Vacuum finger air pressure detection device

By designing a vacuum finger air pressure detection device, the combination of a base, a placement platform, an execution unit and a control unit is used to solve the problem of lack of a special detection device in the prior art, and the detection effect of simplifying the detection process, reducing costs and adapting to vacuum fingers of different thicknesses is achieved.

CN222904102UActive Publication Date: 2025-05-27HONG HU SUZHOU SEMICON TECH CO LTD
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Patent Information

Application Number
CN202421823319.X
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-07-30
Publication Date
2025-05-27
Estimated Expiration
2034-07-30

AI Technical Summary

Technical Problem

The lack of a dedicated negative pressure finger detection device in the prior art causes the detector to use expensive and inconvenient robotic arms for inspection, which increases the detection time and cost.

Method used

A vacuum finger air pressure detection device is designed, including a base, a placing platform, an execution unit and a control unit. Negative pressure detection is achieved by placing the vacuum finger on the placement platform, closing one air hole, and connecting the negative pressure device to the other air hole through the actuator.

Benefits of technology

This device simplifies the detection process of vacuum fingers, reduces detection cost and time, and through the design of stroke plates and chunks, it can adapt to vacuum fingers of different thicknesses, enhancing the versatility of the equipment.

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Abstract

The utility model relates to the field of detection devices, in particular to a vacuum finger air pressure detection device. The vacuum finger is provided with a first air hole and a second air hole which are formed in the lower surface and the upper surface and communicate with each other. The detection device comprises a base station, the base station is provided with a placing platform used for carrying the vacuum finger, and the placing platform can block the first air hole; an execution part and a control part for driving the execution part to move are arranged corresponding to the placing platform, and the execution part is driven by the control part to abut against the vacuum finger; the lower surface of the execution part is a pressing face, the execution part is further provided with a negative-pressure channel, one end of the negative-pressure channel is connected with external negative-pressure equipment, and the other end of the negative-pressure channel is connected with the pressing face and communicated with the second air hole of the vacuum finger. The vacuum finger to be detected is placed on the placement platform, one air hole is closed, and the execution part of the negative pressure equipment is communicated with the other air hole, so that the negative pressure detection operation of the vacuum finger is realized.
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Description

Technical Field

[0001] The utility model relates to the field of detection devices, in particular to a vacuum finger air pressure detection device. Background Art

[0002] At present, the detection method of the vacuum finger is that after the tester gets the vacuum finger, it is installed on the corresponding robotic arm for ventilation detection. The robotic arm is large in mass and expensive, and is not convenient to carry. The tester needs to bring the vacuum finger to the installation position of the robotic arm for detection. For different vacuum fingers, different types of arms need to be installed for detection, which greatly increases the detection time of the tester. Summary of the Utility Model

[0003] The purpose of the utility model is to provide a vacuum finger air pressure detection device to solve the technical problem that there is a lack of a special negative pressure finger detection device in the prior art.

[0004] The technical solution of the utility model is: a vacuum finger air pressure detection device, the vacuum finger has a first air hole and a second air hole which are respectively arranged on the lower surface and the upper surface and are communicated with each other; the detection device includes a base, a placement platform for carrying the vacuum finger is arranged on the base, and the placement platform can block the first air hole; a performing part and a control part for driving the performing part to move are arranged corresponding to the placement platform, and the performing part abuts against the vacuum finger under the drive of the control part;

[0005] The lower surface of the performing part is constructed as a pressing surface, and the performing part is also provided with a negative pressure channel, one end of the negative pressure channel is connected to an external negative pressure device, and the other end is connected to the pressing surface and communicated with the second air hole of the vacuum finger.

[0006] Preferably, a gantry is arranged on the base, the performing part is arranged on the gantry, and includes a pressing beam connected to the control part, and a travel plate is vertically fixed on the pressing beam, and the travel plate presses the vacuum finger.

[0007] Preferably, a pressing block is further arranged in parallel below the travel plate, and the pressing block is connected to the travel plate through a first guiding part and a floating part, and the floating part forms a gap for the pressing block to move relative to the travel plate between the upper surface of the pressing block and the lower surface of the travel plate.

[0008] Preferably, one end of the negative pressure channel is arranged on one side of the pressing block and is connected with a quick-change pipe joint, and the other end is opened below the pressing block.

[0009] Preferably, the control part includes a control rod penetrating through the gantry in the vertical direction and a control handle hinged to one end of the control rod, the end of the control rod far away from the control handle is fixed to the pressing beam, and a place of the control handle far away from the hinged end with the control rod is hinged to the gantry through a connecting rod.

[0010] Preferably, the control handle is arranged in an L-shaped structure, the long side thereof is arranged as a holding part, the short side is hinged to the control rod, and the bent part is hinged to the connecting rod.

[0011] Preferably, a first sealing ring is arranged on the upper surface of the placement platform corresponding to the first air hole of the vacuum finger, and a second sealing ring is arranged on the lower surface of the pressing block corresponding to the second air hole of the vacuum finger.

[0012] Preferably, the stroke plate is connected to the placement platform or the base through a vertically arranged second guiding member.

[0013] Preferably, the stroke plate is horizontally extended outwards with an extension part, one end of the second guiding member penetrates through the extension part, and the other end is arranged on one side of the placement platform, so as to reduce the occupied space of the placement platform.

[0014] Compared with the prior art, the advantages of the present utility model are as follows:

[0015] (1) In this application, the vacuum finger to be detected is placed on the placement platform, one of its air holes is closed, and then the other air hole is communicated with the negative pressure device through the execution part, so as to realize the negative pressure detection operation of the vacuum finger.

[0016] (2) A stroke plate and a pressing block are arranged in the execution part, and there is a certain gap for the pressing block to adaptively rebound between the pressing block and the stroke plate through an elastic member. When testing vacuum fingers with different thicknesses, the pressing block can adaptively rebound, enhancing the versatility of the device. Description of the Drawings

[0017] The present utility model will be further described below in conjunction with the drawings and embodiments:

[0018] Figure 1 It is a structural diagram of the bottom of the vacuum finger of the present utility model;

[0019] Figure 2 It is a structural diagram of the top of the vacuum finger of the present utility model;

[0020] Figure 3 It is a structural diagram of a vacuum finger air pressure detection device of the present utility model;

[0021] Figure 4 It is a structural diagram of a vacuum finger air pressure detection device of the present utility model;

[0022] Figure 5 It is an exploded view of the execution part of the present utility model;

[0023] Figure 6 It is a schematic cross-sectional view of the negative pressure channel of the present utility model;

[0024] Wherein: 1. Vacuum finger, 11. First air hole, 12. Second air hole, 2. Base, 3. Placing platform, 41. First sealing ring, 42. Second sealing ring, 5. Execution part, 51. Pressing beam, 52. Stroke plate, 53. Pressing block, 54. First guiding part, 55. Floating part, 56. Quick-change pipe joint, 6. Control part, 61. Control rod, 62. Control handle, 63. Connecting rod, 7. Gantry, 8. Negative pressure channel, 9. Second guiding part. Detailed implementation manners

[0025] To facilitate the understanding of the present application, the application scenario of the present application is briefly described first:

[0026] As Figure 1 and Figure 2 shown, the vacuum finger 1 is respectively provided with a first air hole 11 and a second air hole 12 on the lower surface and the upper surface, and the first air hole 11 and the second air hole 12 are communicated with each other through an air passage inside the vacuum finger 1. The test carried out in the present application is to test the airtightness of the air passage. After any one of the air holes is blocked, negative pressure is connected to the other air hole to test its pressure holding pressure and the pressure holding time under the corresponding pressure.

[0027] The following further details the content of the present utility model in conjunction with specific embodiments:

[0028] As Figure 2 and Figure 3 shown, a vacuum finger air pressure detection device includes a base 2, a placing platform 3 for carrying the vacuum finger 1 is fixed on the base 2, and a first sealing ring 41 capable of blocking the first air hole 11 is arranged on the placing platform 3. Corresponding to the placing platform 3, an execution part 5 and a control part 6 for driving the execution part 5 to act are provided. By pulling the control part 6, the execution part 5 can be driven to move up and down, so as to abut against the vacuum finger 1. And, as Figure 6 shown, the lower surface of the execution part 5 is configured as a pressing surface for abutting against the vacuum finger 1, and a negative pressure channel 8 communicating the external negative pressure device with the pressing surface is arranged on the execution part 5. When the execution part 5 abuts against the vacuum finger 1, the negative pressure channel 8 is communicated with the second air hole 12 of the vacuum finger 1 under the action of the second sealing ring 42 arranged on the execution part 5.

[0029] Specifically, a gantry 7 straddling above the placing platform 3 is arranged on the base 2, and the execution part 5 is arranged in the middle of the gantry 7. As Figure 4 shown, it includes a pressing beam 51, the pressing beam 51 is arranged in a herringbone structure, the top is connected to the control part 6, and the bottom is fixed with a horizontally arranged stroke plate 52. The lower surface of the stroke plate 52 can be used as a pressing surface, and the vacuum finger 1 can be pressed under the drive of the control part 6.

[0030] In a preferred embodiment, in order to be compatible with the detection of vacuum fingers 1 of different specifications and different thicknesses, a pressure block 53 is further arranged in parallel below the stroke plate 52. The pressure block 53 is connected to the stroke plate 52 through a first guide member 54 and a floating member 55. The floating member 55 leaves a gap for the movement of the pressure block 53 between the upper surface of the pressure block 53 and the lower surface of the stroke plate 52, so as to achieve compatibility with vacuum fingers 1 of different thicknesses. Among them, the floating member 55 adopts a spring. As Figure 6 shown, a quick-change pipe joint 56 is arranged on one side of the pressure block 53. A second sealing ring 42 is arranged on the lower surface of the pressure block 53 corresponding to the position of the first sealing ring 41 on the placement platform 3, and a negative pressure channel 8 communicating with the quick-change pipe joint 56 is arranged here.

[0031] In order to make the lifting movement of the actuator 5 more stable, a vertical second guide member 9 is further arranged to connect the placement platform 3 and the stroke plate 52. In order to avoid occupying too much space on the placement platform 3, the stroke plate 52 is provided with an extended portion extending outwards. The extended portion cooperates with the second guide member 9, so that the bottom end of the second guide member 9 can be arranged on one side of the placement platform 3.

[0032] As Figure 4 shown, the control part 6 includes a control rod 61, a control handle 62 and a connecting rod 63. Among them, one end of the control rod 61 is hinged to the control handle 62, and the other end penetrates through the gantry 7 in the vertical direction and is fixed to the pressing beam 51. The control handle 62 is arranged in an L-shaped structure, the long side thereof is arranged as a holding part, and the short side is hinged to the control rod 61. Both ends of the connecting rod 63 are hinged to the bending part of the gantry 7 and the control handle 62 respectively. With such an arrangement, when the control handle 62 is pulled to swing, the actuator 5 can be driven to lift under the action of the connecting rod 63.

[0033] The above embodiments are only used to illustrate the technical concept and characteristics of the present invention, and the purpose is to enable those who are familiar with this technology to understand the content of the present invention and implement it accordingly, and it cannot be used to limit the protection scope of the present invention. For those skilled in the art, it is obvious that the present invention is not limited to the details of the above exemplary embodiments, and can be implemented in other specific forms without departing from the spirit or basic characteristics of the present invention. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-limiting. The scope of the present invention is defined by the appended claims rather than the above description. Therefore, it is intended to include all changes falling within the meaning and scope of the equivalent elements of the claims in the present invention.

Claims

1. A vacuum finger air pressure detection device, wherein the vacuum finger (1) has a first air hole (11) and a second air hole (12) which are respectively arranged on the lower surface and the upper surface and are connected to each other; characterized in that: The detection device comprises a base (2), on which a placement platform (3) for carrying a vacuum finger (1) is arranged, and the placement platform (3) is capable of blocking a first air hole (11); an execution unit (5) and a control unit (6) for driving the execution unit (5) to move are arranged corresponding to the placement platform (3), and the execution unit (5) is driven by the control unit (6) to abut against the vacuum finger (1); The lower surface of the actuator (5) is configured as a pressing surface. The actuator (5) is also provided with a negative pressure channel (8). One end of the negative pressure channel (8) is connected to an external negative pressure device, and the other end is connected to the pressing surface and communicates with the second air hole (12) of the vacuum finger (1).

2. A vacuum finger air pressure detection device according to claim 1, characterized in that: A gantry (7) is arranged on the base (2), and the execution unit (5) is arranged on the gantry (7), comprising a pressing beam (51) connected to the control unit (6), and a travel plate (52) is vertically fixed to the pressing beam (51), and the travel plate (52) presses the vacuum finger (1).

3. A vacuum finger air pressure detection device according to claim 2, characterized in that: A pressure block (53) is also arranged parallel to the stroke plate (52), and the pressure block (53) is connected to the stroke plate (52) via a first guide member (54) and a floating member (55). The floating member (55) forms a gap between the upper surface of the pressure block (53) and the lower surface of the stroke plate (52) for the pressure block (53) to move relative to the stroke plate (52).

4. A vacuum finger air pressure detection device according to claim 3, characterized in that: One end of the negative pressure channel (8) is arranged on one side of the pressing block (53) and is connected to a quick-change pipe joint (56), and the other end is opened below the pressing block (53).

5. The vacuum finger air pressure detection device according to claim 2, characterized in that: The control part (6) comprises a control rod (61) which is arranged to pass through the gantry (7) in the vertical direction and a control handle (62) which is hinged to one end of the control rod (61); one end of the control rod (61) which is away from the control handle (62) is fixed to the pressing beam (51); and a point of the control handle (62) which is away from the hinged end of the control rod (61) is hinged to the gantry (7) through a connecting rod (63).

6. A vacuum finger air pressure detection device according to claim 5, characterized in that: The control handle (62) is configured as an L-shaped structure, wherein the long side is configured as a gripping portion, the short side is hinged to the control rod (61), and the bending portion is hinged to the connecting rod (63).

7. A vacuum finger air pressure detection device according to claim 4, characterized in that: A first sealing ring (41) is provided on the upper surface of the placement platform (3) corresponding to the first air hole (11) of the vacuum finger (1), and a second sealing ring (42) is provided on the lower surface of the pressing block (53) corresponding to the second air hole (12) of the vacuum finger (1).

8. The vacuum finger air pressure detection device according to claim 2, characterized in that: The travel plate (52) is connected to the placement platform (3) or the base (2) via a second vertically arranged guide member (9).

9. A vacuum finger air pressure detection device according to claim 8, characterized in that: The travel plate (52) is horizontally extended outward to form an extension portion, one end of the second guide member (9) passes through the extension portion, and the other end is arranged on one side of the placement platform (3), thereby reducing the space occupied by the placement platform (3).