Auxiliary tool for installing electrode connector of single crystal furnace

Abstract

According to the auxiliary tool for installing the single crystal furnace electrode connector, the connector is used for connecting an electrode graphite column and a heater of the single crystal furnace, the auxiliary tool comprises a supporting rod extending in the radial direction of the single crystal furnace, clamping seats are arranged at the two ends of the supporting rod, and each clamping seat comprises two clamping plates parallel to the supporting rod; a clamping space for accommodating the connector is formed by the clamping plates, the top of the clamping space is communicated with the bottom of the clamping space, and the two sides of the connector are clamped with the clamping plates, so that the installation efficiency and the accuracy of the single crystal furnace are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnace installation, and specifically relates to an auxiliary tool for installing an electrode connector of a single crystal furnace. Background Art

[0002] In a Czochralski single crystal furnace, the thermal field components are important components. The thermal field components include a heat preservation member, a graphite support member, and a graphite heating system. Among them, the graphite heating system includes a heater, two electrode graphite columns, and a connector. The two electrode graphite columns are used to connect the metal electrodes of the furnace platform power supply system and are evenly spaced along the circumferential direction of the single crystal furnace. The connector is used to connect the electrode graphite column and the heater. During the installation of the single crystal furnace, the thermal field heating system must be installed accurately and efficiently to provide a stable energy source for the actual crystal pulling production process.

[0003] Generally, the single crystal furnace thermal field system follows the installation principle from bottom to top, that is, after the electrode graphite columns are connected and locked, the installation of the connector and the heater is carried out. Usually, the electrode bolt holes will be exposed, and then the connector and the heater are fixed. The basic operation in this case is: first, fix and lock the electrode graphite columns, then semi-lock the connection to the electrode graphite columns, place the heater on the connector, adjust the positions of the heater and the connector to make them fully contact and fit, and then lock the bolts between the electrode graphite columns and the connector and the bolts between the heater and the connector.

[0004] However, in the case where the space of the furnace platform is limited, the structures of the connector and the heater are as Figure 4 shown. It is only possible to first lock the connector and the electrode graphite column, and then connect the connector and the heater. The connector and the heater are connected by bolts, so the threaded holes on the connector need to correspond to the threaded holes on the heater. During the actual installation process, there are deviations between the connector and the heater, and the heater needs to be installed after multiple corrections, that is, the installation process is time-consuming and the installation accuracy is low. Summary of the Utility Model

[0005] In order to improve the installation efficiency of the electrode graphite column, the connector, and the heater, the utility model provides an auxiliary tool for installing an electrode connector of a single crystal furnace.

[0006] In order to achieve the above purpose, the specific solution adopted by the utility model is: an auxiliary tool for installing an electrode connector of a single crystal furnace, the connector is used to connect the electrode graphite column and the heater of the single crystal furnace, the auxiliary tool includes a support rod extending along the radial direction of the single crystal furnace, and clamping seats are arranged at both ends of the support rod. The clamping seat includes two clamping plates parallel to the support rod, and the clamping plates form a clamping space for accommodating the connector. The top and bottom of the clamping space are through, and both sides of the connector are clamped with the clamping plates.

[0007] As an optimized solution for the above-mentioned auxiliary tooling for installing the electrode connector of the single crystal furnace: One end of the two clamping plates away from the support rod is connected by a connecting rod, and the connecting rod is lapped on the upper surface of the connector.

[0008] As another optimized solution for the above-mentioned auxiliary tooling for installing the electrode connector of the single crystal furnace: One end of the two clamping plates close to the support rod is connected by a connecting plate, and the connecting plate is perpendicular to the clamping plate and fixedly connected to the support rod.

[0009] As another optimized solution for the above-mentioned auxiliary tooling for installing the electrode connector of the single crystal furnace: The bottom of the connecting plate has a stepped surface with an opening facing away from the support rod, and the stepped surface is stuck on the surface of the connector.

[0010] As another optimized solution for the above-mentioned auxiliary tooling for installing the electrode connector of the single crystal furnace: The bottom position of the connecting plate is higher than the upper end surface of the clamping plate.

[0011] As another optimized solution for the above-mentioned auxiliary tooling for installing the electrode connector of the single crystal furnace: The bottom of the connecting plate is provided with an extension part extending towards the clamping plate and fixedly connected to the clamping plate.

[0012] As another optimized solution for the above-mentioned auxiliary tooling for installing the electrode connector of the single crystal furnace: The central position of the support rod has a bent part, forming an avoidance area for avoiding the crucible rod of the single crystal furnace.

[0013] As another optimized solution for the above-mentioned auxiliary tooling for installing the electrode connector of the single crystal furnace: The central position of the support rod is provided with an avoidance hole for the crucible rod of the single crystal furnace to pass through.

[0014] As another optimized solution for the above-mentioned auxiliary tooling for installing the electrode connector of the single crystal furnace: The electrode graphite column is a cylindrical structure, and an installation hole for installing the connector is opened at the top end of the electrode graphite column.

[0015] As another optimized solution for the above-mentioned auxiliary tooling for installing the electrode connector of the single crystal furnace: The connector and the electrode graphite column are connected by fixing bolts, a stepped hole is opened on the connector, and the fixing bolts pass through the stepped hole and extend into the installation hole.

[0016] Compared with the prior art, the present utility model has the following beneficial effects:

[0017] The present utility model provides an auxiliary tooling for installing the electrode connector of the single crystal furnace, which can ensure that the connector is symmetrically fixed on the electrode graphite column, ensure the smooth installation of the heater and the connector, and improve the installation efficiency and accuracy of the single crystal furnace. Description of the Drawings

[0018] Figure 1 is a schematic structural view of the present utility model;

[0019] Figure 2 is a schematic structural view during the use of the present utility model;

[0020] Figure 3 is a schematic structural view of the support rod in Embodiment 3;

[0021] Figure 4 is the structure of the connector and the heater when the space on the furnace platform is limited;

[0022] Reference numerals: 1, support rod; 101, avoidance hole; 102, bent portion; 103, avoidance area; 2, card seat; 201, clamping plate; 202, connecting rod; 203, connecting plate; 204, lapping surface; 205, limiting surface; 3, clamping space; 4, connector; 401, stepped hole; 5, electrode graphite column; 501, mounting hole. Detailed implementation manners

[0023] The technical solutions of the present utility model will be further elaborated in detail below in conjunction with specific embodiments. For parts that are not detailedly described and disclosed in the following embodiments of the present utility model, they should all be understood as the prior art known or should be known to those skilled in the art.

[0024] Embodiment 1

[0025] An auxiliary tool for installing the electrode connector 4 of a single crystal furnace. The connector 4 is used to connect the electrode graphite column 5 and the heater of the single crystal furnace. As Figure 2 shown, the electrode graphite column 5 is a cylindrical structure. A through hole for connecting with the electrode is provided at the bottom end of the electrode graphite column 5, and a mounting hole 501 for installing the connector 4 is provided at the top end of the electrode graphite column 5. The connector 4 is a stepped structure. A stepped hole 401 is provided on the upper surface at the lower position of the connector 4. The connector 4 and the electrode graphite column 5 are connected by a fixing bolt. The bottom of the fixing bolt passes through the stepped hole 401 and extends into the mounting hole 501; the upper surface at the higher position of the connector 4 is connected to the heater, that is, a threaded hole for installing the heater is provided on the upper surface at the higher position of the connector 4.

[0026] As Figure 1 shown, the auxiliary tool includes a support rod 1 extending along the radial direction of the single crystal furnace. Card seats 2 are provided at both ends of the support rod 1. The card seat 2 includes two clamping plates 201 parallel to the support rod 1. The extending direction of the clamping plate 201 is parallel to the support rod 1. The clamping plate 201 is a rectangular plate-like structure and is fixedly connected to the support rod 1. A clamping space 3 for accommodating the connector 4 is formed between the two clamping plates 201. The top and bottom of the clamping space 3 are communicated, and both sides of the connector 4 are clamped with the clamping plate 201. In this embodiment, as Figure 1As shown, the front sidewall of the connector 4 abuts against the sidewall of the front clamping plate 201, and the rear sidewall of the connector 4 abuts against the sidewall of the rear clamping plate 201.

[0027] The usage method of this auxiliary tooling: Install the electrode graphite column 5 at the bottom of the single crystal furnace and lock it; Since the connector 4 needs to be installed in cooperation with the heater, it is necessary to ensure that the connector 4 is symmetrically arranged along the center of the single crystal furnace, and one sidewall of the connector 4 is in a parallel state. Therefore, when installing the connector 4, the auxiliary tooling moves downward from above the connector 4, so that the connector 4 enters from the bottom of the clamping space 3, and the two clamping plates 201 clamp both sides of the connector 4 to ensure that the two connectors 4 are arranged opposite to each other. At this time, tighten the fixing bolts between the connector 4 and the electrode graphite column 5 to complete the connection between the connector 4 and the electrode graphite column 5. After removing the auxiliary tooling, directly install the heater on the connector 4, without the need to repeatedly adjust the installation position of the connector 4, improving the installation efficiency and accuracy of the single crystal furnace.

[0028] The above is the basic implementation manner of the present utility model. Further improvements, optimizations and limitations can be made on this basis to obtain the following various embodiments:

[0029] Embodiment 2

[0030] This embodiment is an improved scheme of the auxiliary tooling for installing the electrode connector 4 of the single crystal furnace based on Embodiment 1. Its main structure is the same as that of Embodiment 1. The improvement lies in that: the ends of the two clamping plates 201 far from the support rod 1 are connected by a connecting rod 202. The connecting rod 202 is located at the top of the clamping space 3. The connecting rod 202 is a long rod-shaped structure and the cross-section of the connecting rod 202 is square. The two ends of the connecting rod 202 are respectively connected to the two clamping plates 201. The connection method between the connecting rod 202 and the clamping plate 201 can be welding, bolt connection or integral connection. In this embodiment, the connection method between the connecting rod 202 and the clamping plate 201 is integral connection; the lower surface of the connecting rod 202 overlaps on the upper surface of the connector 4.

[0031] The ends of the two clamping plates 201 close to the support rod 1 are connected by a connecting plate 203. The bottom position of the connecting plate 203 is higher than the upper end surface of the clamping plate 201. The connecting plate 203 is perpendicular to the clamping plate 201 and extends upward from the clamping plate 201, and the connecting plate 203 is fixedly connected to the support rod 1, and the connection method between the two is welding; the top end surface of the connecting plate 203 is flush with the upper surface of the support rod 1.

[0032] As Figure 2As shown, the bottom of the connecting plate 203 has a step surface with an opening facing the side away from the support rod 1, and the step surface is stuck on the surface of the connector 4. The step surface includes a lap surface 204 lapped on the upper surface of the connector 4 and a limiting surface 205 fitted with the right side wall of the connector 4, so as to prevent the auxiliary tooling from moving radially along the single crystal furnace and causing the connector 4 to be installed misaligned.

[0033] The connection method of the connecting plate 203 and the clamping plate 201 is that the bottom of the connecting plate 203 is provided with an extension part extending toward the clamping plate 201 and fixedly connected to the clamping plate 201. There are two extension parts and they correspond to the clamping plates 201 one by one. One end of the extension part is fixedly connected to the top of the clamping plate 201, and the connection method of the two is welding; the other end of the extension part is connected to the bottom of the connecting plate 203, and the connection method of the two is welding. The extension part is a rectangular rod-shaped structure, and the side wall of the extension part close to the connecting rod 202 is flush with the limiting surface 205, the side wall of the extension part away from the connecting rod 202 is flush with the edge of the clamping plate 201, the side wall of the extension part close to the clamping space 3 is flush with the inner side wall of the clamping plate 201, and the side wall of the extension part away from the clamping space 3 is flush with the outer side wall of the clamping plate 201.

[0034] Example 3

[0035] This embodiment is an improved solution of auxiliary tooling for installing the single crystal furnace electrode connector 4 based on the embodiment 1. Its main structure is the same as that of the embodiment 1. The improvement is as follows: Figure 3 As shown, the support rod 1 has a bent portion 102 at the center thereof, forming an escape zone 103 for escaping the crucible rod of the single crystal furnace.

[0036] Example 4

[0037] This embodiment is an improved solution of auxiliary tooling for installing the single crystal furnace electrode connector 4 based on the embodiment 1. Its main structure is the same as that of the embodiment 1. The improvement is as follows: Figure 1 As shown, a avoidance hole 101 for the crucible rod of the single crystal furnace to pass through is opened at the center of the support rod 1.

[0038] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An auxiliary tool for installing a single crystal furnace electrode connector, wherein the connector (4) is used to connect the electrode graphite column (5) and the heater of the single crystal furnace, characterized in that: The auxiliary tooling comprises a support rod (1) extending radially along the single crystal furnace, a clamping seat (2) is arranged at both ends of the support rod (1), the clamping seat (2) comprises two clamping plates (201) parallel to the support rod (1), and the clamping plates (201) form a clamping space (3) for accommodating a connector (4), the top and bottom of the clamping space (3) are connected, and the two sides of the connector (4) are clamped to the clamping plates (201).

2. The auxiliary tooling for installing a single crystal furnace electrode connector according to claim 1, characterized in that: The ends of the two clamping plates (201) away from the support rod (1) are connected via a connecting rod (202), and the connecting rod (202) overlaps the upper surface of the connector (4).

3. The auxiliary tooling for installing a single crystal furnace electrode connector according to claim 1, characterized in that: The two clamping plates (201) are connected at one end close to the support rod (1) via a connecting plate (203), and the connecting plate (203) is perpendicular to the clamping plates (201) and fixedly connected to the support rod (1).

4. The auxiliary tooling for installing a single crystal furnace electrode connector according to claim 3, characterized in that: The bottom of the connecting plate (203) has a step surface with an opening facing the side away from the support rod (1), and the step surface is clamped on the surface of the connector (4).

5. The auxiliary tooling for installing a single crystal furnace electrode connector according to claim 3, characterized in that: The bottom of the connecting plate (203) is located higher than the upper end surface of the clamping plate (201).

6. The auxiliary tooling for installing a single crystal furnace electrode connector according to claim 5, characterized in that: The bottom of the connecting plate (203) is provided with an extension portion extending towards the clamping plate (201) and fixedly connected to the clamping plate (201).

7. The auxiliary tooling for installing a single crystal furnace electrode connector according to claim 1, characterized in that: The support rod (1) has a bent portion (102) at the center thereof, forming an escape zone (103) for escaping a single crystal furnace crucible rod.

8. The auxiliary tooling for installing a single crystal furnace electrode connector according to claim 1, characterized in that: A avoidance hole (101) for the single crystal furnace crucible rod to pass through is provided at the center of the support rod (1).

9. The auxiliary tooling for installing a single crystal furnace electrode connector according to claim 1, characterized in that: The electrode graphite column (5) is a cylindrical structure, and a mounting hole (501) for mounting the connector (4) is provided at the top of the electrode graphite column (5).

10. The auxiliary tooling for installing a single crystal furnace electrode connector according to claim 9, characterized in that: The connector (4) is connected to the electrode graphite column (5) via a fixing bolt. A stepped hole (401) is provided on the connector (4), and the fixing bolt passes through the stepped hole (401) and extends into the mounting hole (501).

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