Control valve and coating system

Abstract

The utility model relates to the technical field of semiconductors or photovoltaics, in particular to a control valve and a coating system, and aims to solve the problem that the opening degree of an existing control valve used for controlling connection and disconnection between a process chamber and a vacuum device cannot be adjusted. According to the control valve, the first end of a first guide rod is connected with a first valve element, the second end of the first guide rod penetrates through a first guide hole, a first adjusting driving assembly is connected with or abuts against the second end of the first guide rod, and the first adjusting driving assembly can drive the first guide rod to slide along the first guide hole; the first guide rod drives the first valve element to move in the first containing cavity, so that the cross sectional area of the first air channel is adjusted, the opening degree of the first valve element in the control valve is changed and controlled, the opening degree of the control valve can be flexibly adjusted according to different process requirements, the gas flow and pressure in the film coating process are controlled, and the film coating efficiency is improved. And the reduction of energy consumption and material waste in the coating process is also facilitated.

Description

Technical Field

[0001] This application relates to the field of semiconductor or photovoltaic technologies, and particularly to a control valve and a coating system. Background Art

[0002] In the manufacturing process of semiconductor and photovoltaic products, a vacuum environment plays a crucial role in ensuring product quality and process stability. Especially in the process chamber of coating equipment, through vacuum pumping, contamination and impurity interference can be reduced, thereby obtaining a high-quality thin film deposition or coating effect. In this process, a vacuum device is used to evacuate the process chamber of the coating equipment.

[0003] However, although the vacuum device can effectively evacuate the process chamber, there are still certain limitations in the design of the control valve that controls the on / off between the process chamber and the vacuum device. Traditional control valves can usually only achieve simple on / off control, that is, in a fully open or fully closed state, and cannot adjust the opening degree. Summary of the Utility Model

[0004] In view of this, an embodiment of this application provides a control valve and a coating system to solve the problem that the existing control valve for controlling the on / off between the process chamber and the vacuum device cannot adjust the opening degree.

[0005] In a first aspect, an embodiment of this application provides a control valve, including: a first ventilation pipeline; a second ventilation pipeline; a first valve body having a first accommodation cavity and a first guiding hole, the first ventilation pipeline and the second ventilation pipeline can be communicated through the first accommodation cavity, and the first guiding hole is communicated with the first accommodation cavity; a first guiding rod, the first guiding rod is disposed through the first guiding hole, and the first end of the first guiding rod is located in the first accommodation cavity; a first valve core, disposed at the first end of the first guiding rod, and can move in the first accommodation cavity following the first end of the first guiding rod to form a first air passage with the first ventilation pipeline or the second ventilation pipeline; a first adjustment driving assembly, connected to or abutted against the second end of the first guiding rod; wherein, the first adjustment driving assembly is configured to drive the first guiding rod to slide along the first guiding hole, so that the first guiding rod drives the first valve core to move in the first accommodation cavity to adjust the cross-sectional area of the first air passage.

[0006] In combination with the first aspect, in some implementation manners of the first aspect, the first valve core can form a first air passage with the first end of the first ventilation pipeline; wherein, the first guiding rod drives the first valve core to move along a first direction to change the distance between the first valve core and the first end of the first ventilation pipeline, and adjust the cross-sectional area of the first air passage; the first direction is parallel to the axial direction of the first end of the first ventilation pipeline.

[0007] In connection with the first aspect, in certain implementations of the first aspect, the first valve body further has a first threaded hole on the side of the first guide hole away from the first valve core; wherein, the first adjustment drive assembly includes: a first drive rod, the first end of the first drive rod abuts against the second end of the first guide rod, the first drive rod has a thread, the first drive rod passes through the first threaded hole and is screwed to the first valve body through the first threaded hole; wherein, the control valve further includes: a first elastic member, the first end of the first elastic member is connected to the first valve core, and the second end of the first elastic member is connected to the first valve body, so that the first adjustment drive assembly abuts against the second end of the first guide rod; wherein, rotating the first drive rod in the first rotation direction reduces the cross-sectional area of the first air passage or the first valve core blocks the first ventilation pipe; rotating the first drive rod in the second rotation direction increases the cross-sectional area of the first air passage or the first valve core opens the first ventilation pipe; wherein, the first rotation direction and the second rotation direction are opposite.

[0008] In connection with the first aspect, in certain implementations of the first aspect, the second end of the first guide rod has a first limiting portion; the first valve body has a second limiting portion on the side of the first threaded hole close to the first guide hole, and the first valve body has a third limiting portion on the side of the first guide hole close to the first threaded hole; wherein, the first limiting portion is located between the second limiting portion and the third limiting portion, and the second limiting portion and the third limiting portion are configured to limit the moving range of the first limiting portion in the extending direction of the first guide rod; when the first limiting portion contacts the second limiting portion, the cross-sectional area of the first air passage is the largest.

[0009] In connection with the first aspect, in certain implementations of the first aspect, the first valve body includes: a first sub-valve body having a first threaded hole; a second sub-valve body connected to the first sub-valve body, having a first guide hole, and sealingly connected to the first ventilation pipe and the second ventilation pipe, the second sub-valve body having a first accommodating cavity; wherein, the first sub-valve body has a second limiting portion on the side close to the second sub-valve body, and the second sub-valve body has a third limiting portion on the side close to the first sub-valve body.

[0010] In connection with the first aspect, in certain implementations of the first aspect, the second end of the first ventilation pipe has a first cooling cavity, the first cooling cavity is disposed around the second end of the first ventilation pipe, and the first cooling cavity is configured to accommodate a cooling medium, wherein, the second end of the first ventilation pipe is the end of the first ventilation pipe away from the first accommodating cavity, and / or the second end of the second ventilation pipe has a second cooling cavity, the second cooling cavity is disposed around the second end of the second ventilation pipe, and the second cooling cavity is configured to accommodate a cooling medium, wherein, the second end of the second ventilation pipe is the end of the second ventilation pipe away from the first accommodating cavity.

[0011] In combination with the first aspect, in some implementations of the first aspect, the control valve further includes: a first seal, disposed on the first valve core and located on a side of the first valve core away from the first guide rod; wherein, the first valve body has a third cooling cavity; when the first valve core moves, it drives the first seal to move, and the third cooling cavity is disposed in a part of the first valve body corresponding to the moving range of the first seal.

[0012] In combination with the first aspect, in some implementations of the first aspect, the first end of the first elastic member is connected to a side of the first valve core close to the first guide rod; wherein, the control valve further includes: a first elastic sealing tube, the first end of the first elastic sealing tube is sealingly connected to the first valve core, and the second end of the first elastic sealing tube is sealingly connected to the first valve body, so that the first elastic sealing tube and the first valve core and the first valve body form a sealed space, and the first elastic member and at least part of the first guide rod are located in the sealed space.

[0013] In combination with the first aspect, in some implementations of the first aspect, the first valve body has a plurality of air blowing holes, the air blowing holes communicate the first accommodation cavity with the outside, and the air blowing holes are configured to blow air to the second end of the first elastic sealing tube.

[0014] In combination with the first aspect, in some implementations of the first aspect, the control valve further includes: a third ventilation pipe, communicating with the first ventilation pipe; a fourth ventilation pipe, communicating with the second ventilation pipe; a second valve body, having a second accommodation cavity, and the third ventilation pipe and the fourth ventilation pipe can communicate through the second accommodation cavity; a second valve core, disposed in the second accommodation cavity and configured to control the communication state between the third ventilation pipe and the fourth ventilation pipe; wherein, the cross-sectional area of the third ventilation pipe and / or the cross-sectional area of the fourth ventilation pipe is less than the cross-sectional area of the first ventilation pipe and / or the cross-sectional area of the second ventilation pipe.

[0015] In combination with the first aspect, in some implementations of the first aspect, the second valve body further has a second guide hole, the second guide hole communicates with the second accommodation cavity; wherein, the control valve further includes: a second guide rod, the second guide rod passes through the second guide hole, and the first end of the second guide rod is located in the second accommodation cavity; a second adjustment driving assembly, connected to or abutted against the second end of the second guide rod; wherein, the second valve core is disposed at the first end of the second guide rod and can move in the second accommodation cavity following the first end of the second guide rod to form a second air passage with the third ventilation pipe or the fourth ventilation pipe; the second adjustment driving assembly is configured to drive the second guide rod to slide along the second guide hole, so that the second guide rod drives the second valve core to move in the second accommodation cavity to adjust the cross-sectional area of the second air passage.

[0016] In a second aspect, an embodiment of the present application provides a coating system, including: a coating device having a process chamber; a vacuum device capable of communicating with the process chamber and configured to evacuate the process chamber; a control valve mentioned in any item of the first aspect, disposed between the vacuum device and the coating device and configured to control the communication state between the vacuum device and the process chamber.

[0017] For the control valve provided in this embodiment, the first adjustment driving component can drive the first guide rod to slide along the first guide hole, so that the first guide rod drives the first valve core to move in the first accommodation cavity, thereby adjusting the cross-sectional area of the first air passage, realizing the change and control of the opening degree of the first valve core in the control valve, enabling the control valve to flexibly adjust the opening degree according to different process requirements to control the gas flow rate and pressure during the coating process, and also being beneficial to reducing energy consumption and material waste during the coating process. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] By describing the embodiments of the present application in more detail in conjunction with the accompanying drawings, the above and other objects, features, and advantages of the present application will become more obvious. The accompanying drawings are used to provide a further understanding of the embodiments of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation to the present application. In the accompanying drawings, the same reference numerals generally represent the same components or steps.

[0019] Figure 1 Shown is a schematic structural diagram of a coating system provided by an embodiment of the present application.

[0020] Figure 2 Shown is a schematic structural diagram of a control valve provided by an embodiment of the present application.

[0021] Figure 3 Shown is a schematic top view of a control valve provided by an embodiment of the present application.

[0022] Figure 4 Shown is provided by an embodiment of the present application Figure 3 Shown is a schematic cross-sectional structure diagram of the shown control valve along A-A.

[0023] Figure 5 Shown is provided by an embodiment of the present application Figure 4 A partial enlarged schematic diagram at B in the above.

[0024] Figure 6 Shown is a schematic structural diagram of a control valve provided by an embodiment of the present application.

[0025] Figure 7 Shown is a schematic structural diagram of a control valve provided by another embodiment of the present application.

[0026] Figure 8The following shows a cross-sectional view taken along C-C of the control valve provided by an embodiment of the present application. Figure 3 The following shows a cross-sectional view taken along C-C of the control valve shown.

[0027] Figure 9 The following shows a cross-sectional view taken along D-D of the third cooling chamber in the following. Figure 3 The following shows a cross-sectional view taken along D-D of the third cooling chamber in the following.

[0028] Reference numerals:

[0029] 1. Coating system; 10. Control valve; 11. First ventilation pipeline; 110. First end of the first ventilation pipeline; 111. Second end of the first ventilation pipeline; 1110. First cooling chamber; 1111. First fluid inlet; 12. Second ventilation pipeline; 120. First end of the second ventilation pipeline; 121. Second end of the second ventilation pipeline; 1210. Second cooling chamber; 1211. Second fluid inlet; 1212. Second fluid outlet; 13. First valve body; 130. First accommodating chamber; 131. First guiding hole; 132. First threaded hole; 133. Second limiting portion; 134. Third limiting portion; 135. First sub-valve body; 136. Second sub-valve body; 1360. Sunk groove; 1361. Third sub-valve body; 1362. Fourth sub-valve body; 137. Third cooling chamber; 1370. Third fluid inlet; 1371. Third fluid outlet; 138. Blowing hole; 14. First valve core; 15. First guiding rod; 150. First end of the first guiding rod; 151. Second end of the first guiding rod; 152. First limiting portion; 16. First adjusting and driving assembly; 160. First driving rod; 1600. First end of the first driving rod; 1601. Second end of the first driving rod; 161. Locking nut; 17. First air passage; 18. First elastic member; 180. First end of the first elastic member; 181. Second end of the first elastic member; 19. First seal; 20. Coating equipment; 21. Process chamber; 30. Vacuum device; 40. First elastic sealing tube; 400. First end of the first elastic sealing tube; 401. Second end of the first elastic sealing tube; 402. Connecting portion; 41. Third ventilation pipeline; 42. Fourth ventilation pipeline; 43. Second valve body; 430. Second accommodating chamber; 431. Second guiding hole; 44. Second valve core; 45. Second guiding rod; 450. First end of the second guiding rod; 451. Second end of the second guiding rod; 46. Second adjusting and driving assembly. Detailed implementation manners

[0030] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without creative efforts shall fall within the protection scope of the present application.

[0031] Figure 1 The following is a schematic structural diagram of a coating system provided by an embodiment of the present application. Figure 2 The following is a schematic structural diagram of a control valve provided by an embodiment of the present application. Figure 3 The following is a schematic top view of a control valve provided by an embodiment of the present application. Figure 4 The following is provided by an embodiment of the present application Figure 3 The following is a schematic cross-sectional structure diagram of the control valve shown along A-A. Figure 5 The following is provided by an embodiment of the present application Figure 4 A partial enlarged schematic diagram at position B in the following. Figure 6 The following is a schematic structural diagram of a control valve provided by an embodiment of the present application. Figure 7 The following is a schematic structural diagram of a control valve provided by another embodiment of the present application.

[0032] As Figures 1 to 7 shown, the control valve 10 includes: a first ventilation pipe 11, a second ventilation pipe 12, a first valve body 13, a first valve core 14, a first guide rod 15, and a first adjustment drive assembly 16.

[0033] The first valve body 13 has a first accommodation cavity 130 and a first guide hole 131. The first ventilation pipe 11 and the second ventilation pipe 12 can be communicated through the first accommodation cavity 130. The first guide hole 131 is communicated with the first accommodation cavity 130.

[0034] The first guide rod 15 is disposed through the first guide hole 131, and the first end 150 of the first guide rod is located in the first accommodation cavity 130.

[0035] The first valve core 14 is disposed at the first end 150 of the first guide rod, and can move in the first accommodation cavity 130 following the first end 150 of the first guide rod to form a first air passage 17 with the first ventilation pipe 11 or the second ventilation pipe 12. Exemplarily, the first end 150 of the first guide rod is connected to the first valve core 14. The second end 151 of the first guide rod passes through the first guide hole 131.

[0036] The first adjustment drive assembly 16 is connected to or abuts against the second end 151 of the first guide rod.

[0037] The first adjustment driving assembly 16 is configured to drive the first guide rod 15 to slide along the first guide hole 131, so that the first guide rod 15 drives the first valve core 14 to move in the first accommodation cavity 130 to adjust the cross-sectional area of the first air passage 17.

[0038] Exemplarily, the control valve 10 is disposed between the coating device 20 and the vacuum device 30. The coating device 20 has a process chamber 21. The vacuum device 30 can communicate with the process chamber 21 and is used to evacuate the process chamber 21. The control valve 10 is disposed between the vacuum device 30 and the coating device 20 and is configured to control the communication state between the vacuum device 30 and the process chamber 21. Exemplarily, the first ventilation pipe 11 is configured to communicate with the vacuum device 30, and the second ventilation pipe 12 is configured to communicate with the process chamber 21. Alternatively, the first ventilation pipe 11 is configured to communicate with the process chamber 21, and the second ventilation pipe 12 is configured to communicate with the vacuum device 30.

[0039] Specifically, both the first ventilation pipe 11 and the second ventilation pipe 12 can communicate with the first accommodation cavity 130. Exemplarily, the outer edge of one end of the first valve body 13 and the first ventilation pipe 11 are sealed and connected, and the outer edge of one end of the second ventilation pipe 12 is sealed and connected, so that the first ventilation pipe 11 and the second ventilation pipe 12 can communicate through the first accommodation cavity 130. Exemplarily, the extending direction of the length of the first ventilation pipe 11 and the extending direction of the length of the second ventilation pipe 12 can be arranged in a cross manner, can be parallel to each other, or can be collinear. Exemplarily, the pipe shape of the first ventilation pipe 11 can be straight or arc-shaped. The pipe shape of the second ventilation pipe 12 can be straight or arc-shaped.

[0040] Exemplarily, the structure formed by the first ventilation pipe 11, the second ventilation pipe 12 and the first valve body 13 can be integrally formed. For example, the structure formed by the first ventilation pipe 11, the second ventilation pipe 12 and the first valve body 13 can be integrally cast, and can also be integrally formed by additive manufacturing technology (Additive Manufacturing, AM), that is, 3D printing technology. Exemplarily, the structure formed by the first ventilation pipe 11, the second ventilation pipe 12 and the first valve body 13 can also be assembled, that is, formed by assembling the first ventilation pipe 11, the second ventilation pipe 12 and the first valve body 13.

[0041] Specifically, when the first valve core 14 opens the control valve 10, the first valve core 14 and the first ventilation pipe 11 or the second ventilation pipe 12 form a first air passage 17. By changing the cross-sectional area of the first air passage 17, the opening degree of the first valve core 14 in the control valve 10 is changed.

[0042] Specifically, the first guiding hole 131 is configured to guide the movement of the first guiding rod 15 when the first guiding rod 15 is driven by the first adjusting driving assembly 16. Exemplarily, the first guiding rod 15 is perpendicularly arranged with respect to the first valve core 14. Exemplarily, at least one sealing ring is provided between the first guiding rod 15 and the pore wall of the first guiding hole 131 to prevent the gas flowing through the first accommodating cavity 130 from leaking through the gap between the first guiding rod 15 and the pore wall of the first guiding hole 131.

[0043] The first adjusting driving assembly 16 can be any structure capable of connecting or abutting against the second end 151 of the first guiding rod to enable the first guiding rod 15 to reciprocally slide in the first guiding hole 131. Exemplarily, the first adjusting driving assembly 16 is connected to the second end 151 of the first guiding rod to drive the first guiding rod 15 to slide along the first guiding hole 131. The first adjusting driving assembly 16 can include a telescopic driving device, such as an electric telescopic rod, and the telescopic end of the telescopic driving device is connected to the second end 151 of the first guiding rod. The first adjusting driving assembly 16 can also include a cylinder or a hydraulic cylinder, and the piston rod of the cylinder or the hydraulic cylinder is connected to the second end 151 of the first guiding rod.

[0044] Exemplarily, the first end 150 of the first guiding rod is connected to the first valve core 14, which can be achieved by welding, screwing, clamping, etc. The first end 150 of the first guiding rod can also be indirectly connected to the first valve core 14 through other components.

[0045] Exemplarily, the first adjusting driving assembly 16 abuts against the second end 151 of the first guiding rod to drive the first guiding rod 15 to slide along the first guiding hole 131. The second end 151 of the first guiding rod is the lower end of the first guiding rod 15. By utilizing the self-weight of the first guiding rod 15, the first adjusting driving assembly 16 is maintained in abutment with the second end 151 of the first guiding rod during the adjustment process.

[0046] In the control valve 10 provided in this embodiment, the first end 150 of the first guiding rod is connected to the first valve core 14, the second end 151 of the first guiding rod passes through the first guiding hole 131, the first adjusting driving assembly 16 is connected to or abuts against the second end 151 of the first guiding rod, and the first adjusting driving assembly 16 can drive the first guiding rod 15 to slide along the first guiding hole 131, causing the first guiding rod 15 to drive the first valve core 14 to move in the first accommodating cavity 130, thereby adjusting the cross-sectional area of the first air passage 17, achieving the change and control of the opening degree of the first valve core 14 in the control valve 10, enabling the control valve 10 to flexibly adjust the opening degree according to different process requirements to control the gas flow rate and pressure during the coating process, and also being beneficial to reducing the energy consumption and material waste during the coating process.

[0047] In some application scenarios, the first valve element 14 can form a first air passage 17 with the first end 110 of the first ventilation pipe. In other application scenarios, the first valve element 14 can form a first air passage 17 with the first end 120 of the second ventilation pipe. The first end 120 of the second ventilation pipe is the end of the second ventilation pipe 12 that communicates with the first accommodation cavity 130.

[0048] Next, taking the case where the first valve element 14 can form a first air passage 17 with the first end 110 of the first ventilation pipe as an example, the specific structure of the control valve 10 will be further described.

[0049] In some embodiments, as Figures 4 to 7 shown, the first valve element 14 can form a first air passage 17 with the first end 110 of the first ventilation pipe.

[0050] The first guide rod 15 drives the first valve element 14 to move in the first direction to change the distance between the first valve element 14 and the first end 110 of the first ventilation pipe, and adjust the cross-sectional area of the first air passage 17. The first direction is parallel to the axial direction of the first end 110 of the first ventilation pipe.

[0051] Specifically, the first valve element 14 realizes the opening or closing of the control valve 10 by opening or blocking the first end 110 of the first ventilation pipe. When the first valve element 14 blocks the first end 110 of the first ventilation pipe, the first valve element 14 contacts the first end 110 of the first ventilation pipe and seals the first end 110 of the first ventilation pipe.

[0052] Exemplarily, the first direction is parallel to the extending direction of the length of the first guide rod 15 or the extending direction of the axis of the first guide hole 131.

[0053] The control valve 10 provided in this embodiment can change the distance between the first valve element 14 and the first end 110 of the first ventilation pipe by designing the first valve element 14 to move in a direction parallel to the axial direction of the first end 110 of the first ventilation pipe, so as to adjust the cross-sectional area of the first air passage 17, and can more precisely control the cross-sectional area of the first air passage 17, thereby realizing the precise adjustment of parameters such as gas flow rate and pressure. Moreover, the contact force distribution between the first valve element 14 and the first end 110 of the first ventilation pipe is more uniform, which helps to reduce leakage.

[0054] In some embodiments, the first valve element 14 can form a first air passage 17 with the first end 110 of the first ventilation pipe. The first guide rod 15 drives the first valve element 14 to move in the second direction to change the relative position between the first valve element 14 and the first end 110 of the first ventilation pipe, and adjust the cross-sectional area of the first air passage 17. The second direction is parallel to the radial direction of the first end 110 of the first ventilation pipe. Such a design can enable the first valve element 14 to quickly adjust the cross-sectional area of the first air passage 17.

[0055] In some embodiments, on the side of the first guide hole 131 of the first valve body 13 away from the first valve core 14, there is also a first threaded hole 132.

[0056] The first adjustment driving assembly 16 includes: a first driving rod 160. The first end 1600 of the first driving rod abuts against the second end 151 of the first guide rod. The first driving rod 160 has a thread. The first driving rod 160 passes through the first threaded hole 132 and is screwed to the first valve body 13 through the first threaded hole 132.

[0057] The control valve 10 further includes: a first elastic member 18. The first end 180 of the first elastic member is connected to the first valve core 14, and the second end 181 of the first elastic member is connected to the first valve body 13, so that the first adjustment driving assembly 16 abuts against the second end 151 of the first guide rod.

[0058] Rotating the first driving rod 160 in the first rotation direction reduces the cross-sectional area of the first air passage 17 or the first valve core 14 blocks the first ventilation pipe 11. Rotating the first driving rod 160 in the second rotation direction increases the cross-sectional area of the first air passage 17 or the first valve core 14 opens the first ventilation pipe 11. The first rotation direction and the second rotation direction are opposite.

[0059] Exemplarily, the first elastic member 18 may include a spring or a rubber band, etc. Exemplarily, the spring is sleeved on the first driving rod 160. Exemplarily, the first end 180 of the first elastic member is connected to the side of the first valve core 14 away from the first guide rod 15, a part of the first valve body 13 is located on the side of the first valve core 14 away from the first guide rod 15, and the second end 181 of the first elastic member is connected to the first valve body 13. The first elastic member 18 is in a compressed state so that the first end 1600 of the first driving rod abuts against the second end 151 of the first guide rod.

[0060] Exemplarily, the first rotation direction may be the clockwise direction, and the second rotation direction may be the counterclockwise direction. Exemplarily, the first rotation direction may be the counterclockwise direction, and the second rotation direction may be the clockwise direction.

[0061] Exemplarily, the first adjustment driving assembly 16 further includes a locking nut 161. The second end 1601 of the first driving rod passes through the first threaded hole 132 and is connected to the locking nut 161. Exemplarily, after rotating the first driving rod 160 to adjust the cross-sectional area of the first air passage 17, the locking nut 161 is tightened to lock the first driving rod 160 to prevent the first guide rod 15 from changing its position due to vibration or other reasons. When it is necessary to adjust the cross-sectional area of the first air passage 17, the locking nut 161 is loosened and then the first driving rod 160 is rotated.

[0062] The control valve 10 provided in this embodiment further includes a first elastic member 18. The first end 180 of the first elastic member is connected to the first valve core 14, and the second end 181 of the first elastic member is connected to the first valve body 13, thereby providing a supporting force for the first guide rod 15, enabling the first adjustment driving assembly 16 to remain in contact with the second end 151 of the first guide rod, and changing the opening degree of the first valve core 14 by rotating the first driving rod 160, as well as opening or blocking the first ventilation pipeline 11. The structure is simple and reliable.

[0063] In some embodiments, the second end 151 of the first guide rod has a first limiting portion 152.

[0064] The first valve body 13 has a second limiting portion 133 on one side of the first threaded hole 132 close to the first guide hole 131, and the first valve body 13 has a third limiting portion 134 on one side of the first guide hole 131 close to the first threaded hole 132.

[0065] The first limiting portion 152 is located between the second limiting portion 133 and the third limiting portion 134. The second limiting portion 133 and the third limiting portion 134 are configured to limit the moving range of the first limiting portion 152 in the extending direction of the first guide rod 15. When the first limiting portion 152 contacts the second limiting portion 133, the cross-sectional area of the first air passage 17 is the largest.

[0066] Exemplarily, there is a third accommodating space between the second limiting portion 133 and the third limiting portion 134. The third accommodating space accommodates the first limiting portion 152 and provides a space for the first limiting portion 152 to move. Exemplarily, the second limiting portion 133 and the third limiting portion 134 can be formed by a plurality of screws penetrating into the first valve body 13.

[0067] Exemplarily, when the first limiting portion 152 contacts the third limiting portion 134, the first valve core 14 blocks the first end 110 of the first ventilation pipeline.

[0068] Exemplarily, the first valve body 13 can be integrally formed or assembled from a plurality of components.

[0069] The control valve 10 provided in this embodiment restricts the moving range of the first limiting portion 152 in the extending direction of the first guide rod 15 by providing the second limiting portion 133 and the third limiting portion 134, which can ensure that the first guide rod 15 stops moving when reaching the predetermined maximum opening degree (refer to Figure 7 ), avoiding the cross-sectional area of the first air passage 17 being too large, resulting in the opening degree of the control valve 10 being too large and the air pressure in the process chamber 21 being too low. And by restricting the moving range of the first guide rod 15, it prevents unnecessary collision and wear between the first valve core 14 and other components, protecting the first end 110 of the first ventilation pipeline.

[0070] In some embodiments, the first valve body 13 includes: a first sub-valve body 135 and a second sub-valve body 136.

[0071] The first sub-valve body 135 has a first threaded hole 132.

[0072] The second sub-valve body 136 is connected to the first sub-valve body 135, has a first guiding hole 131, and is sealingly connected to the first ventilation pipeline 11 and the second ventilation pipeline 12. The second sub-valve body 136 has a first accommodating cavity 130.

[0073] One side of the first sub-valve body 135 close to the second sub-valve body 136 has a second limiting portion 133, and one side of the second sub-valve body 136 close to the first sub-valve body 135 has a third limiting portion 134.

[0074] Exemplarily, one side of the second sub-valve body 136 close to the first sub-valve body 135 has a sunk groove 1360. The bottom of the sunk groove 1360 communicates with the first guiding hole 131. The second end 151 of the first guiding rod passes through the first guiding hole 131, and the first limiting portion 152 is located in the sunk groove 1360. The first sub-valve body 135 is connected to the outer edge of the sunk groove 1360. Exemplarily, the projected area of the groove wall of the sunk groove 1360 on the bottom of the sunk groove 1360 surrounds the projected area of the first threaded hole 132 on the bottom of the sunk groove 1360, so that an end portion on one side of the first sub-valve body 135 close to the second sub-valve body 136 forms the second limiting portion 133.

[0075] Exemplarily, the cross-sectional shape of the sunk groove 1360 is the same as the cross-sectional shape of the first limiting portion 152.

[0076] For the control valve 10 of this embodiment, since the second end 151 of the first guiding rod has the first limiting portion 152, the first sub-valve body 135 provides the second limiting portion 133, and the second sub-valve body 136 provides the third limiting portion 134, the first guiding rod 15 can be first installed in the first guiding hole 131 of the second sub-valve body 136, and then the first sub-valve body 135 is connected to the second sub-valve body 136, which is convenient for the installation of the first guiding rod 15.

[0077] In some embodiments, the second end 111 of the first ventilation pipeline has a first cooling cavity 1110, and the first cooling cavity 1110 is arranged around the second end 111 of the first ventilation pipeline. The first cooling cavity 1110 is configured to accommodate a cooling medium. The second end 111 of the first ventilation pipeline is the end of the first ventilation pipeline 11 far from the first accommodating cavity 130.

[0078] Since the second end 111 of the first ventilation pipe is often used for connecting with the pipes of other devices, a second seal is often provided at the second end 111 of the first ventilation pipe or the pipe connected to the second end 111 of the first ventilation pipe. During the manufacturing process of semiconductor or photovoltaic products, the control valve 10 often operates in a high-temperature environment or often conducts gases at a relatively high temperature. The second seal is often an elastomer. By providing a first cooling cavity 1110 at the second end 111 of the first ventilation pipe, the second seal can be cooled, and the service life of the second seal can be extended.

[0079] Exemplarily, as Figure 4 shown, the first cooling cavity 1110 has a first fluid inlet 1111 and a first fluid outlet ( Figure 4 not shown in the figure). The first fluid inlet 1111 is configured as the inlet for the cooling medium to enter the first cooling cavity 1110. The first fluid outlet is configured as the outlet for the cooling medium to enter the first cooling cavity 1110.

[0080] Exemplarily, the second seal includes a sealing ring or a gasket, etc. Exemplarily, the shape of the first cooling cavity 1110 is annular or spiral.

[0081] Figure 8 Shown is a Figure 3 cross-sectional schematic view of the control valve provided by an embodiment of the present application along C-C.

[0082] In some embodiments, as Figure 4 and Figure 8 shown, the second end 121 of the second ventilation pipe has a second cooling cavity 1210, and the second cooling cavity 1210 is arranged around the second end 121 of the second ventilation pipe. The second cooling cavity 1210 is configured to accommodate the cooling medium. The second end 121 of the second ventilation pipe is the end of the second ventilation pipe 12 away from the first accommodation cavity 130.

[0083] Since the second end 121 of the second ventilation pipe is often used for connecting with the pipes of other devices, a third seal is often provided at the second end 121 of the second ventilation pipe or the pipe connected to the second end 121 of the second ventilation pipe. During the manufacturing process of semiconductor or photovoltaic products, the control valve 10 often operates in a high-temperature environment or often conducts gases at a relatively high temperature. The third seal is often an elastomer. By providing the first cooling cavity 1110 at the second end 121 of the second ventilation pipe, the third seal can be cooled, and the service life of the third seal can be extended.

[0084] Exemplarily, as Figure 8As shown, the second cooling chamber 1210 has a second fluid inlet 1211 and a second fluid outlet 1212. The second fluid inlet 1211 is configured as an inlet for the cooling medium to enter the second cooling chamber 1210. The second fluid outlet 1212 is configured as an outlet for the cooling medium to enter the second cooling chamber 1210.

[0085] Exemplarily, the third seal includes a sealing ring or a sealing gasket, etc. Exemplarily, the shape of the second cooling chamber 1210 is annular or spiral.

[0086] Exemplarily, the cooling medium may include a cooling gas or a cooling liquid, such as normal-temperature air or water.

[0087] Figure 9 Shown is a Figure 3 schematic cross-sectional view of the third cooling chamber along D-D in the present application. Figure 9 The cross-section of the third cooling chamber 137 and a part of the first valve body 13 along D-D is shown.

[0088] In some embodiments, as Figure 7 and Figure 9 shown, the control valve 10 further includes: a first seal 19. The first seal 19 is disposed on the first valve core 14 and is located on the side of the first valve core 14 away from the first guide rod 15. The first valve body 13 may have a third cooling chamber 137. When the first valve core 14 moves, it drives the first seal 19 to move. The third cooling chamber 137 is disposed in a part of the first valve body 13 corresponding to the moving range of the first seal 19. By providing the third cooling chamber 137, the first seal 19 can be cooled when the control valve 10 is operating, avoiding overheating of the first seal 19 and extending the service life of the first seal 19.

[0089] Exemplarily, as Figure 7 shown, the third cooling chamber 137 may further extend to the first end 110 of the first ventilation pipe.

[0090] Exemplarily, the third cooling chamber 137 has a third fluid inlet 1370 and a third fluid outlet 1371. The third fluid inlet 1370 is configured as an inlet for the cooling medium to enter the third cooling chamber 137. The third fluid outlet 1371 is configured as an outlet for the cooling medium to enter the third cooling chamber 137. The third cooling chamber 137 can be set according to the moving range of the first valve body 13 and the first seal 19, and no specific limitation is made in this embodiment.

[0091] In some embodiments, the control valve 10 is also provided with fluid interfaces at the fluid inlet and the fluid outlet, so that the control valve 10 can be connected to a device providing fluid.

[0092] In some embodiments, the second sub-valve body 136 includes a third sub-valve body 1361 and a fourth sub-valve body 1362. One side of the third sub-valve body 1361 is connected to the first sub-valve body 135, and the third sub-valve body 1361 has a first guiding hole 131. The fourth sub-valve body 1362 is sealingly connected to the other side of the third sub-valve body 1361 and is sealingly connected to the first ventilation pipe 11 and the second ventilation pipe 12. The third sub-valve body 1361 and the fourth sub-valve body 1362 form a first accommodation cavity 130.

[0093] Exemplarily, one side of the third sub-valve body 1361 close to the first sub-valve body 135 has a sunk groove 1360.

[0094] Exemplarily, the fourth sub-valve body 1362 has a third cooling cavity 137. The third cooling cavity 137 can be set according to the moving range of the fourth sub-valve body 1362 and the first seal 19.

[0095] In some embodiments, as Figure 4 and Figure 7 shown, the first end 180 of the first elastic member is connected to the side of the first valve core 14 close to the first guiding rod 15.

[0096] The control valve 10 further includes: a first elastic sealing tube 40. The first end 400 of the first elastic sealing tube is sealingly connected to the first valve core 14, and the second end 401 of the first elastic sealing tube is sealingly connected to the first valve body 13, so that the first elastic sealing tube 40 and the first valve core 14 and the first valve body 13 form a closed space. The first elastic member 18 and at least a part of the first guiding rod 15 are located in the closed space. Such a setting can reduce the influence of air flow on the movement of the first elastic member 18 and the first guiding rod 15, and reduce the influence of dust and impurities on the components in the closed space, and improve the service life of the control valve 10.

[0097] Exemplarily, the first elastic sealing tube 40 can include a corrugated tube, a rubber sealing tube, etc. The material of the corrugated tube can be metal, plastic, etc. Exemplarily, the end of the first elastic sealing tube 40 has a connecting portion 402. The first elastic sealing tube 40 is sealingly connected to the first valve body 13 or the first valve core 14 through the connecting portion 402. Exemplarily, the connecting portion 402 can be a flange. Exemplarily, a fourth seal is provided between the connecting portion 402 and the first valve body 13.

[0098] Exemplarily, the second end 401 of the first elastic sealing tube is sealingly connected to the second sub-valve body 136 or the third sub-valve body 1361.

[0099] In some embodiments, as Figure 7As shown, the first valve body 13 has a plurality of air blowing holes 138. The air blowing holes 138 communicate the first accommodation cavity 130 with the outside. The air blowing holes 138 are configured to blow air to the second end 401 of the first elastic sealing tube. Such a setting can purge the interior of the first accommodation cavity 130 and the surface of the first elastic sealing tube 40, blowing up the dust deposited over time. When the vacuum device 30 connected to the control valve 10 operates, the blown-up dust can be sucked out of the first accommodation cavity 130.

[0100] Exemplarily, the number of the air blowing holes 138 is four. Exemplarily, the plurality of air blowing holes 138 are evenly distributed in the circumferential direction of the third sub-valve body 1361. Exemplarily, the coating system 1 hereinafter further includes a blowing device. The blowing device communicates with the air blowing holes 138 to blow air to the second end 401 of the first elastic sealing tube through the air blowing holes 138.

[0101] In some embodiments, as Figure 4 and Figure 5 shown, the control valve 10 further includes: a third ventilation pipeline 41, a fourth ventilation pipeline 42, a second valve body 43, and a second valve core 44.

[0102] The third ventilation pipeline 41 communicates with the first ventilation pipeline 11.

[0103] The fourth ventilation pipeline 42 communicates with the second ventilation pipeline 12.

[0104] The second valve body 43 has a second accommodation cavity 430. The first ventilation pipeline 11 and the second ventilation pipeline 12 can communicate through the second accommodation cavity 430.

[0105] The second valve core 44 is disposed in the second accommodation cavity 430 and is configured to control the communication state between the third ventilation pipeline 41 and the fourth ventilation pipeline 42.

[0106] The cross-sectional area of the third ventilation pipeline 41 is smaller than the cross-sectional area of the first ventilation pipeline 11, and can also be smaller than the cross-sectional area of the second ventilation pipeline 12. The cross-sectional area of the fourth ventilation pipeline 42 is smaller than the cross-sectional area of the first ventilation pipeline 11, and can also be smaller than the cross-sectional area of the second ventilation pipeline 12.

[0107] Specifically, the second valve core 44 can make the third ventilation pipeline 41 and the fourth ventilation pipeline 42 communicate or disconnect the communication therebetween, so as to control the communication state between the third ventilation pipeline 41 and the fourth ventilation pipeline 42.

[0108] Exemplarily, the third ventilation pipeline 41 can be directly communicated with the first ventilation pipeline 11, or can be communicated with the first ventilation pipeline 11 through other pipelines. The fourth ventilation pipeline 42 can be directly communicated with the second ventilation pipeline 12, or can be communicated with the second ventilation pipeline 12 through other pipelines.

[0109] Specifically, the third ventilation duct 41, the second accommodation chamber 430, and the fourth ventilation duct 42 form an air path in parallel with the air path formed by the first ventilation duct 11, the first accommodation chamber 130, and the second ventilation duct 12. The gas can pass through the second ventilation duct 12, the first accommodation chamber 130, and the first ventilation duct 11 in sequence, or can pass through the fourth ventilation duct 42, the second accommodation chamber 430, and the third ventilation duct 41 in sequence.

[0110] In some application scenarios, if the vacuum device 30 directly evacuates the process chamber 21 through the air path controlled by the first valve core 14, it may cause great disturbance to the atmosphere in the process chamber 21, resulting in product fragments or floating pieces in the process chamber 21.

[0111] For the control valve 10 provided in this embodiment, since the cross-sectional area of the third ventilation duct 41 and / or the cross-sectional area of the fourth ventilation duct 42 is smaller than the cross-sectional area of the first ventilation duct 11 and / or the cross-sectional area of the second ventilation duct 12, when the vacuum device 30 evacuates the process chamber 21, the first valve core 14 can first close the air path where it is located, and the second valve core 44 can be opened to open the air path where it is located to slowly evacuate the process chamber 21. When the pressure in the process chamber 21 drops to a certain level, the second valve core 44 closes the air path where it is located, and the first valve core 14 opens the air path where it is located to quickly evacuate the process chamber 21. By adding a slow evacuation process, the product fragment rate is reduced and the process effect is improved.

[0112] In some embodiments, as Figure 4 and Figure 5 shown, the second valve body 43 further has a second guide hole 431. The second guide hole 431 communicates with the second accommodation chamber 430.

[0113] The control valve 10 further includes: a second guide rod 45 and a second adjustment driving assembly 46.

[0114] The second guide rod 45 is disposed through the second guide hole 431, and the first end 450 of the second guide rod is located in the second accommodation chamber 430.

[0115] The second valve core 44 is disposed at the first end 450 of the second guide rod and can move in the second accommodation chamber 430 following the first end 450 of the second guide rod to form a second air passage with the third ventilation duct 41 or the fourth ventilation duct 42. Exemplarily, the first end 450 of the second guide rod is connected to the second valve core 44, and the second end 451 of the second guide rod passes through the second guide hole 431.

[0116] The second adjustment driving component 46 is connected to or abuts against the second end 451 of the second guide rod. The second adjustment driving component 46 is configured to drive the second guide rod 45 to slide along the second guide hole 431, so that the second guide rod 45 drives the second valve core 44 to move in the second accommodation cavity 430 to adjust the cross-sectional area of the second air passage.

[0117] Specifically, both the third ventilation pipeline 41 and the fourth ventilation pipeline 42 can communicate with the second accommodation cavity 430. Exemplarily, the outer edge of one end of the second valve body 43 and the third ventilation pipeline 41 are sealingly connected, and are sealingly connected to the outer edge of one end of the fourth ventilation pipeline 42, so that the third ventilation pipeline 41 and the fourth ventilation pipeline 42 can communicate through the second accommodation cavity 430. Exemplarily, the extending direction of the length of the third ventilation pipeline 41 and the extending direction of the length of the fourth ventilation pipeline 42 can be arranged crosswise, can be parallel to each other, or can be collinear. Exemplarily, the pipeline shape of the third ventilation pipeline 41 can be straight or arc-shaped. The pipeline shape of the fourth ventilation pipeline 42 can be straight or arc-shaped.

[0118] Exemplarily, the structure formed by the third ventilation pipeline 41, the fourth ventilation pipeline 42 and the second valve body 43 can be integrally formed. For example, the structure formed by the third ventilation pipeline 41, the fourth ventilation pipeline 42 and the second valve body 43 can be integrally cast, or can also be integrally formed by 3D printing technology. Exemplarily, the structure formed by the third ventilation pipeline 41, the fourth ventilation pipeline 42 and the second valve body 43 can also be assembled, that is, formed by assembling the third ventilation pipeline 41, the fourth ventilation pipeline 42 and the second valve body 43.

[0119] Specifically, when the second valve body 43 opens the control valve 10, the second valve body 43 and the third ventilation pipeline 41 or the fourth ventilation pipeline 42 form a second air passage. By changing the size of the cross-sectional area of the second air passage, the opening degree of the second valve body 43 in the control valve 10 is changed.

[0120] The second adjustment driving component 46 can be any structure that can be connected to or abut against the first end 450 of the second guide rod to realize the reciprocating sliding of the second guide rod 45 in the second guide hole 431. Exemplarily, the second adjustment driving component 46 is connected to the second end 451 of the second guide rod to drive the second guide rod 45 to slide along the second guide hole 431. The second adjustment driving component 46 can include a telescopic driving device, such as an electric telescopic rod, and the telescopic end of the telescopic driving device is connected to the second end 451 of the second guide rod. The second adjustment driving component 46 can also include a cylinder or a hydraulic cylinder, and the piston rod of the cylinder or the hydraulic cylinder is connected to the second end 451 of the second guide rod.

[0121] The arrangements of the third ventilation duct 41, the fourth ventilation duct 42, the second valve body 43, the second valve core 44, the second guide rod 45 and the second adjustment drive assembly 46 are similar to those of the first ventilation duct 11, the second ventilation duct 12, the first valve body 13, the first valve core 14, the first guide rod 15 and the first adjustment drive assembly 16 in the above text. For the relevant embodiments and technical effects, reference may be made to the above text, which will not be elaborated here.

[0122] The embodiments of the control valve 10 of the present application have been described in detail above. Now, the embodiments of the coating system 1 of the present application will be described in detail. It should be understood that the description of the embodiments of the control valve 10 corresponds to the description of the embodiments of the coating system 1. Therefore, for the parts not described in detail, reference may be made to the previous embodiments of the control valve 10.

[0123] As Figure 1 shown, the coating system 1 includes: a coating device 20, a vacuum device 30, and the control valve 10 mentioned in any of the above embodiments.

[0124] The coating device 20 has a process chamber 21.

[0125] The vacuum device 30 can communicate with the process chamber 21 and is configured to evacuate the process chamber 21.

[0126] The control valve 10 is disposed between the vacuum device 30 and the coating device 20 and is configured to control the communication state between the vacuum device 30 and the process chamber 21.

[0127] Exemplarily, the coating device 20 can be any device capable of coating an object. For example, the coating device 20 can include a vapor deposition device. For example, the coating device 20 can include one or a combination of a plasma enhanced chemical vapor deposition (PECVD) device, a low pressure chemical vapor deposition (LPCVD) device, a physical vapor deposition (PVD) device, and an atomic layer deposition (ALD) device. Exemplarily, the coating system 1 is used to coat the components or raw materials for forming a photovoltaic module. For example, the coating system 1 can be used to coat silicon wafers.

[0128] For the coating system 1 provided in this embodiment, the first end 150 of the first guide rod is connected to the first valve core 14. The second end 151 of the first guide rod passes through the first guide hole 131. The first adjustment driving assembly 16 is connected to or abuts against the second end 151 of the first guide rod. The first adjustment driving assembly 16 can drive the first guide rod 15 to slide along the first guide hole 131, so that the first guide rod 15 drives the first valve core 14 to move in the first accommodation cavity 130, thereby adjusting the cross-sectional area of the first air passage 17, realizing the change and control of the opening degree of the first valve core 14 in the control valve 10, enabling the control valve 10 to flexibly adjust the opening degree according to different process requirements to control the gas flow rate and pressure in the coating process, and also being beneficial to reducing energy consumption and material waste in the coating process.

[0129] The basic principles of the present application have been described above in conjunction with specific embodiments. However, it should be noted that the advantages, advantages, effects, etc. mentioned in the present application are only examples and not limitations. It cannot be considered that these advantages, advantages, effects, etc. are essential for each embodiment of the present application. In addition, the above-disclosed specific details are only for the purpose of illustration and easy understanding, rather than limitations. The above details do not limit the present application to necessarily adopt the above specific details to implement.

[0130] The block diagrams of the devices, apparatuses, equipment, and systems involved in the present application are only illustrative examples and do not intend to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including", "comprising", "provided with", "having", etc. are open-ended words, meaning "including but not limited to", and can be used interchangeably with them. The words "or" and "and" used herein refer to the word "and / or" and can be used interchangeably with it, unless the context clearly indicates otherwise. The word "such as" used herein refers to the phrase "such as but not limited to" and can be used interchangeably with it.

[0131] It should also be noted that in the devices, equipment, and methods of the present application, each component or each step can be decomposed and / or recombined. These decompositions and / or recombinations should be regarded as equivalent solutions of the present application.

[0132] The above description of the disclosed aspects enables any person skilled in the art to make or use the present application. Various modifications to these aspects are very obvious to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but rather to the broadest scope consistent with the principles and novel features disclosed herein.

[0133] The foregoing description has been presented for purposes of illustration and description. In addition, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although several example aspects and embodiments have been discussed above, those skilled in the art will recognize some of their variations, modifications, alterations, additions, and sub-combinations.

Claims

1. A control valve, characterized in that: include: a first ventilation duct; a second ventilation duct; a first valve body having a first accommodating cavity and a first guide hole, the first ventilation duct and the second ventilation duct can be communicated through the first accommodating cavity, and the first guide hole is communicated with the first accommodating cavity; a first guide rod, the first guide rod being inserted into the first guide hole, and a first end of the first guide rod being located in the first accommodating cavity; a first valve core, disposed at the first end of the first guide rod, capable of following the first end of the first guide rod to move in the first accommodating cavity to form a first air passage with the first ventilation pipe or the second ventilation pipe; A first adjustment drive assembly connected to or abutting against the second end of the first guide rod; The first adjustment drive assembly is configured to drive the first guide rod to slide along the first guide hole, so that the first guide rod drives the first valve core to move in the first accommodating cavity to adjust the cross-sectional area of ​​the first airway.

2. The control valve according to claim 1, characterized in that: The first valve core can form the first air channel with the first end of the first ventilation pipe; Among them, the first guide rod drives the first valve core to move along the first direction to change the distance between the first valve core and the first end of the first ventilation pipe and adjust the cross-sectional area of ​​the first airway; the first direction is parallel to the axial direction of the first end of the first ventilation pipe.

3. The control valve according to claim 1, characterized in that: The first valve body further has a first threaded hole on a side of the first guide hole away from the first valve core; Wherein, the first adjustment drive component comprises: a first driving rod, wherein a first end of the first driving rod abuts against a second end of the first guide rod, the first driving rod has threads, the first driving rod passes through the first threaded hole, and is threadedly connected to the first valve body through the first threaded hole; Wherein, the control valve further comprises: a first elastic member, wherein a first end of the first elastic member is connected to the first valve core, and a second end of the first elastic member is connected to the first valve body, so that the first adjustment drive assembly abuts against the second end of the first guide rod; When the first driving rod is rotated around a first rotation direction, the cross-sectional area of ​​the first air channel is reduced or the first valve core blocks the first ventilation duct; when the first driving rod is rotated around a second rotation direction, the cross-sectional area of ​​the first air channel is increased or the first valve core opens the first ventilation duct; wherein the first rotation direction is opposite to the second rotation direction.

4. The control valve according to claim 3, characterized in that: The second end of the first guide rod has a first limiting portion; The first valve body has a second limiting portion on a side of the first threaded hole close to the first guide hole, and the first valve body has a third limiting portion on a side of the first guide hole close to the first threaded hole; Wherein, the first limiting portion is located between the second limiting portion and the third limiting portion, and the second limiting portion and the third limiting portion are configured to limit the movement range of the first limiting portion along the extension direction of the first guide rod; when the first limiting portion contacts the second limiting portion, the cross-sectional area of ​​the first airway is the largest.

5. The control valve according to claim 4, characterized in that: The first valve body comprises: A first sub-valve body having the first threaded hole; a second sub-valve body connected to the first sub-valve body, having the first guide hole, and being sealedly connected to the first ventilation duct and the second ventilation duct, and the second sub-valve body having the first accommodating cavity; The second limiting portion is provided on a side of the first sub-valve body close to the second sub-valve body, and the third limiting portion is provided on a side of the second sub-valve body close to the first sub-valve body.

6. The control valve according to claim 1, characterized in that: The second end of the first ventilation duct has a first cooling cavity, the first cooling cavity is arranged around the second end of the first ventilation duct, the first cooling cavity is configured to accommodate a cooling medium, wherein the second end of the first ventilation duct is an end of the first ventilation duct away from the first accommodating cavity, and / or The second end of the second ventilation duct has a second cooling cavity, which is arranged around the second end of the second ventilation duct and is configured to accommodate a cooling medium, wherein the second end of the second ventilation duct is an end of the second ventilation duct away from the first accommodating cavity.

7. The control valve according to claim 1, characterized in that: Also includes: A first sealing member is disposed on the first valve core and is located on a side of the first valve core away from the first guide rod; The first valve body has a third cooling chamber; the first valve core drives the first sealing member to move when the first valve core moves, and the third cooling chamber is arranged at a portion of the first valve body corresponding to the moving range of the first sealing member.

8. The control valve according to claim 3, characterized in that: The first end of the first elastic member is connected to a side of the first valve core close to the first guide rod; Wherein, the control valve further comprises: A first elastic sealing tube, wherein the first end of the first elastic sealing tube is sealed to the first valve core, and the second end of the first elastic sealing tube is sealed to the first valve body, so that the first elastic sealing tube, the first valve core and the first valve body form a closed space, and the first elastic member and at least part of the first guide rod are located in the closed space.

9. The control valve according to claim 8, characterized in that The first valve body has a plurality of blowing holes, the blowing holes are connected with the first accommodating cavity and the outside, and the blowing holes are configured to blow air toward the second end of the first elastic sealing tube.

10. The control valve according to any one of claims 1 to 9, characterized in that: Also includes: a third ventilation duct, connected to the first ventilation duct; a fourth ventilation duct, communicating with the second ventilation duct; A second valve body having a second accommodating cavity, through which the third ventilation duct and the fourth ventilation duct can communicate; a second valve core, disposed in the second accommodating chamber and configured to control a communication state between the third ventilation duct and the fourth ventilation duct; Wherein, a cross-sectional area of ​​the third ventilation duct and / or a cross-sectional area of ​​the fourth ventilation duct is smaller than a cross-sectional area of ​​the first ventilation duct and / or a cross-sectional area of ​​the second ventilation duct.

11. The control valve according to claim 10, characterized in that The second valve body further has a second guide hole, and the second guide hole is communicated with the second accommodating chamber; Wherein, the control valve further comprises: a second guide rod, the second guide rod being inserted into the second guide hole, and a first end of the second guide rod being located in the second accommodating cavity; A second adjustment drive assembly is connected to or abuts against the second end of the second guide rod; Wherein, the second valve core is arranged at the first end of the second guide rod, and can move in the second accommodating cavity following the first end of the second guide rod, so as to form a second air passage with the third ventilation pipe or the fourth ventilation pipe; The second adjustment drive assembly is configured to drive the second guide rod to slide along the second guide hole, so that the second guide rod drives the second valve core to move in the second accommodating chamber to adjust the cross-sectional area of ​​the second air channel.

12. A coating system, characterized in that: include: A coating device, wherein the coating device has a process chamber; A vacuum device, capable of communicating with the process chamber and configured to evacuate the process chamber; The control valve as described in any one of claims 1 to 11 is arranged between the vacuum device and the coating equipment, and is configured to control the communication state between the vacuum device and the process chamber.

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