Efficient polysiloxane separation system in polycrystalline silicon system

Abstract

The utility model discloses an efficient polysiloxane separation system in a polycrystalline silicon system, which comprises a buffer tank, a polysiloxane tank, a rectifying tower, a condenser and a reboiler, the reboiler is connected with the buffer tank, the polysiloxane tank and the rectifying tower, the reboiler is further connected with a steam box and a condensate box, the rectifying tower is connected with the condenser, and the condenser is connected with the condensate box. The condenser is connected with a refrigerant feeding box, a refrigerant discharging box and a product tank, the product tank is connected with a pump, the pump is connected with a boundary area, the side of the product tank is connected with a flushing box, the flushing box is connected with a connecting pipe, the connecting pipe is connected with a flushing pipe, and the flushing pipe is located in the product tank. According to the efficient polysiloxane separation system in the polycrystalline silicon system, disclosed by the utility model, the waste of light components such as trichlorosilane and silicon tetrachloride is reduced by efficiently separating tetrachlorosiloxane, pentachlorosiloxane and hexachlorosiloxane, and meanwhile, the waste of water resources in the production of polycrystalline silicon is reduced.

Description

Technical Field

[0001] The utility model relates to the field of efficient separation of polysiloxanes, and particularly to an efficient separation system for polysiloxanes in a polysilicon system. Background Technique

[0002] The efficient separation system for polysiloxanes in a polysilicon system is a supporting device for efficient separation and processing of polysiloxanes. In polysilicon production, cold hydrogenation and reduction by-products of high-boiling materials include tetrachloroethylsilane, tetrachloroethylsiloxane, pentachloroethylsilane, pentachloroethylsiloxane, hexachloroethylsilane, hexachloroethylsiloxane, etc. Among them, tetrachloroethylsiloxane, pentachloroethylsiloxane, and hexachloroethylsiloxane do not participate in the reaction in the polysilicon system. With the continuous development of technology, people's requirements for the manufacturing process of the efficient separation system for polysiloxanes in a polysilicon system are also getting higher and higher.

[0003] The existing polysilicon system has certain drawbacks when in use. The existing system does not effectively separate the part of materials such as tetrachloroethylsiloxane, pentachloroethylsiloxane, and hexachloroethylsiloxane, resulting in waste of trichlorosilane and tetrachlorosilicon, which brings certain adverse effects to the actual use process. Therefore, we propose an efficient separation system for polysiloxanes in a polysilicon system. Content of the Utility Model

[0004] Technical problem to be solved: Aiming at the deficiencies of the prior art, the utility model provides an efficient separation system for polysiloxanes in a polysilicon system, which reduces the waste of light components such as trichlorosilane and tetrachlorosilicon by efficiently separating tetrachloroethylsiloxane, pentachloroethylsiloxane, and hexachloroethylsiloxane, and at the same time reduces the waste of water resources in polysilicon production, and can effectively solve the problems in the background technique.

[0005] Technical solution: To achieve the above purpose, the technical solution adopted by the utility model is as follows: An efficient separation system for polysiloxanes in a polysilicon system includes a buffer tank, a polysiloxane tank, a rectifying column, a condenser, and a reboiler. The reboiler is connected to the buffer tank, the polysiloxane tank, and the rectifying column. The reboiler is also connected to a steam box and a condensate box. The rectifying column is connected to the condenser. The condenser is connected to a refrigerant feed tank, a refrigerant discharge tank, and a product tank. The product tank is connected to a pump, and the pump is connected to the battery limit.

[0006] Preferably, a flushing tank is connected to the side of the product tank. The flushing tank is connected to a connecting pipe, and the connecting pipe is connected to a flushing pipe. The flushing pipe is located inside the product tank. Flushing heads are positioned on the outer wall of the flushing pipe. A liquid discharge valve pipe is installed at the bottom of the product tank, and the liquid discharge valve pipe is connected to a liquid collection tank.

[0007] Preferably, the input end of the reboiler is connected to the output end of the buffer tank in a through manner, and the output end of the reboiler is connected to the input ends of the polysiloxane tank and the distillation column in a through manner.

[0008] Preferably, the output end of the steam box is connected to the input end of the reboiler in a through manner, and the input end of the condensate tank is connected to the output end of the reboiler in a through manner.

[0009] Preferably, the output end of the distillation column is connected to the input end of the condenser in a through manner, the input end of the condenser is connected to the output end of the refrigerant feed tank in a through manner, the output end of the condenser is connected to the input end of the refrigerant discharge tank in a through manner, and the output end of the condenser is connected to the input end of the product tank in a through manner.

[0010] Preferably, the flushing pipe rotates inside the product tank and sprays the inner wall of the product tank through the flushing head, and the liquid outlet valve pipe controls the flushing liquid inside the product tank to enter the liquid collection tank.

[0011] Beneficial effects: Compared with the prior art, the present invention provides a high-efficiency separation system for polysiloxane in a polysilicon system, having the following beneficial effects: This high-efficiency separation system for polysiloxane in a polysilicon system reduces the waste of light components such as trichlorosilane and tetrachlorosilane by efficiently separating tetrachloroethylsiloxane, pentachloroethylsiloxane, and hexachloroethylsiloxane. At the same time, it reduces the waste of water resources in polysilicon production. The entire high-efficiency separation system for polysiloxane in the polysilicon system has a simple structure, convenient operation, and better use effects compared with the traditional method. Description of the Drawings

[0012] Figure 1 It is a schematic diagram of the overall structure of a high-efficiency separation system for polysiloxane in a polysilicon system of the present invention.

[0013] Figure 2 It is a schematic diagram of the structure of the buffer tank in a high-efficiency separation system for polysiloxane in a polysilicon system of the present invention.

[0014] Figure 3 It is a schematic diagram of the structure of the distillation column and the product tank in a high-efficiency separation system for polysiloxane in a polysilicon system of the present invention.

[0015] Figure 4 It is a schematic diagram of the structure of the product tank in a high-efficiency separation system for polysiloxane in a polysilicon system of the present invention.

[0016] In the figure: 1. Buffer tank; 2. Steam box; 3. Condensate tank; 4. Polysiloxane tank; 5. Reboiler; 6. Rectifying column; 7. Condenser; 8. Refrigerant feed tank; 9. Refrigerant discharge tank; 10. Product tank; 11. Battery limit; 12. Pump; 13. Flushing pipe; 14. Flushing head; 15. Flushing box; 16. Connecting pipe; 17. Liquid discharge valve pipe; 18. Liquid collection tank. Detailed implementation manners

[0017] The technical solutions of the present utility model will be clearly and completely described below in conjunction with the accompanying drawings and specific implementation manners. However, those skilled in the art will understand that the following described embodiments are some embodiments of the present utility model, rather than all embodiments, and are only used to illustrate the present utility model and should not be construed as limiting the scope of the present utility model. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model. For those conditions not specified in the embodiments, they are carried out according to conventional conditions or conditions recommended by the manufacturer. Those reagents or instruments not specified by the manufacturer can be obtained as conventional products through commercial purchase.

[0018] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as limiting the present utility model. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0019] In the description of the present utility model, it should be noted that unless otherwise clearly specified and limited, the terms "installation", "connection", "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal communication of two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.

[0020] As Figures 1-4As shown in the figure, a high-efficiency separation system for polysiloxane in a polysilicon system includes a buffer tank 1, a polysiloxane tank 4, a distillation column 6, a condenser 7 and a reboiler 5. The reboiler 5 is connected to the buffer tank 1, the polysiloxane tank 4 and the distillation column 6. The reboiler 5 is also connected to a steam box 2 and a condensate tank 3. The distillation column 6 is connected to the condenser 7. The condenser 7 is connected to a refrigerant feed tank 8, a refrigerant discharge tank 9 and a product tank 10. The product tank 10 is connected to a pump 12, and the pump 12 is connected to a boundary area 11. By efficiently separating tetrachloroethylsiloxane, pentachloroethylsiloxane and hexachloroethylsiloxane, the waste of light components such as trichlorosilane and tetrachlorosilane is reduced, and at the same time, the waste of water resources in polysilicon production is reduced.

[0021] Further, a flushing tank 15 is connected to the side of the product tank 10. The flushing tank 15 is connected to a connecting pipe 16, and the connecting pipe 16 is connected to a flushing pipe 13. The flushing pipe 13 is located inside the product tank 10. Flushing heads 14 are positioned on the outer wall of the flushing pipe 13. A liquid outlet valve pipe 17 is installed at the bottom of the product tank 10, and the liquid outlet valve pipe 17 is connected to a liquid collection tank 18.

[0022] Further, the input end of the reboiler 5 is connected in a through manner to the output end of the buffer tank 1, and the output end of the reboiler 5 is connected in a through manner to the input ends of the polysiloxane tank 4 and the distillation column 6, which can achieve the efficient separation of useless materials in the polysilicon system and avoid the waste of light components.

[0023] Further, the output end of the steam box 2 is connected in a through manner to the input end of the reboiler 5, and the input end of the condensate tank 3 is connected in a through manner to the output end of the reboiler 5.

[0024] Further, the output end of the distillation column 6 is connected in a through manner to the input end of the condenser 7, the input end of the condenser 7 is connected in a through manner to the output end of the refrigerant feed tank 8, the output end of the condenser 7 is connected in a through manner to the input end of the refrigerant discharge tank 9, and the output end of the condenser 7 is connected in a through manner to the input end of the product tank 10.

[0025] Further, the flushing pipe 13 rotates inside the product tank 10 and sprays towards the inner wall of the product tank 10 through the flushing heads 14. The liquid outlet valve pipe 17 controls the flushing liquid inside the product tank 10 to enter the liquid collection tank 18.

[0026] A separation system for siloxane includes a buffer tank, a reboiler, a column, a condenser, a product tank, a pump, an instrument system and a control system.

[0027] Among them, the control system calculates the optimal reflux ratio through an algorithm according to the parameters obtained by the instrument system, and controls the top temperature and the bottom temperature of the column.

[0028] An automatic slag discharge system is internally provided, including a temperature module, a liquid level module, a pressure module, an execution module, and a backwashing module. The temperature module is used to monitor the temperature of the reboiler in real time; the temperature module, the liquid level module, and the pressure module jointly determine the amounts of tetrachloroethylsiloxane, pentachloroethylsiloxane, and hexachloroethylsiloxane in the reboiler. The execution module calculates the slag discharge amount of the reboiler according to an algorithm, and the backwashing module flushes the pipeline after the slag discharge is completed to prevent pipeline blockage.

[0029] The utility model includes a buffer tank 1, a steam box 2, a condensate tank 3, a polysiloxane tank 4, a reboiler 5, a rectifying column 6, a condenser 7, a refrigerant feed tank 8, a refrigerant discharge tank 9, a product tank 10, a battery limit 11, a pump 12, a flushing pipe 13, a flushing head 14, a flushing tank 15, a connecting pipe 16, a liquid outlet valve pipe 17, and a liquid collection tank 18. By efficiently separating tetrachloroethylsiloxane, pentachloroethylsiloxane, and hexachloroethylsiloxane, the waste of light components such as trichlorosilane and silicon tetrachloride is reduced, and at the same time, the waste of water resources in polysilicon production is reduced.

[0030] It should be noted that in this article, relational terms such as first and second (No. 1, No. 2) are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variant thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements, but also includes other elements not expressly listed, or also includes elements inherent to such process, method, article or device. Without further limitation, an element defined by the statement "including a..." does not exclude the existence of additional identical elements in the process, method, article or device including the said element.

[0031] The above shows and describes the basic principles, main features and advantages of the utility model. Those skilled in the art of this industry should understand that the utility model is not limited by the above embodiments. What is described in the above embodiments and the specification only illustrates the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model will have various changes and improvements, and these changes and improvements all fall within the scope of the utility model claimed.

Claims

1. A highly efficient polysiloxane separation system in a polysilicon system, comprising a buffer tank (1), a polysiloxane tank (4), a distillation tower (6), a condenser (7) and a reboiler (5), characterized in that: The reboiler (5) is connected to the buffer tank (1), the polysiloxane tank (4) and the distillation tower (6); the reboiler (5) is also connected to the steam box (2) and the condensate tank (3); the distillation tower (6) is connected to the condenser (7); the condenser (7) is connected to the refrigerant feed box (8), the refrigerant discharge box (9) and the product tank (10); the product tank (10) is connected to a pump (12); and the pump (12) is connected to the bounded area (11).

2. The high-efficiency separation system of polysiloxane in a polysilicon system according to claim 1, characterized in that: The side of the product tank (10) is connected to a flushing box (15), the flushing box (15) is connected to a connecting pipe (16), the connecting pipe (16) is connected to a flushing pipe (13), the flushing pipe (13) is located inside the product tank (10), a flushing head (14) is positioned on the outer wall of the flushing pipe (13), a liquid outlet valve pipe (17) is installed at the bottom of the product tank (10), and the liquid outlet valve pipe (17) is connected to a liquid collecting box (18).

3. The high-efficiency separation system of polysiloxane in a polysilicon system according to claim 1, characterized in that: The input end of the reboiler (5) is connected to the output end of the buffer tank (1), and the output end of the reboiler (5) is connected to the input end of the polysiloxane tank (4) and the distillation tower (6).

4. The high-efficiency separation system of polysiloxane in a polysilicon system according to claim 1, characterized in that: The output end of the steam box (2) is connected to the input end of the reboiler (5), and the input end of the condensate box (3) is connected to the output end of the reboiler (5).

5. The high-efficiency polysiloxane separation system in a polysilicon system according to claim 1, characterized in that: The output end of the distillation tower (6) is connected to the input end of the condenser (7), the input end of the condenser (7) is connected to the output end of the refrigerant feed box (8), the output end of the condenser (7) is connected to the input end of the refrigerant discharge box (9), and the output end of the condenser (7) is connected to the input end of the product tank (10).

6. The high-efficiency separation system of polysiloxane in a polysilicon system according to claim 2, characterized in that: The flushing pipe (13) rotates inside the product tank (10) and flushes the inner wall of the product tank (10) through the flushing head (14), and the liquid outlet valve pipe (17) controls the flushing liquid inside the product tank (10) to enter the liquid collecting box (18).

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