Closed swing arm structure suitable for wafer two-fluid cleaning system

Abstract

The utility model relates to the technical field of pipelines, and discloses a closed swing arm structure suitable for a wafer two-fluid cleaning system, which comprises a penetrating pipe, a first cavity is arranged at the top of the inner side of the penetrating pipe, a second cavity is arranged at the bottom of the inner side of the penetrating pipe, a first liquid medicine shunting hole is arranged at the right end of the inner side of the penetrating pipe, and a second liquid medicine shunting hole is arranged at the right end of the inner side of the penetrating pipe. A second liquid medicine flow dividing hole is formed in the right end of the interior of the penetrating pipe, a sealing plate is fixedly connected to the front side of the penetrating pipe, a connecting groove is formed in the left end of the penetrating pipe, a rotating plate is rotationally connected to the interior of the connecting groove, and a fixing base is fixedly connected to the rear side of the rotating plate. According to the utility model, the cavity II at the bottom of the internal penetrating pipe is inclined for guiding flow, so that accumulated liquid dripping of liquid medicine at the head II is reduced, stable pressure and flow can be maintained in the liquid medicine conveying process, the moving range and flexibility of the penetrating pipe can be increased through the swing arm, and the conveying direction and position of the liquid medicine can be adjusted more accurately.

Description

Technical Field

[0001] The utility model relates to the technical field of pipelines, and in particular to a closed swing arm structure suitable for a wafer two-fluid cleaning system. Background Art

[0002] A pipe is a pipe with a special design and function. It usually uses unique materials and manufacturing processes to meet the needs of specific application scenarios. It uses materials that are corrosion-resistant, high-temperature resistant, or have special chemical inertness. The inside usually has a smooth surface to reduce resistance and friction during the flow of the liquid medicine, thereby ensuring smooth delivery of the liquid medicine and reducing energy loss. The internal design of the pipe will be based on different uses.

[0003] Open tubing is a form of pipe design, which is characterized by part or all of the structure of the pipe having an open or relatively large opening. Open tubing allows the mist mixture formed by water and nutrient solution to be distributed more evenly because its openness can reduce resistance and pressure and promote the natural diffusion of the solution.

[0004] The existing open-type through-pipe can provide a relatively large channel, which is suitable for the smooth flow of non-two-fluid and other mist liquids. However, due to the large inner diameter of the pipe, it will cause the two-fluid liquid to accumulate and drip at the head. Therefore, a closed swing arm structure suitable for the wafer two-fluid cleaning system is proposed to solve the above problem. Utility Model Content

[0005] In order to make up for the above deficiencies, the utility model provides a closed swing arm structure suitable for a wafer two-fluid cleaning system, aiming to improve the problem in the prior art that the inner diameter of the pipeline is large, which will cause the two-fluid liquid to accumulate and drip in the head.

[0006] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a closed swing arm structure suitable for a wafer two-fluid cleaning system, including a through tube, a cavity one is opened at the inner top of the through tube, a cavity two is opened at the inner bottom of the through tube, a liquid diversion hole one is opened at the inner right end of the through tube, a liquid diversion hole two is opened at the inner right end of the through tube, a sealing plate is fixedly connected to the front side of the through tube, a connecting groove is opened at the left end of the through tube, a rotating plate is rotatably connected to the inside of the connecting groove, a fixed seat is fixedly connected to the rear side of the rotating plate, and a positioning plate is fixedly connected to the front side of the fixed seat.

[0007] As a further description of the above technical solution:

[0008] The front side of the through-tube is provided with a plurality of card slots, the interiors of the plurality of card slots are slidably connected with connecting plates, the sides of the plurality of connecting plates away from each other are fixedly connected with card blocks, and the front sides of the plurality of connecting plates are fixedly connected to the rear side of the sealing plate.

[0009] As a further description of the above technical solution:

[0010] A second clamping groove is provided at the inner right end of the through-tube, and a limiting clamp is fixedly connected to the rear side of the sealing plate.

[0011] As a further description of the above technical solution:

[0012] The front side of the sealing plate is provided with a connection hole, the upper and lower sides of the penetration tube are fixedly connected with a connection block, and the front side of the sealing plate is fixedly connected with a protrusion.

[0013] As a further description of the above technical solution:

[0014] The front side of the fixing seat is provided with an adjustment groove, and the inside of the adjustment groove is rounded.

[0015] As a further description of the above technical solution:

[0016] A second connection hole is provided at the left end of the through pipe, and a plurality of first screw holes are provided at the front side of the fixing seat.

[0017] As a further description of the above technical solution:

[0018] A third connection hole is provided on the rear side of the positioning plate, and a second screw hole is provided on the front side of the fixing seat.

[0019] As a further description of the above technical solution:

[0020] Bolts are threadedly connected inside the plurality of screw holes 2, and the front ends of the bolts penetrate the inside of the screw holes 2 and are threadedly connected to the inner side of the connection hole 3.

[0021] The utility model has the following beneficial effects:

[0022] 1. In the utility model, cavity one and cavity two are respectively provided inside the tube, and cavity one and cavity two are used to buffer a certain amount of liquid medicine. Meanwhile, cavity two at the bottom of the internal tube is inclined to guide the flow, so as to reduce the accumulation and dripping of liquid medicine at the head, which is helpful to maintain a stable pressure and flow rate during the liquid medicine delivery process. The sealing plate is used to ensure that the liquid medicine inside the tube will not leak from the front end, so as to maintain the sealing of the tube.

[0023] 2. In the utility model, the rotating plate is rotatably installed through the connecting groove at the left end of the tube, so that the swing arm can increase the range of motion and flexibility of the tube, and can more accurately adjust the delivery direction and position of the liquid medicine. The fixed seat cooperates with the positioning plate to ensure that the position of the tube is stable during the transmission process without deviation or shaking, thereby ensuring the accuracy and reliability of the transmission. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 A three-dimensional diagram of a closed swing arm structure suitable for a wafer two-fluid cleaning system proposed by the utility model;

[0025] Figure 2 An exploded diagram of a closed swing arm structure suitable for a wafer two-fluid cleaning system proposed by the utility model;

[0026] Figure 3 This is a partial structural disassembly diagram of a closed swing arm structure suitable for a wafer two-fluid cleaning system proposed by the utility model;

[0027] Figure 4 This is a front view of a closed swing arm structure suitable for a wafer two-fluid cleaning system proposed by the utility model;

[0028] Figure 5 This is a rear view of a closed swing arm structure suitable for a wafer two-fluid cleaning system proposed by the utility model.

[0029] Legend:

[0030] 1. Through-tube; 2. Bolt; 3. Cavity 1; 4. Cavity 2; 5. Liquid diversion hole 1; 6. Liquid diversion hole 2; 7. Slot 1; 8. Connecting plate; 9. Block; 10. Connecting hole 1; 11. Connecting block; 12. Limiting buckle; 13. Slot 2; 14. Sealing plate; 15. Protrusion; 16. Connecting groove; 17. Rotating plate; 18. Connecting hole 2; 19. Fixed seat; 20. Screw hole 1; 21. Adjusting groove; 22. Screw hole 2; 23. Positioning plate; 24. Connecting hole 3. DETAILED DESCRIPTION

[0031] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0032] Reference Figure 1 , Figure 2 and Figure 3The utility model provides an embodiment: a closed swing arm structure suitable for a wafer two-fluid cleaning system, comprising a through tube 1, a cavity 1 3 is opened at the inner top of the through tube 1, a cavity 2 4 is opened at the inner bottom of the through tube 1, a liquid diversion hole 1 5 is opened at the inner right end of the through tube 1, a liquid diversion hole 2 6 is opened at the inner right end of the through tube 1, a sealing plate 14 is fixedly connected to the front side of the through tube 1, a connecting groove 16 is opened at the left end of the through tube 1, a rotating plate 17 is rotatably connected to the inside of the connecting groove 16, a fixed seat 19 is fixedly connected to the rear side of the rotating plate 17, and a positioning plate 23 is fixedly connected to the front side of the fixed seat 19;

[0033] Specifically, the through-tube 1, as the main body of the entire structure, provides a channel for the flow of the liquid medicine. The through-tube 1 is provided with a cavity 1 3 and a cavity 2 4, respectively. The cavity 1 3 and the cavity 2 4 are used to buffer a certain amount of liquid medicine. At the same time, the cavity 2 4 at the bottom of the internal through-tube 1 is inclined to guide the flow, thereby reducing the accumulation of liquid medicine dripping at the head, which helps to maintain a stable pressure and flow rate during the liquid medicine delivery process; the liquid medicine diversion hole 1 5 and the liquid medicine diversion hole 2 6 are arranged at the right end of the through-tube 1, and the liquid medicine diversion hole 1 5 and the liquid medicine diversion hole 2 6 can distribute the liquid medicine to different areas at different proportions and flow rates; a sealing plate 14 is installed on the front side of the through-tube 1 , ensuring that the medicine liquid inside the tube 1 will not leak from the front end, maintaining the sealing of the tube 1, preventing the medicine liquid from being contaminated by the outside world, and also avoiding the medicine liquid from affecting the surrounding environment; the rotating plate 17 is rotatably installed through the connecting groove 16 at the left end of the tube 1, so that the tube 1 can be flexibly rotated within a certain range, and the angle and direction of the tube 1 can be adjusted to meet the transportation needs of different positions. The fixed seat 19 is fixed with the positioning plate 23, and the fixed seat 19 cooperates with the positioning plate 23 to fix and position the entire tube 1 structure, ensuring that the position of the tube 1 is stable during the transmission process, and will not deviate or shake, thereby ensuring the accuracy and reliability of the transmission.

[0034] Reference Figure 2 , Figure 4 and Figure 5 , a plurality of card slots 7 are provided on the front side of the through-tube 1, a connection plate 8 is slidably connected inside the plurality of card slots 7, a card block 9 is fixedly connected to the far side of the plurality of connection plates 8, the front sides of the plurality of connection plates 8 are fixedly connected to the rear side of the sealing plate 14, a card slot 2 13 is provided on the right end of the inner side of the through-tube 1, a limited position buckle 12 is fixedly connected to the rear side of the sealing plate 14, a connection hole 10 is provided on the front side of the sealing plate 14, a connection block 11 is fixedly connected to the upper and lower sides of the through-tube 1, and a protrusion 15 is fixedly connected to the front side of the sealing plate 14;

[0035] Specifically, a plurality of card slots 1 7 are provided on the front side of the through-tube 1, and the card slots 7 are evenly distributed on the front side of the through-tube 1. At the same time, a connecting plate 8 is fixed on the rear side of the sealing plate 14 and arranged corresponding to the card slots 7. Card blocks 9 are fixedly installed on the surface of the connecting plate 8. The card blocks 9 cooperate with the card slots 1 7 to engage with the card slots 7, thereby ensuring the stability and reliability of the connection. A card slot 2 13 is provided on the right end of the inner side of the through-tube 1, and this card slot 2 13 matches the limit buckle 12 on the sealing plate 14. When disassembly or inspection is required, the sealing plate 14 can be easily removed. The operation is simple and can effectively prevent wear caused by frequent disassembly and assembly. The upper and lower sides of the through-tube 1 are fixedly connected with connecting blocks 11. The connecting blocks 11 enhance the structural strength of the through-tube 1 and prevent deformation or damage caused by uneven force.

[0036] Reference Figure 2 , Figure 4 and Figure 5 The front side of the fixing seat 19 is provided with an adjustment groove 21, the inside of the adjustment groove 21 is rounded, the left end of the through pipe 1 is provided with a second connection hole 18, the front side of the fixing seat 19 is provided with a plurality of screw holes 1 20, the rear side of the positioning plate 23 is provided with a third connection hole 24, the front side of the fixing seat 19 is provided with a second screw hole 22, the inside of the plurality of second screw holes 22 are all threadedly connected with bolts 2, the front end of the bolt 2 passes through the inside of the second screw hole 22 and is threadedly connected to the inner side of the third connection hole 24;

[0037] Specifically, an adjustment groove 21 is provided on the front side of the fixing seat 19, and the position of the through-tube 1 can be accurately adjusted. A connecting hole three 24 is provided on the rear side of the positioning plate 23, which cooperates with the screw hole two 22 of the fixing seat 19. Through the connection of the bolt 2, the positioning plate 23 can be accurately positioned and firmly fixed; the front end of the bolt 2 successively passes through the interior of the screw hole two 22 and the connecting hole three 24 and is threadedly connected, which can effectively prevent loosening caused by vibration or external force and ensure the long-term stable operation of the equipment.

[0038] Working principle: First, the through-tube 1 is the main body of the whole structure, which provides a channel for the flow of the liquid medicine. Cavity 1 3 and cavity 2 4 are respectively arranged inside the through-tube 1. Cavity 1 3 and cavity 2 4 are used to buffer a certain amount of liquid medicine. At the same time, cavity 2 4 at the bottom of the internal through-tube 1 is inclined to guide the flow, so as to reduce the dripping of liquid medicine accumulation in the head, which is helpful to maintain a stable pressure and flow rate during the liquid medicine delivery process; liquid medicine diversion hole 1 5 and liquid medicine diversion hole 2 6 are arranged at the right end of the through-tube 1, and liquid medicine diversion hole 1 5 and liquid medicine diversion hole 2 6 can distribute the liquid medicine to different areas at different proportions and flow rates; a sealing plate 14 is installed on the front side of the through-tube 1 to ensure that the liquid medicine inside the through-tube 1 will not leak from the front end, maintain the sealing of the through-tube 1, prevent the liquid medicine from being contaminated by the outside world, and also avoid the liquid medicine from affecting the surrounding environment;

[0039] The rotating plate 17 is rotatably installed through the connecting groove 16 at the left end of the penetration tube 1, so that the swing arm can increase the range of motion and flexibility of the penetration tube 1, and can more accurately adjust the delivery direction and position of the liquid medicine. The fixed seat 19 is fixed to the positioning plate 23, and the fixed seat 19 cooperates with the positioning plate 23 to fix and position the entire penetration tube 1 structure, ensuring that the position of the penetration tube 1 is stable during the transmission process without deviation or shaking, thereby ensuring the accuracy and reliability of the transmission.

[0040] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A closed swing arm structure suitable for a wafer two-fluid cleaning system, comprising a through pipe (1), characterized in that: The top of the inner side of the penetration tube (1) is provided with a cavity one (3), the bottom of the inner side of the penetration tube (1) is provided with a cavity two (4), the right end of the inner side of the penetration tube (1) is provided with a drug liquid diversion hole one (5), the right end of the inner side of the penetration tube (1) is provided with a drug liquid diversion hole two (6), the front side of the penetration tube (1) is fixedly connected with a sealing plate (14), the left end of the penetration tube (1) is provided with a connecting groove (16), the interior of the connecting groove (16) is rotatably connected with a rotating plate (17), the rear side of the rotating plate (17) is fixedly connected with a fixing seat (19), and the front side of the fixing seat (19) is fixedly connected with a positioning plate (23).

2. The closed swing arm structure suitable for a wafer two-fluid cleaning system according to claim 1, characterized in that: The front side of the through-tube (1) is provided with a plurality of card slots (7), the interiors of the plurality of card slots (7) are slidably connected with connecting plates (8), the sides of the plurality of connecting plates (8) that are away from each other are fixedly connected with card blocks (9), and the front sides of the plurality of connecting plates (8) are fixedly connected to the rear side of the sealing plate (14).

3. The closed swing arm structure suitable for a wafer two-fluid cleaning system according to claim 1, characterized in that: A second clamping groove (13) is provided at the inner right end of the penetration tube (1), and a limiting clamp (12) is fixedly connected to the rear side of the sealing plate (14).

4. The closed swing arm structure suitable for a wafer two-fluid cleaning system according to claim 1, characterized in that: The front side of the sealing plate (14) is provided with a connection hole (10), the upper and lower sides of the penetration tube (1) are fixedly connected with a connection block (11), and the front side of the sealing plate (14) is fixedly connected with a protrusion (15).

5. The closed swing arm structure suitable for a wafer two-fluid cleaning system according to claim 1, characterized in that: The front side of the fixing seat (19) is provided with an adjustment groove (21), and the inside of the adjustment groove (21) is rounded.

6. The closed swing arm structure suitable for a wafer two-fluid cleaning system according to claim 1, characterized in that: The left end of the through pipe (1) is provided with a second connection hole (18), and the front side of the fixing seat (19) is provided with a plurality of first screw holes (20).

7. The closed swing arm structure suitable for a wafer two-fluid cleaning system according to claim 1, characterized in that: The rear side of the positioning plate (23) is provided with a third connection hole (24), and the front side of the fixing seat (19) is provided with a second screw hole (22).

8. The closed swing arm structure suitable for a wafer two-fluid cleaning system according to claim 7, characterized in that: The interior of the plurality of second screw holes (22) is threadedly connected with a bolt (2), and the front end of the bolt (2) passes through the interior of the second screw hole (22) and is threadedly connected to the inner side of the third connection hole (24).

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