Chlorosilane raffinate pretreatment equipment

By using a pressure adjustment mechanism combining sealing and guiding wings in the chlorosilane residue pretreatment equipment, the problems of long nitrogen replacement time and large smoke are solved, and effective filter pressing and liquid material discharge are achieved.

CN222889511UActive Publication Date: 2025-05-23SHANGHAI ONSO ANALYTICAL INSTR TECH CO LTD
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Patent Information

Application Number
CN202421933504.4
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-08-09
Publication Date
2025-05-23
Estimated Expiration
2034-08-09

AI Technical Summary

Technical Problem

During maintenance, the existing chlorosilane residual liquid equipment has a long replacement time for chlorosilane residual liquid, large smoke in the maintenance operation, and large smoke in the residue treatment, which cannot effectively provide the pressure of the filtration.

Method used

A chlorosilane residue pretreatment device is designed, and a pressure adjustment mechanism combining a sealed and guide fin is used to generate pressure through gravity and ventilation, forming a pressure state for filtration, and the pressure is adjusted through a spring and a connecting rod.

Benefits of technology

It is achieved by forming a pressing state in the chlorosilane residue equipment, effectively performing pressure filtration and discharge of liquid materials, reducing the difficulty of smoke and residue treatment, and improving nitrogen replacement efficiency.

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Abstract

The utility model discloses chlorosilane raffinate pretreatment equipment. The chlorosilane raffinate pretreatment equipment comprises a valve body, a sealing seat, a U-shaped flow channel and a sealing plug, according to the chlorosilane residual liquid pretreatment equipment, a pressure adjusting mechanism comprises a valve body, the valve body is connected to a nitrogen outlet pipe, a U-shaped flow channel is formed in the valve body, a sealing base is fixedly connected to the bottom of the gas inlet end of the U-shaped flow channel, a sealing plug matched with the sealing base is arranged on the sealing base, and a circulation gap is formed between the sealing plug and the U-shaped flow channel; the sealing plug is fixedly connected with a guide fin, a circulation cavity is formed between the guide fin and the U-shaped flow channel, the guide fin is slidably connected into the U-shaped flow channel, the sealing plug is matched with the guide fin to press the sealing base under the action of gravity, and during ventilation, the gravity needs to be overcome to blow the sealing plug, and then air can be exhausted. Therefore, a pressure state can be formed in the chlorosilane residual liquid equipment, the chlorosilane residual liquid is downwards subjected to pressure filtration from the filter screen and is discharged from the liquid material discharge pipe, and pressure is effectively generated in the ventilation process.
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Description

Technical Field

[0001] The utility model relates to the technical field of residual liquid pretreatment, in particular to chlorosilane residual liquid pretreatment equipment. Background Art

[0002] After the liquid chlorosilane in the chlorosilane residue is separated, the remaining solid impurities such as fine silicon powder, metal chloride, etc. and a small amount of chlorosilane remaining on the surface of the solid impurities are the chlorosilane residue. Chlorosilane is easy to form HCl acid mist in the air, and the reaction formula is SiCl 4 +4H 2 O=H4SiO 4 +4HCl.

[0003] The conventional method is to first pour out as much residual liquid as possible in the equipment, and then replace it with nitrogen, that is, by continuously introducing nitrogen to allow the liquid material to evaporate continuously into the nitrogen and be taken out of the equipment, until the nitrogen replaced by the equipment has almost no acid mist, and then introduce alkali solution to neutralize the solid residue in the residual liquid to achieve pretreatment of chlorosilane residual liquid.

[0004] For example, in the prior art with announcement number: CN211920882U and announcement date: 2020-11-13, a pretreatment system for chlorosilane residual liquid is disclosed, and the system includes: chlorosilane residual liquid equipment, a nitrogen storage tank and a liquid ammonia supply unit, wherein an exhaust zone, a reaction zone and a feed zone are formed from top to bottom in the chlorosilane residual liquid equipment, and a filter is provided between the feed zone and the reaction zone, the exhaust zone is provided with a nitrogen inlet and a tail gas outlet, and the feed zone is provided with a liquid material outlet; the nitrogen storage tank is connected to the nitrogen inlet through a first gas pipeline, and a first valve is provided on the first gas pipeline; the liquid ammonia supply unit includes a liquid ammonia storage tank, a gasifier and a pressure reducing valve connected in sequence, and the pressure reducing valve is connected to the feed zone through a second gas pipeline, and a second valve is provided on the second gas pipeline. The use of this system can solve the problems of long nitrogen replacement time of chlorosilane residual liquid during maintenance of the existing chlorosilane residual liquid equipment, large smoke during maintenance operation and large smoke during residue treatment.

[0005] In the above system, a filter press effect is achieved while nitrogen is input, so that most of the liquid material is discharged as much as possible. However, during use, nitrogen is directly passed into the chlorosilane residual liquid equipment and then discharged directly, which cannot provide a good filter press pressure. Therefore, a new chlorosilane residual liquid pretreatment equipment is proposed to optimize the above existing technology. Utility Model Content

[0006] The purpose of the utility model is to provide a chlorosilane residual liquid pretreatment device to solve the problems raised in the above background technology.

[0007] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0008] A chlorosilane residual liquid pretreatment device comprises a chlorosilane residual liquid device, wherein a nitrogen inlet pipe is arranged on one side of the top of the chlorosilane residual liquid device, a nitrogen outlet pipe is arranged on the other side of the top of the chlorosilane residual liquid device, an ammonia input pipe is arranged on one side of the bottom of the chlorosilane residual liquid device, and a liquid material outlet pipe is arranged on the other side of the bottom of the chlorosilane residual liquid device, a filter is arranged in the chlorosilane residual liquid device, the chlorosilane residual liquid is arranged on the top of the chlorosilane residual liquid device, the residue in the chlorosilane residual liquid is isolated above the filter, a pressure regulating mechanism is arranged on the nitrogen outlet pipe, the pressure regulating mechanism comprises a valve body, the valve body is connected to the nitrogen outlet pipe, a U-shaped flow channel is arranged in the valve body, a closing seat is fixedly connected to the bottom of the air inlet end of the U-shaped flow channel, a closing plug matched with the closing seat is arranged, a flow gap is arranged between the closing plug and the U-shaped flow channel, a guide wing is fixedly connected to the closing plug, a flow cavity is arranged between the guide wing and the U-shaped flow channel, and the guide wing is slidably connected in the U-shaped flow channel.

[0009] As a further solution of the utility model: a first valve is installed on the nitrogen inlet pipe, the nitrogen inlet pipe is connected to a nitrogen supply device, the ammonia input pipe is connected to a liquid nitrogen supply device, a heating evaporator, a second valve and a pressure reducing valve are installed on the ammonia input pipe, and a third valve is installed on the liquid material discharge pipe.

[0010] As a further solution of the utility model: an installation cavity is provided on the top of the valve body, and a baffle matched with the installation cavity is provided on the bottom of the installation cavity, the baffle can move up and down in the installation cavity, a connecting rod is fixedly connected to the bottom surface of the baffle corresponding to the closing plug, the connecting rod is inserted into the U-shaped flow channel and fixedly connected with the closing plug, the connecting rod is fixedly passed through the guide wing, a through hole for the connecting rod to slide through is opened on the valve body, and the connecting rod sliding seal.

[0011] As a further solution of the utility model: the top of the installation cavity is threadedly connected with a valve cover adapted thereto, a turning handle is rotatably installed on the valve cover, one end of the turning handle passes through the valve cover and is threadedly connected with a threaded sleeve, and the bottom end of the turning handle is provided with an external thread.

[0012] As a further solution of the utility model: a pressure plate is fixedly connected to the bottom surface of the threaded sleeve, and a spring is fixedly connected between the pressure plate and the baffle.

[0013] As a further solution of the utility model: the threaded sleeve is inserted into the valve cover and then slidably connected with the valve cover. The outer contour of the threaded sleeve is square, and a square groove for the threaded sleeve to be inserted and slide is provided on the valve cover.

[0014] Compared with the prior art, the beneficial effects of the utility model are:

[0015] 1. The utility model presses the sealing plug on the sealing seat under the action of gravity by cooperating with the guide wing. When ventilation is required, the sealing plug needs to be blown to overcome gravity to discharge air, thereby forming a pressurized state in the chlorosilane residual liquid equipment, and the chlorosilane residual liquid is pressed downward from the filter screen and discharged from the liquid material discharge pipe, and pressure is effectively generated during the ventilation process.

[0016] 2. The utility model drives the pressure plate downward by rotating the handle in cooperation with the threaded sleeve, thereby compressing the spring between the pressure plate and the baffle, causing the elastic force provided by the spring to change. Finally, the baffle presses the closing plug downward through the connecting rod, so that the pressure in the chlorosilane residual liquid equipment can be controlled by adjusting the compression of the spring. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 The figure is a schematic diagram of the structure of a chlorosilane residual liquid pretreatment device.

[0018] Figure 2 This is a diagram showing a pressure regulating mechanism in a chlorosilane residual liquid pretreatment device.

[0019] Figure 3 This is a diagram showing the guide fins in a chlorosilane residual liquid pretreatment device.

[0020] Figure 4 This is an external device diagram of a chlorosilane residual liquid pretreatment device

[0021] Figure 5 This is a diagram showing the valve cover in a chlorosilane residual liquid pretreatment device.

[0022] In the figure: 1. chlorosilane residual liquid equipment; 2. nitrogen inlet pipe; 3. nitrogen outlet pipe; 4. ammonia input pipe; 5. liquid material outlet pipe; 6. filter screen; 7. valve body; 8. U-shaped flow channel; 9. closing seat; 10. closing plug; 11. guide wing; 12. first valve; 13. nitrogen supply equipment; 14. liquid nitrogen supply equipment; 15. heating evaporator; 16. second valve; 17. pressure reducing valve; 18. third valve; 19. installation cavity; 20. baffle; 21. connecting rod; 22. valve cover; 23. turning handle; 24. threaded sleeve; 25. pressure plate; 26. spring; 27. pressure regulating mechanism. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] See also Figures 1 to 3 In an embodiment of the utility model, a chlorosilane residual liquid pretreatment device comprises a chlorosilane residual liquid device 1, a nitrogen inlet pipe 2 is arranged on one side of the top of the chlorosilane residual liquid device 1, a nitrogen outlet pipe 3 is arranged on the other side of the top of the chlorosilane residual liquid device 1, an ammonia input pipe 4 is arranged on one side of the bottom of the chlorosilane residual liquid device 1, a liquid material discharge pipe 5 is arranged on the other side of the bottom of the chlorosilane residual liquid device 1, a filter screen 6 is arranged in the chlorosilane residual liquid device 1, the chlorosilane residual liquid is arranged on the top of the chlorosilane residual liquid device 1, and the residue in the chlorosilane residual liquid is isolated on the filter screen 6. At the top, a pressure regulating mechanism 27 is provided on the nitrogen outlet pipe 3. The pressure regulating mechanism 27 includes a valve body 7, which is connected to the nitrogen outlet pipe 3. A U-shaped flow channel 8 is provided in the valve body 7. A closing seat 9 is fixedly connected to the bottom of the air inlet end of the U-shaped flow channel 8. A closing plug 10 matched therewith is provided on the closing seat 9. A flow gap is provided between the closing plug 10 and the U-shaped flow channel 8. A guide wing 11 is fixedly connected to the closing plug 10. A flow cavity is provided between the guide wing 11 and the U-shaped flow channel 8. The guide wing 11 is slidably connected in the U-shaped flow channel 8.

[0025] The closing plug 10 cooperates with the guide wing 11 to be pressed on the closing seat 9 under the action of gravity. When ventilation is required, the closing plug 10 needs to be blown to overcome gravity in order to discharge gas, thereby forming a pressurized state in the chlorosilane residual liquid equipment 1, and the chlorosilane residual liquid is filtered downward from the filter screen 6 and discharged from the liquid material discharge pipe 5, and pressure is effectively generated during the ventilation process.

[0026] See also Figure 4 A first valve 12 is installed on the nitrogen inlet pipe 2, the nitrogen inlet pipe 2 is connected to a nitrogen supply device 13, the ammonia input pipe 4 is connected to a liquid nitrogen supply device 14, a heating evaporator 15, a second valve 16 and a pressure reducing valve 17 are installed on the ammonia input pipe 4, and a third valve 18 is installed on the liquid material discharge pipe 5.

[0027] See also Figure 2 and Figure 5The top of the valve body 7 is provided with an installation cavity 19, and the bottom of the installation cavity 19 is provided with a baffle 20 adapted thereto. The baffle 20 can move up and down in the installation cavity 19. A connecting rod 21 is fixedly connected to the bottom surface of the baffle 20 at the corresponding closing plug 10. The connecting rod 21 is inserted into the U-shaped flow channel 8 and fixedly connected with the closing plug 10. The connecting rod 21 is fixedly penetrated through the guide wing 11. A through hole for the connecting rod 21 to slide through is provided on the valve body 7, and the connecting rod 21 is slidably sealed. A valve cover 22 adapted thereto is threadedly connected to the top of the installation cavity 19, and a rotating handle 23 is rotatably installed on the valve cover 22. One end of the rotating handle 23 penetrates the valve cover 22 and is threadedly connected to a threaded sleeve 24, and the bottom end of the rotating handle 23 is provided with an external thread. A pressing plate 25 is fixedly connected to the bottom surface of the threaded sleeve 24, and a spring 26 is fixedly connected between the pressing plate 25 and the baffle 20. The threaded sleeve 24 is inserted into the valve cover 22 and then slidably connected to the valve cover 22 . The outer contour of the threaded sleeve 24 is a square, and the valve cover 22 is provided with a square groove for the threaded sleeve 24 to be inserted and slid.

[0028] By rotating the handle 23, the threaded sleeve 24 drives the pressure plate 25 downward, thereby compressing the spring 26 between the pressure plate 25 and the baffle 20, so that the elastic force provided by the spring 26 changes, and finally the baffle 20 presses the closing plug 10 downward through the connecting rod 21, so that the pressure in the chlorosilane residual liquid equipment 1 can be controlled by adjusting the compression of the spring 26.

[0029] The working principle of the utility model is:

[0030] When in use, first open the first valve 12, the nitrogen supply device 13, and the third valve 18. At this time, nitrogen is introduced into the chlorosilane residual liquid device 1, and the nitrogen is output through the ammonia input pipe 4. At this time, the nitrogen pushes the closing plug 10 upward and separates it from the closing seat 9. The closing plug 10 slides up through the guide wing 11, so that air can flow through the U-shaped flow channel 8. At this time, the chlorosilane residual liquid device 1 is in a pressurized state, so that the chlorosilane residual liquid can be filtered through the filter screen 6, and the chlorosilane residual liquid is discharged through the liquid material discharge pipe 5. After the discharge, the third valve 18 is closed. At this time, nitrogen is continuously introduced until there is no obvious acid mist, and the liquid nitrogen supply device 14, the heating evaporator 15, the second valve 16 and the pressure reducing valve 17 are further started. At this time, nitrogen is introduced into the chlorosilane residual liquid device 1 to neutralize the residue isolated on the filter screen 6, and finally the treatment of the chlorosilane residual liquid is completed.

[0031] During use, the handle 23 can be rotated to drive the pressure plate 25 to compress the spring 26 through the cooperation of the threaded sleeve 24, thereby controlling the pressure on the baffle 20, thereby controlling the extrusion state of the baffle 20 and the connecting rod 21 on the closing plug 10, controlling the ventilation pressure of the pressure regulating mechanism 27, and controlling the internal pressure of the chlorosilane residual liquid equipment 1, so as to facilitate the filter press.

[0032] Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art may still modify the technical solutions described in the aforementioned embodiments, or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention shall be included in the protection scope of the present invention.

Claims

1. A chlorosilane residual liquid pretreatment device, comprising a chlorosilane residual liquid device (1), characterized in that: A nitrogen inlet pipe (2) is provided on one side of the top of the chlorosilane residual liquid equipment (1), a nitrogen outlet pipe (3) is provided on the other side of the top of the chlorosilane residual liquid equipment (1), an ammonia input pipe (4) is provided on one side of the bottom of the chlorosilane residual liquid equipment (1), and a liquid material outlet pipe (5) is provided on the other side of the bottom of the chlorosilane residual liquid equipment (1), a filter screen (6) is provided inside the chlorosilane residual liquid equipment (1), the chlorosilane residual liquid is provided on the top of the chlorosilane residual liquid equipment (1), and the residue in the chlorosilane residual liquid is isolated on the upper side of the filter screen (6). A pressure regulating mechanism (27) is provided on the nitrogen outlet pipe (3), and the pressure regulating mechanism (27) comprises a valve body (7), the valve body (7) is connected to the nitrogen outlet pipe (3), a U-shaped flow channel (8) is provided in the valve body (7), a closing seat (9) is fixedly connected to the bottom of the air inlet end of the U-shaped flow channel (8), a closing plug (10) matched with the closing seat (9) is provided, and a guide wing (11) is fixedly connected to the closing plug (10), and the guide wing (11) is slidably connected in the U-shaped flow channel (8).

2. A chlorosilane residual liquid pretreatment device according to claim 1, characterized in that: The nitrogen inlet pipe (2) is provided with a first valve (12), the nitrogen inlet pipe (2) is connected to a nitrogen supply device (13), the ammonia input pipe (4) is connected to a liquid nitrogen supply device (14), the ammonia input pipe (4) is provided with a heating evaporator (15), a second valve (16) and a pressure reducing valve (17), and the liquid material discharge pipe (5) is provided with a third valve (18).

3. A chlorosilane residual liquid pretreatment device according to claim 1, characterized in that: The top of the valve body (7) is provided with an installation cavity (19), the bottom of the installation cavity (19) is provided with a baffle (20) matched therewith, the bottom surface of the baffle (20) is fixedly connected with a connecting rod (21) at a position corresponding to the closing plug (10), the connecting rod (21) is inserted into the U-shaped flow channel (8) and fixedly connected with the closing plug (10), and the connecting rod (21) is fixedly passed through the guide wing (11).

4. A chlorosilane residual liquid pretreatment device according to claim 3, characterized in that: The top of the installation cavity (19) is threadedly connected to a valve cover (22) adapted thereto, a rotating handle (23) is rotatably mounted on the valve cover (22), and one end of the rotating handle (23) passes through the valve cover (22) and is threadedly connected to a threaded sleeve (24).

5. A chlorosilane residual liquid pretreatment device according to claim 4, characterized in that: A pressure plate (25) is fixedly connected to the bottom surface of the threaded sleeve (24), and a spring (26) is fixedly connected between the pressure plate (25) and the baffle (20).

6. A chlorosilane residual liquid pretreatment device according to claim 4, characterized in that: The threaded sleeve (24) is inserted into the valve cover (22) and then slidably connected to the valve cover (22).

Citation Information

Patent Citations

  • Pretreatment system for chlorosilane residual liquid

    CN211920882U