlet end and the guide wheel. According to the configuration, the outlet end of the flow guide plate is arranged close to the guide wheel, so that part of mortar sprayed out of the outlet end flows to the wire net and is matched with the wire net to cut a silicon rod, and meanwhile, the cut silicon rod can be cooled; and the other part flows to the guide wheel and is used for cooling the coating of the guide wheel, so that the deformation of the coating of the guide wheel is reduced, the warp value of a slice formed by cutting is reduced, and the yield of products is improved.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor manufacturing, in particular to a wire saw assembly and a wire cutting machine. Background Art

[0002] During the semiconductor manufacturing process, a sawing machine is typically used to slice silicon ingots to form wafers that meet size requirements. Previously, this slicing process was often accomplished using an internal circular saw with a diamond cutting edge, which provided a more stable edge cut and produced a smooth cut surface. However, given the increasing size of the ingots, internal circular saws no longer meet the requirements. Existing saws mostly use wire saws to slice silicon ingots. Compared to internal circular saws, wire saws can form more wafers in a single cut. They utilize slurry-coated wire instead of diamond-coated saw blades, resulting in a thinner kerf and reducing mechanical damage to the wafer surface during the slicing process.

[0003] Taking the example of a wire saw slicing silicon rods, a wire saw typically includes three guide wheels with annular grooves. By wrapping the cutting wire around the annular grooves, a wire mesh is formed that can continuously cut the silicon rods. The three guide wheels are arranged in an inverted triangle shape (two guide wheels are located at the top and one guide wheel is located at the bottom). A cutting surface is formed between the two guide wheels located at the top, and the silicon rods are placed on the cutting surface. Slurry is applied to the cutting surface, and the cutting wire, driven by a drive mechanism, reciprocates between the cutting mechanism and other mechanisms such as the retractable wire mechanism. The cutting wire wrapped in slurry cuts the silicon rods.

[0004] During the slicing process, frictional heat is generated as the cutting wire rotates around the guide wheel to cut the silicon ingot. Due to heat transfer, the temperature of the silicon ingot, the guide wheel, and the guide wheel bearing fluctuate. The guide wheel is coated with polyurethane, and the thermal expansion coefficient of polyurethane is greater than that of silicon. Therefore, the deformation of the guide wheel coating is greater than that of the silicon ingot. At this time, relative motion occurs between the cutting wire wrapped around the guide wheel and the crystal ingot, resulting in a silicon wafer with a curved cross-section. The curvature of the silicon wafer is usually characterized by the warp value, a characteristic value of the warp.

[0005] The wire cutting machine in the existing technology provides the slurry required for cutting by spraying slurry onto the wire mesh, and can cool the silicon rods during the cutting process. However, it ignores the cooling of the guide wheel coating. The thermal expansion coefficient of the guide wheel coating is greater than that of the silicon rods. Therefore, the guide wheel coating will produce a large deformation, resulting in a change in the relative position of the cutting wire wrapped on the guide wheel and the silicon rod, which makes the warp value of the slice larger, affecting the product yield.

[0006] Based on this, how to cool the guide wheel coating to reduce the warp value of the slices and improve the product yield has become a technical problem that technicians in this field need to solve. Utility Model Content

[0007] The purpose of the utility model is to provide a wire saw assembly and a wire cutting machine to solve the problem that the existing wire cutting machine has a poor cooling effect on the guide wheel coating, which leads to an increase in the warp value of the slices.

[0008] In order to achieve the above-mentioned object, the utility model provides a wire saw assembly, comprising: a wire net, a slurry supply mechanism, and a plurality of guide wheels;

[0009] At least two of the guide wheels are located on the same horizontal plane, and the wire mesh is fully distributed between the two guide wheels located on the same horizontal plane, and the silicon rods to be cut are placed on the wire mesh;

[0010] The slurry supply mechanism includes a slurry supply device and a guide plate, the guide plate has an inlet end and an outlet end, the inlet end is connected to the slurry spraying port of the slurry supply device, the outlet end is arranged close to the guide wheel, and a distance is left between the outlet end and the guide wheel;

[0011] The guide plate is used for circulating the mortar in the slurry supply mechanism. Part of the mortar sprayed from the outlet end flows to the wire mesh, and the other part flows to the guide wheel for cooling the coating of the guide wheel.

[0012] Optionally, the outlet end and the center of the guide wheel are on the same axis, and the angle between the axis and the plane where the wire mesh is located is α, then 80°≤α≤90° is satisfied.

[0013] Optionally, the guide plate has a vertical section and an inclined section, the vertical section is connected to the inclined section, and an extension direction of the vertical section is set at an angle to an extension direction of the inclined section.

[0014] Optionally, the inlet end is arranged on a side of the vertical section away from the inclined section, the outlet end is arranged on a side of the inclined section away from the vertical section, the vertical section is arranged perpendicular to the wire mesh, and the inclined section extends toward a direction close to the wire mesh.

[0015] Optionally, the angle between the extension direction of the inclined section and the plane where the wire mesh is located is θ, and then 30°≤θ≤45° is satisfied.

[0016] Optionally, the distance between the outlet end and the plane where the wire mesh is located is h, and h≥10 μm.

[0017] Optionally, the wire saw assembly includes three guide wheels, and the three guide wheels are arranged in an inverted triangle shape.

[0018] Optionally, a guide wheel groove is provided on the outer wall of the guide wheel, and the wire mesh is formed by winding a cutting wire around the guide wheel groove, so as to continuously cut the silicon rods.

[0019] Optionally, the wire saw assembly includes two slurry supply mechanisms, and the two slurry supply mechanisms are arranged in a one-to-one correspondence with the centers of the two guide wheels located in the same horizontal plane.

[0020] In order to achieve the above-mentioned object, an embodiment of the present utility model further provides a wire saw, comprising: a driving mechanism and the wire saw assembly as described above;

[0021] The driving mechanism is connected to the wire mesh and is used to drive the wire mesh to move back and forth between the guide wheels to cut the silicon rods.

[0022] Compared with existing wire cutting technology, the wire saw assembly and wire cutting machine provided by this application have the following advantages:

[0023] The present application provides a wire saw assembly, which arranges the outlet end of the guide plate close to the guide wheel so that a portion of the slurry sprayed from the outlet end flows to the wire mesh and cooperates with the wire mesh to achieve cutting of the silicon rods, and can also cool the cut silicon rods; the other portion contacts the guide wheel and is used to cool the coating of the guide wheel, wherein the thermal expansion coefficient of the coating of the guide wheel is greater than the thermal expansion coefficient of the silicon rods, so a portion of the slurry directly cools the guide wheel, which can reduce the deformation of the coating of the guide wheel, thereby reducing the influence of the deformation of the guide wheel coating on the relative position of the wire mesh and the silicon rods, thereby reducing the warp value of the slices formed by cutting, and improving the yield of the product. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 Schematic diagram of the relative positions of the guide plate and the guide wheel in the prior art;

[0025] Figure 2 A schematic structural diagram of a wire saw assembly provided by an embodiment of the present utility model;

[0026] Figure 3 A schematic diagram of the relative positions of the guide plate and the guide wheel provided in an embodiment of the present utility model.

[0027] The description of each reference numeral is as follows:

[0028] 1-wire network;

[0029] 2-slurry supply mechanism; 20-slurry supply device; 21-deflector; 210-inlet end; 211-outlet end; 212-vertical section; 213-inclined section;

[0030] 3-guide wheel; 4-silicon rod. DETAILED DESCRIPTION

[0031] To further clarify the objectives, advantages, and features of the present invention, the present invention is further described below in conjunction with the accompanying drawings and specific embodiments. It should be noted that the drawings are highly simplified and not drawn to scale, and are intended solely to facilitate and clearly illustrate the objectives of the embodiments of the present invention. Furthermore, the structures shown in the drawings are often portions of the actual structures. In particular, different drawings may require different emphases and may use different scales.

[0032] As used in this specification, the singular forms "a", "an", and "the" include plural referents, the term "or" is generally used to include "and / or", the term "several" is generally used to include "at least one", and the term "at least two" is generally used to include "two or more". In addition, the terms "first", "second", and "third" are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features specified as "first", "second", and "third" may explicitly or implicitly include one or at least two of the features, "one end" and "the other end" and "proximal end" and "distal end" generally refer to two corresponding parts, which include not only endpoints, and the terms "mounted", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal communication between two elements or the interaction relationship between two elements. In addition, as used in this specification, an element disposed on another element generally only indicates that there is a connection, coupling, cooperation or transmission relationship between the two elements, and the connection, coupling, cooperation or transmission between the two elements may be direct or indirect through an intermediate element, and it cannot be understood as indicating or implying a spatial positional relationship between the two elements, that is, one element may be in any orientation such as inside, outside, above, below or to one side of another element, unless otherwise clearly indicated in the content. The terms "upper", "lower", "top" and "bottom" are generally relative positional relationships arranged in the direction of gravity; the terms "vertical" and "vertical direction" generally refer to the direction of gravity, which is generally perpendicular to the ground, and "horizontal" and "horizontal plane direction" generally refer to the direction parallel to the ground; for ordinary technicians in this field, the specific meanings of the above terms in this specification can be understood according to specific circumstances.

[0033] The purpose of the utility model is to provide a wire saw assembly and a wire cutting machine to solve the problem that the existing wire cutting machine has a poor cooling effect on the guide wheel coating, which leads to an increase in the warp value of the slices.

[0034] Those skilled in the art will understand that in the slicing process, the guide wheel of the wire saw is a key component for controlling the thickness of the slices. It is a precision roller made of polymer material with spiral grooves of equal width and depth engraved on its surface. The cutting wire is wound around the guide wheel during cutting, and the thickness of the slice is controlled by the width between the grooves. In addition to the guide wheel, the wire saw should also be equipped with a gear train with functions such as pay-off, arranging, tensioning, detecting, and taking up, as well as corresponding drive motor sensors. The cutting wire reciprocates under the joint action of the above gear train. To ensure the parallelism of the slices, the cutting wire must move back and forth and feed slowly. A high linear speed can reduce the warping of the slices. During the cutting process, the high-speed reciprocating cutting wire drives the slurry to the cutting area, causing the abrasive particles (SiC particles) in the slurry to grind against the surface of the silicon rod at high speed. Since the abrasive particles have very sharp edges and their hardness is much greater than that of the silicon rod, the area where the silicon rod contacts the wire saw is gradually ground away by the slurry, thereby achieving the cutting effect. At the same time, the slurry can also take away a large amount of heat generated during grinding. Please refer to Figure 1 In the prior art, the guide plate 21 is set close to the cutting area, and most of the slurry is directly directed to the cutting area, resulting in insufficient cooling of the coating of the guide wheel 3, resulting in large deformation. Since the warping degree of the slice is also affected by the relative position of the cutting line and the silicon rod, the cutting line wrapped on the guide wheel expands due to heat, and the relative position of the cutting line and the silicon rod changes, causing the warp value of the slice to increase, affecting the product yield. Based on this, the present application provides a wire saw assembly and a wire cutting machine, which sets the outlet end of the guide plate close to the center of the guide wheel so that part of the sprayed slurry flows to the cutting area, and part is used to cool the coating of the guide wheel, thereby reducing the deformation of the guide wheel coating, reducing the change in the relative position of the cutting line and the silicon rod, reducing the warp value of the slice, and improving the product yield.

[0035] Please refer to Figures 2 to 3 The utility model provides a wire saw assembly, comprising: a wire mesh 1, a slurry supply mechanism 2 and a plurality of guide wheels 3; at least two guide wheels 3 are located on the same horizontal plane, and the wire mesh 1 is spread between the two guide wheels 3 located on the same horizontal plane, and the silicon rods 4 to be cut are placed on the wire mesh 1; the slurry supply mechanism 2 comprises a slurry supply device 20 and a guide plate 21, the guide plate 21 has an inlet end 210 and an outlet end 211, the inlet end 210 is connected to the spraying port of the slurry supply device 20, and the outlet end 211 is arranged close to the guide wheel 3, and a distance is left between the outlet end 211 and the guide wheel 3; the guide plate 21 is used to circulate the mortar in the slurry supply mechanism 2, and a part of the mortar sprayed from the outlet end 211 flows to the wire mesh 1, and the other part flows to the guide wheel 3, which is used to cool the coating of the guide wheel 3.

[0036] Those skilled in the art will appreciate that the outer surface of the guide wheel 3 is sprayed with a polyurethane coating. Polyurethane is a polymer compound with a higher thermal expansion coefficient than that of the silicon rod 4, and is prone to large deformation under high temperature. A guide wheel groove (not shown in the figure) is provided on the outer wall of the guide wheel 3. The wire mesh 1 is formed by winding a cutting wire around the guide wheel groove, and is used to continuously cut the silicon rod 4. The width between the grooves of the guide wheel groove affects the thickness of the silicon rod 4 slices, and the cutting wire is a metal wire. It should be noted that, depending on the diameter of the cutting material, the guide wheel 3 is provided with 2 wheels, 3 wheels, or 4 wheels. The arrangement mode includes 2 wheels arranged in parallel, 3 wheels arranged in a triangle, and 4 wheels arranged in a trapezoidal shape. In the present embodiment, the guide wheel 3 is arranged as 3 wheels arranged in an inverted triangle, wherein the two guide wheels 3 are located on the same horizontal plane and are located above the other guide wheel 3. At the same time, the outlet end 211 of the guide plate 21 is positioned close to the guide wheel 3 and spaced apart from the guide wheel 3. That is, the outlet end 211 of the guide plate 21 is positioned above the guide wheel 3 and must not be lower than the highest point of the guide wheel 3. Otherwise, the sand curtain will hit the surface of the guide wheel 3 and disturb the wire mesh 1. Furthermore, the inlet end 210 of the guide plate 21 is connected to the grouting port of the slurry supply device 20. The grouting port can be a sand nozzle. The slurry supply device 20 introduces mortar into the guide plate 21 through the sand nozzle, and finally sprays the mortar toward the guide wheel 3 and the wire mesh 1 through the outlet end 211 of the guide plate 21.

[0037] In this configuration, by setting the outlet end 211 of the guide plate 21 close to the guide wheel 3, a part of the slurry sprayed from the outlet end 211 flows to the wire mesh 1, and cooperates with the wire mesh 1 to achieve cutting of the silicon rod 4, and can also cool the cut silicon rod 4; the other part flows to the guide wheel 3, which is used to cool the coating of the guide wheel 3, wherein the thermal expansion coefficient of the coating of the guide wheel 3 is greater than the thermal expansion coefficient of the silicon rod 4. Therefore, a part of the slurry cools the guide wheel 3, which can reduce the deformation of the coating of the guide wheel 3, thereby reducing the influence of the deformation of the coating of the guide wheel 3 on the relative position of the wire mesh 1 and the silicon rod 4, thereby reducing the warp value of the slices formed by cutting, and improving the yield of the product.

[0038] As an optional embodiment, the outlet end 211 and the center of the guide wheel 3 are on the same axis, and the angle between the axis and the plane where the wire mesh 1 is located is α, which satisfies 80°≤α≤90°. Figures 2 to 3 In the example shown, the outlet end 211 of the guide plate 21 is located directly above the center of the guide wheel 3, that is, α = 90°. In other embodiments, the angle between the outlet end 211 of the guide plate 21 and the axis of the center of the guide wheel 3 and the plane where the wire mesh 1 is located can also be other angles, as long as it can ensure that part of the sprayed mortar flows to the wire mesh 1 and part flows to the guide wheel 3.

[0039] Please refer to Figure 3In an alternative embodiment, the guide plate 21 has a vertical section 212 and an inclined section 213. The vertical section 212 is connected to the inclined section 213, and the extension direction of the vertical section 212 is set at an angle to the extension direction of the inclined section 213. It should be noted that in order to demonstrate the guiding function of the guide plate 21, an inclined section 213 is generally provided to guide the mortar to the target location. In this embodiment, the inlet end 210 is provided on the side of the vertical section 212 away from the inclined section 213, and the outlet end 211 is provided on the side of the inclined section 213 away from the vertical section 212. The vertical section 212 is provided perpendicular to the wire mesh 1, and the inclined section 213 extends toward the wire mesh 1. The inclined section 213 can be a straight line or a curved line. Compared with a straight line, the curved line 213 is more conducive to reducing the impact force of the mortar on the guide wheel 3 and the wire mesh 1, thereby extending the service life of the corresponding equipment.

[0040] Furthermore, the angle θ between the extension direction of the inclined section 213 and the plane of the wire mesh 1 satisfies 30°≤θ≤45°. The angle between the extension direction of the inclined end and the plane of the wire mesh 1 facilitates providing the mortar with a certain incident angle, allowing a portion of the mortar to gain momentum and flow toward the wire mesh 1, assisting the wire mesh 1 in cutting the silicon rods 4 while also cooling the silicon rods 4 during cutting. The remaining portion of the mortar flows toward the guide wheel 3, cooling the coating on the surface of the guide wheel 3 and reducing deformation of the coating.

[0041] In another optional embodiment, the distance between the outlet end 211 and the plane where the wire mesh 1 is located is h, then h ≥ 10 μm is satisfied. It should be noted that a gap should be left between the outlet end 211 of the guide plate 21 and the plane where the wire mesh 1 is located, otherwise the sand curtain will disturb the wire mesh 1 after reaching the guide wheel 3 and then spraying toward the wire mesh 1. At the same time, the guide plate 21 should be close to the wire mesh 1. If the distance between the two is too large, the sand curtain will be unstable. Based on this, the distance between the outlet end 211 and the plane where the wire mesh 1 is located should meet the above requirements. In other embodiments, the distance between the outlet end 211 and the plane where the wire mesh 1 is located can also be other reasonable distances. Those skilled in the art can configure this according to actual conditions, and this embodiment does not limit this.

[0042] Please refer to Figure 2 The wire saw assembly includes two slurry supply mechanisms 2, which are arranged in a one-to-one correspondence with the centers of two guide wheels 3 located on the same horizontal plane. Figure 2In the example shown, the outlet ends 211 of the guide plates 21 in the two slurry supply mechanisms 2 are respectively arranged directly above the center of the two guide wheels 3. It should be noted that the inclined section 213 in the guide plate 21 of the slurry supply mechanism 2 on the left should be inclined toward the right, and the inclined section 213 in the guide plate 21 of the slurry supply mechanism 2 on the right should be inclined toward the left to ensure that a part of the sprayed mortar can flow to the wire mesh 1.

[0043] In another embodiment, the present invention also provides a wire cutting machine, comprising: a driving mechanism (not shown in the figure) and the wire saw assembly as described above; the driving mechanism is connected to the wire mesh 1, and is used to drive the wire mesh 1 to move back and forth between the guide wheels 3 to cut the silicon rod 4. It should be noted that the driving mechanism may include a winding pulley, an auxiliary pulley pulley, a wire supply wheel, a winding wheel, a recovery wheel, a supply side tension pulley, a recovery side tension pulley, a supply side load sensor pulley, a recovery side load sensor pulley, a fixed pulley, a winding load sensor pulley, etc. These wheel trains have the functions of paying out the wire, arranging the wire, tensioning, detecting, and taking up the wire. The above-mentioned wheel train cooperates with the guide wheel 3 to realize the reciprocating movement of the wire mesh 1 between the guide wheels 3, thereby driving the abrasive particles in the mortar and the surface of the silicon rod 4 to grind at high speed to cut the silicon rod 4. With such configuration, by using the above-mentioned wire saw assembly, the silicon rod 4 and the coating of the guide wheel 3 are cooled while cutting the silicon rod 4, thereby reducing the change in the relative position between the wire mesh 1 and the silicon rod 4, reducing the warp value of the slices formed by cutting, and ensuring the product yield.

[0044] In summary, in the wire saw assembly and wire cutting machine provided in the embodiments of the present invention, the wire saw assembly includes: a wire mesh, a slurry supply mechanism and a plurality of guide wheels; at least two guide wheels are located on the same horizontal plane, and the wire mesh is covered between the two guide wheels located on the same horizontal plane, and the silicon rods to be cut are placed on the wire mesh; the slurry supply mechanism includes a slurry supply device and a guide plate, the guide plate has an inlet end and an outlet end, the inlet end is connected to the slurry spraying port of the slurry supply device, and the outlet end is arranged close to the guide wheel, and a distance is left between the outlet end and the guide wheel; the guide plate is used to circulate the mortar in the slurry supply mechanism, and a part of the slurry sprayed from the outlet end flows to the wire mesh, and the other part flows to the guide wheel, which is used to cool the coating of the guide wheel.

[0045] With such a configuration, by setting the outlet end of the guide plate close to the guide wheel, a part of the slurry sprayed from the outlet end flows to the wire mesh, cooperating with the wire mesh to achieve cutting of the silicon rods, and can also cool the cut silicon rods; the other part flows to the guide wheel to cool the coating of the guide wheel, wherein the thermal expansion coefficient of the coating of the guide wheel is greater than the thermal expansion coefficient of the silicon rods. Therefore, a part of the slurry directly cools the guide wheel, which can reduce the deformation of the coating of the guide wheel, thereby reducing the influence of the deformation of the guide wheel coating on the relative position of the wire mesh and the silicon rods, thereby reducing the warp value of the slices formed by cutting, and improving the yield of the product.

[0046] The above description is only a description of the preferred embodiment of the present invention and does not limit the scope of the present invention. Any changes and modifications made by ordinary technicians in the field of the present invention based on the above disclosure shall fall within the scope of protection of the claims.

Claims

1. A wire saw assembly, characterized in that: include: A wire mesh, a slurry supply mechanism and a plurality of guide wheels; At least two of the guide wheels are located on the same horizontal plane, and the wire mesh is fully distributed between the two guide wheels located on the same horizontal plane, and the silicon rods to be cut are placed on the wire mesh; The slurry supply mechanism includes a slurry supply device and a guide plate, the guide plate has an inlet end and an outlet end, the inlet end is connected to the slurry spraying port of the slurry supply device, the outlet end is arranged close to the guide wheel, and a distance is left between the outlet end and the guide wheel; The guide plate is used for circulating the mortar in the slurry supply mechanism. A part of the mortar sprayed out from the outlet end flows to the wire mesh, and another part flows to the guide wheel for cooling the coating of the guide wheel.

2. The wire saw assembly according to claim 1, characterized in that The outlet end and the center of the guide wheel are on the same axis, and the angle between the axis and the plane where the wire mesh is located is α, which satisfies 80°≤α≤90°.

3. The wire saw assembly according to claim 1, wherein: The guide plate has a vertical section and an inclined section, the vertical section is connected to the inclined section, and an extension direction of the vertical section is arranged at an angle to an extension direction of the inclined section.

4. The wire saw assembly according to claim 3, wherein: The inlet end is arranged on a side of the vertical section away from the inclined section, the outlet end is arranged on a side of the inclined section away from the vertical section, the vertical section is arranged perpendicular to the wire mesh, and the inclined section extends toward a direction close to the wire mesh.

5. The wire saw assembly according to claim 3, characterized in that The angle between the extension direction of the inclined section and the plane where the wire mesh is located is θ, which satisfies 30°≤θ≤45°.

6. The wire saw assembly according to claim 1, wherein: The distance between the outlet and the plane where the wire mesh is located is h, and h≥10 μm.

7. The wire saw assembly according to claim 1, wherein: The wire saw assembly includes three guide wheels, and the three guide wheels are arranged in an inverted triangle shape.

8. The wire saw assembly according to claim 1, wherein: A guide wheel groove is provided on the outer wall of the guide wheel, and the wire mesh is formed by winding a cutting wire around the guide wheel groove, and is used for continuously cutting the silicon rods.

9. The wire saw assembly according to claim 1, wherein: The wire saw assembly includes two slurry supply mechanisms, and the two slurry supply mechanisms are arranged in one-to-one correspondence with the centers of the two guide wheels located in the same horizontal plane.

10. A wire cutting machine, characterized in that: include: A driving mechanism and a wire saw assembly as claimed in any one of claims 1 to 9; The driving mechanism is connected to the wire mesh and is used to drive the wire mesh to move back and forth between the guide wheels to cut the silicon rods.

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