Mask plate for evaporation process and evaporation equipment

Abstract

The utility model relates to the field of an evaporation process, and discloses a mask plate for the evaporation process and evaporation equipment. The mask plate for the evaporation process comprises a frame, the frame comprises two frame edges, the two frame edges are parallel to each other, and the length directions of the two frame edges are arranged in the first direction; the two ends of the mask strip are detachably connected to the two frame edges respectively, the mask strip is installed perpendicular to the two frame edges, and the positions of the two ends of the mask strip can be adjusted on the two frame edges in the first direction. The positions of the mask strips can be moved or detached according to needs, and mask can be carried out in specific areas of different positions of the battery piece needing to be masked without replacing the mask plate. When the evaporation equipment carries out evaporation mask on the battery piece, the mask plate can meet the evaporation requirements of different sizes and positions, and the flexibility and adaptability of the technology are greatly improved.

Description

Technical Field

[0001] The present application relates to the field of evaporation technology, and in particular to a mask plate and evaporation equipment used in evaporation technology. Background Art

[0002] Evaporation mask technology is a physical vapor deposition method widely used in the manufacturing process of solar cells. Evaporation refers to the evaporation or sublimation of the deposition material into gaseous particles. The gaseous particles are quickly transported from the evaporation source to the surface of the substrate. The gaseous particles attach to the surface of the substrate to form nuclei and grow into a solid film. The film atoms are reconstructed or chemically bonded. Evaporation is an earlier and more widely used vapor deposition technology. It has the advantages of simple film formation method, high film purity and density, and unique film structure and performance. In the field of evaporation technology, the mask plate is a key component. It is used for evaporation equipment to form a specific pattern of thin film deposition on the substrate material. The function of the mask plate is to block the deposition of materials in certain areas during the evaporation process, thereby achieving precisely controlled local film growth.

[0003] However, there is no effective and simple masking method during the evaporation process, and the film layers of battery cells are diverse. The existing mask plates may not be able to meet the deposition requirements of all types of film layers, especially for situations where masking is required at different positions. This not only increases production costs, but may also lead to reduced production efficiency. Utility Model Content

[0004] The embodiments of the present application disclose a mask plate and an evaporation device for an evaporation process, which can mask different positions of different film layers of a battery cell that needs to be masked by adjusting the position of the mask strip.

[0005] In order to achieve the above-mentioned purpose, in a first aspect, an embodiment of the present application discloses a mask plate for an evaporation process, comprising:

[0006] A frame, wherein the frame comprises two frame edges, the two frame edges are parallel to each other, and the length directions of the two frame edges are arranged along a first direction;

[0007] The mask strip has two ends which are detachably connected to the two frame edges, the mask strip is installed perpendicular to the two frame edges, and the two ends of the mask strip can adjust positions along the first direction on the two frame edges.

[0008] As an optional implementation, guide grooves are provided in the two frame edges, the guide grooves extend along the first direction, and two ends of the mask strip are slidably connected to the guide grooves of the two frame edges respectively.

[0009] As an optional embodiment, the mask plate also includes a fixing member, which is connected to the guide groove and can adjust its position along the first direction in the guide groove. Both ends of the mask strip are connected to the fixing member, and the fixing member can fix the mask strip on the frame edge.

[0010] As an optional embodiment, the fixing member includes a screw and a nut, the nut overlaps the guide groove, the nut can adjust its position in the guide groove along the first direction, the mask strip is connected to the nut, and the screw is threadedly connected to the nut. The mask plate also includes a mounting frame and a support column, the frame is fixedly connected to the support column, the mounting frame is fixedly connected to the support column, the mounting frame, the support column and the frame are sequentially arranged along the second direction, the mounting frame is arranged corresponding to the frame in the second direction, a mounting groove is provided in the mounting frame, the mounting groove is arranged corresponding to the guide groove in the second direction, the length direction of the mounting groove is arranged along the first direction, the screw is placed on the mounting frame corresponding to the nut, after tightening the screw, the screw head of the screw is clamped on the mounting groove, and the screw rod of the screw is inserted into the guide groove through the nut.

[0011] As an optional embodiment, the mounting groove is through in the second direction, the width of the lower notch of the mounting groove is smaller than the diameter of the screw head of the screw and larger than the thread diameter of the screw rod, the screw is placed in the mounting groove corresponding to the nut, and after tightening the screw, the screw head of the screw is clamped at the bottom of the mounting groove to fix the nut on the guide groove.

[0012] As an optional implementation, the nut is provided with a stopper, and the stopper abuts against the side surface of the frame edge.

[0013] As an optional implementation, the stopper may abut against the inner side surface of the frame edge, or may abut against the outer side surface of the frame edge, or may be provided on both the inner and outer side surfaces of the frame edge.

[0014] As an optional implementation, the shape of the stopper may be cylindrical, a special geometric shape (such as a shape with grooves or protrusions), a trapezoid, etc.

[0015] As an optional implementation, the mask strip and the nut are integrally formed.

[0016] As an optional implementation, the mask strip is fixedly connected to the nut.

[0017] As an optional embodiment, the two frame edges of the frame and the mounting frame are marked with scales, the sizes of the scales on the two frame edges correspond to the marks along the installation direction of the mask strip, and the sizes of the frame edges and the scales corresponding to the mounting frame correspond to the marks along the second direction.

[0018] As an optional implementation, the mask plate is made of metal, metal alloy or stainless steel.

[0019] In a second aspect, the present application discloses an evaporation device, which includes a mask plate for an evaporation process as described in any one of the first aspects.

[0020] Compared with the prior art, the beneficial effects of this application are:

[0021] The mask plate with adjustable mask strip position provided in the embodiment of the present application includes a frame and a mask strip, the frame includes two frame edges, the two frame edges are parallel to each other, and the length directions of the two frame edges are arranged along a first direction, the two ends of the mask strip are respectively detachably connected to the two frame edges, the mask strip is installed perpendicular to the two frame edges, and the two ends of the mask strip can adjust the position along the first direction on the two frame edges, so that the position of the mask strip can be moved or disassembled as needed, which is convenient for masking specific areas at different positions of the battery cell that needs to be masked, greatly improving the flexibility and adaptability of the process. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0023] Figure 1 A schematic diagram of the structure of a mask plate used in an evaporation process disclosed in an embodiment of the present application;

[0024] Figure 2 for Figure 1 Sectional view at AA (including frame, fixings and mounting frame);

[0025] Figure 3 A schematic diagram of the structure of a nut and a mask strip disclosed in an embodiment of the present application;

[0026] Figure 4 This is a schematic diagram of the structure of the evaporation equipment disclosed in the embodiment of the present application.

[0027] Description of reference numerals:

[0028] 100-mask plate; 1-frame; 11-frame edge; 111-guide groove; 2-mask strip; 3-fixing piece; 31-screw; 32-nut; 321-stopper; 4-mounting frame; 41-mounting groove; 42-support column; 200-evaporation equipment; 5-battery cell; X-first direction; Y-second direction. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0030] In this application, the terms "upper", "lower", "bottom", "inner", "outer" and the like indicate positions or location relationships based on the positions or location relationships shown in the drawings. These terms are mainly used to better describe the present application and its embodiments, and are not used to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation.

[0031] In addition, some of the above terms may be used to express other meanings in addition to indicating orientation or positional relationship. For example, the term "on" may also be used to express a certain dependency or connection relationship in some cases. For those of ordinary skill in the art, the specific meanings of these terms in this application can be understood according to specific circumstances.

[0032] In addition, the terms "installed", "set", "provided with", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection, or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be an internal connection between two devices, elements, or components. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0033] In addition, the terms "first", "second", etc. are mainly used to distinguish different devices, elements or components (the specific types and structures may be the same or different), and are not used to indicate or imply the relative importance and quantity of the indicated devices, elements or components. Unless otherwise specified, "plurality" means two or more.

[0034] Evaporation mask technology is a key process in the manufacturing process of solar cells. It is mainly used to accurately deposit specific metal layers or semiconductor layers on the cell to form electrode contacts or passivation layers. Evaporation refers to the evaporation or sublimation of the deposited material into gaseous particles. The gaseous particles are quickly transported from the evaporation source to the surface of the substrate. The gaseous particles attach to the surface of the substrate to form nuclei and grow into a solid film. The film atoms are reconstructed or chemically bonded. Evaporation is an early and widely used vapor deposition technology with the advantages of simple film formation method, high film purity and density, and unique film structure and performance. In the field of evaporation technology, the core of this technology lies in "masking", that is, through a specific template or mask plate, the deposition of materials in certain areas is blocked during the evaporation process of the evaporation equipment on the cell, so that the evaporation material is only deposited in the predetermined area, realizing the precise patterning of the cell surface, thereby precisely controlling the local film growth.

[0035] With the diversification of cell film layers, existing mask plates are unable to meet the needs of masking different film layers at different positions, which limits the applicability and efficiency improvement of the process.

[0036] Based on this, an embodiment of the present application discloses a mask plate and an evaporation device for an evaporation process, so that the mask strip can be detached from the two frame edges of the frame, and the position of the mask strip can be adjusted as needed to mask different positions of different film layers of the battery cell that needs to be masked.

[0037] The technical solution of the present application will be further described below in conjunction with embodiments and drawings.

[0038] See also Figure 1 and Figure 4 , Figure 1 Schematic diagram of the structure of a mask plate 100 for an evaporation process disclosed in an embodiment of the present application. Figure 4 The structure diagram of the evaporation device 200 disclosed in the embodiment of the present application is shown in FIG. The embodiment of the present application discloses a mask plate 100 for evaporation process, the mask plate 100 includes a frame 1 and a mask strip 2, the frame 1 includes two frame edges 11, the two frame edges 11 are parallel to each other, and the length direction of the two frame edges 11 is arranged along the first direction X. The two ends of the mask strip 2 are detachably connected to the two frame edges 11, the mask strip 2 is installed perpendicular to the two frame edges 11, and the two ends of the mask strip 2 can adjust the position along the first direction X on the two frame edges 11. In this way, the position of the mask strip 2 can be moved or disassembled on the two frame edges 11 as needed, and the mask plate 100 does not need to be replaced, and the specific area of ​​the battery cell 5 at different positions can be masked as needed, so that the mask plate 100 can adapt to the evaporation requirements of different sizes and positions. When the evaporation process of the battery cell 5 is carried out, the position of the mask strip 2 can be adjusted according to specific needs, so as to achieve accurate masking of specific areas on the battery cell 5, thereby increasing the flexibility and adaptability of the process.

[0039] Combination Figure 1 and Figure 2 , Figure 2 for Figure 1 The cross-sectional view at AA in FIG. 1 (including the frame 1, the fixing member 3 and the mounting frame 4). As an optional embodiment, guide grooves 111 are provided in the two frame edges 11, and the guide grooves 111 extend along the first direction X. The two ends of the mask strip 2 are respectively slidably connected with the guide grooves 111 of the two frame edges 11. In this way, the position of the mask strip 2 can be adjusted in the guide grooves 111 along the first direction X, and the movement path of the mask strip 2 can be more accurately limited.

[0040] There are many ways to connect the mask strip 2 and the guide groove 111 . The mask strip 2 can be directly overlapped on the guide groove 111 or can be detachably connected to the guide groove 111 .

[0041] Please refer to Figure 1 and Figure 2 In some possible implementations, the mask strip 2 is detachably connected to the guide groove 111 through a fixing member 3. The mask plate 100 also includes a fixing member 3, which is connected to the guide groove 111. The fixing member 3 can adjust the position along the first direction X in the guide groove 111. Both ends of the mask strip 2 are connected to the fixing member 3, and the fixing member 3 can fix the mask strip 2 on the frame edge 11. In this way, the fixing member 3 adjusts the position along the first direction X in the guide groove 111 so that the mask strip 2 is located at a specific position so as to mask the position of the battery cell 5 that needs to be masked. After adjusting the position, the fixing member 3 fixes the mask strip 2 on the frame edge 11 so that the mask strip 2 will not be displaced due to the evaporation mask operation during masking. The fixing member 3 not only ensures the stable connection between the mask strip 2 and the frame edge 11, but also reduces the wear caused by the direct contact between the mask strip 2 and the guide groove 111 when the mask strip 2 moves on the guide groove 111.

[0042] It is understandable that there are various structures of the fixing member 3. The mask strip 2 and the guide groove 111 can be connected by pins, and the fixing is achieved by the cooperation of the pins and the holes. The pin connection structure is simple and applicable to holes of different shapes and sizes, and is easy to install and disassemble. The mask strip 2 and the guide groove 111 can also be connected by snap-fitting, and the fixing is achieved by snap-fitting of the positioning member and the fastener. The positioning member is connected to the frame edge, and the fastener is connected to the mask strip 2, so that the mask strip 2 is fixed on the guide groove 111 and can be removed after applying a certain separation force to the fastener, and the position can be adjusted along the first direction X. The mask strip 2 and the guide groove 111 can also be threadedly connected by screws 31 and nuts 32, which has a simple structure, high connection strength, and is easy to disassemble.

[0043] Specifically combined Figure 1 and Figure 2The mask strip 2 is connected to the guide groove 111 by screws 31 and nuts 32. The fixing member 3 includes screws 31 and nuts 32. The nuts 32 overlap the guide groove 111. The nuts 32 can adjust the position in the guide groove 111 along the first direction X. The mask strip 2 is connected to the nuts 32. The screws 31 and the nuts 32 are threadedly connected. The mask plate 100 also includes a mounting frame 4 and a support column 42. The frame 1 is fixedly connected to the support column 42. The mounting frame 4 is fixedly connected to the support column 42. The mounting frame 4, the support column 42 and the frame 1 are sequentially arranged along the second direction Y (a direction perpendicular to the plane of the mask plate 100). The mounting frame 4 is arranged corresponding to the frame 1 in the second direction Y. A mounting groove 41 is arranged in the mounting frame 4. The mounting groove 41 is arranged corresponding to the guide groove 111 in the second direction Y. The length direction of the mounting groove 41 is arranged along the first direction X. After adjusting the position of the nut 32 , the screw 31 is placed on the mounting frame 4 corresponding to the nut 32 , and the screw 31 is tightened. The screw head of the screw 31 is clamped on the mounting groove 41 , and the screw rod of the screw 31 is inserted into the guide groove 111 through the threaded hole of the nut 32 .

[0044] It is understandable that when the screw 31 is connected to the nut 32 but not engaged with the mounting groove 41 , the screw rod portion of the screw 31 is inserted into the guide groove 111 , and the screw rod of the screw 31 can move in the guide groove 111 along the first direction X, thereby driving the nut 32 to adjust its position.

[0045] In this way, the mounting frame 4 is fixedly connected to the frame 1, the screw head of the screw 31 is stuck in the mounting groove 41 in the mounting frame 4 to complete the fixing of the screw 31, and the screw rod of the screw 31 is connected to the nut 32 by threading, so that the nut 32 is fixed in the corresponding position, and then the mask strip 2 is fixed in the corresponding position. The threaded connection mode of the screw 31 and the nut 32 has a simple structure, and the thread is engaged with each other to achieve fastening, with high connection strength and convenient disassembly. When the thread is connected, the bevel angle of the thread and the friction force work together to produce a self-locking effect after tightening. This self-locking feature improves the reliability of the connection and reduces the possibility of loosening. In addition, the setting of the support column 42 provides a supporting effect for the mounting frame 4, and forms a gap between the mounting frame 4 and the frame 1 in the second direction Y, providing space for the matching connection of the nut 32 and the screw 31.

[0046] It should be noted that the distance between the mounting frame 4 and the frame 1 in the second direction Y should be as small as possible while being sufficient to provide space for the nut 32 and the mask strip 2 to move out of the gap between the mounting frame 4 and the frame 1, so that the threaded connection between the screw 31 and the nut 32 is more complete and the fit is tighter.

[0047] See also Figure 2As an optional embodiment, the mounting groove 41 is through in the second direction Y, the width of the lower notch of the mounting groove 41 is smaller than the diameter of the screw head of the screw 31 and larger than the thread diameter of the screw rod of the screw 31, the screw 31 is placed in the mounting groove 41 corresponding to the nut 32, and after tightening the screw 31, the screw head of the screw 31 is clamped at the bottom of the mounting groove 41 to fix the nut 32 on the frame edge 11.

[0048] It can be understood that the screw head of the screw 31 is clamped at the bottom of the mounting groove 41, so that the distance between the screw head of the screw 31 and the nut 32 in the second direction Y can be as close as possible to the distance between the mounting frame 4 and the frame 1 in the second direction Y. In this way, not only space is saved, but also the screw 31 and the nut 32 can fit more tightly and the fixing effect is better.

[0049] Combination Figure 1 and Figure 2 In some embodiments, the nut 32 is provided with a stopper 321, and the stopper 321 abuts against the side of the frame edge 11. When tightening the screw 31, the nut 32 will rotate due to the friction between the screw rod of the screw 31 and the nut 32, and the stopper 321 abuts against the side of the frame edge 11, which can prevent the nut 32 from rotating. The contact between the stopper 321 and the side of the frame edge 11 not only prevents the rotation of the nut 32, but also ensures that the mask strip 2 will not fall off in a direction perpendicular to the first direction X, thereby improving the stability and reliability of the entire structure.

[0050] It is understandable that the stopper 321 may abut against the inner side surface of the frame edge 11 , or may abut against the outer side surface of the frame edge 11 , or may be provided on both the inner and outer side surfaces of the frame edge 11 , which is not limited in this embodiment.

[0051] Optionally, the shape of the stopper 321 may be cylindrical, a special geometric shape (such as a shape with grooves or protrusions), a trapezoid, etc. In the first possible implementation, the circular surface of the cylinder abuts against the side surface of the frame edge 11, and can be evenly stressed; in the second possible implementation, the shape with grooves or protrusions better matches the frame edge 11, increasing the reliability of the stopper, which is not limited in this embodiment.

[0052] See also Figure 3 , Figure 3 This is a schematic diagram of the structure of the nut 32 and the mask strip 2 disclosed in the embodiment of the present application. As an optional embodiment, the mask strip 2 and the nut 32 are integrally formed. In this way, it is convenient to disassemble and install the nut 32 and the mask strip 2 as a whole, and prevent the mask strip 2 from falling off the nut 32 during the evaporation mask process.

[0053] It is understandable that the mask strip 2 and the nut 32 can also be fixedly connected, and the mask strip 2 and the nut 32 can be fixed together by welding. In this way, the nut 32 and the mask strip 2 can be connected on the basis of standard size, and the nut 32 or the mask strip 2 can be replaced separately when adjustment or modification is required, which not only improves the flexibility of design but also saves material costs.

[0054] Combination Figure 1 and Figure 2 In some possible implementations, the two frame edges 11 and the mounting groove 41 of the frame 1 are marked with scales (not shown in the figure), the scales on the two frame edges 11 are correspondingly arranged along the extension direction of the mask strip 2, and the scales on the frame edge 11 and the corresponding mounting frame 4 are correspondingly arranged along the second direction Y. In this way, when the position of the mask strip 2 is adjusted as needed, the positions of the two ends of the mask strip 2 are accurately aligned on a straight line according to the scales corresponding to the scales on the two frame edges 11, and the mask strip 2 is adjusted to the desired position. After the position of the mask strip 2 is adjusted, the screws 31 are accurately placed according to the scales corresponding to the markings on the mounting frame 4 and the frame 1 in the second direction Y, so as to quickly align with the threaded holes on the nuts 32, thereby tightening the screws 31 to fix the mask strip 2, so that the removal and installation of the mask strip 2 are more efficient and the operation time is saved.

[0055] Optionally, the mask plate 100 uses a metal material. Materials such as stainless steel and copper in the metal material can provide good conductivity, heat resistance and chemical stability. Since the evaporation process is masked at high temperatures, the mask plate 100 needs to remain stable at high temperatures. Some metal materials can withstand these temperatures well and will not affect the quality of evaporation due to thermal expansion or contraction. Good chemical stability can ensure that the mask plate 100 is not easy to react with the evaporation material, which helps to maintain the purity and performance of the evaporated film. Metal materials usually have a higher hardness, which allows the mask plate 100 to withstand the mechanical stress during the evaporation process, reduce wear and deformation, and improve durability and the possibility of reuse.

[0056] In a second aspect, the present application discloses an evaporation device 200 , and the evaporation device 200 includes a mask plate 100 for an evaporation process as described in any one of the first aspects.

[0057] Combination Figure 2 and Figure 4After placing the battery cell 5, fix the battery cell 5 by mechanical means or vacuum adsorption to ensure that the position of the battery cell 5 is stable during the evaporation process. Then adjust the position of the mask strip 2, screw the screw 31 to separate the screw 31 from the nut 32, adjust the position of the nut 32 along the first direction X on the frame edge 11, so that a specific size area that meets the mask requirements is formed between the mask strips 2, align the screw 31 with the scale line, place the corresponding nut 32 in the mounting groove 41 in the second direction Y, tighten the screw 31, fix the nut 32 on the frame edge 11, and then fix the mask strip 2 on the frame 1. Place the mask plate 100 above the battery cell 5 so that it is aligned with a specific area on the battery cell 5. The evaporation equipment 200 allows the evaporation material to evaporate in a vacuum environment and deposit on the battery cell 5 through the opening formed between the mask strips 2 on the mask plate 100. After the evaporation is completed, turn off the power of the evaporation equipment 200, allow the battery cell 5 and the evaporation material to cool and solidify, and form a specific pattern on the battery cell 5 for subsequent battery processes.

[0058] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit it. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A mask plate for evaporation process, characterized in that: include: A frame, wherein the frame comprises two frame edges, the two frame edges are parallel to each other, and the length directions of the two frame edges are arranged along a first direction; The mask strip has two ends which are detachably connected to the two frame edges, the mask strip is installed perpendicular to the two frame edges, and the two ends of the mask strip can adjust positions along the first direction on the two frame edges.

2. The mask plate for evaporation process according to claim 1, characterized in that: The two frame edges are each provided with a guide groove, the guide groove extending along the first direction, and the two ends of the mask strip are respectively slidably connected to the guide grooves of the two frame edges.

3. The mask plate for evaporation process according to claim 2, characterized in that: The mask plate also includes a fixing member connected to the guide groove, the fixing member can adjust the position along the first direction in the guide groove, and both ends of the mask strip are connected to the fixing member, and the fixing member can fix the mask strip on the frame edge.

4. The mask plate for evaporation process according to claim 3, characterized in that: The fixing member comprises a screw and a nut, the nut overlaps the guide groove, the nut can adjust its position along the first direction in the guide groove, the mask strip is connected to the nut, and the screw is threadedly connected to the nut; The mask plate also includes a mounting frame and a support column, the frame is fixedly connected to the support column, the mounting frame is fixedly connected to the support column, the mounting frame, the support column and the frame are arranged in sequence along the second direction, the mounting frame is arranged corresponding to the frame in the second direction, a mounting groove is provided in the mounting frame, the mounting groove is arranged corresponding to the guide groove in the second direction, the length direction of the mounting groove is arranged along the first direction, the screw is placed on the mounting frame corresponding to the nut, after tightening the screw, the screw head of the screw is clamped on the mounting groove, and the screw rod of the screw is inserted into the guide groove through the nut.

5. The mask plate for evaporation process according to claim 4, characterized in that: The mounting groove is through in the second direction, the width of the lower notch of the mounting groove is smaller than the diameter of the screw head of the screw and larger than the thread diameter of the screw rod, the screw is placed in the mounting groove corresponding to the nut, and after tightening the screw, the screw head of the screw is clamped at the bottom of the mounting groove to fix the nut on the guide groove.

6. The mask plate for evaporation process according to claim 5, characterized in that: The nut is provided with a stopper, and the stopper abuts against the side surface of the frame edge.

7. The mask plate for evaporation process according to claim 6, characterized in that: The mask strip and the nut are integrally formed.

8. The mask plate for evaporation process according to claim 5, characterized in that: The two frame edges of the frame and the installation frame are marked with scales, the scales on the two frame edges are correspondingly arranged along the extension direction of the mask strip, and the frame edges and the scales corresponding to the installation frame are correspondingly arranged along the second direction.

9. The mask plate for evaporation process according to claim 1, characterized in that: The mask plate is a metal mask plate.

10. A vapor deposition device, characterized in that: It comprises a mask plate for evaporation process as described in any one of claims 1 to 9.

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