Special gas supply cabinet

By designing structures such as placement grooves, arcuate limit plates and control levers in a special gas supply cabinet, the problem of inconvenient unlocking of gas cylinders in the prior art is solved, convenient clamping and release of gas cylinders is achieved, and the sealing of the cabinet body is improved in the event of leakage.

CN222911360UActive Publication Date: 2025-05-27SHANGHAI JIANGWEI SEMICON EQUIP CO LTD
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Patent Information

Application Number
CN202421984071.5
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-08-15
Publication Date
2025-05-27
Estimated Expiration
2034-08-15

AI Technical Summary

Technical Problem

When the existing special gas supply cabinet is unlocked, it is inconvenient to operate, especially the push block position is located on the back of the cylinder, which makes the operation unintuitive.

Method used

A special gas supply cabinet is designed. By setting a placement groove and an arcuate limiting plate on the front side of the cabinet body, the control rod is used to drive the rotation shaft and the L-shaped plate to rotate, and the ratchet and restriction components are used to realize limit clamping and convenient operation of the gas cylinder.

Benefits of technology

Through this design, the user can easily complete the clamping restriction and release of the gas cylinder, which improves the intuitiveness and convenience of the operation, and can effectively improve the sealing of the cabinet during leakage.

✦ Generated by Eureka AI based on patent content.

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    Figure CN222911360U_ABST
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Abstract

The utility model discloses a special gas supply cabinet, and relates to the technical field of supply cabinets. The special gas supply cabinet comprises a cabinet body, a placement groove is formed in the front side surface of the cabinet body, a partition plate is fixedly connected to the bottom wall of the placement groove, a supporting plate is fixedly connected between the partition plate and the inner wall of the placement groove, a gas cylinder is arranged on the supporting plate, an arc-shaped limiting plate is fixedly connected between the partition plate and the inner wall of the placement groove, and the arc-shaped limiting plate is fixedly connected with the partition plate. A connecting plate is fixedly connected to the lower side surface of the supporting plate, a rotating shaft is rotationally arranged in the connecting plate in a sleeving mode, and the left end and the right end of the rotating shaft rotationally penetrate out of the left side surface and the right side surface of the connecting plate correspondingly. And meanwhile, the limiting assembly is arranged on the surface of the front side of the supporting plate, the gas cylinder does not block operation and control of the limiting assembly, a user can conduct visual observation, and the use convenience of the device is improved.
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Description

Technical Field

[0001] The utility model relates to the technical field of supply cabinets, and particularly relates to a special gas supply cabinet. Background Art

[0002] In recent years, China has achieved rapid development in the semiconductor industry and the liquid crystal panel industry. During the production process, a large number of different types of hazardous chemicals are used, among which the supply of special gases has a very high hazard coefficient. Once a leakage occurs, it will threaten the safety of personnel. Among them, special gas supply cabinets are widely used in the semiconductor industry.

[0003] For example, the Chinese utility model patent with the patent publication number CN214663707U includes a cabinet body and a gas supply system. An upper cavity and a lower cavity are provided in the cabinet body. On one side of the lower cavity, there are two cabinet doors rotatably connected to the cabinet body. On the side wall of the lower cavity away from the cabinet doors, a plurality of rectangular boxes are fixedly connected. On the left and right side walls of the rectangular box, there is a same fixing device for protecting the gas cylinder to be supplied with gas. Circular holes are respectively penetrated through the left and right side walls of the cabinet body, and the two circular holes are arranged opposite to each other and communicated with the lower cavity. Induction mechanisms are arranged in the two circular holes, and alarm mechanisms connected to the induction mechanisms are respectively arranged on the left and right side walls of the cabinet body. However, when the use of this patent is completed and the locking of the ratchet is released, it is necessary to move the push block. However, the position of the push block is behind the gas cylinder, which makes it impossible to directly observe the position of the push block during operation, and there is a certain inconvenience in controlling the push block. In view of this, we have proposed a special gas supply cabinet. Summary of the Utility Model

[0004] The purpose of the utility model is to solve at least one of the technical problems existing in the prior art, and provide a special gas supply cabinet, which can solve the problem of inconvenient operation when unlocking and locking the conclusion.

[0005] To achieve the above purpose, the utility model provides the following technical solutions: A special gas supply cabinet includes a cabinet body. A placement groove is provided on the front surface of the cabinet body. A partition is fixedly connected to the bottom wall of the placement groove. A support plate is fixedly connected between the partition and the inner wall of the placement groove. A gas cylinder is arranged on the support plate. An arc-shaped limiting plate is fixedly connected between the partition and the inner wall of the placement groove. A connecting plate is fixedly connected to the lower surface of the support plate. A rotating shaft is rotatably sleeved inside the connecting plate. The left and right ends of the rotating shaft respectively rotate through the left and right side surfaces of the connecting plate. An L-shaped plate is sleeved on the outer surface of the rotating shaft. A second arc-shaped limiting plate is fixedly connected to the rear surface of the L-shaped plate. A control rod is sleeved on the outer surface of the rotating shaft. A ratchet is arranged on the outer surface of the rotating shaft. A limiting component is arranged on the support plate.

[0006] Preferably, the limiting component includes a knob which is rotatably connected to the front surface of the support plate. A threaded rod is fixedly connected to the rear surface of the knob. The interior of the support plate is hollow. The rear end of the threaded rod rotatably penetrates into the interior of the support plate. A sliding groove extending into the interior of the support plate is formed in the lower surface of the support plate.

[0007] Preferably, a threaded sleeve is threadedly sleeved on the outer surface of the threaded rod. A fixing plate is fixedly connected to the lower surface of the threaded sleeve. The lower surface of the fixing plate extends out of the lower surface of the support plate.

[0008] Preferably, a limiting plate is fixedly connected to the front surface of the fixing plate. Two second fixing plates are fixedly connected to the lower surface of the fixing plate. A rotating shaft is rotatably connected between the two second fixing plates.

[0009] Preferably, a pawl is sleeved on the outer surface of the rotating shaft. Torsion springs are fixedly connected to the left and right surfaces of the pawl.

[0010] Preferably, the opposite ends of the two torsion springs are respectively fixedly connected to the two second fixing plates. The front surface of the pawl contacts the limiting plate.

[0011] Preferably, a leakage detection component is arranged on the left surface of the cabinet body. A U-shaped frame is fixedly connected to the left surface of the cabinet body. A sealing plate is slidably connected to the inner wall of the U-shaped frame.

[0012] Preferably, a motor is fixedly connected to the left surface of the cabinet body. A second threaded rod is fixedly connected to the output end of the motor. The sealing plate is threadedly sleeved on the outer surface of the second threaded rod.

[0013] Compared with the prior art, the beneficial effects of the utility model are as follows:

[0014] (1). For this special gas supply cabinet, place the gas cylinder on the upper surface of the support plate and make the gas cylinder contact the arc surface of the arc-shaped limiting plate. Then, by pulling the control rod, the control rod drives the rotating shaft to rotate synchronously. When the rotating shaft rotates, the L-shaped plate will rotate synchronously. When the L-shaped plate rotates, the second arc-shaped limiting plate will move synchronously. After the second arc-shaped limiting plate moves, it contacts the gas cylinder, thus completing the limiting and clamping of the gas cylinder. And when the rotating shaft rotates, the ratchet wheel will rotate synchronously. When the ratchet wheel rotates, the limiting component is used to limit the rotation direction of the ratchet wheel to prevent it from reversing. Through the above structure, the user can conveniently complete the clamping and limiting of the gas cylinder by using the control rod. At the same time, the limiting component is arranged on the front surface of the support plate, and the gas cylinder will not block the operation of the limiting component. The user can observe directly, improving its use convenience.

[0015] (2) When it is necessary to release the restricted clamping of the gas cylinder, by rotating the knob to drive the threaded rod to rotate. Since the movement trajectory of the fixed plate is restricted by the sliding groove, the movement trajectory of the threaded sleeve is indirectly restricted. Therefore, when the threaded rod rotates, it will synchronously drive the threaded sleeve to move. After the threaded sleeve moves, it will synchronously drive the fixed plate and the pawl to move, so that the pawl is disengaged from the ratchet. At the same time, when the leakage detection component detects a leakage, the motor can be used to drive the second threaded rod to rotate, and with the cooperation of the U-shaped frame, the sealing plate is driven to descend. Through the above structure, when a leakage occurs, the sealing performance of the cabinet can be improved by using the sealing plate, and harmful gas leakage can be avoided from causing harm to the surrounding staff. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The present utility model will be further described below in conjunction with the drawings and embodiments:

[0017] Figure 1 is a schematic structural diagram of a special gas supply cabinet of the present utility model;

[0018] Figure 2 is a schematic diagram of the ratchet of the present utility model;

[0019] Figure 3 is a schematic diagram of the limiting component of the present utility model;

[0020] Figure 4 is Figure 3 the enlarged view at A in

[0021] Reference numerals: 1, cabinet; 2, placement groove; 3, partition board; 4, support plate; 5, gas cylinder; 6, arc-shaped limiting plate; 7, connecting plate; 8, rotating shaft; 9, L-shaped plate; 10, second arc-shaped limiting plate; 11, control rod; 12, ratchet; 13, knob; 14, threaded rod; 15, sliding groove; 16, threaded sleeve; 17, fixed plate; 18, limiting plate; 19, rotating shaft; 20, pawl; 21, torsion spring; 22, second fixed plate; 23, leakage detection component; 24, U-shaped frame; 25, sealing plate; 26, motor; 27, second threaded rod. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0022] This part will describe in detail the specific embodiments of the present utility model. The preferred embodiments of the present utility model are shown in the drawings. The function of the drawings is to supplement the description of the text part of the specification, enabling people to intuitively and vividly understand each technical feature and the overall technical solution of the present utility model, but it cannot be understood as a limitation on the protection scope of the present utility model.

[0023] Please refer to Figures 1-4, the present utility model provides a technical solution: a special gas supply cabinet, including a cabinet body 1. A placement groove 2 is formed on the front surface of the cabinet body 1. A partition plate 3 is fixedly connected to the bottom wall of the placement groove 2. A support plate 4 is fixedly connected between the partition plate 3 and the inner wall of the placement groove 2. A gas cylinder 5 is arranged on the support plate 4. An arc-shaped limiting plate 6 is fixedly connected between the partition plate 3 and the inner wall of the placement groove 2. A connecting plate 7 is fixedly connected to the lower surface of the support plate 4. A rotating shaft 8 is rotatably sleeved inside the connecting plate 7. The left and right ends of the rotating shaft 8 respectively rotatably penetrate through the left and right side surfaces of the connecting plate 7. An L-shaped plate 9 is sleeved on the outer surface of the rotating shaft 8. A second arc-shaped limiting plate 10 is fixedly connected to the rear side surface of the L-shaped plate 9. A control rod 11 is sleeved on the outer surface of the rotating shaft 8. A ratchet 12 is arranged on the outer surface of the rotating shaft 8. A limiting component is arranged on the support plate 4. Place the gas cylinder 5 on the upper surface of the support plate 4 and make the gas cylinder 5 contact the arc surface of the arc-shaped limiting plate 6. Then, by pulling the control rod 11, the rotating shaft 8 is synchronously driven to rotate by the control rod 11. When the rotating shaft 8 rotates, the L-shaped plate 9 is synchronously driven to rotate. When the L-shaped plate 9 rotates, the second arc-shaped limiting plate 10 is synchronously driven to move. After the second arc-shaped limiting plate 10 moves, it contacts the gas cylinder 5, thus completing the limiting and clamping of the gas cylinder 5. And when the rotating shaft 8 rotates, the ratchet 12 is synchronously driven to rotate. When the ratchet 12 rotates, the limiting component is used to limit the rotation direction of the ratchet 12 to prevent it from reversing. Through the above structure, it can enable the user to more conveniently complete the clamping and limiting of the gas cylinder 5 by using the control rod 11. At the same time, the limiting component is arranged on the front side surface of the support plate 4, and the gas cylinder 5 will not block the operation of the limiting component. The user can observe it intuitively, improving its use convenience.

[0024] Further, the limiting component includes a knob 13 which is rotatably connected to the front surface of the support plate 4. A threaded rod 14 is fixedly connected to the rear surface of the knob 13. The inside of the support plate 4 is hollow. The rear end of the threaded rod 14 rotatably penetrates into the inside of the support plate 4. A sliding groove 15 extending into the inside of the support plate 4 is formed on the lower surface of the support plate 4. A threaded sleeve 16 is threadedly sleeved on the outer surface of the threaded rod 14. A fixing plate 17 is fixedly connected to the lower surface of the threaded sleeve 16. The lower surface of the fixing plate 17 extends out of the lower surface of the support plate 4. A limiting plate 18 is fixedly connected to the front surface of the fixing plate 17. Two second fixing plates 22 are fixedly connected to the lower surface of the fixing plate 17. A rotating shaft 19 is rotatably connected between the two second fixing plates 22. A pawl 20 is sleeved on the outer surface of the rotating shaft 19. Torsion springs 21 are fixedly connected to the left and right surfaces of the pawl 20. The opposite ends of the two torsion springs 21 are respectively fixedly connected to the two second fixing plates 22. The front surface of the pawl 20 contacts the limiting plate 18. A leakage detection component 23 is arranged on the left surface of the cabinet body 1. A U-shaped frame 24 is fixedly connected to the left surface of the cabinet body 1. A sealing plate 25 is slidably connected to the inner wall of the U-shaped frame 24. A motor 26 is fixedly connected to the left surface of the cabinet body 1. The output end of the motor 26 is fixedly connected to a second threaded rod 27. The sealing plate 25 is threadedly sleeved on the outer surface of the second threaded rod 27. The leakage detection component 23 described in the text is an existing structure. For details, reference can be made to the existing patent CN214663707U. When the ratchet wheel 12 rotates, its arc surface contacts the pawl 20 and drives the pawl 20 to rotate around the rotating shaft 19. When the rotating shaft 19 rotates, the torsion spring 21 will be compressed synchronously, so that it can quickly reset after the ratchet teeth of the ratchet wheel 12 pass. When it is necessary to release the restricted clamping of the gas cylinder 5, the knob 13 is rotated to drive the threaded rod 14 to rotate. Since the movement track of the fixing plate 17 is restricted by the sliding groove 15, the movement track of the threaded sleeve 16 is indirectly restricted. Therefore, when the threaded rod 14 rotates, the threaded sleeve 16 will be driven to move synchronously. After the threaded sleeve 16 moves, the fixing plate 17 and the pawl 20 will be driven to move synchronously, so that the pawl 20 is separated from the ratchet wheel 12. At the same time, when the leakage detection component 23 detects leakage, the motor 26 can be used to drive the second threaded rod 27 to rotate, and the sealing plate 25 can be driven to descend with the cooperation of the U-shaped frame 24. Through the above structure, when leakage occurs, the sealing performance of the cabinet body 1 can be improved by using the sealing plate 25, and harmful gas leakage can be avoided from causing harm to the surrounding staff.

[0025] Working principle: Place the gas cylinder 5 on the upper surface of the support plate 4, and make the gas cylinder 5 contact with the arc surface of the arc-shaped limiting plate 6. Then, by pulling the control rod 11, the control rod 11 drives the rotating shaft 8 to rotate synchronously. When the rotating shaft 8 rotates, it will drive the L-shaped plate 9 to rotate synchronously. When the L-shaped plate 9 rotates, it will drive the second arc-shaped limiting plate 10 to move synchronously. After the second arc-shaped limiting plate 10 moves, it contacts the gas cylinder 5, thus completing the limiting clamping of the gas cylinder 5. And when the rotating shaft 8 rotates, it will drive the ratchet 12 to rotate synchronously. When the ratchet 12 rotates, the rotation direction of the ratchet 12 is restricted by the limiting component to prevent it from reversing. When the ratchet 12 rotates, its arc surface contacts the pawl 20 and drives the pawl 20 to rotate around the rotating shaft 19. When the rotating shaft 19 rotates, it will compress the torsion spring 21 synchronously, so that it can quickly reset after the ratchet teeth of the ratchet 12 pass. When it is necessary to release the limiting clamping of the gas cylinder 5, rotate the knob 13 to drive the threaded rod 14 to rotate. Since the movement track of the fixed plate 17 is restricted by the sliding groove 15, the movement track of the threaded sleeve 16 is indirectly restricted. Therefore, when the threaded rod 14 rotates, it will drive the threaded sleeve 16 to move synchronously. After the threaded sleeve 16 moves, it drives the fixed plate 17 and the pawl 20 to move synchronously, so that the pawl 20 is disengaged from the ratchet 12. At the same time, when the leakage detection component 23 detects leakage, the motor 26 can be used to drive the second threaded rod 27 to rotate, and with the cooperation of the U-shaped frame 24, the sealing plate 25 is driven to descend.

[0026] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Within the knowledge scope of those of ordinary skill in the art in the said technical field, various changes can be made without departing from the purpose of the present invention.

Claims

1. A special gas supply cabinet, comprising a cabinet body (1), characterized in that: The front side surface of the cabinet (1) is provided with a placement groove (2), the bottom wall of the placement groove (2) is fixedly connected with a partition (3), a support plate (4) is fixedly connected between the partition (3) and the inner wall of the placement groove (2), a gas cylinder (5) is arranged on the support plate (4), an arc-shaped limit plate (6) is fixedly connected between the partition (3) and the inner wall of the placement groove (2), a connecting plate (7) is fixedly connected to the lower side surface of the support plate (4), and the inner wall of the connecting plate (7) is fixedly connected to the inner wall of the gas cylinder (5). The rotating shaft (8) is provided with a rotating sleeve, and the left and right ends of the rotating shaft (8) are respectively rotated to penetrate the left and right side surfaces of the connecting plate (7), the outer surface of the rotating shaft (8) is sleeved with an L-shaped plate (9), and the rear side surface of the L-shaped plate (9) is fixedly connected with a second arc-shaped limiting plate (10), the outer surface of the rotating shaft (8) is sleeved with a control rod (11), and the outer surface of the rotating shaft (8) is provided with a ratchet (12), and a limiting component is provided on the support plate (4).

2. A special gas supply cabinet according to claim 1, characterized in that: The limiting assembly comprises a knob (13), the knob (13) being rotatably connected to the front surface of the support plate (4), the rear surface of the knob (13) being fixedly connected to a threaded rod (14), the interior of the support plate (4) being arranged to be hollow, the rear end of the threaded rod (14) being rotatably penetrated into the interior of the support plate (4), and the lower surface of the support plate (4) being provided with a sliding groove (15) extending into the interior of the support plate (4).

3. A special gas supply cabinet according to claim 2, characterized in that: The outer surface of the threaded rod (14) is threadedly sleeved with a threaded sleeve (16), the lower surface of the threaded sleeve (16) is fixedly connected to a fixing plate (17), and the lower surface of the fixing plate (17) extends beyond the lower surface of the support plate (4).

4. A special gas supply cabinet according to claim 3, characterized in that: The front side surface of the fixed plate (17) is fixedly connected to a limiting plate (18), the lower side surface of the fixed plate (17) is fixedly connected to two second fixed plates (22), and a rotating shaft (19) is rotatably connected between the two second fixed plates (22).

5. A special gas supply cabinet according to claim 4, characterized in that: A ratchet (20) is sleeved on the outer surface of the rotating shaft (19), and torsion springs (21) are fixedly connected to the left and right side surfaces of the ratchet (20).

6. A special gas supply cabinet according to claim 5, characterized in that: The opposite ends of the two torsion springs (21) are respectively fixedly connected to the two second fixing plates (22), and the front side surface of the ratchet (20) is in contact with the limiting plate (18).

7. A special gas supply cabinet according to claim 1, characterized in that: The left side surface of the cabinet (1) is provided with a leakage detection assembly (23), the left side surface of the cabinet (1) is fixedly connected to a U-shaped frame (24), and the inner wall of the U-shaped frame (24) is slidably connected to a sealing plate (25).

8. A special gas supply cabinet according to claim 7, characterized in that: A motor (26) is fixedly connected to the left side surface of the cabinet (1), a second threaded rod (27) is fixedly connected to the output end of the motor (26), and the sealing plate (25) is threadedly sleeved on the outer surface of the second threaded rod (27).

Citation Information

Patent Citations

  • Full-automatic special gas four-bottle supply cabinet

    CN214663707U