Semiconductor hot plate photoetching equipment convenient for feeding

Abstract

The utility model discloses semiconductor hot plate photoetching equipment convenient to load, which comprises a photoetching machine, a material changing table is arranged in the photoetching machine, the surface of the material changing table is fixedly connected with four material changing boxes which are uniformly distributed on the surface of the material changing table, and a driving mechanism comprises a transmission motor. The back face of the transmission motor is fixedly connected with a fixing plate, the bottom of the fixing plate is fixedly connected with a fixing ring, the inner wall of the fixing ring is slidably connected with a gear ring, the surface of the gear ring is meshed with a driving gear, and the top of the driving gear is fixedly connected with the output end of the bottom of the transmission motor. And the inner wall of the fixing ring is fixedly connected with a fixing cylinder. When in use, under the action of the driving mechanism and the transmission mechanism, a workpiece can be automatically extruded and fixed, so that the complexity and trouble caused by manual fixation required by a traditional photoetching machine material changing table are avoided, and the material changing table has the advantage of automatically fixing the workpiece.

Description

Technical Field

[0001] The utility model relates to the technical field of photolithography machines, in particular to semiconductor hot plate photolithography equipment which is convenient for loading materials. Background Art

[0002] Semiconductor hot plate lithography equipment is one of the key equipment used in the semiconductor manufacturing process, and its role is vital. Specifically, semiconductor hot plate lithography equipment is mainly used to reduce the pre-designed chip circuit graphics according to a certain proportion and accurately project them onto the silicon wafer. Through process steps such as exposure and development, a micron-level chip circuit structure is formed on the silicon wafer. This process is an indispensable key link in semiconductor chip manufacturing and directly determines the performance and process level of the chip.

[0003] As shown in the patent application number of China Patent Network: 202121679915.1, the utility model relates to the technical field of lithography equipment, and in particular to a semiconductor hot plate lithography equipment that is easy to load, including a base, a frame and a material changing table, the frame is fixed to the left side of the upper end of the base, the material changing table is arranged in the middle of the upper end of the base, a laser engraving head is installed on the left side of the top of the frame, a cleaning box is fixed to the middle and rear part of the top of the frame, a dryer is fixed to the right side of the top of the frame, and a drying hood is connected to the lower end of the dryer. Material changing concave boxes are welded and fixed around the periphery of the material changing table; The semiconductor hot plate is placed in four material changing concave boxes respectively. When the semiconductor hot plate in the leftmost material changing concave box is photolithographically processed, the material changing table is rotated ninety degrees clockwise, so that the semiconductor hot plate in the frontmost material changing concave box is switched to the lower end of the laser engraving head. This cycle is conducive to achieving the effect of rapid material changing, so it is convenient to quickly photolithograph the next semiconductor hot plate, which effectively improves the photolithography efficiency. The utility model does not have an additional automatic fixing structure, which makes its manual fixing very troublesome and complicated, thereby increasing the operation time and reducing the operation efficiency.

[0004] Usually in the use of semiconductor hot plate lithography machines, traditional lithography machines need to manually fix and support the workpiece to be lithography during the loading process, which makes the fixation very troublesome and complicated, thereby increasing the operation time and reducing the operation efficiency.

[0005] Therefore, it is necessary to design and modify the material changing table of the lithography machine to effectively prevent the phenomenon of manual fixing. Utility Model Content

[0006] In order to solve the problems raised in the above background technology, the purpose of the utility model is to provide a semiconductor hot plate lithography device which is easy to load, has the advantage of automatically fixing the workpiece, and solves the problem of complexity and trouble of manual fixing.

[0007] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a semiconductor hot plate lithography device that is convenient for loading, comprising a lithography machine, a material changing table is installed inside the lithography machine, a material changing box is fixedly connected to the surface of the material changing table, and there are four material changing boxes that are evenly distributed on the surface of the material changing table, a driving mechanism, the driving mechanism comprises a transmission motor, a fixed plate is fixedly connected to the back of the transmission motor, a fixed ring is fixedly connected to the bottom of the fixed plate, a gear ring is slidably connected to the inner wall of the fixed ring, a driving gear is meshed on the surface of the gear ring, the top of the driving gear is fixedly connected to the bottom output end of the transmission motor, a fixed cylinder is fixedly connected to the inner wall of the fixed ring, the top of the fixed cylinder is fixedly connected to the bottom of the material changing table, the bottom of the fixed cylinder is fixedly connected to a connecting ring, and the bottom of the connecting ring is movably connected to the bottom of the inner wall of the lithography machine;

[0008] The transmission mechanism includes a transmission gear, and the transmission gears are four and evenly distributed on the surface of the gear ring. The inner side of the transmission gear meshes with the surface of the gear ring. The inner wall of the transmission gear is fixedly connected with a connecting rod. The bottom of the connecting rod is movably connected to the top of the connecting ring through a bearing seat. The top of the connecting rod is fixedly connected with a bevel gear 1. The top of the bevel gear 1 meshes with a bevel gear 2. The inner wall of the bevel gear 2 is fixedly connected with a round rod. The outer side of the round rod is movably connected with a support plate through a bearing. The bottom of the support plate The top of the connecting ring is fixedly connected with the part, and a transmission wheel 1 is arranged on the inner side of the support plate, and a transmission belt is movably connected to the surface of the transmission wheel 1, and a transmission wheel 2 is movably connected to the inner wall of the transmission belt, and a connecting cylinder is fixedly connected to the inner wall of the transmission wheel 2, and the surface of the connecting cylinder is movably connected to the inner wall of the support plate, and a sliding block is slidably connected to the inner wall of the connecting cylinder, and a screw is fixedly connected to the inner side of the sliding block, and the inner side of the screw penetrates into the interior of the material changing box and is fixedly connected to a pressing plate, and the surface of the screw is threadedly connected to the inner wall of the material changing box.

[0009] As a preferred embodiment of the utility model, the outer side of the pressure plate is fixedly connected with a sliding rod, the outer side of the sliding rod penetrates to the outside of the material changing box, the surface of the sliding rod is slidably connected to the inner wall of the material changing box, the surface of the sliding rod is slidably connected to a limiting frame, and the inner side of the limiting frame is fixedly connected to the surface of the material changing box.

[0010] As a preferred embodiment of the present invention, a limiting ring is fixedly connected to the surface of the sliding rod, and the limiting ring is used in conjunction with the sliding rod.

[0011] As a preferred embodiment of the utility model, a reinforcement block is fixedly connected to the surface of the support plate, and there are multiple reinforcement blocks evenly distributed on the surface of the support plate, and the bottom of the reinforcement block is fixedly connected to the top of the connecting ring.

[0012] As a preferred embodiment of the utility model, a spacer is fixedly connected to the inner side of the pressing plate, and the spacer has elasticity and anti-slip capabilities.

[0013] As a preferred embodiment of the present invention, an arc angle is provided on the top of the support plate, and the arc angle is used in conjunction with the support plate.

[0014] Compared with the prior art, the beneficial effects of the utility model are as follows:

[0015] 1. When the utility model is used, the workpiece can be automatically squeezed and fixed under the action of the driving mechanism and the transmission mechanism, avoiding the complexity and trouble caused by the manual fixation of the material changing table of the traditional lithography machine, and making it have the advantage of automatically fixing the workpiece.

[0016] 2. The utility model can limit the pressing plate by setting a sliding rod and a limiting frame, so that the pressing plate can move more stably and prevent it from deflecting. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the structure of the utility model;

[0018] Figure 2 This is a schematic diagram of the driving mechanism of the utility model;

[0019] Figure 3 It is a schematic diagram of the transmission mechanism of the utility model;

[0020] Figure 4 For this utility model Figure 3 Enlarged view of point A in the middle;

[0021] Figure 5 This is a partial parts separation diagram of the utility model.

[0022] In the figure: 1. photolithography machine; 2. material changing table; 3. material changing box; 4. transmission motor; 5. fixed plate; 6. gear ring; 7. driving gear; 8. fixed cylinder; 9. connecting ring; 10. transmission gear; 11. connecting rod; 12. bevel gear one; 13. bevel gear two; 14. round rod; 15. support plate; 16. transmission wheel one; 17. transmission belt; 18. transmission wheel two; 19. connecting cylinder; 20. sliding block; 21. screw rod; 22. pressure plate; 23. sliding rod; 24. limit frame; 25. limit ring; 26. reinforcement block; 27. spacer; 28. arc angle; 29. ​​fixed ring. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] like Figures 1 to 5 As shown, the utility model provides a semiconductor hot plate lithography device that is convenient for loading, including a lithography machine 1, a material changing table 2 is installed inside the lithography machine 1, a material changing box 3 is fixedly connected to the surface of the material changing table 2, there are four material changing boxes 3 and they are evenly distributed on the surface of the material changing table 2, a driving mechanism, the driving mechanism includes a transmission motor 4, a fixed plate 5 is fixedly connected to the back of the transmission motor 4, a fixed ring 29 is fixedly connected to the bottom of the fixed plate 5, a gear ring 6 is slidably connected to the inner wall of the fixed ring 29, a driving gear 7 is meshed on the surface of the gear ring 6, the top of the driving gear 7 is fixedly connected to the bottom output end of the transmission motor 4, a fixed cylinder 8 is fixedly connected to the inner wall of the fixed ring 29, the top of the fixed cylinder 8 is fixedly connected to the bottom of the material changing table 2, the bottom of the fixed cylinder 8 is fixedly connected to a connecting ring 9, and the bottom of the connecting ring 9 is movably connected to the bottom of the inner wall of the lithography machine 1;

[0025] The transmission mechanism includes a transmission gear 10. There are four transmission gears 10 that are evenly distributed on the surface of the gear ring 6. The inner side of the transmission gear 10 meshes with the surface of the gear ring 6. The inner wall of the transmission gear 10 is fixedly connected with a connecting rod 11. The bottom of the connecting rod 11 is movably connected to the top of the connecting ring 9 through a bearing seat. The top of the connecting rod 11 is fixedly connected with a bevel gear 12. The top of the bevel gear 12 meshes with a bevel gear 2 13. The inner wall of the bevel gear 2 13 is fixedly connected with a round rod 14. The outer side of the round rod 14 is movably connected with a support plate 15 through a bearing. The bottom of the support plate 15 is connected to the The top of the connecting ring 9 is fixedly connected, and a transmission wheel 16 is arranged on the inner side of the support plate 15. The surface of the transmission wheel 16 is movably connected with a transmission belt 17, and the inner wall of the transmission belt 17 is movably connected with a transmission wheel 2 18. The inner wall of the transmission wheel 2 18 is fixedly connected with a connecting tube 19, and the surface of the connecting tube 19 is movably connected to the inner wall of the support plate 15. The inner wall of the connecting tube 19 is slidably connected with a sliding block 20, and the inner side of the sliding block 20 is fixedly connected with a screw 21, and the inner side of the screw 21 penetrates into the interior of the material changing box 3 and is fixedly connected with a pressing plate 22, and the surface of the screw 21 is threadedly connected to the inner wall of the material changing box 3.

[0026] refer to Figure 4A sliding rod 23 is fixedly connected to the outer side of the pressure plate 22, and the outer side of the sliding rod 23 penetrates to the outer side of the material changing box 3. The surface of the sliding rod 23 is slidably connected to the inner wall of the material changing box 3. The surface of the sliding rod 23 is slidably connected to a limiting frame 24, and the inner side of the limiting frame 24 is fixedly connected to the surface of the material changing box 3.

[0027] As a technical optimization solution of the utility model, by providing a sliding rod 23 and a limiting frame 24, the pressing plate 22 can be limited to make its movement more stable and prevent its deviation.

[0028] refer to Figure 2 The surface of the sliding rod 23 is fixedly connected to a limiting ring 25 , and the limiting ring 25 is used in conjunction with the sliding rod 23 .

[0029] As a technical optimization solution of the present invention, by providing a limiting ring 25, the sliding rod 23 can be limited to prevent excessive movement during the sliding process.

[0030] refer to Figure 2 A reinforcing block 26 is fixedly connected to the surface of the support plate 15 . There are multiple reinforcing blocks 26 evenly distributed on the surface of the support plate 15 . The bottom of the reinforcing block 26 is fixedly connected to the top of the connecting ring 9 .

[0031] As a technical optimization solution of the present invention, by providing a reinforcement block 26, the support plate 15 can be reinforced to prevent it from being subjected to excessive force, causing it to loosen or even fall over.

[0032] refer to Figure 2 A spacer 27 is fixedly connected to the inner side of the pressing plate 22, and the spacer 27 has elasticity and anti-slip capabilities.

[0033] As a technical optimization solution of the utility model, by providing a spacer 27, the workpiece can be protected to prevent it from directly colliding and rubbing with the pressing plate 22, thereby preventing the workpiece from being damaged.

[0034] refer to Figure 2 The top of the support plate 15 is provided with an arc angle 28 , and the arc angle 28 is used in conjunction with the support plate 15 .

[0035] As a technical optimization solution of the present invention, by setting the arc angle 28, the surface of the support plate 15 can be made smoother, preventing its sharp edges from scratching the operator.

[0036] The working principle and use process of the utility model are as follows: when in use, the transmission motor 4 is started to run, so that the bottom output end of the transmission motor 4 drives the driving gear 7 to rotate, and the driving gear 7 drives the gear ring 6 to rotate inside the fixed ring 29, so that the rotation of the gear ring 6 drives the surrounding transmission gears 10 to rotate (the connecting rod 11 uses the bearing seat to support the transmission gear 10 and enables it to rotate in the original position), the transmission gear 10 drives the bevel gear 12 to rotate through the connecting rod 11, and the bevel gear 12 drives the round rod 14 to rotate through the bevel gear 2 13 (the support plate 15 supports the round rod 14 through the bearing), and the round rod 14 rotates and drives the transmission wheel 16 to rotate, the transmission wheel 16 drives the transmission wheel 2 18 to rotate through the transmission belt 17, and the transmission wheel 2 18 drives the connecting cylinder 19 to rotate inside the support plate 15 ( The connecting tube 19 has a protrusion at the position where it is movably connected on the inner surface of the support plate 15, which can limit the rotation of the connecting tube 19 at the original position inside the support plate 15). When the connecting tube 19 rotates, it drives the screw 21 to rotate inside the material changing box 3 through the sliding block 20. When the screw 21 rotates, it drives the pressure plate 22 to squeeze into the inside of the material changing box 3, and the sliding block 20 is driven synchronously to limit and transmit the screw 21, so that the pressure plate 22 is used to squeeze the workpiece inside the material changing box 3 to support and fix it. When releasing, just follow the reverse operation as mentioned above (the connecting ring 9 is fixedly connected to the material changing table 2 through the fixed tube 8, so that its overall structure rotates synchronously with the material changing table 2), avoiding the complexity and trouble caused by the need to manually fix the material changing table 2 of the traditional lithography machine 1, so that it has the advantage of automatically fixing the workpiece.

[0037] To sum up: when the utility model is used, under the action of the driving mechanism and the transmission mechanism, the workpiece can be automatically squeezed and fixed, avoiding the complexity and trouble caused by the manual fixation of the material changing table 2 of the traditional lithography machine 1, so that it has the advantage of automatically fixing the workpiece and solves the problem of complexity and trouble of manual fixation.

[0038] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0039] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A semiconductor hot plate lithography device that is convenient for loading materials, comprising a lithography machine (1), wherein a material changing table (2) is installed inside the lithography machine (1), a material changing box (3) is fixedly connected to the surface of the material changing table (2), and there are four material changing boxes (3) that are evenly distributed on the surface of the material changing table (2), characterized in that: A drive mechanism, the drive mechanism comprising a transmission motor (4), a fixed plate (5) fixedly connected to the back of the transmission motor (4), a fixed ring (29) fixedly connected to the bottom of the fixed plate (5), a gear ring (6) slidably connected to the inner wall of the fixed ring (29), a driving gear (7) meshing on the surface of the gear ring (6), a top of the driving gear (7) fixedly connected to the bottom output end of the transmission motor (4), a fixed cylinder (8) fixedly connected to the inner wall of the fixed ring (29), a top of the fixed cylinder (8) fixedly connected to the bottom of the material exchange table (2), a connecting ring (9) fixedly connected to the bottom of the connecting ring (9), and a bottom of the connecting ring (9) movably connected to the bottom of the inner wall of the photolithography machine (1); The transmission mechanism comprises a transmission gear (10), wherein the transmission gear (10) has four transmission gears (10) and are evenly distributed on the surface of the gear ring (6), the inner side of the transmission gear (10) meshes with the surface of the gear ring (6), the inner wall of the transmission gear (10) is fixedly connected to a connecting rod (11), the bottom of the connecting rod (11) is movably connected to the top of the connecting ring (9) through a bearing seat, the top of the connecting rod (11) is fixedly connected to a bevel gear 1 (12), the top of the bevel gear 1 (12) meshes with a bevel gear 2 (13), the inner wall of the bevel gear 2 (13) is fixedly connected to a round rod (14), the outer side of the round rod (14) is movably connected to a support plate (15) through a bearing, the bottom of the support plate (15) is connected to the connecting rod (11) The top of the ring (9) is fixedly connected, a transmission wheel (16) is arranged on the inner side of the support plate (15), a transmission belt (17) is movably connected to the surface of the transmission wheel (16), the inner wall of the transmission belt (17) is movably connected to the transmission wheel (18), the inner wall of the transmission wheel (18) is fixedly connected to a connecting tube (19), the surface of the connecting tube (19) is movably connected to the inner wall of the support plate (15), the inner wall of the connecting tube (19) is slidably connected to a sliding block (20), the inner side of the sliding block (20) is fixedly connected to a screw (21), the inner side of the screw (21) penetrates into the interior of the material changing box (3) and is fixedly connected to a pressing plate (22), and the surface of the screw (21) is threadedly connected to the inner wall of the material changing box (3).

2. The semiconductor hot plate lithography device that is easy to load according to claim 1, characterized in that: The outer side of the pressing plate (22) is fixedly connected to a sliding rod (23), the outer side of the sliding rod (23) extends to the outer side of the material changing box (3), the surface of the sliding rod (23) is slidably connected to the inner wall of the material changing box (3), the surface of the sliding rod (23) is slidably connected to a limit frame (24), and the inner side of the limit frame (24) is fixedly connected to the surface of the material changing box (3).

3. The semiconductor hot plate lithography device that is easy to load according to claim 2, characterized in that: A limiting ring (25) is fixedly connected to the surface of the sliding rod (23), and the limiting ring (25) is used in conjunction with the sliding rod (23).

4. The semiconductor hot plate lithography device for easy loading of materials according to claim 1, characterized in that: A reinforcing block (26) is fixedly connected to the surface of the support plate (15); a plurality of the reinforcing blocks (26) are evenly distributed on the surface of the support plate (15); and the bottom of the reinforcing block (26) is fixedly connected to the top of the connecting ring (9).

5. The semiconductor hot plate lithography device for easy loading of materials according to claim 1, characterized in that: A spacer (27) is fixedly connected to the inner side of the pressing plate (22), and the spacer (27) has elasticity and anti-slip capabilities.

6. The semiconductor hot plate lithography device for easy loading of materials according to claim 1, characterized in that: An arc angle (28) is provided on the top of the support plate (15), and the arc angle (28) is used in conjunction with the support plate (15).

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