Flower basket assembly and wet process titanium tungsten etching machine

Abstract

The utility model relates to the technical field of etching machine equipment, in particular to a flower basket assembly and a wet process titanium tungsten etching machine, which are characterized in that a plurality of limiting grooves are formed in the upper surface of a flower basket main body, a plurality of sliding grooves are formed in the inner side surface of the flower basket main body, and a plurality of fixing blocks are arranged on the side surface of the flower basket main body; multiple fixing plates are arranged on the side face of the upper cover plate. The beneficial effects are that the handle is pulled to enable the moving plate and the pressing plate to move along the slide groove, then the wafer box is placed between the pressing plate and the separator plate in the flower basket main body, the handle is released, the thrust spring is released to push the moving plate to slide along the slide groove, the pressing plate presses the side surface of the wafer box, and the wafer box is fixed in the flower basket main body. The pressing plates are made of flexible materials, have certain elasticity and elastically support the side faces of the wafer box, the structures are matched with one another, the situation that the wafer box collides with the inner wall of the flower basket body in the moving process, then wafers in the wafer box collide with one another, and then the wafers are broken can be avoided, the reliability of the flower basket assembly is improved, and practicability is high.

Description

Technical Field

[0001] The utility model relates to the field of etching machine equipment, in particular to a flower basket assembly and a wet process titanium tungsten etching machine. Background Technique

[0002] Etching machines can be divided into two categories: chemical etching machines and electrolytic etching machines. In chemical etching, chemical solutions are used to achieve the purpose of etching through chemical reactions. Chemical etching machines are technologies that remove materials through chemical reactions or physical impacts. In the semiconductor and circuit board manufacturing processes, etching is an indispensable technology.

[0003] In the prior art, in the manufacturing process of driving chip gold bumps, an etching machine is also required. The mainly used one is a titanium tungsten etching machine, which can remove the titanium tungsten film on the surface of the sputtered wafer. When performing the etching process, it is necessary to first place the wafer cassette containing the wafers in the flower basket assembly and then transport the wafers.

[0004] However, the traditional flower basket assembly does not fix the wafer cassette inside it. During the transportation of the wafer cassette, the wafer cassette may collide with the inner wall of the flower basket assembly, resulting in wafer breakage. For this reason, the utility model proposes a flower basket assembly and a wet process titanium tungsten etching machine to solve the above problems. Content of the Utility Model

[0005] The purpose of the utility model is to provide a flower basket assembly and a wet process titanium tungsten etching machine to solve the problems raised in the above background technique.

[0006] To achieve the above purpose, the utility model provides the following technical solution: a flower basket assembly, the flower basket assembly includes: a flower basket main body, several limiting grooves are opened on the upper surface of the flower basket main body, several sliding grooves are opened on the inner side surface of the flower basket main body, and several fixing blocks are arranged on the side surface of the flower basket main body;

[0007] An upper cover plate, and several fixing plates are arranged on the side surface of the upper cover plate.

[0008] Preferably, the limiting groove is in a "convex" groove-shaped structure, and the limiting block fixedly connected to the lower surface of the upper cover plate can be inserted into the limiting groove.

[0009] Preferably, the sliding groove is in a "convex" groove-shaped structure, the convex block fixedly connected to the side surface of the moving plate is arranged in the sliding groove, the moving plate can move along the sliding groove, a pressing plate is fixedly connected to one side of the moving plate, and several connecting rods are fixedly connected to the other side of the moving plate.

[0010] Preferably, the fixing block is in a square plate-shaped structure, a clamping groove is opened on the fixing block, the clamping groove is in a square groove-shaped structure, the lower half of the clamping block can be inserted into the clamping groove, and a limiting rod is fixedly connected to the upper surface of the clamping block.

[0011] Preferably, the connecting rod has a cylindrical structure. The connecting rod passes through a hole formed in the side surface of the flower basket main body and is fixedly connected to the handle. A thrust spring is sleeved on the connecting rod.

[0012] Preferably, the limiting rod has a cylindrical structure. The limiting rod passes through a hole formed in a fixing plate fixedly connected to the side surface of the upper cover plate and is fixedly connected to the limiting plate. A elastic spring is sleeved on the limiting rod. One end of the elastic spring is fixedly connected to the fixing plate, and the other end of the elastic spring is fixedly connected to the clamping block.

[0013] Preferably, the other end of the thrust spring is fixedly connected to the moving plate, and one end of the thrust spring is fixedly connected to the inner wall of the flower basket main body. A partition plate is fixedly connected inside the flower basket main body.

[0014] A wet process titanium-tungsten etching machine includes the flower basket assembly described above.

[0015] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0016] For the flower basket assembly and the wet process titanium-tungsten etching machine proposed by the present utility model, pull the handle and the connecting rod to move the moving plate and the pressing plate along the sliding groove. Then, place the wafer cassette between the pressing plate and the partition plate inside the flower basket main body. Release the handle, and the thrust spring relaxes and pushes the moving plate to slide along the sliding groove. The pressing plate presses against the side surface of the wafer cassette, fixing the wafer cassette between the pressing plate and the partition plate and fixing the wafer cassette inside the flower basket main body. Moreover, the pressing plate is made of a flexible material and has a certain elasticity, providing elastic support for the side surface of the wafer cassette. The above-mentioned structures cooperate with each other to avoid the wafer cassette colliding with the inner wall of the flower basket main body during movement, which may cause the wafers inside the wafer cassette to collide with each other and then cause the wafers to break, improving the reliability of the flower basket assembly and having high practicality. Snap the limiting block fixedly connected to the upper cover plate into the limiting groove formed in the flower basket main body. Pull the limiting plate and the limiting rod upward to completely snap the limiting block into the limiting groove. Release the limiting plate, and the elastic spring relaxes and pushes the clamping block downward until the lower half of the clamping block snaps into the clamping groove formed in the fixing block, thereby fixing the upper cover plate on the flower basket main body. The upper cover plate can prevent the staff from accidentally touching the wafer when moving the flower basket assembly, which may cause the wafer to be damaged and unusable, facilitating the use by the staff and having high practicality. Description of the Drawings

[0017] Figure 1 It is a schematic structural diagram of the present utility model;

[0018] Figure 2 It is Figure 1 an enlarged structural diagram at A in

[0019] Figure 3 a partial structural diagram of the present utility model;

[0020] Figure 4 It is Figure 3Schematic diagram of the enlarged structure at position B in the [device name].

[0021] In the figure: 1. Basket main body; 2. Upper cover plate; 3. Limiting groove; 4. Fixed block; 5. Sliding groove; 6. Partition board; 7. Fixed plate; 8. Limiting block; 9. Clamping block; 10. Limiting rod; 11. Elastic spring; 12. Moving plate; 13. Connecting rod; 14. Thrust spring; 15. Handle; 16. Pressing plate; 17. Card slot; 18. Limiting plate. Specific embodiments

[0022] In order to clearly and completely describe the purpose, technical solution of the present utility model, and make the advantages more clear, the following further details the embodiments of the present utility model with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are part of the embodiments of the present utility model, rather than all embodiments, and are only used to explain the embodiments of the present utility model, not to limit the embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present utility model.

[0023] Embodiment 1

[0024] Please refer to Figures 1-4 , the present utility model provides a technical solution: a basket assembly, the basket assembly includes: a basket main body 1, a plurality of limiting grooves 3 are opened on the upper surface of the basket main body 1, a plurality of sliding grooves 5 are opened on the inner side surface of the basket main body 1, and a plurality of fixed blocks 4 are arranged on the side surface of the basket main body 1; an upper cover plate 2, a plurality of fixed plates 7 are arranged on the side surface of the upper cover plate 2, and a wet process titanium tungsten etching machine includes the above-mentioned basket assembly;

[0025] During specific use, the staff pulls the handle 15 to move the moving plate 12 along the sliding groove 5, places the PFA cartridge between the pressing plate 16 and the partition board 6, releases the handle 15, the thrust spring 14 relaxes and pushes the moving plate 12 to slide along the sliding groove 5, so that the pressing plate 16 presses against the side surface of the PFA cartridge, fixes the PFA cartridge in the basket main body 1, inserts the limiting block 8 fixedly connected to the lower surface of the upper cover plate 2 into the limiting groove 3, pulls the limiting plate 18 and the limiting rod 10 to move upward along the holes opened on the fixed plate 7, pushes the upper cover plate 2 until the limiting block 8 is completely inserted into the limiting groove 3, releases the limiting plate 18, the elastic spring 11 relaxes, and pushes the lower half of the clamping block 9 into the card slot 17 opened on the fixed block 4. Then the staff can pull the handle on the basket main body 1 to transport the wafers.

[0026] Embodiment 2

[0027] On the basis of the first embodiment, in order to make the wafer more stable during transportation, a chute 5 is provided in a "convex"-shaped groove structure. The bump fixedly connected to the side of the moving plate 12 is arranged in the chute 5, and the moving plate 12 can move along the chute 5. A pressing plate 16 is fixedly connected to one side of the moving plate 12, and a plurality of connecting rods 13 are fixedly connected to the other side of the moving plate 12. The staff pulls the handle 15 to make the moving plate 12 move along the chute 5, and places the wafer cassette between the pressing plate 16 and the partition plate 6. The connecting rod 13 is in a cylindrical structure, and the connecting rod 13 passes through the hole opened on the side of the flower basket main body 1 and is fixedly connected to the handle 15. A thrust spring 14 is sleeved on the connecting rod 13. The staff pulls the handle 15 to make the moving plate 12 move along the chute 5, places the wafer cassette between the pressing plate 16 and the partition plate 6, and releases the handle 15. The thrust spring 14 relaxes and pushes the moving plate 12 to slide along the chute 5, so that the pressing plate 16 presses against the side of the wafer cassette. And the pressing plate 16 is made of a flexible material to fix the wafer cassette in the flower basket main body 1. The other end of the thrust spring 14 is fixedly connected to the moving plate 12, and one end of the thrust spring 14 is fixedly connected to the inner wall of the flower basket main body 1. A partition plate 6 is fixedly connected in the flower basket main body 1. The above-mentioned structures cooperate with each other to prevent the wafer cassette from colliding with the inner wall of the flower basket assembly during transportation, which may cause the wafer to break, and improve the reliability of the flower basket assembly.

[0028] Embodiment Three

[0029] On the basis of the second embodiment, in order to improve the reliability of the flower basket assembly, a limiting groove 3 is provided. The limiting groove 3 is in a "convex"-shaped groove structure. The limiting block 8 fixedly connected to the lower surface of the upper cover plate 2 can be inserted into the limiting groove 3. After the upper cover plate 2 is installed on the flower basket main body 1, it can prevent the staff from accidentally touching the wafer, which may cause the wafer to be damaged. The fixing block 4 is in a square plate structure, and a card slot 17 is opened on the fixing block 4. The card slot 17 is in a square groove structure. The lower half of the card block 9 can be inserted into the card slot 17. A limiting rod 10 is fixedly connected to the upper surface of the card block 9. Pull the limiting plate 18 and the limiting rod 10 to move upward along the hole opened on the fixing plate 7. The limiting rod 10 is in a cylindrical structure. The limiting rod 10 passes through the hole opened on the fixing plate 7 fixedly connected to the side of the upper cover plate 2 and is fixedly connected to the limiting plate 18. A elastic spring 11 is sleeved on the limiting rod 10. One end of the elastic spring 11 is fixedly connected to the fixing plate 7, and the other end of the elastic spring 11 is fixedly connected to the card block 9. Release the limiting plate 18, and the elastic spring 11 relaxes, pushing the lower half of the card block 9 to be inserted into the card slot 17 opened on the fixing block 4, and fixing the upper cover plate 2 on the flower basket main body 1, which is convenient for the staff to operate, and can prevent the staff from accidentally touching the wafer when moving the flower basket assembly, which may cause the wafer to be damaged, and improves the reliability of the device.

[0030] In actual use, pull the handle 15 and the connecting rod 13 to move the moving plate 12 and the pressing plate 16 along the sliding groove 5. Then place the wafer cassette between the pressing plate 16 and the partition plate 6 in the flower basket main body 1. Release the handle 15, and the thrust spring 14 relaxes and pushes the moving plate 12 to slide along the sliding groove 5. The pressing plate 16 presses against the side of the wafer cassette, fixing the wafer cassette between the pressing plate 16 and the partition plate 6, and fixing the wafer cassette in the flower basket main body 1. Moreover, the pressing plate 16 is made of a flexible material with certain elasticity, providing elastic support for the side of the wafer cassette. The above-described structures cooperate with each other to prevent the wafer cassette from colliding with the inner wall of the flower basket main body 1 during movement, which may cause the wafers in the wafer cassette to collide with each other and then cause the wafers to break, improving the reliability of the flower basket assembly and having high practicality. Snap the limit block 8 fixedly connected to the upper cover plate 2 into the limit groove 3 opened on the flower basket main body 1. Pull the limit plate 18 and the limit rod 10 upward to completely snap the limit block 8 into the limit groove 3. Release the limit plate 18, and the elastic spring 11 relaxes and pushes the latch 9 downward until the lower half of the latch 9 snaps into the card slot 17 opened on the fixed block 4, thereby fixing the upper cover plate 2 on the flower basket main body 1. The upper cover plate 2 can prevent the staff from accidentally touching the wafer when moving the flower basket assembly, which may cause the wafer to be damaged and unusable, facilitating the staff to use and having high practicality.

[0031] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A flower basket assembly, characterized in that: The flower basket assembly comprises: a flower basket body (1), a plurality of limit grooves (3) are provided on the upper surface of the flower basket body (1), a plurality of slide grooves (5) are provided on the inner side surface of the flower basket body (1), and a plurality of fixing blocks (4) are provided on the side surface of the flower basket body (1); An upper cover plate (2), wherein a plurality of fixing plates (7) are arranged on the side of the upper cover plate (2); The slide groove (5) is a "convex" groove structure, a convex block fixedly connected to the side of the movable plate (12) is arranged in the slide groove (5), the movable plate (12) can move along the slide groove (5), a pressure plate (16) is fixedly connected to one side of the movable plate (12), and a plurality of connecting rods (13) are fixedly connected to the other side of the movable plate (12).

2. A flower basket assembly according to claim 1, characterized in that: The limiting groove (3) is a "convex" groove-shaped structure, and the limiting block (8) fixedly connected to the lower surface of the upper cover plate (2) can be inserted into the limiting groove (3).

3. A flower basket assembly according to claim 1, characterized in that: The fixing block (4) is in a square plate-like structure. A clamping slot (17) is provided on the fixing block (4). The clamping slot (17) is in a square slot-like structure. The lower half of the clamping block (9) can be clamped into the clamping slot (17). The upper surface of the clamping block (9) is fixedly connected to a limiting rod (10).

4. The flower basket assembly according to claim 1, characterized in that: The connecting rod (13) is a cylindrical structure. The connecting rod (13) passes through a hole provided on the side of the flower basket body (1) and is fixedly connected to the handle (15). A thrust spring (14) is sleeved on the connecting rod (13).

5. The flower basket assembly according to claim 3, characterized in that: The limiting rod (10) is of cylindrical structure. The limiting rod (10) passes through a hole provided on a fixing plate (7) fixedly connected to the side of the upper cover plate (2) and is fixedly connected to the limiting plate (18). An elastic spring (11) is sleeved on the limiting rod (10). One end of the elastic spring (11) is fixedly connected to the fixing plate (7), and the other end of the elastic spring (11) is fixedly connected to the clamping block (9).

6. A flower basket assembly according to claim 4, characterized in that: The other end of the thrust spring (14) is fixedly connected to the movable plate (12), and one end of the thrust spring (14) is fixedly connected to the inner wall of the flower basket body (1), and a partition plate (6) is fixedly connected inside the flower basket body (1).

7. A wet process titanium tungsten etching machine, characterized in that: The invention comprises a flower basket assembly as claimed in any one of claims 1 to 6.

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