Feeding system of crystal growth workshop
By designing the feeding system in Changjing workshop, the feeding guide rails and loading and unloading trucks are used to automatically carry materials, the high cost problems caused by manual handling are solved, and the automatic loading is realized and labor costs are reduced.
Patent Information
- Application Number
- CN202421643427.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-11
- Publication Date
- 2025-05-23
- Estimated Expiration
- 2034-07-11
AI Technical Summary
The existing crystal growth workshop requires manual handling of materials into the crystal growth furnace, resulting in high labor costs.
Design a feeding system for the crystal growth workshop, including multiple crystal growth machines, feeding guide rails and loading and unloading trucks. The feeding guide rail consists of main guide rails and support rails, on which the loading and unloading trolley can move, and is used to transport materials into or take them out.
Through the automated loading system, manual handling is avoided and labor costs are significantly reduced.
Smart Images
Figure CN222892592U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of silicon carbide crystal growth feeding equipment, in particular to a crystal growth workshop feeding system. Background Art
[0002] Silicon carbide (SiC), as an emerging third-generation semiconductor core material, has excellent properties such as wide bandgap, high critical breakdown electric field strength, high electron mobility, good radiation resistance and chemical stability. This makes it an important substrate wafer material with wide applications, showing good application prospects in the fields of aviation devices, new energy vehicles, rail transportation and household appliances.
[0003] The inventors have found through research that in some existing crystal growth workshops, some materials, such as hot fields, need to be manually transported to the corresponding crystal growth furnaces, which results in high labor costs. Utility Model Content
[0004] The utility model aims to provide a feeding system for a crystal growth workshop, which can reduce labor costs.
[0005] The embodiment of the utility model is achieved as follows:
[0006] In a first aspect, the utility model provides a feeding system for a crystal growth workshop, comprising:
[0007] A crystal growth machine, the number of which is multiple, comprising a crystal growth furnace and a loading and unloading device located outside the crystal growth furnace, the loading and unloading device being used to transport materials into the crystal growth furnace or to take materials out of the crystal growth furnace;
[0008] A feeding guide rail, the feeding guide rail comprises a main guide rail and a plurality of branch guide rails, the plurality of branch guide rails are arranged at intervals along the extension direction of the main guide rail and connected to the main guide rail, and a crystal growth machine is provided at one end of the branch guide rail away from the main guide rail;
[0009] The loading and unloading trolley can move on the main rail and the branch rail. The loading and unloading trolley is used to transfer materials to the loading and unloading device or to take out the materials from the loading and unloading device.
[0010] In an optional embodiment, the multiple branch guide rails are divided into two groups. The two groups of branch guide rails are respectively arranged on both sides of the main rail and connected to the main rail. The multiple branch guide rails in each group are arranged at intervals along the extension direction of the main rail.
[0011] In an optional embodiment, a detection sensor is provided on each support guide rail, and the detection sensor is used to detect whether a loading and unloading trolley passes by.
[0012] In an optional embodiment, an in-place sensor is provided at one end of the support guide rail close to the crystal growth machine, and the in-place sensor is used to detect whether the loading and unloading trolleys are in place.
[0013] In an optional embodiment, the feeding guide rail also includes a feed guide rail and a discharge guide rail, the feed guide rail and the discharge guide rail are connected to the main rail, a loading room is provided at one end of the feed guide rail away from the main rail, and a unloading room is provided at one end of the discharge guide rail away from the main rail.
[0014] In an optional embodiment, the loading and unloading device includes a bracket and a carrier, the carrier is connected to the bracket and can move along the extension direction of the bracket, and the carrier is used to transport materials into the crystal growth furnace or take materials out of the crystal growth furnace.
[0015] In an optional embodiment, the bracket extends in the height direction, the bracket has a first extreme position and a second extreme position, and a first sensor and a second sensor are arranged on the bracket, the first sensor is installed at the first extreme position, and the second sensor is installed at the second extreme position, and the first extreme position is close to the crystal growth furnace relative to the second extreme position.
[0016] In an optional embodiment, the bracket further has a waiting position located at the first extreme position and the second extreme position, and the bracket is further provided with a third sensor installed at the waiting position.
[0017] In an optional embodiment, the loading and unloading trolley includes a connected vehicle body and a manipulator, and the manipulator is provided with a pressure sensor.
[0018] In an optional embodiment, the vehicle body is provided with a radar sensor.
[0019] The beneficial effect of the embodiment of the utility model is: the embodiment of the utility model provides a feeding system for a crystal growth workshop, including a crystal growth machine, a feeding rail and a loading and unloading trolley. There are multiple crystal growth machines, the crystal growth machine includes a crystal growth furnace and a loading and unloading device located outside the crystal growth furnace, the loading and unloading device is used to transport materials into the crystal growth furnace or take them out of the crystal growth furnace, the feeding rail, the feeding rail includes a main rail and a branch rail, and a plurality of branch rails are arranged at intervals along the extension direction of the main rail and connected to the main rail, the loading and unloading trolley can move on the main rail and the branch rail, and the loading and unloading trolley is used to transfer materials to the loading and unloading device or take out materials from the loading and unloading device. It can avoid manual handling, thereby reducing labor costs. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.
[0021] Figure 1A schematic diagram of the corresponding feeding track and crystal growth machine provided in an embodiment of the utility model;
[0022] Figure 2 A schematic diagram of the support guide rails provided in an embodiment of the utility model corresponding to each crystal growth machine.
[0023] Icons: 100-crystal growth machine; 110-crystal growth furnace; 120-loading and unloading device; 121-bracket; 1211-first sensor; 1212-second sensor; 1213-third sensor; 122-carrying member; 200-feeding guide rail; 210-main guide rail; 220-support guide rail; 221-arrival sensor; 230-feeding guide rail; 240-discharging guide rail; 300-vehicle body; 310-radar sensor; 400-manipulator; 410-pressure sensor; 500-loading room; 600-unloading room. DETAILED DESCRIPTION
[0024] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.
[0025] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.
[0026] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.
[0027] In the description of the present utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the accompanying drawings, or the orientation or position relationship in which the utility model product is usually placed when in use, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.
[0028] In addition, terms such as "horizontal" and "vertical" do not require the components to be absolutely horizontal or hanging vertically, but can be slightly inclined. For example, "horizontal" only means that its direction is more horizontal relative to "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.
[0029] In the description of the present utility model, it should also be noted that unless otherwise clearly specified and defined, the terms "arranged", "installed", "connected", and "coupled" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.
[0030] The following will introduce in detail the specific structure of a crystal growth workshop loading system provided by an embodiment of the present utility model and the corresponding technical effects brought thereby with reference to the patent drawings.
[0031] Please refer to Figure 1-Figure 2 , a crystal growth workshop loading system provided by an embodiment of the present utility model includes a crystal growth machine 100, a feeding guide rail 200, and a loading and unloading trolley.
[0032] The number of crystal growth machines 100 is multiple. The crystal growth machine 100 includes a crystal growth furnace 110 and a loading and unloading device 120 located outside the crystal growth furnace 110. The loading and unloading device 120 is used to transport materials into or out of the crystal growth furnace 110. The feeding guide rail 200 includes a main guide rail 210 and branch guide rails 220. A plurality of branch guide rails 220 are arranged at intervals along the extending direction of the main guide rail 210 and are connected to the main guide rail 210. The loading and unloading trolley can move on the main guide rail 210 and the branch guide rails 220, and is used to transfer materials to the loading and unloading device 120 or take out the materials on the loading and unloading device 120.
[0033] In this embodiment, the above-mentioned material refers to a thermal field, and the thermal field is a device for providing heat for the crystal growth furnace 110.
[0034] It can be understood that during the loading and unloading process, the loading and unloading trolley can move the material from the main rail 210 to the corresponding branch rail 220, and move on the branch rail 220 until it is close to the loading and unloading device 120. The loading and unloading trolley can transfer the material to the loading and unloading device 120, and the loading and unloading device 120 can transport the material into the crystal growth furnace 110. When unloading, the loading and unloading device 120 can take the material out of the crystal growth furnace 110, and then the loading and unloading trolley can move from the main rail 210 to the branch rail 220 and approach the loading and unloading device 120, and take the material out of the loading and unloading device 120, and move from the branch rail 220 to the main rail 210, and move along the main rail 210 to the unloading position. Through the above arrangement, manual handling can be avoided, thereby reducing labor costs.
[0035] In detail, the loading and unloading trolley includes a connected vehicle body 300 and a manipulator 400, and the manipulator 400 can carry materials, and can transfer materials to the loading and unloading device 120 or take out materials from the loading and unloading device 120. The manipulator 400 is provided with a pressure sensor 410. It can be understood that the pressure sensor 410 can be used to detect whether the manipulator 400 carries materials. When the pressure sensor 410 detects that the manipulator 400 is subjected to a preset pressure, the industrial computer can determine that the manipulator 400 carries materials at this time.
[0036] Therefore, when the loading and unloading trolley is loading materials, the trolley body 300 can be controlled to move on the main rail 210 through the preset branch rail 220 to move close to the predetermined crystal growth machine 100, and the material can be transferred to the loading and unloading device 120 through the robot 400.
[0037] When the loading and unloading trolley is unloading materials, the trolley body 300 can be controlled to move on the main rail 210 through the preset branch rail 220 to move close to the predetermined crystal growth machine 100, and the material on the loading and unloading device 120 can be taken out by the robot 400.
[0038] Optionally, the plurality of branch rails 220 are divided into two groups, the two groups of branch rails 220 are respectively arranged on both sides of the main rail 210 and connected to the main rail 210, and the plurality of branch rails 220 in each group are arranged at intervals along the extension direction of the main rail 210, thereby reasonably utilizing the utilization rate of both sides of the main rail 210.
[0039] Optionally, a detection sensor is provided on each support rail 220, and the detection sensor is used to detect whether the loading and unloading trolley passes by. In detail, in this embodiment, the crystal growth feeding system also includes an industrial computer, and the detection sensor is also connected to the industrial computer for communication. The industrial computer is connected to the loading and unloading trolley for communication, and is used to control the loading and unloading trolley to move the material to which support rail 220. When the industrial computer controls the loading and unloading trolley to move to the preset support rail 220, when the detection sensor detects that the loading and unloading trolley passes by, the detection sensor sends a signal to the industrial computer to improve the loading and unloading accuracy of the loading and unloading trolley.
[0040] Optionally, a position sensor 221 is provided at one end of the support rail 220 close to the crystal growth machine 100, and the position sensor 221 is used to detect whether the loading and unloading trolley is in place. It can be understood that by setting the position sensor 221, the accuracy of the movement of the loading and unloading trolley on the support rail 220 can be guaranteed, and the loading and unloading trolley can be relatively accurately moved to the loading and unloading position.
[0041] Optionally, the feeding guide rail 200 also includes a feeding guide rail 230 and a discharging guide rail 240, and the feeding guide rail 230 and the discharging guide rail 240 are connected to the main rail 210. A loading room 500 is provided at the end of the feeding guide rail 230 away from the main rail 210, and an unloading room 600 is provided at the end of the discharging guide rail 240 away from the main rail 210. That is to say, when loading, the loading and unloading trolley can load materials from the loading room 500 at the end of the feeding guide rail 230 away from the main rail 210, and when unloading, the loading and unloading trolley can unload materials to the unloading room 600 at the end of the discharging guide rail 240 away from the main rail 210, thereby reducing the transportation path of personnel.
[0042] Optionally, the loading and unloading device 120 includes a bracket 121 and a carrier 122, the carrier 122 is connected to the bracket 121 and can move along the extension direction of the bracket 121. It should be noted that in this embodiment, the bracket 121 extends along the height direction, and the carrier 122 is used to transport materials into the crystal growth furnace 110 or take materials out of the crystal growth furnace 110.
[0043] Among them, the bracket 121 has a first extreme position and a second extreme position, and a first sensor 1211 and a second sensor 1212 are arranged on the bracket 121. The first sensor 1211 is installed at the first extreme position, and the second sensor 1212 is installed at the second extreme position. The first extreme position is close to the crystal growth furnace 110 relative to the second extreme position. It should be noted that during loading and unloading, when the supporting member 122 moves to the first extreme position, the supporting member 122 cannot continue to move away from the second extreme position, and the supporting member 122 can transport the material into the crystal growth furnace 110. When the supporting member 122 moves to the second extreme position, the supporting member 122 cannot continue to move away from the first extreme position, and the second extreme position is the position where the loading and unloading trolley transfers the material to the supporting member 122 or takes out the material from the supporting member 122.
[0044] In detail, the bracket 121 also has a waiting position located at the first extreme position and the second extreme position, and the bracket 121 is also provided with a third sensor 1213 installed at the waiting position. It can be understood that when the bearing member 122 moves from the first extreme position to the second extreme position, the bearing member 122 can move to the waiting position when the loading and unloading trolley has not moved into place.
[0045] Optionally, the vehicle body 300 is further provided with a radar sensor 310 . It can be understood that the movement accuracy of the vehicle body 300 can be improved by the radar sensor 310 .
[0046] It should be noted that the above-mentioned supporting member 122 and robot 400 are the existing robot 400 structure, that is, the supporting member 122 can be a common supporting structure or a robot 400 structure.
[0047] Working principle:
[0048] During the loading process, personnel load materials in the loading room 500 and can place the hot field after loading on the manipulator 400 of the vehicle body 300. The user can control the vehicle body 300 through the industrial computer to transmit the hot field to the vicinity of the crystal growth machine 100 corresponding to which support guide rail 220. At this time, the loading and unloading device 120 corresponding to the crystal growth platform receives the signal, and the carrier 122 descends, and stops when it descends to the second limit position. After the vehicle body 300 receives the signal and the pressure sensor 410 detects the preset pressure, it starts to move to the target crystal growth machine 100. When it moves to the support rail 220 corresponding to the target machine, the detection sensor can send a signal to the industrial computer until the in-position sensor 221 detects that the vehicle body 300 has passed and stops. At this time, the manipulator 400 transfers the material to the carrier 122, and then the carrier 122 starts to rise along the bracket 121. After the preset pressure sensed by the pressure sensor 410 disappears, the manipulator 400 on the vehicle body 300 starts to withdraw to the loading room 500 or the unloading room 600. After the carrier 122 rises to the first limit position, the heat field is transferred to the crystal growth furnace 110.
[0049] Unloading process:
[0050] After the crystal growth process is completed, the industrial computer detects which crystal growth machine 100 has completed crystal growth and controls it to complete the unloading operation. The corresponding crystal growth machine 100 receives the signal, and the carrier 122 in the loading and unloading device 120 descends and takes the heat field out of the crystal growth furnace 110, descends to the waiting position and stops. At this time, the vehicle body 300 moves to the support rail 220 corresponding to the target machine. After the in-position sensor 221 on the corresponding support rail 220 detects that the vehicle body 300 has passed, the carrier 122 continues to descend until it reaches the second limit position and stops. At this time, the material can be carried on the manipulator 400 of the vehicle body 300. When the pressure sensor 410 on the manipulator 400 detects the preset pressure, the vehicle body 300 moves from the corresponding support rail 220 to the main rail 210 and to the exit rail until it moves to the unloading room 600. When the crystal growth furnace 110 receives the vehicle body 300 leaving the corresponding in-position sensor 221, the carrier 122 rises until it reaches the first limit position and stops. The operator removes the material on the manipulator 400 on the vehicle body 300 in the unloading room 600, and the unloading operation is completed.
[0051] In summary, a feeding system for a crystal growth workshop provided by an embodiment of the utility model includes a crystal growth machine 100, a feeding rail 200, and a loading and unloading trolley. There are multiple crystal growth machines 100, the crystal growth machine 100 includes a crystal growth furnace 110 and a loading and unloading device 120 located outside the crystal growth furnace 110, the loading and unloading device 120 is used to transport materials into the crystal growth furnace 110 or take them out from the crystal growth furnace 110, the feeding rail 200, the feeding rail 200 includes a main rail 210 and a branch rail 220, and a plurality of branch rails 220 are arranged at intervals along the extension direction of the main rail 210 and connected to the main rail 210, the loading and unloading trolley can move on the main rail 210 and the branch rail 220, and the loading and unloading trolley is used to transfer materials to the loading and unloading device 120 or take out materials from the loading and unloading device 120. It can avoid manual handling, thereby reducing labor costs.
[0052] The above description is only the preferred embodiment of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.
Claims
1. A feeding system for a crystal growth workshop, characterized in that: include: A crystal growth machine (100), wherein the number of the crystal growth machines (100) is plural, the crystal growth machine (100) comprising a crystal growth furnace (110) and a loading and unloading device (120) located outside the crystal growth furnace (110), the loading and unloading device (120) being used to transport materials into the crystal growth furnace (110) or to take materials out of the crystal growth furnace (110); A feeding guide rail (200), the feeding guide rail (200) comprising a main guide rail (210) and a plurality of branch guide rails (220), the plurality of branch guide rails (220) being arranged at intervals along the extension direction of the main guide rail (210) and connected to the main guide rail (210), and the end of the branch guide rail (220) away from the main guide rail (210) having a crystal growth machine (100); A loading and unloading trolley, which can move on the main rail (210) and the branch rail (220), and is used to transfer materials to the loading and unloading device (120) or to remove materials from the loading and unloading device (120).
2. The crystal growth workshop feeding system according to claim 1, characterized in that: The plurality of branch guide rails (220) are divided into two groups. The two groups of branch guide rails (220) are respectively arranged on both sides of the main guide rail (210) and connected to the main guide rail (210). The plurality of branch guide rails (220) in each group are arranged at intervals along the extension direction of the main guide rail (210).
3. The crystal growth workshop feeding system according to claim 1, characterized in that: A detection sensor is provided on each of the support guide rails (220), and the detection sensor is used to detect whether the loading and unloading trolley passes by.
4. The crystal growth workshop feeding system according to claim 1, characterized in that: An in-position sensor (221) is provided at one end of the support guide rail (220) close to the crystal growth machine (100), and the in-position sensor (221) is used to detect whether the loading and unloading trolley is in position.
5. The crystal growth workshop feeding system according to claim 1, characterized in that: The feeding guide rail (200) further comprises a feeding guide rail (230) and a discharging guide rail (240), wherein the feeding guide rail (230) and the discharging guide rail (240) are connected to the main guide rail (210), a loading room (500) is provided at one end of the feeding guide rail (230) away from the main guide rail (210), and a discharging room (600) is provided at one end of the discharging guide rail (240) away from the main guide rail (210).
6. The crystal growth workshop feeding system according to claim 1, characterized in that: The loading and unloading device (120) comprises a support (121) and a carrier (122), wherein the carrier (122) is connected to the support (121) and can move along the extension direction of the support (121), and the carrier (122) is used to transport materials into the crystal growth furnace (110) or take materials out of the crystal growth furnace (110).
7. The crystal growth workshop feeding system according to claim 6, characterized in that: The support (121) extends in a height direction, and the support (121) has a first extreme position and a second extreme position. A first sensor (1211) and a second sensor (1212) are provided on the support (121), and the first sensor (1211) is installed at the first extreme position, and the second sensor (1212) is installed at the second extreme position. The first extreme position is closer to the crystal growth furnace (110) relative to the second extreme position.
8. The crystal growth workshop feeding system according to claim 6, characterized in that: The support (121) also has a waiting position located at a first extreme position and a second extreme position, and the support (121) is also provided with a third sensor (1213) installed at the waiting position.
9. The crystal growth workshop feeding system according to claim 1, characterized in that: The loading and unloading trolley comprises a vehicle body (300) and a manipulator (400) which are connected to each other, and the manipulator (400) is provided with a pressure sensor (410).
10. The crystal growth workshop feeding system according to claim 9, characterized in that: The vehicle body (300) is provided with a radar sensor (310).