Vacuum box body structure of magnetron sputtering vacuum coating machine

Abstract

The utility model discloses a vacuum box body structure of a magnetron sputtering vacuum coating machine, which comprises a box body consisting of a top plate, a bottom plate and side plates, the side plates on the front side and the rear side of the box body are of double-layer structures and comprise inner plates and outer plates which are arranged at intervals inside and outside, cooling roller rotating connecting holes are formed in the inner plates in a penetrating manner, and cooling roller rotating connecting holes are formed in the outer plates in a penetrating manner. Cooling roller rotating sealing holes which share the same center line with the cooling roller rotating connecting holes are formed in the outer plate in a penetrating mode, a plurality of cathode mounting holes are formed in the positions, located on the outer sides of the cooling roller rotating connecting holes, of the inner plate, and cathode sealing holes are formed in the positions, corresponding to the cathode mounting holes, of the outer plate in a penetrating mode. A plurality of groups of anode fixing holes are formed in the inner plate and located on the outer sides of the cathode mounting holes, flattening roller rotating holes are formed in the inner plate and located between the head end and the tail end where the cathode mounting holes are formed in a penetrating mode, and an ion source fixing hole and a plurality of tension and guide roller rotating holes are further formed in the inner plate in a penetrating mode. The connecting structure is simple in structure, different connecting structures and sealing structures are arranged according to different components, and cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, in particular to a vacuum box structure of a magnetron sputtering vacuum coating machine. Background Art

[0002] Magnetron sputtering vacuum coating is a physical vapor deposition (PVD) technology used to deposit thin films on various substrates. The technology uses magnetic fields and plasma to sputter target materials in a vacuum environment to form high-quality thin films. The magnetron sputtering vacuum coating system includes several key equipment and components, mainly a vacuum chamber, a substrate rotating mechanism located in the vacuum chamber, and a magnetron sputtering system. The substrate rotating mechanism is used to fix the substrate and keep it rotating during the sputtering process to ensure the uniformity of the film, including cooling rollers for installing cooling drums and various flattening, tension and guide rollers for guiding the substrate in and out of the cooling drum; and the magnetron sputtering system includes a cathode and ion source system, which work together to form a stable plasma area so that the sputtering process can continue.

[0003] Conventional vacuum chambers are usually single-layer plate structures. The substrate rotation mechanism and magnetron sputtering system are installed on the side panels of the vacuum chamber. The vacuum chamber welded from a single plate will make it difficult to control its deformation. Any deformation of the side panels will lead to the loss of working accuracy of each axis system. Therefore, the stability of the side panels of the vacuum chamber determines the working accuracy of the axis systems in each mechanism system. Moreover, a sealing device needs to be designed for each axis system. The large number of sealing devices not only increases the cost but also increases the possibility of leakage at the seal. Therefore, how to provide a vacuum chamber structure with the advantages of simple structure, reliable installation structure strength, and reduced probability of sealing leakage requires further consideration. Utility Model Content

[0004] In view of the above-mentioned deficiencies of the prior art, the technical problem to be solved by the present invention is: how to provide a vacuum box structure of a magnetron sputtering vacuum coating machine that can meet the installation strength of components in various mechanism systems, improve the system working accuracy, and reduce the risk of leakage.

[0005] In order to solve the above technical problems, the utility model adopts the following technical solutions:

[0006] A vacuum box structure of a magnetron sputtering vacuum coating machine, comprising a box body composed of a top plate, a bottom plate and side plates, the side plates located at the front and rear sides of the box body are both double-layer structures and include inner plates and outer plates arranged at intervals inside and outside, the inner plate, the outer plate, the top plate, the bottom plate and the side plates located at the left and right sides of the box body constitute a box structure, a cooling roller rotation connection hole is penetrated on the inner plate along the relative directions of the two inner plates, a cooling roller rotation sealing hole coaxial with the cooling roller rotation connection hole is penetrated on the outer plate, and a cooling roller rotation sealing hole is formed on the inner plate and located on the outer side of the cooling roller rotation connection hole around the center of the cooling roller rotation connection hole A plurality of cathode mounting holes are arranged in the linear direction, a cathode sealing hole which is coaxial with the corresponding cathode mounting hole is respectively pierced on the outer plate at a position corresponding to each cathode mounting hole, a flattening roller rotating hole is pierced on the inner plate and located between the head and tail ends of the arrangement of the plurality of cathode mounting holes, a plurality of tension and guide roller rotating holes are also pierced on the inner plate and located outside the flattening roller rotating hole, an ion source fixing hole is pierced on the inner plate and located between the flattening roller rotating hole and the head end of the arrangement of the plurality of cathode mounting holes, and an ion source pipeline sealing hole which is connected with the inside of the box body is also pierced on the box body.

[0007] When installing the cooling drum, the two ends of the cooling roller on the cooling drum pass through the cooling roller rotation connection hole and the cooling roller rotation sealing hole on the side thereof, and the corresponding bearing is installed at the cooling roller rotation connection hole to be rotationally connected with the cooling roller, and the corresponding sealing device is installed at the cooling roller rotation sealing hole to seal the cooling roller; similarly, the two ends of the cathode pass through the cathode mounting hole and the cathode sealing hole on the side thereof, and the bearing is arranged at the cathode mounting hole to be rotationally connected with the cathode, and the sealing structure is installed at the cathode sealing hole to seal the cathode, so that the cooling water can enter the interior of the cooling roller and the cathode from the ends of the cooling roller and the cathode outside the box body while the cooling roller and the cathode are rotating, and then flow out from the other end of the cooling roller and the cathode to cool them. In addition, the end of the cathode extends out of the box body, and the conductive circuit can be directly connected to supply power to the cathode. The main function of the flattening, tension and guide rollers in the box body is to guide the transmission of the substrate. They do not need to be cooled, so they only need to be rotated and connected to the flattening roller rotation hole and the tension and guide roller rotation hole. In addition, the ion source system is also installed at the ion source fixing hole on the inner plate, and the power supply cable of the ion source enters the box body through the ion source pipeline sealing hole to power the ion source system, and the power supply cable is sealed at the ion source pipeline sealing hole.

[0008] In the utility model, the side plate for installing the components in the corresponding mechanism system adopts a double-layer structure design, and the inner plate and the outer plate form a box-type structure with the top plate, the bottom plate and the left and right side plates on this surface. First of all, such a structure has better strength on this surface than the vacuum chamber formed by welding a single plate in the prior art; secondly, the structure of the utility model is used to rotate or fix each component on the inner plate, and the inner plate is in a vacuum environment, and each component does not need to be sealed when installed on it. At the same time, since they are in the same vacuum environment, the inner plate will not deform, thus ensuring the working accuracy of each shaft system component. Only the cooling roller and the cathode need to be designed and installed with a rotating sealing device because the cooling medium needs to be introduced and led out of the vacuum chamber due to the rotation requirement, which reduces the number of sealing devices; and the deformation here is the maximum deformation point, but due to the adoption of a double-plate sandwich box structure, the strength here is greatly enhanced, so that the deformation of the box body is controlled within an ideal range, thereby improving the working accuracy of each component and reducing the risk of leakage.

[0009] As an optimization, the outer plate includes a frame that is fixedly sealed with the top plate, the bottom plate and the side plates on the left and right sides of the box body, and the outer cover of the frame is provided with a side cover that is detachably connected to the frame and can be sealed with the frame, and the cooling roller rotation sealing hole and the cathode sealing hole are both located on the side cover. Opening the side cover can facilitate maintenance of the internal cathode, flattening, tension and guide rollers.

[0010] As an optimization, strip reinforcement plates are respectively arranged on the left and right sides of the frame and between the frame and the inner plate. The strip reinforcement plates extend vertically and the side edges thereof are respectively fixedly connected to the frame and the inner plate. The strip reinforcement plates can support the frame and the inner plate to avoid deformation and further improve the supporting strength of the inner plate.

[0011] As an optimization, a reinforcing sleeve arranged on the same center line as the rotating connecting hole of the cooling roller is fixedly connected to the side of the inner plate facing the outer plate, and a plurality of reinforcing ribs extending radially are evenly spaced around the center line of the reinforcing sleeve on the circumference thereof, and the reinforcing ribs are respectively fixedly connected to the reinforcing sleeve, the inner plate and the frame, and the end of each reinforcing rib away from the reinforcing sleeve is also fixedly connected to the top plate, the bottom plate or the side plates on the left and right sides of the box body on the corresponding side, and the reinforcing sleeve and the reinforcing rib are each flush with the outer surface of the frame on the side away from the inner plate. In order to improve the coating efficiency and better cool the substrate, the size of the cooling drum is larger, and the entire weight is also larger after the cooling water is introduced, and the cathode also needs to be cooled by water. In addition, the installation of other equipment requires a greater strength for the inner plate. Therefore, the provision of reinforcing sleeves and reinforcing ribs can improve the stability of the structural installation, prevent deformation, and further improve the working accuracy.

[0012] As an optimization, the reinforcing rib is provided with a threading hole for connecting the spaces on both sides of the reinforcing rib, so as to facilitate threading and wiring.

[0013] As an optimization, a sealing groove is provided on the outer side of the frame and surrounds the frame. A sealing strip is provided in the sealing groove. When the side cover is connected to the frame, the side cover is sealed with the frame through the sealing strip. The structure is simple, not easy to be damaged, and can improve the sealing between the frame and the side cover.

[0014] As an optimization, a plurality of reinforcing blocks fixedly connected to the inner plate are respectively arranged on the side of the inner plate facing away from the outer plate and between the top plate and the bottom plate, so as to increase the connection strength between the inner plate and the top plate and the bottom plate.

[0015] As an optimization, multiple groups of anode fixing holes are arranged on the inner plate and located outside the multiple cathode mounting holes around the center line direction of the cooling roller rotating connection hole. One of the inner plates is provided with anode pipeline perforations on one side corresponding to the location of each group of anode fixing holes, and the outer plate on the same side as the location of the anode pipeline perforations is provided with anode pipeline sealing holes. Setting anodes in the magnetron sputtering vacuum coating machine can enable the entire coating process to be carried out efficiently and stably. Considering that the anode is only fixedly installed, anode fixing holes are provided on the inside and outside to facilitate the fixation of the anode. When the anode is working, it also needs to be cooled, so it is also necessary to connect cooling water from the outside of the box. The cables for powering the anode and the circulating water pipes for cooling enter the space between the inner plate and the outer plate from the anode pipeline sealing holes, and then enter the box body through the anode pipeline perforations to connect to the corresponding anodes, while the cables and circulating water pipes are sealed at the anode pipeline sealing holes.

[0016] As an optimization, the ion source pipeline sealing hole is located on the top plate and between the inner plate and the outer plate on the same side as the ion source pipeline sealing hole. The power supply cable of the ion source enters the space between the inner plate and the outer plate from the ion source pipeline sealing hole, and the cable is sealed in the ion source pipeline sealing hole. After the cable extends through the ion source pipeline sealing hole, it can be connected to the ion source system installed inside the box body.

[0017] Compared with the prior art, the utility model has the following advantages: the various components in the utility model are rotatably or fixedly installed on the inner plate, and combined with the box structure, the side plates of the double-plate sandwich structure can obtain better structural strength, and the inner plate in a vacuum state is less likely to deform; only the cooling roller and the cathode pass through the outer plate and are sealed by a rotating sealing device, which reduces the number of sealing devices and reduces costs; at the same time, the cathode is an overall independent motion mechanism, and the motion accuracy requirements are not high, and the deformation of its mounting surface has little effect on its motion function and accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the front, side and lateral three-dimensional structure of the utility model when the side cover is not installed;

[0019] Figure 2 It is a schematic diagram of the back side three-dimensional structure of the utility model when the side cover is not installed;

[0020] Figure 3 It is a schematic diagram of the front, side and lateral three-dimensional structure of the utility model when the side cover is installed;

[0021] Figure 4 It is a schematic diagram of the back side three-dimensional structure of the utility model when the side cover is installed;

[0022] Figure 5 It is a schematic diagram of the front, side and side three-dimensional structure when the utility model is connected with other components in a magnetron sputtering vacuum coating machine;

[0023] Figure 6 It is a schematic diagram of the back side lateral three-dimensional structure when the utility model is connected with other components in a magnetron sputtering vacuum coating machine. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical scheme and advantages of the embodiment of the utility model clearer, the technical scheme in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. The components of the embodiment of the utility model generally described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiment of the utility model provided in the drawings is not intended to limit the scope of the utility model claimed for protection, but merely represents the selected embodiment of the utility model. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work belong to the scope of protection of the utility model.

[0025] It should be noted that similar numbers and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings. In the description of the utility model, it should be noted that the orientation or position relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. is based on the orientation or position relationship shown in the drawings, or the orientation or position relationship in which the utility model product is usually placed when used, which is only for the convenience of describing the utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the utility model. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance. In addition, the terms "horizontal", "vertical", etc. do not mean that the components are absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted. In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0026] like Figures 1 to 6As shown, the vacuum box structure of the magnetron sputtering vacuum coating machine in this specific embodiment includes a box body composed of a top plate 1, a bottom plate 2 and side plates. The side plates located on the front and rear sides of the box body are both double-layer structures and include an inner plate 3 and an outer plate arranged at intervals inside and outside. The inner plate 3, the outer plate, the top plate 1, the bottom plate 2 and the side plates located on the left and right sides of the box body constitute a box structure. A cooling roller rotation connection hole 4 is penetrated on the inner plate 3 along the relative directions of the two inner plates 3. A cooling roller rotation sealing hole 5 coaxial with the cooling roller rotation connection hole 4 is penetrated on the outer plate. A cooling roller rotation connection hole 5 on the inner plate 3 and located on the outer side of the cooling roller rotation connection hole 4 is provided around the cooling roller rotation connection hole 4. A plurality of cathode mounting holes 6 are arranged in the center line direction of hole 4, and a cathode sealing hole 7 which is coaxial with the corresponding cathode mounting hole 6 is respectively pierced at a position corresponding to each cathode mounting hole 6 on the outer plate, a flattening roller rotating hole 9 is pierced on the inner plate 3 and located between the head and tail ends of the plurality of cathode mounting holes 6, a plurality of tension and guide roller rotating holes 10 are also pierced on the inner plate 3 and located outside the flattening roller rotating hole 9, an ion source fixing hole 11 is pierced on the inner plate 3 and located between the flattening roller rotating hole 8 and the head end of the plurality of cathode mounting holes 6, and an ion source pipeline sealing hole which is connected to the inside of the box body is also pierced on the box body.

[0027] In this specific embodiment, the outer plate includes a frame 12 which is fixedly sealed with the top plate 1, the bottom plate 2 and the side plates located on the left and right sides of the box body respectively. The outer cover of the frame 12 is provided with a side cover 13 which is detachably connected to the frame 12 and can be sealed with the frame 12. The cooling roller rotating sealing hole 5 and the cathode sealing hole 7 are both located on the side cover 13.

[0028] In this specific embodiment, strip reinforcement plates 14 are respectively provided on the left and right sides of the frame 12 and between the frame 12 and the inner panel 3. The strip reinforcement plates 14 extend vertically and their side edges are respectively fixedly connected to the frame 12 and the inner panel 3.

[0029] In this specific embodiment, the inner plate 3 is fixedly connected to a reinforcing sleeve 15 which is arranged on the same center line as the cooling roller rotating connecting hole 4 on one side thereof facing the outer plate. A plurality of radially extending reinforcing ribs 16 are evenly spaced on the circumference of the reinforcing sleeve 15 around its center line. The reinforcing ribs 16 are respectively fixedly connected to the reinforcing sleeve 15, the inner plate 3 and the frame 12. An end of each reinforcing rib 16 away from the reinforcing sleeve 15 is also fixedly connected to the top plate 1, the bottom plate 2 or the left and right side plates of the box body on its corresponding side. The reinforcing sleeve 15 and the reinforcing rib 16 are each flush with the outer surface of the frame 12 on the side away from the inner plate 3.

[0030] In this specific embodiment, the reinforcing rib 16 is provided with threading holes 17 for connecting the spaces on both sides of the reinforcing rib 16 .

[0031] In this specific embodiment, a sealing groove 20 is opened on the outer side surface of the frame 12 and surrounds the frame 12. A sealing strip is arranged in the sealing groove 20. When the side cover 13 is connected to the frame 12, the side cover 13 is sealed with the frame 12 through the sealing strip.

[0032] In this specific embodiment, a plurality of reinforcing blocks 18 fixedly connected to the inner plate 3 are disposed on a side of the inner plate 3 facing away from the outer plate and between the top plate 1 and the bottom plate 2 .

[0033] In this specific embodiment, a plurality of groups of anode fixing holes 8 are arranged on the inner plate 3 and located on the outside of the plurality of cathode mounting holes 6 around the center line direction of the cooling roller rotating connecting hole 4, and an anode pipeline through hole 19 is provided on one side of the inner plate 3 corresponding to the location of each group of anode fixing holes 8, and an anode pipeline sealing hole 21 is provided on the outer plate on the same side as the location of the anode pipeline through hole 19.

[0034] In this specific implementation, the ion source pipeline sealing hole is located on the top plate 1 and between the inner plate 3 and the outer plate on the same side as the ion source pipeline sealing hole.

[0035] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model rather than to limit it. Although the utility model has been described by referring to the preferred embodiments of the utility model, those skilled in the art should understand that various changes can be made in form and details without departing from the spirit and scope of the utility model as defined in the appended claims.

Claims

1. A vacuum box structure of a magnetron sputtering vacuum coating machine, comprising a box body consisting of a top plate, a bottom plate and a side plate, characterized in that: The side panels located on the front and rear sides of the box body are both double-layer structures and include inner and outer panels arranged at intervals inside and outside. The inner panel, outer panel, top panel, bottom panel and side panels located on the left and right sides of the box body constitute a box structure. A cooling roller rotation connecting hole is penetrated on the inner panel along the relative directions of the two inner panels, a cooling roller rotation sealing hole which is coaxial with the cooling roller rotation connecting hole is penetrated on the outer panel, a plurality of cathode mounting holes are arranged on the inner panel and located on the outer side of the cooling roller rotation connecting hole and around the center line direction of the cooling roller rotation connecting hole, a cathode sealing hole which is coaxial with the corresponding cathode mounting hole is penetrated on the outer panel corresponding to each cathode mounting hole, a flattening roller rotation hole is penetrated on the inner panel and located between the head and tail ends of the arrangement of the plurality of cathode mounting holes, a plurality of tension and guide roller rotation holes are also penetrated on the inner panel and located on the outer side of the flattening roller rotation hole, an ion source fixing hole is penetrated on the inner panel and located between the flattening roller rotation hole and the head end of the arrangement of the plurality of cathode mounting holes, and an ion source pipeline sealing hole which is connected with the interior of the box body is also penetrated on the box body.

2. The vacuum box structure of the magnetron sputtering vacuum coating machine according to claim 1, characterized in that: The outer plate includes a frame that is fixedly sealed with the top plate, the bottom plate and the side plates located on the left and right sides of the box body respectively. The outer cover of the frame is provided with a side cover that is detachably connected to the frame and can be sealed with the frame. The cooling roller rotation sealing hole and the cathode sealing hole are both located on the side cover.

3. The vacuum box structure of the magnetron sputtering vacuum coating machine according to claim 2 is characterized in that: Strip reinforcement plates are respectively arranged on the left and right sides of the frame and between the frame and the inner plate. The strip reinforcement plates extend vertically and the side edges thereof are respectively fixedly connected to the frame and the inner plate.

4. The vacuum box structure of the magnetron sputtering vacuum coating machine according to claim 2, characterized in that: A reinforcing sleeve which is arranged on the same center line as the rotating connecting hole of the cooling roller is fixedly connected to the side surface of the inner plate facing the outer plate, and a plurality of reinforcing ribs extending radially are evenly spaced around the center line of the reinforcing sleeve on the circumference thereof, and the reinforcing ribs are respectively fixedly connected to the reinforcing sleeve, the inner plate and the frame, and one end of each reinforcing rib away from the reinforcing sleeve is also fixedly connected to the top plate, the bottom plate or the left and right side plates of the box body on the corresponding side, and the reinforcing sleeve and the reinforcing ribs are each flush with the outer surface of the frame with respect to the side surface away from the inner plate.

5. The vacuum box structure of the magnetron sputtering vacuum coating machine according to claim 4, characterized in that: The reinforcing rib is provided with a threading hole for connecting the spaces on both sides of the reinforcing rib.

6. The vacuum box structure of the magnetron sputtering vacuum coating machine according to claim 2, characterized in that: A sealing groove is provided on the outer side surface of the frame and surrounds the frame. A sealing strip is provided in the sealing groove. When the side cover is connected to the frame, the side cover is sealed with the frame through the sealing strip.

7. The vacuum box structure of the magnetron sputtering vacuum coating machine according to claim 1, characterized in that: A plurality of reinforcing blocks fixedly connected to the inner plate are respectively arranged on one side of the inner plate facing away from the outer plate and between the top plate and the bottom plate.

8. The vacuum box structure of the magnetron sputtering vacuum coating machine according to claim 1, characterized in that: A plurality of groups of anode fixing holes are arranged on the inner plate and located outside the plurality of cathode mounting holes around the center line direction of the cooling roller rotating connecting hole, wherein an anode pipeline through hole is provided on one side of the inner plate corresponding to the location of each group of anode fixing holes, and an anode pipeline sealing hole is provided on the outer plate on the same side as the location of the anode pipeline through hole.

9. The vacuum box structure of the magnetron sputtering vacuum coating machine according to claim 1, characterized in that: The ion source pipeline sealing hole is located on the top plate and between the inner plate and the outer plate on the same side as the ion source pipeline sealing hole.

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