Wafer processing flower basket with placing structure

Abstract

The utility model discloses a wafer processing flower basket with a placing structure, which comprises two mounting support plates, the sides, close to each other, of the two mounting support plates are fixedly connected with a first positioning plate, the middle part of the first positioning plate is provided with a first positioning groove, and the first positioning groove is provided with a second positioning groove. The side, close to the first positioning plate, of the mounting supporting plate is fixedly connected with a second positioning plate. After the first adjusting plate and the second adjusting plate are installed on the installation supporting plates through the first fixing bolts, the adjusting grooves in the first adjusting plate and the second adjusting plate are aligned, and after the two installation supporting plates are moved to a proper distance, the first adjusting bolts are installed in the adjusting grooves and screwed into the first fixing plates, and then the first adjusting plates and the second adjusting plates are fixed. When the size needs to be adjusted, the first fixing bolt is screwed out of the adjusting groove and the first fixing plate, the first adjusting plate and the second adjusting plate slide relatively, and then the size of the flower basket can be adjusted.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer processing, and specifically relates to a flower basket for wafer processing with a placement structure. Background Technique

[0002] A wafer refers to a silicon wafer used to manufacture silicon semiconductor integrated circuits, and its raw material is silicon. High-purity polysilicon is dissolved and doped with a silicon crystal seed, and then slowly pulled out to form a cylindrical single-crystalline silicon. After the silicon ingot is ground, polished, and sliced, a silicon wafer is formed, that is, a wafer. A flower basket, also called a polysilicon core block loading basket, is an important and indispensable device in the process of manufacturing photovoltaic silicon wafers. Its main function is to put polysilicon blocks into a quartz crucible for melting and growth, and finally make silicon wafers, which is the primary link in the entire wafer processing process.

[0003] During the manufacturing process of the flower basket, generally, two connecting plates and two mounting support plates are fixed by fixing bolts to form a loading basket, and the wafers are placed and fixed through the positioning grooves and positioning plates on the mounting support plates. However, during actual production, due to the different sizes of the wafers, after the mounting support plates are fixed by the connecting plates, the size cannot be adjusted, reducing the applicable range of the flower basket. Content of the Utility Model

[0004] The purpose of the utility model is to provide a flower basket for wafer processing with a placement structure to solve the problems raised in the above background technique.

[0005] To achieve the above purpose, the utility model provides the following technical solution: A flower basket for wafer processing with a placement structure, including mounting support plates. The number of the mounting support plates is set to two. One side of the two mounting support plates close to each other is fixedly connected with a first positioning plate. A first positioning groove is opened in the middle of the first positioning plate. One side of the mounting support plate close to the first positioning plate is fixedly connected with a second positioning plate. A second positioning groove is opened in the middle of the second positioning plate. A first threaded hole is opened on the back of the mounting support plate, and an adjusting component is fixedly installed on the back of the first threaded hole.

[0006] As a further preference of this technical solution, the number of the first positioning plates is set to be multiple. The first positioning groove is located between two adjacent first positioning plates. The number of the second positioning plates corresponds to that of the first positioning plates. The number of the first threaded holes is set to four.

[0007] As a further preference of the present technical solution, the adjusting assembly includes a first fixing bolt, a first adjusting plate is threadedly installed on the surface of the first fixing bolt, an adjusting groove is formed in the middle of the first adjusting plate, a first adjusting bolt is threadedly connected to the middle of the adjusting groove, a first fixing plate is threadedly connected to the surface of the first adjusting bolt, and a second adjusting plate is fixedly connected to the front surface of the first fixing plate.

[0008] As a further preference of the present technical solution, the first fixing bolt is located inside the first threaded hole, the second adjusting plate and the first adjusting plate are slidably connected, a limiting groove is formed in the middle of the second adjusting plate, and the limiting groove is located on the back surface of the first fixing plate.

[0009] As a further preference of the present technical solution, a second threaded hole is formed in the front surface of the mounting support plate, a second fixing bolt is threadedly connected to the middle of the second threaded hole, a first connecting plate is threadedly installed on the surface of the second fixing bolt, a first sliding groove is formed in the middle of the first connecting plate, and a second adjusting bolt is threadedly connected to the middle of the first sliding groove.

[0010] As a further preference of the present technical solution, a second connecting plate is fixedly installed on the front surface of the mounting support plate, a second fixing plate is fixedly connected to the back surface of the second connecting plate, and a second sliding groove is formed in the middle of the second connecting plate.

[0011] As a further preference of the present technical solution, the second connecting plate and the first connecting plate are slidably connected, the second connecting plate is installed on the mounting support plate through the second fixing bolt, and the shapes and sizes of the second sliding groove and the first sliding groove correspond to each other.

[0012] The utility model provides a wafer processing basket with a placement structure, which has the following beneficial effects:

[0013] (1) By adding an adjusting groove on the first adjusting plate, after installing the first adjusting plate and the second adjusting plate on the mounting support plate through the first fixing bolt, align the adjusting grooves on the first adjusting plate and the second adjusting plate. After moving the two mounting support plates to an appropriate distance, install the first adjusting bolt in the adjusting groove and screw it into the first fixing plate, so as to fix the two mounting support plates. When the size needs to be adjusted, use a tool to screw out the first fixing bolt from the adjusting groove and the first fixing plate, and make the first adjusting plate and the second adjusting plate slide relatively, then the size of the basket can be adjusted.

[0014] (2) When the first adjusting plate and the second adjusting plate slide relative to each other, the second adjusting bolt is taken out from the first sliding groove and the second sliding groove. Along with the sliding of the first adjusting plate and the second adjusting plate, the first connecting plate and the second connecting plate also move relatively. After the size adjustment is completed, the second adjusting bolt is screwed into the first sliding groove and the second sliding groove again, so as to ensure the stability of the flower basket during use, and prevent the wafer from contacting the first adjusting bolt and the second adjusting bolt through the second fixing plate and the first fixing plate, causing damage. Description of the Drawings

[0015] Figure 1 is a schematic structural diagram of the present utility model;

[0016] Figure 2 is a schematic structural diagram of the back of the present utility model;

[0017] Figure 3 is a schematic top view structural diagram of the present utility model;

[0018] Figure 4 is a schematic structural diagram of the first threaded hole of the present utility model;

[0019] Figure 5 is a schematic structural diagram of the second threaded hole of the present utility model.

[0020] In the figure: 1, mounting support plate; 2, first positioning plate; 3, first positioning groove; 4, second positioning plate; 5, second positioning groove; 6, first threaded hole; 7, adjusting assembly; 701, first fixing bolt; 702, first adjusting plate; 703, adjusting groove; 704, first adjusting bolt; 705, first fixing plate; 706, second adjusting plate; 8, second threaded hole; 9, second fixing bolt; 10, first connecting plate; 11, first sliding groove; 12, second adjusting bolt; 13, second connecting plate; 14, second fixing plate; 15, second sliding groove. Detailed Embodiment

[0021] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the drawings in the embodiments of the present utility model.

[0022] The present utility model provides a technical solution: As Figure 1 and Figure 5As shown in the figure, in this embodiment, a wafer processing basket with a placement structure includes two mounting support plates 1. On one side of the two mounting support plates 1 close to each other, a first positioning plate 2 is fixedly connected. A first positioning groove 3 is provided in the middle of the first positioning plate 2. On one side of the mounting support plate 1 close to the first positioning plate 2, a second positioning plate 4 is fixedly connected. A second positioning groove 5 is provided in the middle of the second positioning plate 4. A first threaded hole 6 is provided on the back of the mounting support plate 1, and an adjusting assembly 7 is fixedly installed on the back of the first threaded hole 6.

[0023] There are multiple first positioning plates 2. The first positioning groove 3 is located between two adjacent first positioning plates 2. The number of the second positioning plates 4 corresponds to that of the first positioning plates 2. There are four first threaded holes 6.

[0024] The adjusting assembly 7 includes a first fixing bolt 701. A first adjusting plate 702 is threadedly installed on the surface of the first fixing bolt 701. An adjusting groove 703 is provided in the middle of the first adjusting plate 702. A first adjusting bolt 704 is threadedly connected to the middle of the adjusting groove 703. A first fixing plate 705 is threadedly connected to the surface of the first adjusting bolt 704. A second adjusting plate 706 is fixedly connected to the front of the first fixing plate 705.

[0025] The first fixing bolt 701 is located inside the first threaded hole 6. The second adjusting plate 706 and the first adjusting plate 702 are slidably connected. A limiting groove is provided in the middle of the second adjusting plate 706, and the limiting groove is located on the back of the first fixing plate 705.

[0026] A second threaded hole 8 is provided on the front of the mounting support plate 1. A second fixing bolt 9 is threadedly connected to the middle of the second threaded hole 8. A first connecting plate 10 is threadedly installed on the surface of the second fixing bolt 9. A first sliding groove 11 is provided in the middle of the first connecting plate 10. A second adjusting bolt 12 is threadedly connected to the middle of the first sliding groove 11.

[0027] A second connecting plate 13 is fixedly installed on the front of the mounting support plate 1. A second fixing plate 14 is fixedly connected to the back of the second connecting plate 13. A second sliding groove 15 is provided in the middle of the second connecting plate 13.

[0028] The second connecting plate 13 and the first connecting plate 10 are slidably connected. The second connecting plate 13 is installed on the mounting support plate 1 through the second fixing bolt 9. The shapes and sizes of the second sliding groove 15 and the first sliding groove 11 correspond to each other.

[0029] The present utility model provides a wafer processing basket with a placement structure, and the specific working principle is as follows:

[0030] In use, the first adjusting plate 702 and the second adjusting plate 706 are installed on the back of the mounting support plate 1 through the first fixing bolt 701, and the first connecting plate 10 and the second connecting plate 13 are installed on the front of the mounting support plate 1 through the second fixing bolt 9, so that the adjusting slots 703 on the first adjusting plate 702 and the second adjusting plate 706 are aligned, and the two mounting support plates 1 are dragged to cause relative sliding between the first adjusting plate 702 and the second adjusting plate 706. At the same time, the first connecting plate 10 and the second connecting plate 13 also generate relative displacement. After the size is adjusted appropriately, the first adjusting bolt 704 is screwed into the adjusting slot 703 and the first fixing plate 705, and the second adjusting bolt 12 is screwed into the first sliding slot 11 and the second sliding slot 15, then the assembly of the flower basket can be completed. The wafer can be placed and fixed through the first positioning slot 3 and the second positioning slot 5. When it is necessary to adjust the size of the flower basket, the first adjusting bolt 704 and the second adjusting bolt 12 are removed, and the two mounting support plates 1 are pulled to adjust the size of the flower basket.

[0031] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A flower basket for wafer processing with a placement structure, comprising a mounting support plate (1), characterized in that: The number of the mounting support plates (1) is two, and a first positioning plate (2) is fixedly connected to one side of the two mounting support plates (1) close to each other, a first positioning groove (3) is provided in the middle of the first positioning plate (2), a second positioning plate (4) is fixedly connected to one side of the mounting support plate (1) close to the first positioning plate (2), a second positioning groove (5) is provided in the middle of the second positioning plate (4), a first threaded hole (6) is provided on the back side of the mounting support plate (1), and an adjustment component (7) is fixedly installed on the back side of the first threaded hole (6).

2. The wafer processing flower basket with a placement structure according to claim 1, characterized in that: The number of the first positioning plates (2) is multiple, the first positioning groove (3) is located between two adjacent first positioning plates (2), the number of the second positioning plates (4) corresponds to the number of the first positioning plates (2), and the number of the first threaded holes (6) is four.

3. The wafer processing flower basket with a placement structure according to claim 1, characterized in that: The adjustment assembly (7) comprises a first fixing bolt (701), a first adjustment plate (702) being threadedly mounted on the surface of the first fixing bolt (701), an adjustment groove (703) being provided in the middle of the first adjustment plate (702), a first adjustment bolt (704) being threadedly connected in the middle of the adjustment groove (703), a first fixing plate (705) being threadedly connected on the surface of the first adjusting bolt (704), and a second adjustment plate (706) being fixedly connected to the front side of the first fixing plate (705).

4. The wafer processing flower basket with a placement structure according to claim 3, characterized in that: The first fixing bolt (701) is located inside the first threaded hole (6), the second adjustment plate (706) is slidably connected to the first adjustment plate (702), a limiting groove is provided in the middle of the second adjustment plate (706), and the limiting groove is located on the back side of the first fixing plate (705).

5. The wafer processing flower basket with a placement structure according to claim 1, characterized in that: A second threaded hole (8) is provided on the front side of the mounting support plate (1), a second fixing bolt (9) is threadedly connected to the middle of the second threaded hole (8), a first connecting plate (10) is threadedly installed on the surface of the second fixing bolt (9), a first sliding groove (11) is provided in the middle of the first connecting plate (10), and a second adjusting bolt (12) is threadedly connected to the middle of the first sliding groove (11).

6. The wafer processing flower basket with a placement structure according to claim 1, characterized in that: A second connecting plate (13) is fixedly mounted on the front side of the mounting support plate (1), a second fixing plate (14) is fixedly connected to the back side of the second connecting plate (13), and a second sliding groove (15) is provided in the middle of the second connecting plate (13).

7. The wafer processing flower basket with a placement structure according to claim 6, characterized in that: The second connecting plate (13) is slidably connected to the first connecting plate (10); the second connecting plate (13) is mounted on the mounting support plate (1) via a second fixing bolt (9); and the second sliding groove (15) corresponds to the first sliding groove (11) in shape and size.

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