Ultrahigh vacuum automatic exhaust table with inflation function

Abstract

The utility model discloses an ultrahigh vacuum automatic exhaust table with an inflation function, which belongs to the technical field of vacuum exhaust devices and comprises a worktable, a working box and an inflation storage box are fixedly mounted at the top of the worktable, two baffles are fixedly mounted at the bottom of the worktable, a motor is fixedly mounted in the right baffle, and a motor is fixedly mounted in the right baffle. A rotating shaft is fixedly mounted at the output end of the motor, a first bevel gear is fixedly mounted on the outer side of the rotating shaft, a second bevel gear is meshed with the outer side of the first bevel gear, and a threaded rod is fixedly mounted in the second bevel gear. Through mutual cooperation of a motor, a rotating shaft, a bevel gear I, a bevel gear II, a threaded rod, a baffle plate, an H-shaped moving plate, a fixed plate, a supporting bottom plate and a pulley, the whole device is more convenient to move; and meanwhile, through mutual cooperation of a second gas outlet pipeline, a fixing ring, an inserting rod, a reset spring and a pulling plate, impurities of the inflated gas can be filtered and cleaned.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum exhaust devices, in particular to an ultra-high vacuum automatic exhaust table with an inflation function. Background Art

[0002] The development of modern science and technology has placed higher and higher demands on vacuum technology. Many devices need to form ultra-high vacuum conditions inside them and then fill them with trace gases at a constant pressure. The manufacturing process of the laser gyroscope is a typical example. The process of obtaining ultra-high vacuum takes a long time (sometimes several days). To meet the increasing demand for ultra-high vacuum devices, the number of ultra-high vacuum exhaust stations must be increased. In order to reduce human errors and reduce labor costs, ultra-high vacuum automatic exhaust stations with inflation functions are needed.

[0003] The patent document with announcement number CN 209943053 U discloses an ultra-high vacuum automatic exhaust table with an inflation function, including a frame, on the inner side of which are respectively provided with a detection component, an inflation and exhaust component and a vacuum component, the inflation component and the vacuum component are both connected to the detection component through connecting pipes, the detection component includes a detection table, and a plurality of workstation stop valves are provided on the side of the detection table, and the inflation and exhaust component includes a stainless steel pipe for inflation, a pneumatic stop valve for inflation and a pneumatic stop valve for exhaust.

[0004] In the above technical solution, when the entire device needs to be moved, it is inconvenient to move the entire device, and it is inconvenient to filter impurities in the inflation gas, and the applicability is not wide; therefore, we propose an ultra-high vacuum automatic exhaust table with inflation function to solve this problem. Utility Model Content

[0005] The purpose of the utility model is to provide an ultra-high vacuum automatic exhaust table with an inflation function to solve the problems raised in the above background technology.

[0006] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0007] An ultra-high vacuum automatic exhaust table with an inflation function comprises: a workbench, a work box and an inflation storage box are fixedly installed on the top of the workbench, two baffles are fixedly installed on the bottom of the workbench, a motor is fixedly installed inside the baffle on the right side, a rotating shaft is fixedly installed on the output end of the motor, a bevel gear 1 is fixedly installed on the outside of the rotating shaft, a bevel gear 2 is meshed on the outside of the bevel gear 1, a threaded rod is fixedly installed inside the bevel gear 2, an H-shaped moving plate is threadedly connected to the outside of the threaded rod, two fixed plates are fixedly installed on the bottom of the H-shaped moving plate, the same supporting base plate is fixedly installed on the bottom of the fixed plate, and a plurality of pulleys are rotatably connected to the bottom of the supporting base plate.

[0008] Preferably, support base one and support base two are fixedly installed on the top of the workbench, an air pump is fixedly installed on the top of support base two, the air inlet of the air pump is connected to the second air extraction pipe, the air outlet of the air pump is connected to the second air outlet pipe, a first stop valve is arranged on the outside of the second air outlet pipe, a vacuum pump is fixedly installed on the top of support base one, the air inlet of the vacuum pump is connected to the first air extraction pipe, a second stop valve is arranged on the outside of the first air extraction pipe, and the air outlet of the vacuum pump is connected to the first air outlet pipe.

[0009] Preferably, a filter is movably inserted inside the inflatable storage box, a handle is fixedly installed on the front side of the filter, two plug rods are movably inserted inside the filter, the outer sides of the plug rods are slidably connected to the inside of the inflatable storage box, a fixing ring is fixedly installed on one side of the two plug rods, a pull plate is fixedly installed between the two fixing rings, a return spring is fixedly installed on the inner side of the fixing ring, and one side of the return spring is fixedly installed on one side of the inflatable storage box.

[0010] Preferably, the outer side of the rotating shaft is rotatably connected to an arc-shaped support plate, the top of the arc-shaped support plate is fixedly installed on the bottom of the workbench, the outer side of the threaded rod is rotatably connected to an L-shaped support plate, the top of the L-shaped support plate is fixedly installed on the bottom of the workbench, and the outer side of the H-shaped movable plate is slidably connected to the inside of the baffle.

[0011] Preferably, the second air extraction pipe is connected to the interior of the air storage box, the second air outlet pipe is connected to the interior of the working box, and the first air extraction pipe is connected to the interior of the working box.

[0012] Preferably, an air injection pipeline is provided on the top of the inflatable storage box, a plug is movably inserted inside the air injection pipeline, and support columns are fixedly installed on the front, back, left and right sides of the bottom of the workbench.

[0013] In the utility model, the ultra-high vacuum automatic exhaust table with an inflation function is described, by opening the second stop valve, further starting the vacuum pump so that the gas inside the working box is evacuated, and when the gas inside the working box is completely evacuated, the second stop valve is closed, and then the first stop valve is opened, and then the inflation pump is started, so that the gas inside the inflation storage box is pumped into the working box, and then the first stop valve is closed;

[0014] In the utility model, the ultra-high vacuum automatic exhaust table with an inflation function starts the motor, thereby driving the rotating shaft to start rotating, further driving the bevel gear one to rotate, thereby driving the bevel gear two meshing therewith to start moving, thereby driving the threaded rod to start rotating, thereby driving the H-shaped moving plate to start moving, further driving the supporting bottom plate to start moving downward, thereby driving the pulley to start moving, so as to facilitate the movement of the entire device through the pulley;

[0015] The utility model has a reasonable structural design. The cooperation among the motor, the rotating shaft, the first bevel gear, the second bevel gear, the threaded rod, the baffle, the H-shaped movable plate, the fixed plate, the supporting bottom plate and the pulley makes the whole device more convenient to move. At the same time, the cooperation among the second air outlet pipe, the fixed ring, the plug rod, the reset spring and the pull plate makes it possible to filter and clean the impurities in the inflation gas. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a three-dimensional structural schematic diagram of an ultra-high vacuum automatic exhaust table with an inflation function proposed by the utility model;

[0017] Figure 2 This is a schematic cross-sectional view of an ultra-high vacuum automatic exhaust table with an inflation function proposed by the utility model;

[0018] Figure 3 This is a schematic diagram of the structure of the reset spring, the insertion rod and the fixing ring proposed by the utility model;

[0019] Figure 4 for Figure 3 A partial enlarged view of part A.

[0020] In the figure: 1. workbench; 2. work box; 3. vacuum pump; 4. support seat 1; 5. inflation pump; 6. support seat 2; 7. inflation storage box; 8. support column; 9. support bottom plate; 10. pulley; 11. baffle; 12. motor; 13. rotating shaft; 14. arc support plate; 15. bevel gear 1; 16. bevel gear 2; 17. threaded rod; 18. L-shaped support plate; 19. H-shaped moving plate; 20. fixed plate; 21. first stop valve; 22. second stop valve; 23. first exhaust pipe; 24. first outlet pipe; 25. second exhaust pipe; 26. second outlet pipe; 27. handle; 28. air injection pipe; 29. ​​plug; 30. pull plate; 31. fixing ring; 32. plug rod; 33. reset spring; 34. filter screen. DETAILED DESCRIPTION

[0021] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0022] Reference Figure 1-4, an ultra-high vacuum automatic exhaust table with inflation function, comprising: a workbench 1, a work box 2 and an inflation storage box 7 are fixedly installed on the top of the workbench 1, two baffles 11 are fixedly installed on the bottom of the workbench 1, a motor 12 is fixedly installed inside the right baffle 11, a rotating shaft 13 is fixedly installed on the output end of the motor 12, a bevel gear 15 is fixedly installed on the outside of the rotating shaft 13, a bevel gear 16 is meshed on the outside of the bevel gear 15, a threaded rod 17 is fixedly installed inside the bevel gear 16, an H-shaped moving plate 19 is threadedly connected on the outside of the threaded rod 17, two fixed plates 20 are fixedly installed on the bottom of the H-shaped moving plate 19, the same supporting base plate 9 is fixedly installed on the bottom of the fixed plate 20, and a plurality of pulleys 10 are rotatably connected to the bottom of the supporting base plate 9.

[0023] In this embodiment, a support base 1 4 and a support base 2 6 are fixedly installed on the top of the workbench 1, an air pump 5 is fixedly installed on the top of the support base 2 6, the air inlet of the air pump 5 is connected to the second air extraction pipe 25, the air outlet of the air pump 5 is connected to the second air outlet pipe 26, and a first stop valve 21 is arranged on the outside of the second air outlet pipe 26, a vacuum pump 3 is fixedly installed on the top of the support base 1 4, the air inlet of the vacuum pump 3 is connected to the first air extraction pipe 23, the outside of the first air extraction pipe 23 is arranged with a second stop valve 22, and the air outlet of the vacuum pump 3 is connected to the first air outlet pipe 24, so as to facilitate the inflation and exhaust of the inside of the working box 2.

[0024] In this embodiment, a filter screen 34 is movably inserted inside the inflatable storage box 7, a handle 27 is fixedly installed on the front side of the filter screen 34, two plug rods 32 are movably inserted inside the filter screen 34, the outer sides of the plug rods 32 are slidably connected to the inside of the inflatable storage box 7, a fixing ring 31 is fixedly installed on one side of the two plug rods 32, a pull plate 30 is fixedly installed between the two fixing rings 31, a reset spring 33 is fixedly installed on the inner side of the fixing ring 31, and one side of the reset spring 33 is fixedly installed on one side of the inflatable storage box 7, so as to facilitate the disassembly of the filter screen 34.

[0025] In this embodiment, the outer side of the rotating shaft 13 is rotatably connected to an arc-shaped support plate 14, and the top of the arc-shaped support plate 14 is fixedly installed at the bottom of the workbench 1. The outer side of the threaded rod 17 is rotatably connected to an L-shaped support plate 18, and the top of the L-shaped support plate 18 is fixedly installed at the bottom of the workbench 1. The outer side of the H-shaped movable plate 19 is slidably connected to the inside of the baffle 11 to facilitate the movement of the H-shaped movable plate 19.

[0026] In this embodiment, the second air extraction pipe 25 is connected to the interior of the air storage box 7, the second air outlet pipe 26 is connected to the interior of the working box 2, the first air extraction pipe 23 is connected to the interior of the working box 2, and an air injection pipe 28 is provided on the top of the air storage box 7. A plug 29 is movably inserted inside the air injection pipe 28. Support columns 8 are fixedly installed on the front, back, left and right sides of the bottom of the workbench 1 to facilitate supporting the workbench 1 through the support columns 8.

[0027] The working principle of the utility model is as follows: first, manually unplug the plug 29, let the gas to be inflated enter the inside of the inflatable storage box 7 through the gas injection pipe 28, then plug the plug 29, then manually open the second stop valve 22, and further start the vacuum pump 3 so that the gas inside the working box 2 is evacuated, when the gas inside the working box 2 is completely evacuated, close the second stop valve 22, then open the first stop valve 21, and then start the inflation pump 5, so as to draw the gas inside the inflatable storage box 7 into the inside of the working box 2, and then close the first stop valve 21, when it is necessary to move the entire device, start the motor 12, thereby driving the rotating shaft 13 to start rotating, and further drive The movable bevel gear 15 starts to rotate, thereby driving the meshing bevel gear 2 16 to start moving, thereby driving the threaded rod 17 to start rotating, thereby driving the H-shaped movable plate 19 to start moving, and further driving the supporting bottom plate 9 to start moving downward, thereby driving the pulley 10 to start moving, so as to facilitate the movement of the entire device through the pulley 10, and at the same time, the pull plate 30 can be manually pulled to drive the insertion rod 32 to break away from the control of the filter screen 34, and then the handle 27 can be manually pulled to make the filter screen 34 break away from the inside of the inflatable storage box 7, so as to facilitate the cleaning of the filter screen 34, and then repeat the above operation in reverse to re-fix the filter screen 34.

[0028] The above is a detailed introduction to an ultra-high vacuum automatic exhaust table with an inflation function provided by the utility model. This article uses specific embodiments to illustrate the principle and implementation method of the utility model. The description of the above embodiments is only used to help understand the method and core idea of ​​the utility model. It should be pointed out that for ordinary technicians in this technical field, without departing from the principle of the utility model, the utility model can also be improved and modified, and these improvements and modifications also fall within the scope of protection of the claims of the utility model.

Claims

1. An ultra-high vacuum automatic exhaust table with an inflation function, characterized in that: include: A workbench (1), wherein a work box (2) and an inflatable storage box (7) are fixedly installed on the top of the workbench (1), and two baffles (11) are fixedly installed on the bottom of the workbench (1), and a motor (12) is fixedly installed inside the right baffle (11), and a rotating shaft (13) is fixedly installed on the output end of the motor (12), and a bevel gear 1 (15) is fixedly installed on the outer side of the rotating shaft (13), and a bevel gear 2 (16) is meshed on the outer side of the bevel gear 1 (15), and a threaded rod (17) is fixedly installed inside the bevel gear 2 (16), and an H-shaped movable plate (19) is threadedly connected to the outer side of the threaded rod (17), and two fixed plates (20) are fixedly installed on the bottom of the H-shaped movable plate (19), and the bottom of the fixed plate (20) is fixedly installed with the same supporting base plate (9), and the bottom of the supporting base plate (9) is rotatably connected with a plurality of pulleys (10).

2. The ultra-high vacuum automatic exhaust table with an inflation function according to claim 1, characterized in that: A support base 1 (4) and a support base 2 (6) are fixedly mounted on the top of the workbench (1); an air pump (5) is fixedly mounted on the top of the support base 2 (6); an air inlet of the air pump (5) is connected to a second air extraction pipeline (25); an air outlet of the air pump (5) is connected to a second air outlet pipeline (26); a first stop valve (21) is arranged on the outside of the second air outlet pipeline (26); a vacuum pump (3) is fixedly mounted on the top of the support base 1 (4); an air inlet of the vacuum pump (3) is connected to a first air extraction pipeline (23); a second stop valve (22) is arranged on the outside of the first air extraction pipeline (23); and an air outlet of the vacuum pump (3) is connected to the first air outlet pipeline (24).

3. The ultra-high vacuum automatic exhaust table with an inflation function according to claim 1, characterized in that: A filter screen (34) is movably inserted inside the inflatable storage box (7), a handle (27) is fixedly installed on the front side of the filter screen (34), two plug rods (32) are movably inserted inside the filter screen (34), the outer sides of the plug rods (32) are slidably connected to the inside of the inflatable storage box (7), a fixing ring (31) is fixedly installed on one side of the two plug rods (32), a pull plate (30) is fixedly installed between the two fixing rings (31), a return spring (33) is fixedly installed on the inner side of the fixing ring (31), and one side of the return spring (33) is fixedly installed on one side of the inflatable storage box (7).

4. The ultra-high vacuum automatic exhaust table with an inflation function according to claim 1, characterized in that: The outer side of the rotating shaft (13) is rotatably connected to an arc-shaped support plate (14), the top of which is fixedly mounted on the bottom of the workbench (1); the outer side of the threaded rod (17) is rotatably connected to an L-shaped support plate (18), the top of which is fixedly mounted on the bottom of the workbench (1); the outer side of the H-shaped movable plate (19) is slidably connected to the inside of the baffle (11).

5. The ultra-high vacuum automatic exhaust table with an inflation function according to claim 2, characterized in that: The second air extraction pipeline (25) is connected to the interior of the gas storage box (7), the second air outlet pipeline (26) is connected to the interior of the working box (2), and the first air extraction pipeline (23) is connected to the interior of the working box (2).

6. The ultra-high vacuum automatic exhaust table with an inflation function according to claim 1, characterized in that: The top of the inflatable storage box (7) is provided with an air injection pipeline (28), a plug (29) is movably inserted inside the air injection pipeline (28), and support columns (8) are fixedly installed at the front, back, left and right sides of the bottom of the workbench (1).

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