Conveying device
By introducing a vacuum conveying mechanism and a fast conveying mechanism into the silicon wafer transmission equipment, the slippage and edge fragmentation problems caused by insufficient friction between the silicon wafer and the runway are solved, and the high-speed and high-precision transmission of the silicon wafer is achieved, and the production efficiency is improved.
Patent Information
- Application Number
- CN202421804419.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-29
- Publication Date
- 2025-05-27
- Estimated Expiration
- 2034-07-29
AI Technical Summary
In the prior art, insufficient friction between the silicon wafer and the runway leads to slipping of the silicon wafer, causing problems of rhythm bottlenecks and edge fragments.
The vacuum conveying mechanism is adopted to absorb the silicon wafer through the vacuum assembly and contact the conveying belt assembly, increasing friction, and combining with the fast conveying mechanism to achieve high-speed and high-precision transmission of the silicon wafer.
It effectively avoids slippage between silicon wafers and belts, improves the transmission accuracy and speed of silicon wafers, and significantly improves production efficiency.
Smart Images

Figure CN222914757U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of solar cell preparation equipment, in particular to a conveying device. Background Art
[0002] With the development of the photovoltaic industry, people's requirements for the production capacity of battery wafers are also getting higher and higher. In current production activities, it is necessary to take out the battery wafers from the flower basket (wafer carrier) one by one and put them into the graphite carrier plate (wafer carrier). The existing technology is that after the flower basket elevator is in place, a telescopic runway is used. The telescopic plate extends, the flower basket elevator descends, and the wafers flow out one by one through the belt. Since the telescopic runway only uses the friction force generated by the contact between the belt and the wafer as the driving force, when the equipment speeds up, there will be a slipping phenomenon between the wafer and the belt, resulting in a beat bottleneck and inaccurate wafer pitch, and it cannot be docked with the subsequent mechanism, causing edge fragments. Summary of the Utility Model
[0003] An object of a first aspect of the utility model is to provide a conveying device to solve the problem of wafer fragmentation caused by slipping between the wafer and the runway in the prior art.
[0004] In particular, the utility model provides a conveying device, comprising:
[0005] A vacuum conveying mechanism, which comprises at least one set of conveying belt assemblies and at least one set of vacuum assemblies, adsorbs the target object at the corresponding conveying belt assembly through the vacuum assembly, and conveys the target object along a preset direction by using the conveying belt assembly; and
[0006] A fast conveying mechanism, located on one side of the vacuum conveying mechanism, to convey the target object transported from the vacuum conveying mechanism to the next process.
[0007] Optionally, each of the conveying belt assemblies comprises:
[0008] A first driving mechanism;
[0009] At least one set of first synchronous wheels, each of the first synchronous wheels is connected to the first driving mechanism to rotate under the drive of the first driving mechanism;
[0010] At least one first belt, each of the first belts is sleeved on a corresponding set of the first synchronous wheels to move when the first synchronous wheels rotate, thereby driving the target object placed above the first belt to move, wherein the extending direction of the first belt is parallel to the preset direction.
[0011] Optionally, each of the vacuum assemblies comprises a vacuum chamber, the vacuum chamber comprises at least one vacuum hole, and the vacuum hole is located at one side of at least one of the first belts.
[0012] Optionally, the vacuum holes are arranged side by side along the preset direction.
[0013] Optionally, the vacuum chamber further includes a plurality of first air outlet holes;
[0014] Each of the vacuum assemblies further includes:
[0015] A vacuum generator; and
[0016] An air distribution block, each air distribution block includes a plurality of air inlet holes connected to the first air outlet holes one by one and a second air outlet hole connected to the vacuum generator, so as to evacuate the vacuum chamber through the air distribution block.
[0017] Optionally, each of the conveyor belt assemblies further includes:
[0018] A second driving mechanism; and
[0019] A support member for supporting the first synchronous pulley and the vacuum chamber, and driving the first synchronous pulley and the vacuum chamber to move together along the preset direction under the drive of the second driving mechanism.
[0020] Optionally, the fast conveying mechanism includes:
[0021] A third driving mechanism;
[0022] A second synchronous pulley that rotates under the drive of the third driving mechanism; and
[0023] A second belt that is sleeved on the second synchronous pulley and moves when the second synchronous pulley rotates.
[0024] Optionally, a plurality of placement units for placing the target objects are provided on the second belt, and each placement unit includes a positioning member to position each target object conveyed to the placement unit.
[0025] Optionally, the positioning member includes a first stop block and a second stop block arranged along the moving direction of the belt, and a third stop block and a fourth stop block arranged along the direction perpendicular to the moving direction of the belt, so as to position the target object by the first stop block, the second stop block, the third stop block and the fourth stop block.
[0026] Optionally, it further includes:
[0027] A flower basket assembly for carrying at least one of the target objects and arranging the target objects in sequence;
[0028] The flower basket conveying assembly, which is connected to the flower basket assembly and is used to convey the flower basket assembly from the previous station to the lifting assembly; and
[0029] The lifting assembly is used to drive the flower basket conveying assembly and the flower basket assembly to lift and lower to adapt to the height of the vacuum conveying mechanism, and then the target object is sequentially output through the vacuum conveying mechanism.
[0030] The conveying device of this solution includes a vacuum conveying mechanism and a fast conveying mechanism. The target object can be adsorbed at the conveying belt assembly through the vacuum component and then conveyed to the fast conveying mechanism. Therefore, while quickly conveying the target object, it can avoid the target object from slipping on the belt, and can achieve high-speed and high-precision transmission of silicon wafers, greatly improving the conveying rhythm of the battery wafers and significantly enhancing the production efficiency.
[0031] In this solution, the target object is removed from the flower basket assembly through the first synchronous pulley and the first belt in combination with the vacuum chamber. The vacuum chamber can give a certain suction force to the target object. On the one hand, it is convenient to remove the target object, and on the other hand, it also increases the friction between the target object and the first belt, avoiding the subsequent mechanism from being unable to dock due to the target object sliding on the first belt and causing edge fragments.
[0032] This solution combines the vacuum conveying mechanism and the fast conveying mechanism, which can achieve high-speed and high-precision transmission of the target object, greatly improving the conveying rhythm of the target object and significantly enhancing the production efficiency.
[0033] According to the following detailed description of the specific embodiments of the present invention in conjunction with the drawings, those skilled in the art will more clearly understand the above and other purposes, advantages and features of the present invention. Description of the Drawings
[0034] Some specific embodiments of the present invention will be described in detail hereinafter with reference to the drawings in an exemplary but not restrictive manner. The same reference numerals in the drawings denote the same or similar components or parts. Those skilled in the art should understand that these drawings are not necessarily drawn to scale. In the drawings:
[0035] Figure 1 is a schematic structural diagram of a conveying device according to a specific embodiment of the present invention;
[0036] Figure 2 is a schematic structural diagram of a flower basket assembly, a flower basket conveying assembly and a lifting assembly according to a specific embodiment of the present invention;
[0037] Figure 3 is a schematic structural diagram of a vacuum conveying mechanism according to a specific embodiment of the present invention;
[0038] Figure 4It is a schematic structural diagram of a rapid conveying mechanism according to a specific embodiment of the present utility model;
[0039] Figure 5 It is a partially enlarged schematic view of the rapid conveying mechanism according to a specific embodiment of the present utility model.
[0040] Explanation of reference numerals:
[0041] Conveying device 100;
[0042] Vacuum conveying mechanism 200; conveying belt assembly 210; first driving mechanism 211; first synchronous pulley 212; first belt 213; second driving mechanism 214; support member 215; vacuum assembly 220; vacuum chamber 221; vacuum holes 222; first air outlet hole 223; air distribution block 224; air inlet hole 225; second air outlet hole 226;
[0043] Rapid conveying mechanism 300; third driving mechanism 310; second synchronous pulley 320; second belt 330; placement unit 340; positioning member 350; first stop block 351; second stop block 352; third stop block 353; fourth stop block 354;
[0044] Basket assembly 410; support unit 411; basket conveying assembly 420; motor 421; synchronous pulley 422; synchronous belt 423; lifting assembly 430. Detailed implementation manners
[0045] In the description of this embodiment, it should be understood that the orientation or positional relationship indicated by the terms "length", "width", "height", "upper", "lower", "left", "right", "vertical", "horizontal", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present utility model.
[0046] As a conveying device 100 according to a specific embodiment of the present utility model, the conveying device 100 is mainly used to convey the target object of the previous process to the next process. Specifically, the target object in this embodiment may be a silicon wafer. Specifically, the conveying device 100 in this embodiment may include a vacuum conveying mechanism 200 and a rapid conveying mechanism 300. Among them, the vacuum conveying mechanism 200 may include at least one set of conveying belt assemblies 210 and at least one set of vacuum assemblies 220. The target object is adsorbed at the corresponding conveying belt assembly 210 by the vacuum assembly 220, and the conveying belt assembly 210 is used to convey the target object along a preset direction. The rapid conveying mechanism 300 is located on one side of the vacuum conveying mechanism 200 to convey the target object transported from the vacuum conveying mechanism 200 to the next process.
[0047] Specifically, the conveying device 100 in this embodiment includes a vacuum conveying mechanism 200 and a rapid conveying mechanism 300. The target object can be adsorbed at the conveying belt assembly 210 by the vacuum assembly 220 and then conveyed to the rapid conveying mechanism 300. Furthermore, while rapidly conveying the target object, it is possible to avoid the target object slipping on the belt, achieve high-speed and high-precision transmission of the silicon wafer, greatly improve the conveying beat of the battery wafers, and significantly improve the production efficiency.
[0048] Specifically, the conveying device 100 in this embodiment may include a carrier basket assembly 410, a carrier basket conveying assembly 420, and a lifting assembly 430. Among them, the carrier basket assembly 410 is used to carry at least one target object and arrange the target objects in sequence. The carrier basket conveying assembly 420 is connected to the carrier basket assembly 410 and is used to convey the carrier basket assembly 410 from the previous station to the lifting assembly 430. The lifting assembly 430 is used to drive the carrier basket conveying assembly 420 and the carrier basket assembly 410 to lift and lower to adapt to the height of the vacuum conveying mechanism 200, and then the target objects are sequentially output through the vacuum conveying mechanism 200.
[0049] Specifically, the carrier basket assembly 410 may include a plurality of support units 411 for placing the target objects, and each support unit 411 can support one target object. The plurality of support units 411 can be arranged side by side vertically, so that the target objects can be arranged one above the other in sequence. Of course, the support units 411 can be arranged horizontally side by side so that the target objects are arranged side by side in the horizontal direction. And each support unit 411 may include four support pieces, and the upper surfaces of the four support pieces of each support unit 411 are on the same horizontal plane.
[0050] After the flower basket assembly 410 in the previous process, the mechanism of the previous process sequentially sets the silicon wafers at the flower basket assembly 410, and transports the flower basket to the lifting assembly 430 through the flower basket conveying assembly 420. Specifically, the flower basket conveying assembly 420 can be composed of a motor 421, a synchronous pulley 422, and a synchronous belt 423. The motor 421 drives the synchronous pulley 422 to rotate, thereby driving the synchronous belt 423 to move, and then transporting the flower basket assembly 410 placed on the synchronous belt 423 to the lifting assembly 430.
[0051] After the flower basket reaches the lifting assembly 430, the lifting assembly 430 drives the flower basket conveying assembly 420 to move up and down, so as to match the height of the target object with the vacuum conveying mechanism 200, and the target object is output through the vacuum conveying mechanism 200.
[0052] As a specific embodiment of the present utility model, each conveying belt assembly 210 of this embodiment may include at least one first driving mechanism 211, at least one group of first synchronous pulleys 212, and at least one first belt 213. Among them, each first synchronous pulley 212 is connected to the first driving mechanism 211 to rotate under the drive of the first driving mechanism 211. Each first belt 213 is sleeved on a corresponding group of first synchronous pulleys 212 to move when the first synchronous pulleys 212 rotate, thereby driving the target object placed above the first belt 213 to move, wherein the extending direction of the first belt 213 is parallel to the preset direction.
[0053] Specifically, the number of the first driving mechanisms 211 and the first synchronous pulleys 212 of each conveying belt assembly 210 corresponds, and the specific number can be designed according to the situation. The number of the first belts 213 can be designed according to the situation. For example, in this embodiment, the conveying belt assembly 210 may include two groups. Each conveying belt assembly 210 includes two first driving mechanisms 211 and two groups of first synchronous pulleys 212, and each first driving mechanism 211 drives one group of first synchronous pulleys 212 to rotate. One, two or more first belts 213 can be designed at each first synchronous pulley 212. There is a gap between two adjacent first belts 213.
[0054] As a specific embodiment of the present utility model, each vacuum assembly 220 of this embodiment may include a vacuum chamber 221, and the vacuum chamber 221 may include at least one vacuum hole 222, and the vacuum hole 222 is located at the side of at least one first belt 213.
[0055] Specifically, if one first belt 213 is designed at each first synchronous pulley 212, the vacuum hole 222 can be designed on one side or both sides of the first belt 213. If multiple first belts 213 are designed at each first synchronous pulley 212, the vacuum hole 222 can be designed at the gap between two adjacent belts.
[0056] Specifically, the vacuum holes 222 of this embodiment are arranged side by side along a preset direction. And the vacuum holes 222 can be formed in a row shape or arranged in an array.
[0057] As a specific embodiment of the present utility model, the vacuum chamber 221 of this embodiment may include a plurality of first air outlet holes 223. Each vacuum assembly 220 may further include a vacuum generator (not shown in the figure) and an air distribution block 224. Wherein, each air distribution block 224 may include a plurality of air inlet holes 225 connected to the first air outlet holes 223 in one-to-one correspondence and a second air outlet hole 226 connected to the vacuum generator, so as to evacuate the vacuum chamber 221 through the air distribution block 224.
[0058] Specifically, a plurality of first air outlet holes 223 are provided at the vacuum chamber 221 of this embodiment, and an air distribution block 224 is provided between the vacuum generator and the vacuum chamber 221. The air inlet holes 225 are provided on the air distribution block 224, and the air inlet holes 225 and the first air outlet holes 223 are in one-to-one correspondence, so that the vacuum degree at different positions of the vacuum chamber 221 is more uniform when evacuating.
[0059] As a specific embodiment of the present utility model, each conveying belt assembly 210 of this embodiment may further include a second driving mechanism 214 and a support member 215. Wherein, the support member 215 is used to support the first synchronous pulley 212 and the vacuum chamber 221, and drive the first synchronous pulley 212 and the vacuum chamber 221 to move together along a preset direction when moving under the drive of the second driving mechanism 214.
[0060] Specifically, the second driving mechanism 214 and the support member 215 of this embodiment mainly drive the first synchronous pulley 212 and the vacuum chamber 221 to move along a preset direction, and then lift the first synchronous pulley 212 and the vacuum chamber 221 to the flower basket assembly 410 through the second driving mechanism 214. After taking down the target object at the flower basket assembly 410, the target object is then transported away from the flower basket assembly 410 by using the first synchronous belt.
[0061] Specifically, in this embodiment, the target object is taken down from the flower basket assembly 410 through the first synchronous pulley 212, the first belt 213 and the vacuum chamber 221. The vacuum chamber 221 can give a certain suction force to the target object. On the one hand, it is convenient to take down the target object, and on the other hand, it also increases the friction between the target object and the first belt 213, avoiding the target object from sliding at the first belt 213 and causing the subsequent mechanism to be unable to dock, resulting in edge fragments.
[0062] More specifically, since the objects at the flower basket are stacked, the first synchronous pulley 212 and the first belt 213 extract from the object at the bottom of the flower basket assembly 410. After each extraction, the lifting assembly 430 of the flower basket assembly 410 drives the flower basket assembly 410 to move downward to match the height of the first belt 213. Then, the first belt 213 is extended under the object by the second driving mechanism 214, and the object is sucked and output. Repeat this step until all the objects in the flower basket assembly 410 are transported out. Then, the flower basket assembly 410 reaches the previous process under the drive of the flower basket conveying assembly 420, and then objects are placed into the flower basket assembly 410.
[0063] As a specific embodiment of the present utility model, the fast conveying mechanism 300 of this embodiment may include a third driving mechanism 310, a second synchronous pulley 320, and a second belt 330. The second synchronous pulley 320 rotates under the drive of the third driving mechanism 310. The second belt 330 is sleeved at the second synchronous pulley 320 and moves when the second synchronous pulley 320 rotates.
[0064] Specifically, after the object of this embodiment is removed from the flower basket assembly 410 by the conveying belt assembly 210 of the object, it will be transported to the fast conveying mechanism 300, and then the fast conveying mechanism 300 transports the object to the next process.
[0065] Specifically, a plurality of placing units 340 for placing objects are provided at the second belt 330 of this embodiment, and each placing unit 340 may include a positioning member 350 to position each object transported to the placing unit 340.
[0066] Specifically, the object placed at the fast conveying mechanism 300 can be positioned through positioning in this embodiment, so as to realize the high-speed and high-precision transmission of the object.
[0067] As a specific embodiment of the present utility model, the positioning member 350 of this embodiment may include a first stop block 351 and a second stop block 352 arranged along the moving direction of the second belt 330, and a third stop block 353 and a fourth stop block 354 arranged along the direction perpendicular to the belt movement, so as to position the object through the first stop block 351, the second stop block 352, the third stop block 353, and the fourth stop block 354. Specifically, one or more stop blocks are provided at one side of each object, so each positioning member 350 includes at least four stop blocks. Of course, the stop blocks of different positioning members 350 can overlap. For example, the stop block behind the previous object can be the stop block in front of the next object. The object can be positioned at a certain position through the stop blocks, and the sliding of the object during movement can also be avoided.
[0068] Specifically, in this embodiment, the vacuum conveying mechanism 200 and the rapid conveying mechanism 300 are combined and used together, which can achieve the high-speed and high-precision transmission of the target object, greatly improve the conveying beat of the target object, and significantly improve the production efficiency. Through tests, the combined use of the vacuum conveying mechanism 200 and the rapid conveying mechanism 300 in this embodiment has increased the transmission beat from 1 s to 0.6 s.
[0069] At this point, those skilled in the art should recognize that although multiple exemplary embodiments of the present invention have been shown and described in detail herein, many other variations or modifications that conform to the principles of the present invention can still be directly determined or derived based on the content disclosed in the present invention without departing from the spirit and scope of the present invention. Therefore, the scope of the present invention should be understood and determined to cover all these other variations or modifications.
Claims
1. A conveying device, characterized in that: include: A vacuum conveying mechanism, comprising at least one conveying belt assembly and at least one vacuum assembly, wherein the vacuum assembly adsorbs the target object onto the corresponding conveying belt assembly, and the conveying belt assembly is used to convey the target object along a preset direction; and The fast conveying mechanism is located at one side of the vacuum conveying mechanism to convey the target object transported from the vacuum conveying mechanism to the next process.
2. The conveying device according to claim 1, characterized in that Each of the conveyor belt assemblies comprises: a first driving mechanism; at least one set of first synchronous wheels, each of which is connected to the first driving mechanism to rotate under the drive of the first driving mechanism; At least one first belt, each of the first belts is mounted on a corresponding set of the first synchronous wheels, so as to move when the first synchronous wheels rotate, thereby driving the target object placed above the first belt to move, wherein the extending direction of the first belt is parallel to the preset direction.
3. The conveying device according to claim 2, characterized in that: Each of the vacuum assemblies includes a vacuum chamber including at least one vacuum hole located at one side of at least one of the first belts.
4. The conveying device according to claim 3, characterized in that: The vacuum holes are arranged side by side along the preset direction.
5. The conveying device according to claim 3, characterized in that: The vacuum chamber further comprises a plurality of first air outlet holes; Each of the vacuum assemblies further comprises: Vacuum generator; and Gas separation blocks, each of which includes a plurality of air inlet holes connected to the first air outlet holes in a one-to-one correspondence and a second air outlet hole connected to the vacuum generator, so as to evacuate the vacuum chamber through the gas separation block.
6. The conveying device according to claim 3, characterized in that: Each of the conveyor belt assemblies further comprises: a second drive mechanism; and The support member is used to support the first synchronous wheel and the vacuum chamber, and drive the first synchronous wheel and the vacuum chamber to move together along the preset direction under the drive of the second driving mechanism.
7. The conveying device according to claim 1, characterized in that The rapid conveying mechanism comprises: A third driving mechanism; a second synchronous wheel, which is driven to rotate by the third driving mechanism; and The second belt is mounted on the second synchronous wheel and moves when the second synchronous wheel rotates.
8. The conveying device according to claim 7, characterized in that The second belt is provided with a plurality of placement units for placing the target objects, and each of the placement units includes a positioning member to position each of the target objects transported to the placement unit.
9. The conveying device according to claim 8, characterized in that The positioning member includes a first stopper and a second stopper arranged along the direction of movement of the second belt, and a third stopper and a fourth stopper arranged along a direction perpendicular to the direction of movement of the second belt, so as to position the target object through the first stopper, the second stopper, the third stopper and the fourth stopper.
10. The conveying device according to claim 1, characterized in that Also includes: A basket assembly, which is used to carry at least one of the targets and arrange the targets in sequence; A flower basket conveying assembly connected to the flower basket assembly and used to convey the flower basket assembly from the previous station to the lifting assembly; and The lifting assembly is used to drive the flower basket conveying assembly and the flower basket assembly to rise and fall to adapt to the height of the vacuum conveying mechanism, and then the target objects are output in sequence through the vacuum conveying mechanism.