Cavity top cover overturning mechanism

Abstract

The utility model provides a cavity top cover overturning mechanism, which comprises a cavity, a top cover, a top cover and a top cover, the cavity comprises an opening, a mounting seat is arranged on the side edge of the cavity, and an adjusting component is arranged on the mounting seat; the transmission assembly comprises a rotating shaft and a gear assembly, the rotating shaft is rotationally connected to the mounting base, the gear assembly comprises at least two gears which are meshed with each other, one gear is fixedly connected with the rotating shaft, the other gear is connected with the adjusting assembly, and the adjusting assembly can drive the gear assembly to rotate or stop; and the cover body assembly is connected with the rotating shaft, and the cover body assembly can cover or open the opening. According to the embodiment of the utility model, the gear assembly, the rotating shaft and the adjusting assembly are combined to cover the cover body assembly or open the opening of the cavity, the gear assembly can play a role of a speed reducer, the structure is simple, compared with the use of electronic components, the structure is firmer, the components are not damaged, and the service life is longer.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor equipment, and particularly relates to a cavity top cover flipping mechanism. Background Art

[0002] In the field of semiconductor equipment manufacturing, especially in the field of vapor deposition equipment, various process cavities need to be opened for inspection or the interior of the cavity needs to be cleaned. The cavity cover is processed and formed by alloy materials and is generally quite heavy, weighing hundreds of catties in some cases.

[0003] In the prior art, when opening and closing the cavity, a cylinder is used to assist in the operation. However, the upper part of the cavity weighs about 100 KG, and it is very laborious for the cylinder to lift the cavity cover. The cylinder is prone to damage after long-term use or during the lifting process, and the operation is very dangerous. At the same time, during the opening and closing process, the upper part of the cavity is likely to fall, causing damage to both the cylinder and the cavity, posing a great safety hazard. Summary of the Invention

[0004] To solve at least one technical problem in the prior art, an embodiment of the utility model provides a cavity top cover flipping mechanism with safe operation and long service life. To achieve the above technical purposes, the technical solution adopted in the embodiment of the utility model is as follows:

[0005] An embodiment of the utility model provides a cavity top cover flipping mechanism, including:

[0006] A cavity, the cavity includes an opening, and an installation seat is provided on the side of the cavity, and an adjustment component is provided on the installation seat;

[0007] A transmission component, the transmission component includes:

[0008] A rotating shaft, rotatably connected to the installation seat,

[0009] A gear component, including at least two meshing gears, one gear is fixedly connected to the rotating shaft, and the other gear is connected to the adjustment component, and the adjustment component can drive the gear component to rotate or stop;

[0010] A cover body component, connected to the rotating shaft, and the cover body component can cover or open the opening. Further, the gear component includes:

[0011] Meshing first and second gears, the first gear is fixedly connected to the adjustment component;

[0012] Meshing third and fourth gears, the fourth gear is fixedly connected to the rotating shaft,

[0013] The second gear and the third gear are coaxially and fixedly connected.

[0014] Further, the mounting base includes:

[0015] A first mounting base, the rotating shaft is rotatably connected to the first mounting base, and the gear assembly is fixedly arranged on the first mounting base;

[0016] A second mounting base, arranged on the side of the cavity, and the first mounting base is fixedly connected to one side of the second mounting base close to the cover assembly.

[0017] Further, a plurality of first assembly holes are provided on the side of the cavity, a plurality of first mounting holes are provided on the second mounting base, and the positions of the first mounting holes correspond to those of the first assembly holes one by one;

[0018] The cavity top cover flipping mechanism further includes a plurality of mounting bolts, and any one of the mounting bolts passes through one of the first mounting holes and is threadedly connected to one of the first assembly holes.

[0019] Further, a protective cover is also included, the protective cover is fixedly arranged on the first mounting base, and the gear assembly is arranged in the protective cover.

[0020] Further, the adjusting assembly includes an adjusting handle, one end of the adjusting handle penetrates through the protective cover and is rotatably connected to the protective cover;

[0021] The gear assembly is arranged in the protective cover and is fixedly sleeved on the adjusting handle.

[0022] Further, a plurality of second mounting holes are also provided on the second mounting base, and the plurality of second mounting holes are arranged at intervals in the height direction;

[0023] A third mounting hole is provided on the cover assembly;

[0024] The adjusting assembly further includes a hydraulic rod, one end of the hydraulic rod is fixedly arranged in the second mounting hole, and the other end of the hydraulic rod is fixedly arranged in the third mounting hole.

[0025] Further, the cover assembly includes:

[0026] A connecting member, fixedly connecting the rotating shaft, and the third mounting hole is provided on the connecting member;

[0027] A cover body, connecting the connecting member and arranged between the connecting member and the cavity, and the third mounting hole is provided on the cover body.

[0028] Further, the connecting member includes:

[0029] A first vertical rod, one end of the first vertical rod is fixedly connected to one end of the rotating shaft;

[0030] A second vertical rod, one end of the second vertical rod is fixedly connected to the other end of the rotating shaft, and the third mounting hole is provided on the first vertical rod and / or the second vertical rod;

[0031] A cross bar, one end of the cross bar is fixedly connected to the first vertical rod and the other end is fixedly connected to the second vertical rod.

[0032] Further, there is a gap between the connecting member and the cover body, and the gap is adjustable;

[0033] The connecting member is provided with a first adjustment hole, and the cover body is provided with a second adjustment hole, and the positions of the second adjustment holes correspond to each other one by one;

[0034] The cavity top cover flipping mechanism further includes an adjustment bolt. A threaded section is provided at one end of the rod portion of the adjustment bolt away from the head of the adjustment bolt. The threaded section passes through the first adjustment hole and is threadedly connected to the second adjustment hole;

[0035] The diameter of the first adjustment hole is larger than the diameter of the rod portion of the adjustment bolt and smaller than the diameter of the head of the adjustment bolt.

[0036] The beneficial effects brought by the technical solution provided by the embodiment of the present invention are:

[0037] By combining a gear assembly, a rotating shaft and an adjustment assembly in the embodiment of the present invention, the opening of the cavity is covered or opened by the cover body assembly. The gear assembly can play the role of a speed reducer, with a simple structure. Compared with using electronic components, it is more reliable, there will be no damage to the components, and the service life is longer. Description of the Drawings

[0038] Figure 1 It is a schematic structural diagram of the cavity top cover flipping mechanism in the embodiment of the present invention.

[0039] Figure 2 It is a schematic structural diagram of the cavity top cover flipping mechanism in the embodiment of the present invention.

[0040] Figure 3 It is a schematic structural diagram of the cavity top cover flipping mechanism in the embodiment of the present invention. Detailed Embodiment

[0041] In order to make the purpose, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0042] In the description of the embodiments of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present utility model. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0043] In the description of the embodiments of the present utility model, it should be noted that unless otherwise clearly specified and limited, the terms "installation", "connection", "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can also be the communication inside two elements. It can be a wireless connection or a wired connection. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.

[0044] In addition, the technical features involved in different embodiments of the present utility model described below can be combined with each other as long as they do not conflict with each other.

[0045] The embodiments of the present utility model provide a cavity top cover flipping mechanism, including:

[0046] A cavity 1, the cavity 1 includes an opening, and a mounting seat 2 is provided on the side of the cavity 1, and an adjusting component 3 is provided on the mounting seat 2;

[0047] A transmission component 4, the transmission component 4 includes:

[0048] A rotating shaft 41, rotatably connected to the mounting seat 2,

[0049] A gear assembly 42, including at least two meshing gears, one gear is fixedly connected to the rotating shaft 41, and the other gear is connected to the adjusting component 3, and the adjusting component 3 can drive the gear assembly 42 to rotate or stop;

[0050] A cover body assembly 5, connected to the rotating shaft 41, and the cover body assembly 5 can cover or open the opening.

[0051] In a specific embodiment, as Figure 1 shown, the opening is provided above the cavity 1, and the mounting seat 2 is provided on the side.

[0052] Since the gear assembly 42 connects the adjusting assembly 3 and the rotating shaft 41, the rotating shaft 41 can be driven to rotate by rotating the gear assembly 42 through the adjusting assembly 3. Also, since the cover assembly 5 is connected to the rotating shaft 41 and is disposed above the cavity 1, the cover assembly 5 can be driven to cover or open the opening.

[0053] The number of the gear assemblies 42 is not limited. In a specific embodiment, the gear assembly 42 only includes two meshing gears, one gear is fixedly connected to the rotating shaft 41, and the other gear is fixedly connected to the adjusting assembly 3.

[0054] In another specific embodiment, the gear assembly 42 includes:

[0055] A first gear 421 and a second gear 422 that mesh with each other, and the first gear 421 is fixedly connected to the adjusting assembly 3;

[0056] A third gear 423 and a fourth gear 424 that mesh with each other, and the fourth gear 424 is fixedly connected to the rotating shaft 41,

[0057] The second gear 422 and the third gear 423 are coaxial and fixedly connected.

[0058] As Figure 2 shown, the first gear 421 being fixedly connected to the adjusting assembly 3 may be that the first gear 421 is welded to the adjusting assembly 3, or the first gear 421 may be tightly fitted over the adjusting assembly 3. Similarly, the connection between the fourth gear 424 and the rotating shaft 41 may be a welded connection or a tight fit connection.

[0059] Adjust the adjusting assembly 3 to drive the first gear 421 to rotate, and the first gear 421 drives the second gear 422 to rotate. Since the second gear 422 and the third gear 423 are coaxial and fixedly connected, the third gear 423 also rotates and drives the fourth gear 424 to rotate. Since the fourth gear 424 is sleeved on the rotating shaft 41, the rotating shaft 41 can be driven to rotate, thereby driving the cover assembly 5 to rotate.

[0060] It can be understood that the gear assembly 42 can function as a speed reducer. By changing the proportional relationship among the first gear 421, the second gear 422, the third gear 423, and the fourth gear 424, the rotational speed of the input to the gear assembly 42 is reduced, thereby reducing the working load required to rotate the cover assembly 5, reducing the working intensity and loss rate, and achieving the effect of labor saving. At the same time, the gear assembly 42 is fixedly connected to the rotating shaft 41, that is, the transmission among the gear assemblies 42 is gradually converted into the torque of the rotating shaft 41. Therefore, the output torque of the gear assembly 42 can also be increased to improve the rotational efficiency of the rotating shaft 41, achieving the effect of outputting a larger torque under the same load, and greatly reducing the intensity of manual work.

[0061] In this application, the specific configuration of the mounting seat 2 is not limited. In a specific embodiment, the mounting seat 2 includes:

[0062] A first mounting seat 21, the rotating shaft 41 is rotatably connected to the first mounting seat 21, and the gear assembly 42 is fixedly arranged on the first mounting seat 21;

[0063] A second mounting seat 22, arranged on the side of the cavity 1, and the first mounting seat 21 is fixedly connected to the side of the second mounting seat 22 close to the cover assembly 5.

[0064] Designing the mounting seat 2 as a split structure is beneficial to the transportation and installation of the mounting seat 2. As Figure 1 shown, the first mounting seat 21 is fixedly connected above the second mounting seat 22. The fixed connection method is not limited. For example, the first mounting seat 21 can be welded to the second mounting seat 22, or threaded holes can be provided on the first mounting seat 21 and the second mounting seat 22, and bolts can be inserted into the threaded holes to fixedly connect the first mounting seat 21 and the second mounting seat 22.

[0065] The second mounting seat 22 is arranged on the side of the cavity 1. In a specific embodiment, as shown in the figure, several first assembly holes are provided on the side of the cavity 1, and several first mounting holes are provided on the second mounting seat 22. The positions of the first mounting holes correspond to those of the first assembly holes one by one;

[0066] The cavity top cover flipping mechanism further includes several mounting bolts 221. Any one of the mounting bolts 221 passes through one of the first mounting holes and is threadedly connected to one of the first assembly holes, and the installation of the second mounting seat 22 can be completed.

[0067] Further, it further includes a protective cover 6 which is fixedly arranged on the first mounting seat 21, and the gear assembly 42 is arranged in the protective cover 6. The protective cover 6 can prevent dust, protect the cleanliness of the gear assembly 42, ensure the transmission effect of the gear assembly 42, extend the service life of the transmission assembly 4, and further extend the service life of the cavity top cover flipping mechanism.

[0068] The adjusting assembly 3 is arranged on the mounting seat 2. As Figure 3 shown, the adjusting assembly 3 includes an adjusting handle 31. One end of the adjusting handle 31 penetrates through the protective cover 6 and is rotatably connected to the protective cover 6;

[0069] The gear assembly 42 is arranged in the protective cover 6 and fixedly sleeved on the adjusting handle 31.

[0070] In a specific embodiment, the first gear 421 can be sleeved on the adjusting handle 31. During operation, by rotating the adjusting handle 31, the first gear 421 can be rotated, thereby driving the gear assembly 42 to rotate, and through the rotating shaft 41, the cover body assembly 5 can be opened or covered the opening. This structure is simple, and the position of the adjusting handle 31 is reasonable, which is beneficial for workers to operate to open or close the cover body assembly 5.

[0071] Further, a plurality of second mounting holes 222 are further arranged on the second mounting seat 22, and the plurality of second mounting holes 222 are arranged at intervals in the height direction;

[0072] A third mounting hole 51 is arranged on the cover body assembly 5;

[0073] The adjusting assembly 3 further includes a hydraulic rod 32. One end of the hydraulic rod 32 is fixedly arranged in the second mounting hole 222, and the other end of the hydraulic rod 32 is fixedly arranged in the third mounting hole 51.

[0074] The weight of the cover body assembly 5 is relatively large. Therefore, the hydraulic rod 32 can buffer the flipping of the cover body assembly 5 and play a role in auxiliary support, thereby improving the safety of the cover body assembly 5 when opening or covering the opening.

[0075] As Figure 1 shown, the upper end of the hydraulic rod 32 is arranged in the third mounting hole 51, and the lower end of the hydraulic rod 32 is arranged in the second mounting hole 222. Since a plurality of the second mounting holes 222 are arranged on the second mounting seat and the plurality of second mounting holes 222 are arranged at intervals in the height direction, the lower end of the hydraulic rod 32 can be inserted into the second mounting holes 222 at different heights. This structure can adjust the height of the hydraulic rod 32 and can also adapt to hydraulic rods 32 of different models.

[0076] Further, the cover assembly 5 includes:

[0077] A connecting member 52, fixedly connected to the rotating shaft 41, and the third mounting hole 51 is provided on the connecting member 52;

[0078] A cover body 53, connected to the connecting member 52 and disposed between the connecting member 52 and the cavity 1, and the third mounting hole 51 is provided on the cover body 53.

[0079] As Figure 1 shown, the connecting member 52 can ensure that the cover body 53 remains stable when opening or covering the opening, and avoid the phenomenon that the cover body 53 tilts during the flipping process, causing local collision or incomplete covering.

[0080] The specific configuration of the connecting member 52 is not limited. In a specific embodiment, as Figure 1 shown, the connecting member 52 includes:

[0081] A first vertical rod 521, one end of the first vertical rod 521 is fixedly connected to one end of the rotating shaft 41;

[0082] A second vertical rod 522, one end of the second vertical rod 522 is fixedly connected to the other end of the rotating shaft 41, and the third mounting hole 51 is provided on the first vertical rod 521 and / or the second vertical rod 522;

[0083] A cross bar 523, one end of the cross bar 523 is fixedly connected to the first vertical rod 521, and the other end is fixedly connected to the second vertical rod 522.

[0084] In this embodiment, one end of the cross bar 523 can be fixedly connected to the midpoint of the first vertical rod 521, and the other end is fixedly connected to the midpoint of the second vertical rod 522. When the rotating shaft 41 rotates, it can drive one end of the first vertical rod 521 and the second vertical rod 522 to rotate simultaneously. The cross bar 523 can ensure that the other ends of the first vertical rod 521 and the second vertical rod 522 are also on the same horizontal plane, thereby ensuring that the cover body 53 opens or covers the opening smoothly.

[0085] Further, there is a gap between the connecting member 52 and the cover body 53, and the gap is adjustable;

[0086] The connecting member 52 is provided with a first adjustment hole 524, and the cover body 53 is provided with a second adjustment hole, and the positions of the second adjustment holes correspond to each other;

[0087] The cavity top cover flipping mechanism also includes an adjusting bolt, and a threaded section is provided at one end of the rod of the adjusting bolt away from the head of the adjusting bolt, and the threaded section passes through the first adjusting hole 524 and is threadedly connected to the second adjusting hole;

[0088] The diameter of the first adjustment hole 524 is larger than the diameter of the adjusting bolt shank and smaller than the diameter of the adjusting bolt head.

[0089] like Figure 1 As shown, since the threaded section is threadedly connected to the second adjustment hole, the rod of the adjusting bolt is fixedly connected to the cover body 53, and the interval between the head of the adjusting bolt and the cover body 53 remains fixed. Since the aperture of the first adjustment hole 524 on the connecting member 52 is larger than the diameter of the rod of the adjusting bolt and smaller than the diameter of the head of the adjusting bolt, it can be understood that the connecting member 52 can slide on the rod of the adjusting bolt and move between the cover body 53 and the head of the adjusting bolt. Therefore, there is the interval between the connecting member 52 and the cover body 53, and when the cover assembly 5 covers the opening, the cover body 53 first covers the opening, and the connecting member 52 covers the opening later under the action of the hydraulic rod 32, during which the interval gradually decreases, and then the connecting member 52 contacts the cover body 53. This structure can avoid rigid collision and wear between the connecting member 52 and the cover body 53, thereby extending the service life of the cover assembly 5.

[0090] Finally, it should be noted that the above specific implementation methods are only used to illustrate the technical solution of the utility model rather than to limit it. Although the utility model has been described in detail with reference to examples, ordinary technicians in the field should understand that the technical solution of the utility model can be modified or replaced by equivalents without departing from the spirit and scope of the technical solution of the utility model, which should be included in the scope of the claims of the utility model.

Claims

1. A cavity cover flipping mechanism, characterized in that: include: A cavity (1), the cavity (1) comprising an opening, a mounting seat (2) being provided on a side of the cavity (1), and an adjustment component (3) being provided on the mounting seat (2); A transmission assembly (4), wherein the transmission assembly (4) comprises: A rotating shaft (41) is rotatably connected to the mounting seat (2). A gear assembly (42) comprising at least two gears meshing with each other, one of the gears being fixedly connected to the rotating shaft (41) and the other gear being connected to the adjusting assembly (3), wherein the adjusting assembly (3) is capable of driving the gear assembly (42) to rotate or stop; A cover assembly (5) is connected to the rotating shaft (41), and the cover assembly (5) is capable of covering or opening the opening.

2. The cavity cover flipping mechanism according to claim 1, characterized in that: The gear assembly (42) comprises: A first gear (421) and a second gear (422) meshing with each other, the first gear (421) being fixedly connected to the adjustment component (3); a third gear (423) and a fourth gear (424) meshing with each other, wherein the fourth gear (424) is fixedly connected to the rotating shaft (41), The second gear (422) and the third gear (423) are coaxial and fixedly connected.

3. The cavity cover flipping mechanism according to claim 1, characterized in that: The mounting seat (2) comprises: A first mounting seat (21), the rotating shaft (41) being rotatably connected to the first mounting seat (21), and the gear assembly (42) being fixedly arranged on the first mounting seat (21); The second mounting seat (22) is arranged on a side of the cavity (1), and the first mounting seat (21) is fixedly connected to a side of the second mounting seat (22) close to the cover assembly (5).

4. The cavity cover flipping mechanism according to claim 3, characterized in that: The side of the cavity (1) is provided with a plurality of first assembly holes, and the second mounting seat (22) is provided with a plurality of first mounting holes, and the positions of the first mounting holes correspond one to one with the positions of the first assembly holes; The cavity top cover flipping mechanism further comprises a plurality of mounting bolts (221), any of the mounting bolts (221) passing through one of the first mounting holes and being threadedly connected to one of the first assembly holes.

5. The cavity cover flipping mechanism according to claim 3, characterized in that: It also comprises a protective cover (6), wherein the protective cover (6) is fixedly arranged on the first mounting seat (21), and the gear assembly (42) is arranged in the protective cover (6).

6. The cavity cover flipping mechanism according to claim 5, characterized in that: The adjustment assembly (3) comprises an adjustment handle (31), one end of the adjustment handle (31) passes through the protective cover (6) and is rotatably connected to the protective cover (6); The gear assembly (42) is disposed in the protective cover (6) and is fixedly sleeved on the adjustment handle (31).

7. The cavity cover flipping mechanism according to claim 3, characterized in that: The second mounting seat (22) is further provided with a plurality of second mounting holes (222), and the plurality of second mounting holes (222) are arranged at intervals along the height direction; The cover assembly (5) is provided with a third mounting hole (51); The adjustment assembly (3) further comprises a hydraulic rod (32), one end of the hydraulic rod (32) being fixedly disposed in the second mounting hole (222), and the other end of the hydraulic rod (32) being fixedly disposed in the third mounting hole (51).

8. The cavity cover flipping mechanism according to claim 7, characterized in that: The cover assembly (5) comprises: A connecting member (52) fixedly connected to the rotating shaft (41), the connecting member (52) being provided with the third mounting hole (51); A cover body (53) is connected to the connecting piece (52) and is arranged between the connecting piece (52) and the cavity (1).

9. The cavity cover flipping mechanism according to claim 8, characterized in that: The connecting member (52) comprises: A first vertical rod (521), one end of the first vertical rod (521) being fixedly connected to one end of the rotating shaft (41); a second vertical rod (522), one end of the second vertical rod (522) being fixedly connected to the other end of the rotating shaft (41), and the third mounting hole (51) being provided on the first vertical rod (521) and / or the second vertical rod (522); A cross bar (523), one end of the cross bar (523) being fixedly connected to the first vertical bar (521), and the other end of the cross bar (523) being fixedly connected to the second vertical bar (522).

10. The cavity cover flipping mechanism according to claim 8, characterized in that: A gap is provided between the connecting member (52) and the cover body (53), and the gap is adjustable; The connecting member (52) is provided with a first adjustment hole (524), and the cover body (53) is provided with a second adjustment hole, and the positions of the first and second adjustment holes correspond one to one; The cavity top cover flipping mechanism also includes an adjusting bolt, wherein the end of the rod of the adjusting bolt away from the adjusting bolt head is provided with a threaded section, the threaded section passes through the first adjusting hole (524) and is threadedly connected to the second adjusting hole; The hole diameter of the first adjustment hole (524) is larger than the diameter of the adjustment bolt shank and smaller than the diameter of the adjustment bolt head.

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