Single crystal furnace with double-layer insulation barrel structure

Abstract

The utility model relates to the technical field of single crystal furnaces, in particular to a single crystal furnace with a double-layer heat preservation barrel structure, which comprises a working assembly, the working assembly comprises a furnace body, a furnace cover is arranged on the upper surface of the furnace body, a lower heat preservation barrel is arranged on the inner bottom wall of the furnace body, and the lower heat preservation barrel comprises an inner heat preservation barrel and an outer heat preservation barrel. A gas channel is formed between the inner-layer heat preservation barrel and the outer-layer heat preservation barrel, and door openings are evenly formed in the bottom of the inner side wall of the inner-layer heat preservation barrel. The lower heat preservation barrel is arranged to be of a double-layer structure, after argon is introduced, argon in the furnace body flows along the guide cylinder and the gas channel and finally flows out along the exhaust pipe, high-heat argon can serve as heat preservation gas when passing through the gas channel, the heat preservation performance is improved, power consumption is reduced, and the service life of the furnace body is prolonged. And volatile matters, oxides and other impurities carried by the argon are discharged along with the argon, so that the corrosion of the oxides to the heater is reduced, the service life of the heater is prolonged, and convenience is brought to the use of the single crystal furnace.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnaces, in particular to a single crystal furnace with a double-layer insulation barrel structure. Background Art

[0002] A single crystal furnace is a device that uses a graphite heater to melt polycrystalline materials such as polysilicon in an inert gas environment and grows single crystals without dislocation using the Czochralski method. Argon is a chemically stable inert gas. The chemical properties of argon are very stable. It does not react, does not support combustion, and has no special reaction with other elements and compounds. In the operation of a single crystal furnace, argon is usually used as an inert protective gas, cleaning gas, and atmosphere gas.

[0003] The Czochralski method is a common method for growing single crystals in single crystal furnaces. Its working principle is to heat and melt the raw materials that constitute the crystal in a crucible, connect a seed crystal to the surface of the melt and pull the melt. Under controlled conditions, the seed crystal and the melt are constantly rearranged in atoms or molecules at the interface, and gradually solidify as the temperature drops to grow a single crystal. The heater is a device that provides heat. The service life of the heater directly affects the crystal pulling efficiency and cost. Through actual production experience, it is found that heater damage is mostly concentrated at the joint between the heater heating area and the main heater foot plate. The cause is found to be the traditional insulation barrel is a single-layer insulation barrel. The oxides and volatiles carried by argon will be adsorbed on the main heater when passing through the main heater, causing corrosion to the main heater. It is very common for oxides to cause cracks by corroding the gap in the main screw, which greatly reduces the service life of the heater. Therefore, how to reduce heater corrosion and thus improve the heater life is one of the problems that need to be solved in the use of single crystal furnaces. To this end, a double-layer insulation barrel structure single crystal furnace is proposed. Utility Model Content

[0004] The utility model aims to provide a single crystal furnace with a double-layer heat preservation barrel structure to solve the problems raised in the above-mentioned background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a double-layer insulation barrel structure single crystal furnace, comprising a working component, the working component comprising a furnace body, a furnace cover is provided on the upper surface of the furnace body, a lower insulation barrel is provided on the inner bottom wall of the furnace body, the lower insulation barrel comprises an inner insulation barrel and an outer insulation barrel, a gas channel is formed between the inner insulation barrel and the outer insulation barrel, door holes are evenly opened at the bottom of the inner side wall of the inner insulation barrel, an upper insulation barrel is provided on the upper surface of the outer insulation barrel, a support rod is installed in the middle of the lower surface of the furnace body, the top end of the support rod extends into the interior of the furnace body and is connected to a base, a crucible is provided on the upper surface of the base, a guide tube is provided above the crucible, a heater is installed on the inner bottom wall of the furnace body, and an exhaust pipe is connected to the left side of the lower surface of the furnace body.

[0006] As a further preferred embodiment of the present technical solution: a tray is installed on the top of the outer side wall of the guide tube.

[0007] As a further preferred embodiment of the present technical solution: a support plate is fixedly provided on the top of the inner wall of the upper heat-insulating barrel, and the inner diameter of the support plate is larger than the outer diameter of the tray.

[0008] As a further preferred embodiment of the present technical solution: a sealing cap is threadedly connected to the top of the outer side wall of the exhaust pipe.

[0009] As a further preferred embodiment of the present technical solution: a handle is installed on the lower surface of the sealing cap.

[0010] As a further preferred embodiment of the present technical solution: the outer side walls of the outer insulation barrel and the upper insulation barrel are both provided with insulation felt.

[0011] As a further preferred embodiment of the present technical solution: legs are evenly installed on the lower surface of the furnace body.

[0012] Compared with the prior art, the beneficial effects of the utility model are:

[0013] The utility model arranges the lower heat-insulating barrel into a double-layer structure. After the argon gas is introduced, the argon gas in the furnace body will flow along the guide tube and the gas channel and finally flow out along the exhaust pipe. When passing through the gas channel, the high-calorie argon gas can be used as a heat-insulating gas, thereby improving the heat-insulating performance and reducing power consumption. Impurities such as volatile substances and oxides carried by the argon gas are discharged along with the argon gas, thereby reducing the corrosion of the oxide to the heater, thereby increasing the service life of the heater and bringing convenience to the use of the single crystal furnace. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a cross-sectional structural schematic diagram of the utility model;

[0015] Figure 2 It is a cross-sectional structural schematic diagram of the middle and lower insulation barrel of the utility model;

[0016] Figure 3 It is a cross-sectional structural schematic diagram of some working components in the utility model;

[0017] Figure 4 It is a cross-sectional structural schematic diagram of the guide tube in the utility model;

[0018] Figure 5 It is a schematic diagram of the structure of the utility model when viewed from above.

[0019] In the figure: 10, working assembly; 11, furnace body; 12, lower insulation barrel; 121, inner insulation barrel; 122, outer insulation barrel; 123, gas channel; 124, door opening; 13, upper insulation barrel; 14, support rod; 15, base; 16, crucible; 17, heater; 18, furnace cover; 19, exhaust pipe; 110, guide tube; 111, tray; 112, support plate; 113, sealing cap; 114, handle; 115, insulation felt; 116, support leg. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Examples of the embodiments are shown in the drawings, where the same or similar reference numerals throughout represent the same or similar elements or elements with the same or similar functions. The embodiments described below with reference to the drawings are exemplary and are only used to explain the present application, and cannot be understood as limitations on the present application. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model.

[0021] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", and "set" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0022] See also Figure 1-5The utility model provides a technical solution: a double-layer insulation barrel structure single crystal furnace, including a working component 10, the working component 10 includes a furnace body 11, the upper surface of the furnace body 11 is provided with a furnace cover 18, the inner bottom wall of the furnace body 11 is provided with a lower insulation barrel 12, the lower insulation barrel 12 includes an inner insulation barrel 121 and an outer insulation barrel 122, a gas channel 123 is formed between the inner insulation barrel 121 and the outer insulation barrel 122, the inner side wall bottom of the inner insulation barrel 121 is evenly provided with door holes 124, the upper surface of the outer insulation barrel 122 is provided with an upper insulation barrel 13, a support rod 14 is installed in the middle of the lower surface of the furnace body 11, the top end of the support rod 14 extends into the furnace body 11 and is connected to a base 15, the base 15 A crucible 16 is provided on the upper surface, a guide tube 110 is provided above the crucible 16, a heater 17 is installed on the inner bottom wall of the furnace body 11, and an exhaust pipe 19 is connected to the left side of the lower surface of the furnace body 11; by setting the lower insulation barrel 12 to a double-layer structure, after the argon gas is introduced, the argon gas in the furnace body 11 will flow along the guide tube 110 and the gas channel 123, and finally flow out along the exhaust pipe 19. When passing through the gas channel 123, the high-calorie argon gas can be used as an insulation gas, thereby improving the insulation performance and reducing power consumption, and impurities such as volatiles and oxides carried by the argon gas are discharged along with the argon gas, reducing the corrosion of the oxide to the heater 17, thereby improving the service life of the heater 17 and bringing convenience to the use of the single crystal furnace.

[0023] In this embodiment, specifically: a tray 111 is installed on the top of the outer wall of the guide tube 110 , so that the tray 111 and the guide tube 110 can move synchronously.

[0024] In this embodiment, specifically: a support plate 112 is fixedly provided on the top of the inner wall of the upper insulation barrel 13, and the inner diameter of the support plate 112 is larger than the outer diameter of the tray 111; the support plate 112 can support the tray 111, thereby providing support for the tray 111 and the guide tube 110.

[0025] In this embodiment, specifically: a sealing cap 113 is threadedly connected to the top of the outer wall of the exhaust pipe 19; when the single crystal furnace is not in use, the sealing cap 113 is tightened to seal the bottom end of the exhaust pipe 19, which can prevent external dust from entering the furnace body 11 along the exhaust pipe 19, thereby achieving a good dust-proof effect.

[0026] In this embodiment, specifically: a handle 114 is installed on the lower surface of the sealing cap 113 to facilitate the rotation of the sealing cap 113 .

[0027] In this embodiment, specifically: the outer side walls of the outer insulation barrel 122 and the upper insulation barrel 13 are both provided with insulation felt 115; the provision of the insulation felt 115 can enhance the insulation effect of the lower insulation barrel 12 and the upper insulation barrel 13.

[0028] In this embodiment, specifically: legs 116 are evenly installed on the lower surface of the furnace body 11 to facilitate supporting the furnace body 11 .

[0029] The working principle of the utility model is: by setting the lower insulation barrel 12 into a double-layer structure, after the argon gas is introduced, the argon gas in the furnace body 11 will flow along the guide tube 110 and the gas channel 123, and finally flow out along the exhaust pipe 19. When passing through the gas channel 123, the high-calorie argon gas can be used as an insulation gas to improve the insulation performance and reduce power consumption. The volatile substances and oxides and other impurities carried by the argon gas are discharged along with the argon gas, which reduces the corrosion of the oxide to the heater 17, thereby increasing the service life of the heater 17 and bringing convenience to the use of the single crystal furnace.

[0030] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A double-layer insulation barrel structure single crystal furnace, comprising a working component (10), characterized in that: The working assembly (10) comprises a furnace body (11), the upper surface of the furnace body (11) is provided with a furnace cover (18), the inner bottom wall of the furnace body (11) is provided with a lower insulation barrel (12), the lower insulation barrel (12) comprises an inner insulation barrel (121) and an outer insulation barrel (122), a gas channel (123) is formed between the inner insulation barrel (121) and the outer insulation barrel (122), door openings (124) are uniformly opened at the bottom of the inner side wall of the inner insulation barrel (121), and the outer insulation barrel (122) is provided with a gas channel (123). An upper insulation barrel (13) is provided on the upper surface of the insulation barrel (122); a support rod (14) is installed in the middle of the lower surface of the furnace body (11); the top end of the support rod (14) extends into the interior of the furnace body (11) and is connected to a base (15); a crucible (16) is provided on the upper surface of the base (15); a guide tube (110) is provided above the crucible (16); a heater (17) is installed on the inner bottom wall of the furnace body (11); and an exhaust pipe (19) is connected to the left side of the lower surface of the furnace body (11).

2. The double-layer insulation barrel structure single crystal furnace according to claim 1 is characterized in that: A tray (111) is installed on the top of the outer wall of the guide tube (110).

3. The double-layer insulation barrel structure single crystal furnace according to claim 2 is characterized in that: A support plate (112) is fixedly provided on the top of the inner wall of the upper heat-insulating barrel (13); the inner diameter of the support plate (112) is greater than the outer diameter of the tray (111).

4. The double-layer insulation barrel structure single crystal furnace according to claim 1 is characterized in that: A sealing cap (113) is threadedly connected to the top of the outer wall of the exhaust pipe (19).

5. The double-layer insulation barrel structure single crystal furnace according to claim 4 is characterized in that: A handle (114) is installed on the lower surface of the sealing cap (113).

6. The double-layer insulation barrel structure single crystal furnace according to claim 1 is characterized in that: The outer side walls of the outer heat-insulating barrel (122) and the upper heat-insulating barrel (13) are both provided with heat-insulating felt (115).

7. The double-layer insulation barrel structure single crystal furnace according to claim 1 is characterized in that: Support legs (116) are evenly mounted on the lower surface of the furnace body (11).

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