Automatic blanking and discharging mechanism for electroplating

Abstract

The utility model relates to an automatic blanking and discharging mechanism for electroplating, which relates to the technical field of electroplating production and comprises an inclined guide plate, a blanking conveyor belt is arranged at the bottommost end of the inclined guide plate, rod body assemblies for reducing the speed of electroplating materials are arranged on the inclined guide plate, and an angle adjusting assembly for adjusting the rod body assemblies is arranged between the rod body assemblies. The electroplating material is guided and decelerated through cooperation of the rod body assembly, that is, the angle of the rod body assembly is controlled through the angle adjusting assembly, so that when the angle of the lowermost end of the rod body assembly is small, the electroplating material is borne, and when the angle of the lowermost end of the rod body assembly is increased, discharging of the electroplating material is achieved; and in the process, the speed of the electroplating material can be reduced, so that the electroplating material can be moved to the discharging conveying belt at a relatively low speed, and the finished product quality of the electroplating material can be protected.

Description

Technical Field

[0001] The utility model relates to the technical field of electroplating production, in particular to an automatic blanking and discharging mechanism for electroplating. Background Art

[0002] Semiconductor electroplating is an electroplating process used to deposit metal layers on silicon wafers during semiconductor manufacturing. The blanking of semiconductor electroplating is usually carried out manually by the first worker in the blanking area under the electroplating line, and the second worker transports it into the material box. The temperature is relatively high near the drying box in the blanking area, and the working environment of the manual blanking worker is uncomfortable.

[0003] Therefore, in the patent document with the application number 202322211007.5, an automatic batching device applicable to automatic loading and unloading of electroplating lines is disclosed. The electroplating materials are automatically batched by the device, reducing the intervention of personnel in blanking the electroplating materials, thereby avoiding the problem of uncomfortable working environments for workers.

[0004] In the above technical solutions, conveyor belts are all required to achieve the blanking process of electroplating materials. The electroplating materials are transferred onto the conveyor belt to achieve automatic blanking of the electroplating materials. In this process, an inclined guiding plate is used to transfer the electroplating materials from the higher part of the guiding plate to the conveyor belt at the lower position. At this time, the electroplating materials slide on the guiding plate, and under the action of gravity, they impact the conveyor belt at a certain angle and moving speed, which is extremely likely to affect the quality of the electroplating materials. Summary of the Utility Model

[0005] The technical problem solved by the utility model is: to solve the problem in the prior art that when the electroplating materials slide on the guiding plate, the quality of the electroplating materials is affected due to the electroplating materials impacting the conveyor belt at a relatively high speed.

[0006] The utility model can be realized through the following technical solutions: an automatic blanking and discharging mechanism for electroplating, including an inclined guiding plate. A blanking conveyor belt is arranged at the lowest end of the inclined guiding plate. A rod body assembly for decelerating the electroplating materials is arranged on the inclined guiding plate, and an angle adjustment assembly for adjusting the angle of the rod body assembly is arranged between the rod body assemblies.

[0007] A further technical improvement of the utility model lies in that: the rod body assembly includes an intermediate rod body. A first rod body and a lower rod body are respectively arranged at both ends of the intermediate rod body, and the intermediate rod body is rotatably installed on a support base.

[0008] A further technical improvement of the utility model lies in that: there is a gap between the first rod body and the inclined guiding plate, and the lower rod body is closely attached to the inclined guiding plate.

[0009] A further technical improvement of the utility model lies in that: a deceleration rubber protrusion for buffering the electroplating materials is arranged on the side of the lower rod body.

[0010] A further technical improvement of the present utility model lies in that: the angle adjustment assembly includes an adjustment cylinder, the adjustment cylinder is fixedly connected to the support base, and an adjustment hinge plate is arranged at the output end of the adjustment cylinder. A rotationally arranged adjustment hinge rod is provided at one end of the adjustment hinge plate away from the adjustment cylinder, and the adjustment hinge rod is rotationally connected to the first rod body.

[0011] Compared with the prior art, the present utility model has the following beneficial effects:

[0012] 1. In this application, the cooperation of the rod body assembly is utilized to guide and slow down the electroplating material. That is, the angle of the rod body assembly is controlled by the angle adjustment assembly, so that when the angle at the lowest end of the rod body assembly is small, it is used to receive the electroplating material, and when the angle at the lowest end of the rod body assembly becomes larger, it is used to realize the feeding of the electroplating material. During this process, the speed of the electroplating material can be reduced, so that the electroplating material can move to the feeding conveyor belt at a smaller speed, thereby protecting the finished product quality of the electroplating material.

[0013] 2. In this application, by starting the adjustment cylinder, the height of the adjustment hinge plate is controlled, thereby controlling the end distance of the first rod body, so that the distance to the lowest end of the lower rod body can be adjusted, facilitating the stable feeding of the electroplating material. Therefore, in this application, the adjustment cylinder can be used to uniformly slow down and feed each electroplating material. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] For the convenience of those skilled in the art to understand, the present utility model will be further described below with reference to the accompanying drawings.

[0015] Figure 1 Schematic diagram of the relative positions of the angle adjustment assembly and the rod body assembly of the present utility model;

[0016] Figure 2 Schematic diagram of the structure of the deceleration guiding mechanism of the present utility model;

[0017] Figure 3 Schematic diagram of the position of the deceleration guiding mechanism of the present utility model.

[0018] In the figure: 1. Inclined guiding plate; 2. Deceleration guiding mechanism; 21. Rod body assembly; 211. First rod body; 212. Rotating base; 213. Intermediate rod body; 214. Lower rod body; 215. Deceleration rubber protrusion; 22. Angle adjustment assembly; 221. Cylinder mounting seat; 222. Support base; 223. Adjustment cylinder; 224. Adjustment hinge rod; 225. Adjustment hinge plate; 3. Feeding detection device; 4. Feeding conveyor belt; 5. Feeding conveyor roller. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0019] In order to further explain the technical means and effects adopted by the present invention to achieve the predetermined purpose of the utility model, the specific implementation method, structure, characteristics and effects of the present invention are described in detail below in combination with the accompanying drawings and preferred embodiments.

[0020] See also Figures 1-3 As shown, the automatic unloading and discharging mechanism for electroplating includes an inclined guide plate 1 for guiding the electroplating material, and guiding the electroplating material to a unloading conveyor belt 4, wherein the unloading conveyor belt 4 is guided by an unloading conveying roller 5, and a unloading detection device 3 for detecting the electroplating material is also arranged on the side of the unloading conveyor belt 4. When in use, the electroplating material is guided from the inclined guide plate 1 to the unloading conveyor belt 4, and in this process, the electroplating material is detected by the unloading detection device 3 to obtain electroplating material with higher finished quality. In this process, the present application also includes a deceleration guide mechanism 2, which is arranged on the inclined guide plate 1, and the deceleration guide mechanism 2 is used to decelerate the electroplating material sliding on the inclined guide plate 1 under the action of gravity, so as to avoid the phenomenon that the electroplating material hits the unloading conveyor belt 4 at a higher speed, causing the quality of the electroplating material to be affected.

[0021] In the present application, the deceleration guide mechanism 2 includes a rod body assembly 21 and an angle adjustment assembly 22, wherein the rod body assembly 21 is symmetrically arranged, and the rod body assembly 21 is divided into two groups. The angle of the rod body assembly 21 is controlled by the angle adjustment assembly 22, so that when the electroplating material moves on the inclined guide plate 1, the electroplating material is intermittently received by the rod body assembly 21, thereby reducing the sliding speed of the electroplating material, so that the electroplating material falls on the unloading conveyor belt 4 at a relatively slow speed to ensure that the electroplating material will not be subjected to a large impact.

[0022] Specifically, the rod body assembly 21 wraps the first rod body 211, the middle rod body 213 and the lower rod body 214, wherein the first rod body 211 and the lower rod body 214 are respectively located on both sides of the middle rod body 213, and there is a gap between the first rod body 211 and the inclined guide plate 1. The lower rod body 214 is tightly attached to the inclined guide plate 1, and is used to receive, guide and slow down the electroplating material. Therefore, a deceleration rubber protrusion 215 is fixed to the lower rod body 214. When the electroplating material is guided and slid on the inclined guide plate 1, the electroplating material falls on the deceleration rubber protrusion 215. At this time, the deceleration rubber protrusion 215 is used to slow down the electroplating material, and then the angle adjustment assembly 22 is used to control the angle of the bottom end of the lower rod body 214, so that the electroplating material can be controlled to fall from the adjacent deceleration rubber protrusion 215 until it falls on the unloading conveyor belt 4, so as to achieve a buffering function for the electroplating material.

[0023] Therefore, the middle rod bodies 213 are respectively rotatably mounted on the support base 222 through torsion springs. Thus, the angle adjustment assembly 22 includes an adjustment cylinder 223, wherein the adjustment cylinder 223 is mounted on the cylinder mounting seat 221, and the cylinder mounting seat 221 is fixedly connected to the support base 222. An adjustment hinge plate 225 is fixed to the output end of the adjustment cylinder 223. Two adjustment hinge rods 224 are symmetrically and rotatably arranged on both sides of the adjustment hinge plate 225. One end of the adjustment hinge rod 224 away from the adjustment hinge plate 225 is rotatably mounted on the first rod body 211. During use, the height of the adjustment hinge plate 225 is controlled by the adjustment cylinder 223, so that the rotation of the first rod body 211 under the action of the rotation base 212 can be controlled, thereby controlling the distance between the deceleration rubber protrusions 215 provided at the bottom of the lower rod body 214, and further controlling the distance at the lowermost end of the lower rod body 214, facilitating the realization of the automatic blanking function of the electroplating material. In this application, the electroplating material can be decelerated, resulting in a higher quality electroplating material.

[0024] When this utility model is in use, the electroplating material is guided from the inclined guide plate 1, and the deceleration guide mechanism 2 is used to decelerate the electroplating material. Subsequently, the electroplating material gradually contacts the blanking conveyor belt 4 at a lower speed, that is, it is guided onto the blanking conveyor belt 4. And during this process, the blanking detection device 3 is used to detect the electroplating material, obtaining electroplating material with a higher finished product quality.

[0025] When the deceleration guide mechanism 2 is started, the electroplating material is first guided by the inclined guide plate 1 and slides down on the inclined guide plate 1 under the action of gravity until the electroplating material impacts on the deceleration rubber protrusions 215 to buffer the speed of the electroplating material. Subsequently, the distance at the lowermost end of the lower rod body 214 gradually becomes larger, enabling the electroplating material to gradually separate from the deceleration rubber protrusions 215 and fall onto the blanking conveyor belt 4, realizing the blanking of the electroplating material.

[0026] When the distance at the lowermost end of the lower rod body 214 becomes larger, the height of the adjustment hinge plate 225 is controlled by the adjustment cylinder 223, so that the rotation of the first rod body 211 under the action of the rotation base 212 can be controlled, thereby controlling the distance between the deceleration rubber protrusions 215 provided at the bottom of the lower rod body 214, and further controlling the distance at the lowermost end of the lower rod body 214, facilitating the realization of the automatic blanking function of the electroplating material.

[0027] The above are only the preferred embodiments of the present utility model, and do not impose any formal restrictions on the present utility model. Although the present utility model has been disclosed above with the preferred embodiments, it is not intended to limit the present utility model. Any person skilled in the art can make some changes or modifications to equivalent embodiments of equivalent changes by using the above-disclosed technical content within the scope of the technical solution of the present utility model. However, as long as it does not depart from the content of the technical solution of the present utility model, any brief modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present utility model still fall within the scope of the technical solution of the present utility model.

Claims

1. An automatic material discharging mechanism for electroplating, comprising an inclined guide plate (1), wherein a material discharging conveyor belt (4) is arranged at the bottom end of the inclined guide plate (1), characterized in that: The inclined guide plate (1) is provided with a rod assembly (21) for reducing the speed of the electroplating material, and an angle adjustment assembly (22) for adjusting the rod assembly (21) is provided between the rod assemblies (21).

2. The automatic discharging mechanism for electroplating according to claim 1, characterized in that: The rod assembly (21) comprises an intermediate rod (213), the two ends of which are respectively provided with a first rod (211) and a lower rod (214), and the intermediate rod (213) is rotatably mounted on a support base (222).

3. The automatic discharging mechanism for electroplating according to claim 2, characterized in that: There is a gap between the first rod body (211) and the inclined guide plate (1), and the lower rod body (214) is tightly attached to the inclined guide plate (1).

4. The automatic discharging mechanism for electroplating according to claim 2, characterized in that: A deceleration rubber protrusion (215) for buffering the electroplating material is arranged on the side of the lower rod body (214).

5. The automatic discharging mechanism for electroplating according to claim 2, characterized in that: The angle adjustment assembly (22) comprises an adjustment cylinder (223), the adjustment cylinder (223) and the support base (222) are fixedly connected, and an adjustment hinge plate (225) is provided at the output end of the adjustment cylinder (223), an adjustment hinge rod (224) is rotatably provided at one end of the adjustment hinge plate (225) away from the adjustment cylinder (223), and the adjustment hinge rod (224) and the first rod body (211) are rotatably connected.

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