Line source evaporation crucible capable of preventing dripping and splashing

Abstract

According to the anti-dripping and anti-splashing line source evaporation crucible, through inclined arrangement of the peripheral side wall of a line source crucible cover, inclined arrangement of the peripheral side wall of a nozzle and arrangement of a guide rod on the inner side wall of the nozzle, after long-time evaporation work, the anti-dripping and anti-splashing line source evaporation crucible is not prone to splashing; evaporation material liquid drops which are adhered to the inner top surface of the line source crucible cover and are accumulated into liquid drops can slide onto the vertical inner side wall of the crucible body along the inner side wall which is obliquely arranged on the peripheral side of the line source crucible cover and slide into the molten evaporation material in the inner cavity of the crucible body; in addition, evaporation material liquid drops which are attached to the inner side wall of the nozzle and accumulated into liquid drops can slide to the upper end of the guide rod along the inclined inner side wall of the nozzle and slide into the molten evaporation material in the inner cavity of the crucible body along the vertical side wall of the guide rod, and the situation of drop splashing is avoided in the process. Therefore, the evaporation and dissipation effect of the evaporation material of the crucible body is prevented from being affected by the dripping and splashing situation formed by dripping of the liquid drops.

Description

Technical Field

[0001] The present application relates to the technical field, and specifically relates to a drip-proof wire source evaporation crucible. Background Art

[0002] In the current vacuum evaporation preparation of OLED devices, the wire source crucible, as the evaporation source of the evaporation equipment, places the material to be evaporated in the crucible of the vacuum evaporation source device. By heating the crucible, the material changes from a solid state to gaseous atoms, atomic groups or molecules and diffuses upward through the nozzle opening on the upper cover of the crucible, and then condenses on the surface of the substrate to be coated to form a thin film for realizing the light emission of the OLED device. The inner top surface of the wire source crucible cover of the existing wire source evaporation crucible is usually a flat structure and the nozzles on the crucible cover are vertically arranged. After the evaporation material in the crucible evaporates, it will first accumulate on the inner top surface of the wire source crucible cover, and then dissipate from the nozzles. During this process, some of the evaporated evaporation materials will adhere to the inner top surface of the wire source crucible cover and the inner side wall of the nozzle. After a long time, the gaseous evaporation materials adhering to the inner top surface of the wire source crucible cover and the inner side wall of the nozzle will accumulate into liquid droplets and drip into the molten evaporation materials in the inner cavity of the crucible body due to their own weight, forming a dripping and splashing situation, which may affect the evaporation and dissipation effect of the evaporation materials in the crucible body. Summary of the Utility Model

[0003] Aiming at the deficiencies of the existing technology, the purpose of the present application is to provide a drip-proof wire source evaporation crucible to solve the problems raised in the above background art.

[0004] According to one aspect of the present application, a drip-proof wire source evaporation crucible includes a crucible body, a wire source crucible cover and nozzles. The wire source crucible cover is arranged on the top of the crucible body. A plurality of nozzles are arranged on the wire source crucible cover along its length direction. The side wall planes on both sides of the nozzles along the length direction of the wire source crucible cover are inclined with respect to the horizontal direction and form an included angle α, and the inclined side walls on both sides of the wire source crucible cover along its length direction are symmetrically arranged. The side wall planes on both sides of the nozzles along the width direction of the wire source crucible cover are inclined with respect to the horizontal direction and form an included angle β, and the inclined side walls on both sides of the wire source crucible cover along its width direction are symmetrically arranged. Each nozzle is a frustum-shaped structure. The tangent plane of the circumferential side wall of each nozzle is inclined with respect to the horizontal direction and forms an included angle θ. A guiding rod is vertically fixed on the inner side wall of each nozzle.

[0005] Preferably, a plurality of the guiding rods are circumferentially and equidistantly fixed at the bottom of the inner side wall of each nozzle. Each guiding rod is vertically arranged and extends into the inner cavity of the crucible body.

[0006] Preferably, guiding inclined surfaces are symmetrically arranged in the width direction of the wire source crucible cover at positions between adjacent two of the nozzles on the inner top surface of the wire source crucible cover, and an included angle γ is formed between the plane where the guiding inclined surface is located and the horizontal direction.

[0007] Preferably, the included angle γ is smaller than the included angle β, and the included angle γ satisfies: 10° ≤ α ≤ 20°.

[0008] Preferably, the included angle α is equal to the included angle β, and the included angles α and β satisfy: 30° ≤ α ≤ 60°.

[0009] Preferably, the included angle θ satisfies: 60° ≤ α ≤ 80°.

[0010] Preferably, the guiding rod is made of graphite.

[0011] The advantages of the present application compared with the prior art are as follows: For a splash-proof wire source evaporation crucible of the present application, through the inclined arrangement of the side wall on the periphery of the wire source crucible cover, the inclined arrangement of the side wall on the periphery of the nozzle, and the arrangement of the guiding rod on the inner side wall, after a long-time evaporation operation, the evaporation material droplets that accumulate into liquid droplets on the inner top surface of the wire source crucible cover will slide along the inclined inner side wall on the periphery of the wire source crucible cover to the vertical inner side wall of the crucible body and then slide into the evaporation material melted in the inner cavity of the crucible body. In addition, the evaporation material droplets that accumulate into liquid droplets on the inner side wall of the nozzle will slide along the inclined inner side wall of the nozzle to the upper end of the guiding rod and then slide along the vertical side wall of the guiding rod into the evaporation material melted in the inner cavity of the crucible body. No splashing situation will occur during this process, thereby avoiding the splashing situation caused by liquid droplets dripping and affecting the evaporation and dissipation effect of the evaporation material in the crucible body. Description of the Drawings

[0012] Figure 1 is a perspective view of a splash-proof wire source evaporation crucible according to an embodiment of the present application.

[0013] Figure 2 is a main cross-sectional view of a splash-proof wire source evaporation crucible according to an embodiment of the present application.

[0014] Figure 3 is a side cross-sectional view at the nozzle of a splash-proof wire source evaporation crucible according to an embodiment of the present application.

[0015] Figure 4 is a side cross-sectional view between adjacent nozzles of a splash-proof wire source evaporation crucible according to an embodiment of the present application.

[0016] Reference Numerals: 1, crucible body; 2, wire source crucible cover; 3, nozzle; 4, guiding rod; 5, guiding inclined surface. Detailed Embodiments

[0017] In order to make the content of this application easier to be clearly understood, the following will clearly and completely describe the technical solutions in the embodiments of this application in conjunction with the accompanying drawings in the embodiments of this application. It should be noted that the words "front", "rear", "left", "right", "upper" and "lower" used in the following description refer to the directions in the Figure 2 accompanying drawings, and the words "inner" and "outer" respectively refer to the directions towards or away from the geometric center of a specific component.

[0018] Such as Figures 1 to 4As shown in the figure, a drip-proof wire source evaporation crucible includes a crucible body 1, a wire source crucible cover 2, and nozzles 3. A wire source crucible cover 2 is provided on the top of the crucible body 1. A plurality of nozzles 3 are arranged along the length direction of the wire source crucible cover 2. The planes of the side walls on both sides of the nozzles 3 along the length direction of the wire source crucible cover 2 are inclined with respect to the horizontal direction, and the included angle α formed by the two satisfies: 30° ≤ α ≤ 60°. In this angle range, the evaporation material droplets accumulated on the inner top surface of the wire source crucible cover 2 will not directly drip but can slide along the inclined side walls. Moreover, the inclined side walls arranged along the length direction of the wire source crucible cover 2 are symmetrically arranged. This setting facilitates the evaporation material droplets that accumulate into droplets and adhere to the inner top surface of the wire source crucible cover 2 to slide along the two inclined side walls in the length direction of the wire source crucible cover 2 to the vertical inner side wall of the crucible body 1 and then slide into the evaporation material melted in the inner cavity of the crucible body 1. The planes of the side walls on both sides of the nozzles 3 along the width direction of the wire source crucible cover 2 are inclined with respect to the horizontal direction, and the included angle β formed by the two satisfies: 30° ≤ α ≤ 60°. In this angle range, the evaporation material droplets accumulated on the inner top surface of the wire source crucible cover 2 will not directly drip but can slide along the inclined side walls. Moreover, the inclined side walls arranged along the width direction of the wire source crucible cover 2 are symmetrically arranged. This setting facilitates the evaporation material droplets that accumulate into droplets and adhere to the inner top surface of the wire source crucible cover 2 to slide along the two inclined side walls in the width direction of the wire source crucible cover 2 to the vertical inner side wall of the crucible body 1 and then slide into the evaporation material melted in the inner cavity of the crucible body 1. Each nozzle 3 has a frustum-shaped structure. The tangent plane of the circumferential side wall of each nozzle 3 is inclined with respect to the horizontal direction, and the included angle θ formed by the two satisfies: 60° ≤ θ ≤ 80°. In this angle range, the evaporation material droplets accumulated on the inner side wall of the nozzle 3 can slide along the inclined side wall to the upper end of the guide rod 4. A plurality of guide rods 4 are fixedly arranged at equal intervals along the circumference at the bottom of the inner side wall of each nozzle 3. Each guide rod 4 is vertically arranged and extends into the inner cavity of the crucible body 1, so that the droplets can slide along the guide rod 4 into the evaporation material melted in the inner cavity of the crucible body 1. The material of the guide rod 4 is graphite, so that the guide rod 4 has good heat resistance and thermal conductivity. In addition, guide slopes 5 are symmetrically arranged along the width direction of the wire source crucible cover 2 at the positions between adjacent two nozzles 3 on the inner top surface of the wire source crucible cover 2. The plane of the guide slope 5 forms an included angle γ with the horizontal direction, and the included angle γ is smaller than the included angle β, and the included angle γ satisfies: 10° ≤ γ ≤ 20°. This setting enables the evaporation material droplets adhering to the inner top surface of the wire source crucible cover 2 between adjacent two nozzles 3 to slide along the guide slope 5 to the two inclined side walls in the width direction of the wire source crucible cover 2, and then slide along the inclined side walls to the vertical inner side wall of the crucible body 1 and then slide into the evaporation material melted in the inner cavity of the crucible body 1.

[0019] In summary, through the inclined setting of the circumferential side wall of the wire source crucible cover 2, the inclined setting of the circumferential side wall of the nozzle 3, and the setting of the guide rod 4 on its inner side wall, after long-term evaporation coating work, the evaporation coating material droplets that accumulate into droplets on the inner top surface of the wire source crucible cover 2 will slide down along the inner side wall of the circumferential side of the wire source crucible cover 2 to the vertical inner side wall of the crucible body 1 and then slide into the evaporation coating material melted in the inner cavity of the crucible body 1. In addition, the evaporation coating material droplets that accumulate into droplets on the inner side wall of the nozzle 3 will slide down along the inclined inner side wall of the nozzle 3 to the upper end of the guide rod 4 and then slide down along the vertical side wall of the guide rod 4 into the evaporation coating material melted in the inner cavity of the crucible body 1. No splashing situation will occur during this process, thus avoiding the splashing situation caused by the dripping of droplets and affecting the evaporation and dissipation effect of the evaporation coating material in the crucible body 1.

[0020] The above embodiments are only used to illustrate the technical solutions of the embodiments of the present application, and are not intended to limit them. Although the embodiments of the present application have been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that without departing from the spirit and scope defined by the claims of the present application, they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements for some of the technical features.

Claims

1. A drip-proof linear source evaporation crucible, comprising a crucible body (1), a linear source crucible cover (2) and a nozzle (3), wherein the top of the crucible body (1) is provided with a linear source crucible cover (2), and a plurality of nozzles (3) are provided on the linear source crucible cover (2) along its length direction, characterized in that: The planes of the side walls of the linear source crucible cover (2) located on both sides of the nozzle (3) along the length direction thereof are inclined with respect to the horizontal direction and form an angle α, and the inclined side walls of the linear source crucible cover (2) along the length direction thereof are symmetrically arranged, the planes of the side walls of the linear source crucible cover (2) located on both sides of the nozzle (3) along the width direction thereof are inclined with respect to the horizontal direction and form an angle β, and the inclined side walls of the linear source crucible cover (2) along the width direction thereof are symmetrically arranged, each of the nozzles (3) is a truncated cone structure, the tangent plane of the peripheral side wall of each of the nozzles (3) is inclined with respect to the horizontal direction and form an angle θ, and a guide rod (4) is vertically fixed on the inner side wall of each of the nozzles (3).

2. The anti-splashing line source evaporation crucible according to claim 1, characterized in that: A plurality of guide rods (4) are fixedly provided at equal intervals along the circumference of the inner side wall bottom of each nozzle (3); each guide rod (4) is vertically arranged and extends into the inner cavity of the crucible body (1).

3. The anti-splashing line source evaporation crucible according to claim 1, characterized in that: Guide slopes (5) are symmetrically arranged along the width direction of the line source crucible cover (2) at positions between two adjacent nozzles (3) on the inner top surface of the line source crucible cover (2), and the plane where the guide slopes (5) are located forms an angle γ with the horizontal direction.

4. The anti-splashing line source evaporation crucible according to claim 3, characterized in that: The angle γ is smaller than the angle β, and the angle γ satisfies: 10°≤γ≤20°.

5. The anti-splashing line source evaporation crucible according to claim 4, characterized in that: The angle α is equal to the angle β, and the angle α and the angle β satisfy: 30°≤α=β≤60°.

6. The anti-splashing line source evaporation crucible according to claim 1, characterized in that: The angle θ satisfies: 60°≤θ≤80°.

7. The anti-splashing line source evaporation crucible according to claim 1, characterized in that: The guide rod (4) is made of graphite.

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