Jig for omnibearing detection of semiconductor packaging product

By designing a rotatable product placement rack and a comprehensive inspection fixture with hollowed-out zone structure, the problem of inability to achieve all-round angle detection and poor adaptability to products of different specifications in the prior art is solved, and efficient and flexible semiconductor packaging product inspection is achieved.

CN222913805UActive Publication Date: 2025-05-27JIANGSU SILICON INTEGRITY SEMICON TECH CO LTD
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Patent Information

Application Number
CN202421662953.X
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-07-12
Publication Date
2025-05-27
Estimated Expiration
2034-07-12

AI Technical Summary

Technical Problem

Existing semiconductor packaging product inspection fixtures cannot achieve all-round angle inspection, and they are poorly adaptable to products of different specifications and sizes, resulting in low inspection flexibility and efficiency.

Method used

A fully-discovered fixture for semiconductor packaging products is designed, including a rotatable product placement rack and hollow area structure. Through the coordination of brake blocks and brake pads, a comprehensive inspection of the product can be achieved through the combination of multiple angles and adapted to products of different widths through movable frames.

Benefits of technology

It realizes all-round angle inspection of semiconductor packaging products, improves inspection flexibility and efficiency, reduces the limitations of the use of fixtures caused by product width, and improves product yield.

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Abstract

The utility model discloses a jig for omnibearing detection of a semiconductor packaging product, which comprises a base and a product placing rack rotatably arranged on the base, the product placing rack is provided with a placing rack body and a movable frame, the placing rack body and the movable frame are provided with paired slots to form a placing groove of the product, the placing rack body is provided with a hollow area, and the hollow area is provided with a plurality of slots. The movable frame is connected with a positioning plate through an anti-locking flexible mechanism, the positioning plate can be movably positioned on the placing frame body, the product placing frame is provided with a brake pad, the jig further comprises a brake block capable of moving left and right, and a protruding portion of the brake block can abut against or be separated from the brake pad so that angle adjusting and positioning of the product placing frame can be achieved. According to the utility model, the use limitation of the jig caused by the width of the product can be reduced, the rotatable product placing rack is combined with the brake pad and the brake block to realize the inspection of the product at any angle and direction, the omnibearing angle inspection of the product under the condition of no human touch risk is realized, and the flexibility, the efficiency and the accuracy of the inspection are improved.
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Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor chip packaging detection equipment, and more particularly to a fixture for comprehensively detecting semiconductor packaging products. Background Art

[0002] Semiconductor packaging products are widely used in electronic devices. During their production and manufacturing process, inspections are required. To facilitate the inspections, inspection fixtures are needed.

[0003] Currently, most of the widely used traditional inspection fixtures adopt a frame structure. Slots are opened on the plane of the frame, and the products to be inspected are placed on the frame and limited by the slots, and then subsequent inspection processes are carried out. When inspecting products, these fixtures usually can only view the products vertically from top to bottom, which greatly limits the inspection perspective. However, in actual applications, we often need to conduct side-standing inspections or full-angle inspections of the back of the products to obtain more comprehensive product quality information. The existing inspection fixtures greatly limit the flexibility and comprehensiveness in inspection operations.

[0004] There is also a significant problem with traditional inspection fixtures, that is, there are great limitations on the width of the inspected products. Due to the fixity in design, these fixtures often can only be applicable to products with a given width. For products of different specifications or sizes, different models of fixtures may need to be replaced, which undoubtedly increases the complexity and cost of inspections.

[0005] Therefore, in view of these limitations of the current traditional inspection fixtures, it is necessary to develop a new type of fixture that can provide a more comprehensive and flexible inspection solution to better meet the actual needs of the semiconductor packaging industry. Summary of the Utility Model

[0006] In order to solve the above problems, the utility model provides a fixture for comprehensively detecting semiconductor packaging products, which breaks through the width limitations of the products, can detect the products from the side-standing angle and the back of the products, can more comprehensively inspect the products, improve the inspection efficiency, and further improve the yield rate of the products.

[0007] According to one aspect of the present utility model, there is provided a fixture for comprehensively detecting semiconductor packaging products, including a base and a product placement rack. The product placement rack is provided with a placement groove for the semiconductor packaging products to be inspected. The product placement rack has a hollow structure with a hollowed-out area. Both ends of the product placement rack are rotatably mounted on the base. A brake pad is provided on the outer side of one end of the product placement rack that is rotatably connected to the base. The fixture further includes a brake block that can move left and right. One end of the brake block is provided with a protruding portion. The base is provided with an avoidance opening for the protruding portion to pass through. The protruding portion of the brake block can pass through the avoidance opening to abut against or disengage from the brake pad to realize the angular adjustment and positioning of the product placement rack. Thus, the semiconductor packaging products to be inspected are placed in the placement groove for limiting. When it is necessary to adjust the product inspection angle, the protruding portion of the brake block disengages from the brake pad, and the product placement rack is rotated. The product placement rack rotates relative to the base, and the brake pad rotates with the rotation of the product placement rack. When the product placement rack reaches the required angle, the protruding portion of the brake block is made to pass through the avoidance opening to abut against the brake pad, and the product placement rack is positioned. Multi-angle comprehensive inspection of the product can be achieved. The product placement rack is provided with a hollowed-out area. Without removing the product and re-placing it, the product placement rack can also be flipped to detect the back of the product from the hollowed-out area, realizing all-round angle inspection of the product without the risk of manual touch and improving the flexibility of inspection.

[0008] In some embodiments, the placement groove is two slots provided on the product placement rack. The insertion starting opening of the placement groove is located at one end of the product placement rack where no brake pad is provided. When the product placement rack is horizontally placed relative to the base, the position of the placement groove is higher than both ends of the base. Thus, it is very convenient to place the semiconductor packaging products to be inspected by means of plugging and unplugging. After insertion, both sides of the product are limited by the slots. When the product placement rack rotates, it does not affect positioning. The height of the placement groove is reasonably set, and it is convenient to insert or remove the product.

[0009] In some embodiments, an angle adjustment knob is connected to one end of the product placement rack where no brake pad is provided. The angle adjustment knob is located outside the base. Thus, the operator can rotate the angle adjustment knob to realize the rotation of the product placement rack relative to the base, with convenient operation and controllable angle.

[0010] In some embodiments, the product placement rack includes a placement rack body and a movable frame, the placement rack body has a horizontal bottom plate, a fixed frame vertically arranged relative to the bottom plate, and an end plate forming an L-shaped structure with the fixed frame, the hollow area of ​​the hollow structure is arranged on the bottom plate, the fixed frame and the movable frame are symmetrically arranged, and two placement grooves are respectively arranged on the fixed frame and the movable frame, and the position of the movable frame can be moved relative to the fixed frame. Therefore, according to the width of the semiconductor package product to be inspected, the distance between the fixed frame and the movable frame is adjusted, and after the movable frame is fixed, the product is inserted into the placement groove, and a movable frame with a changeable position is provided, so that the fixture is suitable for products of different widths, reducing the limitations of the fixture use caused by the product width.

[0011] In some embodiments, the product placement rack further includes a positioning plate, which is connected to the outer side of the movable frame through an anti-stuck flexible mechanism, and the anti-stuck flexible mechanism includes a spring and a screw of equal height, the spring is embedded between the movable frame and the positioning plate, and the movable frame and the positioning plate are connected through the screw of equal height, the bottom plate is provided with a slide groove, and the positioning plate is movably mounted on the slide groove of the bottom plate through the platform fixing screw. As a result, the semiconductor package product to be inspected itself will have a processing tolerance, in order to match the width of the inspection area and prevent the product from tilting or its own tolerance from causing it to get stuck during insertion, the anti-stuck flexible mechanism makes the connection of the movable frame relative to the positioning plate not absolutely fixed, and the movable frame has a small amount of moving space, which can prevent the product from getting stuck when plugging in and out.

[0012] In some embodiments, a ball head plunger is provided at one end of the movable frame away from the insertion start opening of the placement slot, and the ball head of the ball head plunger at the bottom extends to the upper top of the placement slot. Therefore, when the product is inserted, there is a sense of obstruction when the ball head plunger reaches the plug position, and the product is placed in place after a slight push, and the ball head plunger can play a role in positioning the product.

[0013] In some embodiments, the brake block is connected to a slide cylinder, the slide cylinder is connected to a pneumatic switch and a manual valve reversing rod, and the slide cylinder is fixed on a base. Thus, the pneumatic switch is a switch for connecting the pneumatic pipeline of the slide cylinder, and the brake block can be adjusted through the manual valve reversing rod, and the brake block is pressed to the right to fix the angle of the inspection area, or the brake block is released to the left to make the angle of the inspection area adjustable.

[0014] Compared with the prior art, the beneficial effects of the present utility model are as follows: The fixture for comprehensively detecting semiconductor packaging products provided by the present utility model is applicable to the detection of products with different widths within the range allowed by the stroke of its movable frame, reducing the limitations of fixture use caused by the product width. Insert the semiconductor packaging product to be inspected into the placement slot, move the brake block to disengage the protruding part from the brake piece, rotate the angle adjustment knob to rotate the product placement rack relative to the base. When the required angle is reached, move the brake block to make the protruding part press against the brake piece to position the product placement rack, facilitating inspection in any angular orientation. Moreover, the product placement rack is provided with a hollow area structure, and the back of the product can still be inspected through the hollow area after flipping. Using this fixture, it is possible to comprehensively inspect the product at various angles without the risk of manual touch, improving the flexibility of inspection and effectively enhancing the inspection efficiency and accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 FIG. 6 is a perspective view of an embodiment of a fixture for comprehensively detecting semiconductor packaging products of the present utility model, with the product to be detected placed therein;

[0016] Figure 2 is Figure 1 a perspective view from another angle;

[0017] Figure 3 FIG. 16 is a schematic diagram of the exploded structural parts of an embodiment of a fixture for comprehensively detecting semiconductor packaging products of the present utility model;

[0018] Figure 4 FIG. 20 is a schematic diagram of the fixture for comprehensively detecting semiconductor packaging products after the product placement rack rotates. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0019] The present utility model will be further described below in conjunction with the detailed embodiments.

[0020] Such as Figures 1 to 4As shown, a fixture for all-round detection of semiconductor packaged products in one embodiment of the utility model includes a base 1 and a product placement rack 2, the product placement rack 2 has a placement slot 200 for the semiconductor packaged product 100 to be inspected, the product placement rack 2 has a hollow area 20 with a hollow structure, and both ends of the product placement rack 2 can be rotatably mounted on the base 1. Specifically, the base 1 includes a fixed plate 11 and two side frames 12 vertically mounted on the fixed plate 11, and a space for mounting the product placement rack 2 is formed between the two side frames 12. A brake pad 3 is fixedly mounted on the outer side of one end of the product placement rack 2 that is rotatably connected to the base 1, and the brake pad 3 is a circular sheet structure. The two ends of the product placement rack 2 are rotatably mounted on the side frame 12 of the base 1 through bearings and pins, and one end of the brake pad 3 is provided, and the pin passes through the center of the circle of the brake pad 3 to connect the product placement rack 2. The fixture also includes a brake block 4 used in conjunction with the brake pad 3, and the brake block 4 can move left and right. The brake block 4 is located on the outer side of the side frame 12 at the end where the brake pad 3 is located. One end of the brake block 4 has a protrusion 41, and the side frame 12 on the side corresponding to the base 1 is provided with an escape opening 13 for the protrusion 41 to pass through. The protrusion 41 of the brake block 4 can pass through the escape opening 13 to support or disengage from the brake pad 3 to achieve the angle adjustment positioning of the product placement rack 2. When the protrusion 41 of the brake block 4 supports the brake pad 3, the product placement rack 2 cannot rotate; when the protrusion 41 of the brake block 4 disengages from the brake pad 3, the product placement rack 2 can rotate.

[0021] An angle adjustment knob 5 may be connected to the end of the product placement rack 2 where the brake pad 3 is not provided, and the angle adjustment knob 5 is located outside the side frame 12 of the base 1, and the angle adjustment knob 5 is fixedly connected to the product placement rack 2. The operator can realize the rotation of the product placement rack 2 relative to the base 1 by turning the angle adjustment knob 5, which is convenient to operate and the angle is controllable.

[0022] The placement slots 200 are two slots arranged on the product placement rack 2, and the insertion start port 201 of the placement slots 200 is located at the end of the product placement rack 2 where the brake pad 3 is not arranged. When the product placement rack 2 is placed at a horizontal angle relative to the base 1, the position of the placement slots 200 is higher than the side frames 12 at both ends of the base 1. The semiconductor package product 100 to be inspected is placed in a plug-in manner, which is very convenient. After insertion, the two sides of the product are limited by the slots, and the positioning is not affected when the product placement rack 2 rotates. The placement slots 200 are reasonably set in height, and the product can be inserted or removed conveniently.

[0023] In order to make the fixture suitable for products with more width specifications, the product placement rack 2 is set as a movable structure with one side movable. Figure 3As shown in the figure, the product placement rack 2 includes a placement rack body 21 and a movable frame 22. The placement rack body 21 has a horizontal bottom plate 211, a fixed frame 212 vertically arranged relative to the bottom plate 211, and an end plate 213 forming an L-shaped structure with the fixed frame 212. A hollow structure of the hollow area 20 is opened on the bottom plate 211. The movable frame 22 is symmetrically arranged on the opposite side of the fixed frame 212, and the position of the movable frame 22 can move relative to the fixed frame 212. A placement groove 200 is respectively arranged on the opposite surfaces of the fixed frame 212 and the movable frame 22. In this way, according to the width of the semiconductor package product 100 to be inspected, the distance between the fixed frame 212 and the movable frame 22 can be adjusted. After fixing the movable frame 22, the product is inserted into the placement groove 200. This fixture is provided with a movable frame 22 with a changeable position, making the fixture applicable to products of different widths and reducing the limitations of fixture use caused by the product width. In this embodiment, the fixture is applicable to the inspection of substrate / frame products with a width of 70 mm to 105 mm and a thickness of 0.1 mm to 0.9 mm. In actual application, the overall size of the fixture can be adjusted according to production needs.

[0024] The product placement rack 2 further includes a positioning plate 23, and the positioning plate 23 is connected to the outside of the movable frame 22 through an anti-jamming flexible mechanism 24. As Figure 3 shown, the anti-jamming flexible mechanism 24 includes a spring 241 and an equal-height screw 242. The spring 241 is embedded between the movable frame 22 and the positioning plate 23. The movable frame 22 and the positioning plate 23 have accommodation blind holes 2410 for accommodating the spring 241. The movable frame 22 and the positioning plate 23 are connected by the equal-height screw 242. Through this anti-jamming flexible mechanism 24, the installation of the movable frame 22 can be realized without positioning the movable frame 22 rigidly, giving the movable frame 22 a small amount of moving space. A sliding groove 214 is opened on the bottom plate 211. The sliding groove 214 is a long strip-shaped waist-shaped hole structure. The positioning plate 23 is movably installed on the sliding groove 214 of the bottom plate 211 through a platform fixing screw 25. The platform fixing screw 25 of the positioning plate 23 can move along the sliding groove 214 as a track, so as to realize the position change of the movable frame 22. Therefore, there will be processing tolerances in the semiconductor package product 100 to be inspected itself. In combination with the width of the inspection area, to prevent the product from tilting or being jammed during insertion due to its own tolerances. Through this anti-jamming flexible mechanism 24, the connection between the movable frame 22 and the positioning plate 23 is not absolutely fixed, and the movable frame 22 has a small amount of moving space, which can prevent the product from being jammed during insertion and extraction.

[0025] A ball head plunger 26 is installed at one end of the movable frame 22 away from the insertion start opening 201 of the placement groove 200, and the bottom ball head of the ball head plunger 26 extends to the upper top of the placement groove 200. The ball head plunger 26 is a purchased part and is a prior art product. When the product is inserted, there is a sense of obstruction when the ball head plunger 26 reaches the plug position. If it is pushed in a little more, the product is placed in place. The ball head plunger 26 can play a positioning role for the product.

[0026] The brake block 4 is pneumatically controlled. Specifically, the bottom of the brake block 4 is connected to a slide cylinder 6, which is connected to a pneumatic switch 61 and a manual valve reversing rod 62. The slide cylinder 6 is fixed to the fixed plate 11 of the base 1. The pneumatic switch 61 is a switch for connecting the pneumatic pipeline of the slide cylinder 6. The brake block 4 can be adjusted through the manual valve reversing rod 62. In this embodiment, the brake block 3 is pressed to the right to fix the angle of the inspection area, or the brake block 3 is disengaged to the left to make the angle of the inspection area adjustable.

[0027] The working process of using the fixture for testing is as follows: lay the fixture flat, adjust the position of the movable frame 22 according to the width of the semiconductor package product 100 to be tested, and fix the positioning plate 23 and the bottom plate 211 with the platform fixing screws 25; insert the semiconductor package product 100 to be tested into the placement slot 200 from the insertion start port 201 on the right side under the horizontal angle of the product placement rack 2. After the product is inserted, there is a sense of obstruction when the ball head plunger 26 is in the plug position. Push it in slightly, and the product is placed in place. The product can be inspected from top to bottom in the vertical direction; when it is necessary to adjust the product inspection angle, move the manual valve reversing rod 6 2 to move the brake block 4 to the left, the protrusion 41 of the brake block 4 is separated from the brake pad 3, the angle adjustment knob 5 is turned to rotate the product placement rack 2 to the desired angle, the manual valve reversing rod 62 is moved to move the brake block 4 to the right, so that the protrusion 41 of the brake block 4 passes through the avoidance opening 13 to support the brake pad 3, the product placement rack 2 is positioned, and the operator can conduct inspection at this angle. The product placement slot 200 adopts this rotatable structure to realize multi-angle comprehensive inspection of the product; the product placement rack 2 has a hollow area 20. When there is no need to remove the product and place it again, the product placement rack 2 can also be turned over to inspect the back of the product through the hollow area 20.

[0028] The jig for all-round inspection of semiconductor packaged products provided by the utility model is suitable for inspecting products of different widths within the range allowed by the travel of its movable frame 22, thereby reducing the limitations of the use of the jig due to the width of the product. The rotatable and hollow product placement rack 2 is used in combination with the brake block 4 and the brake pad 3 to locate the front and back of the product at any angle for inspection. The jig can inspect the product at all angles without the risk of human contact, thereby improving the flexibility of inspection and effectively improving the efficiency and accuracy of inspection.

[0029] The above are only some embodiments of the present utility model. It should be noted that for those of ordinary skill in the art, without departing from the creative concept of the present utility model, other deformations and improvements can also be made, and these all belong to the protection scope of the present utility model.

Claims

1. A fixture for all-round inspection of semiconductor packaging products, comprising a base (1) and a product placement rack (2), characterized in that: The product placement rack (2) is provided with a placement slot (200) for a semiconductor packaged product (100) to be inspected, the product placement rack (2) has a hollow area (20) of a hollow structure, the two ends of the product placement rack (2) can be rotatably mounted on the base (1), a brake pad (3) is provided on the outer side of one end of the product placement rack (2) rotatably connected to the base (1), the fixture also includes a brake block (4) that can move left and right, a protrusion (41) is provided at one end of the brake block (4), and the base (1) is provided with an avoidance opening (13) for the protrusion (41) to pass through, and the protrusion (41) of the brake block (4) can pass through the avoidance opening (13) to support or detach from the brake pad (3) to achieve angle adjustment and positioning of the product placement rack (2).

2. The omnidirectional inspection jig for semiconductor package products according to claim 1, characterized in that: The placement grooves (200) are two slots arranged on the product placement rack, and the insertion start opening (201) of the placement grooves (200) is located at the end of the product placement rack (2) where the brake pad (3) is not arranged, and when the product placement rack (2) is placed at a horizontal angle relative to the base (1), the position of the placement grooves (200) is higher than the two ends of the base (1).

3. The omnidirectional inspection jig for semiconductor package products according to claim 2, characterized in that: The end of the product placement rack (2) not provided with the brake pad (3) is connected to an angle adjustment knob (5), and the angle adjustment knob (5) is located on the outside of the base (1).

4. The omnidirectional detection jig for semiconductor package products according to claim 2 or 3, characterized in that: The product placement rack (2) comprises a placement rack body (21) and a movable frame (22); the placement rack body (21) comprises a horizontal bottom plate (211), a fixed frame (212) vertically arranged relative to the bottom plate (211), and an end plate (213) forming an L-shaped structure with the fixed frame (212); the hollow area (20) of the hollow structure is arranged on the bottom plate (211); the fixed frame (212) and the movable frame (22) are symmetrically arranged; the two placement grooves (200) are respectively arranged on the fixed frame (212) and the movable frame (22); and the position of the movable frame (22) can be moved relative to the fixed frame (212).

5. The omnidirectional inspection jig for semiconductor package products according to claim 4, characterized in that: The product placement rack (2) also includes a positioning plate (23), and the positioning plate (23) is connected to the outer side of the movable frame (22) through an anti-stuck flexible mechanism (24), and the anti-stuck flexible mechanism (24) includes a spring (241) and a height-equalizing screw (242), and the spring (241) is embedded between the movable frame (22) and the positioning plate (23), and the movable frame (22) and the positioning plate (23) are connected through the height-equalizing screw (242), and the bottom plate (211) is provided with a slide groove (214), and the positioning plate (23) is movably installed on the slide groove (214) of the bottom plate (211) through a platform fixing screw (25).

6. The omnidirectional inspection jig for semiconductor package products according to claim 5, characterized in that: A ball head plunger (26) is provided at one end of the movable frame (22) away from the insertion start opening (201) of the placement groove (200), and the bottom ball head of the ball head plunger (26) extends to the upper top of the placement groove (200).

7. The omnidirectional inspection jig for semiconductor package products according to claim 1, characterized in that: The brake block (4) is connected to a slide cylinder (6), the slide cylinder (6) is connected to a pneumatic switch (61) and a manual valve reversing rod (62), and the slide cylinder (6) is fixed on a base (1).