PVD (Physical Vapor Deposition) vacuum coating workpiece frame

Abstract

The utility model discloses a PVD (Physical Vapor Deposition) vacuum coating workpiece frame which is characterized by comprising a rotary bracket, a micro positioning piece and an elastic tensioning piece, a micro positioning piece and a first positioning part are arranged on the side face of the rotating support, the micro positioning piece is provided with a second positioning part, the first positioning part and the second positioning part are each provided with a lateral opening, and the first positioning part is arranged on the axial side of the rotating support of the second positioning part; the micro-motion positioning piece is connected with the rotary bracket through a guide structure and moves along the axial direction of the rotary bracket; the two ends of the elastic tensioning piece are connected with the micro-motion positioning piece and the rotating support respectively. The positioning of the workpiece is realized through twice positioning adjustment, the stability is high, the operation is simple, the adjustment is convenient, and the working efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of PVD devices, in particular to a PVD vacuum coating workpiece rack. Background Art

[0002] PVD is a thin film preparation technology that uses physical methods to deposit materials on the workpiece to be plated under vacuum conditions. It is an environmentally friendly surface treatment method that can truly obtain micron-level coatings without pollution.

[0003] In the existing PVD coating device, the workpiece is fixed by a workpiece rack. The structure of the workpiece rack is different for different workpiece structures and sputtering methods. It can be a stationary workpiece rack, a substrate rotating rack, and a multi-degree-of-freedom workpiece rack. Based on the need for uniform sputtering of the workpiece, a workpiece rack with a rotating rack structure is often used. The workpiece is clamped by a fixture on the rotating rack or the clamping structure is matched with the workpiece concave and convex to achieve fixation. For example, when the existing long strip of automobile interior parts are vacuum sputtered by using a PVD coating device, the interior parts are fixed in a shielding tool, and then the shielding tool with the interior parts is placed on the workpiece rack, and the through holes set on the upper and lower rotating racks of the workpiece rack are used to clamp and match with the concave and convex of the shielding tool. The above fixing method uses a two-point solution to fix the interior parts, and the structure is stable, which prevents the interior parts from shaking during the rotating sputtering process and affecting the uniformity of the coating. However, the two-point clamping requires high accuracy in adjusting the distance between the upper and lower rotating racks, and the operation is cumbersome, which affects work efficiency. Utility Model Content

[0004] The utility model aims to overcome the defects in the prior art and provide a PVD vacuum coating workpiece rack with stable structure, simple operation, convenient adjustment and improved work efficiency.

[0005] In order to achieve the above-mentioned technical effect, the technical solution of the utility model is: a PVD vacuum coating workpiece rack, comprising a rotating bracket, a micro-motion positioning piece and an elastic tensioning piece; the side of the rotating bracket is provided with the micro-motion positioning piece and a first positioning portion, the micro-motion positioning piece is provided with a second positioning portion, the first positioning portion and the second positioning portion both have lateral openings, the first positioning portion is arranged on the axial side of the rotating bracket of the second positioning portion; the micro-motion positioning piece is connected to the rotating bracket through a guide structure and moves axially along the rotating bracket; the two ends of the elastic tensioning piece are respectively connected to the micro-motion positioning piece and the rotating bracket.

[0006] A preferred technical solution is that the rotating bracket includes a rotating shaft, an upper rotating frame and a lower rotating frame, and the upper rotating frame and the lower rotating frame are sleeved on the rotating shaft; one of the upper rotating frame and the lower rotating frame is circumferentially provided with the first positioning portion, and the other is circumferentially provided with the micro-motion positioning member.

[0007] The preferred technical solution is that it also includes a telescopic adjustment member, both ends of which are respectively connected to the upper rotating frame and the lower rotating frame and are axially arranged between the upper rotating frame and the lower rotating frame along the rotating bracket; one of the upper rotating frame and the lower rotating frame is fixed relative to the rotating shaft, and the other moves axially along the rotating bracket through the telescopic adjustment member.

[0008] A preferred technical solution is that one of the first positioning portion and the second positioning portion is a groove, and the other is a through hole, and the notch of the groove is arranged toward the through hole.

[0009] The preferred technical solution is that the guide structure includes a guide long hole and a limit pin passing through the guide long hole, the guide long hole is arranged on one of the micro-positioning part or the rotating bracket, and the limit pin is arranged on the other of the micro-positioning part or the rotating bracket.

[0010] A preferred technical solution is that the elastic tensioning member is a tension spring.

[0011] A preferred technical solution is that the elastic tensioning member is wound around the upper rotating frame, one end of the elastic tensioning member is connected to one of the micro-motion positioning members, and the other end is connected to another of the micro-motion positioning members.

[0012] A preferred technical solution is that the micro-positioning member is provided with a connecting portion, and the connecting portion is arranged above the guide long hole along the axial direction of the rotating bracket.

[0013] The advantages and beneficial effects of the utility model are: one-time positioning of the workpiece is achieved through the concave-convex cooperation between the first positioning part, the second positioning part and the workpiece; and the two-point positioning method makes the positioning of the workpiece more stable.

[0014] Secondary positioning is achieved through the cooperation of the micro-positioning member, the guide structure and the elastic tensioning member; the elastic tensioning member drives the micro-positioning member to move toward or away from the first positioning portion along the guide structure, thereby abutting the workpiece between the first positioning portion and the micro-positioning member to achieve secondary positioning.

[0015] The utility model sets two positioning adjustments to realize the positioning of the workpiece. The first positioning is through the first positioning part and the second positioning part set along the axial direction of the rotating bracket, which limits the workpiece to move only along the axial direction of the rotating bracket; the second positioning is through the self-adjustment of the elastic tensioning part to drive the micro-positioning part along the guide structure toward or away from the first positioning part, and adjust the distance between the first positioning part and the second positioning part, so that the workpiece is completely abutted between the first positioning part and the second positioning part, further limiting the movement of the workpiece in the axial direction of the rotating bracket, and finally achieving the fixation of the workpiece. The two-positioning method ensures high positioning stability while being simple to operate, convenient to adjust, and improving work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 Schematic diagram of the three-dimensional structure of the PVD vacuum coating workpiece frame in the embodiment;

[0017] Figure 2 yes Figure 1 A schematic diagram of the enlarged structure of the micro-positioning member at position A in the middle;

[0018] In the figure: 1. rotating bracket; 11. first positioning part; 12. rotating shaft; 13. upper rotating frame; 14. lower rotating frame; 2. micro-positioning member; 21. second positioning part; 211. lateral opening; 212. notch; 22. connecting part; 3. elastic tensioning member; 4. guiding structure; 41. guiding long hole; 42. limiting pin; 5. telescopic adjusting member. DETAILED DESCRIPTION

[0019] The following is a further description of the specific implementation of the present invention in conjunction with the accompanying drawings and embodiments. The following embodiments are only used to more clearly illustrate the technical solution of the present invention, and cannot be used to limit the protection scope of the present invention.

[0020] In the description of the present invention, it should be noted that, unless otherwise specified, “plurality” means more than two; the terms “upper”, “lower”, “left”, “right”, “inside”, “outside”, etc., indicating directions or positional relationships, are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present invention.

[0021] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to the specific circumstances.

[0022] like Figure 1-2 As shown, an embodiment of a PVD vacuum coating workpiece holder comprises a rotating bracket 1, a micro-positioning member 2 and an elastic tensioning member 3; a micro-positioning member 2 and a first positioning portion 11 are arranged on the side of the rotating bracket 1, and the micro-positioning member 2 is provided with a second positioning portion 21, and both the first positioning portion 11 and the second positioning portion 21 have a lateral opening 211, and the first positioning portion 11 is arranged on the axial side of the rotating bracket 1 of the second positioning portion 21; the micro-positioning member 2 is connected to the rotating bracket 1 through a guide structure 4 and moves axially along the rotating bracket 1; the two ends of the elastic tensioning member 3 are respectively connected to the micro-positioning member 2 and the rotating bracket 1.

[0023] The primary positioning of the workpiece is achieved through the concave-convex cooperation between the first positioning part 11, the second positioning part 21 and the workpiece. The secondary positioning is achieved through the driving cooperation of the micro-positioning member 2, the guide structure 4 and the elastic tensioning member 3. The guide structure 4 limits the direction of movement of the micro-positioning member 2, and the elastic tensioning member 3 provides the driving force for the movement of the micro-positioning member 2; specifically, the elastic tensioning member 3 drives the micro-positioning member 2 to move toward or away from the first positioning part 11 along the guide structure 4. Based on the elastic self-adjusting performance of the elastic tensioning member 3, the spacing between the first positioning member and the second positioning member is adjusted until the first positioning member and the second positioning member are completely in contact with the workpiece, and finally the relative position of the micro-positioning member 2 and the rotating bracket 1 is fixed.

[0024] Optionally, along the axial direction of the rotating bracket 1 , the first positioning portion 11 is located above or below the second positioning portion 21 .

[0025] In this embodiment, the side of the rotating bracket 1 is provided with a first positioning portion 11 and a second positioning portion 21, and the side opening 211 is a groove formed by the first positioning portion 11 and the second positioning portion 21 away from the side of the rotating bracket 1. The workpiece is clamped in the groove to achieve preliminary positioning of the workpiece by the side opening 211. Specifically, the side opening 211 is oriented in a direction away from the side of the rotating bracket 1.

[0026] Furthermore, a plurality of first positioning portions 11 are provided, and are evenly spaced along the circumference of the rotating bracket 1. The number of the second positioning portions 21 is the same as the first positioning portions 11, and the first positioning portions 11 and the second positioning portions 21 cooperate one-to-one to limit the workpiece laterally, so that the workpiece can only move in the longitudinal direction; the transverse direction is a direction perpendicular to the axial direction of the rotating bracket 1, and the longitudinal direction is a direction parallel to the axial direction of the rotating bracket 1.

[0027] like Figure 1-2 As shown, in another preferred embodiment, the rotating bracket 1 includes a rotating shaft 12, an upper rotating frame 13 and a lower rotating frame 14, and the upper rotating frame 13 and the lower rotating frame 14 are sleeved on the rotating shaft 12; one of the upper rotating frame 13 and the lower rotating frame 14 is circumferentially provided with a first positioning portion 11, and the other circumferentially provided with a micro-positioning member 2.

[0028] In this embodiment, the upper rotating frame 13 and the lower rotating frame 14 rotate coaxially around the rotating shaft 12 .

[0029] Optionally, the upper rotating frame 13 is circumferentially provided with a first positioning portion 11, and the lower rotating frame 14 is circumferentially provided with a micro-positioning member 2; or the upper rotating frame 13 is circumferentially provided with a micro-positioning member 2, and the lower rotating frame 14 is circumferentially provided with a first positioning portion 11; the workpiece is limited between the first positioning portion 11 and the second positioning portion 21 of the micro-positioning member 2.

[0030] Further, when the fine motion positioning member 2 is disposed on the upper rotating frame 13, one end of the elastic tension member 3 is connected to the fine motion positioning member 2, and the other end is connected to the lower rotating frame 14; or one end is connected to the fine motion positioning member 2, and the other end is wound around the lower rotating frame 14 and connected to another fine motion positioning member 2. When the fine motion positioning member 2 is disposed on the lower rotating frame 14, one end of the elastic tension member 3 is connected to the fine motion positioning member 2, and the other end is connected to the lower rotating frame 14; or one end is connected to the fine motion positioning member 2, and the other end is wound around the lower rotating frame 14 and connected to another fine motion positioning member 2.

[0031] Furthermore, the upper rotating frame 13 and / or the lower rotating frame 14 are formed by a plurality of triangular frames surrounding the axis of the rotating shaft 12 .

[0032] like Figure 1-2 As shown, in another preferred embodiment, it also includes a telescopic adjustment member 5, both ends of which are respectively connected to the upper rotating frame 13 and the lower rotating frame 14 and are axially arranged between the upper rotating frame 13 and the lower rotating frame 14 along the rotating bracket 1; one of the upper rotating frame 13 and the lower rotating frame 14 is fixed relative to the rotating shaft 12, and the other moves axially along the rotating bracket 1 through the telescopic adjustment member 5.

[0033] By setting the telescopic adjustment member 5, the distance between the upper rotating frame 13 and the lower rotating frame 14 along the axial direction of the rotating bracket 1 is adjusted, and then the distance between the first positioning portion 11 and the second positioning portion 21 is adjusted to achieve one-time positioning of the workpiece.

[0034] Furthermore, a plurality of telescopic adjustment members 5 are provided; preferably, the telescopic adjustment members 5 are arranged at intervals around the rotation direction of the rotating bracket 1 .

[0035] like Figure 1-2 As shown, in another preferred embodiment, one of the first positioning portion 11 and the second positioning portion 21 is a groove, and the other is a through hole, and the notch 212 of the groove is arranged toward the through hole.

[0036] In this embodiment, the workpiece is positioned once by the cooperation of the through hole and the groove. Through the setting of the through hole, one end of the workpiece is fixed by the through hole, and only the position of the other end of the workpiece needs to be adjusted, which is more convenient to operate; through the setting of the groove, adjustable space is reserved for the subsequent secondary positioning of the workpiece.

[0037] Preferably, a through hole is provided on the upper rotating frame 13, one end of the workpiece is clamped in the through hole of the upper rotating frame 13, and the other end of the workpiece naturally droops under the action of gravity, and the positional relationship between the other end of the workpiece and the micro-positioning member 2 is adjusted so that the other end of the workpiece is located in the second positioning portion 21 of the micro-positioning member 2. Compared with the groove, the through hole provided on the upper rotating frame 13 makes it more convenient to adjust the workpiece.

[0038] like Figure 1-2As shown, in another preferred embodiment, the guide structure 4 includes a guide long hole 41 and a limit pin 42 passing through the guide long hole 41, the guide long hole 41 is arranged on one of the micro-positioning part 2 or the rotating bracket 1, and the limit pin 42 is arranged on the other of the micro-positioning part 2 or the rotating bracket 1.

[0039] Optionally, the long guide hole 41 is provided on the fine-motion positioning member 2 , or on the rotating bracket 1 .

[0040] In this embodiment, the guide slot 41 is a waist slot, and the length direction of the waist slot is consistent with the circumference of the rotating bracket 1. The limiting pin 42 moves along the guide slot 41 to realize the micro-motion positioning member 2 and the first positioning portion 11 to move toward or away from each other.

[0041] In this embodiment, one or two guide long holes 41 are provided; when one guide long hole 41 is provided, the guide long hole 41 is provided on the center line of the micro-positioning member 2; when two guide long holes 41 are provided, the guide long holes 41 are provided symmetrically along the center line of the micro-positioning member 2; the extension direction of the center line is consistent with the axial direction of the rotating bracket 1.

[0042] Preferably, two long guide holes 41 are provided and are symmetrically arranged to ensure that when the fine-motion positioning member 2 moves along the long guide holes 41 , both ends of the fine-motion positioning member 2 remain balanced and always move synchronously.

[0043] like Figure 1-2 As shown, in another preferred embodiment, the elastic tensioning member 3 is a tension spring.

[0044] like Figure 1-2 As shown, in another preferred embodiment, the elastic tensioning member 3 is wound around the upper rotating frame 13 , one end of the elastic tensioning member 3 is connected to a micro-motion positioning member 2 , and the other end is connected to another micro-motion positioning member 2 .

[0045] In this embodiment, a single elastic tensioner 3 can simultaneously control the movement of two adjacent micro-positioning members 2. Compared with the elastic tensioner 3 directly connecting the upper rotating frame 13 and the lower rotating frame 14, the number of elastic tensioners 3 is reduced, the cost is reduced, the structure is simple, and the workpiece installation efficiency is improved.

[0046] The elastic tensioning member 3 is wound around the rotating bracket 1. When the fine positioning member 2 is disposed on the lower rotating frame 14, one end of the elastic tensioning member 3 is connected to one fine positioning member 2, and the elastic tensioning member 3 is wound around the upper rotating frame 13 and the other end is connected to another fine positioning member 2.

[0047] In this embodiment, the elastic tensioning member 3 is arranged around the cross beam of the upper rotating frame 13; specifically, the elastic tensioning member 3 is changed in the deformation direction of the elastic tensioning member 3 through the cross beam of the upper rotating frame 13, and the upper rotating frame 13 is connected with the micro-positioning member 2 through the elastic tensioning member 3.

[0048] like Figure 1-2 As shown, in another preferred embodiment, the fine positioning member 2 is provided with a connecting portion 22 , and the connecting portion 22 is arranged above the guide long hole 41 along the axial direction of the rotating bracket 1 .

[0049] The two ends of the elastic tensioning member 3 are fixed by setting the connecting portion 22. The connecting portion 22 is arranged above the long guide hole 41, that is, the point where the elastic tensioning member 3 applies force to the fine positioning member 2 is located above the long guide hole 41, so as to avoid the fine positioning member 2 being offset by the force application direction when the fine positioning member 2 moves along the long guide hole 41.

[0050] When the long guide hole 41 is arranged on the micro-positioning member 2, the connecting portion 22 is arranged directly above the long guide hole 41 along the axial direction of the rotating bracket 1; when the long guide hole 41 is arranged on the lower rotating frame 14, the connecting portion 22 is arranged on the micro-positioning member 2 and is arranged on the upper side of the long guide hole 41 along the axial direction of the rotating bracket 1.

[0051] In this embodiment, one or two connecting parts 22 are provided.

[0052] Preferably, two connecting parts 22 are provided and are symmetrically arranged along the center line of the fine positioning member 2 to ensure balance when the elastic tensioning member 3 pulls the fine positioning member 2 .

[0053] The working process of the utility model product is as follows:

[0054] Step 1, sleeve the upper rotating frame 13 and the lower rotating frame 14 on the rotating shaft 12, and one of them is fixed relative to the rotating shaft 12; arrange the micro-positioning member 2 along the circumference of the lower rotating frame 14, adjust the relative position of the upper rotating frame 13 and the lower rotating frame 14, so that the first positioning portion 11 is located on the side of the second positioning portion 21 along the axial direction of the rotating bracket 1; wrap the elastic tensioning member 3 around the crossbeam of the upper rotating frame 13, and the two ends are respectively connected to the two adjacent micro-positioning members 2.

[0055] Step 2: fix one end of the workpiece in the through hole of the first positioning portion 11 or the second positioning portion 21 , and limit the other end of the workpiece in the groove of the first positioning portion 11 or the second positioning portion 21 .

[0056] Step 3: Release the fixation between the limit pin 42 and the long guide hole 41 , and the elastic tensioning member 3 pulls the fine positioning member 2 to move axially along the rotating bracket 1 until the first positioning portion 11 and the second positioning portion 21 clamp the workpiece.

[0057] Step 4: Lock the position of the limit pin 42 and the guide slot 41 to fix the workpiece.

[0058] The above working process is a specific development based on the example that the first positioning portion 11 is arranged on the upper rotating frame 13 and is a through hole, the micro-positioning member 2 is arranged on the lower rotating frame 14, and the second positioning portion 21 is a groove; the working process of exchanging the position and structure between the first positioning portion 11 and the second positioning portion 21, and setting the first positioning portion 11 on the lower rotating frame 14, or setting the first positioning portion 11 as a groove is the same as the above steps one to four.

[0059] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the technical principle of the present invention. These improvements and modifications should also be regarded as the protection scope of the present invention.

Claims

1. A PVD vacuum coating workpiece rack, characterized in that: The invention comprises a rotating bracket (1), a micro-motion positioning member (2) and an elastic tension member (3); the micro-motion positioning member (2) and a first positioning portion (11) are arranged on the side of the rotating bracket (1); the micro-motion positioning member (2) is arranged on the second positioning portion (21); the first positioning portion (11) and the second positioning portion (21) both have a lateral opening (211); the first positioning portion (11) is arranged on the axial side of the rotating bracket (1) of the second positioning portion (21); the micro-motion positioning member (2) is connected to the rotating bracket (1) via a guide structure (4) and moves along the axial direction of the rotating bracket (1); and the two ends of the elastic tension member (3) are respectively connected to the micro-motion positioning member (2) and the rotating bracket (1).

2. The PVD vacuum coating workpiece stand according to claim 1, characterized in that: The rotating bracket (1) comprises a rotating shaft (12), an upper rotating frame (13) and a lower rotating frame (14), wherein the upper rotating frame (13) and the lower rotating frame (14) are sleeved on the rotating shaft (12); the first positioning portion (11) is circumferentially arranged on one of the upper rotating frame (13) and the lower rotating frame (14), and the micro-motion positioning member (2) is circumferentially arranged on the other.

3. The PVD vacuum coating workpiece rack according to claim 2, characterized in that: It also comprises a telescopic adjustment member (5), the two ends of which are respectively connected to the upper rotating frame (13) and the lower rotating frame (14) and are arranged between the upper rotating frame (13) and the lower rotating frame (14) along the axial direction of the rotating bracket (1); one of the upper rotating frame (13) and the lower rotating frame (14) is fixed relative to the rotating shaft (12), and the other moves axially along the rotating bracket (1) through the telescopic adjustment member (5).

4. The PVD vacuum coating workpiece stand according to claim 1, characterized in that: One of the first positioning portion (11) and the second positioning portion (21) is a groove, and the other is a through hole, and the notch (212) of the groove is arranged toward the through hole.

5. The PVD vacuum coating workpiece stand according to claim 1, characterized in that: The guide structure (4) comprises a guide long hole (41) and a limit pin (42) passing through the guide long hole (41); the guide long hole (41) is arranged on one of the micro-motion positioning member (2) or the rotating bracket (1); and the limit pin (42) is arranged on the other of the micro-motion positioning member (2) or the rotating bracket (1).

6. The PVD vacuum coating workpiece stand according to claim 1, characterized in that: The elastic tensioning member (3) is a tension spring.

7. The PVD vacuum coating workpiece rack according to claim 2, characterized in that: The elastic tensioning member (3) is wound around the upper rotating frame (13); one end of the elastic tensioning member (3) is connected to one of the micro-motion positioning members (2), and the other end is connected to another of the micro-motion positioning members (2).

8. The PVD vacuum coating workpiece stand according to claim 5, characterized in that: The micro-motion positioning member (2) is provided with a connecting portion (22), and the connecting portion (22) is arranged above the long guide hole (41) along the axial direction of the rotating bracket (1).

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