Angle adjusting device and wafer detection system

Abstract

The utility model relates to an angle adjusting device and a wafer detection system. The angle adjusting device comprises a rotating shaft, a bearing piece, a connecting piece, a transmission rod, a transmission mechanism and a mounting base, and the bearing piece is rotationally connected with the rotating shaft and used for bearing a target object; the connecting piece is fixedly connected with the bearing piece and drives the bearing piece to rotate around the rotating shaft; the transmission rod is arranged on the connecting piece and protrudes out of one side of the connecting piece; the transmission mechanism is arranged on the side, provided with the transmission rod, of the connecting piece and comprises a transmission base and a plurality of rotating wheels, and the rotating wheels are arranged on the transmission base at intervals and rotatably connected with the transmission base, surround the periphery of the transmission rod and abut against the transmission rod. The mounting base is used for mounting the transmission mechanism, the transmission base can be connected with the mounting base in a sliding mode in the first direction and the second direction respectively, the first direction intersects with the second direction, and the first direction is the arrangement direction of the bearing piece, the connecting piece and the transmission rod. The angle adjusting device has high precision on angle adjustment of the target object.

Description

Technical Field

[0001] The present application relates to the field of wafer detection technology, and in particular to an angle adjustment device and a wafer detection system. Background Art

[0002] In a wafer inspection system, a wafer is usually placed on a sample stage and the angle of the sample stage is adjusted by an angle adjustment device to adjust the wafer to a test position corresponding to the tip of the probe, so that the probe can inspect the wafer. However, the accuracy of adjusting the angle of the sample stage in the existing angle adjustment device is low. Utility Model Content

[0003] In view of this, the present application provides an angle adjustment device and a wafer detection system, wherein the angle adjustment device has high accuracy in adjusting the angle of the target object.

[0004] The present application provides an angle adjustment device, which includes: a rotating shaft, a bearing member, a connecting member, a transmission rod, a transmission mechanism and a mounting seat, wherein the bearing member is rotatably connected to the rotating shaft for carrying a target object; one end of the connecting member is fixedly connected to the bearing member for driving the bearing member to rotate around the rotating shaft; the transmission rod is fixedly arranged on the connecting member and partially protrudes from one side of the connecting member; the transmission mechanism is arranged on a side of the connecting member where the transmission rod is arranged, the transmission mechanism includes a transmission base and a plurality of rotating wheels, a plurality of rotating wheels are arranged at intervals on a side of the transmission base facing the connecting member and the rotating wheels can be rotatably connected to the transmission base, a plurality of rotating wheels are arranged around the outer periphery of the transmission rod and respectively abut against the peripheral side walls of the transmission rod; the mounting seat is used to install the transmission mechanism, the transmission base can be slidably connected to the mounting seat along a first direction, and can be slidably connected to the mounting seat along a second direction, wherein the first direction and the second direction intersect, and the first direction is the arrangement direction of the bearing member, the connecting member and the transmission rod.

[0005] Furthermore, the transmission base has a mounting groove, the multiple rotating wheels are arranged at intervals in the mounting groove and respectively abut against the side walls of the mounting groove, the multiple rotating wheels enclose a setting space, and the end of the transmission rod facing away from the connecting piece is passed through the setting space.

[0006] Further, the transmission mechanism further includes a plurality of mounting components, each of the mounting components being configured to rotatably mount one of the rotating wheels to the transmission base. The mounting component includes a first mounting member and a second mounting member. The first mounting member is located within the mounting groove, and the rotating wheel is sleeved on the outer periphery of the first mounting member. The second mounting member is disposed on a side of the transmission base away from the mounting seat and is respectively connected to the transmission base and one end of the first mounting member away from the bottom wall of the mounting groove.

[0007] Further, the transmission base includes a first base, a second base, a first locking member, and a second locking member. The first base and the second base enclose the mounting groove; the first locking member respectively passes through the first base and the second base, the second locking member is disposed at an interval from the first locking member and respectively passes through the first base and the second base. The first locking member and the second locking member cooperate to lock the first base and the second base.

[0008] Further, one end of the connecting member away from the bearing member has a first notch, a through hole, and a second notch that communicate with each other. The through hole penetrates the connecting member in a third direction. The first notch is located on a side of the through hole close to the bearing member, and the second notch is located on a side of the through hole away from the bearing member; the transmission rod includes a connected connecting portion and a transmission portion. The connecting portion passes through the through hole, and the transmission portion passes through the setting space. Wherein, the third direction is the arrangement direction of the connecting member and the transmission mechanism, and the third direction intersects with the first direction and the second direction respectively; the angle adjusting device further includes a third locking member. The third locking member passes through one end of the connecting member away from the bearing member and is located on a side of the through hole away from the bearing member for adjusting the size of the second notch.

[0009] Further, the angle adjusting device further includes a driving mechanism. The driving mechanism is disposed on the mounting seat. The driving mechanism includes a driving member, a guiding member, and a sliding member. The driving member is fixedly disposed on the mounting seat and the power output shaft of the driving member is connected to the guiding member. The guiding member extends in the second direction. The sliding member is sleeved on the outer periphery of the guiding member and is threadedly connected to the guiding member. The transmission mechanism is disposed on the sliding member and can slide relative to the sliding member in the first direction. The driving member drives the guiding member to rotate, thereby driving the sliding member together with the transmission mechanism to slide in the first direction.

[0010] Further, the angle adjustment mechanism further includes a guide rail assembly located between the drive base and the slider. The guide rail assembly includes a first guide rail member and a second guide rail member extending in a first direction. The first guide rail member is disposed on the drive base, and the second guide rail member is disposed on the slider. The first guide rail member and the second guide rail member are slidably connected along the first direction.

[0011] Further, the guide rail assembly further includes rolling elements. The rolling elements include a rolling plate and a plurality of balls. The plurality of balls are rotatably disposed on the rolling plate. The first guide rail member has a first guide rail groove, and the second guide rail member has a second guide rail groove. The rolling plate is clamped between the first guide rail member and the second guide rail member. The plurality of balls are partially disposed in the first guide rail groove and partially disposed in the second guide rail groove, and are rotatably connected to the first guide rail member and the second guide rail member.

[0012] Further, the angle adjustment device further includes a detection assembly. The detection assembly includes a detection element and a detected element. The detection element is disposed on the mounting base, and the detected element is disposed on the slider. The detection element is configured to detect the signal of the detected element to obtain the relative position between the slider and the mounting base in a second direction.

[0013] The present application further provides a wafer detection system, which includes: the angle adjustment device provided by the present application and a probe assembly. The carrier of the angle adjustment device is used to carry a target object; the probe assembly is used to detect the target object.

[0014] In the present application, when the transmission base is slidably connected to the mounting seat in the second direction, it drives the plurality of rotating wheels to slide relative to the mounting seat in the second direction. At the same time, the transmission base is slidably connected to the mounting seat in the first direction, driving the plurality of rotating wheels to slide relative to the mounting seat in the first direction. During this process, the plurality of rotating wheels are arranged around the outer periphery of the transmission rod and respectively abut against the circumferential side wall of the transmission rod. The plurality of rotating wheels will drive the transmission rod to rotate relative to the rotating shaft, thereby driving the carrier to rotate relative to the rotating shaft to adjust the angle of the target object carried on the carrier. At the same time, a sliding friction force is generated between the plurality of rotating wheels and the transmission rod, and the plurality of rotating wheels rotate relative to the transmission rod and the transmission base under the action of the sliding friction force. In the present application, a part of the outer periphery of the rotating wheel directly contacts and abuts against the circumferential side wall of the transmission rod. A sliding friction force is generated between the transmission rod and the rotating wheel during rotation, causing the rotating wheel to rotate relative to the transmission rod. In other words, the sliding friction force generated between the outer periphery of the rotating wheel and the circumferential side wall of the transmission rod directly drives the relative rotation of the rotating wheel and the transmission rod, reducing the consumption during the transmission of the acting force, or reducing the misalignment caused by the gap between the inner ring and the outer ring of the rotating wheel, thereby reducing the accuracy of adjusting the angle of the sample stage. The angle adjustment device provided in the present application has high accuracy in adjusting the angle of the target object. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings in the following description are some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0016] Figure 1 is a schematic structural diagram of an angle adjustment device according to an embodiment of the present application;

[0017] Figure 2 is an exploded structural diagram of an angle adjustment device according to an embodiment of the present application;

[0018] Figure 3 is a top view of an angle adjustment device according to an embodiment of the present application;

[0019] Figure 4 is a top view of an angle adjustment device according to another embodiment of the present application;

[0020] Figure 5 is a partial structural diagram of an angle adjustment device according to an embodiment of the present application;

[0021] Figure 6Partial structural schematic diagram of the angle adjustment device according to another embodiment of the present application;

[0022] Figure 7 Exploded structural schematic diagram of the guide rail assembly according to an embodiment of the present application;

[0023] Figure 8 Exploded structural schematic diagram of the guide rail assembly according to another embodiment of the present application;

[0024] Figure 9 Partial structural schematic diagram of the angle adjustment device according to still another embodiment of the present application;

[0025] Figure 10 Structural schematic diagram of the wafer detection system according to an embodiment of the present application.

[0026] Explanation of reference numerals:

[0027] 100 - Angle adjustment device, 110 - Rotating shaft, 120 - Carrier, 130 - Connecting member, 131 - First notch, 132 - Through hole, 133 - Second notch, 140 - Transmission rod, 141 - Connecting portion, 142 - Transmission portion, 150 - Transmission mechanism, 151 - Transmission base, 1511 - Installation groove, 1512 - Setting space, 1513 - First base, 1514 - Second base, 1515 - First locking member, 1516 - Second locking member, 152 - Rotating wheel, 1521 - Rotating sub - wheel, 160 - Mounting seat, 170 - Mounting assembly, 171 - First mounting member, 172 - Second mounting member, 180 - Third locking member, 190 - Driving mechanism, 191 - Driving member, 192 - Guide member, 193 - Sliding member, 210 - Guide rail assembly, 211 - First guide rail member, 2111 - First guide rail groove, 212 - Second guide rail member, 2121 - Second guide rail groove, 213 - Rolling member, 2131 - Rolling plate, 2132 - Ball, 220 - Detection assembly, 221 - Detection element, 222 - Element to be detected, 300 - Wafer detection system, 310 - Probe assembly. Detailed description of the embodiments

[0028] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

[0029] In the description and claims of this application, and in the above-mentioned drawings, terms such as "first" and "second" are used to distinguish different objects, rather than to describe a specific order. In addition, the terms "comprising" and "having" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or device that includes a series of steps or units is not limited to the listed steps or units, but optionally further includes steps or units not listed, or optionally further includes other steps or units inherent to these processes, methods, products, or devices.

[0030] References to "embodiments" or "implementations" in this document mean that specific features, structures, or characteristics described in connection with the embodiments or implementations can be included in at least one embodiment of this application. The phrase appears in various places in the specification and does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment mutually exclusive with other embodiments. Those skilled in the art will explicitly and implicitly understand that the embodiments described herein can be combined with other embodiments.

[0031] In a wafer inspection system, a wafer is usually placed on a sample stage and the angle of the sample stage is adjusted by an angle adjustment device to align the wafer with the tip of a probe at a test position, facilitating the inspection of the wafer by the probe. However, in existing angle adjustment devices, a bearing assembly is usually used to drive the rotation of the sample stage, and the bearing assembly generally has an inner ring, balls, and an outer ring. The balls are arranged between the inner ring and the outer ring. Due to the gap between the inner and outer rings themselves, a certain degree of misalignment will occur between the inner ring and the outer ring during rotation, thereby reducing the accuracy of the angle adjustment device for adjusting the angle of the sample stage.

[0032] Please refer to Figures 1 to 4, this application provides an angle adjustment device 100, and the angle adjustment device 100 includes: a rotating shaft 110, a carrier 120, a connecting member 130, a transmission rod 140, a transmission mechanism 150 and a mounting base 160. The carrier 120 is rotatably connected to the rotating shaft 110 and is used to carry a target object. One end of the connecting member 130 is fixedly connected to the carrier 120 and is used to drive the carrier 120 to rotate around the rotating shaft 110. The transmission rod 140 is fixedly arranged on the connecting member 130 and partially protrudes from one side of the connecting member 130. The transmission mechanism 150 is arranged on the side of the connecting member 130 where the transmission rod 140 is arranged. The transmission mechanism 150 includes a transmission base 151 and a plurality of rotating wheels 152. The plurality of rotating wheels 152 are arranged at intervals on the side of the transmission base 151 facing the connecting member 130, and the rotating wheels 152 are rotatably connected to the transmission base 151. The plurality of rotating wheels 152 are arranged around the outer circumference of the transmission rod 140 and respectively abut against the circumferential side wall of the transmission rod 140. The mounting base 160 is used to mount the transmission mechanism 150. The transmission base 151 is slidably connected to the mounting base 160 along a first direction (such as Figure 1 shown as the X direction in Figure 1 ), and is also slidably connected to the mounting base 160 along a second direction (such as shown as the Y direction in

[0033] ). Wherein, the first direction and the second direction intersect, and the first direction is the arrangement direction of the carrier 120, the connecting member 130 and the transmission rod 140.

[0034] Optionally, in some embodiments, the first direction is perpendicular to the second direction.

[0035] Optionally, the target object is a wafer, a circuit board, etc.

[0036] In the terms of this application, "a plurality" means greater than or equal to two, and can be two, three, four, five, six, etc.

[0037] In this embodiment, when the transmission base 151 is slidably connected to the mounting base 160 in the second direction, it drives the plurality of rotating wheels 152 to slide relative to the mounting base 160 in the second direction. At the same time, the transmission base 151 is slidably connected to the mounting base 160 in the first direction, driving the plurality of rotating wheels 152 to slide relative to the mounting base 160 in the first direction. During this process, the plurality of rotating wheels 152 are arranged around the outer periphery of the transmission rod 140 and respectively abut against the peripheral side wall of the transmission rod 140. The plurality of rotating wheels 152 will drive the transmission rod 140 to rotate relative to the rotating shaft 110, thereby driving the carrier 120 to rotate relative to the rotating shaft 110 to adjust the angle of the target object carried on the carrier 120. At the same time, a sliding friction force is generated between the plurality of rotating wheels 152 and the transmission rod 140, and the plurality of rotating wheels 152 rotate relative to the transmission rod 140 and the transmission base 151 under the action of the sliding friction force. In this embodiment, a part of the outer periphery of the rotating wheel 152 directly contacts and abuts against the peripheral side wall of the transmission rod 140. A sliding friction force is generated between the transmission rod 140 and the rotating wheel 152 during rotation, causing the rotating wheel 152 to rotate relative to the transmission rod 140. In other words, the sliding friction force generated between the outer periphery of the rotating wheel 152 and the peripheral side wall of the transmission rod 140 directly drives the relative rotation of the rotating wheel 152 and the transmission rod 140, reducing the consumption during the transmission of the acting force, or reducing the misalignment caused by the gap between the inner and outer circles of the rotating wheel 152 and improving the accuracy of adjusting the angle of the sample stage. The angle adjustment device 100 provided by the embodiment of the present application has high accuracy in adjusting the angle of the target object.

[0038] Preferably, the number of the rotating wheels 152 is four, and the four rotating wheels 152 are spaced apart relative to the center of the transmission base 151.

[0039] Optionally, along the arrangement direction of the connecting member 130 and the transmission mechanism 150, the rotating wheel 152 includes at least one rotating sub-wheel 1521 arranged in a stacked manner. The at least one rotating sub-wheel 1521 is independent of each other and both abut against the peripheral side wall of the transmission rod 140 and can rotate relative to the transmission rod 140.

[0040] It can be understood that at least one means one or more, and can be, but is not limited to, one, two, three, four or five, etc., to increase the contact area between the rotating wheel 152 and the transmission rod 140.

[0041] Please refer to Figure 5, in some embodiments, the transmission base 151 has a mounting groove 1511, the plurality of rotating wheels 152 are spaced apart in the mounting groove 1511 and respectively abut against the side walls of the mounting groove 1511, and the plurality of rotating wheels 152 enclose a setting space 1512. One end of the transmission rod 140 away from the connecting member 130 passes through the setting space 1512.

[0042] It can be understood that the mounting groove 1511 includes the setting space 1512.

[0043] In this embodiment, the plurality of rotating wheels 152 are spaced apart in the mounting groove 1511 and respectively abut against the side walls of the mounting groove 1511. In other words, the relative positions of the rotating wheels 152 in the mounting groove 1511 are fixed, but the rotating wheels 152 can rotate relative to the transmission base 151. When the transmission base 151 is slidably connected to the mounting seat 160 in the first direction and slidably connected to the mounting seat 160 in the second direction, it will drive the plurality of rotating wheels 152 to move in the first direction and move in the second direction relative to the mounting seat 160. Further, the plurality of rotating wheels 152 enclose a setting space 1512, and one end of the transmission rod 140 away from the connecting member 130 passes through the setting space 1512. One end of the connecting member 130 away from the transmission rod 140 is fixedly connected to the carrier 120. Then, during the process of the plurality of rotating wheels 152 moving in the first direction and moving in the second direction relative to the mounting seat 160, since one end of the connecting member 130 away from the transmission rod 140 is fixed, the connecting member 130 and the transmission rod 140 cannot move in the first direction or move in the second direction relative to the mounting seat 160, but rotate relative to the rotating shaft 110. Correspondingly, the plurality of rotating wheels 152 rotate relative to the transmission rod 140 and the transmission base 151 to reduce the resistance of the transmission rod 140 during the rotation process, and further drive the transmission rod 140 and the connecting member 130 to rotate relative to the rotating shaft 110 to adjust the angle of the carrier 120 and the target object carried on the carrier 120, thereby facilitating improving the accuracy of the angle adjustment device 100 for adjusting the rotation angle of the carrier 120.

[0044] In some embodiments, the transmission mechanism 150 further includes a plurality of mounting components 170. Each mounting component 170 is configured to rotatably mount one of the rotating wheels 152 to the transmission base 151. The mounting component 170 includes a first mounting member 171 and a second mounting member 172. The first mounting member 171 is located within the mounting groove 1511. The rotating wheel 152 is sleeved on the outer periphery of the first mounting member 171. The second mounting member 172 is disposed on a side of the transmission base 151 away from the mounting seat 160 and is respectively connected to the transmission base 151 and one end of the first mounting member 171 away from the bottom wall of the mounting groove 1511.

[0045] It can be understood that the number of the mounting components 170 is the same as the number of the rotating wheels 152. One mounting component 170 is used to set one rotating wheel 152, and different mounting components 170 are disposed on different rotating wheels 152.

[0046] In this embodiment, the first mounting member 171 is located within the mounting groove 1511, and the rotating wheel 152 is sleeved on the outer periphery of the first mounting member 171. When the transmission base 151 moves relative to the mounting seat 160 in the first direction and the second direction, and the transmission rod 140 rotates relative to the rotating shaft 110, the rotating wheel 152 can rotate relative to the transmission rod 140 with the first mounting member 171 as the rotating shaft 110, thereby reducing the resistance of the transmission rod 140 during the rotation process, further driving the transmission rod 140 and the connecting member 130 to rotate relative to the rotating shaft 110, so as to adjust the angle of the carrier 120 and the target object carried on the carrier 120, which is beneficial to improving the accuracy of the angle adjustment device 100 for adjusting the rotation angle of the carrier 120. Further, the second mounting member 172 is respectively connected to the mounting seat 160 and the first mounting member 171 to stably set the first mounting member 171 on the transmission base 151, so as to ensure that the rotating wheel 152 can rotate relative to the transmission rod 140, improving the smoothness of the angle adjustment device 100 for adjusting the angle of the carrier 120 and the target object carried on the carrier 120, and improving the service performance of the angle adjustment device 100.

[0047] In some embodiments, the transmission base 151 includes a first base 1513, a second base 1514, a first locking member 1515 and a second locking member 1516, the first base 1513 and the second base 1514 enclose the installation groove 1511; the first locking member 1515 is respectively penetrated through the first base 1513 and the second base 1514, the second locking member 1516 is spaced apart from the first locking member 1515, and is respectively penetrated through the first base 1513 and the second base 1514, the first locking member 1515 and the second locking member 1516 cooperate to lock the first base 1513 and the second base 1514.

[0048] It can be understood that the first base 1513 and the second base 1514 are separately provided.

[0049] In this embodiment, the first base 1513 and the second base 1514 are separately arranged and the first base 1513 and the second base 1514 enclose the installation groove 1511. Therefore, during the assembly process of the angle adjustment device 100, when the first locking member 1515 and the second locking member 1516 do not lock the first base 1513 and the second base 1514, the space of the installation groove 1511 is adjustable, which is convenient for installing the multiple rotating wheels 152 and the transmission rod 140, so as to improve the assembly efficiency of the angle adjustment device 100. Furthermore, the first locking member 1515 is respectively provided on the first base 1513 and the second base 1514, and the second locking member 1516 is respectively provided on the first base 1513 and the second base 1514. The first locking member 1515 and the second locking member 1516 cooperate to lock the first base 1513 and the second base 1514, thereby limiting the space of the installation slot 1511 and the setting space 1512. At the same time, the plurality of rotating wheels 152 surround the outer circumference of the transmission rod 140 and tightly abut against the transmission rod 140, so that when the transmission rod 140 rotates, the plurality of rotating wheels 152 rotate relative to the transmission rod 140, thereby improving the smoothness of the angle adjustment device 100 for adjusting the angle of the carrier 120 and the target object carried on the carrier 120, and improving the performance of the angle adjustment device 100.

[0050] See also Figure 6 In some embodiments, the end of the connecting member 130 away from the supporting member 120 has a first notch 131, a through hole 132 and a second notch 133 that are interconnected, and the through hole 132 is along the third direction (such as Figure 6As shown in the Z direction in the figure, it penetrates through the connecting member 130. The first notch 131 is located on the side of the through hole 132 close to the carrier 120, and the second notch 133 is located on the side of the through hole 132 facing away from the carrier 120; the transmission rod 140 includes a connected connecting portion 141 and a transmission portion 142. The connecting portion 141 is inserted into the through hole 132, and the transmission portion 142 is inserted into the installation space 1512. Among them, the third direction is the arrangement direction of the connecting member 130 and the transmission mechanism 150, and the third direction intersects with the first direction and the second direction respectively; the angle adjustment device 100 further includes a third locking member 180. The third locking member 180 is inserted into the end of the connecting member 130 facing away from the carrier 120 and is located on the side of the through hole 132 facing away from the carrier 120 for adjusting the size of the second notch 133.

[0051] It can be understood that the second notch 133 is located on the side of the through hole 132 facing away from the carrier 120 and penetrates through the side of the connecting member 130 facing away from the carrier 120.

[0052] It can be understood that at the end of the connecting member 130 facing away from the carrier 120, the connecting member 130 has opposite ends located on both sides of the second notch 133.

[0053] In this embodiment, the first notch 131, the through hole 132, and the second notch 133 are communicated in sequence. During the process of passing the connecting portion 141 of the transmission rod 140 through the through hole 132, the first notch 131 and the second notch 133 cooperate to make it easy for the connecting portion 141 to pass through the through hole 132, so as to improve the assembly efficiency of the angle adjustment device 100. Further, the third locking member 180 is passed through one end of the connecting member 130 away from the bearing member 120. In other words, the third locking member 180 passes through the opposite sides on both sides of the second notch 133 to reduce the size of the second notch 133, which is conducive to the clamping of the connecting portion 141 by the connecting member 130, so that the connecting portion 141 of the transmission rod 140 is stably arranged on the connecting member 130, and the transmission portion 142 of the transmission rod 140 is stably arranged in the installation space 1512 and abuts against the plurality of rotating wheels 152. When the transmission base 151 and the plurality of rotating wheels 152 move relative to the mounting seat 160 in the first direction and the second direction, the transmission portion 142 and the plurality of rotating wheels 152 abut against each other relatively, which can drive the connecting portion 141, the connecting member 130, and the bearing member 120 to rotate relative to the rotating shaft 110, so as to realize the angle adjustment of the bearing member 120 and the target object carried on the bearing member 120. The angle adjustment device 100 has good accuracy and stability in the angle adjustment of the bearing member 120.

[0054] Please refer to Figure 2 , in some embodiments, the angle adjustment device 100 further includes a driving mechanism 190. The driving mechanism 190 is arranged on the mounting seat 160. The driving mechanism 190 includes a driving member 191, a guiding member 192, and a sliding member 193. The driving member 191 is fixedly arranged on the mounting seat 160 and the power output shaft of the driving member 191 is connected to the guiding member 192. The guiding member 192 extends along the second direction. The sliding member 193 is sleeved on the outer periphery of the guiding member 192 and is threadedly connected to the guiding member 192. The transmission mechanism 150 is arranged on the sliding member 193 and can slide relative to the sliding member 193 in the first direction. The driving member 191 drives the guiding member 192 to rotate, thereby driving the sliding member 193 together with the transmission mechanism 150 to slide in the first direction.

[0055] In this embodiment, the driving member 191 provides power for the guiding member 192 to drive the guiding member 192 to rotate. The sliding member 193 is sleeved on the outer periphery of the guiding member 192 and is threadedly connected to the guiding member 192. When the guiding member 192 rotates, the sliding member 193 slides relative to the guiding member 192 in the second direction. Correspondingly, the transmission mechanism 150 is carried on the sliding member 193, and the transmission mechanism 150 moves in the second direction driven by the sliding member 193. Further, the transmission mechanism 150 can move relative to the sliding member 193 in the first direction. When the sliding member 193 drives the transmission mechanism 150 to slide and connect to the mounting seat 160 in the second direction, one end of the connecting member 130 away from the transmission mechanism 150 is fixedly connected to the bearing member 120 and is restricted, so that while the connecting member 130 rotates relative to the rotating shaft 110, the transmission mechanism 150 also moves in the first direction relative to the sliding member 193, thereby realizing the angle adjustment of the angle adjustment device 100 for the bearing member 120 and the target object carried on the bearing member 120.

[0056] Optionally, in some embodiments, the driving member 191 is a driving motor.

[0057] Please refer to Figure 2 、 Figure 7 and Figure 8 , in some embodiments, the angle adjustment mechanism further includes a guide rail assembly 210. The guide rail assembly 210 is located between the transmission base 151 and the sliding member 193. The guide rail assembly 210 includes a first guide rail member 211 and a second guide rail member 212 extending in the first direction. The first guide rail member 211 is disposed on the transmission base 151, and the second guide rail member 212 is disposed on the sliding member 193. The first guide rail member 211 and the second guide rail member 212 can be slidably connected in the first direction.

[0058] It can be understood that the first guide rail member 211 is disposed on one side of the transmission base 151 facing the sliding member 193, and the second guide rail member 212 is disposed on one side of the sliding member 193 facing the transmission base 151.

[0059] In this embodiment, the guide rail assembly 210 is located between the transmission base 151 and the sliding member 193. When the transmission base 151 moves relative to the mounting base 160 and the sliding member 193 in the first direction, relative sliding occurs between the first guide rail member 211 and the second guide rail member 212. The first guide rail member 211 and the second guide rail member 212 cooperate with each other to provide guiding for the movement of the transmission base 151 and the sliding member 193 in the first direction, and can reduce the resistance of the relative sliding of the transmission base 151 and the sliding member 193 in the first direction, improving the smoothness of the angle adjustment device 100 during the process of adjusting the angle of the carrier 120, so as to improve the accuracy of the angle adjustment device 100 for adjusting the angle of the carrier 120.

[0060] Optionally, the number of sets of the guide rail assembly 210 is two. The two sets of the guide rail assembly 210 are arranged at intervals between the transmission base 151 and the sliding member 193. The two sets of the guide rail assembly 210 cooperate with each other to realize the relative sliding of the transmission base 151 and the sliding member 193 in the first direction.

[0061] In some embodiments, the guide rail assembly 210 further includes a rolling member 213. The rolling member 213 includes a rolling plate 2131 and a plurality of balls 2132. The plurality of balls 2132 are rotatably arranged on the rolling plate 2131; the first guide rail member 211 has a first guide rail groove 2111, and the second guide rail member 212 has a second guide rail groove 2121. The rolling plate 2131 is clamped between the first guide rail member 211 and the second guide rail member 212. The plurality of balls 2132 are partially arranged in the first guide rail groove 2111 and partially arranged in the second guide rail groove 2121, and are rotatably connected to the first guide rail member 211 and the second guide rail member 212.

[0062] It can be understood that the rolling plate 2131 extends in the first direction.

[0063] It can be understood that the first guide rail groove 2111 extends in the first direction, and the second guide rail groove 2121 extends in the second direction.

[0064] In this embodiment, the rolling member 213 includes a rolling plate 2131 and a plurality of balls 2132. The rolling plate 2131 is clamped between the first guide member 211 and the second guide member 212. The plurality of balls 2132 can rotate relative to the rolling plate 2131, and some of the balls 2132 are arranged in the first guide groove 2111 of the first guide member 211, and some of the balls 2132 are arranged in the second guide groove 2121 of the second guide member 212. When the first guide member 211 and the second guide member 212 slide relative to each other in the first direction, the balls 2132 rotate relative to the rolling plate 2131, roll in the first guide groove 2111 relative to the first guide member 211, and roll in the second guide groove 2121 relative to the second guide member 212, which can further reduce the friction force of the relative sliding of the first guide member 211 and the second guide member 212 in the first direction, so as to further improve the accuracy of the relative sliding of the first guide member 211 and the second guide member 212 in the first direction, thereby facilitating the improvement of the accuracy of adjusting the relative angle of the carrier 120.

[0065] Please refer to Figure 9 , in some embodiments, the angle adjusting device 100 further includes a detection component 220. The detection component 220 includes a detection element 221 and a detected element 222. The detection element 221 is arranged on the mounting seat 160, and the detected element 222 is arranged on the sliding member 193. The detection element 221 is used to detect the signal of the detected element 222 to obtain the relative position of the sliding member 193 and the mounting seat 160 in the second direction.

[0066] In this embodiment, the detected element 222 is arranged on the sliding member 193. Then, when the sliding member 193 slides relative to the mounting seat 160 in the second direction, the detected element 222 also slides relative to the mounting seat 160 in the second direction. The detection element 221 is arranged on the mounting seat 160 and is used to detect the signal of the detected element 222 to obtain the relative position of the detected element 222 and the mounting seat 160 in the second direction, so as to obtain the relative position of the sliding member 193 and the mounting seat 160 in the second direction, which is convenient for the user to adjust the relative position of the sliding member 193 and the mounting seat 160, thereby adjusting the angle of the carrier 120.

[0067] Please refer to Figure 10, the present application also provides a wafer detection system 300, and the wafer detection system 300 includes: the angle adjustment device 100 provided by the present application and a probe assembly 310. The carrier 120 of the angle adjustment device 100 is used to carry a target object; the probe assembly 310 is used to detect the target object.

[0068] In this embodiment, the probe assembly 310 is disposed on one side of the carrier 120, and the tip of the probe assembly 310 faces the carrier 120. The target object is carried on the carrier 120. Before the probe assembly 310 detects the target object, the angle adjustment device 100 adjusts the rotation angle of the carrier 120 so that the target object carried on the carrier 120 moves to a test position, facilitating the probe assembly 310 to detect the target object. The angle adjustment device 100 of the embodiment of the present application has a high accuracy in adjusting the angle of the carrier 120, so as to accurately move the target object to the test position, thereby improving the detection performance of the wafer detection system 300.

[0069] Optionally, the target object may be, but is not limited to, a wafer, a circuit board, etc.

[0070] In the terms of the present application, when the target object moves to the test position, that is, the area of the target object to be detected is correspondingly arranged with the tip of the probe assembly 310, so that the tip of the probe assembly 310 makes physical contact with the target object and realizes electrical connection to test the performance of the target object.

[0071] When "embodiment" or "implementation manner" is mentioned in the present application, it means that the specific features, structures or characteristics described in combination with the embodiment may be included in at least one embodiment of the present application. The appearance of the phrase at various positions in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment mutually exclusive with other embodiments. Those skilled in the art explicitly and implicitly understand that the embodiments described in the present application can be combined with other embodiments. In addition, it should also be understood that the features, structures or characteristics described in each embodiment of the present application can be combined arbitrarily without contradiction to form another embodiment that does not depart from the spirit and scope of the technical solution of the present application.

[0072] Finally, it should be noted that the above implementation manners are only used to illustrate the technical solutions of the present application and not to limit them. Although the present application has been described in detail with reference to the above preferred implementation manners, those of ordinary skill in the art should understand that the technical solutions of the present application can be modified or equivalently replaced without departing from the spirit and scope of the technical solutions of the present application.

Claims

1. An angle adjustment device, characterized in that: The angle adjustment device comprises: Rotating shaft; A bearing member, the bearing member is rotatably connected to the rotating shaft and is used to bear a target object; A connecting member, one end of which is fixedly connected to the bearing member and is used to drive the bearing member to rotate around the rotating shaft; A transmission rod, the transmission rod is fixedly disposed on the connecting member and partially protrudes from one side of the connecting member; a transmission mechanism, the transmission mechanism being arranged on a side of the connecting member where the transmission rod is arranged, the transmission mechanism comprising a transmission base and a plurality of rotating wheels, the plurality of rotating wheels being arranged at intervals on a side of the transmission base facing the connecting member and the plurality of rotating wheels being rotatably connected to the transmission base, the plurality of rotating wheels being arranged around the outer circumference of the transmission rod and respectively abutting against the peripheral side walls of the transmission rod; and A mounting seat, wherein the mounting seat is used to install the transmission mechanism, and the transmission base can be slidably connected to the mounting seat along a first direction, and can be slidably connected to the mounting seat along a second direction, wherein the first direction and the second direction intersect, and the first direction is the arrangement direction of the bearing member, the connecting member and the transmission rod.

2. The angle adjustment device according to claim 1, characterized in that: The transmission base has a mounting groove, the plurality of rotating wheels are arranged at intervals in the mounting groove and respectively abut against the side walls of the mounting groove, the plurality of rotating wheels enclose a setting space, and one end of the transmission rod away from the connecting piece is passed through the setting space.

3. The angle adjustment device according to claim 2, characterized in that: The transmission mechanism also includes a plurality of mounting components, each of which is used to rotatably mount one of the rotating wheels on the transmission base, and the mounting components include a first mounting member and a second mounting member, the first mounting member is located in the mounting groove, the rotating wheel is sleeved on the outer periphery of the first mounting member, and the second mounting member is arranged on a side of the transmission base away from the mounting seat and is respectively connected to the transmission base and an end of the first mounting member away from the bottom wall of the mounting groove.

4. The angle adjustment device according to claim 2, characterized in that: The transmission base includes a first base, a second base, a first locking member and a second locking member, the first base and the second base enclose the installation groove; the first locking member is respectively penetrated through the first base and the second base, the second locking member is spaced apart from the first locking member, and is respectively penetrated through the first base and the second base, the first locking member and the second locking member cooperate to lock the first base and the second base.

5. The angle adjustment device according to claim 2, characterized in that: The end of the connecting member facing away from the bearing member has a first notch, a through hole and a second notch which are interconnected, the through hole passes through the connecting member along a third direction, the first notch is located on a side of the through hole close to the bearing member, and the second notch is located on a side of the through hole facing away from the bearing member; the transmission rod includes a connected connecting portion and a transmission portion, the connecting portion is inserted through the through hole, and the transmission portion is inserted through the setting space, wherein the third direction is the arrangement direction of the connecting member and the transmission mechanism, and the third direction intersects with the first direction and the second direction respectively; The angle adjustment device further includes a third locking member, which is penetrated through an end of the connecting member away from the supporting member and is located on a side of the through hole away from the supporting member, and is used to adjust the size of the second notch.

6. The angle adjustment device according to any one of claims 1 to 5, characterized in that: The angle adjustment device also includes a driving mechanism, which is arranged on the mounting seat. The driving mechanism includes a driving member, a guide member and a sliding member. The driving member is fixedly arranged on the mounting seat and a power output shaft of the driving member is connected to the guide member. The guide member extends along the second direction. The sliding member is sleeved on the outer periphery of the guide member and is threadedly connected to the guide member. The transmission mechanism is arranged on the sliding member and can slide relative to the sliding member along the first direction. The driving member drives the guide member to rotate, thereby driving the sliding member and the transmission mechanism to slide along the first direction.

7. The angle adjustment device according to claim 6, characterized in that: The angle adjustment device also includes a guide rail assembly, which is located between the transmission base and the sliding member. The guide rail assembly includes a first guide rail member and a second guide rail member extending along a first direction. The first guide rail member is arranged on the transmission base, and the second guide rail member is arranged on the sliding member. The first guide rail member and the second guide rail member can be slidably connected along the first direction.

8. The angle adjustment device according to claim 7, characterized in that: The guide rail assembly also includes a rolling member, which includes a rolling plate and a plurality of ball bearings, and the plurality of ball bearings can be rollably arranged on the rolling plate; the first guide rail member has a first guide rail groove, and the second guide rail member has a second guide rail groove, and the rolling plate is clamped between the first guide rail member and the second guide rail member, and the plurality of ball bearings are partially arranged in the first guide rail groove and partially arranged in the second guide rail groove, and can rollably connect the first guide rail member and the second guide rail member.

9. The angle adjustment device according to claim 6, characterized in that: The angle adjustment device also includes a detection component, which includes a detection element and a detected element. The detection element is arranged on the mounting seat, and the detected element is arranged on the sliding member. The detection element is used to detect the signal of the detected element to obtain the relative position of the sliding member and the mounting seat in the second direction.

10. A wafer inspection system, characterized in that: The wafer inspection system comprises: The angle adjustment device according to any one of claims 1 to 9, wherein the support member of the angle adjustment device is used to support a target object; and A probe assembly is used to detect the target object.

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