Sports table

Abstract

The utility model provides a motion table, and relates to the technical field of precision manufacturing. The utility model relates to a motion table which comprises a clamping part and a conveying part. The clamping part comprises a clamping carrier plate and one or more clamping assemblies arranged on the clamping carrier plate, and the clamping assemblies are used for clamping workpieces. The conveying part comprises a conveying module or more than two stacked conveying modules, and different conveying modules correspond to different preset movement directions; the clamping parts are arranged on the conveying module or the conveying module on the uppermost layer in the two or more conveying modules in a stacked mode. The conveying module comprises a conveying carrier plate and one or more conveying movement assemblies arranged on the conveying carrier plate. The more than one conveying movement assembly is used for driving the clamping carrier plate located on the upper layer of the conveying module or the conveying carrier plates of other conveying modules located on the upper layer of the conveying module to move in the corresponding preset movement direction.

Description

Technical Field

[0001] This specification relates to the field of precision manufacturing technology, and particularly to a moving stage. Background Art

[0002] In the process of precision manufacturing, rapid, high-precision, and high-stability transfer of the object to be detected or processed (or can be called a workpiece) is a prerequisite for achieving high-efficiency production. The moving stage is the main equipment for realizing workpiece transfer. Summary of the Utility Model

[0003] One or more embodiments of this specification aim to provide a moving stage, so as to realize multi-degree-of-freedom movement of the workpiece, thereby quickly, highly precisely, and highly stably transferring the workpiece to different workstations in the manufacturing process, meeting the requirements of precision manufacturing.

[0004] The moving stage provided by one or more embodiments of this specification includes a clamping part and a transfer part; the clamping part includes a clamping carrier plate and more than one clamping component arranged on the clamping carrier plate, and the clamping component is used for clamping the workpiece; the transfer part includes one transfer module or more than two transfer modules stacked, wherein different transfer modules correspond to different preset movement directions; the clamping part is stacked on the transfer module or the uppermost transfer module among the more than two transfer modules; the transfer module includes a transfer carrier plate and more than one transfer movement component arranged on the transfer carrier plate, and the more than one transfer movement component is used for driving the clamping carrier plate located above the transfer module or the transfer carrier plate of other transfer modules located above the transfer module to move in the corresponding preset movement direction.

[0005] According to the moving stage of one or more embodiments of this specification, the clamping part further includes more than one support leg; the clamping carrier plate includes a workpiece placement area, and the more than one support leg is arranged in the workpiece placement area to support the workpiece; the clamping component includes more than two clamping movement parts oppositely arranged at intervals in the workpiece placement area, the clamping movement part has a clamping head capable of moving in a direction towards or away from the workpiece placement area, and the movement directions of the clamping heads of the clamping movement parts oppositely arranged at intervals in the workpiece placement area are towards each other or away from each other.

[0006] The moving stage according to one or more embodiments of the present specification, the clamping carrier plate includes a workpiece placement area, and the clamping assembly includes a clamping moving member and a limiting support leg; the clamping moving member has a clamping head capable of moving in a direction towards or away from the workpiece placement area; the limiting support leg is arranged along the boundary of the workpiece placement area and has a stop head extending beyond the boundary, and the stop head is configured to abut against the side surface of the workpiece; the clamping moving member and the limiting support leg in the clamping assembly are arranged opposite to each other with an interval from the workpiece placement area.

[0007] The moving stage according to one or more embodiments of the present specification, the clamping moving member further includes a first inertial motor; the clamping head is detachably assembled on the first mover of the first inertial motor, and the first stator of the first inertial motor is fixedly arranged on the clamping carrier plate.

[0008] The moving stage according to one or more embodiments of the present specification, the first mover includes a first sliding member, and the first stator includes a first base; wherein, the first sliding member is slidably matched with the first base and can slide along a first direction; the first sliding member is provided with a bearing surface for assembling the clamping head and a first friction surface perpendicular to the bearing surface; the first inertial motor further includes a first driving module, and the first driving module includes a piezoelectric driving part, a transmission part and a second friction surface; the first driving module is located on the first base and on one side of the first friction surface, so that the second friction surface can be opposite to and in frictional contact with the first friction surface; the deformation of the piezoelectric driving part can be transmitted to the second friction surface through the transmission part, so as to drive the second friction surface to move along the first direction and then drive the first sliding member to slide along the first direction through the frictional contact with the first friction surface.

[0009] The moving stage according to one or more embodiments of the present specification, the side of the first sliding member opposite to the bearing surface has a rib extending along the first direction, and one side of the rib is provided with the first friction surface; the first base is provided with a first groove for accommodating the rib and a second groove for accommodating the first driving module; there is a communication notch between the first groove and the second groove, so that the second friction surface can be in frictional contact with the first friction surface through the communication notch.

[0010] The moving stage according to one or more embodiments of the present specification further includes a displacement sensor; the first base is further provided with a third groove; the signal conversion part of the displacement sensor is arranged on the first sliding member and extends along the first direction, and the signal receiving part is located in the third groove.

[0011] The moving stage according to one or more embodiments of the present specification, wherein the first driving module includes a first wall; the first wall has an inclined surface forming an angle less than 90° with respect to the second friction surface; the inclined surface of the first wall is configured to decompose the force acting thereon into a first component force parallel to the second friction surface and a second component force perpendicular to the second friction surface, wherein the first component force can provide a pre-tightening force for the deformation of the piezoelectric driving portion, and the second component force can provide a normal pressure for the frictional contact between the second friction surface and the first friction surface.

[0012] The moving stage according to one or more embodiments of the present specification, wherein the conveying motion component of the conveying module is single, and the conveying module further includes a driven motion component disposed on its conveying carrier plate; the conveying motion component and the driven motion component are sequentially arranged on the conveying carrier plate along a second direction perpendicular to the corresponding preset motion direction of the conveying module, and the driven motion component moves under the drive of the conveying motion component.

[0013] The moving stage according to one or more embodiments of the present specification, wherein the conveying motion component includes a second inertial motor; a clamping carrier plate located above the conveying module or a conveying carrier plate of another conveying module is detachably assembled on the second mover of the second inertial motor, and the second stator of the second inertial motor is fixedly disposed on the conveying carrier plate of the conveying module; the second mover can move along the corresponding preset motion direction of the conveying module; the driven motion component includes a second base and a second sliding member, the second sliding member is slidably engaged with the second base and can slide along the corresponding preset motion direction of the conveying module; the bearing surface of the second sliding member is detachably assembled with a clamping carrier plate located above the conveying module or a conveying carrier plate of another conveying module, and the second base is disposed on the conveying carrier plate of the conveying module.

[0014] The moving stage according to one or more embodiments of the present specification, wherein the number of the conveying motion components of the conveying module is two; the two conveying motion components are sequentially arranged on the conveying carrier plate along a second direction perpendicular to the corresponding preset motion direction of the conveying module, and the two conveying motion components are synchronously controlled.

[0015] The moving stage according to one or more embodiments of the present specification, wherein the conveying motion component includes a second inertial motor; a clamping carrier plate located above the conveying module or a conveying carrier plate of another conveying module is detachably assembled on the second mover of the second inertial motor, and the second stator of the second inertial motor is fixedly disposed on the conveying carrier plate of the conveying module; the second mover can move along the corresponding preset motion direction of the conveying module.

[0016] The beneficial effects that may be brought about by the embodiments of this specification include, but are not limited to: (1) Adopting a macro-micro dual-actuation mode, the coupling relationship between the clamping part and the conveying part is clearly analyzed at the physical mechanism level and decoupled. (2) Short-stroke micro-motion control is achieved through the clamping part, and long-stroke conveying is achieved through the conveying part, which helps to improve the conveying speed of the moving stage while ensuring the conveying stability. (3) The structure of the conveying stage provided by some embodiments of this specification is simple and easy to expand. (4) Using an inertial motor as the actuator of the moving stage improves the reliability and accuracy of the moving stage. (5) The inertial motor provided by some embodiments of this specification has a small and compact structure, effectively reducing the distance between the clamping part and the conveying part in the moving stage, which helps to miniaturize the moving stage. (6) Different structures of conveying modules are provided to meet different application requirements. It should be noted that the beneficial effects that may be produced by different embodiments are different. In different embodiments, the beneficial effects that may be produced can be any one or several combinations of the above, or any other beneficial effects that may be obtained. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] This specification will be further described by way of exemplary embodiments, which will be described in detail through the drawings. The same numbers in the drawings represent the same structures or steps.

[0018] Figure 1 is a schematic structural diagram of a moving stage according to some embodiments of this specification.

[0019] Figure 2 is a schematic structural diagram of a clamping part according to some embodiments of this specification.

[0020] Figure 3 is a schematic structural diagram of a clamping moving part according to some embodiments of this specification.

[0021] Figure 4 is a schematic structural diagram of a first inertial motor according to some embodiments of this specification.

[0022] Figure 5 is a schematic structural diagram of a first sliding part according to some embodiments of this specification.

[0023] Figure 6 is a schematic structural diagram of a first base according to some embodiments of this specification.

[0024] Figure 7 is a schematic diagram of a first driving module and its force analysis according to some embodiments of this specification.

[0025] Figure 8 is an assembly schematic diagram of a first base, a rib and a first driving module according to some embodiments of this specification.

[0026] Figure 9 is an assembly schematic diagram of a displacement sensor shown in some embodiments of this specification.

[0027] Figure 10 is a structural schematic diagram of a conveying module shown in some embodiments of this specification.

[0028] Figure 11 is a structural schematic diagram of a conveying module shown in some other embodiments of this specification.

[0029] Figure 12 is an assembly schematic diagram of a second inertial motor and a displacement sensor shown in some embodiments of this specification.

[0030] Figure 13 is an application scenario schematic diagram of a moving stage shown in some embodiments of this specification.

[0031] Markings in the figure: 1 clamping part; 11 clamping carrier plate; 12 clamping assembly; 12a - 12h clamping moving parts; 12i - 12l limiting support feet; 121 first inertial motor; 1211 first base; 1211A first groove; 1211B second groove; 1211C third groove; 1212 first sliding part; 1212A bearing surface; 1212B first friction surface; 1212C second guiding surface; 1213 driving module; 1213A second friction surface; 1214 guiding part; 1214A first guiding surface; 1215 rib; 122 clamping head; 13 support feet; 2 conveying part; 20 conveying module; 21 conveying carrier plate; 22 conveying moving components; 221 second stator; 222 second rotor; 23 driven moving components; 231 second base; 232 second sliding part; 3 workpiece; 4 displacement sensor; 41 signal conversion part; 42 signal receiving part; 5 mechanical claw; 6 image acquisition device; 71 piezoelectric driving part; 72 transmission part; 721 first wall; 722 connecting rod; 723 elastic retaining piece; 724 second wall; 725 through hole; 726 connecting part; 8 ball screw. Detailed implementation manners

[0032] To more clearly illustrate the technical solutions of the embodiments of this specification, the following will introduce the embodiments in detail with reference to the accompanying drawings. Obviously, the content described below is some examples or embodiments of this specification. For those of ordinary skill in the art, without creative efforts, the technical solutions or means disclosed in this specification can also be applied to other scenarios based on these technical contents.

[0033] It should be understood that the "system", "device", "unit" and / or "module" used in this specification is a way to distinguish different components, elements, parts, portions or assemblies at different levels. However, if other words can achieve the same purpose, the said words can be replaced by other expressions.

[0034] Unless otherwise specified, the technical terms describing components, elements, etc. in this specification do not specifically refer to the singular, but may also include the plural. Generally speaking, terms such as "include" and "comprise" only indicate the inclusion of the clearly identified steps, elements or components, and these steps, elements and components do not constitute an exclusive list. For example, the described method or device may also include other steps or components.

[0035] In the precision manufacturing process, the moving stage is the main equipment for realizing the transfer of the object to be detected or processed (or simply referred to as the workpiece). Taking the semiconductor integrated circuit manufacturing process as an example, it is necessary to drive the mask to move in more than one direction, so as to transport the mask from the first station to the second station. Further, it may be necessary to perform high-precision adjustment of the position of the mask at the second station to realize the adjustment and measurement of the relative position between it and the chip. To achieve the foregoing purposes, it is required that the moving stage can hold the mask, and then realize fast and highly stable transfer in more than one direction, and transfer the mask to the target position with high precision.

[0036] For this reason, some embodiments of this specification propose a workbench to perform fast, high-precision and highly stable transfer of the workpiece.

[0037] Figure 1 It is a schematic structural diagram of the moving stage shown in some embodiments of this specification. As Figure 1 shown, the moving stage provided by some embodiments of this specification includes a clamping part 1 and a transfer part 2. Among them, the clamping part 1 is used to clamp the workpiece 3, and the transfer part 2 is used to transfer the workpiece 3 to the target position. Among them, the target position can be a designated station in the production and manufacturing process, or can be a more specific fine movement position based on the designated station due to processing or detection needs. Specifically, for example, after the workpiece 3 reaches the designated station, due to detection or processing needs, it reaches one or more positions with a preset high-precision step at the designated station. As an example, after the mask is transferred to the second station, it needs to move in a specified direction according to a preset step (such as 200 μ μm) to achieve the measurement purpose. In some embodiments, the target position can also be any intermediate position during the workpiece transfer process.

[0038] In some embodiments, the conveying unit 2 includes more than one conveying module 20. More than one conveying module 20 can be stacked, and the clamping unit 1 can be stacked on the topmost conveying module 20. Specifically, when the conveying unit 2 includes a single conveying module 20, the clamping unit 1 can be stacked on this conveying module 20. When the conveying unit 2 includes two or more conveying modules 20, these conveying modules 20 can be stacked. For Figure 1 example, one conveying module 20 is stacked on another conveying module 20. In some other embodiments, when the conveying unit 2 further has a third conveying module 20, this third conveying module 20 can be stacked on the aforementioned another conveying module 20, and so on. In this embodiment, the clamping unit 1 can be stacked on the topmost conveying module 20.

[0039] Different conveying modules 20 can correspond to different preset movement directions. Continuing with Figure 1 as an example, the conveying module 20 located in the upper layer can correspond to movement in a direction parallel to the x-axis, and the conveying module 20 located in the lower layer can correspond to movement in a direction parallel to the y-axis. Specifically, movement in a direction parallel to a certain axis can be movement in the same or opposite direction along this axis. Among them, the x-axis and the y-axis can be orthogonal or non-orthogonal. For the convenience of example, this specification mainly describes the embodiment with the x-axis and the y-axis being orthogonal, but it should not be construed as a limitation on the scope described in this specification. In some embodiments, when it is necessary to transfer the workpiece 3 in more dimensional directions, the conveying module 20 can be increased. For example, on the basis of Figure 1 shown, a third conveying module 20 is added, and the corresponding preset movement direction can be a direction with the x-axis deflected 45° towards the y-axis. It can be understood that when only one conveying module 20 is included, the conveying unit 2 is a single-degree-of-freedom movement, and when two or more conveying modules 20 are included, the conveying unit 2 is a multi-degree-of-freedom movement.

[0040] Figure 10 and Figure 11 are respectively schematic structural diagrams of the conveying module shown in some embodiments of this specification. Referring to Figure 10 or Figure 11 , the conveying module 20 provided in some embodiments of this specification further includes a conveying carrier plate 21 and one or more conveying motion components 22 arranged on the conveying carrier plate 21. Among them, more than one conveying motion component 22 is used to drive the clamping unit located above its corresponding conveying module 20 or the conveying carrier plate of other conveying modules located above this conveying module 20 to move in the corresponding preset movement direction. Continuing to refer to Figure 1, the transfer carrier plate of the transfer module 20 located in the lower layer can be fixed on the workbench, and its transfer motion component can drive the transfer carrier plate of the transfer module 20 located in the upper layer to move in a direction parallel to the y-axis. The transfer carrier plate of the transfer module 20 located in the upper layer can be fixed on the transfer motion component of the transfer module 20 in its lower layer, and the transfer motion component of the transfer module 20 located in the upper layer can drive the clamping part 1 to move in a direction parallel to the x-axis. It is not difficult to understand that through the driving of the upper and lower transfer modules 20, the clamping part 1 can move in directions parallel to the x-axis and the y-axis respectively, and finally achieve the superimposed motion in the aforementioned two degrees of freedom.

[0041] The moving stage provided by some embodiments of this specification adopts a macro-micro dual-actuation mode, clearly analyzes the coupling relationship between the clamping part and the transfer part from the physical mechanism level, and realizes decoupling. Among them, decoupling can be understood as that the clamping part and the transfer part are driven and controlled by their respective actuators at the physical level, and the movement processes of the two are relatively independent. The transfer part provided by some embodiments of this specification realizes the transfer in one or more preset movement directions through one or more stacked transfer modules, and further realizes the superimposed movement of the clamping part in one or more degrees of freedom. Its structure is simple and easy to expand. For example, when it is necessary to increase the degrees of freedom of movement, the original transfer module can be stacked on the transfer module corresponding to the new preset movement direction.

[0042] Figure 2 is a schematic structural diagram of the clamping part shown in some embodiments of this specification. As Figure 2 shown, the clamping part 1 can further include a clamping carrier plate 11 and one or more clamping components 12 arranged on the clamping carrier plate 11, and the clamping components 12 are used to clamp the workpiece. In some embodiments, the clamping carrier plate 11 can be directly driven by the transfer module located in its lower layer. Refer to Figure 1 , the clamping carrier plate 11 can be stacked on the transfer module 20 in the upper layer. Specifically, the clamping carrier plate 11 can be fixedly arranged on the transfer motion component of the transfer module 20.

[0043] Refer to Figure 2, in some embodiments, the clamping carrier 11 includes a workpiece placement area, which can be the area on the clamping carrier 11 for placing the workpiece. As an example, the workpiece placement area can be a partial area on the clamping carrier 11. The workpiece placement area can be understood as a functional area divided on the upper surface of the clamping carrier 11, that is, the workpiece placement area is coplanar with the upper surface of the clamping carrier 11. In other embodiments, the workpiece placement area can protrude or sink relative to the upper surface of the clamping carrier 11, that is, the workpiece placement area is not coplanar with the upper surface of the clamping carrier 11. In some embodiments, the workpiece placement area can be the same as or approximate to the size and shape of the workpiece to be clamped. Exemplarily, the workpiece placement area can be a rectangular area, a circular area, etc. on the clamping carrier 11. When the clamping portion 1 clamps the workpiece, the workpiece placement area can be included in the orthographic projection area of the workpiece on the clamping carrier 11.

[0044] In some embodiments, the clamping portion 1 can include more than one support foot 13, and the support foot 13 can be arranged in the workpiece placement area to support the workpiece. Specifically, the workpiece 3 to be clamped can be supported by the support foot 13 to avoid direct contact with the surface of the clamping carrier 11. In actual application, suspending the workpiece for support can reduce the contact area between the workpiece and other components during the processing, reduce the probability of the workpiece surface being worn or scratched, and improve the yield of the production line. In some embodiments, the support foot 13 can be a column with a relatively small cross-section, and the upper surface of the support foot 13 (such as the surface in contact with the workpiece) can be made of a flexible material, which can reduce the contact area with the workpiece while maximally avoiding wearing the workpiece surface. Exemplary flexible materials can be silk, cotton cloth, silicone, etc. In some embodiments, the support feet can be placed along the edge of the workpiece placement area, such as at the vertices of a rectangular workpiece placement area. In other embodiments, the support feet can be placed in the middle of the workpiece placement area, such as at the center of the workpiece placement area. The number of support feet can be flexibly configured according to actual needs. Exemplarily, it can be 1, 2 or more.

[0045] In some embodiments, the clamping assembly 12 can include two or more clamping moving parts arranged oppositely, or include a clamping moving part and a limiting support foot arranged oppositely. The two or more clamping moving parts arranged oppositely or the clamping moving part and the limiting support foot cooperate to clamp the workpiece.

[0046] In some embodiments, the clamping assembly 12 can include two or more clamping moving parts arranged oppositely in a certain direction. Figure 2As an example, the clamping assembly 12 may include a clamping moving member 12a and a clamping moving member 12f disposed opposite to each other, or the clamping assembly 12 may include the clamping moving member 12a, the clamping moving member 12f, the clamping moving member 12b, and the clamping moving member 12e disposed opposite to each other in pairs, or the clamping assembly 12 may include the clamping moving member 12a, the clamping moving member 12b, and the clamping moving member 12f disposed on the opposite side thereof. At this time, the clamping moving member 12f may correspond to the interval area between the clamping moving member 12a and the clamping moving member 12b, thereby improving the clamping stability. In some embodiments, the clamping assembly 12 may further include more than two clamping moving members disposed opposite to each other in another direction. Continuing with Figure 2 As an example, the clamping assembly 12 may further include a clamping moving member 12c and a clamping moving member 12h disposed opposite to each other, or the clamping assembly 12 may further include the clamping moving member 12c, the clamping moving member 12h, the clamping moving member 12d, and the clamping moving member 12g disposed opposite to each other in pairs, or the clamping assembly 12 may further include the clamping moving member 12c, the clamping moving member 12d, and the clamping moving member 12h disposed on the opposite side thereof. At this time, the clamping moving member 12h may correspond to the interval area between the clamping moving member 12c and the clamping moving member 12d.

[0047] In some embodiments, more than two clamping moving members disposed opposite to each other may be disposed opposite to each other with an interval from the workpiece placement area. The clamping moving member has a clamping head capable of moving in a direction toward or away from the workpiece placement area. The moving directions of the clamping heads of the clamping moving members disposed opposite to each other with an interval from the workpiece placement area face each other or away from each other. In this way, the clamping moving members disposed opposite to each other can cooperate with each other to clamp or release the workpiece. Taking Figure 2 As an example, when the clamping heads of the clamping moving member 12a, the clamping moving member 12b, the clamping moving member 12f, and the clamping moving member 12e move in the direction toward the workpiece placement area at the same time, the workpiece 3 can be clamped on the y-axis. When the clamping heads of the clamping moving member 12a, the clamping moving member 12b, the clamping moving member 12f, and the clamping moving member 12e move in the direction away from the workpiece placement area at the same time, the workpiece 3 can be released on the y-axis.

[0048] It should be understood that the number and placement position of the clamping moving members can be flexibly set according to needs. For example, in Figure 2Based on the illustrated embodiments, only the clamping moving members oppositely arranged at intervals on the x-axis or y-axis with respect to the workpiece placement area may be retained. Further, the clamping moving members oppositely arranged at intervals on the remaining single direction with respect to the workpiece placement area may be one on each side, or one on one side and two or more on the other side. For another example, the straight line where the clamping moving member 12a and the clamping moving member 12f oppositely arranged at intervals on the x-axis with respect to the workpiece placement area is parallel or non-parallel to the y-axis, and so on. Such deformations should all be understood as embodiments within the scope described in this specification.

[0049] In some alternative embodiments, the clamping assembly 12 may include a clamping moving member and a limiting support foot oppositely arranged in a certain direction. The limiting support foot may be arranged along the boundary of the workpiece placement area and have a stop extending beyond the boundary, and the stop is configured to abut against the side surface of the workpiece. Taking a rectangular workpiece placement area as an example, the limiting support foot may be arranged at the vertex of the workpiece placement area or at the midpoint of the side of the workpiece placement area. In some embodiments, the limiting support foot may have a support portion and a stop, and the two may be fixed together by bonding, welding, riveting or integral molding. In some embodiments, the limiting support foot may have an inverted L-shaped appearance. One side of the inverted L-shaped limiting support foot is fixed on the clamping carrier plate 11 as a support foot, and the other side is used as a stop and is configured to abut against the side surface of the workpiece.

[0050] Taking Figure 2 as an example, the clamping assembly 12 may include the oppositely arranged clamping moving member 12a and the limiting support foot 12l, or the clamping assembly 12 may include the clamping moving member 12a, the clamping moving member 12b and the limiting support foot 12l arranged on the opposite side thereof. At this time, the limiting support foot 12l may correspond to the interval area between the clamping moving member 12a and the clamping moving member 12b, or the clamping assembly 12 may include the oppositely arranged clamping moving member 12f and the limiting support foot 12i, or the clamping assembly 12 may include the clamping moving member 12f, the clamping moving member 12e and the limiting support foot 12i arranged on the opposite side thereof. At this time, the limiting support foot 12i may correspond to the interval area between the clamping moving member 12e and the clamping moving member 12f. In some embodiments, the clamping assembly 12 may further include a clamping moving member and a limiting support foot oppositely arranged in another direction. Continuing to take Figure 2 as an example, the clamping assembly 12 may include the oppositely arranged clamping moving member 12h and the limiting support foot 12j, or the clamping assembly 12 may include the clamping moving member 12h, the clamping moving member 12g and the limiting support foot 12j arranged on the opposite side thereof. At this time, the limiting support foot 12j may correspond to the interval area between the clamping moving member 12h and the clamping moving member 12g, or the clamping assembly 12 may further include the clamping moving members 12h, the limiting support foot 12j, the clamping moving members 12g and the limiting support foot 12k arranged oppositely in pairs.

[0051] In some embodiments, the oppositely arranged clamping moving members and limiting support feet may be arranged opposite to each other with an interval therebetween in the workpiece placement area. The clamping moving member has a clamping head capable of moving in a direction towards or away from the workpiece placement area. In this way, the oppositely arranged clamping moving members and limiting support feet can cooperate with each other to clamp or release the workpiece. For Figure 2 example, when the clamping heads of the clamping moving members 12h and 12g move simultaneously in the direction towards the workpiece placement area, the workpiece 3 can be pushed towards the limiting support feet 12j and 12k on the x-axis, so that one side surface of the workpiece 3 abuts against the limiting support feet 12j and 12k, and the workpiece 3 is clamped on the x-axis. When the clamping heads of the clamping moving members 12h and 12g move simultaneously in the direction away from the workpiece placement area, the workpiece 3 can be released on the x-axis.

[0052] It should be understood that the number and placement positions of the clamping moving members and the limiting support feet can be flexibly set as needed. In some embodiments, when the clamping assembly includes two or more oppositely arranged clamping moving members, limiting support feet can still be additionally arranged on one side or each side of the opposite sides, so as to limit the workpiece while clamping the workpiece, and improve the stability of the workpiece.

[0053] For Figure 2 example, there are 8 clamping moving members 12a, 12b, 12c, 12d, 12e, 12f, 12g, and 12h arranged on the clamping carrier 11. The clamping moving members 12a and 12b are arranged in sequence along the x-axis based on the first side of the workpiece placement area, the clamping moving members 12c and 12d are arranged in sequence along the y-axis based on the second side of the workpiece placement area, the clamping moving members 12e and 12f are arranged in sequence along the x-axis based on the third side of the workpiece placement area, and the clamping moving members 12g and 12h are arranged in sequence along the y-axis based on the fourth side of the workpiece placement area. Among them, the clamping moving members 12a and 12b respectively present a mirror image relationship with respect to the x-axis with the clamping moving members 12f and 12e, and the clamping moving members 12c and 12d respectively present a mirror image relationship with respect to the y-axis with the clamping moving members 12h and 12g.

[0054] The limiting support foot 12i is placed based on the midpoint of the first side of the workpiece placement area, the limiting support feet 12j and 12k are respectively placed based on the two vertices on the second side of the workpiece placement area, the limiting support foot 12l is placed based on the midpoint of the third side of the workpiece placement area, and the two support feet 13 are respectively placed based on the two vertices on the fourth side of the workpiece placement area. The support feet play a role in carrying the workpiece 3, and the limiting support feet simultaneously play a role in supporting the workpiece and facilitating the assembly of the workpiece.

[0055] The inertial motor adopts the working principle of viscous slip, has a self-locking function, and can be equipped with a displacement closed-loop servo control ability in cooperation with a displacement sensor, thereby achieving high position positioning accuracy and meeting the performance index of high speed. In view of this, some embodiments of this specification adopt an inertial motor as an actuator.

[0056] In some embodiments, the clamping head for clamping the moving part can be driven by a first inertial motor, so as to move in a direction towards or away from the workpiece placement area. Figure 3 It is a schematic structural diagram of the clamping moving part shown in some embodiments of this specification. As Figure 3 shown, the clamping moving part may further include a first inertial motor 121 and a clamping head 122. The clamping head 122 is detachably assembled on the first mover of the first inertial motor 121, and the first stator of the first inertial motor 121 is fixedly arranged on the clamping carrier plate 11. As an example, the clamping head 122 can be fixed on the first mover of the first inertial motor 121 by means of snap connection, screw connection, etc. The first mover can move in a direction parallel to the x1 axis to drive the clamping head 122 to move. Among them, the x1 axis can be parallel to the aforementioned x axis or y axis, or can indicate any direction other than the x axis or y axis. The clamping head and the first mover are detachably assembled, and the clamping head can be conveniently replaced according to different workpieces and application scenarios to adapt to different work requirements, and it is also beneficial to the daily maintenance of the moving table.

[0057] Figure 4 It is a schematic overall structural diagram of the first inertial motor shown in some embodiments of this specification. The first inertial motor provided by some embodiments of this specification includes: a first base 1211, a first sliding member 1212, and a first driving module 1213. Among them, the first sliding member 1212 is slidably matched with the first base 1211 and can slide along a first direction. The first base 1211 can be regarded as the first stator of the first inertial motor, and the first sliding member 1212 can be regarded as the first mover of the first inertial motor. The first direction can be any specified direction. As an example, the first direction can be the x1 direction shown in the figure or its reverse direction (hereinafter mainly taking the first direction as the x1 direction as an example for description). The first sliding member 1212 is provided with a bearing surface 1212A for bearing the load, and the bearing surface 1212A can be provided with screw holes, such as Figure 3As shown, the clamping head 122 can be fixedly arranged on the bearing surface 1212A through screws. The first sliding member 1212 is further provided with a first friction surface 1212B, which is perpendicular to the bearing surface 1212A. The first driving module 1213 can include a piezoelectric driving part, a transmission part, and a second friction surface. The first driving module 1213 can be located on the first base 1211 and on one side of the first friction surface 1212B, so that the second friction surface is in frictional contact with the first friction surface 1212B. The piezoelectric driving part deforms under the action of an electric signal, and this deformation can be transmitted to the second friction surface through the transmission part to drive the second friction surface to move in the first direction, and then drive the first sliding member 1212 to slide in the first direction through frictional contact with the first friction surface 1212B.

[0058] Since the first friction surface of the motor is perpendicular to the bearing surface, the load force acting on the bearing surface will not provide the normal pressure required for the friction surface to generate frictional force, thereby decoupling the forces on the bearing surface and the friction surface (such as the force on the bearing surface will not affect or interfere with the force on the friction surface, and vice versa), avoiding the influence of the change in the load force on the working performance of the motor.

[0059] In some embodiments, in order to make the first sliding member slide stably along a preset trajectory (such as in a direction parallel to the x direction), the first inertial motor can further include a guiding member. The guiding member is fixed on the first base, and the first guiding surface of the guiding member is slidably connected to the second guiding surface of the first sliding member through a track extending in the first direction. In some embodiments, the guiding member can be single or two. Continuing to refer to Figure 4 , Figure 4 the motor shown has two guiding members 1214. The two guiding members 1214 are arranged on the first base 1211 at intervals in a second direction perpendicular to the first direction (such as Figure 4 the y1 direction shown), and the first guiding surfaces 1214A of the two guiding members 1214 are arranged oppositely. The first sliding member 1212 is located between the two guiding members 1214, and second guiding surfaces 1212C are respectively arranged on the two sides of the first sliding member 1212 opposite to the two guiding members 1214. The two second guiding surfaces 1212C of the first sliding member 1212 are respectively slidably connected to the first guiding surfaces 1214A of the two guiding members 1214 through tracks, so as to restrict the movement direction of the first sliding member 1212. In some embodiments, the two second guiding surfaces 1212C of the first sliding member 1212 and the first guiding surfaces 1214A of the two guiding members 1214 can respectively achieve sliding fit through crossed roller guides.

[0060] Figure 5 is a schematic structural diagram of the first sliding member shown in some embodiments of the present specification, which shows the side of the first sliding member opposite to the bearing surface shown in some embodiments of the present specification from a bottom view perspective. AsFigure 5 As shown, the first sliding member 1212 is located between two guiding members 1214. On the side of the sliding member 1212 opposite to the bearing surface 1212A, there is a rib 1215 extending in the first direction. A first friction surface 1212B is provided on one side of the rib 1215. In some embodiments, the cross-section of the rib 1215 can be rectangular, trapezoidal, etc., so that the rib 1215 has relatively flat sides, and then the first friction surface 1212B can be arranged. The rib 1215 can be fixed to the sliding member 1212 by means of bonding, welding, screw connection, integral molding, etc.

[0061] In some embodiments, the first friction surface 1212B can be made of friction materials such as ceramic bodies, glass fibers, and semi-metals. Technologies such as plating or integral molding can be used to fix the first friction surface 1212B on the side of the rib 1215. The surface of the first friction surface 1212B can be flat or a non-flat surface provided with pits, mesh patterns, etc.

[0062] In some embodiments of this specification, ribs are provided on the first sliding member to install the first friction surface, which can create more space for the layout of the aforementioned crossed roller guide. At the same time, the first driving module and the friction surface for realizing friction drive can be arranged below the bearing surface of the first sliding member, making the overall structure of the motor more compact and small.

[0063] Figure 6 is a schematic structural diagram of the first base according to some embodiments of this specification. As Figure 6 shown, a first groove 1211A and a second groove 1211B are provided on the first base 1211. Among them, the shape of the first groove 1211A is adapted to the rib 1215 to accommodate the rib 1215. The second groove 1211B can be rectangular, trapezoidal, etc. to accommodate the first driving module 1213. In some embodiments, the second groove 1211B can have sufficient depth so that when the first driving module 1213 is placed in the second groove 1211B, the upper side of the first driving module 1213 does not protrude from the upper surface of the first base 1211. The depth of the first groove 1211A can be the same as or different from that of the second groove 1211B. In some embodiments, the depth of the first groove 1211A can be consistent with the height of the rib 1215. Such a setting can make the rib 1215 basically located within the first groove 1211A, effectively reducing the size of the motor in the vertical direction and making the motor structure more compact and small. Continue to refer to Figure 3, the first groove 1211A and the second groove 1211B are in communication with each other, that is, there is a communication gap between them. When the convex strip 1215 is located in the first groove 1211A and the first driving module 1213 is placed in the second groove 1211B, the second friction surface of the first driving module 1213 can be in frictional contact with the first friction surface 1212B on the convex strip 1215 through this communication gap.

[0064] Figure 7 is a schematic diagram of the first driving module and its force analysis according to some embodiments of this specification. As Figure 7 shown, the first driving module 1213 may include a piezoelectric driving part 71, a transmission part 72, and a second friction surface 73. The second friction surface 1213A is located on the transmission part 72. The deformation of the piezoelectric driving part 71 can be transmitted to the second friction surface 1213A through the transmission part 72 to drive the second friction surface 1213A to move in the first direction. In some embodiments, similar to the first friction surface 1212B, the second friction surface 1213A can be made of friction materials such as ceramic bodies, glass fibers, and semi-metals. The second friction surface 1213A can be fixed on the transmission part 72 by techniques such as plating or integral molding. The surface of the second friction surface 1213A can be flat or a non-flat surface provided with pits, mesh patterns, etc.

[0065] Piezoelectric materials are materials that can utilize the piezoelectric effect to achieve the mutual conversion of mechanical energy and electrical energy and have an actuation function under the excitation of specific conditions. The inertial motor shown in some embodiments of this specification is driven by piezoelectric materials. Due to the non-magnetic and non-thermal characteristics of piezoelectric materials, it effectively avoids the interference of motor magnetic leakage and heat generation on the movement of the moving stage, and at the same time enables the moving stage to be suitable for working in a vacuum environment.

[0066] Continue to refer to Figure 7 , the first driving module 1213 includes a first wall 721, and the first wall 721 has an inclined surface with an angle less than 90° relative to the second friction surface 1213A. When a force F acts on the inclined surface of the first wall 721, this inclined surface can decompose the force F into a first component force F1 parallel to the second friction surface 1213A and a second component force F2 perpendicular to the second friction surface 1213A. Among them, the first component force F1 can provide a pre-tightening force for the deformation of the piezoelectric driving part 71, and the second component force F2 can provide a normal pressure for the frictional contact between the second friction surface 1213A and the first friction surface 1212B. It can be seen that the inclined surface design of the first wall can decompose a single force into the pre-tightening force and the normal pressure required for piezoelectric material deformation and frictional drive respectively, so that the frictional force no longer depends on the load force, while simplifying the motor structure, improving the performance stability of the motor. In some embodiments, the angle between the inclined surface and the second friction surface 1213A α can be adjusted according to the required magnitude of the component force. Specifically, this angleα It can be taken from the numerical range [30, 90), or from the numerical range [60, 85]. Exemplarily, the included angle α can be 80°, 75°, 72°, etc.

[0067] In some embodiments, the force acting on the inclined surface of the first wall 721 can be provided by a structure that abuts against it. Continuing to refer to Figure 7 , the ball head end of the ball screw 8 can be abutted against this inclined surface to provide the force F. The ball screw 8 is connected to the first base 1211 in a threaded fit manner. By rotating the ball screw 8, its tightening degree against the inclined surface can be adjusted, thereby changing the magnitude of the force F. By abutting the ball head end of the ball screw 8 against the inclined surface, the generated force F can be perpendicular to the inclined surface, so that the component forces of the force F can all be used by the first driving module 3, and no other component forces that affect the performance stability of the motor will be generated.

[0068] As Figure 7 shown, in some embodiments, the transmission part 72 in the first driving module 1213 can further include a first wall 721, a connecting rod 722, an elastic retaining piece 723, and a second wall 724 arranged in sequence along the first direction.

[0069] In some embodiments, the first wall 721 and the second wall 724 can be made of materials with a certain rigidity such as metal and plastic. The bottoms of the first wall 721 and the second wall 724 can be connected to each other or integrally formed through a connecting part 726. The elastic retaining piece 723 is arranged opposite to the second wall 724 to at least cooperate with the second wall 724 to form a driving part accommodating area for accommodating the piezoelectric driving part 71. The elastic retaining piece 723 can be a thin sheet with both a certain stiffness and flexibility. For example, the elastic retaining piece 723 can be a metal thin sheet, and its thickness can be 1.5 mm, 1 mm, 0.5 mm, etc. The bottom edge of the elastic retaining piece 723 can be fixed on the connecting part 726 between the first wall 721 and the second wall 724. In some embodiments, the piezoelectric driving part 71 can be placed between the elastic retaining piece 723 and the second wall 724. When the piezoelectric driving part 71 deforms along the first direction, one side of it abuts against the second wall 724, and the other side can push the elastic retaining piece 723. In some other embodiments, one side of the piezoelectric driving part 71 can be fixed on the second wall 724, and the other side is placed opposite to the elastic retaining piece 723. When the piezoelectric driving part 71 deforms along the first direction, the side opposite to the elastic retaining piece 723 can push the elastic retaining piece 723. In still some other embodiments, both sides of the piezoelectric driving part 71 can be fixedly connected to the second wall 724 and the elastic retaining piece 723 respectively. Since the second wall 724 has a greater stiffness than the elastic retaining piece 723, when the piezoelectric driving part 71 deforms, the elastic retaining piece 723 can be pushed.

[0070] One end of the connecting rod 722 is fixedly connected to the elastic retaining piece 723, and the other end is connected to the first wall 721 through at least a first elastic structure. The first elastic structure can elastically deform along the first direction. The second friction surface 1213A is arranged on the connecting rod 722. In some embodiments, the material of the connecting rod 722 can be the same as that of the elastic retaining piece 723, and the two are integrally formed. In other embodiments, the connecting rod 722 can be made of plastic, ceramic, wood, etc., and can be fixedly connected to the elastic retaining piece 723 by bonding, welding or the like. In some embodiments, the first elastic structure can be a structure such as a spring or a spring piece, or can be a flexible hinge.

[0071] When the elastic retaining piece 723 is pushed along the first direction, since the connecting rod 722 is fixedly connected to the elastic retaining piece 723 and elastically connected to the first wall 721, the connecting rod 722 will be pushed along the first direction at the same time. Thus, the second friction surface 1213A arranged on the connecting rod 722 will also move along the first direction.

[0072] In some embodiments, the piezoelectric driving part 71 includes a piezoelectric stack formed by arranging more than one piezoelectric sheet along the first direction. The piezoelectric sheet can be a thin sheet made of piezoelectric ceramic or piezoelectric film. When different-direction electrical signal excitations are applied, the piezoelectric sheet can bulge towards different sides of itself. In some embodiments, the front and back sides of each piezoelectric sheet can be adjusted so that the front and back sides of more than one piezoelectric sheet in the piezoelectric stack face the same direction. When the piezoelectric stack is excited by an electrical signal, each piezoelectric sheet can simultaneously bulge along the first direction or the reverse direction of the first direction. Macroscopically, the piezoelectric driving part 71 deforms along the first direction. In some embodiments, each piezoelectric sheet can be bonded together by an adhesive or each piezoelectric sheet can be bonded together in a molten state to form a piezoelectric stack. In some embodiments, there are gaps with a certain width between the piezoelectric sheets to varying degrees. When the piezoelectric sheet deforms, these gaps will consume part of the deformation. That is to say, the deformation of the piezoelectric sheet will first fill these gaps, and then the piezoelectric stack will show deformation along the first direction. Therefore, in some embodiments, it is necessary to provide a certain pre-tightening force (such as the aforementioned first component force F1) for the piezoelectric driving part 71, and this pre-tightening force can significantly reduce the gaps between the piezoelectric sheets and improve the deformation efficiency of the piezoelectric driving part 71.

[0073] Figure 8 is an assembly schematic diagram of the first base, the convex strip and the first driving module shown in some embodiments of this specification. The first driving module 1213 can be placed in the second groove 1211B of the first base 1211. In some embodiments, the transmission part 72 can be positioned in the second groove 1211B by means of hole-shaft cooperation. Refer to Figure 6 , a positioning rod is fixedly arranged in the second groove 1211B. Refer to Figure 7, a through hole 725 is formed in the connecting portion 726 of the transmission portion 72. The through hole 725 can be sleeved on the positioning rod, thereby preventing the first driving module 1213 from shifting in the second groove 1211B. In some embodiments, the lateral distance from the through hole 725 to the second wall 724 and the distance from the positioning rod to the second side wall of the second groove 1211B can be adjusted such that when the through hole 725 is sleeved on the positioning rod, the second wall 724 just contacts or substantially contacts the second side wall. As Figure 8 shown, the ball head end of the ball screw 8 can be screwed out from the first side wall of the second groove 1211B to abut against the first wall 721. Wherein, the first side wall and the second side wall are opposite side walls in the second groove 1211B. As Figure 8 shown, after the first base, the sliding member and the first driving module are assembled, the rib 1215 of the sliding member is located in the first groove 1211A, the first driving module 1213 is located in the second groove 1211B, and the second friction surface 1213A of the first driving module 1213 can be opposite to the first friction surface 1212B on the rib 1215 through the communication notch. In some embodiments, a threaded hole is formed in the base 1211, and the threaded hole extends through the outer side surface of the base 1211 and the first side wall of the second groove 1211B along the first direction. The inner wall of the threaded hole has threads, and the ball screw 8 can be screwed into the threaded hole from the outer side surface of the base 1211. By rotating and pushing the ball screw 8, its ball head end can be further screwed out of the threaded hole and abutted against the inclined surface of the first wall 721 of the first driving module 1213, thereby pushing the first driving module 1213 towards the second side wall of the second groove 1211B, so that its second wall 724 abuts against the second side wall of the second groove 1211B. Such a setting can further prevent the first driving module 1213 from slipping along the first direction. When the piezoelectric driving portion 71 deforms, the second friction surface 1213A can be stably driven. On the other hand, when the ball head end of the ball screw 8 is screwed out of the threaded hole and abuts against the inclined surface of the first wall 721 of the first driving module 1213, the second friction surface 1213A of the first driving module 1213 can also be pushed towards the direction close to the first friction surface 1212B, so that the two friction surfaces are in frictional contact.

[0074] In order to achieve measurement, in some embodiments, the moving stage may further include a displacement sensor. In some embodiments, the displacement sensor can be assembled in the first inertial motor. Figure 9 is an assembly schematic diagram of the displacement sensor shown in some embodiments of this specification. As Figure 9As shown, a third groove 1211C is further provided on the first base 1211 of the first inertial motor. The signal conversion part 41 of the displacement sensor 4 can be arranged on the first sliding part 1212 and extend along the first direction, and the signal receiving part 42 is located in the third groove 1211C. The signal conversion part 41 is used to convert the displacement of the first sliding part 1212 into a signal recognizable by the signal receiving part 42, such as an optical signal, an electrical signal, etc. The signal receiving part 42 is used to receive the foregoing signal to obtain displacement information. As an example, the displacement sensor 4 can be a grating scale, the signal conversion part 41 can be the scale grating of the grating scale, and the signal receiving part 42 can be the grating reading head of the grating scale. The grating scale can be divided into a transmission grating and a reflection grating. Taking the transmission grating as an example, when the first sliding part 1212 moves in the direction parallel to the x1 axis and moves one grating pitch, the Moiré fringes generated by the scale grating located thereon change in light and dark alternately once. The grating reading head can convert the change of the Moiré fringes into a pulsed electrical signal. By counting the pulses through a controller or a processor, the number of changes of the Moiré fringes can be obtained, and based on the grating pitch, the displacement of the first sliding part 1212 can be calculated. In some embodiments, the scale grating can be fixed to the side of the first sliding part 1212 opposite to the bearing surface 1212A by means of bonding, etc. The third groove 1211C can be opened in the orthographic projection area of the scale grating on the first base 1211. Thus, after the grating reading head is arranged in the third groove 1211C, the grating signal can be obtained.

[0075] Integrating a displacement sensor into the first inertial motor can endow the motor with precise displacement positioning ability, thereby providing a basis for the precise positioning or measurement of workpieces. At the same time, it can make the structure of the workbench more compact, reduce the interference of the outside world on the displacement sensor, and improve the accuracy of displacement detection.

[0076] Figure 10 It is a schematic structural diagram of a conveying module shown according to some embodiments of this specification. In some embodiments, the conveying motion component 22 of the conveying module 20 is single. To improve the smoothness of conveying, the conveying module 20 further includes a driven motion component 23 arranged on its conveying carrier plate 21. The driven motion component 23 cannot move independently and moves following other components (such as the conveying motion component 22).

[0077] As Figure 10 shown, the conveying motion component 22 and the driven motion component 23 can be along a second direction perpendicular to the preset motion direction corresponding to the conveying module 20 (such as parallel to Figure 10 the direction of the y2 axis shown) Figure 10They are sequentially arranged on the transfer carrier plate 21 along the direction of the x2 axis shown, and the driven motion assembly 23 can move driven by the transfer motion assembly 22. In some embodiments, the spacing distance between the transfer motion assembly 22 and the driven motion assembly 23 is greater than a set value, so that the two can be symmetrically and evenly distributed on the transfer carrier plate 21, making the upper transfer module or the clamping part driven by it more stable.

[0078] In some embodiments, the transfer motion assembly 22 includes a second inertia motor. The second mover 222 of the second inertia motor can move along the preset motion direction corresponding to the transfer module 20. The clamping carrier plate on the upper layer of the transfer module 20 or the transfer carrier plate of other transfer modules is detachably assembled on the second mover 222 of the second inertia motor, and the second stator 221 of the second inertia motor is fixedly arranged on the transfer carrier plate 21 of the transfer module 20. In some embodiments, the second inertia motor may have the same or similar structure as the first inertia motor, and the sliding member and the base of the second inertia motor may have a greater length than those of the first inertia motor, so as to meet the long-distance transfer requirements. For the specific description of the structure of the second inertia motor, reference can be made to the relevant description of the first inertia motor, which will not be elaborated here.

[0079] It should be noted that although the resolution of the inertia motor can reach the nanometer level, under the single working condition of a long stroke, its position error will be amplified to a certain extent, that is, using the same inertia motor cannot meet the high-speed requirements during long-stroke actuation and the high-precision positioning requirements during short-stroke actuation at the same time. However, the motion stage in some embodiments of this specification cannot only have the ability of long-stroke transfer, but also need to have the ability of high-precision micro-motion adjustment. Therefore, in some embodiments of this specification, the coupling relationship between the clamping part and the transfer part is decoupled from the physical mechanism level. The long-stroke second inertia motor is used to provide power for the transfer part to achieve long-stroke high-speed motion control, combined with the short-stroke first inertia motor to provide power for the clamping part to achieve high-precision and high-speed micro-motion adjustment, so that the motion stage has the performances of long stroke, high precision and high speed at the same time.

[0080] Continue to refer to Figure 10, the driven motion component 23 may further include a second base 231 and a second slider 232. The second slider 232 is slidably engaged with the second base 231 and is capable of sliding along a corresponding preset motion direction of the transfer module 20. The bearing surface of the second slider 232 is detachably assembled with the clamping carrier plate located on the upper layer of the transfer module 20 or the transfer carrier plate of another transfer module, and the second base 231 is disposed on the transfer carrier plate of the transfer module 20. In some embodiments, the driven motion component 23 may have the same or similar structure as the second inertial motor, except that the driven motion component 23 does not have a driving module. In some embodiments, another second inertial motor may be used as the driven motion component while making its driving module inoperative. In some embodiments, the second slider and the second base may have the same length as the slider and the base of the second inertial motor. Regarding the second slider, the second base, and their mating relationship, reference may be made to the relevant description of the first inertial motor, which will not be elaborated herein.

[0081] Figure 11 is a schematic structural diagram of the transfer module shown in some other embodiments of this specification. In some embodiments, there may be two transfer motion components 22 of the transfer module 20.

[0082] As Figure 11 shown, the two transfer motion components 22 are sequentially disposed on the transfer carrier plate 21 along a second direction (such as a direction parallel to the Figure 11 x2 axis shown) perpendicular to the corresponding preset motion direction of the transfer module 20 (such as a direction parallel to the Figure 11 y2 axis shown). In some embodiments, the spacing distance between the two transfer motion components 22 is greater than a set value, so that they can be symmetrically and evenly distributed on the transfer carrier plate 21, making the upper transfer module or the clamping part driven by them more stable.

[0083] In some embodiments, the transfer motion component 22 includes a second inertial motor. The clamping carrier plate located on the upper layer of the transfer module 20 or the transfer carrier plate of another transfer module is detachably assembled on the second mover 222 of the second inertial motor. The second stator 221 of the second inertial motor is fixedly disposed on the transfer carrier plate 21 of the transfer module 20, and the second mover 222 is capable of moving along the corresponding preset motion direction of the transfer module 20. In some embodiments, the second inertial motor may have the same or similar structure as the first inertial motor. The slider and the base of the second inertial motor may have a greater length than the slider and the base of the first inertial motor, so as to meet the long-distance transfer requirements. For the specific description of the structure of the second inertial motor, reference may be made to the relevant description of the first inertial motor, which will not be elaborated herein. In some embodiments, in order to improve the transfer stability, the two transfer motion components 22 are synchronously controlled.

[0084] Using two transfer motion components can increase the load-carrying capacity of the transfer module; using one transfer motion component and one driven motion component can simplify the control process of the transfer module and avoid the interlocking control of more than two drive motion components. In some embodiments, different transfer modules in the moving table can be implemented using the same structure, such as they can all adopt Figure 10 or Figure 11 shown structure to implement. In other embodiments, different transfer modules in the moving table can be implemented using different structures. For example, Figure 1 the upper transfer module in Figure 10 adopts the structure shown to implement, and the lower transfer module adopts Figure 11 shown structure to implement, so as to improve its load-carrying capacity.

[0085] In some embodiments, a displacement sensor can also be built into the second inertial motor. Figure 12 is an assembly schematic diagram of the second inertial motor and the displacement sensor shown in some embodiments of this specification. Similar to the first inertial motor, a signal conversion part 41 of the displacement sensor 4 can be arranged on the side of the second mover 222 (such as a sliding part) of the second inertial motor opposite to the bearing surface, and a groove can be opened on the second stator 221 (such as a base) to install the signal receiving part 42 of the displacement sensor 4. For more descriptions about the assembly of the displacement sensor and the second inertial motor, reference can be made to the relevant content of the first inertial motor, which will not be elaborated here.

[0086] Figure 13 is an application scenario schematic diagram of the moving table shown in some embodiments of this specification. Figure 13 The station A shown can be an assembly station, and the workpiece 3 is fed in or out at station A. The station B can be a working station, and the workpiece 3 is processed or detected at station B.

[0087] At station A, the workpiece 3 can be transferred by the mechanical claw 5 to the clamping part of the moving table, and specifically can be placed on the support feet or limit support feet on the clamping part 1 by the mechanical claw 5. The clamping moving part of the clamping part 1 or the cooperation of the clamping moving part and the limit support feet clamp and adjust the position of the workpiece 3.

[0088] The transfer part 2 of the moving table transfers the workpiece 3 to station B.

[0089] At station B, the workpiece 3 is always clamped by the clamping part 1 and its pose is adjusted. At the same time, the workpiece 3 is driven by the conveying part 2 to move in a direction parallel to the x-axis or y-axis. The image acquisition device 6 can identify and collect data on the patterns or marks on the surface of the workpiece 3. Further, it is possible to determine whether the workpiece 3 is within the processing or inspection range based on the patterns or marks of the workpiece 3 collected by the image acquisition device 6, and control the inertial motors of the conveying part 2 and / or the clamping part 1 to continuously move according to the difference between the actual position value and the target position value of the workpiece 3, thereby controlling the precise position of the workpiece 3 until the workpiece 3 moves into the processing or inspection range.

[0090] After the processing or inspection is completed at station B, the conveying part 2 conveys the workpiece 11 to station A. The clamping part 1 releases the workpiece 3, and the workpiece is replaced by the unloading gripper, and the processed or inspected workpiece is conveyed out.

[0091] The basic concepts have been described above. Obviously, for those skilled in the art, the above detailed disclosure is only an example and does not constitute a limitation to this specification. Although not explicitly stated here, those skilled in the art may make various modifications, improvements, and corrections to this specification. Such modifications, improvements, and corrections are taught in this specification, so such modifications, improvements, and corrections still fall within the spirit and scope of the exemplary embodiments of this specification.

Claims

1. A sports table, characterized in that: It comprises a clamping part (1) and a conveying part (2); The clamping portion (1) comprises a clamping carrier plate (11) and one or more clamping components (12) arranged on the clamping carrier plate (11), wherein the clamping components (12) are used to clamp a workpiece; The conveying portion (2) comprises a conveying module (20) or two or more conveying modules (20) arranged in a stacked manner, wherein different conveying modules (20) correspond to different preset movement directions; the clamping portion (1) is stacked on the conveying module (20) or the uppermost conveying module of the two or more conveying modules (20); The conveying module (20) comprises a conveying carrier (21) and one or more conveying motion components (22) arranged on the conveying carrier (21), wherein the one or more conveying motion components (22) are used to drive a clamping carrier located on an upper layer of the conveying module (20) or a conveying carrier of another conveying module located on an upper layer of the conveying module (20) to move in a corresponding preset movement direction.

2. The exercise table according to claim 1, characterized in that The clamping portion (1) further comprises one or more supporting legs (13); The clamping carrier plate (11) comprises a workpiece placement area, and the one or more supporting legs (13) are arranged in the workpiece placement area to support the workpiece; The clamping assembly (12) comprises two or more clamping moving parts arranged opposite to each other at intervals from the workpiece placement area, the clamping moving parts having clamping heads (122) capable of moving in a direction toward or away from the workpiece placement area, the clamping heads (122) of the clamping moving parts arranged opposite to each other at intervals from the workpiece placement area moving in directions toward or away from each other.

3. The exercise table according to claim 1, characterized in that The clamping carrier plate (11) comprises a workpiece placement area, and the clamping assembly (12) comprises a clamping moving part and a limiting support foot; The clamping moving part has a clamping head (122) that can move in a direction toward or away from the workpiece placement area; the limit support foot is arranged along the boundary of the workpiece placement area and has a stopper extending beyond the boundary, and the stopper is configured to abut against the side of the workpiece; The clamping moving part and the position-limiting support foot in the clamping assembly (12) are arranged opposite to each other at a distance from the workpiece placement area.

4. The sports table according to claim 2 or 3, characterized in that: The clamping moving part further comprises a first inertia motor (121); the clamping head (122) is detachably mounted on a first mover of the first inertia motor (121); and the first stator of the first inertia motor (121) is fixedly arranged on the clamping carrier plate (11).

5. The exercise table according to claim 4, characterized in that The first mover comprises a first sliding member (1212), and the first stator comprises a first base (1211); wherein, The first sliding member (1212) is slidably matched with the first base (1211) and is capable of sliding along a first direction; the first sliding member (1212) is provided with a bearing surface (1212A) for assembling the clamping head (122) and a first friction surface (1212B) perpendicular to the bearing surface (1212A); The first inertial motor (121) further comprises a first driving module (1213), the first driving module (1213) comprising a piezoelectric driving unit, a transmission unit and a second friction surface (1213A); the first driving module (1213) is located on the first base (1211) and on one side of the first friction surface (1212B), so that the second friction surface (1213A) can be opposite to and in frictional contact with the first friction surface (1212B); the deformation of the piezoelectric driving unit can be transmitted to the second friction surface (1213A) through the transmission unit, so as to drive the second friction surface (1213A) to move along the first direction, and then drive the first sliding member (1212) to slide along the first direction through frictional contact with the first friction surface (1212B).

6. The exercise table according to claim 5, characterized in that The first sliding member (1212) has a convex strip (1215) extending along the first direction on one side opposite to the bearing surface (1212A), and the first friction surface (1212B) is arranged on one side of the convex strip (1215); the first base (1211) is provided with a first groove (1211A) for accommodating the convex strip (1215) and a second groove (1211B) for accommodating the first driving module (1213); a connecting gap is provided between the first groove (1211A) and the second groove (1211B), so that the second friction surface (1213A) is in frictional contact with the first friction surface (1212B) through the connecting gap.

7. The exercise table according to claim 6, characterized in that It also includes a displacement sensor (4); the first base (1211) is also provided with a third groove (1211C); The signal conversion part (41) of the displacement sensor (4) is arranged on the first sliding member (1212) and extends along the first direction, and the signal receiving part (42) is located in the third groove (1211C).

8. The exercise table according to claim 5, characterized in that The first driving module (1213) comprises a first wall (721); the first wall (721) has an inclined surface with an angle less than 90° relative to the second friction surface (1213A); the inclined surface of the first wall (721) is used to decompose the force acting thereon into a first component force parallel to the second friction surface (1213A) and a second component force perpendicular to the second friction surface (1213A), wherein the first component force can provide a preload force for the deformation of the piezoelectric driving part (71), and the second component force can provide a positive pressure for the friction contact between the second friction surface (1213A) and the first friction surface (1212B).

9. The exercise table according to claim 1, characterized in that The conveying module (20) has a single conveying motion component (22), and the conveying module (20) further comprises a driven motion component (23) arranged on its conveying carrier; The transmission motion component (22) and the driven motion component (23) are arranged in sequence on the transmission carrier (21) along a second direction perpendicular to a preset motion direction corresponding to the transmission module (20), and the driven motion component (23) moves under the drive of the transmission motion component (22).

10. The exercise table according to claim 9, characterized in that The conveying motion component (22) comprises a second inertial motor; a clamping carrier plate or a conveying carrier plate of another conveying module located on an upper layer of the conveying module (20) is detachably mounted on a second mover (222) of the second inertial motor; a second stator (221) of the second inertial motor is fixedly arranged on the conveying carrier plate (21) of the conveying module (20); the second mover (222) is capable of moving along a preset movement direction corresponding to the conveying module (20); The driven motion component (23) comprises a second base (231) and a second sliding member (232), wherein the second sliding member (232) is slidably matched with the second base (231) and can slide along a preset motion direction corresponding to the conveying module (20); the bearing surface of the second sliding member (232) is detachably assembled with a clamping carrier located on the upper layer of the conveying module (20) or a conveying carrier of other conveying modules, and the second base (231) is arranged on the conveying carrier of the conveying module (20).

11. The exercise table according to claim 1, characterized in that The transmission module (20) has two transmission motion components (22); The two conveying motion components (22) are arranged in sequence on the conveying carrier plate (21) along a second direction perpendicular to a preset motion direction corresponding to the conveying module (20), and the two conveying motion components (22) are synchronously controlled.

12. The exercise table according to claim 11, characterized in that The conveying motion component (22) comprises a second inertial motor; a clamping carrier plate or a conveying carrier plate of another conveying module located on an upper layer of the conveying module (20) is detachably mounted on a second mover (222) of the second inertial motor; a second stator (221) of the second inertial motor is fixedly arranged on the conveying carrier plate (21) of the conveying module (20); and the second mover (222) is capable of moving along a preset movement direction corresponding to the conveying module (20).

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