Outer guide cylinder of Czochralski single crystal furnace

Abstract

The utility model discloses an outer guide cylinder of a czochralski single crystal furnace, which comprises a guide cylinder body, a guide cylinder flange and a guide cylinder ring felt are sequentially mounted and connected at the top of the guide cylinder, and the outer guide cylinder is characterized in that the guide cylinder body comprises an inner guide cylinder and an outer guide cylinder which are of an integral structure; a gap exists between the inner guide cylinder and the outer guide cylinder, a heat insulation medium is placed in the gap, a cover ring is arranged above the gap and arranged between the top of the inner guide cylinder and the top of the outer guide cylinder, a replacement ring is arranged at an opening in the lower end of the outer guide cylinder, and the upper end of the replacement ring is tightly attached to the lower end of the side face of the inner wall of the inner guide cylinder. According to the utility model, the replacement rings and the support rings are additionally arranged, so that only the replacement ring of the flow guide cylinder at the lowest end needs to be replaced after the service life of the flow guide cylinder is due or the flow guide cylinder is damaged, and the flow guide cylinder does not need to be completely replaced, so that the aim of reducing the cost of a thermal field is fulfilled, and the installation is simple and convenient.

Description

Technical Field

[0001] The utility model belongs to the technical field of guide tubes, and particularly relates to an external guide tube of a CZ single crystal furnace. Background Art

[0002] As a new type of green renewable energy, solar energy is the most ideal renewable energy with the largest utilization compared to other energy sources. Especially since this year, with the continuous progress of science and technology, solar energy and its related industries have become one of the fastest growing industries in the world. With the development of the industry, the high thermal field cost has become an important factor hindering its development.

[0003] When the guide tube is in use, it is often affected by the following situations, which may lead to the need to replace the guide tube: the guide tube is polished according to the situation; the silicon material falls when the guide tube is in use, causing the silicon material liquid to splash; or when other sizes of crystal rods need to be pulled, which will lead to an increase in the thermal field cost. For this reason, a guide tube outside the direct pulling single crystal furnace is proposed. Utility Model Content

[0004] The purpose of the utility model is to overcome the problem in the prior art that the guide tube needs to be frequently replaced, and to provide an optimized guide tube structure, in which the lower mouth of the traditional guide tube is divided into two parts, and the lowermost end is detachable. After the service life of the guide tube expires or is damaged, only the replacement ring at the lower end needs to be replaced, and there is no need to completely replace the guide tube, thereby achieving the purpose of reducing the thermal field cost of the guide tube outside the direct-pull single crystal furnace.

[0005] In order to achieve the above-mentioned purpose, the utility model provides an external guide tube of a CZ single crystal furnace, comprising a guide tube body, wherein a guide tube flange and a guide tube ring felt are sequentially installed and connected on the top of the guide tube, and is characterized in that the guide tube body comprises an inner guide tube and an outer guide tube, the inner guide tube and the outer guide tube are an integrated structure, there is a gap between the inner guide tube and the outer guide tube, a heat insulating medium is placed between the gap, a cover ring is provided above the gap, the cover ring is arranged between the inner guide tube and the top of the outer guide tube, a replacement ring is provided at the opening of the lower end of the outer guide tube, the upper end of the replacement ring is tightly arranged with the lower end of the inner wall side of the inner guide tube, and a support ring is provided on the top of the replacement ring.

[0006] Preferably, the thermal insulation medium is specifically granular aerogel particles.

[0007] Preferably, an outwardly extending ring structure is provided at the upper end of the outer side surface of the outer guide tube, an upper fixing hole is penetrated through the top of the ring structure, a lower fixing hole is penetrated through the bottom of the ring structure, and the upper fixing hole and the lower fixing hole are arranged in one-to-one correspondence.

[0008] Preferably, the diameter of the lower fixing hole is larger than the diameter of the upper fixing hole.

[0009] Preferably, the upper end of the replacement ring is located on the inner wall of the lower end of the outer guide tube, the other end of the replacement ring extends to the lower end opening of the outer guide tube, the bottom surface of the other end of the replacement ring and the lower end surface of the outer guide tube form parallel surfaces that are connected to each other, the upper end of the support ring is arranged at the extension of the upper end of the replacement ring, the upper end of the support ring is an L-shaped structure, the lower end of the support ring is arranged at the top of the lower end of the replacement ring, the replacement ring and the support ring have the same inner diameter, and the guide tube flange and the guide tube ring felt are respectively provided with through hole structures that are arranged one by one with the upper fixing holes.

[0010] Preferably, an inner fixing ring is provided at the upper end of the inner wall of the outer guide tube, the cover ring is provided on the inner fixing ring, the outer side of the cover ring is embedded in the inner wall of the outer guide tube, a plurality of first through holes are provided on the top of the cover ring, a plurality of second through holes are provided on the inner fixing ring, and the second through holes and the first through holes are arranged one by one.

[0011] Preferably, the first through hole and the second through hole are fixed by bolt connection.

[0012] The beneficial effects of the utility model are:

[0013] The utility model adds a replacement ring and a support ring, and when the guide tube expires or is damaged, only the lowermost guide tube replacement ring needs to be replaced, and there is no need to completely replace the guide tube, thereby achieving the purpose of reducing the thermal field cost and simple and convenient installation. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the overall structure of the external guide tube of the CZ single crystal furnace of the utility model.

[0015] Figure 2 It is an internal cross-sectional view of the external guide tube of the CZ single crystal furnace of the utility model.

[0016] Figure 3 yes Figure 2 A partial enlarged view of point A in the middle.

[0017] Figure 4 yes Figure 2 A partial enlarged view of point B in the middle.

[0018] In the figure: 1. guide tube body; 2. inner guide tube; 3. outer guide tube; 4. cover ring; 5. replacement ring; 6. support ring; 7. upper fixing hole; 8. lower fixing hole; 9. inner fixing ring; 10. first through hole; 11. second through hole. DETAILED DESCRIPTION

[0019] The following is combined with Figure 1-4, clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of them. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0020] In the description of the present invention, it should be understood that the terms "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" etc. indicating orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings and are only for the convenience of describing the present invention, and do not indicate or imply that the device or element referred to must have a specific orientation, specific orientation structure and operation, and therefore should not be understood as a limitation on the present invention.

[0021] The present embodiment provides an external guide tube for a CZ single crystal furnace, comprising a guide tube body, a guide tube flange (not shown in the figure) and a guide tube ring felt (not shown in the figure) being sequentially installed and connected on the top of the guide tube, and characterized in that the guide tube body comprises an inner guide tube and an outer guide tube, the inner guide tube and the outer guide tube are an integrated structure, a gap is provided between the inner guide tube and the outer guide tube, a heat insulating medium is placed between the gap, a cover ring is provided above the gap, the cover ring is provided between the inner guide tube and the top of the outer guide tube, a replacement ring is provided at the opening at the lower end of the outer guide tube, the upper end of the replacement ring is tightly arranged with the lower end of the inner wall side surface of the inner guide tube, a support ring is provided at the top of the replacement ring, through the arrangement of the replacement ring and the support ring, after the service life of the guide tube body expires or is damaged, only the lowermost replacement ring needs to be replaced, and there is no need to completely replace the guide tube body, thereby reducing the thermal field cost.

[0022] In one embodiment, the heat insulating medium is specifically granular aerogel particles, which have better thermal insulation performance, better improve the thermal insulation of the guide tube, and are more conducive to the stability of crystal pulling.

[0023] In one embodiment, specifically, a ring structure extending outward is provided at the upper end of the outer side surface of the outer guide tube, an upper fixing hole is penetrated through the top of the ring structure, a lower fixing hole is penetrated through the bottom of the ring structure, the upper fixing hole and the lower fixing hole are arranged one by one, and the diameter of the lower fixing hole is larger than the diameter of the upper fixing hole.

[0024] In one embodiment, specifically, the upper end of the replacement ring is located on the inner wall of the lower end of the outer guide tube, the other end of the replacement ring extends to the lower end opening of the outer guide tube, the bottom surface of the other end of the replacement ring and the lower end surface of the outer guide tube form parallel surfaces that are connected to each other, the upper end of the support ring is arranged at the extension of the upper end of the replacement ring, the upper end of the support ring is an L-shaped structure, the lower end of the support ring is arranged at the top of the lower end of the replacement ring, the replacement ring and the support ring have the same inner diameter, and the guide tube flange and the guide tube ring felt are respectively provided with through hole structures that are arranged one by one with the upper fixing holes.

[0025] In one embodiment, specifically, an inner fixing ring is provided at the upper end of the inner wall of the outer guide tube, and a cover ring is provided on the inner fixing ring. The outer side of the cover ring is embedded in the inner wall of the outer guide tube, which is convenient for quick positioning and placement of the cover ring, so that the first through hole and the second through hole can be quickly aligned, which is convenient for installation. A plurality of first through holes are provided on the top of the cover ring, and a plurality of second through holes are provided on the inner fixing ring. The second through holes and the first through holes are arranged one by one, and the first through holes and the second through holes are fixed by bolts. The setting of the cover ring facilitates the replacement of the heat insulation medium.

[0026] The above contents are merely examples and explanations of the structure of the utility model. The technicians in this technical field may make various modifications or additions to the specific embodiments described or replace them in a similar manner. As long as they do not deviate from the structure of the utility model or exceed the scope defined in the claims, they should all fall within the protection scope of the utility model.

Claims

1. A guide tube outside a CZ single crystal furnace, comprising a guide tube body, a guide tube flange and a guide tube ring felt are sequentially installed and connected on the top of the guide tube, characterized in that: The guide tube body includes an inner guide tube and an outer guide tube, the inner guide tube and the outer guide tube are an integrated structure, there is a gap between the inner guide tube and the outer guide tube, a heat insulating medium is placed between the gap, a cover ring is provided above the gap, the cover ring is arranged between the top of the inner guide tube and the outer guide tube, a replacement ring is provided at the opening of the lower end of the outer guide tube, the upper end of the replacement ring is tightly arranged with the lower end of the inner wall side of the inner guide tube, and a support ring is provided on the top of the replacement ring.

2. The guide tube outside the CZ single crystal furnace according to claim 1, characterized in that: The thermal insulation medium is specifically granular aerogel particles.

3. The guide tube outside the CZ single crystal furnace according to claim 1, characterized in that: An outwardly extending ring structure is provided at the upper end of the outer side surface of the outer guide tube, an upper fixing hole is penetrated through the top of the ring structure, and a lower fixing hole is penetrated through the bottom of the ring structure, and the upper fixing hole and the lower fixing hole are arranged in one-to-one correspondence.

4. The guide tube outside the CZ single crystal furnace according to claim 3, characterized in that: The diameter of the lower fixing hole is greater than the diameter of the upper fixing hole.

5. The guide tube outside the CZ single crystal furnace according to claim 1, characterized in that: The upper end of the replacement ring is located on the inner wall of the lower end of the outer guide tube, and the other end of the replacement ring extends to the lower end opening of the outer guide tube. The bottom surface of the other end of the replacement ring and the lower end surface of the outer guide tube form parallel surfaces that are connected to each other. The upper end of the support ring is arranged at the extension of the upper end of the replacement ring. The upper end of the support ring is an L-shaped structure. The lower end of the support ring is arranged at the top of the lower end of the replacement ring. The replacement ring and the support ring have the same inner diameter. The guide tube flange and the guide tube ring felt are respectively provided with through-hole structures that are arranged one by one with the upper fixing holes.

6. The outer guide tube of the CZ single crystal furnace according to claim 1, characterized in that: An inner fixing ring is provided at the upper end of the inner wall of the outer guide tube, the cover ring is provided on the inner fixing ring, the outer side of the cover ring is embedded in the inner wall of the outer guide tube, a plurality of first through holes are provided on the top of the cover ring, a plurality of second through holes are provided on the inner fixing ring, and the second through holes are arranged one by one in alignment with the first through holes.

7. The guide tube outside the CZ single crystal furnace according to claim 6, characterized in that: The first through hole and the second through hole are fixed by bolt connection.

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